JP2001317652A - Electromagnetic proportional valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electromagnetic proportional valve capable of preventing a leakage of gas from a back pressure hole when a valve element is closed even if a hole is formed in a diaphragm. SOLUTION: The valve element 6 moving vertically by conducting electricity into a coil 10 is provided in a main body part 4 of the electromagnetic proportional valve 1. A movable body 9 is brought into contact with an upper end of a connection shaft 7 erected at the center of the valve element 6. A back pressure chamber closing member 19 is provided in a peripheral fringe part of an upper end face of the movable body 9. When the coil 10 does not carry a current, the movable body 9 is energized upward by a spring 16, and a back pressure chamber 14 is closed due to the contact of the closing member 19 and a packing 22. Moreover, when the coil 10 carries a current, the movable body 9 moves downward so that a back pressure chamber 14 communicates with atmospheric air through the back pressure hole 24.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a proportional solenoid valve.

[0002]

2. Description of the Related Art FIG.
(See, for example, Japanese Utility Model Application Laid-Open No. 63-1975). The electromagnetic proportional valve 100 is provided with an inflow port 101 into which gas flows and an outflow port 102 outflow. A valve port 115 is provided between the two ports 101 and 102, and a valve body 103 for opening and closing the valve port 115 is provided here. In the center of the valve body 103,
The shaft 104 is connected, and the upper end portion of the shaft 104 is connected to the center of the diaphragm 116. Back pressure chamber partition plate 1 sandwiching the periphery of diaphragm 116
07, a back pressure hole 109 is opened. Through this back pressure hole 109, the back pressure chamber 108 partitioned by the back pressure chamber partition plate 107 and the diaphragm 116 is opened to the atmospheric pressure. A magnet 105 is provided at the upper end of the shaft 104, and the magnet 105 is
It is designed to be driven by an electromagnetic device 106 having 6A and an iron core 106B. A spring 117 is mounted below the valve body 103, and the valve body 103 is always urged in a direction to close the valve port 115.

Next, the specific operation of the above-described electromagnetic proportional valve 100 will be described as follows. Coil 106
When power is not supplied to A, the spring 117
, And the magnetic force between the magnet 105 and the iron core 106B urges the shaft portion 104 and the valve body 103 upward, and the valve body 103 closes the valve port 115. On the other hand, when the coil 106A is energized, a magnetic field that repels the magnet 105 is formed by the electromagnetic device 106, so that the shaft 104 and the valve body 103 are pushed downward, and the valve body 103 is pressed.
Opens. In such an electromagnetic proportional valve 100, the amount of gas flowing from the inflow port 101 to the outflow port 102 can be controlled by changing the amount of current supplied to the coil 106A.

[0004]

According to the JIS standard, a general gas appliance is required to have a mechanism for opening and closing a flow passage at at least two different positions in a gas flow passage. ing. On the other hand, with current household gas water heaters, when using a small amount of hot water (for example, hand washing in a washroom) and when using a large amount of hot water (for example, when boiling a bath),
Since the gas usage is large, the gas flow path is branched and used while changing the number of branch lines used. In order to satisfy the above-mentioned JIS standard in the gas flow system branched in this way, as shown in FIG. 17, a first on-off valve 112 is provided in the main line 110, and each of the four branch lines 111 is provided. A second on-off valve 113 is provided.
Further, in order to adjust the gas flow rate, the above-mentioned on-off valve 11 is used.
2 and 113, the above-mentioned electromagnetic proportional valve 1
00 and a total of six solenoid valves 100, 11
2,113 are required.

Now, consider reducing the number of solenoid valves in the entire flow path. Since the electromagnetic proportional valve 100 has a function of opening and closing the valve port 115 for the time being, it can be considered that it can be used as a JIS standard opening and closing mechanism. However, in the configuration of the electromagnetic proportional valve 100, the diaphragm 11
If a hole is opened in 6, the gas always leaks out of the solenoid proportional valve 100 from the hole, so that only one solenoid proportional valve 100 cannot be provided in the main line 110 portion. Therefore, it is conceivable to use the electromagnetic proportional valve 100 for each branch line 111.

