JP2001350101A - Lens magnification detector and focus detector - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a lens magnification detector which can recognize the magnification of an objective lens and a focus detector. SOLUTION: The lens magnification detector, which is applied to a microscopic device having a stage for supporting an object to be observed and a moving mechanism for moving this stage and detects the magnification of the objective lens of this microscopic device, has an irradiation means which irradiates the object to be observed with a prescribed light in the direction of the stage across the objective lens, a detecting means which detects the change in the state of the luminous flux formed by the reflected light from the stage or the object to be observed which is supported thereon, and a movement control means which controls the stage to move the same in the optical axis direction of the objective lens by driving the moving mechanism. Generally, if the magnification of the objective lens varies, the way of the change in the state of the luminous flux detected by the detecting means varies and therefore a magnification acquiring means references the change in the state of the luminous flux detected by the detecting means during the operation of the movement control means and determines the magnification of the objective lens in accordance with this change in the state.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is applied to a microscope apparatus having a stage for supporting an object to be observed and a moving mechanism for moving the stage, and detects a magnification of an objective lens of the microscope apparatus. The present invention relates to a device and a focus detection device that detects a focus adjustment state of the microscope device.

[0002]

2. Description of the Related Art FIG. 6 is a diagram showing the overall configuration of a conventional microscope apparatus 100. In addition, this microscope apparatus 100
An epi-illumination optical system for illuminating the observation object 100A from the objective lens 102 side is a microscope apparatus to which the epi-illumination system is applied, and the AF apparatus 101 is an epi-illumination type AF apparatus adapted to the microscope apparatus.

The microscope apparatus 100 includes a stage 104,
Objective lens 10 for forming an enlarged image on stage 104
2. A moving mechanism 105 for moving the eyepiece 103 and the moving stage 104 in the Z direction (the optical axis direction of the objective lens 102), and a moving mechanism 105 according to an AF signal (described later).
And a focus adjustment device (AF device) 101 that irradiates AF light onto the stage 104 via the objective lens 102 and generates an AF signal based on the reflected light from the stage 104, and the like. ing.

[0004] The microscope device 100 includes an input unit 10.
8 is provided externally (or internally), and the operator can input necessary information, for example, the objective lens 10 through the input unit 108.
Magnification information indicating a magnification of 2 can be registered in the apparatus. A focus adjustment process (AF
In the processing), the magnification information registered in this manner is used.

FIG. 7 shows the structure of the AF device 101 and the AF device.
It is a figure showing the principle of processing. FIG. 7A,
(B) and (c) show the objective lens 102, respectively.
100x objective lens 102a, 50x objective lens 102
b shows a state when the 10 × objective lens 102c is used.

First, the AF device 101 applies a predetermined focus detection light (AF light) through the objective lens 102 to the object 10 to be observed.
Outgoing optical system 101a for irradiating 0A, objective lens 102
-Observed object 100A-AF via objective lens 102
CCD sensor 101b (for example, a CCD line sensor) for receiving light, emission optical system 101a, and CCD sensor 10
An AF circuit unit 101d that drives the 1b and generates an AF signal based on the output of the CCD sensor 101b, an AF control unit 101c that performs various settings in the AF circuit unit 101d, and the like.

In the AF device 101, the position of the objective lens 102 and the A
The relationship between the state of the F light and the position of the CCD sensor 101b is adjusted in advance, and when the surface of the observation target 100A is at the in-focus position, the luminous flux of the AF light incident on the CCD sensor 101b is equal to the CCD sensor 101b. When the surface of the object to be observed 100A is not at the in-focus position, the luminous flux of the AF light is shifted from the center of the CCD sensor 101b by a distance corresponding to the shift amount (defocus amount) from the in-focus position. Distributed at shifted positions.

[0008] The AF circuit section 101d includes a CCD sensor 10
The shift amount (light change signal) of the light beam is detected from the output signal 1b, the defocus amount is acquired from the shift amount, and an AF signal (drive voltage) having a value corresponding to the defocus amount is generated. To the stage drive unit 106. The stage driving unit 106 controls the A through the stage moving mechanism 105
The stage 104 is displaced by a distance according to the F signal.
As a result, the stage 104 is displaced so that the defocus amount becomes zero. Further, the operation of the AF circuit unit 101d is repeated until the defocus amount becomes completely zero (that is, the position of the stage 104 is feedback-controlled). The above processing is the focus adjustment processing (AF processing)
It is.

