JP2001311899A - Scanning optical system inspecting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To accurately inspect characteristics such as the shape or the position of an irradiated spot of a laser beam by eliminating the influence caused by relative speed and relative acceleration to the moving position or the scanning speed of a photodetector in a scanning optical system inspecting device for inspecting the scanning accuracy of the laser beam for forming an image. SOLUTION: This inspecting device is equipped with the photodetector 11 moving to travel in a main scanning direction so as to receive the laser beam R from an LD 101 scanned by a rotary polygon mirror 102 by a light receiving surface 11a, a separate distance measuring device 12 measuring the moving position of the photodetector 11, and a host computer 13 outputting a video on a monitor 14 by correcting the position and the shape of the irradiated spot of the laser beam R detected by the light receiving surface 11a based on the moving position of the photodetector 11.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scanning optical system inspection apparatus, and more particularly to an apparatus capable of accurately inspecting the scanning accuracy of a laser beam for forming an image.

[0002]

2. Description of the Related Art Conventionally, an electrostatic latent image is formed by emitting a laser beam from a light source and scanning the surface of a photoreceptor, and the electrostatic latent image is developed with toner and transferred to paper to form an image. Copiers, printers, and the like are known, and a laser beam scanning unit that is tested for its laser beam scanning accuracy and passes is incorporated in these image forming apparatuses. In addition, as an image forming apparatus, for example, an LED (Light Emitting Dio
de) There is also a device that scans outgoing light on the surface of the photoreceptor using an array or the like as a light source.

In order to inspect the amount of light emitted from a light source and the shape of the irradiated light, the scanning optical system inspection apparatus stops the light receiving element at a specific point and scans the emitted light, or moves the light receiving element along a scanning line. The light source is turned on synchronously while traveling and moving, and the irradiation characteristics of the emitted light applied to the light receiving surface of the light receiving element are inspected. For example, Japanese Patent Application Laid-Open No. Hei 10-213415 describes an apparatus for measuring and inspecting the spot diameter and irradiation position of a laser beam.

[0004]

With the recent increase in the speed and quality of image formation in laser beam printers and copiers, optical writing optical systems are also required to have higher quality. Since the scanning speed of a laser beam or the like has been increasing and becoming finer, the performance required of a scanning optical system inspection apparatus has been increasing year by year.

However, in such a conventional scanning optical system inspection apparatus, the position, the moving speed, and the acceleration of the light receiving element are not considered, and the inspection result includes an error due to these.

That is, when the light receiving element is moved at a high speed in accordance with the scanning of the laser beam, errors caused by the traveling position of the light receiving element, the relative speed and the relative acceleration with respect to the scanning of the laser beam also increase. Correction of the error has not been performed, and has had a great influence on the inspection result, and has been insufficient for increasing the speed and quality of image formation in recent years.

For example, in the apparatus described in the above publication, the movement amount of the light receiving element is presumed to be obtained from a command signal or the like sent to the control unit of the motor, but the actual position of the light receiving element is grasped. Can not do it and cannot correct the absolute position. In addition, although the beam position and the distance between beams are calculated from this position information, errors caused by the traveling speed and acceleration with respect to scanning of the laser beam are not mentioned at all, and no countermeasures have been taken, The inspection was insufficient.

SUMMARY OF THE INVENTION It is an object of the present invention to eliminate the influence of relative speed and relative acceleration on the traveling position and scanning speed of a light receiving element and to accurately inspect the characteristics such as the shape and position of emitted light. And

[0009]

Means for Solving the Problems A first method for solving the above problems is described below.
The present invention is an apparatus for inspecting the scanning accuracy of an emitted light of an optical system mounted on an image forming apparatus and scanning an emitted light from a light source on a surface of a photoreceptor, and having a light receiving surface for receiving the emitted light. A light receiving element for detecting irradiation of the emitted light within the light receiving surface, an element moving means for moving the light receiving element to an irradiation position of the emitted light while holding the light receiving element at a position corresponding to the photoreceptor surface, and the moving means A position detecting means for detecting an actual position of the light receiving element moved by the light emitting element, and a test output means for outputting a test result of irradiation of the emitted light detected by the light receiving element.

