JP2001323875A - Switching type trap device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a switching type trap device capable of improving trap efficiency while keeping conductance required for a vacuum chamber side, and stably operating a vacuum treatment device by increasing the longevity of a vacuum pump and protecting a harm removing device. SOLUTION: This switching type trap device comprises an approx. cylindrical hermetic trap/regeneration container 32 disposed across an exhausting path 16 exhausting from the hermetic chamber 12 by the vacuum pump 14 and a regenerating path 18 disposed adjacent to the exhausting path 16, and a trap portion 34 disposed in the trap/regeneration container 32 so as to switch between the exhausting path 16 and the regenerating path 18. On both sides of the trap portion 34, valve elements 50 equipped with a seal material 52 on an outer peripheral surface thereof are disposed so as to slide on an inner peripheral surface of the trap/regeneration container 32 integrally with the trap portion 34.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a trap device used in a vacuum exhaust system used to evacuate a vacuum chamber of a semiconductor manufacturing apparatus or the like.

[0002]

2. Description of the Related Art A conventional vacuum exhaust system will be described with reference to FIG. Here, the vacuum chamber 101
Is, for example, an etching apparatus or a chemical vapor deposition apparatus (CV).
The vacuum chamber 101 is a process chamber used in a semiconductor manufacturing process such as D), and is connected to a vacuum pump 103 through a pipe 102. Vacuum pump 103
Is for increasing the pressure of the process exhaust gas from the vacuum chamber 101 to the atmospheric pressure. Conventionally, an oil rotary pump is used, and at present, a dry pump is mainly used.

When the degree of vacuum required by the vacuum chamber 101 is higher than the ultimate degree of vacuum of the vacuum pump 103, an ultra-high vacuum pump such as a turbo molecular pump is further arranged upstream of the vacuum pump 103. An exhaust gas treatment device 104 is provided downstream of the vacuum pump 103. Gas components that are toxic or explosive depending on the type of process and cannot be released to the atmosphere as they are are subjected to treatment such as adsorption, decomposition, and absorption. Only harmless gases are released to the atmosphere. In addition,
The pipe 102 is provided with a valve at an appropriate position as needed.

[0004]

In the conventional evacuation system as described above, when a substance having a high sublimation temperature is present in the reaction by-product, the gas solidifies during the pressurization,
There is a drawback that it deposits in the vacuum pump and causes a failure of the vacuum pump.

For example, in order to etch aluminum, typical process gases such as BCl ₃ and Cl _{2 are used.}
Is used to remove BCl ₃ , C from the process chamber.
The residual gas of l ₂ process gas and the reaction by-product of AlCl ₃ are exhausted from the vacuum pump.

[0006] Of these, AlCl ₃ does not precipitate on the suction side of the vacuum pump because of its low partial pressure, but the partial pressure rises during pressurization and exhaust, and precipitates in the vacuum pump and adheres to the inner wall of the pump. This may cause a vacuum pump failure. This is S
(NH ₄ ) ₂ S generated from a CVD apparatus for forming a film of iN
The same applies to reaction by-products such as iF ₆ and NH ₄ Cl.

Conventionally, measures against this problem have been taken, such as heating the vacuum pump to prevent solidified substances from depositing inside the vacuum pump and passing the gas through the vacuum pump in a gaseous state. However, this measure is effective for the deposition in the vacuum pump, but as a result, solidified substances are deposited in the exhaust gas treatment device located downstream of the vacuum pump, causing clogging of the packed bed. There was a problem.

Therefore, a trap device is installed upstream or downstream of the pump, and a product is attached to a trap portion of the trap device to generate a solidified product (component).
May be removed first to protect various devices provided in the exhaust path. However, the conventional trap device,
The trap efficiency is generally poor, and about 60% of the components in the exhaust
% Flowed without adhering to the trap portion and adhered to downstream piping and various devices. This is considered to be due to the reason that the exhaust gas flows into the portion of the trap device where the trap efficiency is low between the inner wall of the container and the trap portion and passes without being processed.