Incidentally, the microscope apparatus 100 is not limited to using one objective lens 102, but a plurality of objective lenses having different magnifications (for example, 100 × objective lenses 102a, 50a as shown in FIG. 7). Double objective lens 1
02b, one of the 10 × objective lenses 102c) is selectively used by the operator. However, since the focal lengths are different between the objective lenses having different magnifications, the shift amount of the AF light beam on the CCD sensor 101b increases as the magnification increases, even if the defocus amount is the same.

As apparent from comparison of FIGS. 7 (a), 7 (b) and 7 (c), the shift amount of the light beam for the 100 × objective lens 102a, the shift amount of the light beam for the 50 × objective lens 102b, The shift amount of the luminous flux for the 10 × objective lens 102c depends on the lens magnification.
That is, within the AF circuit section 101d, the defocus amount-light change signal characteristic (hereinafter, referred to as "light change signal characteristic") differs depending on the lens magnification.

The AF control unit 10 of the AF device 101
1c, as an initial setting process, sets a signal amplification factor in the AF circuit unit 101d according to the above-mentioned magnification information registered in advance, thereby correcting a difference in light change signal characteristics due to a lens magnification, and A predetermined “defocus amount-AF signal characteristic” (hereinafter, referred to as “AF signal characteristic”) is given to the unit 101c.

The AF signal characteristic is such that the AF signal is set to an appropriate value corresponding to the actual defocus amount, that is, the displacement applied to the stage 104 during feedback control is substantially equal to the inverted value of the actual defocus amount. It is. As a result, an appropriate AF process for ensuring that the defocus amount approaches 0 regardless of the lens magnification.

[0013]

As is apparent from the above,
In the conventional microscope apparatus 100, in order to normally operate the AF apparatus 101, an operator needs to input magnification information indicating which magnification objective lens is used to the apparatus side.

However, the operator may erroneously input the magnification information. For example, it is assumed that magnification information indicating that the lens magnification is 100 times in spite of the fact that the lens magnification is 10 times is actually input. At this time, the correction performed by the AF control unit 101c corresponds to the light change signal characteristic shown in FIG. 7A, so that the AF signal characteristic for displacing the stage 104 smaller than the actual defocus amount is changed. Will be granted. As a result, there is a problem that the time required for the defocus amount to become 0 is extremely prolonged even after a long time.

On the other hand, it is assumed that magnification information indicating that the lens magnification is 10 times although the lens magnification is actually 100 times is input. The correction performed by the AF control unit 101c at this time is as shown in FIG.
Since it corresponds to the light change signal characteristic shown in (c), an AF signal characteristic that displaces the stage 104 more than the actual defocus amount is given. As a result, there is a problem that the defocus amount does not become 0 even after a long time, and the stage 104 continues to vibrate.

In any case, if magnification information is erroneously input,
An appropriate AF signal characteristic is not provided to the AF circuit unit 101d, and an appropriate AF process is not performed. Incidentally, the microscope device 100 is provided with a revolver sensor for detecting the address of the revolver 109, and when the AF device 101 can detect in which position the mounted objective lens is used, the operator Is lens position information indicating which objective lens is attached to which position of the revolver 109. The AF device 101 acquires the magnification information from the lens position information and the revolver address. In this case, however, if the operator inputs the lens position information incorrectly, proper AF processing cannot be performed.

Further, the AF device 101 also adjusts the AF origin in accordance with characteristics unique to each objective lens, and also uses magnification information or lens position information at that time.
In other words, between different objective lenses, even if the magnification is the same, due to deviation of the core position due to manufacturing errors, etc.
Since the AF signal when the defocus amount is 0 (hereinafter referred to as “AF origin”) is not always 0, the deviation amount of the AF origin of each objective lens is measured in advance at the time of shipment or the like, and the information is obtained. It is stored in any part of the microscope device 100. When the AF apparatus 101 specifies the objective lens from the magnification information or the lens position information input by the operator during the initial setting processing, the AF apparatus 101 shifts the light change signal based on the information stored in advance and sets the AF origin. The adjustment is made.