According to a second aspect of the present invention for solving the above-mentioned problems, in addition to the configuration of the first aspect, the position detecting means determines the position of the light receiving element in one or both of the main scanning direction and the sub-scanning direction by the emitted light. It is characterized by being configured to be detectable.

According to the present invention, the emitted light such as a laser beam that scans the surface of the photoconductor when assembled in the image forming apparatus receives the light of the light receiving element that moves while being held at the scanning position corresponding to the surface of the photoconductor. Irradiated in the plane, the irradiation of the outgoing light in the light receiving surface is detected,
An actual movement position of the light receiving element in one or both of the main scanning direction and the sub-scanning direction is detected, and an inspection result of irradiation of the emitted light detected by the light receiving element is output. Therefore, as the inspection result of the scanning accuracy of the emitted light that scans the surface of the photoconductor, the position and shape of the irradiation spot of the emitted light on the light receiving surface of the light receiving element and the actual detection position information of the light receiving element are output to the monitor. And so on. The position of the light receiving element is generally detected at least in the main scanning direction, and is added so as to be detected also in the sub-scanning direction as necessary for higher accuracy. In a device in which positional accuracy is a problem, the sub-scanning direction may be used as a basis.

A third aspect of the present invention for solving the above-mentioned problems is the above-mentioned first or second aspect, wherein the inspection output means comprises:
The irradiation position of the outgoing light in the scanning plane is corrected based on the irradiation position of the outgoing light in the light receiving surface by the light receiving element and the moving position of the light receiving element by the position detecting means.

In the present invention, the irradiation position of the emitted light in the scanning plane is corrected based on the detection information of the irradiation position of the emitted light in the light receiving surface of the light receiving element and the movement position of the light receiving element. Therefore, the inspection result of the irradiation position of the output light to be output can reflect the movement accuracy such as the stop position of the light receiving element, the traveling speed and the traveling acceleration. For example, the emitted light actually scans the surface of the photoconductor. The irradiation position at the time of the operation can be output to a monitor.

According to a fourth aspect of the invention for solving the above-mentioned problems, in addition to the configuration of any one of the first to third aspects, the inspection output means outputs the light-receiving element from a movement position of the light-receiving element by the position detection means. The method is characterized in that a relative movement speed of the emitted light with respect to the scanning is calculated, and the irradiation shape of the emitted light in the scanning plane is corrected based on the calculation result.

In the present invention, the irradiation shape of the emitted light in the scanning plane is corrected based on the relative moving speed of the light receiving element with respect to the scanning of the emitted light calculated from the detected moving position of the light receiving element. Therefore, as the inspection result of the scanning of the output light to be output, the irradiation shape of the output light on the light receiving surface can be corrected by reflecting the relative movement speed of the light receiving element with respect to the scanning of the output light. The monitor can output the irradiation shape when scanning the surface of the photoconductor.

According to a fifth aspect of the invention for solving the above-mentioned problems, in addition to the configuration of any one of the first to third aspects, the inspection output means outputs the light-receiving element from a position where the light-receiving element is moved by the position detecting means. The method is characterized in that a relative movement speed of the emitted light with respect to the scanning is calculated, and based on the calculation result, the irradiation light amount of the emitted light in the scanning plane is corrected.

In the present invention, the amount of emitted light in the scanning plane is corrected based on the relative moving speed of the light receiving element with respect to the scanning of the emitted light calculated from the detected moving position of the light receiving element. Therefore, as the inspection result of the scanning of the output light to be output, the irradiation light amount of the output light on the light receiving surface can be corrected by reflecting the relative moving speed of the light receiving element with respect to the scanning of the output light. The distribution of the amount of irradiation light in the irradiation spot when scanning the surface of the photoconductor can be output as a monitor.

According to a sixth aspect of the present invention for solving the above-mentioned problems, in addition to the configuration of any one of the first to fifth aspects, the position detecting means detects an actual position of the light receiving element in the optical axis direction of the emitted light. The inspection output means corrects the irradiation characteristic of the outgoing light in the scanning plane based on the amount of displacement of the light receiving element in the optical axis direction by the position detection means.

