JP2001332179A - Substrate for plasma display panel, plasma display panel and method of producing plasma display panel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve exhaust efficiency in an exhaust process during producing a PDP. SOLUTION: In the PDP 201, a particulate water molecule decomposing material 19 having water molecule decomposing operation is arranged on a surface 148 at the side of a discharge space 51 of a MgO film 14. For example, a titanium oxide (TiO2), a zinc oxide (ZnO), a zirconium oxide (ZrO2) or a material containing at least one of them is applicable as the water molecule decomposing material 19. By irradiating the water molecule decomposing material 19 with a light containing a ultraviolet ray in the exhaust process, the water molecule decomposing material 19 decomposes water molecules into hydrogen (H2) and oxygen (O2). Thus, the re-adsorption of the water molecules to the MgO film 14 is reduced or prevented, improving exhaust efficiency in the exhaust process.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate for a plasma display panel (PDP),
And a method of manufacturing a PDP.
The present invention relates to a technique for improving exhaust efficiency in an exhaust process at the time of manufacturing P.

[0002]

2. Description of the Related Art FIG. 9 is a schematic sectional perspective view of a conventional PDP 201P. The PDP 201P has a discharge space 51P.
Front panel 111P and rear panel 13 facing each other through
1 is provided.

[0003] The front panel 111P comprises a front glass substrate 11
A plurality of strip-shaped electrodes 12P are formed on the surface of the front glass substrate 11P on the side of the discharge space 51P. Then, a dielectric layer 13P is formed so as to cover the electrode 12P, and magnesium oxide (Mg) covers the dielectric layer 13P.
O) cathode film (hereinafter also referred to as MgO film) 1
4P is formed.

On the other hand, the rear panel 131 has a rear glass substrate 31, and a plurality of strip-shaped electrodes 32 extending in a direction intersecting the electrodes 12P are formed on the surface of the rear glass substrate 31 on the side of the discharge space 51P. Have been. A partition 37 is formed between the adjacent electrodes 32 along the electrodes 32. A phosphor layer 35 is formed on the inner surface of a substantially U-shaped groove formed by the partition wall 37 and the back glass substrate 31.

[0005] The front panel 111P and the back panel 131 have a seal frit (not shown) at the peripheral edge of the panel.
Sealed. At this time, PDP20
1P is sealed in a state where the top of the partition 37 is in contact with the MgO film 14P, and the discharge space 51P is an elongated space extending along the partition 37.

In the manufacturing process of the PDP 201P, a step of exhausting the inside of the PDP 201P is performed after the front panel 111P and the rear panel 131 are bonded and sealed with a seal frit. After such an evacuation process, PDP2
The discharge gas is sealed in 01P.

FIG. 10 is a schematic view of an exhaust device 701P used in the above exhaust process. Exhaust device 701P is PDP
A heating furnace 71P capable of storing 201P is provided. On this occasion,
The pipe 7 is inserted into the exhaust hole 31HP of the PDP 201AP in a state after the sealing step (to be a PDP 201P as a finished product later).
With the 3P connected, the PDP 201AP is connected to the heating furnace 7
Installed in 1P. The pipe 73P is connected to a vacuum pump 72P via a valve 73VP.

In the evacuation process, PDP is heated by heating furnace 71P.
While baking the 201AP, the inside of the PDP 201AP is evacuated by the vacuum pump 72P. Thus, the impurity gas adsorbed in the PDP 201AP is desorbed by baking, and the PDP 201AP is desorbed by the vacuum pump 72P.
It is discharged outside 201AP.

[0009]

However, it takes a long time to discharge the impurity gas in the PDP 201AP only by baking by the heating furnace 71P and evacuation by the vacuum pump 72P. This is for the following reason.

First, MgO particularly easily adsorbs water molecules (H ₂ O) (has a high hygroscopicity).
Most of the impurity gas inside is water molecules adsorbed on the MgO film 14P.

Here, FIG. 11 is a schematic diagram for explaining the state of water molecule exhaustion in the exhausting step. As shown in FIG. 11, in the evacuation step, the water molecules 8P adsorbed on the MgO film 14P are once desorbed by baking in the heating furnace 71P. However, as described above, the discharge space 51P
Is a narrow and long space, so the desorbed water molecules 8P
It collides with the MgO film 14P many times before reaching 1HP, and (re) adsorption and (re) desorption are repeated. At this time,
Strong action of adsorbing water molecules of MgO (high hygroscopicity)
For this reason, the time during which the water molecules 8P are adsorbed on the MgO film 14P is longer than the time from desorption to re-adsorption.