The present invention has been made in view of the above circumstances, and can increase trap efficiency while maintaining the required conductance on the vacuum chamber side, extend the life of the vacuum pump, and protect the abatement apparatus. It is an object of the present invention to provide a switchable trap device capable of stably operating a vacuum processing device by taking such measures.

[0010]

According to a first aspect of the present invention, there is provided an exhaust pipe which is evacuated from a hermetic chamber by a vacuum pump, and a substantially cylindrical tube disposed over a regeneration path disposed adjacent to the exhaust path. An airtight trap / regeneration container, and a trap portion disposed inside the trap / regeneration container so as to be switchable between the exhaust path and the regeneration path, and an outer peripheral end face on both sides of the trap portion. A switching element, wherein a valve element having a sealing member attached thereto is disposed so as to slide on the inner peripheral surface of the trap / regeneration container integrally with the trap section.

Thus, the outer diameter of the trap portion can be set to a value close to the inner diameter of the trap / regeneration container, and the contact efficiency of the exhaust gas flowing into the trap / regeneration container with the trap portion can be improved. . Therefore, the efficiency of trapping products in the exhaust gas can be increased while maintaining the predetermined exhaust capacity by maintaining the conductance of the exhaust gas without affecting the performance of the process and the vacuum pump in the hermetic chamber. Further, since the trap section is configured to switch from the exhaust path to the regeneration path, the trap regeneration processing can be performed in-line, and the operation for trap regeneration can be simplified.

The chamber is, for example, a process chamber of a semiconductor device, and is provided with an exhaust gas treatment device for detoxifying a process gas as required. As a vacuum pump,
It is preferable to use a dry pump that does not use lubricating oil in the exhaust path in order to prevent contamination of the chamber due to back diffusion by oil.

[0013] The invention as set forth in claim 2 is characterized in that the trap
2. The switchable trap according to claim 1, wherein at least two trap units are disposed inside the regeneration container, and the trap operation on the exhaust path and the regeneration operation on the regeneration path can be performed in parallel. 3. Device.

[0014] This eliminates the need to stop the apparatus for trap regeneration processing or prepare a replacement trap even during long-time operation, and it is possible to continuously perform stable processing in an airtight chamber. It is also easy to achieve complete automation by using an appropriate switching timing determination unit.

When the trap section is configured as a temperature trap, there is a method of flowing a temperature medium from the outside to the trap section. Examples of the temperature medium include heat of vaporization of liquefied gas (for example, liquid nitrogen), cooling water, and refrigerant. is there. Also,
There is also a method of using a thermoelectric element (Peltier element), a pulse tube refrigerator, or the like to generate a low temperature in the trap portion without flowing the temperature medium itself.

On the other hand, in the reproducing section, similarly, there is a case where a heat medium is used, and a case where a heater, a thermoelectric element, a natural temperature rise or the like is used. In the regeneration, there is a case where the regenerated gas or the like is entrained in the regenerating heat medium (normal gas) and a case where the regenerated gas or the like is collected separately. In the latter case, a separate regenerating medium path is provided.

The switching of the trap section may be performed by an air cylinder. In that case, control may be performed by an air drive control device including a solenoid valve and a speed controller, and further, the air drive control device may be controlled by a control signal from a sequencer or a relay. .

As a method for completely automatically switching the trap portion without manual intervention, for example, a method is provided in which a sensor for detecting a differential pressure across the trap portion is provided, and when the detection value of the sensor becomes a predetermined value. There is a method of performing switching in advance, or a more practical method of setting an appropriate switching time in advance. If the exhaust path and the regeneration path are one-to-one, the trap and regeneration times are the same, so it is preferable to increase the regeneration capability over the trap capability so that the regeneration end time is shorter.

According to a third aspect of the present invention, the seal member is mounted on the outer peripheral end surface of the valve body so as to be able to expand toward the inner peripheral surface of the trap / regeneration container. Item 3. A switchable trap device according to Item 1 or 2.
As a result, the diameter of the sealing material is increased so that the sealing material is brought into close contact with the inner peripheral surface of the trap / regeneration container.
In order to reduce the load due to sliding during the movement of the valve, the seal material is reduced in diameter and the amount of protrusion from the outer peripheral end face of the valve is reduced when the valve is moved. The durability of the sealing material can be increased.