According to the present invention, the position of the outgoing light in the optical axis direction is detected as the position of the light receiving element, and the irradiation characteristic of the outgoing light on the light receiving surface is corrected based on the amount of deviation from the original position of the light receiving element. . Therefore, the inspection result of the irradiation characteristic of the output light that is output can reflect the shift amount of the output light of the light receiving element in the optical axis direction. For example, when the output light actually scans the photoconductor surface, Monitor output and the like can be performed according to the size of the irradiation spot.

According to a seventh aspect of the invention for solving the above-mentioned problems, in addition to the configuration of any one of the first to sixth aspects, the element moving means acquires a scanning speed of the outgoing light and scans the outgoing light. The moving speed of the light receiving element is controlled based on the speed and the moving position of the light receiving element by the position detecting means so that the relative moving speed of the light receiving element with respect to the scanning speed of the emitted light becomes constant. .

According to the present invention, the moving position of the light receiving element is detected while the scanning speed of the emitted light is obtained, and the movement of the light receiving element is controlled so that the relative moving speed of the light receiving element with respect to the scanning speed of the emitted light becomes constant. Speed is controlled. Therefore, it is possible to minimize the decrease in inspection accuracy due to the movement of the light receiving element at a speed that is not stable with respect to the scanning speed of the emitted light.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings. 1 and 2 are views showing a first embodiment of a scanning optical system inspection apparatus according to the present invention.

In FIG. 1, a scanning optical system inspection apparatus 10
Is for inspecting a scanning optical system unit that forms an electrostatic latent image on the surface of the photosensitive drum by assembling with an image forming apparatus. The scanning optical system inspection apparatus 10 includes a light receiving element 11,
It is configured by a separation distance measuring device 12, a host computer 13, and a monitor 14. In FIG. 1, a position corresponding to the surface of the photosensitive drum is denoted by reference numeral 100, and this scanning optical system unit emits a laser beam R emitted from a laser diode (hereinafter, LD) 101. The surface of the photosensitive drum is exposed and scanned through a lens 103 by being reflected by a rotating polygon mirror 102 rotating at a high speed to form an electrostatic latent image.

The light receiving element 11 emits a laser beam R emitted from the LD 101 and scanned by the rotating polygon mirror 102.
And a light receiving surface 11a for detecting the position and shape of the irradiation spot and receiving the light.
D101 and the rotating polygon mirror 102 are held on a rail of a moving mechanism (element moving means) (not shown) so as to be movable in the main scanning direction at a position 100 corresponding to the surface of the photosensitive drum with respect to the rotating polygon mirror 102. The laser beam R is intermittently moved to the irradiation position of the laser beam R every three irradiation spots so as to always irradiate the light receiving surface 11a following the scanning.

The separation distance measuring device 12 is arranged at one end outside the direction of extension of the movement path of the light receiving element 11 to constitute a position detecting means, and the light receiving element 11 is perpendicular to the main scanning direction. The laser light r is emitted toward the reflecting mirror 11b fixed to the light receiving element 11b, and the laser light r reflected by the reflecting mirror 11b is received.
The movement position of is actually measured (detected).

The host computer 13 is connected to a drive motor (not shown) for rotating the LD 101 and the rotary polygon mirror 102 in the set unit, and sends out a synchronizing signal similar to that of the image forming apparatus to thereby generate the laser beam R. It controls emission and scanning, sends a signal to start the traveling movement of the light receiving element 11 in synchronization with the emission of the laser beam R to the moving mechanism, and outputs the laser beam applied to the light receiving element 11. R light receiving surface 11
It is connected so as to receive a detection signal such as the position and shape of the irradiation spot in a and a detection signal of the movement position at the photosensitive drum surface position 100 from the separation distance measuring device 12.

The host computer 13 detects the irradiation spot of the laser beam R on the light receiving surface 11a of the light receiving element 11 and the detection signal of the moving position at the photosensitive drum surface position 100 by the separation distance measuring device 12, as shown in FIG. As shown, the light receiving surface 11a of the light receiving element 11
Along with the position of the laser beam R in the light receiving surface 11a.
Then, an image created by correcting the irradiation spot S position to correspond to the inside of the photosensitive drum surface is output to the monitor 14.