Further, if impurity gas such as water molecules remains in PDP 201P as a finished product, PDP 201
The life of P is shortened. This is PDP201P
When a discharge is generated during the operation of the
This is because the inner surface of 201P (specifically, the exposed surface of the MgO film 14P and the phosphor layer 35) is sputtered.

The present invention has been made in view of the above points, and a first object of the present invention is to provide a PDP substrate, a PDP, and a method of manufacturing a PDP capable of improving the evacuation efficiency in the above evacuation step as compared with the prior art. Aim.

Further, the present invention provides a PD having a longer life than the conventional one.
A second object is to provide P.

[0015]

(1) A plasma display panel substrate according to the first aspect of the present invention is a plasma display panel substrate forming a plasma display panel, wherein an inner surface of the plasma display panel is formed. A water molecule-decomposing substance having an action of decomposing water molecules other than titanium oxide is disposed on a part of the surface of the plasma display panel substrate.

(2) The substrate for a plasma display panel according to the second aspect of the present invention is the substrate for a plasma display panel according to the first aspect, wherein the water molecule decomposing substance is formed of a particulate or porous material. It is characterized by comprising.

(3) The substrate for a plasma display panel according to the third aspect of the present invention is the substrate for a plasma display panel according to the first or second aspect, wherein the water molecule decomposing substance is zinc oxide and oxide. It is characterized by containing at least one of zirconium.

(4) The plasma display panel substrate according to the fourth aspect of the present invention is a plasma display panel substrate forming a plasma display panel, wherein the plasma display panel forms an inner surface of the plasma display panel. A particulate or porous water molecule decomposing substance containing titanium oxide and having a function of decomposing water molecules is arranged on a part of the surface of the panel substrate.

(5) The substrate for a plasma display panel according to the invention described in claim 5 is the substrate for a plasma display panel according to any one of claims 1 to 4, wherein It is characterized in that the water molecule-decomposing substance is arranged at a higher density in a region having a lower contact ratio with the discharge in the surface.

(6) The substrate for a plasma display panel according to the invention according to claim 6 is the substrate for a plasma display panel according to claim 5, wherein a portion having a low contact ratio with the discharge is the plasma display panel. The plasma display panel includes at least one of a peripheral portion of the front surface of the panel substrate and a region corresponding to a space between adjacent display cells of the plasma display panel.

(7) A plasma display panel according to a seventh aspect of the present invention includes the plasma display panel substrate according to any one of the first to sixth aspects.

(8) The method of manufacturing a plasma display panel according to the invention of claim 8 is the method of manufacturing a plasma display panel of claim 7, wherein a discharge gas is sealed in the plasma display panel. In the evacuation process for exhausting the inside of the plasma display panel, which is performed before performing the process, energy for promoting an action of decomposing the water molecule by the water molecule decomposer is given to the water molecule decomposer.

(9) The method for manufacturing a plasma display panel according to the invention according to claim 9 is the method for manufacturing a plasma display panel according to claim 8, wherein, in the evacuation step, the water molecule decomposing substance is removed. It is characterized by irradiating light including ultraviolet rays.

According to a tenth aspect of the present invention, there is provided a method of manufacturing a plasma display panel according to the eighth or ninth aspect, wherein in the exhausting step, the plasma display panel is provided. A discharge is formed in the inside.

[0025]

<First Embodiment> FIG. 1 is a schematic sectional perspective view of a PDP 201 according to a first embodiment.
As shown in FIG. 1, the PDP 201 is, for example, Ne-Xe
A front panel (PDP) facing through a discharge space 51 filled with a discharge gas such as a mixed gas or a He-Xe mixed gas.
Substrate 111) and a rear panel 131. In particular,
The PDP 201 has a feature in the front panel 111, and such a point will be mainly described. Here, the case where the above-described back panel 131 is applied as the back panel of the PDP 201 will be described, but a back panel having another known structure may be used. The same applies to the PDP 202 and the like described later.

The front panel 111 has a front glass substrate 11, and a plurality of strip-shaped electrodes 12a and 12b are formed on the surface of the front glass substrate 11 on the discharge space 51 side. The electrodes 12a and the electrodes 12b are alternately arranged, and a plurality of adjacent electrodes 12a and 12b form a pair.
The scanning line SL is defined by the electrode pairs 12a and 12b.
A dielectric layer 13 is formed so as to cover the electrodes 12a and 12b, and magnesium oxide (Mg) covers the dielectric layer 13.
O) cathode film (hereinafter also referred to as MgO film) 1
4 are formed.