[0006] Thus, as shown in FIG.
Only the on-off valve 112 is disposed in the zero portion, and the electromagnetic proportional valve 100 is disposed in the branch line 111 in place of the on-off valve 113. In this configuration, when gas is not used, the first on-off valve 112 is in a closed state. Therefore, even if a hole is opened in the diaphragm 116 of the electromagnetic proportional valve 100, Gas leakage is not a problem. When gas is used, the first on-off valve 1
Since both the valve 12 and the electromagnetic proportional valve 100 are opened, and most of the gas flows from the inflow port 101 to the outflow port 102, the amount of gas leaking from the hole of the diaphragm 116 does not become large and does not pose a problem.

With such a configuration, the total number of valve elements is five, so it seems that one valve element is reduced as compared with FIG. However, the proportional solenoid valve 100
Is more expensive than the structure of the second on-off valve 113 because of its complexity. For this reason, replacing and arranging the expensive one electromagnetic proportional valve 114 and the four inexpensive second on-off valves 113 with the four expensive electromagnetic proportional valves 100 is not necessarily inexpensive for the entire flow path. , But rather an expensive gas flow path system.

The present invention has been made in view of the above circumstances, and has as its object to provide an electromagnetic proportional valve which can prevent gas from leaking from a back pressure hole when a valve body is closed even if a hole is opened in a diaphragm. Is to provide. Another object is to provide an inexpensive valve by using such an electromagnetic proportional valve to reduce the number of valve bodies in the entire gas flow path.

[0009]

According to a first aspect of the present invention, there is provided an electromagnetic proportional valve, comprising: a main body having an inlet and an outlet for a gas; A valve member that can open or close a valve port provided between the valve member and a connecting member that is connected to the valve member to open and close the valve member;
A coil capable of driving the connecting member, a diaphragm connected to the connecting member and interlocking with the connecting member, and a back pressure defined by the diaphragm on a surface opposite to a surface on which the valve element is provided. A back pressure chamber that opens the back pressure chamber to the atmosphere when the valve element opens the outflow port, wherein the valve element closes the outflow port. A back pressure chamber closing mechanism that blocks the back pressure chamber from opening to the atmosphere when the air pressure is present. In this configuration, the back pressure chamber closing mechanism means that the back pressure chamber is closed in accordance with the movement of closing the connecting member (or may be slightly delayed in time) and the back pressure chamber is opened to the atmosphere. What is necessary is just to prevent. At this time, the back pressure chamber closing mechanism does not necessarily need to be provided so as to be driven in accordance with energization of the coil. For example, a piezoelectric element may be used as a configuration different from energization of the coil. As described above, according to the piezoelectric element, the back pressure chamber closing mechanism can be reduced in size, so that the electromagnetic proportional valve can be prevented from being increased in size. The invention according to claim 2 is the invention according to claim 1, wherein the back pressure chamber closing mechanism is drivable by energizing the coil, and a part of the back pressure chamber or the back pressure hole. It is characterized in that the surrounding area is closed.

[0010]

According to the first aspect of the present invention, when the valve element closes the valve port, the back pressure chamber closing mechanism regulates the back pressure chamber from opening to the atmosphere.
For this reason, even if a hole is formed in the diaphragm, the gas leaking from the hole can be prevented from leaking outside the electromagnetic proportional valve. According to the second aspect of the present invention, since the back pressure chamber closing mechanism is driven in accordance with the presence or absence of energization of the coil, there is no need to provide a different configuration for the closing mechanism, and a simple configuration can be achieved.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS <First Embodiment> Next, a first embodiment of the present invention will be described in detail with reference to FIGS. FIG. 1 is a side sectional view of an electromagnetic proportional valve 1 having a closing function. Below the center of the electromagnetic proportional valve 1, a main body case 4 (corresponding to a main body in the present invention) provided with an inflow port 2 and an outflow port 3 for a gas for combustion is provided. An upper case 20 is mounted on the upper part of the main body case 4. The upper case 20 has a cylindrical shape with a bottom on one side (the upper side in FIG. 1), and closes the upper opening 4B of the main body case 4 with the coil 10 mounted inside. Assembled. A central hole 20A having a diameter larger than the diameter of the movable body 9 is provided at the center of the bottom (upper part in FIG. 1) of the upper case 20.