Therefore, the light receiving surface 11a of the light receiving element 11
The position and the shape of the irradiation spot of the laser beam R in the light receiving surface 11a together with the position are corrected to the absolute position on the surface of the photosensitive drum based on the actually measured movement position of the light receiving element 11 and output to the monitor 14. be able to. That is, the host computer 13 constitutes an inspection output unit. At this time, the monitor 14 displays the image of the irradiation spot on the light receiving surface 11a of the light receiving element 11 as well as the actually measured movement position information of the light receiving element 11 in association with the inspection result. Needless to say, it is good.

As described above, in the present embodiment, the scanning accuracy on the surface of the photosensitive drum by the laser beam R when the scanning optical system unit is assembled to the image forming apparatus, and the movement of the light receiving element 11 is controlled by the scanning of the laser beam R. Even if a slight shift occurs, the shift can be output to the monitor 14 after correcting the shift, and it can be confirmed and inspected by the video output from the monitor.

Therefore, it is possible to reduce a decrease in inspection accuracy due to the movement of the light receiving element 11, and to accurately inspect the scanning accuracy as the irradiation characteristic of the laser beam R.

Next, FIGS. 3 and 4 show a second embodiment of the scanning optical system inspection apparatus according to the present invention. In addition, since this embodiment is configured substantially in the same manner as the above-described embodiment, the drawings will be diverted, and the same components will be denoted by the same reference numerals and the characteristic portions will be described (embodiments described below). In the same way).

In FIG. 1, the light receiving element 11 is, for example,
It is moved in the main scanning direction at a set value speed by a stepping motor. In detail, as shown in FIG. 3, the laser is synchronized with the intermittent drive of the stepping motor driven around the set value speed. Beam R is light receiving surface 11
Each time three spots are illuminated in a, the vehicle travels at a constant interval in the main scanning direction.

For this reason, the light receiving element 11 is the rotating polygon mirror 1
The scanning spot of the laser beam R reflected by the laser beam 02 has a relative speed that fluctuates by about 10% to the moving speed. The irradiation spot shape of the laser beam R on the light receiving surface 11a is as shown in FIG. As shown in the drawing, although the relative speed changes despite the fact that the spot shape should originally be the spot shape S1 shown by the solid line in the figure, the spot shapes S2 and S3 shown by the dashed line and the broken line in the figure are changed. Thus, it is deformed in the main scanning direction.

From this, the host computer 13
Calculates the relative moving speed of the light receiving element 11 with respect to the scanning of the laser beam R based on the detection signal of the moving position of the light receiving element 11 by the separation distance measuring device 12, calculates the calculated relative moving speed and the original spot shape S1. The irradiation spot shape of the laser beam R on the light receiving surface 11a detected by the light receiving element 11 is corrected to the spot shape (S1) when actually irradiating the photosensitive drum surface based on the designed relative moving speed. Then, the image is output to the monitor 14.

As described above, in this embodiment, in addition to the operation and effect of the above-described embodiment, it is necessary to consider a change in the relative moving speed with respect to the scanning of the laser beam R caused by moving the light receiving element 11. Can,
The spot shape of the laser beam R detected by the light receiving surface 11a of the light receiving element 11 can be corrected by reflecting the change in the relative moving speed. Therefore, the spot shape when the laser beam R is actually irradiated onto the surface of the photosensitive drum can be output to the monitor 14 for confirmation / inspection.

FIG. 5 is a view showing a third embodiment of the scanning optical system inspection apparatus according to the present invention.

In FIG. 1, when the light receiving element 11 is set so as to travel at a high speed so as to correspond to an increase in the scanning speed of the laser beam R reflected by the rotary polygon mirror 102, The relative speed of the moving speed with respect to the scanning speed during the irradiation of the laser beam R changes to have a relative acceleration in the main scanning direction, and the laser beam R per unit area on the light receiving surface 11a thereof.
In some cases, there may be a difference in the irradiation time. More specifically, as shown in FIG. 5, the irradiation spot shape is deformed in the main scanning direction in the same manner as in the above-described embodiment, and in addition, the irradiation spot S has a large area A1 and a small area A2. In each case, the irradiation time of the laser beam R is not stabilized, and the light amount unevenness occurs. In a portion having a positive acceleration, the irradiation area per unit time is increased, so that the light amount per area is reduced, In a portion where the acceleration is present, the irradiation area per unit time is narrowed, so that the amount of light per area is increased.

