JP2001317927A - Device and method for inspecting slit-shaped groove - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a slit-shaped groove inspection device which can stably and accurately inspect the slit-shaped groove of an object to be inspected in a short time, in a state where the device is hardly affected by the illuminance variation of illumination and has a highly robust and relatively simple constitution. SOLUTION: The slit-shaped groove of the object 1 to be inspected is inspected, in such a way that the object 1 is set up at a prescribed position and irradiated with the light from a slit-shape groove-lighting means 2. The image of the groove of the object 1 is picked up by means of an mage pickup means 3 and the variable density image data about the groove inputted form the means 3 are stored in an image data storing means 5. Then, an inspecting means 6 for side face of slit-shaped groove inspects the side faces of the groove for surface roughness and another inspecting means 6 for foreign matters in groove inspects the groove for foreign matters mixed in the groove based on the image data. Finally, a slit-shaped groove inspecting and judging means 8 judges the normal/defective state of the groove.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention inspects the roughness of a slit-shaped groove side surface and the presence or absence of foreign matter in the groove based on image data of the slit-shaped groove input from an image pickup device such as a CCD camera. The present invention relates to a slit-shaped groove inspection device.

[0002]

2. Description of the Related Art In the inspection process of a rotor, which is a component of a motor, all the slit grooves on the rotor are inspected after cutting, and if the side surfaces of the slit grooves cannot be cut well and are deformed or cut in the slit grooves. It is necessary to remove foreign matters such as dust (ie, defective products). Conventionally, such a slit groove inspection operation has been performed visually and manually by a skilled operator one by one using a microscope, a magnifying glass, or the like.

More specifically, a slit-like light is projected to measure the shape of a deformed cable such as a grooved cable, and based on the shape and size of a reflected light image formed by the reflected light.
An inspection using a so-called light-section method for inspecting grooves and scratches formed on the surface has been proposed in JP-A-09-042931. Similar inspections are also performed in the field of metalworking, in which slit light is projected on the surface of a metal plate, and from the scattering direction of the slit light on the surface of the metal plate, the rolling direction of the metal plate and the presence or absence of scratches are contacted. Is detected continuously.

[0004]

In the above prior art,
When sorting the slit-shaped grooves of the inspection target into good / defective products by using a combination of image processing and laser slit light, it is necessary to measure a large number of slit-shaped grooves. Since images are sequentially captured and measured while moving the slit light, a lot of inspection time is required, and there is a problem that inspection processing cannot be performed at high speed. Also, depending on the irradiation angle of the laser, there is a problem that the reflected light cannot be properly imaged by the camera and cannot be inspected.

The present invention has been made in order to solve the above-mentioned problems in the prior art, and it has been proposed that a slit-shaped groove of an object to be inspected is hardly affected by a change in illuminance of illumination, and is stable in a short time. It is an object of the present invention to obtain a slit-shaped groove inspection apparatus which performs an accurate inspection and has a relatively simple structure and excellent robustness.

[0006]

In order to achieve such an object, a slit-shaped groove inspection apparatus according to the first aspect of the present invention provides illumination of a slit-shaped groove to be inspected by slit-shaped groove illumination means. The image of the slit-shaped groove to be inspected is captured by the image capturing unit, the roughness of the slit-shaped groove side surface is inspected by the slit-shaped groove side inspection unit, and the slit is inspected by the foreign matter inspection unit in the slit-shaped groove. Inspect for foreign matter in the shape groove,
The slit-shaped groove inspection / judgment means judges the good / defective product of the slit-shaped groove.

The slit-shaped groove inspection apparatus according to the second aspect of the present invention uses a combination of a hemispherical diffused illumination and a coaxial incident illumination to illuminate the slit-shaped groove from an arbitrary direction. The function to apply is provided to the slit-shaped groove illumination means.

According to a third aspect of the present invention, the slit-shaped groove inspection apparatus has a function of obtaining coordinate positions of all edge points of the slit-shaped groove side from an edge image created by using a differential filter. This is what the inspection means has.

According to a fourth aspect of the present invention, in the slit-shaped groove inspection apparatus, the coordinate positions of all edge points on the side surface of the slit-shaped groove are set as the center of gravity of the edge portion of the edge image created by using the differential filter. The function is provided to the slit-shaped groove side surface inspection means.

Further, the slit-shaped groove inspection apparatus according to the invention described in claim 5 has a function of using the LMedS robust linear regression algorithm when calculating a reference groove straight line from the coordinate positions of all edge points on the side of the slit-shaped groove. Is provided to the slit-shaped groove side surface inspection means.

Further, the slit-shaped groove inspection apparatus according to the present invention automatically detects all edge points on the side surface of the slit-shaped groove, calculates a reference groove straight line from the edge points, and then calculates the reference groove straight line. The slit-shaped groove side surface inspection means has a function of calculating the standard deviation value of the perpendicular line length from all the edge points and inspecting the roughness of the slit-shaped groove side surface.

According to a seventh aspect of the present invention, there is provided the slit-shaped groove inspection apparatus, wherein the slit shape is determined from the maximum perpendicular length of all the edge points on the side surface of the slit-shaped groove and the reference groove straight line calculated from all the edge points. The slit-shaped groove side surface inspection means has a function of inspecting the degree of roughness of the groove side surface.

In the slit-shaped groove inspection apparatus according to the present invention, the total length of the edge points connecting the adjacent edge points on the side faces of the slit-shaped grooves and the reference groove straight line calculated from all the edge points are obtained. The slit-shaped groove side surface inspection means has a function of inspecting the degree of roughness of the slit-shaped groove side surface using the difference from the total length.

According to a ninth aspect of the present invention, there is provided a slit-shaped groove inspection apparatus, wherein a total length of an edge point connecting adjacent edge points on a side surface of the slit-shaped groove and a reference groove straight line calculated from all the edge points are determined. The slit-shaped groove side surface inspection means has a function of inspecting the degree of roughness of the slit-shaped groove side surface using the ratio of the difference from the total length to the total length of the reference groove straight line.

The slit-shaped groove inspection apparatus according to the tenth aspect automatically binarizes a reference groove straight line calculated from a coordinate position on a side surface of the slit-shaped groove using a discriminant analysis method. The foreign substance in the slit-shaped groove has a function of detecting the foreign substance in the slit-shaped groove by the labeling process and outputting the presence of the foreign substance when the width, height, and diagonal length of the foreign substance are equal to or more than specified values. It is a thing.

According to the eleventh aspect of the present invention, there is provided a slit-shaped groove inspection apparatus, wherein a standard length of a perpendicular line between a reference groove straight line of the slit-shaped groove side face and all edge points of the groove side face by the slit-shaped groove side face inspection means. The measured value using the deviation value, or the measured value using the maximum perpendicular length of the reference groove straight line and all the edge points of the groove side surface, or the edge connecting the entire edge of the reference groove straight line and the adjacent edge point of the groove side surface Any one of the measured values using the ratio of the difference from the total length to the total length of the reference groove straight line
In any case, the slit shape groove inspection determining means is provided with a function of determining that the slit shape groove is defective when any one of the predetermined values is equal to or more than the specified value, or when foreign matter is detected by the foreign matter inspection means in the slit shape groove. .