In the main body case 4, a valve port 5 is provided between the inflow port 2 and the outflow port 3, and a valve element 6 capable of opening or closing the valve port 5 is provided here. ing. The valve port 5 has a circular shape, and the valve element 6 is formed slightly larger than the valve port 5. On the back side (the lower side in FIG. 1) of the valve body 6, a bottom surface 4 </ b> A of the main body case 4 is provided.
A first spring 8 is disposed between the first spring 8 and the valve body 6. The first spring 8 always urges the valve body 6 in a direction to close the valve port 5.

A substantially cylindrical connecting shaft 7 (corresponding to a connecting member in the present invention) is connected to the center of the valve body 6 in an upward direction. The connecting shaft 7 is provided with an assembling step 7B at a position slightly above the center, and above the assembling step 7B, a drive end 7A having a smaller diameter than the lower portion is provided above the assembling step 7B. ing. The upper end edge of the drive end 7A is in contact with the movable body 9, and the connection shaft 7 is driven downward by energizing the coil 10 as described later. A diaphragm 11 having a hole in the center is fitted into the drive end 7A, and the diaphragm 11 is fixed to the assembling step 7B by a substantially disc-shaped fixing member 12.

The elastic diaphragm 11 is formed in a substantially circular shape with a diameter slightly larger than the upper opening 4B of the main body case 4, and is formed between the periphery of the upper opening 4B and the back pressure chamber partition plate 13. Is sandwiched between. At the center of the substantially disk-shaped back pressure chamber partition plate 13, a play insertion hole 13A into which the drive end 7A can be loosely inserted is provided. Also, the back pressure chamber partition plate 13
1, except for the vicinity of the edge 13B that closes the upper opening 4B and the vicinity of the play insertion hole 13A, the portion located between the two bulges upward in FIG. 1 (that is, toward the side away from the diaphragm 11). This portion and the diaphragm 11 (more specifically, on the surface of the diaphragm 11 opposite to the surface on which the valve element 6 is provided) define (part of) the back pressure chamber 14. I have.

A coil 10 having an iron core insertion hole 10A concentric with the axis of the connecting shaft 7 is disposed above the back pressure chamber partitioning plate 13. Iron core insertion hole 10A of coil 10
, A substantially cylindrical movable body 9 made of a magnetic material is inserted. The movable body 9 can be slid vertically in the iron core insertion hole 10A depending on whether or not the coil 10 is energized. A second spring 16 is arranged between the lower surface side of the movable body 9 and the back pressure chamber partitioning plate 13, and always urges the movable body 9 upward in the figure. The O-ring 1 is provided between the lower surface of the coil 10 and the upper surface of the back pressure chamber partition plate 13.
5 are sandwiched.

A spring mounting groove 9A is recessed in the center of the upper surface of the movable body 9, and a third spring 17 is mounted inside the groove. The third spring 17
The upper end of the movable body 9 is in contact with the adjusting screw 18, and the movable body 9 is always urged downward by the third spring 17. The valve body 6 and the movable body 9 are provided with three types of springs 8, 16, and 17 for adjusting their urging forces (specifically, the screwing depth of the adjusting screw 18 described later). By adjusting), the characteristics of the electromagnetic proportional valve 1 can be adjusted appropriately. Further, on the upper surface side of the movable body 9, on the upper surface of the closing portion 9B along the entire circumference forming the spring mounting groove 9A,
A back pressure chamber closing member 19 made of, for example, a rubber material having elasticity is provided. The back pressure chamber closing member 19 is
A packing 22 provided on a lower surface of a cover 21 described later can be abutted.

A hollow cover 21 is assembled from the upper surface side of the central hole 20A of the upper case 20. The cover 21 has a substantially cylindrical tubular portion 21B at the upper portion and the tubular portion 21B.
And an assembling edge 21C projecting along the entire circumference from the lower edge of B. A packing 22 is sandwiched between the assembling edge 21C and the upper case 20 on the lower surface side. It is fixed to. Opening 21A of cover 21
And the inner diameter of the packing 22 is formed smaller than the diameter of the central hole 20A and the movable body 9 so that the packing 22 faces the closing part 9B.