From this, the host computer 13
Calculates the relative acceleration due to the movement of the light receiving element 11 during the irradiation of the laser beam R, based on the detection signal of the movement position of the light receiving element 11 by the separation distance measuring device 12, and the calculated relative acceleration On the basis of the,
The irradiation spot shape of the laser beam R in the light receiving surface 11a detected by the light receiving element 11 is corrected in the same manner as in the above-described embodiment, and the light amount in the spot is actually reduced at a stable scanning speed by the laser beam R. The light amount is corrected to the amount of light irradiated on the surface, and the image is output to the monitor 14 in the shape and the amount of light when the irradiated spot is scanned on the surface of the photosensitive drum. In addition, as correction of the light amount in this irradiation spot,
For example, the light quantity distribution may be obtained by dividing the total light quantity in the irradiation spot before correction by the area of the irradiation spot after correction.

As described above, in this embodiment, in addition to the function and effect of the above-described embodiment, it is necessary to consider a change in the relative acceleration during the irradiation of the laser beam R caused by moving the light receiving element 11 at a high speed. Can,
By reflecting the change in the relative acceleration, the shape of the irradiation spot detected by the light receiving surface 11a of the light receiving element 11 and the irradiation light amount in the spot can be corrected. Therefore, the irradiation spot can be output to the monitor 14 for confirmation and inspection based on the shape and the amount of light when actually irradiating the photosensitive drum surface.

Next, FIGS. 6 to 8 show a scanning optical system inspection apparatus according to a fourth embodiment of the present invention.

In FIG. 1, the separation distance measuring device 12 has a light receiving portion that is displaced in the optical axis direction and the sub-scanning direction of the laser beam R with respect to the emitting portion of the laser beam r. The light receiving element 11 does not reflect the laser light r emitted from the emission part of the separation distance measuring device 12 and incident on the reflecting mirror 11b so that the incident light path becomes a return light path, but instead reflects the laser light r to the light receiving part. The mirror surface angle of the reflecting mirror 11b is set so that the light is reflected toward the returning return path.

Therefore, the light receiving element 11 is arranged such that the main scanning direction is X, the sub-scanning direction is Y, and the optical axis direction of the laser beam R is Z.
In such a case, the reflection mirror 11 reflects the laser beam r from the emission section of the separation distance measuring device 12 toward the light receiving section.
By fixing b to the mirror surface angle (x, y, z), the separation distance measuring device 12 can detect the light receiving element 11 at the light receiving section when the light receiving element 11 is displaced in the sub-scanning direction or the optical axis direction of the laser beam R. The shift amount can be actually measured (detected) based on the change in the light receiving position of the laser beam r. The host computer 13 can determine the position of the light receiving element 11 in the main scanning direction, the sub-scanning direction and the laser beam R. The position in the optical axis direction can also be reflected in the inspection result of the scanning of the laser beam R.

Therefore, for example, when the light receiving element 11 fluctuates in the sub-scanning direction during the irradiation of the laser beam R reflected by the rotary polygon mirror 102, the light-receiving element 11 has a relative speed in the main scanning direction and the sub-scanning direction. Then, the irradiation spot shape of the laser beam R on the light receiving surface 11a should be the spot shape S1 indicated by the solid line in FIG. 4, but the relative speed changes.
As shown in FIG. 6, an oblique spot shape S4 sandwiching the intermediately distorted region A3 results. This area A3 is
The width is the spot diameter of the laser beam R, and its length L
Is the relative speed Va in the main scanning direction of the light receiving element 11 with respect to the scanning of the laser beam R, and the relative speed V in the sub-scanning direction.
If it is b, it can be calculated by the following equation.

L = (Va ² + Vb ² ) ^1/2 ...

The light receiving element 11 is a rotating polygon mirror 102.
When the laser beam R is reflected by the laser beam R and fluctuates in the optical axis direction, the light receiving position of the light receiving element 11 is shifted from the beam waist position P and detected by the light receiving surface 11a as shown in FIG. At the beam waist position P, the width of the spot shape S becomes the spot shape S5 with the minimum beam diameter, whereas when the width deviates from the beam waist position P, the spot shape S6 has an enlarged beam diameter.
Become. When the beam diameter (diameter) at the beam waist position P of the laser beam R is set to 2ω0, the beam diameter 2ωa at a position separated from the beam waist position by a distance a is as follows. It can be calculated by an equation.