Next, according to a twelfth aspect of the present invention, there is provided a slit-shaped groove inspection method, wherein the slit-shaped groove illuminating means illuminates the slit-shaped groove to be inspected, and the slit-shaped groove to be inspected by the image pickup means. Imaging the groove, inspecting the roughness of the slit-shaped groove side surface imaged by the image imaging unit with the slit-shaped groove side inspection unit, and inspecting the foreign matter in the slit-shaped groove with the slit-shaped groove foreign object inspection unit. Inspecting the presence / absence of the slit-shaped groove, and determining the non-defective / defective product of the slit-shaped groove from the inspection result of the slit-shaped groove side inspection means and the inspection result of the foreign matter in the slit-shaped groove by the slit-shaped groove inspection determining means. It is characterized by the following.

Further, the slit-shaped groove inspection method according to the invention described in claim 13 is characterized in that illumination is performed from any direction in the slit-shaped groove by using illumination combining hemispherical diffuse illumination and coaxial incident illumination. It is intended to be applied.

In the slit-shaped groove inspection method according to the invention, the coordinate positions of all edge points on the side surface of the slit-shaped groove are obtained from an edge image created by using a differential filter. .

According to a fifteenth aspect of the present invention, in the slit-shaped groove inspection method, the coordinate positions of all the edge points on the side surfaces of the slit-shaped groove are set as the barycentric positions of the edge portions of the edge image created using the differential filter. It is like that.

In the slit-shaped groove inspection method according to the present invention, when calculating the reference groove straight line from the coordinate positions of all edge points on the side surface of the slit-shaped groove, the LMedS ( L
east Med ian of S quares: is the least squares median) that to use a robust linear regression algorithm.

According to a seventeenth aspect of the present invention, in the slit-shaped groove inspection method, all edge points on the side surface of the slit-shaped groove are automatically detected, and a reference groove straight line is calculated from the edge points. The standard deviation value of the perpendicular line length between the edge and all the edge points is calculated, and the roughness of the side face of the slit-shaped groove is inspected.

In the slit-shaped groove inspection method according to the present invention, the slit shape may be determined from the maximum perpendicular length of all edge points on the side surface of the slit-shaped groove and the reference groove straight line calculated from all the edge points. The roughness of the side surface of the groove is inspected.

According to a nineteenth aspect of the present invention, there is provided the slit-shaped groove inspection method, wherein the total length of the edge points connecting the adjacent edge points of the slit-shaped groove side surfaces and the reference groove straight line calculated from all the edge points are determined. Using the difference from the total length, the degree of roughness of the side surface of the slit-shaped groove is inspected.

According to a twentieth aspect of the present invention, there is provided the slit-shaped groove inspection method, wherein the total length of the edge points connecting the adjacent edge points of the slit-shaped groove side surfaces and the reference groove straight line calculated from all the edge points are determined. Using the ratio of the difference from the total length to the total length of the reference groove straight line, the roughness of the slit-shaped groove side surface is inspected.

According to a twenty-first aspect of the present invention, there is provided a slit-shaped groove inspection method according to the present invention, wherein the inside of the reference groove straight line calculated from the coordinate position of the slit-shaped groove side face is automatically binarized using a discriminant analysis method. In addition, a foreign substance in the slit-shaped groove is detected by a labeling process, and when the width, height, and diagonal length of the foreign substance are equal to or larger than specified values, the foreign substance is output.

The slit-shaped groove inspection method according to the invention of claim 22 is characterized in that the slit-shaped groove side inspection means uses the standard length of the perpendicular line between the reference groove straight line of the slit-shaped groove side surface and all the edge points of the groove side surface. The measured value using the deviation value, or the measured value using the maximum perpendicular length of the reference groove straight line and all the edge points of the groove side surface, or the edge connecting the entire edge of the reference groove straight line and the adjacent edge point of the groove side surface Any one of the measured values using the ratio of the difference from the total length to the total length of the reference groove straight line
In any case, when the value exceeds a specified value, or when foreign matter is detected by the foreign matter inspection means in the slit-shaped groove, the slit-shaped groove is determined to be defective.

[0028]

According to the first aspect of the present invention, the slit-shaped groove illuminating means illuminates the slit-shaped groove to be inspected by using a combination of a hemispherical diffuse illumination and a coaxial epi-illumination. The side surface inspection means compares the roughness of the groove side surface by comparing all the edge points of the groove side surface extracted from the captured image of the slit-shaped groove input from the image capturing device with the reference groove straight line calculated from all the edge points. Inspection means for foreign matter in the slit-shaped groove inspects the presence / absence state of foreign matter between the reference groove straight lines, and the slit-shaped groove inspection determination means is the inspection result of the slit-shaped groove side surface inspection means and the foreign matter in the slit-shaped groove inspection means By judging the non-defective / defective product of the slit-shaped groove from the above, the slit-shaped groove of the inspection object is hardly affected by the change in the illuminance of the illumination and can be stably corrected in a short time. Excellent slit grooves inspection apparatus robustness can sort non-defective / defective performed Do inspection, realized in a relatively simple device configuration.

Further, the slit-shaped groove illuminating means according to the second aspect of the present invention includes a mechanism for illuminating the inside of the slit-shaped groove by using illumination combining hemispherical diffuse illumination and coaxial epi-illumination. Thus, even if the surface of the foreign matter in the slit-shaped groove is arbitrarily inclined with a mirror surface, the reflected light from the foreign matter can be returned in an arbitrary direction. Foreign matter can be detected.

Further, the slit-shaped groove side surface inspection means according to the third aspect of the present invention obtains the coordinate positions of all edge points on the slit-shaped groove side surface from an edge image created by using a differential filter, thereby obtaining illumination illuminance. Is slightly affected even if the value slightly changes, the coordinate positions of all the edge points on the side surface of the slit-shaped groove can always be obtained stably.

According to a fourth aspect of the present invention, in the slit-shaped groove side surface inspection means, the coordinate position of all edge points on the slit-shaped groove side surface is set as the center of gravity of the edge portion of the edge image created using the differential filter. Accordingly, even when the illuminance of the illumination slightly changes, the edge point position on the side surface of the slit-shaped groove can be always stably detected, and the position of the edge point can be more finely determined. .

Further, the slit-shaped groove side surface inspection means in the invention according to claim 5 is configured such that when calculating the reference groove straight line from the coordinate positions of all the edge points of the slit-shaped groove side surface,
By using the S-robust linear regression algorithm,
Even if there is an edge point on the side of the slit-shaped groove slightly deviated from the straight line, the reference groove straight line on the side of the slit-shaped groove can always be obtained accurately.

Further, the slit-shaped groove side surface inspection means in the invention according to claim 6 automatically detects all edge points of the slit-shaped groove side surface, calculates a reference groove straight line from all the edge points, and then calculates the reference groove straight line. By calculating the standard deviation of the perpendicular length between the reference groove straight line and all the edge points, and inspecting the degree of roughness of the slit-shaped groove side surface, there are many roughness locations on the slit-shaped groove side surface, and the roughness width Can be detected as defective.

Further, the slit-shaped groove side surface inspection means in the invention according to claim 7 is characterized in that the slit shape is determined from the maximum perpendicular length of all the edge points of the slit-shaped groove side surface and the reference groove straight line calculated from all the edge points. By inspecting the degree of roughness of the groove side surface, it is possible to detect a slit-shaped groove side surface having a small roughness portion but a large roughness width as a defective product.