According to a fourth aspect of the present invention, the seal member is configured to be brought into pressure contact with the inner peripheral surface of the trap / regeneration container only when the diameter of the seal member is expanded, and the crushing amount is otherwise reduced to zero. The switchable trap device according to claim 3, wherein This makes it possible to reduce the load on the seal portion during the movement of the valve body as much as possible, while ensuring sufficient airtightness when the valve body is stopped (at the time of sealing).

According to a fifth aspect of the present invention, a means for expanding the diameter of the sealing member by pressing the sealing member outward is provided inside the valve body. It is a switching type trap apparatus of 3 or 4. Thereby, the inside of the valve body can be effectively used, and the device can be made compact.

According to a sixth aspect of the present invention, the means for expanding the diameter of the seal member is a pair of members arranged to face each other, or a V-shaped cross section facing outward at the outer peripheral portion. 6. The switchable trap device according to claim 5, wherein a pair of members having a tapered surface expanding in a shape are relatively moved in a direction of coming into contact with and separating from each other. Thereby, by making the pair of members mechanically close to each other, the diameter of the sealing material can be expanded via the vertical plane or the tapered surface, and by moving the sealing material away from the sealing member, the diameter of the sealing material can be reduced by its elastic force.

[0023]

Embodiments of the present invention will be described below with reference to the drawings. 1 and 2 show a switchable trap device according to a first embodiment of the present invention. The trap device 10 includes an exhaust path 16 for exhausting an airtight chamber 12 by a vacuum pump 14, and an exhaust path. 16
Are arranged over a reproduction path 18 arranged adjacent to the. The vacuum pump 14 has one stage in this example, but may have multiple stages. An exhaust gas treatment device 20 for removing exhaust gas is provided downstream of the vacuum pump 14. The regeneration path 18 includes a cleaning liquid line 22 and a dry gas line 24.
The control valves 26a and 26b are provided on the injection side and the discharge side of the cleaning liquid line 22, and the control valves 28a and 28b are provided on the intake side and the exhaust side of the dry gas line 24, respectively.

As shown in FIG. 2A, the switchable trap device 10 includes a substantially cylindrical trap / regeneration container 32 whose both ends are hermetically closed by closing plates 30;
A shaft 36 penetrating along the second axis, a trap portion 34 attached to the shaft 36 inside the trap / regeneration container 32, and the shaft 36 is reciprocated along the axis. An air cylinder (not shown) as a driving means is provided. The trap / regeneration container 32 has an intake port 38 and an exhaust port 40 connected to the exhaust path 16, a cleaning liquid injection port 42 and a discharge port 4 connected to the cleaning liquid line 22.
4. A purge port 46 and an exhaust port 48 connected to the drying gas line 24 are provided.

A pair of disc-shaped valve bodies 50, 50 whose outer diameters are set slightly smaller than the inner diameter of the trap / regeneration vessel 32 and which are located on both sides of the trap portion 34, are fixed to the shaft 36. I have. As shown in FIG. 2B, each of the valve elements 5
A seal mounting groove 51 is formed all around the outer peripheral end face of the seal member 0, and a seal member 52 is mounted in the groove 51. The sealing material 52 is preferably, for example, an O-ring or a cap seal. Each seal member 52 is set to have such a thickness as to be compressed by the seal mounting groove 51 and the inner peripheral surface of the trap / regeneration container 32 when the seal member 52 is attached. By sticking to
A gap between the inner peripheral surface of the trap / regeneration container 32 and the outer peripheral surface of the valve body 50 is sealed. trap·
By coating the inner peripheral surface of the recycling container 32 with Teflon (registered trademark) or the like, sliding can be made easier and chemical resistance can be increased.