Also at this time, if magnification information or lens position information is erroneously input, an AF signal characteristic shifted from the AF origin is given. As a result, there arises a problem that the stage 104 stops at a position shifted from the state of the defocus amount 0. That is, conventionally, there has been a possibility that the AF processing may not be performed properly or the accuracy of the AF processing may be reduced due to erroneous input of the magnification information or the lens position information.

It is an object of the present invention to provide a lens magnification detecting device and a focus detecting device capable of recognizing the magnification of an objective lens without input of information by an operator.

[0020]

According to a first aspect of the present invention, there is provided a lens magnification detecting apparatus which is applied to a microscope apparatus having a stage for supporting an object to be observed and a moving mechanism for moving the stage. A lens magnification detection device that detects a magnification of an objective lens, and an irradiation unit that irradiates predetermined light toward the stage through the objective lens,
Detecting means for detecting a change in the state of a light beam formed by reflected light from the stage or an object to be observed supported by the stage; and control for driving the moving mechanism to move the stage in the optical axis direction of the objective lens. And movement control means for performing the following.

In general, when the magnification of the objective lens is different, the manner of changing the state of the light beam detected by the detecting means is different. Therefore, the lens magnification detection device further includes a magnification acquisition unit that refers to a change in the state of the light beam detected by the detection unit during operation of the movement control unit and obtains a magnification of the objective lens based on the change in state. . Therefore, the lens magnification detecting device can recognize the lens magnification even without input of information by an operator.

A focus detection apparatus according to a second aspect is applied to a microscope apparatus having a stage for supporting an object to be observed and a moving mechanism for moving the stage, and a focus for detecting a focus adjustment state of the microscope apparatus. An irradiating means for irradiating a predetermined focus detection light in a direction of the stage through an objective lens of the microscope apparatus, and a light flux formed by reflected light from the object to be observed passing through the objective lens, which is a detection device. And a movement control means for controlling the movement of the stage in the optical axis direction of the objective lens by driving the movement mechanism.

In general, when the magnification of the objective lens differs, the manner of changing the state of the light beam detected by the detecting means differs. Therefore, the focus detection device further includes a magnification obtaining unit that refers to a state of the light beam detected by the detection unit during the operation of the movement control unit and obtains a magnification of the objective lens based on a change in the state. Therefore, the focus detection device can recognize the lens magnification without input of information by an operator.

Further, the focus detection device may further include a focus for obtaining a defocus amount of the microscope device based on a magnification of the objective lens obtained by the magnification obtaining means and a state of a light beam detected by the detection means. Adjustment state acquisition means. In general, when the magnification of the objective lens is different, the relation of the state of the light beam to the defocus amount is also different. However, according to this focus adjustment state obtaining means, an accurate defocus amount can be obtained because the defocus amount is obtained based on the recognized magnification of the objective lens.

Further, the stage, the irradiating means and the detecting means provided in the conventional microscope apparatus can be used for these magnification detecting devices or focus detecting devices, so that a dedicated unit for recognizing the lens magnification is used. As compared with the case of providing, it is possible to realize the cost more reliably.

[0026]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

First, an embodiment of the present invention will be described with reference to FIGS. 1, 2, 3, 4, and 5. This embodiment corresponds to claims 1 and 2. (Configuration) FIG. 1 is a view showing the overall configuration of a microscope apparatus 10 according to the present embodiment. 1, the same parts as those of the conventional microscope apparatus 100 shown in FIG. 6 are denoted by the same reference numerals, and the description thereof will be omitted.

In the microscope device 10, unlike the microscope device 100, an AF device 11 (described later) is provided instead of the AF device 101, and a displacement sensor 15 for detecting the displacement of the stage 104 is newly added. . In the microscope device 10, the input unit 108 provided in the microscope device 100 is omitted. Although omitted in FIG. 1, the stage 104 (or the observation object 100A on the stage 104) is provided near the stage 104.
And an objective lens (reference numerals 102a, 102b, and 102c in FIG. 1; these will be described later) mounted on the revolver 109 are provided with a collision prevention sensor (known). .

The displacement sensor 15 is composed of a known rotary encoder or the like attached to any one of the rotating shafts of the moving mechanism 105, detects the displacement of the stage 104 in the Z direction, and controls the AF control unit in the AF device 11. 12 (to be described later).