Further, the slit-shaped groove side surface inspection means in the invention according to claim 8 is characterized in that the total length of the edge points connecting the adjacent edge points of the slit-shaped groove side surfaces and the reference groove straight line calculated from all the edge points are obtained. By inspecting the degree of roughness of the side face of the slit-shaped groove using the difference from the total length, it is possible to detect an article having a small roughness width on the side face of the slit-shaped groove, but having many roughness portions as a defective product.

Further, the slit-shaped groove side surface inspection means according to the ninth aspect of the present invention is characterized in that the slit-shaped groove side surface inspection means calculates the total length of the edge points connecting adjacent edge points of the slit-shaped groove side surfaces and the reference groove straight line calculated from all the edge points. By examining the roughness of the slit-shaped groove side surface using the ratio of the difference from the total length to the total length of the reference groove straight line, it is possible to determine that the roughness width of the slit-shaped groove side surface is small, but that there are many roughness points. It can be detected as a good product.

Further, the foreign matter inspection means in the slit-shaped groove according to the tenth aspect of the present invention automatically binarizes the inside of the reference groove straight line calculated from all the edge points on the side surface of the slit-shaped groove by using a discriminant analysis method. After that, foreign matter in the slit-shaped groove is detected by a labeling process, and when the size of the foreign matter is equal to or larger than a specified value, it is determined to be a foreign matter. It is possible to inspect foreign matter in the shape groove.

Further, the slit-shaped groove inspection determining means in the invention according to the eleventh aspect is characterized in that the slit-shaped groove side inspection means determines a standard length of a perpendicular line between a reference groove straight line of the slit-shaped groove side surface and all edge points of the groove side surface. The measured value using the deviation value, or the measured value using the maximum perpendicular length of the reference groove straight line and all the edge points of the groove side surface, or the edge connecting the entire edge of the reference groove straight line and the adjacent edge point of the groove side surface If any one of the measured values using the ratio of the difference with the total length of the reference groove to the total length of the reference groove straight line is equal to or greater than the specified value, or if foreign matter is detected by the slit-shaped groove foreign matter inspection means,
By making the slit-shaped groove a defective judgment, it is possible to judge a nondefective / defective product without overlooking even a slight defective portion with respect to the roughness of the side surface of the slit-shaped groove.

According to a twelfth aspect of the present invention, there is provided a slit-shaped groove inspection method, wherein the slit-shaped groove illuminating means illuminates the slit-shaped groove to be inspected, and the image-capturing means captures the slit-shaped groove to be inspected. Performing the step of inspecting the roughness of the slit-shaped groove side surface imaged by the image imaging unit with the slit-shaped groove side surface inspection unit, and determining whether foreign matter is present in the slit-shaped groove by the slit-shaped groove foreign object inspection unit. An inspection step, and a step of judging a non-defective / defective product of the slit-shaped groove by the slit-shaped groove inspection judging means from an inspection result of the slit-shaped groove side inspection means and an inspection result of the foreign matter in the slit-shaped groove, Stable and accurate inspection of slit-shaped grooves of the inspection object in a short time with little effect on the change in illumination intensity The slit groove inspection apparatus excellent in robustness can sort non-defective / defective products go,
It is realized with a relatively simple device configuration.

Further, the slit-shaped groove inspection method according to the invention of claim 13 is provided with a mechanism for illuminating the inside of the slit-shaped groove using illumination combining hemispherical diffuse illumination and coaxial epi-illumination. By doing so, even if the surface of the foreign matter in the slit-shaped groove is arbitrarily inclined with a mirror surface, the reflected light from the foreign matter can be returned in any direction,
It is possible to always stably capture an image from above the slit-shaped groove and detect foreign matter.

In the slit-shaped groove inspection method according to the present invention, the illuminance of the illumination can be reduced by obtaining the coordinate positions of all the edge points on the side surface of the slit-shaped groove from an edge image created by using a differential filter. Even if there is a slight change, it is hardly affected by the change, and the coordinate positions of all the edge points on the side surface of the slit-shaped groove can always be obtained stably.

According to a fifteenth aspect of the present invention, in the slit-shaped groove inspection method, the coordinate positions of all edge points on the side surface of the slit-shaped groove are set as the center of gravity of the edge portion of the edge image created by using the differential filter. Therefore, even if the illuminance of the lighting slightly changes,
The position of the edge point on the side surface of the slit-shaped groove can always be stably detected, and the position of the edge point can be more finely determined.

According to a sixteenth aspect of the present invention, in the slit shape groove inspection method, when calculating the reference groove straight line from the coordinate positions of all edge points on the side surface of the slit shape groove, the LMedS
By using the robust linear regression algorithm, the reference groove straight line on the side of the slit-shaped groove can always be accurately obtained even if there is an edge point slightly off the straight line among the edge points on the side of the slit-shaped groove.

In the slit-shaped groove inspection method according to the present invention, all the edge points on the side surface of the slit-shaped groove are automatically detected, and a reference groove straight line is calculated from all the edge points. By calculating the standard deviation value of the perpendicular length between the groove straight line and all the edge points, and inspecting the degree of roughness of the slit-shaped groove side surface, there are many roughness locations on the slit-shaped groove side surface, and the roughness width is Large ones can be detected as defective.

In the method for inspecting a slit-shaped groove according to the present invention, the slit-shaped groove may be determined from the maximum perpendicular length of all the edge points on the side surface of the slit-shaped groove and the reference groove straight line calculated from all the edge points. By inspecting the degree of roughness of the side surface, it is possible to detect, as a defective product, a portion having a small roughness on the side surface of the slit-shaped groove but having a large roughness width.

According to a nineteenth aspect of the present invention, there is provided the slit-shaped groove inspection method, wherein the total length of the edge points connecting the adjacent edge points on the side surfaces of the slit-shaped grooves and the total length of the reference groove straight line calculated from all the edge points. By examining the degree of roughness of the side face of the slit-shaped groove using the difference from the above, it is possible to detect a part having a small roughness width on the side face of the slit-shaped groove but having many roughness portions as a defective product.

According to a twentieth aspect of the present invention, there is provided the slit-shaped groove inspection method, wherein the total length of the edge points connecting the adjacent edge points on the side surfaces of the slit-shaped grooves and the total length of the reference groove straight line calculated from all the edge points thereof. Inspection of the roughness of the slit-shaped groove side using the ratio of the difference to the total length of the reference groove straight line. Can be detected as

According to a twenty-first aspect of the present invention, in the slit-shaped groove inspecting method, a discriminant analysis method is used to automatically binarize the area between the reference groove straight lines calculated from all the edge points on the side surface of the slit-shaped groove. By detecting the foreign matter in the slit-shaped groove by a labeling process and determining that the foreign matter is a foreign matter when the size of the foreign matter is equal to or larger than a specified value, the slit-shaped groove is always stable even when the illuminance of the illumination slightly changes. It is possible to inspect the inside for foreign matter contamination.