With such a structure, an airtight trap / regeneration chamber 54 having a trap portion 34 therein is defined between the pair of valve elements 50 inside the trap / regeneration container 32. The trap / regeneration chamber 54 is provided with the trap section 3
4 is in the exhaust position corresponding to the exhaust path 16, the trap section 34 functions as a trap chamber,
When it is in the reproduction position corresponding to the reproduction room, it plays a role of a reproduction room.

As described above, by providing the sealing material 52 on the outer peripheral end surface of the valve body 50, a member for defining the trap position and the reproducing position is provided on the side of the trap / regeneration container 32 so as to protrude from the inner peripheral surface. No need. Therefore, setting approximately equal to the outside diameter d ₁ of the trap portion 34 to the inner diameter d ₂ of the trap regeneration vessel 32, it is not impeded the movement. As described above, since the gap between the trap portion 34 and the trap / regeneration container 32 is small, the ratio of exhaust gas introduced into the inside that bypasses the trap portion 34 without contacting the trap portion 34 is reduced. And the trap efficiency can be increased.

The trap portion 34 is composed of a plurality of baffle plates attached to the shaft 36 by welding or the like, for example, liquid such as liquid nitrogen introduced into the shaft 36, cooled air or water, or the like. Is cooled by the cooling heat medium. It should be noted that a temperature sensor (not shown) is provided at a predetermined position of the trap section 34 and the exhaust path 1
A pressure sensor (not shown) is provided before and after the trap portion 34 of the sixth section so that a temperature and a differential pressure can be detected.

Next, the operation of the switchable trap device having the above-described configuration will be described. In a position where the trap section 34 shown in FIG. 2 is located in the exhaust path 16 and the trap / regeneration chamber 54 serves as a trap chamber, a trapping medium is formed by flowing a cooling heat medium such as liquid nitrogen into the shaft 36. The part 34 is cooled. Specific components in the exhaust gas flowing into the trap / regeneration chamber 54 come into contact with the trap section 34, where they are deposited and adhered and trapped.

At this time, since the outer diameter d ₁ of the trap section 34 is set to a value close to the inner diameter d ₂ of the trap / regeneration vessel 32, the trap section 34 of the exhaust gas introduced thereinto
The amount that flows out of the tank without contact is small. Therefore,
Process and vacuum pump 1 in hermetic chamber 12
The trap efficiency for products in the exhaust gas can be increased while maintaining the conductance of the exhaust gas without affecting the performance of the exhaust gas. As a result of testing the NH ₄ Cl trap by the inventors, it has been confirmed that a trap efficiency of 98% was obtained, and that the conductance was a value having no problem in operation of the semiconductor manufacturing apparatus.

When the trap operation is completed, the trap unit 3
4 is stopped, the air cylinder is operated, and the shaft 3
6 to move the trap section 34 to the reproduction path 18 side. In this manner, with the cleaning liquid line 22 and the dry gas line 24 communicating with the trap / regeneration chamber 54,
The cleaning liquid is trapped / regenerated from the cleaning liquid injection port 42 in the regeneration / regeneration chamber 5.
Inject into 4. The trapped product is dissolved in the cleaning liquid or peeled off by the physical action thereof, and is removed along with the physical action, and is discharged from the discharge port 44. After the completion of the cleaning, a drying gas, for example, N ₂ gas is supplied into the trap / regeneration chamber 54 from the drying gas purge port 46 to dry the inside of the trap section 34 and the trap / regeneration chamber 54. Exhausted. When the drying is completed, the trap section 34 is returned to the exhaust path 16 side,
The following trap processing is performed.

Of course, the trap / regeneration chamber 54 is kept air-tight through a sealing material 52 attached to the valve body 50, and contaminants from the outside during trapping and regeneration are exhausted by the exhaust path 16 and the regeneration path 18. Is prevented from entering.

