JP2001315336A - Ink jet printer head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ink jet printer head and its manufacturing method in which inks adhering to the ink ejection face can be wiped off thoroughly and surely without causing color mixing. SOLUTION: A metal film 28 is formed on the upper surface of a polyimide orifice plate 27 and coated with a resist mask in a specified pattern and then it is etched to form a metal mask 28 having an opening pattern 28-1 for making a color mixing prevention groove 38. After the resist is removed, isotropic etching is performed along the metal mask 28 with helicon wave plasma from which bias power is cut off to form a color mixing prevention groove 38 having a curved bottom corner 38-1. Subsequently, a metal mask 37 having an opening pattern 37-1 for machining an ejection nozzle is formed on the upper surface of the orifice plate 27 from which the metal mask 28 is stripped and then an ejection nozzle 29 is bored by performing anisotropic etching along the metal mask 37 with helicon wave plasma accompanied with bias power.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet printer head capable of reliably wiping an ink ejection surface without causing color mixing of attached ink, and a method of manufacturing the same.

[0002]

2. Description of the Related Art Conventionally, there is an ink jet printer head which performs printing by discharging ink onto a paper surface. In the printing method using this ink jet printer head, ink droplets (print dots) are ejected from a number of minute holes (ejection nozzles) arranged on the ink ejection surface of the head, and the ink droplets (print dots) are covered with paper, cloth, or the like. The recording material (paper) is landed and absorbed, thereby printing characters and images, etc., which generates little noise, does not require special fixing processing, and is relatively easy to record in full color. Is the way.

As a method of discharging ink droplets,
A piezo-jet method, in which a pressure is generated by mechanical deformation in an ink chamber using an electromechanical transducer such as a piezoresistive element (piezoelectric element), thereby ejecting ink droplets from an ejection nozzle, or a heating section in a fine ink chamber A thermal jet method in which an electric pulse is applied to this and a bubble is generated at the interface between the ink and the heat generating portion at a high speed, and ink droplets are ejected from the minute ejection nozzle in the same manner as above using the growth force of the bubble. and so on.

[0004] The above-mentioned thermal jet method includes:
There are two types of configurations depending on the direction in which the ink droplets are ejected.One is a configuration in which ink is ejected in a direction parallel to the heating surface of the heating unit, and the other is a configuration perpendicular to the heating surface of the heating unit. This is a configuration in which ink is ejected in the direction. Above all, those that eject ink droplets in the direction perpendicular to the heat generating surface of the heat generating portion are called roof shooter type or top shooter type ink jet printer heads, and discharge ink in a direction parallel to the heat generating surface of the heat generating portion. It is known that the power consumption is extremely small as compared with the side shooter type.

As a method of manufacturing this roof shooter type thermal ink jet printer head, for example, 6 × 2
On a single silicon wafer having a diameter of 5.4 mm or more, for example, on a large number of chip substrates of about 10 mm × 15 mm divided into 90 pieces or more, using silicon LSI forming technology and thin film forming technology. There is a method in which a large number of heat generating parts and a drive circuit, a wiring electrode, an ink flow path, a discharge nozzle and the like for individually driving these heat generating parts are collectively and monolithically formed.

[0006] Further, the above-described heating section, wiring electrodes, and the like are formed by using a thin film forming technique on a glass substrate without using a silicon wafer.
There is also a method in which a print head unit including an ink flow path, a discharge nozzle, and the like is formed, a drive circuit unit using an LSI forming technique is separately formed on a silicon substrate or the like, and the drive circuit unit and the print head unit are connected.

FIG. 5A is a plan view schematically showing an ink discharge surface of an ink jet printer head provided in such a roof shooter type ink jet printer, and FIG. FIG. The configuration of a conventional ink jet printer head (hereinafter, referred to as a print head) will be briefly described with reference to FIGS.

As shown in FIGS. 1A and 1B, the print head 1
Is formed by arranging a large number of resistance heating portions 3 on an insulating substrate 2 and connecting the individual wiring electrodes 4 to one end of the resistance heating portion 3 and forming the individual wiring electrodes 4 on the other end. Are formed by connecting the common wiring electrodes 5 collectively. Further, partition walls 6 having a thickness of about 10 μm are laminated on both sides of the arrangement region.

The above-mentioned individual wiring electrodes 4 are formed by the partition walls 6.
An ink flow path 7 having a height of about 10 μm corresponding to the thickness of the partition wall 6 is formed on a part of the resistance heating portion 3 side, the resistance heating portion 3, the common wiring electrode 5, and the left region thereof. ing. In the left area of the common wiring electrode 5 of the insulating substrate 2, an ink supply groove 8 is formed on the substrate surface side in parallel with a direction in which a number of resistance heating sections 3 extend side by side. In addition, an ink supply hole 9 communicating with the ink supply groove 8 and penetrating the back surface of the insulating substrate 2 is formed.

An orifice plate 12 is bonded and laminated on the partition 6 via a thermoplastic adhesive 11. In the orifice plate 12, discharge nozzles 14 pierced according to the metal mask 13 are formed so as to penetrate the orifice plate 12 at positions opposed to the resistance heating parts 3 respectively. As a result, four nozzle rows 15 are formed on the ink ejection surface of the print head 1 as shown in FIG.

On the orifice plate 12 (actually on the metal mask 13), a polyimide plate material 17 having a thickness of about 10 to 40 μm is further laminated via an adhesive 16. A metal mask 18 in which a predetermined pattern is formed by photolithography or the like is also laminated on the polyimide plate material 17, and a color mixing prevention groove 19 is formed by etching according to the metal mask 18 so as to surround each of the nozzle rows 15. ing.

As shown in FIG. 1A, four types of ink, yellow (Y), magenta (M), cyan (C), and black (Bk), are ejected on the ink ejection surface of the print head 1. The above-mentioned four nozzle rows 15 are formed. To each of the nozzle rows 15, ink of a color corresponding to each of the nozzle rows 15 is supplied from an ink cartridge or the like (not shown).

By the way, when the print head 1 is arranged in an ink jet printer and driven to execute printing to discharge ink, ink or the like rebounding from the paper surface adheres to the vicinity of the discharge nozzle 14. If the attached ink is left as it is, there is a possibility that the ink will dry out and hinder the ink discharge function of the discharge nozzle 14, so the wiping blade is used to wipe and clean the discharge nozzle at regular intervals.

At this time, the color mixing preventing groove 19 is provided so that the ink raked by the wiping blade is dissipated and mixed with the ink of the adjacent nozzle row 15 so that the ink in the discharge nozzle 15 does not mix. Is provided.

[0015]

By the way, the discharge nozzle 15 is formed in the color mixing preventing groove 19 as described above, and after the color mixing preventing groove 19 is formed, the discharge nozzle 15 is formed.
In this method, it is necessary to deposit a metal mask film for forming a discharge nozzle in the color mixing preventing groove 19 having a vertical side wall, but this is technically extremely difficult. Therefore, before forming the color mixing prevention groove 19, the ejection nozzle 14 is formed.

However, if this is the case, the color mixing preventing groove 1
It is necessary to shield the discharge nozzle 14 with an appropriate resist in advance so that an etchant for forming the nozzle 9 does not enter the print head from the discharge nozzle 14 and cause a problem. For this reason, there has been a problem that the manufacturing process is complicated.

Further, since the color mixing preventing groove 19 has a side wall formed perpendicular to the bottom surface, the color mixing preventing groove 1 is formed.
It is difficult to reliably scrape the ink accumulated in the bottom corners of the nozzle 9 with a wiping blade, so that the ink having a high viscosity due to drying stays in the color mixing prevention groove 19 and causes the ejection nozzle 14 to be clogged. And other problems also occurred.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned conventional circumstances,
An object of the present invention is to provide an ink jet printer head capable of surely wiping without causing color mixture of ink adhered to an ink ejection surface and a method of easily manufacturing the ink jet printer head.

[0019]

First, an ink jet printer head according to the first aspect of the present invention includes an orifice plate having a plurality of nozzle rows in which a plurality of discharge nozzles are arranged in parallel on an ink discharge surface. An ink jet printer head for performing recording by causing ink discharged by an action to fly in a predetermined direction from the discharge nozzle, wherein a convex barrier portion is provided between at least the nozzle rows of the orifice plate, and a side wall of the barrier portion is provided. At least the corner of the base is curved.

Next, the ink jet printer head according to the second aspect of the present invention has an orifice plate having a plurality of nozzle rows in which a plurality of discharge nozzles are juxtaposed on an ink discharge surface, and the ink is discharged by the action of pressure. An ink jet printer head that performs recording by causing ink to fly in a predetermined direction from the discharge nozzle, wherein a concave barrier portion is provided between at least the nozzle rows of the orifice plate, and at least a bottom corner of a side wall of the barrier portion is curved. Let me do it.

In any case, it is preferable that the side wall of the side wall is a curved surface, for example, and that the side wall of the height direction end portion is, for example, as described in claim 4. Preferably, the corner is formed to be curved.

According to a fifth aspect of the present invention, there is provided a method of manufacturing an ink jet printer head, comprising: an orifice plate having a plurality of nozzle rows in which a plurality of discharge nozzles are arranged in parallel on an ink discharge surface; A method for manufacturing an ink jet printer head for performing recording by causing ink to be ejected to fly in a predetermined direction from the discharge nozzle, wherein a mask for forming a plurality of recesses on a surface of the orifice plate that is to be the ink discharge surface A step of forming a film, a step of forming the recess by isotropic etching through the mask film, and a step of forming a plurality of the nozzles at predetermined positions of the orifice plate in which the recess is formed. It is configured to have.

The isotropic etching is preferably plasma etching, for example. Further, the discharge nozzle may be, for example,
As described, it may be perforated in the recess.

[0024]

Embodiments of the present invention will be described below with reference to the drawings. 1 (a), 1 (b) and 1 (c) are views showing a basic manufacturing method of an ink jet printer head of the present invention in the order of steps, each showing a schematic plan view in the upper part, and the upper part in the middle part. BB 'section arrow view, D-
D 'cross-sectional view and FF' cross-sectional view are shown, and the lower part is a CC 'cross-sectional view, EE' cross-sectional view, and GG 'cross-sectional view of the upper part, respectively. Is shown.

FIGS. 5A and 5B show the print head 1 of the present example having four nozzle rows similar to the print head 1 shown in FIG. Are cut out, and the internal configuration is shown in the order of steps. With reference to FIGS. 1A, 1B, and 1C, a basic method of manufacturing the ink jet printer head (hereinafter, simply referred to as a print head) of the present embodiment will be described.

First, in step 1, tantalum (Ta) -silicon (Si) -oxygen (O) or Ta-Si-ON (nitrogen) is formed on a suitable insulating substrate by using a thin film forming technique.
, And an electrode film made of Au or Ni or the like are sequentially laminated with an adhesive layer (not shown) made of Ti-W or the like interposed therebetween.

In step 2, the electrode film, the adhesion layer, and the heating resistor film are patterned by photolithography, respectively, to expose a region of the strip-shaped heating resistor film that is to be a heating portion and to generate heat on both sides thereof. A wiring electrode is formed so as to overlap the resistor film, and a heating element including a heating portion and wiring electrodes on both sides is formed. In this step, the positions of a large number of heat generating parts are determined.

FIG. 1 (a) shows a state immediately after the steps 1 and 2 have been completed. That is, the heat generating portion 21 is formed on the insulating substrate 20. A common wiring electrode 22 is connected to one end of the heat generating portion 21, and an individual wiring electrode 23 to be connected to a drive circuit is connected to the other end. The heating section 21, the common wiring electrode 22, and the individual wiring electrode 23 are formed in a set in the vicinity of the heating section 21 and patterned into a strip shape. Each strip forms a heating element and is parallel at a predetermined interval. Are installed side by side. However, the number of the common wiring electrodes 22 is one as a whole, and a large and narrow opening 22-1 is formed near the left end.
-1, the surface 20-1 of the insulating substrate 20 is exposed.

Subsequently, in step 3, the individual heat generating portions 21
A partition member made of an organic material such as photosensitive polyimide is formed to a height of about 20 μm by coating in order to form an ink flow path for guiding ink to the ink, and after patterning this by photolithography, heat of 300 to 400 ° C. 3
Perform curing (dry curing, baking) for 0 to 60 minutes,
A partition made of the photosensitive polyimide having a height of about 10 μm is formed and fixed on the insulating substrate 20.

Further, as a step 4, in order to form an ink supply path for supplying ink from the outside to the above-mentioned ink flow path,
An elongated slit-like ink supply groove is formed on the surface side of the insulating substrate 20 by a sand blasting method or the like having good processing efficiency, and one opening is opened in the ink supply groove and the other opening is formed on the insulating substrate 20. An ink supply hole that penetrates and opens on the back side of the insulating substrate 20 is formed.

In step 4, since the shape of the ink supply groove on the front side where the heat generating portion, the wiring electrodes, the partition walls, etc. are formed, and the ink supply hole on the back side are different, processing is performed separately from the front and back. For example, an ink supply groove is formed on the front side to about half the thickness of the substrate, and an ink supply hole is formed from the back side to penetrate the front and back.

FIG. 1B shows a state immediately after Steps 3 and 4 are completed. That is, the partition wall 24 (sealing partition wall) is located between the left portion of the common wiring electrode 22 from the opening 22-1, the portion where the individual wiring electrode 23 on the right side is provided, and each of the heat generating portions 21. 24-1, 24
-2, partition wall 24-3).

The partition wall 24 forms a large internal ink flow path which is totally isolated from the outside by the seal partition walls 24-1 and 24-2, and the seal partition wall 24-2 on the individual wiring electrode 23 and each heat generating portion. Partition wall 24-3 extending between 21
Has a shape corresponding to the body of the comb and the teeth of the comb. As a result, the comb-shaped partition walls 24-3 of the comb are used as partition walls, and fine partition portions in which the heating portions 21 are located at the roots between the teeth are formed by the number of the heating portions 21. I have. An elongated ink supply groove 25 and a rectangular ink supply hole 26 are formed to supply ink to the internal ink flow path and the partition from the outside.

Thereafter, as a step 5, an orifice plate of a film of polyimide having a thickness of 10 to 30 .mu.m was coated on both sides or one side with a very thin thermoplastic polyimide as an adhesive, for example, to a thickness of 2 to 5 .mu.m. The substrate in the state is placed on the uppermost layer of the laminated structure, that is, on the partition wall 24, and is heated at 200 to 250 ° C. in a vacuum to 5.8.
Pressure is applied at a pressure several times as high as × 10 ⁻⁴ Pa, and this is continued for several tens of minutes to fix the orifice plate. Subsequently, a metal film having a thickness of about 0.5 to 1 μm, such as Ti, Ni, Cu or Al, is deposited on the surface of the orifice plate by a vacuum device or a sputtering device.

In step 6, the metal film on the surface of the orifice plate is patterned to form a mask for selectively etching polyimide. Subsequently, the bias power is cut off by, for example, plasma dry etching using a helicon wave. An anisotropic etching mode in which a color mixing prevention groove, which will be described in detail later, is formed in accordance with the above metal film mask by the isotropic etching mode, and a metal film mask is additionally formed, and a bias power of the helicon wave plasma dry etching is applied. 20μmφ ~ 40μmφ
Are formed collectively on the orifice plate.

FIG. 1C shows the state immediately after the completion of the steps 5 and 6. That is, the orifice plate 27 covers the entire area of the insulating substrate 20, and the orifice plate 27 is provided with a discharge nozzle 29 pierced according to the metal film mask 28 at a position facing the heat generating portion 21 to prevent color mixing, which will be described later. It is formed in a groove (not shown). The ink passage 31 having a height corresponding to the thickness of the partition wall 24 of 10 μm is provided inside the orifice plate 27.
Are formed between the partition 21 in which the heat generating unit 21 is provided and the ink supply groove 25. As a result, the print head 35 provided with four nozzle rows 33 composed of a large number of ejection nozzles 29 in the same manner as the print head 1 in FIG.
Complete on 0.

FIGS. 2A to 2D are views showing in detail the method for forming the color mixing preventing groove and the method for forming the discharge nozzle in the above step 6. In this figure, the same components as those shown in FIGS. 1 (a), (b) and (c) are assigned the same numbers as in FIGS. 1 (a), (b) and (c). Is shown.

FIG. 2A shows that a metal film such as Ti or Al is vacuum-formed on the upper surface of a polyimide orifice plate 27 whose back surface is bonded to the partition walls 24 (24-1, 24-2) via an adhesive 36. After a film is formed to a thickness of about 1 μm by a vapor deposition device or a sputtering device, a resist (not shown) is applied to the surface by spin coating or the like, and the resist is selectively exposed to light using a photomask to develop and pattern the resist. After the metal film is etched with an etchant in accordance with the resist pattern to form a metal mask 28 for processing a color mixture preventing groove, the etchant is washed away with washing water, and the resist is removed by oxygen ashing. . The surface 27-1 of the orifice plate 27 is exposed in the opening pattern 28-1 of the metal mask 28.

Subsequently, etching is performed by using a helicon wave plasma etching apparatus while cutting off the bias power. In the helicon wave plasma etching apparatus, when the bias power is cut, the etching becomes isotropic. By utilizing this property, as shown in FIG.
Etching is performed isotropically in such a shape as to go around the inside of the edge of the opening pattern 28-1 of the metal mask 28,
The color mixing prevention groove 38 is formed. The bottom corner 38-1 where the side wall of the color mixing prevention groove 38 rises is formed in a curved shape by the above isotropic etching.

Thereafter, on the upper surface of the orifice plate 27 from which the metal mask 28 has been peeled off, as shown in FIG.
A metal film 37 for processing an ejection nozzle is formed by patterning in the same manner as described above.
In this case, since the bottom corner 38-1 of the color mixing prevention groove 38 is curved, the metal film can be surely applied with a uniform thickness, and the appropriate metal mask 37 can be easily formed. . Opening pattern 3 of metal mask 37
The surface 27-1 of the orifice plate 27 forming the color mixing preventing groove 38 is exposed in 7-1.

Then, using a helicon wave plasma etching apparatus, the power is supplied with a bias power, and etching is performed. In a helicon wave plasma etching apparatus, when bias power is applied, etching becomes anisotropic.
By this anisotropic etching, as shown in FIG. 2D, a discharge nozzle 29 is formed in the vertical direction along the opening pattern 37-1 of the metal mask 37. The cross-sectional view at the middle stage in FIG. 1 (c) is exactly as shown in FIG. 2 (d).

FIG. 3A is a plan view of the print head 35, and FIG. 3B is a view of FIG. 2D again. FIG. 3 (b) shows a cross section of an h portion of FIG. 3 (a). As shown in FIG.
Are cyan (C), magenta (M), yellow (Y),
It is formed for each black (Bk) nozzle row. Also,
The groove width i is 20 μm to 3000 μm, and the depth j is 1 μm to 6
It may be formed to a thickness of 0 μm.

Thus, a convex barrier portion 41 is formed between the color mixing preventing grooves 38, that is, between the nozzle rows. The base corner 41-1 of the side wall of the convex barrier portion 41 (the color mixing preventing groove 3).
8 is formed at the bottom corner 38-1).

Thus, when wiping the ink ejection surface of the print head 35, first, the convex barrier portion 4
1, the adhering ink in the color mixing preventing groove 38 is mixed with the adhering ink in the adjacent color mixing preventing groove, that is, color mixing is prevented, and the root corner 41-1 of the side wall of the convex barrier portion 41 is curved. As a result, the wiping blade can rub the entire inner surface of the color mixing preventing groove 38 without any excess. This ensures that the attached ink is wiped from the ink ejection surface.

FIG. 3C is a plan view of a print head 35 'showing another example in which the arrangement of the color mixing preventing grooves is different, and FIG.
FIG. 4 is a view showing a cross section of the k portion. As described above, the color mixing prevention groove is not limited to the one formed so as to include the nozzle row, and the concave barrier between the nozzle rows (in the example shown in the figure, also outside the end nozzle row). The color mixing prevention groove 39 may be formed as a part. This color mixing prevention groove 3
The method of forming 9 is the same as the method described above.

At the bottom corner 39-1 of the side wall of the color mixing preventing groove 39, a curved portion is formed by isotropic etching. Even with such a configuration, ink adhering to the ink ejection surface of the print head 35 'is not blocked by the color mixing prevention groove 39 and does not move to the adjacent nozzle array area, so that color mixing can be reliably prevented. In addition, since the bottom corner 39-1 of the side wall of the color mixing prevention groove 39 is formed in a curved shape, the wiping can be surely performed without leaving the ink adhered and retained in the color mixing prevention groove 39. .

FIGS. 4 (a), 4 (b) and 4 (c) show a second embodiment of the ink jet printer head of the present invention. FIG. In this example, FIG.
After removing the metal mask 28-1 by performing the steps (a) and (b), the orifice plate 27 is isotropically etched by a helicon wave plasma etching apparatus in an isotropic etching mode.
Etch the whole. Thereby, as shown in FIG. 4, the base corner 41 of the side wall of the convex barrier portion 41 is formed.
Not only -1 (the bottom corner of the color mixing prevention groove 38) but also the tip corner 41-2 of the side wall has a curved shape, whereby the entire side wall of the convex barrier portion 41 is formed into a curved surface.

Thereafter, as shown in FIGS. 2C and 2D, a metal film such as Ti or Al is formed again as shown in FIG. 37-1 is formed to be a metal mask 37. Then, as shown in FIG. 3C, an ejection nozzle 29 is formed in the color mixture preventing groove 38 by anisotropic etching using the bias power of the helicon wave plasma etching apparatus in accordance with the metal mask 37.

In this embodiment, as described above, the entire side wall of the convex barrier portion 41 has a curved surface and has no corners. There is an effect that the staying ink can be more easily scraped out.

[0050]

As described above in detail, according to the present invention, at least the lower end portion in the height direction, that is, the rising portion of the side wall of the convex or concave barrier portion is formed to be curved, so that the ink ejection surface is formed. The attached ink is completely scraped out without remaining in the concave portion at the time of wiping, whereby it is possible to provide an ink jet printer head capable of reliably wiping the ink ejection surface.

Further, according to the manufacturing method of the present invention, since the concave portion as the color mixing preventing groove is formed on the discharge surface of the orifice plate by isotropic etching, the bottom corner of the color mixing preventing groove can be easily formed on the curved surface. It is possible to easily manufacture an ink jet printer head provided with a color mixing prevention groove that can be formed and is easily and reliably scraped off by wiping without remaining ink.

[Brief description of the drawings]

FIGS. 1A, 1B, and 1C are a schematic plan view and a sectional view showing a basic method of manufacturing an ink jet printer head according to the present invention in the order of steps.

FIGS. 2A to 2D are views showing in detail a method of forming a color mixing preventing groove and forming a discharge nozzle in a first embodiment of Step 6 in the manufacturing process of the ink jet printer head of the present invention. .

3A is a plan view of a print head according to the first embodiment, FIG. 3B is a cross-sectional view of a portion h, FIG. 3C is a plan view showing another example of forming a color mixing prevention groove, and FIG. ) Is a sectional view of the k portion.

FIGS. 4A, 4B, and 4C are diagrams illustrating a process of forming an ink jet printer head according to a second embodiment of the present invention. It is a figure which shows the formation method of in detail.

FIG. 5A is a diagram schematically illustrating an ink ejection surface of a conventional inkjet printer head for full-color printing,
(b) is a sectional view taken along the line AA '.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Print head 2 Insulating substrate 3 Resistance heating part 4 Individual wiring electrode 5 Common wiring electrode 6 Partition wall 7 Ink flow path 8 Ink supply groove 9 Ink supply hole 11 Adhesive material 12 Orifice plate 13 Metal mask 14 Discharge nozzle 15 Nozzle row 16 Adhesion Agent 17 Polyimide plate material 18 Metal mask 19 Color mixture prevention groove 20 Insulating substrate 20-1 Surface 21 Heat generation part 22-1 Opening 22 Common wiring electrode 23 Individual wiring electrode 24 Partition 24-1, 24-2 Seal partition 24-3 Partition partition Reference Signs List 25 ink supply groove 26 ink supply hole 27 orifice plate 28 metal mask 28-1 opening pattern 29 discharge nozzle 31 ink flow path 32 partitioning section 33 nozzle array 35 print head 36 adhesive 37 metal mask 37-1 opening pattern 38 color mixing prevention groove 38-1 Bottom corner 39 Color mixing prevention groove 3 -1 bottom corner 41 projecting barrier section 41-1 base portion corners 41-2 tip corner

Claims (7)

[Claims] An orifice plate provided with a plurality of nozzle rows in which a plurality of ejection nozzles are arranged in parallel on an ink ejection surface;
An ink jet printer head for performing recording by causing ink ejected by the action of pressure to fly in a predetermined direction from the ejection nozzle, wherein a convex barrier portion is provided between at least the nozzle rows of the orifice plate, and the barrier portion is provided. An ink jet printer head characterized in that at least the corner of the base of the side wall is curved. 2. An orifice plate having a plurality of nozzle rows in which a plurality of ejection nozzles are arranged in parallel on an ink ejection surface,
An ink jet printer head that performs recording by causing ink ejected by the action of pressure to fly from the ejection nozzles in a predetermined direction, wherein a concave barrier portion is provided between at least the nozzle rows of the orifice plate. An ink jet printer head, wherein at least a bottom corner of a side wall is curved. 3. The ink jet printer head according to claim 1, wherein the side wall has a curved surface. 4. The ink jet printer head according to claim 1, wherein the side wall is formed by curving a corner at a tip end in a height direction. 5. An orifice plate provided with a plurality of nozzle rows in which a plurality of ejection nozzles are arranged in parallel on an ink ejection surface,
A method for manufacturing an ink jet printer head for performing recording by causing ink ejected by the action of pressure to fly in a predetermined direction from the ejection nozzle, wherein a plurality of recesses are formed on a surface of the orifice plate that is to be the ink ejection surface. A step of forming a mask film for forming; a step of forming the concave portion by isotropic etching through the mask film; and a plurality of the nozzles are formed at predetermined positions of an orifice plate having the concave portion formed therein. A method for manufacturing an ink jet printer head, comprising: 6. The method according to claim 5, wherein the isotropic etching is plasma etching. 7. The method according to claim 5, wherein the discharge nozzle is shelled in the recess.