2ωa = 2ω0 (1+ (λa / πω0) ² ) ^1/2

From this, the host computer 13
Calculates the relative moving speed of the light receiving element 11 in each direction with respect to the scanning of the laser beam R based on the detection signals of the moving position of the light receiving element 11 in the three directions by the separation distance measuring device 12, so that the light receiving element 11 Detected light receiving surface 11a
From the irradiation spot shape of the laser beam R in the
The original spot shape S1 as shown in FIG. 4 is corrected by removing the influence (error) caused by the relative moving speed.
Can be output to the monitor 14 as a spot shape when scanned on the surface of the photosensitive drum.

As described above, in the present embodiment, in addition to the operation and effect of the above-described embodiment, the relative movement speed in the main scanning direction with respect to the scanning of the laser beam R caused by moving the light receiving element 11 is reduced. in addition,
Changes in the relative movement speed in the sub-scanning direction and the optical axis direction can be considered, and the spot shape detected by the light receiving surface 11a of the light receiving element 11 is corrected by reflecting the changes in the relative movement speeds in these three directions. Can be. Therefore, the spot shape when actually irradiating the surface of the photoreceptor drum can be output to the monitor 14 for more accurate confirmation and inspection.

FIG. 9 is a view showing a fifth embodiment of the scanning optical system inspection apparatus according to the present invention.

In FIG. 9, the scanning optical system inspection apparatus 10
Is a control for inputting the rotation speed of the rotary polygon mirror 102 together with the moving position of the light receiving element 11 detected by the separation distance measuring device 12 in addition to the light receiving element 11, the separation distance measuring device 12, the host computer 13 and the monitor 14. Part 23
The control unit 23 controls one of the motor of the moving mechanism or the motor of the rotating polygon mirror 102 so that the relative movement speed of the light receiving element 11 with respect to the scanning of the laser beam R by the rotating polygon mirror 102 becomes constant. Alternatively, both drives are controlled.

Therefore, the influence of the relative speed unevenness between the scanning speed of the laser beam R and the moving speed of the light receiving element 11 can be eliminated before detection as much as possible. The spot shape can be output to the monitor 14 as an image.

As described above, in the present embodiment, it is possible to reduce a decrease in the inspection accuracy of the scanning of the laser beam R due to the traveling movement of the light receiving element 11. It can be moved stably and the factors that mechanically lower the inspection accuracy can be eliminated to some extent.

Therefore, depending on the inspection level, the irradiation spot of the laser beam R detected on the light receiving surface 11a of the light receiving element 11 may be directly output to the monitor 14 as an image without performing the correction according to the above-described embodiment. At the same time, by performing the correction, the reliability and accuracy of the inspection can be further improved.

[0054]

According to the present invention, a light-receiving element moving at a position corresponding to the surface of a photoreceptor is irradiated with outgoing light for scanning the surface of the photoreceptor to detect an irradiated spot, and to detect the light-receiving element. Since the actual movement position in the main scanning direction or the sub-scanning direction is detected, an inspection result reflecting the detected position information can be output to a monitor or the like.

Therefore, for example, the position and shape of the irradiation spot of the emitted light on the light receiving surface and the actual moving position and displacement of the light receiving element based on the detected position information are monitored and output. The irradiation position of the output light corrected based on the monitor can be output as a monitor, and the irradiation shape on the photoconductor surface of the output light corrected based on the relative movement speed calculated from the detected position information, and the irradiation position within the irradiation spot The distribution of the irradiation light amount can be output as a monitor.

Further, the position of the light receiving element with respect to the optical axis direction of the emitted light is also detected, and the amount of deviation of the light receiving element from the original position is corrected by reflecting the deviation amount of the emitted light on the irradiation characteristics in the light receiving surface of the emitted light. Thus, for example, a monitor output can be made based on the size of an irradiation spot when the emitted light actually scans the surface of the photoconductor.

Further, by acquiring the scanning speed of the emitted light and controlling the moving speed of the light receiving element so that the relative moving speed with respect to the scanning speed is constant, the output speed is reduced so as to reduce the reduction in inspection accuracy. The light receiving element can be moved stably with respect to the scanning speed of the emitted light, and the above correction can be omitted depending on the required level.