FIG. 3 shows a switching trap device according to a second embodiment of the present invention.
Are provided with regeneration positions on both sides of the exhaust position inside the trap / regeneration container 32. Exhaust path 1 at the exhaust position
A reproduction path 18 is connected to each of the two reproduction positions. The shaft 36 has two trap portions 34, 34.
Are provided, and three valve bodies 50, 50, 50 are arranged on both sides and between the trap portions 34, 34. Valve body 50
A seal member 52 is mounted in a seal mounting groove 51 (see FIG. 2) formed on the outer peripheral surface of the seal member 52. Thus, two trap / regeneration chambers 54, 54 hermetically sealed by the sealing material 52 are defined by the three valve bodies 50, 50, 50 and the inner wall of the trap / regeneration container 32, respectively.

In this example, after the cleaning liquid line 22 provided with the control valves 26a and 26b and the dry gas line 24 provided with the control valves 28a and 28b join, they are branched into two regeneration paths 18 and 18 and trapped. 10, the two regeneration paths 18, 18 join at the downstream side of the trap device 10, and then branch to a cleaning liquid line 22 and a drying gas line 24. Control valves 56a, 56b, 58a, 58b are provided on the upstream and downstream sides of the trap device 10 in each of the regeneration paths 18, 18, respectively.

According to this embodiment, in the state shown in FIG. 3, the left trap section 34 is located in the left regeneration path 18 to receive regeneration, and the right trap section 34 is located in the exhaust path 16. To perform a trap operation. Next, the shaft 3
6 to move the trap section 34 on the left side to the exhaust path 16.
And the right trap section 34 is positioned in the right reproduction path 18 to perform trap and reproduction operations, respectively. In this way, by switching between the regeneration and the trap operation, continuous operation of the trap becomes possible, without stopping the device for the regeneration process of the trap or preparing a replacement trap even during a long operation. , The airtight chamber 12 can be continuously processed.

FIGS. 4 to 7 show a switchable trap device according to a third embodiment of the present invention. The trap device 10 is basically the same as the trap device shown in FIG. That is, regeneration positions are provided on both sides of the exhaust position inside the trap / regeneration container 32, and the exhaust path is connected to the exhaust position, and the regeneration paths 18 are connected to the two regeneration positions, respectively. The shaft body 36 has two trap portions 34, 3
4 are provided, three valve bodies 50, 50, 50 are arranged on both sides and between the trap portions 34, 34, and a sealing material 52 is attached to an outer peripheral end face of each valve body 50. As a result, the two trap / regeneration chambers 54, 54, which are hermetically sealed by the sealing material 52, by the three valve bodies 50, 50, 50 and the inner wall of the trap / regeneration container 32, respectively.
Are formed.

In this example, the cleaning liquid line 22 having the control valves 26a and 26b and the dry gas line 24 having the control valves 28a and 28b are individually connected to the trap device 10. Also in this example, since the outer diameter of the trap portion 34 can be made closer to the inner diameter of the trap / regeneration vessel 32, as shown in FIG. be able to.

Here, as shown in detail in FIG. 7, the valve body 50 has a pair of disks 60, 62, and the disks 60, 6
Numeral 2 is configured to move in a direction relatively approaching and separating with driving of a cylinder (not shown) which is a driving means for moving and reciprocating the shaft body 36 (see FIGS. 4 to 6).
The one circular plate 60 is provided with a cylindrical portion 64 extending toward the other circular plate 62.
A moving ring 66 having a spire cross section is loosely fitted on the outer peripheral surface of the
Further, a packing 68 is interposed between the valve bodies 60 and 62 on the inner peripheral surface of the cylindrical portion 64.

Further, at a position facing one tapered surface 66a of the moving ring 66 of the disk 60, the tapered surface 66a
The tapered surface 60a is formed so as to spread outward in a V-shaped cross section, and at the position facing the other tapered surface 66b of the disk 62, the tapered surface 66b is outwardly formed in a V-shaped cross section. A tapered surface 62a is formed so as to expand. And
Tapered surfaces 60a, 66a, 62a, 66 facing each other
Two seal members 52, 52 are respectively arranged so as to abut on b.