According to a twenty-second aspect of the present invention, in the slit shape groove inspection method, the standard deviation of the perpendicular length between the reference groove straight line of the slit shape groove side surface and all the edge points of the groove side surface by the slit shape groove side surface inspection means. The measured value using the value, or the measured value using the maximum perpendicular length of the reference groove straight line and all the edge points of the groove side surface, or the edge point connecting the entire edge of the reference groove straight line and the adjacent edge point of the groove side surface If any one of the measured values using the ratio of the difference from the total length to the total length of the reference groove straight line exceeds a specified value, or if a foreign substance is detected by the foreign substance inspection means in the slit-shaped groove, the slit is cut. By determining the shape groove as defective, it is possible to judge non-defective / defective products without overlooking even a slight defective portion regarding the roughness of the slit-shaped groove side surface.

[0050]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a block diagram showing a configuration of a slit-shaped groove inspection apparatus according to Embodiment 1 of the present invention. In the figure, reference numeral 2 denotes an illuminating means for illuminating the inspection object 1 from above, and is preferably illumination combining a hemispherical diffuse illumination and coaxial epi-illumination, such as halogen illumination and LED illumination. Used. Reference numeral 3 denotes an image capturing unit that captures an image of the inspection target 1 and generates grayscale image data of the inspection target. For example, a television camera or the like using a CCD (Charge Coupled Device) is used. Reference numeral 4 denotes an electronic computer which processes grayscale image data of the slit-shaped groove input from the image pickup means 3 to realize various functions of the slit-shaped groove inspection apparatus.

In the computer 4, reference numeral 5 denotes image data storage means for storing image data based on the gray-scale image of the slit-shaped groove input from the image pickup means 3 in an image data storage device, and 6 denotes the image data storage means. Slit-shaped groove side surface inspection means for inspecting the roughness of the slit-shaped groove side surface with respect to the image data, 7 means for inspecting the presence or absence of foreign matter in the slit-shaped groove, 8 means slit-shaped groove Slit-shaped groove inspection determining means for determining non-defective / defective products of the slit-shaped groove from the outputs of the side surface inspection means and the foreign matter in the slit-shaped groove inspection means.

Next, the operation will be described. Here, FIG.
5 is a flowchart showing a flow of processing of the slit-shaped groove inspection device according to the first embodiment. First, the inspection object 1 is set at a predetermined position, illuminated by the slit-shaped groove illumination means 2, and the slit-shaped groove of the inspection object 1 is imaged from above by the image imaging means 3. FIG. 3 shows the state of this imaging. In the figure, reference numeral 31 denotes a slit-shaped groove to be inspected, and reference numeral 32 denotes image data of a grayscale image taken by the image pickup means 3. Although it is actually a grayscale image, it is described as a binary image for simplicity. Thereafter, the image data is input to the computer 4. The electronic computer 4 stores the input image data in the image data storage device by the image data storage means 5 in step ST1. Then, in step ST2, the roughness of the slit-shaped groove side surface is inspected by the slit-shaped groove side surface inspection. FIG. 4 is an operation explanatory diagram for explaining the principle of extracting the edge points of the slit-shaped groove side surface from the input grayscale image data and calculating the reference groove straight line from the edge points. In the drawing, reference numeral 41 denotes a laterally-shaped slit-shaped groove, and reference numeral 42 denotes an edge image obtained by applying an edge extraction filter to the side surface of the slit-shaped groove. Also, 4
Reference numeral 3 denotes an edge centroid point group extracted from an edge image of the slit-shaped groove side surface, and reference numeral 44 denotes a reference groove straight line obtained from the edge centroid point group.

In the side inspection of the slit-shaped groove in step ST2, first, when the slit-shaped groove is horizontal with respect to the grayscale image data stored in the image data storage device, the vertical direction as shown in the equation (1) is used. y direction) Differential filter fy
When the slit-shaped groove is vertical, the horizontal (x-direction) differential filter fx as shown in equation (2)
Are sequentially applied to the image data to create an edge image 42 of the side surface of the slit-shaped groove shown in FIG. Where f in equations (1) and (2)
(i, j) is the density value (0, 0) of the coordinates (i, j) (i, j: an integer value of 0 or more).
To 255). FIG. 5 is an operation explanatory diagram for explaining a state of creating an edge image of a slit-shaped groove side surface using a differential filter.
This shows a state when x is applied to image data. In the figure, reference numeral 51 denotes a part of the original image data before the differential filter is applied, and reference numeral 52 denotes a part of the edge image data after the differential filter is applied.

Fy (i, j) = | {f (i, j-2) + f (i, j-1)} − {f (i, j + 2) + f (i, j + 1)} | ... (1) fx (i, j) = | {f (i-2, j) + f (i-1, j)}-{f (i + 2, j) + f (i + 1, j) )} | ・ ・ ・ ・ ・ （２）

Subsequently, with respect to the edge image on the side surface of the slit-shaped groove as shown by reference numeral 61 in FIG. 6, the density value of each pixel is added by sequentially scanning in the direction parallel to the slit-shaped groove, and the density added value is obtained. Seeking for Then, in order to suppress the influence of the error component included in the density addition value, a smoothing process is performed by taking the average value of the three neighboring density addition values, and the density addition distribution value 62 in the figure is obtained. The larger the density addition distribution value is, the higher the probability of being the edge portion of the edge image of the slit-shaped groove side surface is. Then, the threshold value is varied stepwise with respect to the density addition distribution value 62, so that the edge portion 2
A threshold value 63 at which points can be extracted is automatically calculated, and a region having a density addition distribution value larger than the threshold value 63 is extracted as an edge point detection region 64 on the side surface of the slit-shaped groove.

Subsequently, along the groove side surface of the edge point detection area 64 on the side of the slit-shaped groove, the position of the center of gravity is calculated point by point in this edge point detection area, and the position of the center of gravity of the slit-shaped groove side shown in FIG. An edge centroid point group 43 is obtained. Then, based on the coordinate data of the edge centroid point group 43 on the side surface of the slit-shaped groove, using the LMedS robust linear regression algorithm, the reference groove linear expression (3)
Find (4). The reference groove linear formulas (3) and (4) are linear formulas of the two reference groove straight lines 44 shown in FIG.

Y = a1X + b1 (3) y = a2X + b2 (4)

Here, the LMedS robust linear regression algorithm will be described. LMedS (= Least Median of Sq
The uares) criterion is one of the robust fitting criteria.
proposed by usseeuw (see Rousseeuw R.
J., Leroy AM: Robust Regression and Outlier D
etection, John Wiley & Sons 1986).

This fitting criterion is expressed by the following equation (5).
Is a criterion for minimizing the median of the square of the deviation ri.

LMedS = min median (ri ² ) (5)

On the other hand, the least square method (LMS = Least Minimum of Squares), which is the most general fitting criterion, is expressed by the following equation (6) using the notation of the equation (5).

LMS = min @ ri ² (6)

A major feature of the LMedS standard is the outlier (Outl
An exceptional value called ier), which deviates significantly from the normal measurement value, is automatically excluded from the calculation, and a stable result is always obtained. According to the least squares fitting criterion, if there is at least one outlier in the data, the estimated regression parameter (in the case of a straight line fitting of y = ax + b, the slope coefficient a and the y intercept b are the regression parameters). , Completely different from the original value. On the other hand, when the LMedS standard is used, if the outlier is theoretically less than 50% of the measured value, a correct value can be estimated even if it is included.