In particular, in the PDP 201, a water molecule decomposing substance 19 having a function of decomposing water molecules is disposed on a part of the surface 14S of the MgO film 14 on the side of the discharge space 51. In detail, the particulate water molecule decomposing substance 19
Without completely obscuring S (and thus "on a portion of surface 14S"), it is evenly scattered over surface 14S or over the entire area of surface 14S except for the portion that abuts partition 37. Here, the surface 14S of the MgO film 14 can be regarded as the “surface of the front panel 111” which is in contact with the discharge space 51S (or with the discharge gas) and forms the inner surface of the PDP 201. The particulate water molecule decomposing substance 19 used is sufficiently smaller than the discharge space 51.

As the water molecule decomposing substance 19, for example,
Tan (TiO)_Two), Zinc oxide (ZnO), zirconium oxide
Um (ZrO_Two) Etc., and at least one of these
Materials including one are applicable. Where the acid
Examples of materials containing titanium oxide and the like include platinum (Pt) and
Noble metal such as rhodium (Rh) or silica or zeolite
Materials such as titanium oxide and the like attached to oxides such as
It is. Substances such as the titanium oxide described above rely on light energy.
Is a water molecule (H_TwoO) to hydrogen (H_Two) And oxygen (O _Two)
Decompose. Above all, titanium oxide, which has a strong decomposition effect, is applied
It is more desirable to do. Also, the light energy is large
In the case of using ultraviolet light, for example,
The decomposing action of the components is higher (accelerated).

On the other hand, the back panel 131 has a back glass substrate 31 and a plurality of strip-shaped electrodes 32 extending on the surface of the back glass substrate 31 on the discharge space 51 side in a direction crossing the electrodes 12a and 12b three-dimensionally. Are formed. A partition 37 is formed between the adjacent electrodes 32 along the electrodes 32. A phosphor layer 35 is formed on the inner surface of a substantially U-shaped groove formed by the partition wall 37 and the back glass substrate 31.

In the peripheral portion of the rear glass substrate 31 or the rear panel 131, a through hole or an exhaust hole 31H connected to the inside of the PDP 201 or the discharge space 51 is provided.
(See FIG. 3 described later).

The front panel 111 and the rear panel 131 are provided with a seal frit (not shown) at a peripheral portion of the panel.
It is sealed and sealed by a seal frit 53 in FIG. At this time, the PDP 201 is
7, and the MgO film 14P is sealed in contact with the MgO film 14P, and the discharge space 51 is an elongated space extending along the partition wall 37. The electrode pair 12a, 12b and the electrode 3
2 corresponds to a discharge cell or a display cell, and a PDP 20 is provided between the electrode pairs 12a and 12b.
A (surface) discharge 52 responsible for the display of No. 1 is formed.

Next, a method of manufacturing the PDP 201 will be described with reference to the flowchart of FIG. First, the front panel 111 and the rear panel 131 are manufactured. less than,
Front panel manufacturing process ST1F and rear panel manufacturing process S
An example of T1R will be described.

That is, in the front panel manufacturing process ST1F,
First, the front glass substrate 11 is prepared, and the electrodes 12a and 12b are formed using a vapor deposition method, a printing method, or the like. The electrode 1
Each of 2a and 12b may be constituted by a transparent electrode formed in a strip shape on the front glass substrate 11, and a bus electrode or a metal auxiliary electrode formed in a strip shape on the transparent electrode along the transparent electrode. Then, the electrodes 12 are formed using a printing method or the like.
A dielectric layer 13 covering a and 12b is formed. Thereafter, MgO is deposited on the exposed surface of the dielectric layer 13 by a vacuum deposition method or the like.
The film 14 is formed. Subsequently, the exposed surface 1 of the MgO film 14
A water molecule decomposing substance 19 in the form of particles is arranged on 4S.

At this time, the particulate water molecule decomposing substance 19
Is disposed on the MgO film 14 by, for example, a spray pyrolysis method. Specifically, a viscous solution of an organic compound of a metal such as titanium (Ti), zinc (Zn), and zirconium (Zr) is sprayed on the cathode film 4. Then, this is calcined to decompose and remove organic components and oxidize metals such as titanium to obtain titanium oxide, zinc oxide, zirconium oxide and the like.

Alternatively, sputtering, physical vapor deposition,
A particulate water molecule decomposing substance 19 is formed by a gas phase method such as a chemical vapor deposition method. Specifically, the water molecule decomposing substance 19 is formed on the surface 14S of the MgO film 14 by a sputtering method or the like.
Are deposited in the form of particles, and the growth of the water molecule decomposing substance 19 is terminated before the particles are combined in a film form, thereby forming the particulate water molecule decomposing substance 19.

The partition wall 37 within the surface of the MgO film 14
Water molecule-decomposing substance 1
In the case of arranging 9, an arrangement area is selected by using, for example, a lift-off method.