As a result, as shown in FIG. 7A, when the pair of disks 60 and 62 are at positions where they have moved away from each other, each sealing material 52 has tapered surfaces 60a and 66.
a, 62a, and 66b are housed in such a manner that the outer peripheral end thereof slightly protrudes outward, and when the pair of disks 60 and 62 move in a direction approaching each other from this state,
As shown in FIG. 7B, each sealing material 52 has a tapered surface 6.
0a, 66a, 62a, and 66b, the diameter of the sealing material 52 is increased.
The three surfaces a, 62a, 66b and the inner peripheral surface of the trap / regeneration container 32 are in close contact with each other in a state similar to a so-called triangular groove, and are securely sealed, and a double seal structure is formed. It has become.

The trapping and regenerating operations of this embodiment are the same as those of the second embodiment, except that when a cylinder (not shown) is driven to move the shaft 36,
Prior to this movement, the discs 60, 62 of each valve body 50 are moved in a direction away from each other, whereby each seal material 52 is stored in the area surrounded by the tapered surfaces 60a, 66a, 62a, 66b. Then, after the movement of the shaft body 36 is completed, the pair of disks 60 and 62 are moved in a direction approaching each other, whereby each seal material 52 is tapered to the tapered surface 60.
The sealing material 52 is pressed and expanded by a, 66a, 62a, and 66b, and the sealing material 52 is sealed in close contact with the three tapered surfaces 60a, 66a, 62a, and 66b and the inner peripheral surface of the trap / regeneration container 32.

Thus, by expanding the diameter of the sealing member 52 and bringing it into close contact with the inner peripheral surface of the trap / regeneration container 32, sufficient airtightness when the valve element 50 is stopped (at the time of sealing) is ensured. During the movement of the valve body, the diameter of the seal member 52 is reduced to reduce the amount of protrusion from the outer peripheral end surface of the valve body 50, so that the friction caused by sliding of the seal material 52 at the time of movement of the valve body, the intake port 38, the exhaust port 40, and the cleaning liquid. Injection port 42 and exhaust port 44, dry gas purge port 46, and exhaust port 4
Thus, the durability of the sealing material 52 can be increased by reducing the load such as impact when passing through a stepped portion such as 8.

In this example, a double seal structure is shown. However, the moving ring in this example is omitted, and one sealing material is provided between the tapered surfaces of the pair of disks. Needless to say, a single-layered seal structure may be employed.

FIG. 8 shows a second example in which the diameter of the sealing material 52 is increased. This is provided with a gas flow groove 50a through which gas flows inside the valve body 50, and the gas flow groove 50a. 50a and a seal mounting groove 51 provided on the outer peripheral end face of the valve body 50 are communicated through a through hole 50b. In this example, a pressurized gas is introduced into the gas flow groove 50a at the time of stopping (at the time of sealing), and the sealing material 52 is pressed outward by the gas pressure to expand the diameter of the trapping / regenerating container 32. Close to the inner peripheral surface of When the valve body 50 moves, the introduction of gas is released, the diameter of the seal member 52 is reduced by its elastic force, and the amount of protrusion outward is reduced, so that the load on the seal member 52 due to sliding is reduced. Can be reduced.

FIG. 9 shows a third example in which the diameter of the sealing material 52 is enlarged. In this third example, a ring-shaped circumferential groove 70a is provided on the outer peripheral end surface of a disk-shaped main body 70. The valve element 50 is constructed by loosely fitting a half-split bimetal 72 inside the circumferential groove 70a. The bimetal 72 is configured to open outward, for example, by heating or by passing electricity. In this example, at the time of stopping (at the time of sealing), the bimetal 72 is heated or electricity is supplied, and the sealing material 52 is pressed outward by the outward force F to expand the diameter of the trap metal. It is brought into close contact with the inner peripheral surface of the regeneration container 32. When the valve body 50 is moved, the heating or the supply of electricity is released, and the diameter of the sealing material 52 is reduced by its elastic force.
By reducing the amount of outward protrusion, the load on the seal member 52 due to sliding can be reduced.