Further, the objective lens 102a shown in FIG.
102b and 102c are objective lenses having different magnifications. The operator can use these objective lenses 102a,
One of 2b and 102c is selectively used by rotating the revolver 109 or re-attaching it. Here, the objective lenses 102a, 102b, 102
It is assumed that c is a 100 × objective lens, a 50 × objective lens, and a 10 × objective lens, respectively. Of the objective lenses 102a, 102b, and 102c, the objective lens that is currently selected and used by a worker is simply referred to as an “objective lens” regardless of the magnification, and is denoted by reference numeral 102. .

FIG. 2 is a diagram showing the configuration of the AF device 11. In FIG. 2, the conventional A shown in FIG.
The same parts as those of the F device 101 are denoted by the same reference numerals. The AF device 11 outputs the AF light (that is, a predetermined L
It is invisible light emitted from an ED light source or the like, and its light flux is focus detection light that is restricted on the pupil of the objective lens 102. ) Irradiates the object 100A through the objective lens 102 with the emission optical system 101a, receives the AF light passing through the objective lens 102-the object 100A-the objective lens 102, and a signal corresponding to the luminance distribution of the light. Output CCD
An AF circuit unit 13 that drives a sensor 101b (for example, a CCD line sensor), an emission optical system 101a, and the CCD sensor 101b and generates an AF signal based on an output of the CCD sensor 101b, and an AF that performs various settings in the AF circuit unit 13 It comprises a control unit 12 and the like.

The position of the objective lens 102 and the exit optical system 1
01a and the state of the AF light emitted from the CCD sensor 1
The relationship with the position 01b is adjusted in advance, and when the surface of the observation target 100A is at the in-focus position, the luminous flux of the AF light entering the CCD sensor 101b is
When the surface of the object to be observed 100A is not at the in-focus position, the luminous flux of the AF light is distributed at a position shifted from the center of the CCD sensor 101b by a distance corresponding to the defocus amount.

The AF sensor 13 includes a CCD sensor 10
1b, the analog operation circuit 13a,
The monitoring circuit 13c, the amplifier circuit 13b, and the switch 13d are connected in series, and the switch 13d is connected to the stage driving unit 1.
06. Further, the monitoring circuit 13c and the switch 13d are connected to the AF control unit 12, respectively.
The analog operation circuit 13a sequentially generates a signal (light change signal) indicating a luminance distribution on the CCD sensor 101b based on the output of the CCD sensor 101b. The analog operation circuit 13a, as a light change signal, for example, calculates a difference (for example, T
a-Tb). Such a light change signal changes substantially linearly (linearly) according to the change in the defocus amount.

The monitoring circuit 13c includes an analog operation circuit 13
The light change signal (or a signal having a value corresponding to the light change signal) output from the CPU 12a is supplied to the CPU 12a.
The monitoring circuit 13c does not change the light change signal provided from the analog operation circuit 13a to the amplifier circuit 13b at least during the AF processing. Amplifier circuit 13
b denotes a programmable amplifier or the like, which shifts the light change signal by the shift amount set by the CPU 12a during the initial setting process (described later),
The signal after the shift is amplified by the amplification factor set by the CPU 12a at the time of the initial setting process to generate an AF signal.

The switch 13d switches the connection to the stage driver 106 between the amplifier circuit 13b and the AF controller 12 in accordance with an instruction from the CPU 12a.
On the other hand, the AF control unit 12 includes a memory unit 12b and a CPU 12
a. In the memory unit 12b, a storage area necessary for each processing of the CPU 12a is secured, and the CPU 12a
3 stores a program for executing the same AF processing as that of the related art, and a program for executing the initial setting processing of the present embodiment shown in FIG. Also, in the memory unit 12b,
Lens characteristic information (see FIG. 4) to be referred to by the CPU 12a during the initial setting process is also stored in advance.

In the configuration described above, the circuit for driving the emission optical system 101a and the CCD sensor 101b is not shown. The exchange of each signal between the AF control unit 12 composed of a digital circuit and the AF circuit unit 13 composed of an analog circuit is A
This is performed via an A / D converter or a D / A converter in the F control unit 12, but these converters are not shown.