Next, a standard deviation value of a perpendicular line between an edge centroid point group on the side face of the slit-shaped groove and a reference groove straight line calculated from the centroid point group is calculated. FIG. 7 is an operation explanatory diagram for explaining a method of calculating a standard deviation value of a perpendicular length between an edge point on a side surface of the slit-shaped groove and a straight line of the reference groove, and reference numerals 71 and 72 in FIG. The edge centroid points ((X11, Y11), (X12, Y12) ..., and (X21, Y2
1), (X22, Y22)...), And reference numerals 73 and 74 denote reference groove straight lines on both side surfaces of the slit-shaped groove. At this time, the standard deviation values σ1 and σ2 of the slit-shaped groove side surface with respect to the reference groove straight line are calculated using the following equations (7) and (8).

[0065]

Here, N is the total number of edge centroid points, θ1 and θ2 are the inclination angles of the reference groove straight line, and these inclination angles θ1 and θ2 are calculated using equations (9) and (10).

Θ1 = tan ⁻¹ a1 (9) θ2 = tan ⁻¹ a2 (10)

If the calculated standard deviation values σ 1 and σ 2 of the side of the slit-shaped groove with respect to the reference groove straight line satisfy conditional expression (11), it is determined that the slit-shaped groove is non-defective in the inspection using the standard deviation value. If the conditional expression is not satisfied, it is determined that the product is defective. Here, Thσ in the conditional expression is a preset threshold value.

Σ1 ≦ Thσ and σ2 ≦ Thσ (11)

Next, the maximum perpendicular lengths of the group of edge centroid points on both sides of the slit-shaped groove and the reference groove straight line are denoted by ML 1 and M L, respectively.
Assuming that L2, when the conditional expression (12) is satisfied, the inspection is performed by the maximum perpendicular length of the slit-shaped groove, and it is determined that the product is good. When the conditional expression (12) is not satisfied, it is determined that the defective product is defective. However, ThML in the conditional expression is a preset threshold value.

ML1 ≦ ThML and ML2 ≦ ThML (12)

Next, the ratio [%] of the difference between the total length of the reference point straight line and the total length of the edge point connecting the adjacent edge centroid points on both sides of the slit-shaped groove [%] (RL1 and RL2 respectively) Definition). FIG. 8 is an operation explanatory diagram for explaining a method of calculating a difference between the total length of the edge points connecting the adjacent edge points on the side surface of the slit-shaped groove and the total length of the reference groove straight line. Are the total length of the edge points (defined as EL1 and EL2, respectively) connecting the edge centroid points adjacent to each other on both sides of the slit-shaped groove;
Reference numeral 4 denotes the total length of the reference groove straight line (defined as L1 and L2, respectively). Then, the ratios RL1 and RL2 are calculated using the following equations (13) and (14).

RL1 = (EL1−L1) × 100 / L1 (13) RL2 = (EL2−L2) × 100 / L2 (14)

If RL1 and RL2 calculated in this way satisfy the conditional expression (15), it is judged as non-defective in the inspection based on the difference between the entire edge point of the slit-shaped groove and the entire length of the reference groove straight line. If the formula is not satisfied, it is determined to be defective. Here, ThRL in the conditional expression is a preset threshold value.

RL1 ≦ ThRL and RL2 ≦ ThRL (15)

In the slit shape groove side surface inspection in step ST2, the conditional expressions (11), (12),
If any one of (15) does not satisfy the measured value on the side surface of the slit-shaped groove, the slit-shaped groove is determined to be defective. FIG. 9 is an explanatory view showing an example of a slit-shaped groove determined to be defective in the slit-shaped groove side surface inspection. In the figure, reference numeral 91 denotes an inspection based on the standard deviation value of the slit-shaped groove (conditional expression (11)), and reference numeral 92 denotes an inspection based on the maximum perpendicular length of the slit-shaped groove (conditional expression (12)).
Reference numeral 93 denotes an example of a slit-shaped groove which is determined to be defective by an inspection (conditional expression (15)) based on a difference between the entire edge point length of the slit-shaped groove and the total length of the reference groove straight line. Regarding the defect, it is possible to judge a non-defective / defective product on the side surface of the slit-shaped groove without overlooking even a slight defective portion.

Next, the presence or absence of foreign matter in the slit-shaped groove is inspected by the foreign matter inspection in the slit-shaped groove in step ST3. First, as shown in FIG. 10, automatic binarization is performed using a discriminant analysis method on a region between the reference groove straight lines 101 on both sides of the slit-shaped groove obtained in the slit-shaped groove side surface inspection in step ST2. At this time, an area larger than the threshold value according to the discriminant analysis method is a white pixel (= density value 25).
5) A small area is a black pixel (= density value 0). Since the foreign matter 102 in the slit-shaped groove looks bright and bright due to external illumination, the foreign matter 102 is always larger than the threshold value by the discriminant analysis method in the area of the foreign matter 102. Therefore, the foreign matter area becomes a white pixel by the binarization processing, and subsequently, the foreign matter area can be detected by performing the labeling processing. At this time, a region in which the detected foreign material region is in contact with the reference groove straight line of the slit-shaped groove, such as the region 103 detected as a foreign material, is excluded. If the size (width W, height H, diagonal length D) of the finally remaining foreign substance region 102 satisfies the conditional expression (16), it is detected as a foreign substance and the conditional expression is satisfied. If not, it is determined not to be foreign. However, ThW, Th of the same conditional expression
H and ThD are threshold values set in advance.

W ≧ ThW and D ≧ ThD or H ≧ ThH and D ≧ ThD (16)

If one or more foreign matter areas are detected by the above-described foreign matter inspection in the slit-shaped groove, the slit-shaped groove is determined to be defective, and no foreign matter area is detected. , The slit-shaped groove is determined to be good.

Next, in the non-defective / defective product determination processing in step ST4, any one of the inspection items in the slit-shaped groove side surface inspection in step ST2 and the foreign matter in the slit-shaped groove in step ST3 which have been performed so far. If there is any item which is determined as defective, the final result is determined to be defective. On the other hand, only those which are determined to be non-defective in all the inspection items are determined to be non-defective as final results.

The final judgment result can be stored in a predetermined storage means and made into a database, and can be applied to various failure analysis.

Embodiment 2 In the first embodiment, a case has been described in which the slit-shaped groove inspection apparatus according to the present invention is applied to the determination of a good / defective product of the slit-shaped groove. However, it can be applied to the measurement of the slit-shaped groove width. It is. FIG. 11 is an operation explanatory view showing a state of measurement of a slit-shaped groove width according to the second embodiment of the present invention. In the figure, reference numeral 111 denotes a slit-shaped groove, and 112 denotes a reference groove straight line on the side surface of the slit-shaped groove.

Next, the operation will be described. First, FIG.
Are measured at a plurality of locations between two reference groove straight lines 112 calculated from the edge points on both sides of the slit-shaped groove 111 shown in FIG. Then, an average value of the measurement results is obtained and used as a measurement width of the slit-shaped groove.

As described above, according to the second embodiment, the slit-shaped groove width is determined from the reference groove straight line calculated from the edge points on both sides of the slit-shaped groove.
There is an effect that the slit-shaped groove width can be measured at high speed without contact.

Embodiment 3 Also, in the first embodiment, the case where the slit-shaped groove inspection apparatus according to the present invention is applied to the determination of the non-defective / defective product of the slit-shaped groove has been described. However, the reference groove calculated from the edge points on both sides of the slit-shaped groove. Since the rotation angle of the slit-shaped groove is obtained from the straight line calculation formula, the rotation angle of the inspection object having the slit-shaped groove can be measured in a non-contact manner and at a high speed.