As a result, it is possible to reduce a decrease in inspection accuracy due to the movement of the light receiving element, and to accurately inspect the irradiation characteristics (scanning accuracy) of the emitted light.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating a first embodiment of a scanning optical system inspection apparatus according to the present invention, and is a configuration diagram illustrating a schematic overall configuration thereof.

FIG. 2 is a diagram showing an example of an output of the inspection result.

FIG. 3 is a diagram showing a second embodiment of the scanning optical system inspection apparatus according to the present invention, and is a graph illustrating the movement of the light receiving element.

FIG. 4 is a diagram illustrating a detection spot by the light receiving element.

FIG. 5 is a diagram illustrating a scanning optical system inspection apparatus according to a third embodiment of the present invention, and is a diagram illustrating a detection spot by a light receiving element thereof.

FIG. 6 is a view showing a fourth embodiment of the scanning optical system inspection apparatus according to the present invention, and is a view for explaining a detection spot by a light receiving element thereof.

FIG. 7 is a diagram illustrating detection of the laser beam in the optical axis direction.

FIG. 8 is a diagram illustrating a detection spot by the light receiving element.

FIG. 9 is a diagram illustrating a fifth embodiment of the scanning optical system inspection apparatus according to the present invention, and is a configuration diagram illustrating a schematic overall configuration thereof.

[Explanation of symbols]

 REFERENCE SIGNS LIST 10 scanning optical system inspection device 11 light receiving element 11 a light receiving surface 11 b reflecting mirror 12 separation distance measuring device 13 host computer 14 monitor 23 control unit 100 photosensitive drum surface position 101 laser diode (LD) 102 rotating polygon mirror 103 lens R laser beam r Laser light

Claims (7)

[Claims] 1. An apparatus for inspecting the scanning accuracy of an emitted light of an optical system mounted on an image forming apparatus and scanning an emitted light from a light source on a surface of a photoreceptor, wherein a light receiving surface for receiving the emitted light is provided. A light receiving element for detecting irradiation of the emitted light within the light receiving surface, an element moving means for moving the light receiving element to an irradiation position of the emitted light while holding the light receiving element at a position corresponding to the surface of the photoreceptor, and A scanning optical system comprising: position detecting means for detecting the actual position of the light receiving element moved by the means; and inspection output means for outputting an inspection result of irradiation of the emitted light detected by the light receiving element. Inspection equipment. 2. The apparatus according to claim 1, wherein said position detecting means is capable of detecting a position of the light receiving element in one or both of a main scanning direction and a sub-scanning direction by the emitted light.
3. The scanning optical system inspection device according to 1. 3. The inspection output means corrects the irradiation position of the outgoing light in the scanning plane based on the irradiation position of the outgoing light in the light receiving surface by the light receiving element and the movement position of the light receiving element by the position detecting means. 3. The method according to claim 1, wherein
3. The scanning optical system inspection device according to 1. 4. The inspection output means calculates a relative moving speed of the emitted light of the light receiving element with respect to scanning from a moving position of the light receiving element by the position detecting means, and, based on the calculation result, of the emitted light in the scanning plane. 4. The scanning optical system inspection device according to claim 1, wherein the irradiation shape is corrected. 5. The inspection output means calculates a relative moving speed of the light emitted from the light receiving element with respect to scanning from a moving position of the light receiving element by the position detecting means. 4. The scanning optical system inspection device according to claim 1, wherein the irradiation light amount is corrected. 6. The position detecting means is configured to detect an actual position of the light receiving element with respect to the optical axis direction of the emitted light, and the inspection output means is configured to shift the light receiving element in the optical axis direction by the position detecting means. 6. The scanning optical system inspection apparatus according to claim 1, wherein the irradiation characteristic of the emitted light in the scanning plane is corrected based on the amount. 7. The element moving means acquires a scanning speed of the emitted light, and, based on the scanning speed of the emitted light and the moving position of the light receiving element by the position detecting means, the scanning speed of the light receiving element with respect to the scanning speed of the emitted light. The moving speed of the light receiving element is controlled so that the relative moving speed is constant.
7. The scanning optical system inspection apparatus according to any one of claims 1 to 6.