FIG. 10 shows a fourth example in which the diameter of the sealing material 52 is increased. This figure shows all three valve bodies 50 in FIG. Each of these valve elements 5
0 is provided with a pair of disks 80, 82, and a spring 84 for urging the pair of disks 80, 82 in a direction away from each other is interposed in the valve body 50 located on the left and right, Along with the elastic force of the spring 84 and the driving of a cylinder which is a driving means for reciprocating the shaft 36 (see FIG. 5 and the like), the disk 8
0, 82 are configured to move in the direction of relatively approaching and separating.

The ring-shaped member 86 is disposed at a position between the disks 80 and 82, and the seal members 52 are disposed at positions between the disks 80 and 82 on both sides of the ring-shaped member 86. Have been. Further, a packing 88 is interposed between the disks 80 and 82.

As a result, as shown in FIG.
When the pair of discs 80 and 82 are at positions where they are moved away from each other, each seal member 52 is not crushed into the area surrounded by the discs 80 and 82 on both sides of the ring-shaped body 86, that is, the trap When the pair of disks 80, 82 move in a direction approaching each other from this state without being in contact with the inner peripheral surface of the regeneration container 32 and in a free state.
As shown in FIG. 0 (b), each sealing material 52 is
6 is pressed by the disks 80 and 82 to expand the diameter, whereby the outer peripheral end of each sealing material 52 is
The inner seal 2 is closely contacted with the inner peripheral surface of the seal 2 to reliably seal the inner seal, and has a double seal structure.

In this example, a cylinder (not shown)
Is driven to move the shaft 36 (see FIG. 5 and the like), the discs 80, 82 of each valve body 50 are moved prior to this movement.
Are moved in a direction away from each other, whereby each sealing material 52 is stored in a free state at a position sandwiched between the disks 80 and 82 on both sides of the ring-shaped body 86. Then, after the movement of the shaft 36 is completed, the pair of disks 80 and 82 are moved in a direction approaching each other, whereby
2 is pressed by the ring-shaped body 86 and each of the disks 80 and 82 to increase the diameter, and the outer peripheral end of each seal material 52 is trapped and regenerated.
2. Seal the inner peripheral surface of the cylinder 2 closely.

As described above, by expanding the diameter of the sealing material 52 and bringing it into close contact with the inner peripheral surface of the trap / regeneration container 32, sufficient airtightness when the valve body 50 is stopped (at the time of sealing) is ensured. The load on the sealing material 52 during the movement of the valve body 50 can be reduced as much as possible, and the durability of the sealing material 52 can be further improved.

FIG. 11 shows a fifth example in which the diameter of the sealing material 52 is increased.
A so-called cap-type one composed of a ring 90 and a covering material 92 for covering and protecting the outer peripheral portion of the O-ring 90 is used, thereby further improving the durability of the seal. Other configurations are the same as those shown in FIG.

Also in this example, as shown in FIG. 11A, when the pair of disks 80 and 82 are at positions where they move in the direction away from each other, each seal member 52 is attached to the ring-shaped body 8.
When the pair of discs 80 and 82 move in a direction approaching each other from this state without being crushed in a region surrounded by the discs 80 and 82 on both sides of the disc 6, as shown in FIG. Each sealing material 52 is formed of a ring-shaped body 86 and each disk 80,
The diameter is increased by pressing at 82 so that each sealing material 5
The outer peripheral end portion 2 is in close contact with the inner peripheral surface of the trap / regeneration container 32 to securely seal it, and furthermore, a double seal structure is configured.

[0053]

As described above, according to the present invention, the outer diameter of the trap section can be set to a value close to the inner diameter of the trap / regeneration vessel, and the trap of exhaust gas flowing into the trap / regeneration vessel can be trapped. The efficiency of contact with the part can be improved. Therefore, while maintaining the conductance of the trap device and securing a predetermined evacuation capacity, it is possible to increase the efficiency of trapping products in exhaust gas, while extending the life of the vacuum pump and protecting the abatement device, etc. The vacuum processing device can be operated stably.

In addition, by forming the seal member so as to be freely expandable toward the inner peripheral surface of the trap / regeneration container, sufficient airtightness when the valve element is stopped (at the time of sealing) can be ensured, and the seal member can be used. The load due to sliding during the movement of the valve body can be reduced, and the durability of the sealing material can be increased.