[0086]

As described above, according to the first aspect of the present invention, in the slit-shaped groove illuminating means, the slit to be inspected is used by using illumination combining hemispherical diffuse illumination and coaxial incident illumination. The shape groove is illuminated, and in the slit shape groove side surface inspection means, all the edge points of the groove side surface extracted from the captured image of the slit shape groove input from the image capturing device and the reference groove straight line calculated from all the edge points. Inspection of the roughness of the groove side surface by comparison with, in the slit-shaped groove foreign matter inspection means, to inspect the presence or absence of foreign matter between the reference groove straight line, in the slit shape groove inspection determination means,
Since the slit-shaped groove is determined to be good / defective from the output of the slit-shaped groove side surface inspection means and the output of the foreign matter in the slit-shaped groove, the slit-shaped groove of the inspection object is subjected to the change in illumination illuminance. Less susceptible,
There is an effect that a slit-shaped groove inspection apparatus excellent in robustness capable of always stably and accurately inspecting and sorting good / defective products in a short time can be obtained.

According to the second aspect of the present invention, the slit-shaped groove illuminating means illuminates the inside of the slit-shaped groove by using illumination combining hemispherical diffuse illumination and coaxial epi-illumination. Because it is configured, even if the surface of the foreign matter in the slit-shaped groove is arbitrarily inclined with a mirror surface, it is possible to return the reflected light from the foreign matter in various directions,
There is an effect that a foreign object can be detected by always capturing an image from above the slit-shaped groove stably.

According to the third aspect of the invention, since the coordinate positions of all the edge points on the side surface of the slit-shaped groove are determined from the edge image created by using the differential filter, the illuminance of the illumination slightly changes. Even in such a case, there is an effect that the edge portion of the side surface of the slit-shaped groove can always be stably detected.

According to the fourth aspect of the present invention, since the coordinate positions of all the edge points on the side surface of the slit-shaped groove are configured to be the barycentric positions of the edge portions of the edge image created by using the differential filter, the illumination is performed. Thus, even if the illuminance slightly changes, the edge point position on the side surface of the slit-shaped groove can always be stably detected, and the position of the edge point can be obtained more finely.

According to the fifth aspect of the present invention, since the LMedS robust linear regression algorithm is used when calculating the reference groove straight line from the edge point position of the slit-shaped groove side surface, the edge of the slit-shaped groove side surface is used. Even if there is an edge point slightly deviated from the straight line among the points, there is an effect that the reference groove straight line on the side surface of the slit-shaped groove can always be accurately obtained.

According to the sixth aspect of the present invention, after automatically detecting all edge points on the side face of the slit-shaped groove and calculating a reference groove straight line from all the edge points, the reference groove straight line and all the edge points are calculated. Calculate the standard deviation value of the perpendicular line length with, and inspect the roughness of the slit-shaped groove side surface, so that there are many roughness locations on the slit-shaped groove side surface and the roughness width is large. Can be detected as defective.

According to the seventh aspect of the present invention, the degree of roughness of the slit-shaped groove side surface is determined from the maximum perpendicular length of all edge points of the slit-shaped groove side surface and the reference groove straight line calculated from all the edge points. Since the inspection is configured, there is an effect that a portion having a small roughness on the side surface of the slit-shaped groove but having a large roughness width can be detected as a defective product.

According to the eighth aspect of the present invention, the difference between the total length of the edge points connecting the adjacent edge points of the slit-shaped groove side surface and the total length of the reference groove straight line calculated from all the edge points is used. Since the configuration is such that the degree of roughness of the side face of the slit-shaped groove is inspected, there is an effect that, although the roughness width of the side face of the slit-shaped groove is small, those having a large number of roughness portions can be detected as defective.

According to the ninth aspect of the present invention, the reference groove having a difference between the total length of the edge point connecting the adjacent edge points on the side surface of the slit-shaped groove and the total length of the reference groove straight line calculated from all the edge points. Since the roughness of the slit-shaped groove side surface is configured to be inspected using the ratio to the total length of the straight line, the roughness width of the slit-shaped groove side surface is small, but the one with many roughness portions can be detected as a defective product. effective.

According to the tenth aspect of the present invention, the area between the reference groove straight lines calculated from all the edge points on the side face of the slit-shaped groove is automatically binarized by using the discriminant analysis method, and then the area within the slit-shaped groove is converted. Foreign matter is detected by labeling processing, and when the width, height, and diagonal length of the foreign matter are equal to or greater than a specified value, the foreign matter is determined. Therefore, even if the illuminance of the illumination slightly changes, it is always stable. There is an effect that foreign matter in the slit-shaped groove can be inspected.

According to the eleventh aspect, the measured value using the standard deviation value of the perpendicular length of the reference groove straight line of the slit-shaped groove side face and all the edge points of the groove side face by the slit-shaped groove side face inspection means. Or the measured value using the maximum perpendicular length of the reference groove straight line and all the edge points of the groove side surface, or the standard of the difference between the total length of the reference groove straight line and the entire edge point connecting the adjacent edge points of the groove side surface If any one of the measured values using the ratio to the total length of the groove straight line exceeds a specified value, or if foreign matter is detected by the foreign matter inspection means in the slit-shaped groove, the slit-shaped groove is regarded as defective. Since the determination is made, it is possible to determine a good / defective product without overlooking even a slight defective portion with respect to the roughness of the side surface of the slit-shaped groove.

According to the twelfth aspect of the present invention, a slit-shaped groove inspection method comprises the steps of: illuminating a slit-shaped groove to be inspected by a slit-shaped groove illuminating means; Imaging step; inspecting the roughness of the slit-shaped groove side surface imaged by the image imaging means by the slit-shaped groove side surface inspection means; and detecting foreign matter in the slit-shaped groove by the slit-shaped groove foreign substance inspection means. Inspecting the presence / absence of the slit-shaped groove, and determining the non-defective / defective product of the slit-shaped groove from the inspection result of the slit-shaped groove side inspection means and the inspection result of the foreign matter in the slit-shaped groove by the slit-shaped groove inspection determining means. In this way, the slit-shaped groove of the inspection object is not easily affected by changes in the illuminance of illumination, and can be stably and accurately detected in a short time. The slit groove inspection apparatus excellent in robustness can sort non-defective / defective performed,
It is realized with a relatively simple device configuration.

According to the thirteenth aspect of the present invention, the slit-shaped groove illuminating means illuminates the inside of the slit-shaped groove by using illumination combining hemispherical diffuse illumination and coaxial epi-illumination. With this configuration, even if the surface of the foreign matter in the slit-shaped groove is arbitrarily inclined with a mirror surface, the reflected light from the foreign matter can be returned in various directions, so that the image is always stably taken from above the slit-shaped groove. Thus, there is an effect that foreign matter can be detected.

According to the fourteenth aspect, since the coordinate positions of all the edge points on the side surface of the slit-shaped groove are determined from the edge image created by using the differential filter, the illuminance of the illumination slightly changes. Even in such a case, there is an effect that the edge portion of the side surface of the slit-shaped groove can always be stably detected.

