JP2001317677A - Resin pipe connecting joint for fluid equipment having quartz housing - Google Patents

Resin pipe connecting joint for fluid equipment having quartz housing

Info

Publication number
JP2001317677A
JP2001317677A JP2000134360A JP2000134360A JP2001317677A JP 2001317677 A JP2001317677 A JP 2001317677A JP 2000134360 A JP2000134360 A JP 2000134360A JP 2000134360 A JP2000134360 A JP 2000134360A JP 2001317677 A JP2001317677 A JP 2001317677A
Authority
JP
Japan
Prior art keywords
resin pipe
joint
joint body
convex portion
peripheral surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000134360A
Other languages
Japanese (ja)
Other versions
JP3663336B2 (en
Inventor
Kiyoshi Nishio
清志 西尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Pillar Packing Co Ltd
Original Assignee
Nippon Pillar Packing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Pillar Packing Co Ltd filed Critical Nippon Pillar Packing Co Ltd
Priority to JP2000134360A priority Critical patent/JP3663336B2/en
Publication of JP2001317677A publication Critical patent/JP2001317677A/en
Application granted granted Critical
Publication of JP3663336B2 publication Critical patent/JP3663336B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To connect a resin pipe direct to a quartz housing of fluid equipment without using a joint for the connection between the resin pipe and a quartz pipe of the fluid equipment. SOLUTION: A cylindrical quartz joint body 6 is joined to a quartz housing 5 of the fluid equipment. The joining means is selected from fusion, deposition or welding. A resin pipe connecting mechanism 7 employed comprises a cylindrical socket portion 63, a divergently tapering outer sealing surface 64, a cylindrical ring body 71 and a pressure ring 72. The inside back of the socket portion 63 has an annular projection 66 and an annular recess 67. The cylindrical ring body 71 has a chevron-sectioned base portion 73, a projecting portion 74 projected from an end of a resin pipe, an annular recess 79 formed in the tip face of the projecting portion 74 so as to fit on the annular projection 66, an outer annular projection 80, and an inner annular projection 78. The external surface of the outer annular projection 80 has an inner sealing surface 77 pressed against the internal surface of the inside back of the socket portion 63.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、石英製ハウジング
を有する流体機器の樹脂管接続継手に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a resin pipe connecting joint for a fluid device having a quartz housing.

【0002】[0002]

【従来の技術】半導体、医療、食品、化学といった様々
な分野で用いられる流体機器、たとえば液槽やヒータな
どにはそのハウジングを石英製にしたものがある。一
方、高純度液を取り扱うこれらの分野の配管にはフッ素
樹脂系の樹脂管が好ましく用いられている。このよう
に、流体機器のハウジングが石英製であり、配管に樹脂
管が採用されるような場合、その樹脂管の管路を流体機
器のハウジングに接続するのに図8、図9に示した継手
が用いられていた。
2. Description of the Related Art Some fluid devices used in various fields such as semiconductors, medical treatment, food, and chemistry, such as liquid tanks and heaters, have a housing made of quartz. On the other hand, a fluororesin-based resin pipe is preferably used for piping in these fields that handles high-purity liquid. As described above, in the case where the housing of the fluid device is made of quartz and a resin tube is used for the piping, the pipe of the resin tube is connected to the housing of the fluid device as shown in FIGS. 8 and 9. Joints were used.

【0003】図8は従来の継手の使用状態を示した概略
図、図9は従来の継手の断面図である。
FIG. 8 is a schematic view showing the state of use of a conventional joint, and FIG. 9 is a sectional view of the conventional joint.

【0004】図8において、1は液槽やヒータといった
流体機器の石英製のハウジングを示しており、このよう
な石英製のハウジング1に樹脂管2よりなる配管を直接
に接続することはできないため、両者が、ハウジング1
に接続した石英管12と樹脂管2とを接続する機能を備
えた継手Aを介して接続される。
In FIG. 8, reference numeral 1 denotes a quartz housing of a fluid device such as a liquid tank or a heater. A pipe made of a resin tube 2 cannot be directly connected to such a quartz housing 1. , Both are housing 1
Are connected via a joint A having a function of connecting the quartz tube 12 and the resin tube 2 connected to each other.

【0005】図9を参照してこの継手Aによる接続構造
を詳細に説明する。この継手Aにおいて、筒状の継手本
体3の一端側と他端側とは、それぞれ、石英管接続口部
31と樹脂管接続口部32とに形成されている。
Referring to FIG. 9, the connection structure using the joint A will be described in detail. In this joint A, one end side and the other end side of the tubular joint body 3 are formed in a quartz tube connection port 31 and a resin pipe connection port 32, respectively.

【0006】石英管接続口部31は、その外周面に雄ね
じ33を有していると共に、先端面が先拡がりテーパ面
34に形成されている。そして、石英管接続口部31に
挿入された石英管12の溝部13に嵌まり込んでいる抜
止めリング35とその石英管12に外嵌されているフェ
ルール36とが、雄ねじ33にねじ込まれた押輪37の
押圧部38と先拡がりテーパ面34とによって挾圧され
ている。この石英管接続口部31の側では、フェルール
36、先拡がりテーパ面34、石英管12の各圧接箇所
などによってシール性が保たれる。
The quartz tube connection port portion 31 has a male screw 33 on the outer peripheral surface thereof, and has a tapered surface 34 with a leading end surface extending forward. The retaining ring 35 fitted in the groove 13 of the quartz tube 12 inserted into the quartz tube connection port 31 and the ferrule 36 fitted outside the quartz tube 12 were screwed into the male screw 33. The pressure is held between the pressing portion 38 of the pressing wheel 37 and the tapered surface 34 that expands. On the side of the quartz tube connection port 31, the sealability is maintained by the ferrule 36, the tapered tapered surface 34, and the press-contact portions of the quartz tube 12.

【0007】これに対し、樹脂管接続口部32には、そ
の外周面に形成された雄ねじ40と先拡がりテーパ状の
外側シール面42とが設けられている。樹脂管接続口部
32と組み合わせて用いられる筒状リング体43には、
山形断面の基部44と、その基部44が樹脂管2の端部
に圧入されることによって樹脂管2の端部から突き出る
突出部45とが備わっている。そして、基部44が圧入
された樹脂管2の端部の管壁が断面山形に変形され、そ
のように変形した樹脂管2の端部が筒状リング体43と
共に樹脂管接続口部32に挿入され、樹脂管2の端部が
樹脂管接続口部32と筒状リング体43との共働によっ
て挟持されている。さらに、雄ねじ40にねじ込まれて
締め付けられた押輪46の押圧部47が、樹脂管2の断
面山形に変形されている管壁を押し付けており、この押
付けによって樹脂管2の断面山形の管壁の外周面が外側
シール面42に押し付けられている。さらに、継手本体
3の内周部に段付状の内側シール面37が形成されてお
り、上記押輪46の締付力を受けて筒状リング体43の
突出部45の先端面が内側シール面37に押し付けられ
るようになっている。この樹脂管接続口部32の側で
は、外側シール面42、断面山形に変形した樹脂管2の
管壁、筒状リング体43、内側シール面37、筒状リン
グ体43の突出部45の各圧接箇所等によってシール性
が保持される。
On the other hand, the resin pipe connection port portion 32 is provided with a male screw 40 formed on the outer peripheral surface thereof and a tapered outer sealing surface 42 having a tapered shape. The tubular ring 43 used in combination with the resin pipe connection port 32 includes:
The base 44 has a chevron-shaped cross section and a protrusion 45 protruding from the end of the resin tube 2 when the base 44 is pressed into the end of the resin tube 2. Then, the tube wall at the end of the resin tube 2 into which the base 44 is press-fitted is deformed into a mountain-shaped cross section, and the end of the resin tube 2 thus deformed is inserted into the resin tube connection port 32 together with the cylindrical ring body 43. The end of the resin pipe 2 is held by the cooperation of the resin pipe connection port 32 and the cylindrical ring body 43. Further, the pressing portion 47 of the pressing ring 46 which is screwed into the male screw 40 and pressed against the wall of the resin tube 2 which is deformed into a mountain-shaped cross section, presses the wall of the resin tube 2 having the mountain-shaped cross section. The outer peripheral surface is pressed against the outer seal surface 42. Further, a stepped inner sealing surface 37 is formed on the inner peripheral portion of the joint body 3, and the distal end surface of the projecting portion 45 of the tubular ring body 43 receives the tightening force of the pressing ring 46, thereby forming an inner sealing surface. 37. On the side of the resin pipe connection port 32, each of an outer seal surface 42, a tube wall of the resin tube 2 deformed into a mountain shape in cross section, a cylindrical ring body 43, an inner seal surface 37, and a protrusion 45 of the cylindrical ring body 43. The sealing performance is maintained by the press contact portion and the like.

【0008】このような継手Aにおいては、継手本体3
や押輪37などの構成部品はすべてフッ素系樹脂で製作
されている。また、図8に示した流体機器の石英製のハ
ウジング1に樹脂管2よりなる配管を接続する場合に
は、ハウジング1に石英管12を接続する作業や、継手
Aの樹脂管接続口部32に樹脂管2の端部を接続する作
業のほかに、石英管12を継手Aの石英管接続口部31
に接続する作業を行う必要がある。
In such a joint A, the joint body 3
The components such as the wheel and the pressing wheel 37 are all made of fluorine resin. When connecting a pipe made of the resin pipe 2 to the quartz housing 1 of the fluid device shown in FIG. 8, the work of connecting the quartz pipe 12 to the housing 1 and the resin pipe connection port 32 of the joint A are performed. In addition to the work of connecting the end of the resin tube 2 to the tube, the quartz tube 12 is connected to the quartz tube connection port 31 of the joint A.
Need to do the work of connecting to.

【0009】[0009]

【発明が解決しようとする課題】しかしながら、構成部
品のすべてがフッ素系樹脂で製作されている継手Aは高
価であり、また、上記した各作業を正確に行うことには
多くの時間が必要になり、その作業が煩わしくなるとい
う問題や、シール箇所が多いためにシール信頼性が低下
しやすいという問題があった。さらに、石英管12や継
手Aの配置スペースを確保しなければならないので、ス
ペース面で無理が生じたり配管の自由度が阻害されたり
するおそれもあった。
However, the joint A in which all of the components are made of a fluororesin is expensive, and it takes a lot of time to accurately perform the above-described operations. Therefore, there is a problem that the operation becomes troublesome, and a problem that the seal reliability tends to be reduced due to the large number of seal locations. Furthermore, since the space for disposing the quartz tube 12 and the joint A must be ensured, there is a possibility that the space may be unreasonable or the freedom of piping may be impaired.

【0010】本発明は以上の問題や事情に鑑みてなされ
たものであり、図8や図9で説明した従来の継手Aや石
英管12を用いずに、樹脂管を流体機器の石英製のハウ
ジングに直接に接続することが可能になる流体機器の樹
脂管接続継手を提供することを目的とする。
The present invention has been made in view of the above problems and circumstances. Instead of using the conventional joint A and the quartz tube 12 described in FIGS. 8 and 9, a resin tube made of quartz for a fluid device is used. An object of the present invention is to provide a resin pipe connection joint of a fluid device that can be directly connected to a housing.

【0011】[0011]

【課題を解決するための手段】本発明の採用した解決手
段とその作用を図1ないし図7に示す符号を参照して説
明する。符号を付したのは、発明の内容の理解を助ける
ためであり、発明の内容を限定する意図ではない。
The means employed by the present invention and the operation thereof will be described with reference to the reference numerals shown in FIGS. The reference numerals are provided to facilitate understanding of the content of the invention, and are not intended to limit the content of the invention.

【0012】本発明では、樹脂管接続機構7を備えた石
英製の筒状の継手本体6が、石英製ハウジング5を有す
る流体機器の上記ハウジング5に一体に接合されて、そ
のハウジング5に具備されている流通路51と上記継手
本体6の流通路62とが連通される。ハウジング5と継
手本体6との接合手段は、融着、溶着又は溶接といった
手段によることが可能である。このような樹脂管接続継
手によると、継手本体6が樹脂管接続機構7を備えてい
るので、その継手本体6に樹脂管2を接続することが可
能である。しかも、継手本体6が石英製であって石英製
のハウジング5に接合されているので、継手本体6に樹
脂管2を接続するだけで、樹脂管2が継手本体6を介し
てハウジング5に接続される。
In the present invention, a quartz tubular joint body 6 having a resin pipe connection mechanism 7 is integrally joined to the housing 5 of a fluid device having a quartz housing 5 and provided in the housing 5. The communication passage 51 and the communication passage 62 of the joint body 6 communicate with each other. The joining means between the housing 5 and the joint body 6 can be by means such as fusion, welding or welding. According to such a resin pipe connection joint, since the joint main body 6 is provided with the resin pipe connection mechanism 7, the resin pipe 2 can be connected to the joint main body 6. In addition, since the joint body 6 is made of quartz and is joined to the quartz housing 5, the resin pipe 2 is connected to the housing 5 via the joint body 6 only by connecting the resin pipe 2 to the joint body 6. Is done.

【0013】上記樹脂管接続機構7は、継手本体6に設
けられた筒状の受口部63と、その受口部63の内周に
形成された先拡がりテーパ状の外側シール面64と、樹
脂管端部に圧入されて該樹脂管端部の管壁を断面山形に
変形させると共に上記受口部63に挿入された該樹脂管
端部を上記受口部63と共働して挟持する筒状リング体
71と、継手本体6に設けられたねじ部65にねじ込ま
れて締め付けられることにより上記樹脂管2を押し付け
てその樹脂管2の断面山形の管壁の外周面を上記外側シ
ール面64に押し付ける押輪72と、を備えている。継
手本体6の受口部63の内奥部には環状凸部66が受口
部63と同心状に形成されると共に、該環状凸部66の
外周と受口部63の内奥部の内周との間に環状凹部67
が形成されている。
The resin pipe connecting mechanism 7 includes a cylindrical receiving portion 63 provided in the joint body 6, a tapered outer sealing surface 64 formed on the inner periphery of the receiving portion 63, The end of the resin pipe is pressed into the end of the resin pipe to deform the tube wall of the end of the resin pipe into a mountain shape in cross section, and the end of the resin pipe inserted into the socket 63 is cooperated with the socket 63 to clamp the end. The resin pipe 2 is pressed by being screwed into a cylindrical ring body 71 and a screw portion 65 provided on the joint body 6 and tightened, and the outer peripheral surface of the tube wall of the resin pipe 2 having a mountain-shaped cross section is sealed with the outer sealing surface. And a pressing wheel 72 that presses the pressing wheel 64. An annular convex portion 66 is formed concentrically with the receiving portion 63 at an inner portion of the receiving portion 63 of the joint body 6, and an inner peripheral portion of the annular protruding portion 66 and an inner portion of the receiving portion 63 are formed. Annular recess 67 between the circumference
Are formed.

【0014】上記筒状リング体71は、樹脂管2の端部
に圧入される山形断面の基部73と、その基部73が樹
脂管端部に圧入されることによってその樹脂管端部から
突き出る突出部74とを有し、該突出部74の先端面に
上記環状凸部66に嵌合する環状凹部79を形成すると
共に、その環状凹部79の内外壁を構成する外側環状凸
部80及び内側環状凸部78を設けている。上記外側環
状凸部80の外周面に、上記受口部63の内奥部の内周
面63aに圧接する第1の内側シール面77を形成して
いる。
The cylindrical ring body 71 has a base 73 having an angled cross section which is press-fitted into the end of the resin pipe 2, and a projection which protrudes from the resin pipe end when the base 73 is press-fitted into the resin pipe end. And an annular concave portion 79 which fits into the annular convex portion 66 on the distal end surface of the projecting portion 74, and an outer annular convex portion 80 and an inner annular portion which constitute inner and outer walls of the annular concave portion 79. The projection 78 is provided. On the outer peripheral surface of the outer annular convex portion 80, a first inner seal surface 77 that is in pressure contact with the inner peripheral surface 63a at the inner rear portion of the receiving portion 63 is formed.

【0015】上記構成の樹脂管接続機構7を備えた継手
本体6によれば、筒状リング体71の外側環状凸部80
の外周の第1の内側シール面77が受口部63の内奥部
の内周面63aに圧接してシール機能を発揮する内側シ
ール部と、受口部63の外側シール面64が樹脂管2を
筒状リング体71の基部73に圧接することによりシー
ル機能を発揮する外側シール部と、押輪72によって樹
脂管2を筒状リング体71側に押し付けることによりシ
ール機能を発揮するシール部とによって継手本体6に対
する樹脂管2のシール性能を十分に発揮し液漏れ防止を
全うすることができる。
According to the joint body 6 having the resin pipe connecting mechanism 7 having the above-described structure, the outer annular convex portion 80 of the cylindrical ring body 71 is provided.
A first inner seal surface 77 of the outer periphery of the inner seal portion presses against an inner peripheral surface 63a of the inner deep portion of the receiving portion 63 to perform a sealing function, and an outer sealing surface 64 of the receiving portion 63 is formed of a resin pipe. An outer sealing portion that exerts a sealing function by pressing the base member 2 against a base portion 73 of the cylindrical ring body 71, and a sealing portion that exerts a sealing function by pressing the resin pipe 2 against the cylindrical ring body 71 by the pressing ring 72. Thereby, the sealing performance of the resin pipe 2 with respect to the joint body 6 can be sufficiently exhibited, and liquid leakage can be prevented.

【0016】この場合において、上記第1の内側シール
面77は、図2に例示するごとく受口部63の内奥部の
内周面63aに面接触させるか、または第1の内側シー
ル面77に、図4に例示するごとく受口部63の内奥部
の内周面63aに線状に接触する1本もしくは複数本の
環状突起70を形成することができる。また上記第2の
内側シール面87においても図7に例示するごとく環状
凸部66の内周面に面接触させるか、または第2の内側
シール面87に、図6に例示するごとく環状凸部66の
内周面に線状に接触する1本もしくは複数本の環状突起
89を形成することができる。
In this case, as shown in FIG. 2, the first inner seal surface 77 is brought into surface contact with the inner peripheral surface 63a at the inner part of the receiving portion 63, or the first inner seal surface 77 is formed. In addition, as illustrated in FIG. 4, one or a plurality of annular projections 70 that linearly contact the inner peripheral surface 63 a of the inner part of the socket 63 can be formed. Also, the second inner seal surface 87 is brought into surface contact with the inner peripheral surface of the annular convex portion 66 as illustrated in FIG. 7, or the second inner seal surface 87 is contacted with the annular convex portion as illustrated in FIG. One or a plurality of annular projections 89 that contact linearly can be formed on the inner peripheral surface of 66.

【0017】また、上記継手本体6の環状凹部67の内
底と筒状リング体71の外側環状凸部80の先端面との
間に第1隙間81を、継手本体6の環状凸部66の先端
面と筒状リング体71の環状凹部79の内底との間に第
2隙間82を、継手本体6の環状凸部66の内周面と筒
状リング体71の内側環状凸部78の外周面との間に第
3隙間83をそれぞれ形成すると共に、継手本体6の環
状凸部66の外周面には第1隙間81と第2隙間82を
連通させる溝部68を形成し、これら第1,2,3隙間
及び溝部は互いに連通して継手本体6の流通路62と連
通状態にすることができる。これによれば、筒状リング
体71の環状凹部79と継手本体6の環状凸部66とが
嵌合する際に両部材間の空気抜き機能を発揮する。
Further, a first gap 81 is formed between the inner bottom of the annular concave portion 67 of the joint body 6 and the distal end surface of the outer annular convex portion 80 of the cylindrical ring body 71, and the first gap 81 of the annular convex portion 66 of the joint body 6 is formed. A second gap 82 is formed between the distal end surface and the inner bottom of the annular concave portion 79 of the cylindrical ring body 71 by the inner peripheral surface of the annular convex portion 66 of the joint body 6 and the inner annular convex portion 78 of the cylindrical ring body 71. A third gap 83 is formed between the first gap 81 and the outer peripheral surface, and a groove 68 is formed on the outer peripheral surface of the annular convex portion 66 of the joint body 6 so as to communicate the first gap 81 and the second gap 82. , 2, 3 gaps and grooves can be in communication with each other and with the flow passage 62 of the joint body 6. According to this, when the annular concave portion 79 of the tubular ring body 71 and the annular convex portion 66 of the joint body 6 are fitted, an air bleeding function between both members is exhibited.

【0018】また、上記内側環状凸部78の外周面に
も、図5、図6に例示するように、継手本体6の環状凸
部66の内周面に圧接する第2の内側シール面87を形
成することが、シール性能をより一層向上させることが
できる点で望ましい。
As shown in FIGS. 5 and 6, on the outer peripheral surface of the inner annular convex portion 78, a second inner seal surface 87 pressed against the inner peripheral surface of the annular convex portion 66 of the joint body 6 is also provided. Is desirable in that the sealing performance can be further improved.

【0019】[0019]

【発明の実施の形態】図1は本発明の一実施例の概略
図、図2はその内部構造を示した断面図である。
FIG. 1 is a schematic view of an embodiment of the present invention, and FIG. 2 is a sectional view showing the internal structure thereof.

【0020】図1及び図2において、5は液槽やヒータ
といった流体機器の石英製のハウジングを示しており、
このハウジング5は、図8及び図9で説明したハウジン
グ1に相当しており、液体の流通路51を有している。
6は石英製の筒状の継手本体であり、その基部61が、
ハウジング5の流通路51の周縁部52に一体に接合さ
れている。したがって、そのハウジング5側の流通路5
1と継手本体6の流通路62とは連通している。ハウジ
ング5と継手本体6との接合手段には、融着のほか、溶
着又は溶接による手段を採用することが可能である。
1 and 2, reference numeral 5 denotes a quartz housing of a fluid device such as a liquid tank or a heater.
The housing 5 corresponds to the housing 1 described with reference to FIGS. 8 and 9 and has a liquid passage 51.
Reference numeral 6 denotes a quartz-made cylindrical joint body, the base 61 of which is
The housing 5 is integrally joined to the peripheral edge 52 of the flow passage 51. Therefore, the flow passage 5 on the housing 5 side
1 communicates with the flow passage 62 of the joint body 6. As means for joining the housing 5 and the joint body 6, means other than fusion, such as welding or welding, can be adopted.

【0021】継手本体6は樹脂管接続機構7を備えてお
り、継手本体6はそれ自体が樹脂管接続機構7の一部分
を構成すると共に、継手本体6に樹脂管接続機構7の他
部分を構成する部品、すなわち筒状リング体71及び押
輪72が組み付けられている。
The joint body 6 has a resin pipe connection mechanism 7. The joint body 6 itself forms a part of the resin pipe connection mechanism 7, and the joint body 6 forms another part of the resin pipe connection mechanism 7. Parts, that is, a tubular ring body 71 and a pressing ring 72 are assembled.

【0022】図2のように、樹脂管接続機構7は、継手
本体6に設けられた筒状の受口部63と、筒状リング体
71と、押輪72とを備えている。受口部63は図9で
説明した樹脂管接続口部32に相当する部分であり、ま
た押輪72自体は、図9で説明した従来の継手Aの押輪
46と同じ構成を有している。筒状リング体71はその
一部の構成が図9で説明した従来の継手Aの筒状リング
体43とは相違している。
As shown in FIG. 2, the resin pipe connecting mechanism 7 includes a cylindrical receiving portion 63 provided in the joint body 6, a cylindrical ring body 71, and a pressing wheel 72. The receiving portion 63 is a portion corresponding to the resin pipe connection port portion 32 described in FIG. 9, and the pressing ring 72 itself has the same configuration as the pressing ring 46 of the conventional joint A described in FIG. The tubular ring body 71 is partially different from the tubular ring body 43 of the conventional joint A described in FIG.

【0023】継手本体6は、流通路62を有する基部6
1と、この基部61の一端に流通路62と連通状に一体
形成した筒状の受口部63とを有する。受口部63の先
端部の外周には雄ねじ65を形成するとともに、この雄
ねじ65の終端部に径大段部60を形成し、受口部63
の先端部の内周に先拡がりテーパ状の外側シール面64
を形成している。また継手本体6の受口部63の内奥部
には環状凸部66を受口部63と同心状に形成すると共
に、該環状凸部66の外周と受口部63の内奥部の内周
との間に環状凹部67を形成している。継手本体6の環
状凸部66の外周面は該環状凸部66の先端方向に向か
って下り傾斜状の傾斜面に形成すると共に、この傾斜面
に沿って溝部68を形成している。
The joint body 6 includes a base 6 having a flow passage 62.
1 and a cylindrical receiving portion 63 integrally formed at one end of the base portion 61 so as to communicate with the flow passage 62. A male screw 65 is formed on the outer periphery of the distal end of the socket 63, and a large-diameter step 60 is formed at the end of the male screw 65.
A tapered outer sealing surface 64 that widens forward on the inner periphery of the tip
Is formed. In addition, an annular convex portion 66 is formed concentrically with the receiving portion 63 in the inner deep portion of the receiving portion 63 of the joint body 6, and the outer periphery of the annular convex portion 66 and the inner deep portion of the receiving portion 63 are formed. An annular recess 67 is formed between the outer periphery and the periphery. The outer peripheral surface of the annular convex portion 66 of the joint body 6 is formed as a downwardly inclined surface toward the distal end of the annular convex portion 66, and a groove 68 is formed along the inclined surface.

【0024】筒状リング体71は耐熱性、耐薬品性に優
れるPTFE、PFA等のフッ素樹脂またはポリプロピ
レン樹脂などで成形され、樹脂管2の端部に圧入される
断面山形の基部73と、その基部73が樹脂管2の端部
に圧入されることによってその樹脂管2の端部から突き
出る突出部74とを有する。該突出部74の先端面には
継手本体6の環状凸部66に嵌合する環状凹部79を形
成すると共に、その環状凹部79の内外壁を構成する内
側環状凸部78及び外側環状凸部80を設けている。外
側環状凸部80の外周面に、継手本体6の受口部63の
内奥部の内周面63aに圧接する第1の内側シール面7
7を形成している。
The cylindrical ring body 71 is formed of a fluororesin such as PTFE or PFA or a polypropylene resin which is excellent in heat resistance and chemical resistance or the like, and has a base 73 having a mountain-shaped cross section which is pressed into the end of the resin pipe 2. The base 73 has a protrusion 74 that protrudes from the end of the resin tube 2 by being pressed into the end of the resin tube 2. An annular concave portion 79 that fits into the annular convex portion 66 of the joint body 6 is formed on the distal end surface of the projecting portion 74, and an inner annular convex portion 78 and an outer annular convex portion 80 that form inner and outer walls of the annular concave portion 79. Is provided. The first inner sealing surface 7 that presses against the outer peripheral surface of the outer annular convex portion 80 against the inner peripheral surface 63 a of the inner deep portion of the receiving portion 63 of the joint body 6.
7 are formed.

【0025】この場合、内側シール面77は、図2のよ
うに受口部63の内奥部の内周面63aに面接触するよ
うに形成するか、または図3、図4のように内側シール
面77に、受口部63の内奥部の内周面63aに線状に
接触する1本もしくは複数本の環状突起70を形成す
る。後者のように環状突起70を受口部63の内奥部の
内周面63aに線状に接触させるように形成している
と、受口部63の内奥部の内周面63aと内側シール面
77との間でのシール部の面圧を高め、より一層確実に
シール性能を向上させることができる。
In this case, the inner sealing surface 77 is formed so as to come into surface contact with the inner peripheral surface 63a at the inner part of the receiving portion 63 as shown in FIG. 2, or the inner sealing surface 77 is formed as shown in FIGS. One or a plurality of annular projections 70 are formed on the sealing surface 77 so as to linearly contact the inner peripheral surface 63 a of the inner portion of the receiving portion 63. When the annular projection 70 is formed so as to linearly contact the inner peripheral surface 63a of the inner deep portion of the receiving portion 63 as in the latter case, the inner peripheral surface 63a of the inner deep portion of the receiving portion 63 is It is possible to increase the surface pressure of the seal portion between the seal portion 77 and the seal surface 77, and to more reliably improve the sealing performance.

【0026】押輪72は、その内周面に継手本体6の雄
ねじ65に螺合する雌ねじ75を有し、その後端部の内
周には筒状リング体71が圧入された樹脂管2の端部に
挿通され、樹脂管2の断面山形に変形されている管壁を
筒状リング体71の基部73に押し付ける押圧部76を
形成している。
The pressing wheel 72 has a female screw 75 screwed into the male screw 65 of the joint body 6 on the inner peripheral surface thereof, and an end of the resin tube 2 into which the cylindrical ring body 71 is press-fitted on the inner periphery at the rear end. A pressing portion 76 is formed to press the tube wall, which is inserted into the portion and is deformed into the mountain shape in cross section of the resin tube 2, against the base portion 73 of the cylindrical ring body 71.

【0027】いま、上記のように筒状リング体71の基
部73を圧入した樹脂管2の端部を継手本体6の受口部
63に挿入する。次いで、予め、樹脂管2に挿通されて
いる押輪72の雌ねじ75を受口部63の雄ねじ65に
ねじ込み、押輪72の先端面72aが継手本体6の径大
段部60に当たるまで最も深く締め付ける。すると、押
輪72の押圧部76が、樹脂管2の断面山形に変形され
ている管壁を押し付け、その押付けによって樹脂管2の
断面山形の管壁の外周面が外側シール面64に押し付け
られる。さらに、筒状リング体71の先端の外側環状凸
部80が継手本体6の内奥の環状凹部67に嵌合すると
共に、内側環状凸部78が継手本体6の内奥の環状凸部
66の内周に入り込み、外側環状凸部80の内側シール
面77が受口部63の内奥部の内周面63aに面接触す
るか、または図3のように受口部63の内奥部の内周面
63aに環状突起70が線状に接触し、この面接触また
は線状接触により外側環状凸部80の内側シール面77
が受口部63の内奥部の内周面63aとの間からの液漏
れを防ぐシール性が保持される。
Now, the end of the resin pipe 2 into which the base 73 of the cylindrical ring 71 is press-fitted as described above is inserted into the socket 63 of the joint body 6. Next, the female screw 75 of the press ring 72 inserted into the resin pipe 2 is previously screwed into the male screw 65 of the socket 63, and the screw is tightened most deeply until the distal end surface 72 a of the press ring 72 hits the large-diameter step portion 60 of the joint body 6. Then, the pressing portion 76 of the pressing wheel 72 presses the pipe wall of the resin pipe 2 which is deformed to have a mountain-shaped cross section, and the pressing causes the outer peripheral surface of the pipe wall of the resin pipe 2 having the mountain-shaped cross section to be pressed against the outer seal surface 64. Further, the outer annular convex portion 80 at the tip of the cylindrical ring body 71 is fitted into the annular concave portion 67 inside the joint body 6, and the inner annular convex portion 78 is fitted into the annular convex portion 66 inside the joint body 6. The inner sealing surface 77 of the outer annular convex portion 80 comes into surface contact with the inner peripheral surface 63a of the inner deep portion of the receiving portion 63, or as shown in FIG. The annular projection 70 linearly contacts the inner peripheral surface 63a, and the inner contact surface 77 of the outer annular projection 80 is formed by this surface contact or linear contact.
Is maintained to prevent liquid leakage from between the inner peripheral surface 63a of the inner side of the receiving portion 63.

