JP2001310109A - Chemical filter - Google Patents
Chemical filterInfo
- Publication number
- JP2001310109A JP2001310109A JP2001044945A JP2001044945A JP2001310109A JP 2001310109 A JP2001310109 A JP 2001310109A JP 2001044945 A JP2001044945 A JP 2001044945A JP 2001044945 A JP2001044945 A JP 2001044945A JP 2001310109 A JP2001310109 A JP 2001310109A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- activated carbon
- honeycomb structure
- base paper
- zeolite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Disinfection, Sterilisation Or Deodorisation Of Air (AREA)
- Separation Of Gases By Adsorption (AREA)
- Gas Separation By Absorption (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、例えば半導体製造
工場や精密電子製造工場のクリーンルーム及びクリーン
ルーム内で使用される装置（デバイス）に使用される極
微量のガス状不純物成分を除去する空気清浄用のケミカ
ルフィルタに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air cleaner for removing a trace amount of gaseous impurity components used in, for example, a clean room of a semiconductor manufacturing plant or a precision electronic manufacturing plant and an apparatus used in the clean room. Related to a chemical filter.
【０００２】[0002]
【従来の技術】半導体製造工場におけるシリコンウエハ
ーなどの製造工程において、６４ＭビットＤＲＡＭまで
のデバイスではクリーンルーム中のパーティクルや金属
不純物などの汚染物が欠陥の原因となるため、これらの
汚染物をＨＥＰＡフィルタやＵＬＰＡフィルタを介して
極限まで除去している。しかし、６４ＭビットＤＲＡＭ
以上のデバイスにおいてはクリーンルーム内のｐｐｂレ
ベルのガス状汚染物が製品の歩留り低下の原因となって
いる。これらのガス状汚染物質は外気からの侵入、クリ
ーンルーム構成部材からのアウトガス、プロセス上の薬
品などが原因であることが知られている。2. Description of the Related Art In a process of manufacturing a silicon wafer or the like in a semiconductor manufacturing plant, in a device up to a 64 Mbit DRAM, contaminants such as particles and metal impurities in a clean room cause defects. Or through a ULPA filter. However, 64Mbit DRAM
In the above devices, ppb level gaseous contaminants in the clean room cause a reduction in product yield. It is known that these gaseous pollutants are caused by intrusion from outside air, outgas from clean room components, chemicals in the process, and the like.
【０００３】これらガス状汚染物質をｐｐｂオーダ以下
まで低濃度化する場合にはクリーンルーム内でケミカル
フィルタを使用して、汚染物質を除去する方法が採られ
ている。ケミカルフィルタは例えば、活性炭のような吸
着材を素材としたフィルタにクリーンルームやデバイス
内の空気を通過させ、ガス状汚染物質を除去するもので
ある。ガス状汚染物質は酸、アルカリ及び有機物に分類
され、一般的にはケミカルフィルタはこれらのガス状汚
染物質を効率よく除去するため、ガスを吸着する吸着材
やガスを吸収する反応材を適宜に選定して担持したもの
が使用される。[0003] When the concentration of these gaseous pollutants is reduced to the order of ppb or less, a method of removing the pollutants by using a chemical filter in a clean room is adopted. The chemical filter removes gaseous pollutants by passing air in a clean room or a device through a filter made of an adsorbent such as activated carbon. Gaseous pollutants are classified into acids, alkalis, and organic substances.Generally, chemical filters use appropriate adsorbents that adsorb gas and reactants that absorb gas in order to efficiently remove these gaseous pollutants. What is selected and supported is used.
【０００４】例えば、アミン類は大気中に数十ｐｐｂ含
まれており、外気を採り入れる際にクリーンルーム内に
侵入する。また、クリーンルーム内の建材、プロセス用
の薬品からもアミン類などの塩基性ガス汚染物質が発生
していることが知られている。これら塩基性ガス汚染物
質がクリーンルーム内に１０〜２０ｐｐｂ存在すると、
フォトレジスタンスの形状異常を引き起こし（Ｔトップ
現象）、また、酸性ガスと反応することにより塩を形成
し、プロセス装置の光学部品やシリコーンウエーハ表面
に曇りを生じさせる。このため、ガスを吸収する反応材
として酸性物質を担持したケミカルフィルタを使用し、
アミン類などの塩基性ガス汚染物質を除去している。他
方、クリーンルーム内に酸性ガス汚染物質が存在する
と、除塵フィルタのガラス繊維を腐食することによりボ
ロンの発生を促進し、また、ＩＣなどの金属腐食を引き
起こす。このような酸性ガス汚染物質対策のため、ガス
を吸収する反応材として塩基性物質を担持したケミカル
フィルタを使用し、酸性ガス汚染物質を除去している。For example, amines are contained in the air at several tens of ppb and enter the clean room when taking in outside air. It is also known that basic gas pollutants such as amines are generated from building materials and process chemicals in clean rooms. When these basic gas contaminants are present in the clean room at 10 to 20 ppb,
An abnormal shape of the photoresistance is caused (T-top phenomenon), and a salt is formed by reacting with the acid gas, and clouding is caused on the optical parts of the process apparatus and the surface of the silicone wafer. For this reason, use a chemical filter carrying an acidic substance as a reactant that absorbs gas,
It removes basic gas pollutants such as amines. On the other hand, if acidic gas contaminants are present in the clean room, the glass fibers of the dust filter are corroded, thereby promoting the generation of boron and causing metal corrosion such as IC. As a countermeasure against such acidic gas pollutants, a chemical filter supporting a basic substance is used as a reactant for absorbing gas to remove acidic gas pollutants.
【０００５】従来、ガスを吸収させる反応材として粒状
活性炭を使用し、該粒状活性炭をフィルターケースに充
填したケミカルフィルタがある。しかし、このケミカル
フィルタは圧力損失が大きい。また、粒状活性炭は被処
理気体との接触面積が少ないため、除去効率が悪いなど
の欠点がある。更に、活性炭素繊維の不織布をコルゲー
トしたハニカム構造体ケミカルフィルタもあるが、圧力
損失が大きく、製造コストが高いという問題がある。ク
リーンルームでは高洗浄度を保つために、ＨＥＰＡフィ
ルタ、ＵＬＰＡフィルタ及びケミカルフィルタなどに空
間内の空気を通して循環させているため、これらフィル
ターの圧力損失が大きい場合、送風ブロアの大容量化、
送風エネルギーの増大などの問題が生じることとなる。[0005] Conventionally, there is a chemical filter in which granular activated carbon is used as a reactant for absorbing gas, and the granular activated carbon is filled in a filter case. However, this chemical filter has a large pressure loss. Further, granular activated carbon has a drawback such as poor removal efficiency because the contact area with the gas to be treated is small. Further, there is a honeycomb structure chemical filter in which a nonwoven fabric of activated carbon fibers is corrugated, but there is a problem that pressure loss is large and manufacturing cost is high. In a clean room, the air in the space is circulated through HEPA filters, ULPA filters, chemical filters, etc. in order to maintain a high degree of cleaning, so when the pressure loss of these filters is large, the capacity of the blower blower increases,
Problems such as an increase in blast energy will occur.
【０００６】このため、圧力損失が小さい、接触面積が
大きいなどの理由から、粉末状活性炭と有機繊維の混合
物を抄造した粉末状活性炭含有有機繊維基紙をハニカム
構造に成形した後、該成形体をガス状汚染物質を中和で
きる無機酸や金属塩などを溶解した水溶液に含浸し、こ
の無機酸や金属塩などのガス反応材を活性炭に担持させ
ることによって得られるケミカルフィルタも提案されて
いる。このケミカルフィルタは粒状活性炭をフィルター
ケースに充填したケミカルフィルタに比べて密度が小さ
く、圧力損失も低くすることが可能である点で有利であ
る。For this reason, a powdered activated carbon-containing organic fiber base paper formed from a mixture of powdered activated carbon and organic fibers is formed into a honeycomb structure because of its low pressure loss and large contact area. There is also proposed a chemical filter obtained by impregnating an aqueous solution in which an inorganic acid or a metal salt capable of neutralizing gaseous pollutants is dissolved and carrying a gas-reactive material such as the inorganic acid or a metal salt on activated carbon. . This chemical filter is advantageous in that it has a lower density and lower pressure loss than a chemical filter in which granular activated carbon is filled in a filter case.
【０００７】[0007]
【発明が解決しようとする課題】しかしながら、上記従
来のハニカム構造体ケミカルフィルタにおいては、紙の
抄造工程で有機繊維と活性炭の混合物を抄き込むため
に、活性炭担持量を多くさせることができず、多くとも
紙の単位面積当たりの活性炭担持量は４０g/m2程度、吸
水量も８０g/m2程度である。このため、ガス反応材を含
浸担持するとき、ガス反応材の担持量は増加せず、ガス
状汚染物質の除去性能や寿命の点で十分に満足できるも
のとは言い難い。However, in the above-mentioned conventional honeycomb structured chemical filter, the amount of activated carbon carried cannot be increased because a mixture of organic fibers and activated carbon is formed in the paper forming process. At most, the amount of activated carbon per unit area of paper is about 40 g / m 2 , and the water absorption is about 80 g / m 2 . Therefore, when the gaseous reactant is impregnated and carried, the amount of the gaseous reactant carried does not increase, and it is hard to say that the gaseous pollutant removal performance and the life are sufficiently satisfactory.
【０００８】従って、本発明の目的は、吸着剤である活
性炭やゼオライトの担持量が格段に高く、従って、反応
材を含浸担持すれば、反応材の担持量を増加でき、ガス
状汚染物質の除去性能が優れると共に、圧力損失が小さ
く、寿命が向上したケミカルフィルタを提供することに
ある。Accordingly, an object of the present invention is to remarkably increase the amount of activated carbon or zeolite supported as an adsorbent. Therefore, if a reaction material is impregnated and supported, the amount of the reaction material supported can be increased, and the amount of gaseous pollutants can be reduced. An object of the present invention is to provide a chemical filter having excellent removal performance, a small pressure loss, and an improved life.
【０００９】[0009]
【課題を解決するための手段】かかる実情において、本
発明者らは鋭意検討を行った結果、空気中のガス状不純
物及び凝集性有機物質を除去する吸着濾材を有するコル
ゲート状ハニカム構造体のケミカルフィルタにおいて、
繊維間空隙率８０〜９５％の繊維基紙に例えば、活性炭
やゼオライトなどの吸着剤を担持させる際、該吸着剤を
該繊維間の空隙を塞ぐように高割合量を充填させ吸着剤
高担持量の無機繊維基紙を得、その後、コルゲート状ハ
ニカム構造体に成形した後、該ハニカム構造体にガス反
応材を担持するなどの方法を採れば、反応材の担持量を
増加でき、ガス状汚染物質の除去性能が優れると共に、
圧力損失が小さく、寿命が向上すること等を見出し、本
発明を完成するに至った。Under these circumstances, the present inventors have conducted intensive studies and as a result, have found that the chemical structure of a corrugated honeycomb structure having an adsorbing filter medium for removing gaseous impurities and cohesive organic substances in the air. In the filter,
When an adsorbent such as activated carbon or zeolite is supported on a fiber base paper having a porosity between fibers of 80 to 95%, a high proportion of the adsorbent is filled so as to close the gap between the fibers, and the adsorbent is highly supported. After obtaining an amount of inorganic fiber base paper and then forming it into a corrugated honeycomb structure, a method of supporting a gaseous reactant on the honeycomb structure can increase the amount of the reactant carried, thereby increasing the gaseous state. With excellent contaminant removal performance,
The inventors have found that the pressure loss is small and the life is improved, and the present invention has been completed.
【００１０】すなわち、本発明は、空気中のガス状不純
物及び凝集性有機物質を除去する吸着濾材を有するコル
ゲート状ハニカム構造体のケミカルフィルタであって、
前記吸着濾材は繊維間空隙率８０〜９５％の繊維基紙に
ガス吸着材又はガス吸着材及びガス反応材を担持したも
のであるケミカルフィルタを提供するものである。That is, the present invention relates to a chemical filter having a corrugated honeycomb structure having an adsorbing filter medium for removing gaseous impurities and cohesive organic substances in air,
The adsorbent filter material provides a chemical filter in which a gas adsorbent or a gas adsorbent and a gas reactant are carried on a fiber base paper having a porosity between fibers of 80 to 95%.
【００１１】また、本発明は、繊維間空隙率８０〜９５
％の繊維基紙に活性炭又はゼオライトを該繊維基紙の単
位面積当たりの活性炭又はゼオライト担持量が４０〜１
５０g/m2の範囲となるように担持させ、次いで、該活性
炭又はゼオライト担持繊維基紙をコルゲート状ハニカム
構造体に成形した後、該コルゲート状ハニカム構造体に
ガス反応材を担持させるケミカルフィルタの製造方法を
提供するものである。また、本発明は、繊維間空隙率８
０〜９５％の繊維基紙をコルゲート状ハニカム構造体に
成形した後、該コルゲート状ハニカム構造体に活性炭又
はゼオライトを該コルゲート状ハニカム構造体を構成す
る繊維基紙の単位面積当たりの活性炭又はゼオライト担
持量が４０〜１５０g/m2の範囲となるように担持させ、
次いで、該コルゲート状ハニカム構造体にガス反応材を
担持させるケミカルフィルタの製造方法を提供するもの
である。また、本発明は、繊維間空隙率８０〜９５％の
繊維基紙に活性炭又はゼオライトを吸水量が１００〜１
６０g/m2となるように担持させ、次いで、該活性炭担持
繊維基紙をガス反応材と反応しない有機系接着剤又は無
機系接着剤から選ばれる１種以上の接着剤でコルゲート
状ハニカム構造体に成形した後、該コルゲート状ハニカ
ム構造体に塩基性ガス又は酸性ガスを吸収するガス反応
材を担持させるケミカルフィルタの製造方法を提供する
ものである。また、本発明は、繊維間空隙率８０〜９５
％の繊維基紙をガス反応材と反応しない有機系接着剤又
は無機系接着剤から選ばれる１種以上の接着剤でコルゲ
ート状ハニカム構造体に成形した後、該コルゲート状ハ
ニカム構造体に活性炭又はゼオライトを吸水量が１００
〜１６０g/m2となるように担持させ、次いで、該コルゲ
ート状ハニカム構造体に塩基性ガス又は酸性ガスを吸収
するガス反応材を担持させるケミカルフィルタの製造方
法を提供するものである。[0011] The present invention also relates to an inter-fiber porosity of 80 to 95.
% Of the activated carbon or zeolite per unit area of the fiber base paper is 40 to 1%.
Is supported to be in the range of 50 g / m 2, then, after molding the activated carbon or a zeolite-supported fiber base paper corrugated honeycomb structure, the chemical filter of supporting gas reactants to said corrugated honeycomb structure It is intended to provide a manufacturing method. In addition, the present invention provides an inter-fiber porosity of 8
After forming 0 to 95% of fiber base paper into a corrugated honeycomb structure, activated carbon or zeolite is added to the corrugated honeycomb structure. Activated carbon or zeolite per unit area of the fiber base paper constituting the corrugated honeycomb structure Supported so that the supported amount is in the range of 40 to 150 g / m 2 ,
Next, the present invention provides a method for manufacturing a chemical filter in which a gas reactive material is supported on the corrugated honeycomb structure. The present invention also provides a fiber base paper having a porosity between fibers of 80 to 95% containing activated carbon or zeolite having a water absorption of 100 to 1%.
60 g / m 2 and then the activated carbon-supported fiber base paper is corrugated with one or more adhesives selected from organic or inorganic adhesives that do not react with the gaseous reactant. The present invention provides a method for producing a chemical filter in which a corrugated honeycomb structure is loaded with a gaseous reactant that absorbs a basic gas or an acidic gas. In addition, the present invention provides a porosity between fibers of 80 to 95.
% Of the fiber base paper is formed into a corrugated honeycomb structure with at least one adhesive selected from an organic adhesive or an inorganic adhesive that does not react with the gas-reactive material, and then the activated carbon or the corrugated honeycomb structure is added to the corrugated honeycomb structure. Water absorption of zeolite is 100
~160g / m 2 and is supported so that, then, is to provide a method of manufacturing a chemical filter for supporting the gas reaction member to absorb basic gas or the acid gas into the corrugated honeycomb structure.
【００１２】[0012]
【発明の実施の形態】本発明のケミカルフィルタは、空
気中の酸性ガスやアルカリ性ガス等のガス状不純物や凝
集性有機物質を除去する目的で使用される。ここで、凝
集性有機物質とは物体の表面で凝集することがある空気
中に浮遊している揮発性の有機物質で、例えば、ジオク
チルフタレート、ジブチルフタレート、ジメチルシロキ
サン、ヘキサメチルジシロキサン、Ｎ−メチル−２−ピ
ロリドン等が挙げられる。該ケミカルフィルタはこれら
ガス状不純物や凝集性有機物質を除去するコルゲート状
ハニカム構造体の吸着濾材を有するものであり、通常、
吸着濾材及びこの吸着濾材を支持する部材とからなる。BEST MODE FOR CARRYING OUT THE INVENTION The chemical filter of the present invention is used for the purpose of removing gaseous impurities such as acidic gas and alkaline gas and cohesive organic substances in the air. Here, the cohesive organic substance is a volatile organic substance floating in the air that may coagulate on the surface of the object, for example, dioctyl phthalate, dibutyl phthalate, dimethylsiloxane, hexamethyldisiloxane, N- Methyl-2-pyrrolidone and the like. The chemical filter has an adsorbent filter material of a corrugated honeycomb structure for removing these gaseous impurities and cohesive organic substances.
It comprises an adsorption filter medium and a member supporting the adsorption filter medium.
【００１３】本発明のケミカルフィルタにおいて、吸着
濾材は繊維間空隙率８０〜９５％の繊維基紙にガス吸着
材又はガス反応材を担持したものであり、且つコルゲー
ト状ハニカム構造体であれば、特に制限されない。繊維
基紙とは繊維から形成される織布又は不織布を言う。繊
維としては、Ｅガラス繊維、ＮＣＲ繊維、ＡＲＧ繊維、
ＥＣＧ繊維、Ｓガラス繊維、Ａガラス繊維などのガラス
繊維、チョップドストランド、セラミック繊維、アルミ
ナ繊維、ムライト繊維、シリカ繊維、ロックウール繊
維、炭素繊維等の無機繊維及び有機繊維が挙げられる。
有機繊維としては、アラミド繊維、ナイロン繊維、ポリ
エチレンテレフタレート繊維などが使用できる。繊維基
紙は無機繊維を使用することがケミカルフィルタの強度
を高めることができる点で好ましい。これらの無機繊維
及び有機繊維の形状等は特に制限さないが、繊維長は
０．１〜５０mmのもの、繊維径は０．１〜２５μm のも
のの使用が好ましい。これらの無機繊維及び有機繊維は
１種又は２種以上を組み合わせて使用できる。In the chemical filter of the present invention, the adsorbing filter medium is a fiber base paper having a porosity between fibers of 80 to 95% carrying a gas adsorbing material or a gas reacting material, and if it is a corrugated honeycomb structure, There is no particular limitation. The fiber base paper refers to a woven or non-woven fabric formed from fibers. As the fiber, E glass fiber, NCR fiber, ARG fiber,
Glass fibers such as ECG fiber, S glass fiber, and A glass fiber, chopped strands, ceramic fibers, alumina fibers, mullite fibers, silica fibers, rock wool fibers, and inorganic fibers and organic fibers such as carbon fibers.
As the organic fibers, aramid fibers, nylon fibers, polyethylene terephthalate fibers, and the like can be used. It is preferable to use inorganic fibers for the fiber base paper since the strength of the chemical filter can be increased. The shape and the like of these inorganic fibers and organic fibers are not particularly limited, but those having a fiber length of 0.1 to 50 mm and a fiber diameter of 0.1 to 25 μm are preferable. These inorganic fibers and organic fibers can be used alone or in combination of two or more.
【００１４】ガス吸着材又はガス吸着材及びガス反応材
が担持される繊維基紙の繊維間空隙率は８０〜９５％で
あるが、９０〜９５％が好ましい。繊維基紙の繊維間空
隙率を上記範囲内とすれば、該繊維間の空隙にガス吸着
材である活性炭やゼオライトを塗工担持させる際、活性
炭やゼオライトを該繊維間の空隙を塞ぐように高割合量
を充填することができる。繊維間空隙率は繊維基紙の見
かけの体積に対して、該見かけの体積から繊維基紙中の
該無機繊維の占める体積を引いた部分（空隙部分の体
積）の比率を言う。The inter-fiber porosity of the fiber adsorbent or the fiber base paper on which the gas adsorbent and the gas reactant are carried is 80 to 95%, preferably 90 to 95%. If the inter-fiber porosity of the fiber base paper is within the above range, when the activated carbon or zeolite as a gas adsorbent is coated and supported on the inter-fiber voids, the activated carbon or zeolite is filled with the voids between the fibers. High proportions can be filled. The inter-fiber porosity refers to the ratio of the apparent volume of the fiber base paper to the portion obtained by subtracting the volume occupied by the inorganic fibers in the fiber base paper from the apparent volume (the volume of the void portion).
【００１５】ガス吸着材としては、活性炭又はゼオライ
トが挙げられる。活性炭又はゼオライトは凝集性有機物
質を吸着させる目的で用いる。この活性炭又はゼオライ
トを吸着材として用いた凝集性有機物質を吸着するケミ
カルフィルターは、活性炭やゼオライトの細孔に凝集性
有機物質をファンデルワールス力などで物理吸着させる
ので、酸や塩基などの添着物質を必要としない。[0015] Examples of the gas adsorbent include activated carbon and zeolite. Activated carbon or zeolite is used for the purpose of adsorbing coherent organic substances. The chemical filter that uses the activated carbon or zeolite as an adsorbent to adsorb coagulable organic substances adsorbs coagulable organic substances to the pores of activated carbon or zeolite by van der Waals force, etc. Does not require substance.
【００１６】ガス反応材としては、酸性ガスを吸収させ
る反応材及び塩基性ガスを吸収させる反応材が挙げられ
る。酸性ガスを吸収させる反応材としては、広くアルカ
リ性の無機塩が使用できる。このような無機塩として
は、炭酸カリウム等のアルカリ塩などが挙げられる。ま
た、塩基性ガスを吸収させる反応材としては、広く無機
酸及び酸性の無機塩が使用できる。無機酸としては、硫
酸などが挙げられ、酸性の無機塩としては硫酸鉄などの
硫酸塩が挙げられる。Examples of the gas reactant include a reactant that absorbs an acidic gas and a reactant that absorbs a basic gas. Alkaline inorganic salts can be widely used as the reactant for absorbing the acidic gas. Examples of such inorganic salts include alkali salts such as potassium carbonate. In addition, inorganic acids and acidic inorganic salts can be widely used as a reactant for absorbing a basic gas. Examples of the inorganic acid include sulfuric acid and the like, and examples of the acidic inorganic salt include a sulfate such as iron sulfate.