According to the fifteenth aspect of the present invention, since the coordinate positions of all the edge points on the side surface of the slit-shaped groove are configured to be the barycentric positions of the edge portions of the edge image created by using the differential filter, the illumination is performed. Thus, even if the illuminance slightly changes, the edge point position on the side surface of the slit-shaped groove can always be stably detected, and the position of the edge point can be obtained more finely.

According to the sixteenth aspect of the present invention, since the LMedS robust linear regression algorithm is used when calculating the reference groove straight line from the edge point position of the slit-shaped groove side surface, the edge of the slit-shaped groove side surface is used. Even if there is an edge point slightly deviated from the straight line among the points, there is an effect that the reference groove straight line on the side surface of the slit-shaped groove can always be accurately obtained.

According to the seventeenth aspect of the present invention, after automatically detecting all edge points on the side face of the slit-shaped groove and calculating a reference groove straight line from all the edge points, the reference groove straight line and all the edge points are calculated. Calculate the standard deviation value of the perpendicular line length with, and inspect the roughness of the slit-shaped groove side surface, so that there are many roughness locations on the slit-shaped groove side surface and the roughness width is large. Can be detected as defective.

According to the eighteenth aspect, the degree of roughness of the slit-shaped groove side surface is determined from the maximum perpendicular length of all the edge points of the slit-shaped groove side surface and the reference groove straight line calculated from all the edge points. Since the inspection is configured, there is an effect that a portion having a small roughness on the side surface of the slit-shaped groove but having a large roughness width can be detected as a defective product.

According to the nineteenth aspect of the present invention, the difference between the total length of the edge points connecting the adjacent edge points of the slit-shaped groove side surface and the total length of the reference groove straight line calculated from all the edge points is used. Since the configuration is such that the degree of roughness of the side face of the slit-shaped groove is inspected, there is an effect that, although the roughness width of the side face of the slit-shaped groove is small, those having a large number of roughness portions can be detected as defective.

According to the twentieth aspect, the reference groove having a difference between the total length of the edge points connecting the adjacent edge points of the slit-shaped groove side surface and the total length of the reference groove straight line calculated from all the edge points. Since the roughness of the slit-shaped groove side surface is configured to be inspected using the ratio to the total length of the straight line, the roughness width of the slit-shaped groove side surface is small, but the one with many roughness portions can be detected as a defective product. effective.

According to the twenty-first aspect of the present invention, the area between the reference groove straight lines calculated from all the edge points on the side face of the slit-shaped groove is automatically binarized by using the discriminant analysis method, and then the area within the slit-shaped groove is changed. Foreign matter is detected by labeling processing, and when the width, height, and diagonal length of the foreign matter are equal to or greater than a specified value, the foreign matter is determined. Therefore, even if the illuminance of the illumination slightly changes, it is always stable. There is an effect that foreign matter in the slit-shaped groove can be inspected.

According to the twenty-second aspect of the invention, the measured value using the standard deviation value of the perpendicular length of the reference groove straight line of the slit-shaped groove side face and all the edge points of the groove side face by the slit-shaped groove side face inspection means. Or the measured value using the maximum perpendicular length of the reference groove straight line and all the edge points of the groove side surface, or the standard of the difference between the total length of the reference groove straight line and the entire edge point connecting the adjacent edge points of the groove side surface If any one of the measured values using the ratio to the total length of the groove straight line exceeds a specified value, or if foreign matter is detected by the foreign matter inspection means in the slit-shaped groove, the slit-shaped groove is regarded as defective. Since the determination is made, it is possible to determine a good / defective product without overlooking even a slight defective portion with respect to the roughness of the side surface of the slit-shaped groove.

[Brief description of the drawings]

FIG. 1 is a block diagram showing an overall configuration of a slit-shaped groove inspection apparatus according to an embodiment of the present invention.

FIG. 2 is a flowchart showing an entire process of the slit-shaped groove inspection apparatus of FIG. 1;

FIG. 3 is an operation explanatory diagram for explaining a state of imaging of a slit-shaped groove in the slit-shaped groove inspection apparatus of FIG. 1;

FIG. 4 is an operation explanatory diagram for explaining the principle of extraction of an edge point on a groove side surface and calculation of a reference groove straight line from the edge point in the slit-shaped groove side surface inspection according to the present invention.

FIG. 5 is an operation explanatory diagram for explaining a state of creating an edge image of a slit-shaped groove side surface using a differential filter in the slit-shaped groove side surface inspection according to the present invention.

FIG. 6 is an operation explanatory diagram for explaining a method of extracting an edge point detection area from an edge image of a slit-shaped groove side surface in the slit-shaped groove side surface inspection according to the present invention.

FIG. 7 is an operation explanatory diagram for explaining a method of calculating a standard deviation value of a perpendicular length between an edge point on a groove side surface and a reference groove straight line in the slit-shaped groove side surface inspection according to the present invention.

FIG. 8 is an operation explanatory diagram for explaining a method of calculating a difference between an entire edge point connecting all edge points of a groove side surface and a total length of a reference groove straight line in the slit-shaped groove side surface inspection according to the present invention.

FIG. 9 is an explanatory diagram showing an example of a slit-shaped groove determined to be defective in the slit-shaped groove side surface inspection of the present invention.

FIG. 10 is an operation explanatory diagram for explaining a foreign matter detection process in the foreign matter inspection in the slit-shaped groove according to the present invention.

FIG. 11 is an operation explanatory view showing a state of measurement of a slit-shaped groove width according to the second embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Inspection object, 2 Illumination means, 3 Image imaging means, 4 Electronic computer, 5 Image data storage means, 6
Slit-shaped groove side surface inspection means, 7 Slit-shaped groove foreign substance inspection means, 8 Slit-shaped groove inspection determination means

 ────────────────────────────────────────────────── ─── Continuing from the front page (72) Inventor Hiroyuki Sasai 2-3-2 Marunouchi, Chiyoda-ku, Tokyo F-term (reference) 2F065 AA12 AA17 AA31 AA49 AA50 AA51 BB05 BB16 CC00 FF04 FF42 GG02 GG07 GG15 GG18 HH02 HH12 HH13 HH14 JJ03 JJ09 JJ26 QQ07 QQ08 QQ13 QQ17 QQ18 QQ24 QQ25 QQ27 QQ28 QQ32 QQ33 QQ41 RR05 2G051 AA90 AB01 AB20 BB01 CA03 CB01 EA11 EA14 EB14 EB01 EB01 EB01 EB01 EB01 EB01 EB01 EB01 EB01 DB02 5L096 AA06 BA03 CA04 FA08 FA14 FA69 LA05

Claims (22)