On the other hand, in the back panel manufacturing process ST1R,
First, a rear glass substrate 31 is prepared, and an electrode 32 is formed by using a vapor deposition method, a printing method, or the like. Then, the partition 37 is formed by a printing method or the like, and thereafter, the phosphor layer 3 is formed by a printing method or the like.
5 is formed.

In at least one of steps ST1F and ST1R, a seal frit made of a low-melting glass paste is arranged on the peripheral edge of front panel 111 and / or rear panel 131.

Thereafter, the front panel 111 and the rear panel 131 are arranged and aligned (positioned) so that the electrodes 12a and 12b and the electrode 32 are orthogonal to each other (three-dimensionally intersect), and alignment is performed. The top of the partition 37 is brought into contact (step ST2). While maintaining this state, the seal frit is fired to seal the front panel 111 and the back panel 131 (step ST3).

Next, the PDP 2 in the state after the sealing step ST3
The inside of 01A (to become PDP 201 as a finished product later; see FIG. 3 described later) is evacuated (step ST4). The exhaust step ST4 will be described later in detail.

Thereafter, a discharge gas is sealed in the PDP 201A (step ST5), and aging is performed (step S5).
T6), the PDP 201 is completed.

Here, FIG. 3 is a schematic diagram for explaining an exhaust device 701 used in the above-described exhaust process, and an exhaust method (a PDP manufacturing method) according to the first embodiment will be described with reference to FIG. explain. Note that in FIG.
The state where P201A is stored is illustrated. The illustration is the same in a schematic diagram of the exhaust device 702 and the like described later.

As shown in FIG. 3, the exhaust device 701 includes a heating furnace 71, a vacuum pump 72, a pipe 73, and a valve 7.
3 V and a light source 81 that emits light 81L including ultraviolet light. Specifically, the heating furnace 71 is used for the PDP 201 (or 20).
1A) has a shape and dimensions capable of storing the heating furnace 7
1 through hole 31 of PDP 201A set in
H through a pipe 73 and a valve 73V to a vacuum pump 72
Is connected. In particular, the light source 81 converts the light 81L to PD
It is arranged at a position where the water molecule decomposing substance 19 in P201A can be irradiated.

In the evacuation step ST4 using the evacuation apparatus 701, the inside of the PDP 201A is evacuated by the vacuum pump 72 while the PDP 201A is baked by the heating furnace 71, and the PDP 201 is radiated to the PDP 201 by the light source 81. 19, light 81 including ultraviolet rays
Irradiate L. The conventional exhaust device 701P (FIG. 10)
No.) is not provided with a light source for illuminating the inside of the heating furnace 71P during heating.

PDP 201, 201A and Front Panel 1
According to No. 11, since the water-molecule decomposing substance 19 is disposed on the MgO film 14, the water-molecule decomposing substance 19 is decomposed by irradiating the water-molecule decomposing substance 19 with the light 81L including ultraviolet rays in the exhaust step ST4. can do. As a result, (re) adsorption of water molecules on the MgO film 14 can be reduced or prevented, so that PDP 2
01A can be exhausted, and the efficiency of the exhaust step ST4 can be improved. In particular, the ultraviolet light contained in the light 81L promotes the decomposing action of the water molecule decomposing substance 19.

As a result, the time required for the exhaust step ST is shortened, and the manufacturing cost can be reduced. Also,
Since water molecules can be exhausted sufficiently, the finished product P
Sputtering by water molecules is reduced in DP201, and PDP201 having a long life can be obtained.

At this time, since the water molecule decomposing substance 19 is in the form of particles, the cathode film 14 (or the front panel 20
The surface 14S of 1) is not completely covered. For this reason,
The electron emission function of the cathode film 14 is not reduced, and the display quality of the completed PDP 201 is not affected.

<Second Embodiment> FIG. 4 is a schematic sectional perspective view of a PDP 202 according to a second embodiment. In the following description, the same components as those of the above-described PDP 201 are denoted by the same reference numerals, and the description will be referred to.

As can be seen by comparing FIG. 4 with FIG. 1 described above, in the front panel 112 of the PDP 202, between the display cells adjacent to each other in the surface 14S of the MgO film 14 (in other words, the non-discharge area). On the area corresponding to the non-display area (or the non-display area), the water molecule decomposing substances 19 are arranged at a high density (compared to the PDP 201). More specifically, MgO
In the surface 14S of the film 14, the water-molecule-decomposing substances 19 are arranged at a high density in regions corresponding to between the electrodes 12a and 12b which belong to different scanning lines SL and are adjacent to each other. Such an arrangement area can be selected by, for example, a lift-off method.

According to PDP 202, water molecule decomposing substance 1
9 are arranged at a high density, that is, since the surface area of the water molecule decomposing substance 19 as a whole is larger than that of the PDP 201, water molecules can be decomposed efficiently. As a result, the exhaust efficiency in the exhaust step ST4 can be further improved. Moreover, at this time, the water molecule decomposing substance 19
Are arranged in a region of the MgO film 14 that is less involved in the formation of the discharge 52 between the electrode pairs 12a and 12b, in other words, in a region that is less involved in the display operation. Not hinder.

At this time, in consideration of the fact that the water-molecule decomposing substance 19 is disposed in an area where the participation in the display operation is low, even if the particulate water-molecule decomposing substance 19 is arranged so as to completely cover the area. I do not care. For example, a paste-like material containing titanium oxide or the like may be arranged by, for example, a printing method.

In FIG. 4, the surface 14S of the MgO film 14 is
In the region where the discharge 52 is formed,
Is not shown, but the water molecule decomposing substance 19
May be arranged. That is, both the arrangement states of FIGS. 1 and 4 may be combined.

In other words, in the area of the surface 14S of the MgO film 14 where the rate of contact with the discharge 52 is smaller (the area that is less involved in the display operation), the particulate water molecule decomposing substance 19 can be arranged at a higher density. If so, the above-described effects can be obtained.

Third Embodiment FIG. 5 is a schematic perspective view of a PDP 203 according to a third embodiment. FIG. 5 is a view of the PDP viewed from the direction of arrow A in FIGS. 1 and 4 described above, and illustrates a part of the peripheral portion of the PDP 203. As shown in FIG. 5, a through-hole 31 </ b> H connected to the discharge space 51 is provided in the peripheral portion of the rear glass substrate 31 or the rear panel 131. Also, front panel 1
11 and the back panel 131 are sealed with a seal frit (indicated by a wavy line) 53. Note that illustration of the phosphor layer 35 (see FIG. 1) and the like are omitted in FIG. 5 to avoid complication of the drawing.

In particular, in the front panel 113 of the PDP 203, the peripheral portion (PDP 20) on the surface 14S of the MgO film 14
(Corresponding to the peripheral portion of No. 3 and having little involvement in the display operation), the particulate water molecule decomposing substances 19 are arranged at a high density.
Such an arrangement area can be selected by, for example, a lift-off method.

As described above, also in PDP 203, M
Since the water molecule-decomposing substance 19 is arranged at a high density on a region of the surface 14S of the gO film 14 where the ratio of contact with the discharge 52 is small (a region that is less involved in the display operation), the same as the PDP 202 described above. The effect of can be obtained.

At this time, the space at the periphery of the PDP 203 in which the water molecule decomposing substance 19 is arranged corresponds to a passage connecting the plurality of discharge spaces 51 extending along the partition wall 37 and the through holes 31H. Then, since the high-density water-molecule decomposing substance 19 is arranged on the passage through which the water molecules in the discharge space 51 always pass during the evacuation step ST4, the evacuation efficiency can be improved.

Note that, similarly to the above-described PDP 202, the particulate water molecule decomposing substance 19 may be arranged so as to completely cover the above-mentioned region. Further, in addition to the arrangement of the MgO film 14 on the periphery, the water molecule decomposing substance 1
9 (see FIG. 1) and / or the arrangement of the water molecule decomposing substance 19 in the PDP 202 (see FIG. 4).

<Fourth Embodiment> FIG. 6 is a schematic diagram for explaining an exhaust device 702 according to a fourth embodiment.
The exhaust method according to the fourth embodiment will be described with reference to FIG.
Although the case where the PDP 201A is evacuated will be described here, each of the PDPs 202,
The following description is also appropriate for 203. This is the same in a fifth embodiment described later.

As shown in FIG. 6, the exhaust device 702 includes a heating furnace 71, a vacuum pump 72, pipes 73 and 76, valves 73V and 76V, a gas cylinder 75, and a power supply 86.
And a power supply 87 electrically connected to a power supply 86. Note that the same components as those of the exhaust device 701 described above are denoted by the same reference numerals, and description thereof will be omitted.

In the exhaust device 702, a gas cylinder 75 is connected to the pipe 73 between the through hole 31H and the valve 73V via a pipe 76 and a valve 76V. The gas cylinder 75 is made of, for example, Ne-Xe mixed gas or He-X
e Supply a discharge gas such as a mixed gas.

Further, in the exhaust device 702, a power supply 81 is applied to the electrodes 12a, 12b, 32 of the PDP 201A so that a discharge can be formed in the PDP 201A or the discharge space 51 by supplying power from the power supply 86. Attach it.