The AF control unit 12 may be provided outside the AF device 11. In addition, a CPU (not shown) in the main control unit that controls the entire microscope apparatus 10
May be changed by operating in the same manner as the AF control unit 12. (Operation) FIG. 3 is an operation flowchart of the initial setting process by the CPU 12a. Note that A by the CPU 12a
Regarding the operation of the F process, the A
Since the operation is the same as that of the F control unit 101c, the description thereof is omitted.

When the operator gives an instruction to start the initial setting process by turning on the power or operating a switch (step S1YE).
S), the CPU 12a switches the connection state of the switch 13d to the AF control unit 12, disconnects the connection between the AF circuit unit 13 and the stage drive unit 106, and sets the AF control unit 1
2 is secured to the stage driving unit 106 (step S2) (at the time of this initial setting process, the observation target 1
00A may or may not be placed on stage 104).

Next, the CPU 12a moves the stage 104 to a position sufficiently distant from the objective lens 102 by directly giving a predetermined AF signal to the stage driving unit 106 (step S3). Then, CPU1
Step 2a starts a stage scan for obtaining a lens magnification (step S4). Here, in the stage scan in the present embodiment, the CPU 12a
By supplying an AF signal to the stage driving unit 106 while monitoring the output of the stage 104, the stage 104 is moved stepwise by a predetermined distance and gradually approaches the objective lens 102. At the time of this stage scan, it is assumed that the emission optical system 101a is driven in the same manner as during the AF processing, and that the AF light is emitted.

At the time of this stage scan, the CPU
12a represents the light change signals L1, L2, L3,... (Actually measured values) obtained when the stage 104 is at each position,
It is stored in the memory unit 12b (step S5). And
The CPU 12a continues this stage scan until recognizing that the stage 104 has approached the objective lens 102 via a collision prevention sensor (not shown) or the like (Step S).
6NO-S5-S6).

Here, as shown in FIG. 5, the relationship between the stage displacement D and the light change signal L is shown in FIG. 5A when the lens magnification is 100 times, and in FIG. 5 when the lens magnification is 50 times.
(B) When the magnification is 10 times, as shown in FIG. And FIG.
As is apparent from FIG.
Change rate K (hereinafter, the term “change rate” is referred to as the stage displacement amount D).
And the change rate K when the lens magnification is 100, 50, and 10 is Ka, Kb, and Kc, respectively.
In FIG. 5, the change ranges Da, Db, Dc of the light change signal L are shown.
Is limited because the width of the light receiving surface of the CCD sensor 101b is finite.

Accordingly, in the present embodiment, as shown in FIG.
a, 50 × objective lens 102b, 10 × objective lens 10
The change rates Ka, Kb, and Kc for each of the lenses 2c are stored in the memory unit 12b in association with the respective objective lenses. In addition to the lens characteristic information, the memory unit 12b stores a signal amplification to be set in the amplifier circuit 13b when each of the 100 × objective lens 102a, the 50 × objective lens 102b, and the 10 × objective lens 102c is used. Rates ga, gb, gc, and signal shift amounts Δa, Δb, Δc
Are stored in association with the respective objective lenses.

When the stage scan ends (step S6 YES), the CPU 12a obtains the light change signals L1, L2, L3,... (Actually measured values) obtained in step S5.
Is calculated on the basis of (step S7). The CPU 12a in step S7 recognizes the change range D0 by, for example, comparing the difference (Lk-Lk + 1) between the adjacent light change signals Lk and Lk + 1 (actually measured values) in the acquisition order with a predetermined value. At the same time, the change rate K is calculated based on two or more light change signals (for example, Li, Li + 2) (actually measured values) within the change range D0 and the stage displacement d per one step ( For example, K = (Li + 2-Li) / 2d)
(See FIG. 3A).

In the subsequent step S8, the CPU 12a refers to the calculated change rate K. For example, when the change rate K is closest to Ka, the CPU 12a recognizes that the currently used objective lens 102 is the 100 × objective lens 102a, Change rate K
Is closest to Kb, it is recognized that the currently used objective lens 102 is the 50 × objective lens 102b. When the change rate K is closest to Kc, the currently used objective lens 102 is the 10 × objective lens. 102c.