[Claims] 1. A slit-shaped groove illuminating means for illuminating a slit-shaped groove to be inspected, an image capturing means for capturing an image of the slit-shaped groove to be inspected, and a rough surface of the slit-shaped groove imaged by the image capturing means. Slit-shaped groove side surface inspection means for inspecting the condition, foreign matter inspection means in the slit-shaped groove for inspecting the presence or absence of foreign matter in the slit-shaped groove,
A slit-shaped groove inspection apparatus, comprising: a slit-shaped groove inspection / judgment means for judging a non-defective / defective product of the slit-shaped groove from inspection results of the slit-shaped groove side surface inspection means and the inspection result of the foreign matter in the slit-shaped groove. 2. The slit-shaped groove illuminating means illuminates the slit-shaped groove from an arbitrary direction by using illumination combining hemispherical diffuse illumination and coaxial epi-illumination. 2. The slit-shaped groove inspection device according to 1. 3. The slit shape according to claim 1, wherein said slit shape groove side surface inspection means obtains coordinate positions of all edge points of the slit shape groove side surface from an edge image created using a differential filter. Groove inspection device. 4. The slit-shaped groove side surface inspection means sets a coordinate position of all edge points of the slit-shaped groove side surface as a barycentric position of an edge portion of an edge image created using a differential filter. 2. The slit-shaped groove inspection device according to 1. Wherein said slit-shaped groove side inspection means, when calculating the reference groove straight line from the coordinate position of all edge points of the slit-shaped groove side, LMedS (L east Med ian of S quares:
The slit shape groove inspection apparatus according to claim 1, wherein a least squares median (robust linear regression algorithm) is used. 6. The slit-shaped groove side surface inspection means automatically detects all edge points on the slit-shaped groove side surface, calculates a reference groove straight line from the edge points, and then sets a perpendicular line between the reference groove straight line and all edge points. The slit-shaped groove inspection apparatus according to claim 1, wherein a standard deviation value of the length is calculated to inspect the roughness of the slit-shaped groove side surface. 7. The slit-shaped groove side surface inspection means determines the degree of roughness of the slit-shaped groove side surface from the maximum perpendicular length of all the edge points of the slit-shaped groove side surface and the reference groove straight line calculated from all the edge points. 2. An inspection is performed.
2. The slit-shaped groove inspection device according to 1. 8. The slit-shaped groove side surface inspection means uses a difference between an entire length of an edge point connecting adjacent edge points of the slit-shaped groove side surface and a total length of a reference groove straight line calculated from all the edge points. The slit-shaped groove inspection apparatus according to claim 1, wherein the degree of roughness of the slit-shaped groove side surface is inspected. 9. The reference groove having a difference between a total length of an edge point connecting adjacent edge points of the slit-shaped groove side surface and a total length of a reference groove straight line calculated from all the edge points. Using the ratio of the straight line to the total length,
The slit-shaped groove inspection device according to claim 1, wherein the degree of roughness of the side surface of the slit-shaped groove is inspected. 10. The slit-shaped groove foreign matter inspection means according to claim 1, after automatically binarizing, using a discriminant analysis method, between the reference groove straight lines calculated from the coordinate positions of the slit-shaped groove side surfaces, and then slitting the slits. The slit-shaped groove according to claim 1, wherein the foreign substance in the shape groove is detected by a labeling process, and when the width, height, and diagonal length of the foreign substance are equal to or more than a specified value, the foreign matter is output. Inspection equipment. 11. A standard deviation value of a perpendicular length between a reference groove straight line on a side surface of a slit-shaped groove and all edge points of the side surface of the slit by the slit-shaped groove side inspection means. Or the measured value using the maximum perpendicular length of the reference groove straight line and all the edge points of the groove side surface, or the total length of the edge point connecting the entire length of the reference groove straight line and the adjacent edge point of the groove side surface If any one of the measured values using the ratio of the difference to the total length of the reference groove straight line exceeds a specified value, or if foreign matter is detected by the foreign matter inspection means in the slit-shaped groove, the slit is 2. The shape groove is determined to be defective.
2. The slit-shaped groove inspection device according to 1. 12. A step of illuminating the slit-shaped groove to be inspected by the slit-shaped groove illuminating means, and a step of imaging the slit-shaped groove to be inspected by the image capturing means.
A step of inspecting the degree of roughness of the slit-shaped groove side surface imaged by the image imaging unit with a slit-shaped groove side surface inspection unit, and a step of inspecting the presence or absence of foreign matter in the slit-shaped groove by a slit-shaped groove foreign matter inspection unit. Determining a non-defective / defective product of the slit-shaped groove by the slit-shaped groove inspection determining means from inspection results of the slit-shaped groove side surface inspection means and the slit-shaped groove foreign matter inspection means. Groove inspection method. 13. The slit-shaped groove illuminating means illuminates the slit-shaped groove from an arbitrary direction by using illumination obtained by combining hemispherical diffuse illumination and coaxial epi-illumination. 13. The slit shape groove inspection method according to 12. 14. A slit shape groove inspection method, wherein the slit shape groove side surface inspection means obtains coordinate positions of all edge points of the slit shape groove side surface from an edge image created by using a differential filter. 15. The slit-shaped groove side surface inspection means, wherein the coordinate positions of all edge points on the slit-shaped groove side surface are set as the center of gravity of an edge portion of an edge image created using a differential filter. 13. The slit shape groove inspection method according to 12. 16. The slit groove side inspection means, in calculating the reference groove straight line from the coordinate position of all edge points of the slit-shaped groove side, LMedS (L east Med ian of S
The slit shape groove inspection method according to claim 12, wherein a quares: least squares median) robust linear regression algorithm is used. 17. The slit-shaped groove side surface inspection means automatically detects all edge points of the slit-shaped groove side surface,
After calculating the reference groove straight line from the edge point, the standard deviation value of the perpendicular length between the reference groove straight line and all the edge points is calculated, and the roughness of the slit-shaped groove side surface is inspected. Item 13. The slit-shaped groove inspection method according to Item 12. 18. The slit-shaped groove side surface inspection means determines the degree of roughness of the slit-shaped groove side surface from the maximum perpendicular length of all the edge points of the slit-shaped groove side surface and the reference groove straight line calculated from all the edge points. The method for inspecting a slit-shaped groove according to claim 12, wherein the inspection is performed. 19. The slit-shaped groove side surface inspection means uses a difference between a total length of an edge point connecting adjacent edge points of the slit-shaped groove side surface and a total length of a reference groove straight line calculated from all the edge points. The slit shape groove inspection method according to claim 12, wherein the degree of roughness of the slit shape groove side surface is inspected. 20. A reference groove having a difference between a total length of an edge point connecting adjacent edge points of the slit-shaped groove side surface and a total length of a reference groove straight line calculated from all the edge points in the slit-shaped groove side surface inspection means. 13. The slit-shaped groove inspection method according to claim 12, wherein the degree of roughness of the slit-shaped groove side surface is inspected using the ratio of the straight line to the total length. 21. In the slit-shaped groove foreign matter inspection means, after automatically binarizing the area between the reference groove straight lines calculated from the coordinate positions of the side faces of the slit-shaped groove by using a discriminant analysis method, 13. The slit-shaped groove inspection method according to claim 12, wherein a foreign substance is detected by a labeling process, and when the width, height, and diagonal length of the foreign substance are equal to or more than specified values, the foreign substance is output. 22. A measurement using a standard deviation value of a perpendicular line length between a reference groove straight line on a side surface of a slit-shaped groove and all edge points of the groove side surface in the slit-shaped groove side inspection means in the slit-shaped groove side inspection means. Or the measured value using the maximum perpendicular length of the reference groove straight line and all the edge points of the groove side surface, or the difference between the total length of the reference groove straight line and the total length of the edge points connecting adjacent edge points of the groove side surface. If any one of the measured values using the ratio to the total length of the reference groove straight line exceeds a specified value, or if foreign matter is detected by the foreign matter inspection means in the slit-shaped groove, the slit-shaped groove is defective. 13. The slit shape groove inspection method according to claim 12, wherein: