JP2001337462A5 - - Google Patents

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Publication number
JP2001337462A5
JP2001337462A5 JP2000157039A JP2000157039A JP2001337462A5 JP 2001337462 A5 JP2001337462 A5 JP 2001337462A5 JP 2000157039 A JP2000157039 A JP 2000157039A JP 2000157039 A JP2000157039 A JP 2000157039A JP 2001337462 A5 JP2001337462 A5 JP 2001337462A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000157039A
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Japanese (ja)
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JP2001337462A (ja
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Priority to JP2000157039A priority Critical patent/JP2001337462A/ja
Priority claimed from JP2000157039A external-priority patent/JP2001337462A/ja
Publication of JP2001337462A publication Critical patent/JP2001337462A/ja
Publication of JP2001337462A5 publication Critical patent/JP2001337462A5/ja
Pending legal-status Critical Current

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JP2000157039A 2000-05-26 2000-05-26 露光装置、露光装置の製造方法、およびマイクロデバイスの製造方法 Pending JP2001337462A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000157039A JP2001337462A (ja) 2000-05-26 2000-05-26 露光装置、露光装置の製造方法、およびマイクロデバイスの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000157039A JP2001337462A (ja) 2000-05-26 2000-05-26 露光装置、露光装置の製造方法、およびマイクロデバイスの製造方法

Publications (2)

Publication Number Publication Date
JP2001337462A JP2001337462A (ja) 2001-12-07
JP2001337462A5 true JP2001337462A5 (enrdf_load_stackoverflow) 2008-02-28

Family

ID=18661738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000157039A Pending JP2001337462A (ja) 2000-05-26 2000-05-26 露光装置、露光装置の製造方法、およびマイクロデバイスの製造方法

Country Status (1)

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JP (1) JP2001337462A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4224805B2 (ja) * 2002-06-24 2009-02-18 株式会社オーク製作所 投影露光光学系および投影露光装置
JP4785389B2 (ja) * 2005-02-10 2011-10-05 キヤノン株式会社 反射ミラー、露光装置及びデバイス製造方法
TWI467255B (zh) 2006-03-27 2015-01-01 尼康股份有限公司 照明光學裝置、曝光裝置以及元件製造方法
JP2008185908A (ja) * 2007-01-31 2008-08-14 Nikon Corp マスクの製造方法、露光方法、露光装置、および電子デバイスの製造方法
KR20160084539A (ko) 2015-01-05 2016-07-14 (주)그린광학 Ghi라인 차단용 반사 필터

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0272365A (ja) * 1988-09-07 1990-03-12 Hitachi Ltd 写真処理装置
JP3460129B2 (ja) * 1994-08-16 2003-10-27 株式会社ニコン 露光装置および露光方法
JP3620612B2 (ja) * 1996-03-29 2005-02-16 株式会社ニコン 露光量制御装置
JP4029130B2 (ja) * 1997-06-03 2008-01-09 株式会社ニコン 露光装置及び露光方法
JPH11121357A (ja) * 1997-10-14 1999-04-30 Nikon Corp 位置検出装置及び位置検出方法

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