【0028】また、押輪72の先端面72aが継手本体
6の径大段部60に当たるまで押輪72を最も深く締め
付けると、継手本体6の環状凹部67の内底と筒状リン
グ体71の外側環状凸部80の先端面との間に第1隙間
81が、継手本体6の環状凸部66の先端面と筒状リン
グ体71の環状凹部79の内底との間に第2隙間82
が、また継手本体6の環状凸部66の内周面と筒状リン
グ体71の内側環状凸部78の外周面との間に第3隙間
83がそれぞれ形成され、第1隙間81と第2隙間82
は継手本体6の環状凸部66の外周傾斜面上の溝部68
によって連通される。これら第1、2、3隙間81,8
2,83及び溝部68は互いに連通して継手本体6の流
通路62と連通状態にある。したがって、樹脂管2の端
部を筒状リング体71と共に継手本体6の受口部63内
に挿入する際に、筒状リング体71と受口部63との間
に残留するエアーを互いに連通する第1隙間81〜第3
隙間83及び溝部68を通じて流通路62側へ円滑に逃
がすべくエアー抜きを行うことができる。また継手本体
6の環状凸部66の外周面に設けた溝部68は、筒状リ
ング体71の外側環状凸部80の内周面に当接する環状
凸部66の外周面との接触面積を減少させ接触抵抗を小
さくすることができる。
When the push ring 72 is tightened most deeply until the distal end surface 72a of the push ring 72 contacts the large-diameter step portion 60 of the joint body 6, the inner bottom of the annular concave portion 67 of the joint body 6 and the outer annular ring of the cylindrical ring body 71 are formed. A first gap 81 is formed between the distal end surface of the convex portion 80 and a second gap 82 between the distal end surface of the annular convex portion 66 of the joint body 6 and the inner bottom of the annular concave portion 79 of the tubular ring body 71.
A third gap 83 is formed between the inner peripheral surface of the annular convex portion 66 of the joint body 6 and the outer peripheral surface of the inner annular convex portion 78 of the tubular ring body 71, respectively. Gap 82
Are groove portions 68 on the outer peripheral inclined surface of the annular convex portion 66 of the joint body 6.
Communicated by These first, second and third gaps 81 and 8
2, 83 and the groove 68 are in communication with each other and in communication with the flow passage 62 of the joint body 6. Therefore, when the end of the resin pipe 2 is inserted into the socket 63 of the joint body 6 together with the cylindrical ring 71, the air remaining between the cylindrical ring 71 and the socket 63 is communicated with each other. First gap 81 to third gap
Air can be vented through the gap 83 and the groove 68 to smoothly escape to the flow passage 62 side. Further, the groove 68 provided on the outer peripheral surface of the annular convex portion 66 of the joint body 6 reduces the contact area with the outer peripheral surface of the annular convex portion 66 that comes into contact with the inner peripheral surface of the outer annular convex portion 80 of the cylindrical ring body 71. And the contact resistance can be reduced.

【0029】上記樹脂管2の接続箇所では、筒状リング
体71の突出部74の第1の内側シール面77が受口部
63の内奥部の内周面63aに圧接し、受口部63の外
側シール面64が樹脂管2を筒状リング体71の基部7
3に圧接し、押輪72によって樹脂管2を筒状リング体
71側に押し付けることによって継手本体6に対する樹
脂管2のシール性を確保できて液漏れを防止できる。
At the connection point of the resin pipe 2, the first inner sealing surface 77 of the projecting portion 74 of the cylindrical ring 71 presses against the inner peripheral surface 63 a of the inner portion of the receiving portion 63, and the receiving portion is pressed. The outer sealing surface 64 of the resin tube 63 connects the resin tube 2 to the base 7 of the cylindrical ring 71.
3, the resin tube 2 is pressed against the cylindrical ring 71 by the pressing wheel 72, so that the sealing property of the resin tube 2 with respect to the joint body 6 can be secured, and liquid leakage can be prevented.

【0030】以上説明したように流体機器のハウジング
5に接合された継手本体6に樹脂管2を接続することに
よって、樹脂管2が継手本体6を介してハウジング5に
接続される。したがって、図8で説明した従来例のよう
に、高価な継手Aを用いる必要がなくなるだけでなく、
ハウジング1に石英管12を接続する作業や、石英管1
2を継手Aの石英管接続口部31に接続する作業を行う
必要もない。
As described above, by connecting the resin pipe 2 to the joint body 6 joined to the housing 5 of the fluid device, the resin pipe 2 is connected to the housing 5 via the joint body 6. Therefore, it is not necessary to use an expensive joint A as in the conventional example described with reference to FIG.
Work to connect the quartz tube 12 to the housing 1
There is no need to perform an operation of connecting the joint 2 to the quartz tube connection port 31 of the joint A.

【0031】図5は本発明の他の実施例の内部構造を示
した断面図である。この実施例において、図2で説明し
たものと異なる点は次の通りである。すなわち、筒状リ
ング体71には第1の内側シール面77のほかに、更に
内側環状凸部78の外周面に、継手本体6の環状凸部6
6の内周面に圧接する第2の内側シール面87を形成し
ている点、図2のような隙間82,83及び溝部68を
設けていない点である。
FIG. 5 is a sectional view showing the internal structure of another embodiment of the present invention. In this embodiment, the points different from those described in FIG. 2 are as follows. That is, in addition to the first inner sealing surface 77, the outer circumferential surface of the inner annular convex portion 78 is further provided on the cylindrical ring body 71 with the annular convex portion 6 of the joint body 6.
6 in that a second inner sealing surface 87 that is in pressure contact with the inner peripheral surface is formed, and gaps 82 and 83 and a groove 68 as shown in FIG. 2 are not provided.

【0032】図5で説明した実施例では、第2の内側シ
ール面87によってもシール性が保たれ、樹脂管2のシ
ール性能をより一層向上させることができる。この場合
においても、第1の内側シール面77の場合と同様、第
2の内側シール面87は、図5のように受口部63の内
奥部の内周面63aに面接触するように形成するか、ま
たは図6、図7のように内側シール面87に、環状凸部
66の内周面に線状に接触する1本もしくは複数本の環
状突起89を形成する。その他の構成や作用は、図2、
図3で説明したところと同様であるので、同一又は相応
する部分に同一符号を付してその説明を省略する。
In the embodiment described with reference to FIG. 5, the sealing performance is maintained by the second inner sealing surface 87, and the sealing performance of the resin tube 2 can be further improved. Also in this case, similarly to the case of the first inner seal surface 77, the second inner seal surface 87 is brought into surface contact with the inner peripheral surface 63a of the inner deep portion of the receiving portion 63 as shown in FIG. Alternatively, as shown in FIGS. 6 and 7, one or a plurality of annular projections 89 are formed on the inner seal surface 87 so as to linearly contact the inner peripheral surface of the annular projection 66. Other configurations and operations are shown in FIG.
Since this is the same as that described with reference to FIG. 3, the same or corresponding portions are denoted by the same reference characters and description thereof is omitted.

【0033】[0033]

【発明の効果】本発明によれば、図8、図9で説明した
従来の継手や石英管を用いずに、樹脂管を流体機器の石
英製ハウジングに直接にかつシール性を確保しながら接
続することが可能になる。そのため、従来必要であった
作業、すなわちハウジングに石英管を接続する作業や石
英管を継手の石英管接続口部に接続する作業など煩わし
い接続作業を行う必要が無くなり、流体機器の石英製ハ
ウジングに対する樹脂管の接続作業性、シール性能を向
上できる。
According to the present invention, a resin tube is connected directly to a quartz housing of a fluid device without securing the sealability, without using the conventional joint or quartz tube described with reference to FIGS. It becomes possible to do. Therefore, there is no need to perform cumbersome connection work such as work for connecting a quartz tube to a housing and work for connecting a quartz tube to a quartz tube connection port of a joint, which is conventionally required. The connection workability and sealing performance of the resin pipe can be improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例の使用状態を示した概略図で
ある。
FIG. 1 is a schematic diagram showing a use state of an embodiment of the present invention.

【図2】本発明の一実施例の内部構造を示した断面図で
ある。
FIG. 2 is a sectional view showing the internal structure of one embodiment of the present invention.

【図3】本発明の他の実施例の内部構造を示した断面図
である。
FIG. 3 is a sectional view showing the internal structure of another embodiment of the present invention.

【図4】図3における内側シール部の拡大図である。FIG. 4 is an enlarged view of an inner seal portion in FIG.

【図5】本発明の更に他の実施例の内部構造を示した断
面図である。
FIG. 5 is a sectional view showing an internal structure of still another embodiment of the present invention.

【図6】本発明の更に又、他の実施例の内部構造を示し
た断面図である。
FIG. 6 is a sectional view showing the internal structure of still another embodiment of the present invention.

【図7】図6における内側シール部の拡大図である。FIG. 7 is an enlarged view of an inner seal portion in FIG.

【図8】従来例の継手の使用状態を示した概略図であ
る。
FIG. 8 is a schematic view showing a use state of a conventional joint.

【図9】従来例の継手の断面図である。FIG. 9 is a sectional view of a conventional joint.

【符号の説明】[Explanation of symbols]

2 樹脂管 77 第1の内側
シール面 5 ハウジング 78 内側環状凸
部 6 継手本体 79 筒状リング
体の環状凹部 7 樹脂管接続機構 80 外側環状凸
部 51 流通路 81 第1隙間 62 流通路 82 第2隙間 63 受口部 83 第3隙間 64 外側シール面 87 第2の内側
シール面 65 雄ねじ(ねじ部) 89 環状突起 66 環状凸部 67 環状凹部 68 溝部 70 環状突起 71 筒状リング体 72 押輪 73 筒状リング体の基部 74 筒状リング体の突出部
2 Resin tube 77 First inner sealing surface 5 Housing 78 Inner annular convex portion 6 Joint body 79 Annular concave portion of cylindrical ring body 7 Resin tube connection mechanism 80 Outer annular convex portion 51 Flow passage 81 First gap 62 Flow passage 82 First 2 gap 63 receiving portion 83 third gap 64 outer sealing surface 87 second inner sealing surface 65 male screw (screw portion) 89 annular projection 66 annular projection 67 annular recess 68 groove 70 annular projection 71 cylindrical ring body 72 pressing ring 73 Base of cylindrical ring 74 Projection of cylindrical ring

Claims (8)

【特許請求の範囲】[Claims] 【請求項1】 樹脂管接続機構を備えた石英製の筒状の
継手本体が、石英製ハウジングを有する流体機器の上記
ハウジングに一体に接合されて、そのハウジングに具備
されている流通路と上記継手本体の流通路とが連通され
ており、 上記樹脂管接続機構が、継手本体に設けられた筒状の受
口部と、その受口部の内周に形成された先拡がりテーパ
状の外側シール面と、樹脂管端部に圧入されて該樹脂管
端部の管壁を断面山形に変形させると共に上記受口部に
挿入された該樹脂管端部を上記受口部と共働して挟持す
る筒状リング体と、継手本体に設けられたねじ部にねじ
込まれて締め付けられることにより上記樹脂管を押し付
けて該樹脂管の断面山形の管壁の外周面を上記外側シー
ル面に押し付ける押輪と、を備えており、 上記継手本体の受口部の内奥部には環状凸部が受口部と
同心状に形成されると共に、該環状凸部の外周と受口部
の内奥部の内周との間に環状凹部が形成されており、 上記筒状リング体が、樹脂管端部に圧入される山形断面
の基部と、その基部が樹脂管端部に圧入されることによ
って該樹脂管端部から突き出る突出部とを有し、該突出
部の先端面に上記環状凸部に嵌合する環状凹部を形成す
ると共に、その環状凹部の内外壁を構成する外側環状凸
部及び内側環状凸部を設けており、 上記外側環状凸部の外周面に、上記受口部の内奥部の内
周面に圧接する第1の内側シール面を形成している石英
製ハウジングを有する流体機器の樹脂管接続継手。
1. A quartz tubular joint body having a resin pipe connection mechanism is integrally joined to the housing of a fluid device having a quartz housing, and a flow passage provided in the housing and the fluid passage. The flow passage of the joint body is in communication with the resin pipe connecting mechanism. The resin pipe connecting mechanism includes a tubular receiving portion provided in the fitting body, and a tapered outer portion formed on an inner periphery of the receiving portion. The sealing surface and the end of the resin pipe inserted into the socket while the pipe wall of the end of the resin pipe is pressed into the end of the resin pipe to deform the wall of the end of the resin pipe into a mountain shape in cooperation with the socket. A pressing ring that presses the resin pipe by being screwed into a threaded portion provided in the joint body and tightened by being screwed into a screw portion provided in the joint body, and pressing the outer peripheral surface of the pipe wall having a mountain-shaped cross section of the resin pipe against the outer sealing surface. And a receiving part of the joint body. An annular convex portion is formed concentrically with the receiving portion in the inner rear portion, and an annular concave portion is formed between the outer periphery of the annular convex portion and the inner periphery of the inner rear portion of the receiving portion, The cylindrical ring body has a base having a chevron cross section that is press-fitted into the end of the resin pipe, and a protruding portion that protrudes from the end of the resin pipe when the base is pressed into the end of the resin pipe. An annular concave portion that fits into the annular convex portion is formed on the distal end surface of the portion, and an outer annular convex portion and an inner annular convex portion that form inner and outer walls of the annular concave portion are provided. A resin pipe connection joint for a fluid device having a quartz housing having a first inner sealing surface formed on a surface thereof, the first inner sealing surface being in pressure contact with the inner peripheral surface of the inner part of the receiving portion.
【請求項2】 上記第1の内側シール面が上記受口部の
内奥部の内周面に面接触している請求項1に記載の石英
製ハウジングを有する流体機器の樹脂管接続継手。
2. The resin pipe connecting joint for a fluid device having a quartz housing according to claim 1, wherein the first inner sealing surface is in surface contact with an inner peripheral surface of an inner deep portion of the receiving portion.
【請求項3】 上記第1の内側シール面に、上記受口部
の内奥部の内周面に線状に接触する1本もしくは複数本
の環状突起が形成されている請求項1記載の石英製ハウ
ジングを有する流体機器の樹脂管接続継手。
3. The method according to claim 1, wherein one or a plurality of annular projections are formed on the first inner sealing surface so as to linearly contact an inner peripheral surface of an inner part of the socket. Resin pipe connection joint for fluid equipment having a quartz housing.
【請求項4】 上記継手本体の環状凹部の内底と筒状リ
ング体の外側環状凸部の先端面との間に第1隙間を、継
手本体の環状凸部の先端面と筒状リング体の環状凹部の
内底との間に第2隙間を、継手本体の環状凸部の内周面
と筒状リング体の内側凸部の内周面との間に第3隙間を
それぞれ形成すると共に、継手本体の環状凸部の外周面
には第1隙間と第2隙間を連通させる溝部を形成し、こ
れら第1,2,3隙間及び溝部は互いに連通して継手本
体の流通路と連通状態にある請求項1ないし3のいずれ
かに記載の石英製ハウジングを有する流体機器の樹脂管
接続継手。
4. A first gap between the inner bottom of the annular concave portion of the joint body and the distal end surface of the outer annular convex portion of the tubular ring body, and a first gap between the distal end surface of the annular convex portion of the joint body and the tubular ring body. And a third gap between the inner peripheral surface of the annular convex portion of the joint body and the inner peripheral surface of the inner convex portion of the cylindrical ring body, respectively. A groove is formed on the outer peripheral surface of the annular convex portion of the joint body to communicate the first gap and the second gap, and the first, second, and third gaps and the groove communicate with each other to communicate with the flow passage of the joint body. A resin pipe connection joint for a fluid device having the quartz housing according to any one of claims 1 to 3.
【請求項5】 上記内側環状凸部の外周面に、上記継手
本体の環状凸部の内周面に圧接する第2の内側シール面
を形成している請求項1ないし3のいずれかに記載の石
英製ハウジングを有する流体機器の樹脂管接続継手。
5. A joint according to claim 1, wherein a second inner sealing surface is formed on an outer peripheral surface of said inner annular convex portion to press against an inner peripheral surface of said annular convex portion of said joint body. Resin pipe joint for fluid equipment having a quartz housing.
【請求項6】 上記第2の内側シール面が上記継手本体
の環状凸部の内周面に面接触している請求項5に記載の
石英製ハウジングを有する流体機器の樹脂管接続継手。
6. The resin pipe joint of a fluid device having a quartz housing according to claim 5, wherein the second inner sealing surface is in surface contact with the inner peripheral surface of the annular convex portion of the joint body.
【請求項7】 上記第2の内側シール面に、上記継手本
体の環状凸部の内周面に線状に接触する1本もしくは複
数本の環状突起が形成されている請求項5に記載の石英
製ハウジングを有する流体機器の樹脂管接続継手。
7. The one or more annular projections according to claim 5, wherein the second inner sealing surface is formed with one or more annular projections that linearly contact the inner peripheral surface of the annular projection of the joint body. Resin pipe connection joint for fluid equipment having a quartz housing.
【請求項8】 ハウジングと継手本体との接合手段が、
融着、溶着又は溶接による手段である請求項1ないし7
のいずれかに記載の石英製ハウジングを有する流体機器
の樹脂管接続継手。
8. A joint means for connecting the housing and the joint body,
8. A method according to claim 1, wherein said means is fusion, welding or welding.
A resin pipe connection joint for a fluid device having the quartz housing according to any one of the above.
JP2000134360A 2000-05-08 2000-05-08 Resin pipe joint for fluid equipment with quartz housing Expired - Fee Related JP3663336B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000134360A JP3663336B2 (en) 2000-05-08 2000-05-08 Resin pipe joint for fluid equipment with quartz housing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000134360A JP3663336B2 (en) 2000-05-08 2000-05-08 Resin pipe joint for fluid equipment with quartz housing

Publications (2)

Publication Number Publication Date
JP2001317677A true JP2001317677A (en) 2001-11-16
JP3663336B2 JP3663336B2 (en) 2005-06-22

Family

ID=18642653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000134360A Expired - Fee Related JP3663336B2 (en) 2000-05-08 2000-05-08 Resin pipe joint for fluid equipment with quartz housing

Country Status (1)

Country Link
JP (1) JP3663336B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100924049B1 (en) 2002-01-11 2009-10-27 소니 가부시끼 가이샤 Recording method, recording apparatus, reproducing method and reproducing apparatus
CN111919055A (en) * 2018-03-22 2020-11-10 日本皮拉工业株式会社 Fluid device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100924049B1 (en) 2002-01-11 2009-10-27 소니 가부시끼 가이샤 Recording method, recording apparatus, reproducing method and reproducing apparatus
CN111919055A (en) * 2018-03-22 2020-11-10 日本皮拉工业株式会社 Fluid device
CN111919055B (en) * 2018-03-22 2022-03-18 日本皮拉工业株式会社 Fluid device

Also Published As

Publication number Publication date
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