In the exhaust process ST4 using the exhaust device 702, first, (a) the valve 76V is closed while the valve 7 is closed.
3V is opened, and the PDP 201A is baked by the heating furnace 71 while the PDP 201A is baked by the vacuum pump 72.
The inside is evacuated. (B) Then, after a predetermined time has elapsed, the valve 73V is closed while the valve 76V is opened, and a discharge gas is introduced from the gas cylinder 75 into the PDP 201A. Then, power is supplied from the power source 86 to the electrodes 12a, 12b, and 32 via the power supply device 87, and the PDP 201A
A discharge is generated in 51. Then, after a lapse of a predetermined time, the above step (a) is performed again, and the inside of the discharge space 51 is evacuated. Steps (a) and (b) may be repeated a plurality of times.

According to the exhaust device 702 and the exhaust method using the same, the decomposing action of the water molecule decomposing substance 19 can be promoted by the ultraviolet rays from the discharge generated in the PDP 201A. Furthermore, electrons and ions generated by the discharge
By colliding with the inner surface of P201A (specifically, the surface 14S of the MgO film 14, the exposed surface of the phosphor layer 35, and the like), the desorption of water molecules adsorbed on the MgO film 14 and the like can be promoted. For this reason, the conventional exhaust device 701P
Exhaust efficiency can be improved as compared with the case where is used.

It should be noted that various gases other than the discharge gas can be used in the exhaust step ST4. At this time, if the discharge gas is used, the discharge gas finally filled in the PDP 201A in the exhaust step ST4 can be used as the discharge gas in the completed PDP 201. That is, it is possible to omit the necessity of performing the gas sealing step ST5 again, and to integrally perform the exhaust gas step ST4 and the gas sealing step ST5.

<Fifth Embodiment> FIG. 7 is a schematic diagram for explaining an exhaust device 703 according to a fifth embodiment.
The exhaust method according to the fifth embodiment will be described with reference to FIG.

As can be seen by comparing FIG. 7 with FIG. 6 described above, the exhaust device 703 includes a pipe 76 and a gas cylinder 75.
Is different from the exhaust device 702. For details,
In the exhaust device 703, a PDP 20 having a through-hole 31H2 similar to the through-hole 31H is provided at a peripheral portion of the PDP 201A.
Using 1A, a gas cylinder 75 is connected to the through hole 31H2 via a pipe 76 and a valve 76V. The two through holes 31H, 31H2 are provided at positions through the center of the PDP 201A (or 201). Other configurations of the exhaust device 703 are the same as those of the exhaust device 702.

In the evacuation step ST4 using the evacuation device 703, the inside of the PDP 201A is evacuated by the vacuum pump 72 while the PDP 201A is baked by the heating furnace 71, and the discharge gas is discharged from the gas cylinder 75 to the PDP 201A.
The discharge gas is introduced into P201A, and the discharge gas is discharged by the power supply 86. In other words, the above two steps (a) and (b) are performed simultaneously.

According to the exhaust device 703 and the exhaust method using the same, the exhaust efficiency can be improved as in the above-described fourth embodiment.

Note that a plurality of through holes 31H for evacuating the PDP 201A may be provided, or a plurality of through holes 31H2 for introducing a discharge gas may be provided. Further, the above-described light source 81 (see FIG. 3) may be further provided in the exhaust device 703, and the irradiation of the light 81L including ultraviolet rays and the formation of electric discharge may be used in the exhaust step ST4.

<Embodiment 6> In the above description, the case where the water molecule decomposing substance 19 is disposed on the surface 14S of the front panel 111 has been described. Water molecule decomposer 1
9 (see PDP 204 in FIG. 8), the above-described effects can be obtained. That is, forming the inner surface of the PDP,
A part of the surface of the back panel 111 (for example, the phosphor layer 3
5), a water molecule decomposing substance 19 may be arranged, and in such a case, the rear panel corresponds to the “PDP substrate”.

<Modification 1> In the above description, the case where the water molecule decomposing substance 19 is in the form of particles has been described. However, the water molecule decomposing substance 19 formed of a porous (porous) film may be used. . For example, a porous water molecule decomposing substance 19 can be obtained by printing and baking a paste-like material containing the above substance such as titanium oxide. Alternatively, the porous water-molecule-decomposing substance 19 can also be obtained by a sol-gel method using an alkoxide of titanium. At this time, when the molecular decomposing substance 19 is evenly arranged on the entire surface of the MgO film 14 like the PDP 201, a portion (specifically, the electrode 1) of the MgO film 14 involved in the formation of the discharge 52 is formed.
2a, 12b) is adjusted so that the hole is not completely covered.

<Modification 2> In the above description, the cathode film 14 is made of MgO. However, the surface 14S of the front panel 111 or the surface of the back panel 131, which forms the inner surface of the PDP, contains water molecules. The above description is also valid when other materials that are easily adsorbed (highly hygroscopic) are included.

[0074]

According to the first aspect of the present invention, water molecules having an action of decomposing water molecules are formed on a part of the surface of the plasma display panel substrate, which forms the inner surface of the plasma display panel. Decomposition substances are arranged.
Therefore, by using the plasma display panel substrate for a plasma display panel, water molecules are decomposed in an evacuation step of exhausting the inside of the plasma display panel, and (re) adsorption of water molecules can be reduced or prevented. . Therefore, the inside of the plasma display panel can be quickly exhausted, so that the exhaust efficiency can be improved. As a result, the time required for the evacuation step is reduced, and the manufacturing cost can be reduced.

Further, by using the substrate for a plasma display panel, a plasma display panel in which water molecules are sufficiently exhausted can be provided. For this reason, the sputtering of the inner surface of the plasma display panel due to water molecules remaining in the completed plasma display panel can be reduced, and a long-life plasma display panel can be provided.

(2) According to the second aspect of the present invention, since the water molecule decomposing substance is in the form of particles or porous, it does not completely cover the surface of the plasma display panel substrate. For this reason, when the surface of the plasma display panel substrate is, for example, the surface of the cathode film, the electron emission function of the cathode film is not reduced. In other words, the display quality of the plasma display panel is not affected.

(3) According to the third aspect of the present invention, since the water molecule decomposing substance contains at least one of zinc oxide and zirconium oxide, the water molecule is decomposed by irradiating light (including ultraviolet rays). Can be promoted. Therefore, by irradiating the above light,
Exhaust efficiency can be improved.

(4) According to the fourth aspect of the present invention, a part of the inner surface of the plasma display panel on the surface of the plasma display panel substrate contains titanium oxide and has an action of decomposing water molecules. And a water-molecule-decomposing substance in the form of particles. Therefore, by using the plasma display panel substrate for a plasma display panel, it is possible to reduce and prevent (re) adsorption of water molecules in an exhaust step of exhausting the inside of the plasma display panel. At this time,
Since the water molecule decomposing substance contains titanium oxide, the above-mentioned action of decomposing water molecules can be promoted by irradiating light (including ultraviolet rays). As a result, the inside of the plasma display panel can be quickly exhausted, so that the exhaust efficiency can be improved.

Further, since the water molecule decomposing substance is in the form of particles or porous, it does not completely cover the above surface of the plasma display panel substrate. Therefore, when the surface is the surface of the cathode film, the electron emission function of the cathode film is not reduced. In other words, the display quality of the plasma display panel is not affected.

Further, by using the substrate for a plasma display panel, a plasma display panel in which water molecules are sufficiently exhausted can be provided. For this reason, the sputtering of the inner surface of the plasma display panel due to water molecules remaining in the completed plasma display panel can be reduced, and a long-life plasma display panel can be provided.

(5) According to the fifth aspect of the present invention, in a region of the surface of the substrate for a plasma display panel where the rate of contact with the discharge is lower, the water molecule decomposing substance is arranged at a higher density. Therefore, since water molecules can be efficiently decomposed in the high-density portion, the above-described exhaust efficiency can be further improved.

Further, at this time, since the high-density portion is provided in a region where the rate of contact with the discharge is relatively low, the formation of the discharge in the plasma display panel is not hindered, in other words, the display quality of the plasma display panel is reduced. Has no effect.

(6) According to the sixth aspect of the present invention, the portion having a low rate of contact with the discharge corresponds to the peripheral portion of the surface of the plasma display panel substrate and between adjacent display cells in the plasma display panel. And at least one of the regions. Therefore, the effect (5) can be reliably obtained.

(7) According to the seventh aspect of the invention, any of the effects (1) to (6) is exhibited, and the water molecules in the plasma display panel are sufficiently exhausted in the exhausting step. A plasma display panel can be provided. Therefore, the sputtering of the inner surface of the plasma display panel due to water molecules remaining in the completed plasma display panel can be reduced, and as a result, the life of the plasma display panel can be extended.

(8) According to the eighth aspect of the invention, in the evacuation step, energy for accelerating the action of decomposing the water molecule of the water molecule decomposing substance is given to the water molecule decomposing substance.
Exhaust efficiency can be further improved. For this reason, the time required for the evacuation process is shortened, and the manufacturing cost can be reduced.

Further, since water molecules remaining in the completed plasma display panel can be reduced,
Sputtering on the inner surface of the plasma display panel due to water molecules remaining in the completed plasma display panel can be reduced. Therefore, a plasma display panel having a long life can be manufactured.

(9) According to the ninth aspect, in the exhausting step, the water molecule decomposing substance is irradiated with light containing ultraviolet rays. Such light acts as energy for promoting the action of decomposing the water molecule, and furthermore, the decomposing action can be further enhanced by the ultraviolet light contained in the light, so that the effect of (8) can be reliably obtained. it can.

(10) According to the tenth aspect,
In the evacuation process, a discharge is formed in the plasma display panel. At this time, since the ultraviolet light generated at the time of forming the discharge acts as energy for promoting the action of decomposing the water molecules, the effect (8) can be reliably obtained.

Further, the electrons and ions generated by the discharge collide with the inner surface of the plasma display panel, so that the desorption of water molecules adsorbed on the inner surface can be promoted. Also in this respect, the exhaust efficiency can be further improved.

[Brief description of the drawings]

FIG. 1 is a schematic sectional perspective view of a PDP according to a first embodiment.

FIG. 2 is a flowchart for explaining a PDP manufacturing method according to the first embodiment;

FIG. 3 is a schematic diagram for explaining a PDP manufacturing method and an exhaust device according to the first embodiment.

FIG. 4 is a schematic sectional perspective view of a PDP according to a second embodiment.

FIG. 5 is a schematic perspective view of a PDP according to a third embodiment.

FIG. 6 is a schematic diagram for explaining a PDP manufacturing method and an exhaust device according to a fourth embodiment.

FIG. 7 is a schematic diagram for explaining a PDP manufacturing method and an exhaust device according to a fifth embodiment.

FIG. 8 is a schematic sectional perspective view of a PDP according to a sixth embodiment.

FIG. 9 is a schematic sectional perspective view of a conventional PDP.

FIG. 10 is a schematic view of an exhaust device used in a conventional PDP manufacturing method.

FIG. 11 is a schematic diagram for explaining a state of an evacuation step in a conventional PDP manufacturing method.

[Explanation of symbols]

14 Cathode film, 14S surface, 19 Water molecule decomposition substance, 51 Discharge space, 52 Discharge, 71 Heating furnace, 72
Vacuum pump, 73, 76 piping, 75 gas cylinder,
81 light source, 81L light, 86 power supply, 87 power supply tool, 111 to 113 front panel (PDP substrate), 1
31 back panel (substrate for PDP), 201-204,
201A PDP, 701 to 703 exhaust device, ST4
Exhaust process, ST5 gas filling process.

Claims (10)

[Claims] 1. A substrate for a plasma display panel forming a plasma display panel, wherein a part of the surface of the substrate for a plasma display panel, which forms an inner surface of the plasma display panel,
A substrate for a plasma display panel, wherein a water molecule decomposing substance having an action of decomposing water molecules other than titanium oxide is disposed. 2. The substrate for a plasma display panel according to claim 1, wherein the water molecule decomposing substance is in the form of particles or porous. 3. The substrate for a plasma display panel according to claim 1, wherein the water molecule decomposing substance includes at least one of zinc oxide and zirconium oxide. substrate. 4. A substrate for a plasma display panel forming a plasma display panel, wherein a part of the surface of the substrate for a plasma display panel, which forms an inner surface of the plasma display panel,
A substrate for a plasma display panel, comprising a particulate or porous water molecule decomposing substance containing titanium oxide and having a function of decomposing water molecules. 5. The plasma display panel substrate according to claim 1, wherein an area of the surface of the plasma display panel substrate that has a lower rate of contact with electric discharge has a higher density. A substrate for a plasma display panel, wherein a water molecule decomposing substance is disposed. 6. The plasma display panel substrate according to claim 5, wherein a portion having a low rate of contact with the discharge is a peripheral portion of the front surface of the plasma display panel substrate and adjacent to the plasma display panel. A substrate for a plasma display panel, comprising at least one of a region corresponding to a display cell and a display cell. 7. A plasma display panel comprising the plasma display panel substrate according to any one of claims 1 to 6. 8. The method for manufacturing a plasma display panel according to claim 7, wherein an exhausting step for exhausting the inside of the plasma display panel is performed before filling a discharge gas into the plasma display panel. A method of manufacturing the plasma display panel, wherein energy for promoting the action of decomposing the water molecule of the water molecule decomposing substance is given to the water molecule decomposing substance. 9. The method of manufacturing a plasma display panel according to claim 8, wherein in the evacuation step, the water molecule decomposing substance is irradiated with light including ultraviolet rays. Method. 10. The method for manufacturing a plasma display panel according to claim 8, wherein a discharge is formed in the plasma display panel in the evacuation step. .