A female screw portion is formed on the cylindrical portion 21B of the cover 21 from the upper end side.
Is screwed. A screw is also cut on the outer peripheral surface of the adjusting screw 18, and a fixing nut 23 is screwed here. By adjusting the mounting position of the fixing nut 23, the insertion depth at which the adjusting screw 18 is inserted into the cover 21 can be adjusted. By this adjustment, the force applied to the third spring 17 is adjusted appropriately. Also,
On the upper surface side of the adjusting screw 18, a groove 18 </ b> A into which a flat screwdriver (not shown) can be inserted and the adjusting screw 18 can be turned is recessed. At the center of the groove 18A, a back pressure hole 24 is provided which penetrates vertically through the upper wall surface of the adjusting screw 18.

As described above, the back pressure chamber 14 defined by the diaphragm 11 and the back pressure chamber partition plate 13 continues to the side and top surfaces of the movable body 9 and continues to the inside of the adjusting screw 18 (see FIG. 1). In other words, in the present embodiment, the back pressure chamber 14 is provided in addition to the space defined by the back pressure chamber partition plate 13 and the surface of the diaphragm 11 opposite to the surface on which the valve element 6 is provided, and the iron core is inserted. Hole 10A and cover 2
This is a space in which the internal space of the first cylindrical portion 21B and the internal space of the adjusting screw 18 are combined.) Therefore, as shown in FIGS. 1 and 2, when the movable body 9 is located at the upper end in the iron core insertion hole 10A (when no current is flowing through the coil 10), the movable body 9 Because the back pressure chamber closing member 19 and the packing 22 abut against each other, the portion of the back pressure chamber 14 below the movable body 9 (the portion including the diaphragm 11) is not released to the atmospheric pressure. on the other hand,
When a current is applied to the coil 10, the movable body 9, the upper case 20, and the back pressure chamber partition plate 13 form a magnetic circuit, and the movable body 9 moves to the magnetic neutral position, that is, Move to the packing 22 and the back pressure chamber closing member 1
9 is released, so that the back pressure hole 24 opens to the atmosphere.

Next, the operation and effect of the present embodiment configured as described above will be described. First, the coil 10
1 or 2, the movable body 9 is in a state of being urged upward by the urging force of the first spring 8 and the second spring 16, as shown in FIG. For this reason, the back pressure chamber closing member 19 of the movable body 9 is in contact with the packing 22, and the back pressure chamber 14 is closed. In this state, the valve element 6 closes the valve port 5, so that gas does not flow from the inflow port 2 to the outflow port 3.

Here, when a current flows through the coil 10, the movable body 9 moves downward as shown in FIGS. Then, since the back pressure chamber closing member 19 is separated from the packing 22, the back pressure chamber 14 is opened to the atmosphere via the back pressure hole 24. Further, the movable body 9 pushes the valve body 6 downward through the connection shaft 7 and the valve port 5 is opened, so that gas flows from the inflow port 2 through the valve port 5 to the outflow port 3.

By the way, during many years, a hole may be formed in the diaphragm 11. Even in such a case, according to the present embodiment, when the valve element 6 closes the valve port 5, the back pressure chamber closing mechanism (in the present embodiment, the back pressure chamber provided on the movable body 9). The closing member 19 and the packing 22 constitute a back pressure chamber closing mechanism.), Thereby restricting the back pressure chamber 14 from opening to the atmosphere. For this reason, the gas leaking from the hole of the diaphragm 11 can be prevented from leaking out of the electromagnetic proportional valve 1. Further, the movable body 9 is driven in accordance with the presence or absence of energization of the coil 10, and the movable body 9 is provided with a mechanism for closing the back pressure chamber 14.
There is no need to provide a different configuration as the closing mechanism, and the configuration can be simplified.

<Second Embodiment> Next, a second embodiment of the present invention will be described with reference to FIGS. In the present embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted. The main differences between the electromagnetic proportional valve 34 of the present embodiment and the electromagnetic proportional valve 1 of the first embodiment are the mechanism for opening and closing the valve 6,
And a back pressure chamber closing mechanism. In this embodiment, a substantially cylindrical iron core 30 having a diameter slightly smaller than the diameter of the iron core insertion hole 10A is inserted into the iron core insertion hole 10A at the center of the coil 10. The upper end portion of the iron core 30 is formed as a small-diameter fitting portion 30A with a step, and the fitting portion 3A is formed.
0A is fitted into the center hole 20A opened at the center of the upper surface of the upper case 20 so that the iron core 30 is
It is fixed to 0.

On the other hand, a circular magnet body 31 is fixed to the upper end of the connection shaft 7, and this magnet body 31 is opposed to the lower part of the back pressure chamber partition plate 13 at a predetermined interval. I have. A small-diameter back pressure hole 32 is provided in the center of the back pressure chamber partition plate 13. In the present embodiment,
The periphery of the fixed portion between the iron core 30 and the upper case 20 is slightly open, and the internal space of the upper case 20 is equal to the atmospheric pressure. Therefore, only the space surrounded by the diaphragm 11 and the back pressure chamber partition plate 13 is set as the back pressure chamber 14.

A predetermined space is provided between the upper surface side of the back pressure chamber partition plate 13 and the iron core 30, and in this space, a back pressure chamber closing member 33 (the back pressure chamber in the present invention) is provided. Corresponding to a closing mechanism). Back pressure chamber closing member 3
3 is formed in a substantially disk shape having a diameter smaller than the diameter of the iron core 30 and larger than the diameter of the back pressure hole 32. More specifically, the back pressure chamber closing member 33 is composed of two layers, and an upper layer portion thereof is an attracting portion 33A formed in a thin plate by a magnetic material. Receive attraction. The lower layer portion has an elastic portion 3 made of an elastic body made of, for example, synthetic rubber and having the same diameter as the upper layer.
3B, and on the lower surface side (back pressure hole 32 side),
The back pressure chamber partition plate 13 is provided with a cylindrical closing portion 33 </ b> C that can close the back pressure hole 32 by being in close contact with the periphery of the back pressure hole 32.

Next, the operation and effects of the present embodiment configured as described above will be described. First, the coil 10
When no current is flowing through the
And the magnetic force between the magnet body 31 and the iron core 30 urges the valve body 5 upward to close the valve port 5 (see FIG. 5). At this time, the back pressure chamber closing member 33 is pulled downward by the magnetic force from the magnet body 31, and the closing portion 33 </ b> C is tightly closed around the back pressure hole 32 and closed as shown in FIG. 6. It is in a state.

Next, when a current flows through the coil 10, the iron core 30 is excited and a magnetic field is generated. The magnetic field is
1 is pressed downward in the figure, so that the connecting shaft 7 and the valve element 6 move downward, and the valve port 5 is opened, so that gas flows from the inflow port 2 through the valve port 5. Exit 3
Flow into In addition, since the magnetic field generated by energizing the coil 10 acts in the direction of pulling the back pressure chamber closing member 33 to the iron core 30, the back pressure chamber closing member 33 is attracted to the lower surface side of the iron core 30 (in addition, More precisely, the resultant force (more specifically, the resultant force of gravity) exerted on the attracting portion 33A by the magnetic field generated by the energization of the coil 10 and the magnetic field of the magnet body 31 causes the back pressure chamber closing member 33 to be iron. It is set so as to be adsorbed to the core 30). Thus, as shown in FIG. 7, the back pressure hole 32 is opened, and the pressure in the back pressure chamber 14 becomes equal to the atmospheric pressure. According to the present embodiment configured as described above, effects similar to those of the first embodiment can be obtained.

<Third Embodiment> Next, a third embodiment of the present invention will be described with reference to FIGS. In the present embodiment, the same components as those in the first and second embodiments are denoted by the same reference numerals, and description thereof will be omitted.

The main difference between the electromagnetic proportional valve 46 of the present embodiment and the electromagnetic proportional valve 34 of the second embodiment is the back pressure chamber closing mechanism. In the present embodiment, the iron core 30
The back pressure passage 40 which penetrates up and down is provided in the center of. On the lower surface side of the iron core 30, a packing 41 provided with a hole in the center is mounted, and the packing 41 is tightly fixed between the upper surface of the back pressure chamber partition plate 13 and the lower surface of the iron core 30. I have.

The fitting portion 30 A provided at the upper end of the iron core 30 is set high so as to protrude from the upper surface of the upper case 20, and the upper surface portion is covered by a cover 43. The cover 43 is attached to the upper case 2
Disk-shaped fixing portion 43A fixed in close contact with the upper surface of
The central portion of the fixed portion 43A is composed of a cylindrically bulging accommodation portion 43B capable of accommodating the fitting portion 30A. A back pressure hole 44 is opened in the center of the storage portion 43B,
The hole edge portion of the back pressure hole 44 projects from the iron core 30 side along the entire circumference to form a closing edge 44A. A predetermined space is formed between the accommodating portion 43B and the outer peripheral surface of the fitting portion 30A, and in this space, the back pressure chamber closing member 42 (in the present invention, the movable member can be moved by energizing the coil 10). This corresponds to a back pressure chamber closing mechanism.). Between the inside of the back pressure chamber closing member 42 and the outer surface of the fitting portion 30A,
A spring 45 is mounted on the back pressure chamber closing member 42.
Is always urged upward, and the closing portion 42A is
A close contact with A closes the back pressure hole 44.

As shown in FIGS. 9 to 11, the back pressure chamber closing member 42 is composed of a disc-shaped closing portion 42A and a leg portion 42B hanging downward. Closing part 42A
Is formed of an elastic material such as rubber, and can be in close contact with the closing edge 44A. Also, the leg 42B
It is formed of a magnetic material, and receives an attractive force toward the iron core 30 under the influence of a magnetic field excited in the iron core 30 by energizing the coil 10. The upper surface of the leg 42B is closed
, And has a configuration in which four leg pieces provided at equal intervals along the circumferential direction are suspended from the upper surface thereof.

Next, the operation and effect of the present embodiment configured as described above will be described. When no current is conducted to the coil 10, as shown in FIG. 8, the valve element 6 is urged upward by the spring 8 and the valve port 5 is closed. Further, the back pressure chamber closing member 42 is urged upward by a spring 45, and as shown in FIG. 12, the closing portion 42A comes into close contact with the closing edge 44A,
The back pressure hole 44 is closed.

Next, when a current flows through the coil 10, the iron core 30 is excited to generate a magnetic field, and the magnetic field presses the magnet body 31 downward in the figure. Therefore, the connecting shaft 7 and the valve body 6 move downward, and the valve port 5 is opened, so that gas flows from the inflow port 2 through the valve port 5 to the outflow port 3. Further, the magnetic field generated by the energization of the coil 10 acts to pull the back pressure chamber closing member 42 toward the iron core 30, so that the back pressure chamber closing member 42 is attracted to the upper surface of the iron core 30. Thus, as shown in FIG. 13, the back pressure hole 44 is opened, and the pressure in the back pressure chamber 14 becomes equal to the atmospheric pressure. According to the present embodiment configured as described above, effects similar to those of the first embodiment can be obtained.

<Other Embodiments> The present invention can be carried out, for example, as shown in FIG. 14 in addition to the above-described embodiments. In the electromagnetic proportional valve 51 shown in FIG.
In the back pressure chamber 14 having the same configuration as that of the embodiment, a piezoelectric element 50 (corresponding to a back pressure chamber closing mechanism in the present invention) is provided as a back pressure chamber closing mechanism on the upper surface side of the back pressure chamber partitioning plate 13. It is a thing. A voltage can be applied to the piezoelectric element 50 from a circuit other than the coil. When no current flows through the coil (when the valve element closes the valve port), no voltage is applied to the piezoelectric element 50, and at this time, the piezoelectric element 50 closes the back pressure hole 32. It is in a state where it has been done. On the other hand, when a current is applied to the coil, a voltage is also applied to the piezoelectric element 50 in accordance with the energization, and the coil is deformed to open the back pressure hole 32 (not shown). Further, when the energization of the coil is stopped and the valve body closes the valve port, the time (or
The voltage to the piezoelectric element 50 is stopped. Then, the piezoelectric element 50 returns to the original shape, the back pressure hole 32 is closed, and the back pressure chamber is prevented from opening to the atmosphere.

As described above, the back pressure chamber closing mechanism does not necessarily need to be provided so as to be driven in accordance with the energization of the coil. For example, the back pressure chamber closing mechanism may be configured differently from the energization of the coil. As described above, if the piezoelectric element 50 is used, the size of the back pressure chamber closing mechanism can be reduced, so that the electromagnetic proportional valve can be prevented from being enlarged.

