JP2001334219A5 - - Google Patents

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Publication number
JP2001334219A5
JP2001334219A5 JP2000160232A JP2000160232A JP2001334219A5 JP 2001334219 A5 JP2001334219 A5 JP 2001334219A5 JP 2000160232 A JP2000160232 A JP 2000160232A JP 2000160232 A JP2000160232 A JP 2000160232A JP 2001334219 A5 JP2001334219 A5 JP 2001334219A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000160232A
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Japanese (ja)
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JP2001334219A (ja
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Publication date
Application filed filed Critical
Priority to JP2000160232A priority Critical patent/JP2001334219A/ja
Priority claimed from JP2000160232A external-priority patent/JP2001334219A/ja
Publication of JP2001334219A publication Critical patent/JP2001334219A/ja
Publication of JP2001334219A5 publication Critical patent/JP2001334219A5/ja
Pending legal-status Critical Current

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JP2000160232A 2000-05-30 2000-05-30 スピン処理装置及びスピン処理方法 Pending JP2001334219A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000160232A JP2001334219A (ja) 2000-05-30 2000-05-30 スピン処理装置及びスピン処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000160232A JP2001334219A (ja) 2000-05-30 2000-05-30 スピン処理装置及びスピン処理方法

Publications (2)

Publication Number Publication Date
JP2001334219A JP2001334219A (ja) 2001-12-04
JP2001334219A5 true JP2001334219A5 (enrdf_load_stackoverflow) 2007-07-12

Family

ID=18664452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000160232A Pending JP2001334219A (ja) 2000-05-30 2000-05-30 スピン処理装置及びスピン処理方法

Country Status (1)

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JP (1) JP2001334219A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5816468B2 (ja) * 2011-06-15 2015-11-18 東京応化工業株式会社 基板収容装置
JP6212818B2 (ja) * 2012-09-27 2017-10-18 株式会社Ｓｃｒｅｅｎホールディングス 処理液供給装置、基板処理装置、処理液供給方法および基板処理方法
KR20150046148A (ko) 2012-09-27 2015-04-29 가부시키가이샤 스크린 홀딩스 처리액 공급 장치, 기판 처리 장치, 처리액 공급 방법, 기판 처리 방법, 처리액 처리 장치 및 처리액 처리 방법
WO2014050941A1 (ja) * 2012-09-27 2014-04-03 大日本スクリーン製造株式会社 処理液供給装置、基板処理装置、処理液供給方法、基板処理方法、処理液処理装置および処理液処理方法

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