Hereinafter, the currently used objective lens 10 will be described.
The description will be made assuming that 2 is recognized as a 50 × objective lens. In the following step S9, the setting corresponding to the 50 × objective lens 102b recognized in this way is performed on the AF circuit unit 13. In this step S9, the CPU 12a
With reference to the memory unit 12b, the 50 × objective lens 102b
Is set as the signal amplification factor of the amplification circuit 13b in the AF circuit unit 13. Further, the CPU 12a refers to the memory unit 12b and determines the signal shift amount “Δb” associated with the 50 × objective lens 102b with the amplification circuit 13 in the AF circuit 13.
b is set as the signal shift amount (step S8).
The objective lens 102 currently used in
Ga and Δa are set when the object is recognized as the double objective lens 102a, and gc and Δc are set when the object is recognized as the 10 × objective lens 102c.)

That is, the CPU 1 in step S9
2a performs correction of differences in light change signal characteristics due to lens magnification and adjustment of the AF origin according to characteristics unique to each objective lens. As a result, no matter which objective lens is used, the same appropriate AF signal characteristic is always provided (see FIG. 3B). This AF signal characteristic makes the displacement given to the stage 104 at the time of feedback control of the AF processing coincide with the actual inverted value of the defocus amount, similarly to the case where correct information is input from the operator in the conventional microscope apparatus 100. Things.

Finally, the CPU 12 a
The connection state of d is switched to the amplifier circuit 13b side, the connection between the AF control unit 12 and the stage driving unit 106 is cut off, the AF circuit unit 13 and the stage driving unit 106 are connected, and the initial setting process ends ( Step S10). According to the above-described embodiment, the lens magnification can be recognized (steps S7 and S8) from the result of the stage scan (steps S4 to S6) using the AF circuit 13 without input of information by the operator. it can. Moreover,
Appropriate setting (step S9) according to the recognition result can also be performed.

In the present embodiment, at the time of stage scanning, the stage 104, the moving mechanism 105, and the stage driving unit 10 originally provided in the conventional microscope apparatus 100 are used.
6. Outgoing optical system 101a, CCD sensor 101b, AF
Since the circuit unit 101d and the like are used, the realization is possible at lower cost and more securely than when a dedicated unit for recognizing the lens magnification is provided.

(Others) When the reproducibility of the movement pattern of the stage 104 during the stage scan is poor,
The information to be acquired by the CPU 12a in step S5 includes not only the light change signals L1, L2, L3,... (Actually measured values) but also the light change signals L1, L2, L3,. The stage displacement amount output by the displacement sensor 15 at the time of acquisition (for example, the displacement amount of the stage 104 with respect to the start of stage scanning) D1, D2, D3,.
(Measured value) also needs to be added. Then, step S7
In these cases, these stage displacement amounts D1, D2, D
3,... (Actual values) and light change signals L1, L2, L3,
.. Based on the relationship with (actually measured values), for example, light change signals Lk and Lk + 1 (actually measured values) adjacent in the order of acquisition, and stage displacement amounts Dk and Dk + 1 (actually measured values) adjacent in the order of acquisition. The change range D0 is recognized on the basis of the above, and two or more light change signals (eg, Li, Li + 2) (actually measured values) within the change range D0 and the corresponding stage displacement (eg, D
i, Di + 2) (actual measurement value), the change rate K may be calculated (for example, K = (Li + 2−Li) / (Di + 2−D)
i)).

On the other hand, even if the stage scan is not stepped (for example, continuous movement), if the reproducibility of the movement pattern of the stage 104 is good, step S5 is performed.
, There is no need to acquire the stage displacement amounts D1, D2, D3,... (Actually measured values). In general, the lens magnification should be a value corresponding to the change rate K. Therefore, the acquisition of the lens magnification in steps S7 and S8 includes the light change signals L1, L2, L3,. Stage displacement d per step (or stage displacement D
1, D2, D3,... (Actually measured values)).

In general, the gain to be set in the amplifier circuit 13b is a value corresponding to the change rate K (that is, the lens magnification).
(Actual measurement value) and the stage displacement d per one step (or stage displacement D1, D2, D3,... (Actual measurement value)) based on the light change signals L1, L2, L3,. May be performed.