[Brief description of the drawings]

FIG. 1 is a schematic diagram illustrating an overall configuration of a trap device according to a first embodiment of the present invention.

FIG. 2 is a sectional view showing a main part of the trap device of FIG.

FIG. 3 is a diagram illustrating an overall configuration of a trap device according to a second embodiment of the present invention.

FIG. 4 is a schematic diagram illustrating an overall configuration of a trap device according to a third embodiment of the present invention.

FIG. 5 is a sectional view showing a main part of the trap device of FIG. 4;

FIG. 6 is a sectional view taken along line AA of FIG. 5;

FIGS. 7A and 7B are cross-sectional views showing a main part of a sealing member expanding means provided in the trap device of FIG. 4, wherein FIG. 7A shows a state when the valve body is moved, and FIG. .

FIG. 8 is a cross-sectional view showing a main part of a second sealing material expanding means of the present invention.

FIG. 9 shows a third sealing material expanding means of the present invention;
(A) is sectional drawing, (b) is the BB line arrow line view of (a).

FIGS. 10A and 10B are cross-sectional views illustrating a fourth sealing member diameter expanding unit according to the present invention, in which FIG. 10A illustrates a state when the valve body is moved, and FIG.

FIGS. 11A and 11B are cross-sectional views showing a fifth sealing member diameter expanding means of the present invention, wherein FIG. 11A shows a state when the valve element is moved, and FIG.

FIG. 12 is a view showing the structure of a conventional evacuation system.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Trap apparatus 12 Airtight chamber 14 Vacuum pump 16 Evacuation path 18 Regeneration path 20 Exhaust gas treatment apparatus 22 Cleaning liquid line 24 Dry gas line 32 Trap / regeneration container 34 Trap part 36 Shaft 38 Inlet 40 Exhaust port 42 Cleaning liquid injection port 44 Discharge port 46 Dry gas purge port 48 Exhaust port 50 Valve element 50a Gas flow groove 50b Through hole 51 Seal mounting groove 52 Seal material 54 Trap / regeneration chamber 60 Disk 60a Same as taper surface 62 Disk 62a Same as taper surface 66 Moving ring 66a 66b Same, tapered surface 72 Bimetal 80, 82 Disk 86 Ring-shaped body

Claims (6)

[Claims] 1. An exhaust path for exhausting air from a hermetic chamber by a vacuum pump, a substantially cylindrical air-tight trap / regeneration vessel disposed over a regeneration path disposed adjacent to the exhaust path, A trap portion disposed inside the regeneration container so as to be able to switch between the exhaust path and the regeneration path, and a valve body having a sealing material attached to an outer peripheral end face on both sides of the trap portion; A switchable trap device, which is disposed so as to slide integrally on the inner peripheral surface of the trap / regeneration container. 2. The apparatus according to claim 1, wherein at least two trap portions are disposed inside the trap / regeneration container, and a trap operation in the exhaust path and a regeneration operation in the regeneration path can be performed in parallel. Item 1
3. The switchable trap device according to item 1. 3. The switching device according to claim 1, wherein the sealing member is mounted on the outer peripheral end surface of the valve body so as to be able to expand toward the inner peripheral surface of the trap / regeneration container. Type trap device. 4. The sealing material according to claim 1, wherein the sealing material is pressed against the inner peripheral surface of the trapping / regenerating container only when the diameter of the sealing material is expanded, and the crushing amount becomes zero in other cases. Item 3. A switchable trap device according to Item 3. 5. The switching device according to claim 3, wherein a means for expanding the diameter of the sealing material by pressing the sealing material outward is provided inside the valve body. Type trap device. 6. The means for expanding the diameter of the sealing material includes a pair of members arranged to face each other, or a tapered surface which is opposed to each other and which expands outward in a V-shaped cross section at the outer peripheral portion. 6. The apparatus according to claim 5, wherein the pair of members are configured to relatively move in a direction of coming into contact with and separating from each other.
The switchable trap device as described in the above.