<Application to Gas Supply Path> A gas supply path can be configured by using the above-described electromagnetic proportional valve of the present embodiment, for example, as shown in FIG. In this gas supply path, one electromagnetic proportional valve 61 with a closing function of the present invention is disposed on a main line 60, and an on-off valve 63 is provided on a branch line 62. Since the electromagnetic proportional valve 61 of the present embodiment is provided with the function of opening and closing the gas flow path in addition to the function of proportionally controlling the gas amount, the conventional proportional valve 61 is provided in the main line 60 by providing one electromagnetic proportional valve 61. It is possible to fulfill the role of two valves 112,100. Thus, the number of valve bodies can be reduced and the cost can be reduced as the whole gas supply path. The technical scope of the present invention is not limited by the embodiments described above. Further, the technical scope of the present invention extends to an equivalent range.

[Brief description of the drawings]

FIG. 1 is a side sectional view when a solenoid valve of a first embodiment is closed.

FIG. 2 is a partially enlarged view of a back pressure chamber closing mechanism in FIG. 1;

FIG. 3 is a side sectional view when the solenoid proportional valve opens a valve port.

FIG. 4 is a partially enlarged view of a back pressure chamber closing mechanism in FIG. 3;

FIG. 5 is a side sectional view when a solenoid valve according to a second embodiment closes a valve port;

6 is a partially enlarged view of the back pressure chamber closing mechanism in FIG.

FIG. 7 is a partially enlarged view of a back pressure chamber closing mechanism when an electromagnetic proportional valve opens a valve port.

FIG. 8 is a side cross-sectional view of the third embodiment when an electromagnetic proportional valve closes a valve port;

FIG. 9 is a perspective view of the back pressure chamber closing member when viewed from the top side.

FIG. 10 is a perspective view of the back pressure chamber closing member when viewed from the lower surface side.

FIG. 11 is a side sectional view of a back pressure chamber closing member.

FIG. 12 is a partially enlarged view of a back pressure chamber closing mechanism when an electromagnetic proportional valve closes a valve port.

FIG. 13 is a partially enlarged view of a back pressure chamber closing mechanism when an electromagnetic proportional valve opens a valve port.

FIG. 14 is a partially enlarged view of a back pressure chamber closing mechanism according to another embodiment.

FIG. 15 is a circuit diagram showing an arrangement of a valve body when the electromagnetic proportional valve of the embodiment is used.

FIG. 16 is a side sectional view of an electromagnetic proportional valve in a conventional example.

FIG. 17 is a circuit diagram showing an arrangement of a valve body when a conventional electromagnetic proportional valve is used.

FIG. 18 is a circuit diagram when an attempt is made to reduce the number of valve bodies using a conventional electromagnetic proportional valve.

[Explanation of symbols]

 1, 34, 46, 51: Electromagnetic proportional valve 2: Inflow port 3: Outflow port 4: Main body case (main body) 5: Valve port 6: Valve body 7: Connection shaft (connection member) 9: Movable body (back pressure) Chamber closing mechanism) 10 coil (back pressure chamber closing mechanism) 11 diaphragm 14 back pressure chamber 19 back pressure chamber closing member (back pressure chamber closing mechanism) 22 packing (back pressure chamber closing mechanism) 24, 32, 44: back pressure hole 30: iron core (back pressure chamber closing mechanism) 33, 42: back pressure chamber closing member (back pressure chamber closing mechanism)

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3H106 DA04 DA09 DA13 DA23 DB02 DB12 DB23 DB32 DC02 DC17 DD03 EE39 EE41 GA15 GD02 KK12

Claims (2)

[Claims] 1. A main body having an inlet and an outlet for gas, a valve body provided between the inlet and the outlet and capable of opening or closing a valve, and connected to the valve body. A connecting member that opens and closes the valve body, a coil that can drive the connecting member, a diaphragm that is connected to the connecting member and interlocks with the connecting member, and a surface on which the valve body is provided by the diaphragm. An electromagnetic proportional valve having a back pressure chamber defined on the opposite surface side and a back pressure hole opening the back pressure chamber to the atmosphere when the valve element opens the outflow port. And a back pressure chamber closing mechanism for blocking the back pressure chamber from opening to the atmosphere when the valve body closes the outlet. 2. The back pressure chamber closing mechanism is drivable by energizing the coil, and closes a part of the back pressure chamber or the periphery of the back pressure hole. Electromagnetic proportional valve described in.