In the above embodiment, the CPU 1
2a is a light change signal L1, L2,
L3,... (Actually measured values) are obtained based on the output of the analog operation circuit 13a (the value given by the monitoring circuit 13c), but may be obtained based on the output of the CCD sensor 101b. If the amplification factor and the shift amount of the amplifier circuit 13b are set to predetermined values, the light change signal L1,
L2, L3, ... (actually measured values) can also be obtained based on the output of the amplifier circuit 13b.

In the above embodiment, the memory unit 1
The lens characteristic information to be stored in 2b is, if the number of types of magnification of the objective lens to be used in the microscope device 10 changes,
It may be increased or decreased accordingly. In the above embodiment, the change rate K is used as the lens characteristic information. However, any other lens characteristic other than the change rate K may be used as long as it indicates the relationship between the stage displacement D and the light change signal L. It may be replaced with information.

In the above embodiment, the AF apparatus for performing the AF process based on the recognized lens magnification has been described. However, this AF apparatus is partially modified to display the defocus amount based on the recognized lens magnification. Focus detection device,
A lens magnification detecting device for displaying the recognized lens magnification to the outside may be used. In addition, if this lens magnification detection device is applied to a microscope system that captures images from a microscope device into a computer via an electronic camera, magnification information can be stored in an image data file without input of magnification information or lens position information by an operator. It can also be used for file management of microscope images, for example.

[0055]

As described above, according to the present invention, it is possible to provide a lens magnification detecting device and a focus detecting device capable of recognizing the magnification of an objective lens without input of information by an operator. It has become possible.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating an overall configuration of a microscope apparatus 10 according to an embodiment.

FIG. 2 is a diagram illustrating a configuration of an AF device 11;

FIG. 3 is an operation flowchart of an initial setting process by a CPU 12a.

FIG. 4 is a diagram illustrating lens characteristic information stored in a memory unit 12b in advance.

FIG. 5 is a diagram illustrating a relationship between a stage displacement amount D and an optical change signal L for an objective lens of each magnification.

FIG. 6 is a diagram showing an overall configuration of a conventional microscope apparatus 100.

FIG. 7 is a diagram showing the configuration of a conventional AF device 101 and the principle of AF processing.

[Explanation of symbols]

 10, 100 Microscope device 11, 101 AF device 12 AF control unit 12a CPU 12b Memory unit 13 AF circuit unit 13a Analog operation circuit 13c Monitoring circuit 13b Amplification circuit 13d Switcher 102 Objective lens 102a 100x objective lens 102b 50x objective lens 102b 10 × objective lens 15 Displacement sensor 103 Eyepiece 104 Stage 105 Moving mechanism 106 Stage drive unit 108 Input unit 100A Object under observation 101a Emission optical system 101b CCD sensor

Claims (2)

[Claims] 1. A lens magnification detecting device applied to a microscope apparatus having a stage for supporting an object to be observed and a moving mechanism for moving the stage, and detecting a magnification of an objective lens of the microscope apparatus, Irradiating means for irradiating predetermined light in the direction of the stage via an objective lens; detecting means for detecting a change in state of a light beam formed by reflected light from the stage or an object to be observed supported by the stage; Movement control means for controlling a movement mechanism to move the stage in the optical axis direction of the objective lens, and referring to a state change of a light beam detected by the detection means during operation of the movement control means, A magnification obtaining means for obtaining a magnification of the objective lens based on a state change. 2. A focus detection device applied to a microscope device provided with a stage for supporting an object to be observed and a movement mechanism for moving the stage, wherein the focus detection device detects a focus adjustment state of the microscope device. Irradiating means for irradiating a predetermined focus detection light in the direction of the stage through the objective lens, and detecting means for detecting a state of a light beam formed by reflected light from the object to be observed passing through the objective lens, Movement control means for controlling the movement of the stage in the optical axis direction of the objective lens by driving the movement mechanism, and referring to the state of the light beam detected by the detection means during operation of the movement control means, Magnification obtaining means for obtaining a magnification of the objective lens based on a change in state; a magnification of the objective lens obtained by the magnification obtaining means; and a state of a light beam detected by the detecting means On the basis of,
A focus detection device comprising: a focus adjustment state obtaining unit that obtains a defocus amount of the microscope device.