【００１７】前記繊維基紙に対するガス吸着材の担持量
としては、前記繊維基紙の単位面積当たりの活性炭又は
ゼオライト担持量が４０〜１５０g/m2、好ましくは６０
〜１２０g/m2、特に好ましくは８０〜１２０g/m2であ
る。また、この活性炭又はゼオライト担持による活性炭
又はゼオライトの吸水量は１００〜１６０g/m2、好まし
くは１２０〜１５０g/m2である。活性炭又はゼオライト
担持量及び吸水量が上記範囲にあれば、ガス反応材の添
着量も高められ、優れたガス状汚染物質除去性能が得ら
れる。前記繊維基紙に対するガス反応材の担持量として
は、アルカリ性汚染物質の除去を目的として硫酸を使用
した場合、５〜３０kg/m3 とすることが好ましく、酸性
汚染物質の除去を目的として炭酸カリウムを使用した場
合、３０〜６０kg/m3 とすることが好ましい。The amount of the gas adsorbent carried on the fiber base paper is such that the amount of activated carbon or zeolite carried per unit area of the fiber base paper is 40 to 150 g / m 2 , preferably 60 g / m 2 .
１２０120 g / m 2 , particularly preferably 80-120 g / m 2 . The water absorption of the activated carbon or zeolite supported on the activated carbon or zeolite is 100 to 160 g / m 2 , preferably 120 to 150 g / m 2 . When the amount of activated carbon or zeolite supported and the amount of water absorption are in the above ranges, the amount of gaseous reactant adhering is also increased, and excellent gaseous pollutant removal performance is obtained. When sulfuric acid is used for the purpose of removing alkaline contaminants, the amount of the gaseous reactant carried on the fiber base paper is preferably 5 to 30 kg / m3, and potassium carbonate is used for the purpose of removing acidic contaminants. When is used, it is preferably 30 to 60 kg / m 3 .
【００１８】次に、本発明のケミカルフィルタの第１の
製造例について説明する。先ず、繊維間空隙率８０〜９
５％の繊維基紙を得る。繊維基紙は上記のものと同様の
ものが使用できるが、無機繊維を使用することが製造さ
れたケミカルフィルタの強度を高めることができるなど
の点で好ましい。先ず、１種又は２種以上の繊維をポリ
ビニルアルコール、ポリアクリルアミド又はメチルセル
ロース等の有機バインダが添加された溶液中に分散して
スラリーを形成する。例えば、このスラリーを形成する
際、有機バインダの配合量は繊維１００重量部に対し
て、５〜２５重量部、好ましくは１０〜１５重量部、ま
た、繊維の配合量はスラリー中、０．５〜３重量％、好
ましくは０．５〜１重量％とするのが、抄造性に優れ、
均質で繊維間空隙を高めた繊維を得ることができる点か
ら好ましい。繊維の配合量が０．５重量％未満では仕上
がりのきれいな基紙が得られるものの、多量の水を必要
としコスト高となると共に、所望の強度が得られ難い。
一方、３重量％を越えると厚さが不均一で粗密であるな
ど不良品となり易く、且つ繊維間空隙を高めた繊維が得
られ難くなる。次いで、該スラリーを例えば丸網抄造機
などの抄造機を使用する公知の抄造法で繊維基紙（不織
布）とする。繊維基紙の繊維間空隙率を８０〜９５％と
するには、特に、繊維に対する有機バインダーの配合量
を上記の範囲とすることにより容易に得ることができ
る。Next, a first manufacturing example of the chemical filter of the present invention will be described. First, the porosity between fibers is 80 to 9
A 5% fiber base paper is obtained. As the fiber base paper, the same ones as described above can be used, but the use of inorganic fibers is preferable in that the strength of the manufactured chemical filter can be increased. First, one or more fibers are dispersed in a solution to which an organic binder such as polyvinyl alcohol, polyacrylamide or methyl cellulose is added to form a slurry. For example, when forming this slurry, the compounding amount of the organic binder is 5 to 25 parts by weight, preferably 10 to 15 parts by weight with respect to 100 parts by weight of the fiber. To 3% by weight, preferably 0.5 to 1% by weight, is excellent in paper formability,
It is preferable in that a fiber having a uniform and increased inter-fiber space can be obtained. If the blending amount of the fibers is less than 0.5% by weight, a clean base paper can be obtained, but a large amount of water is required, the cost is increased, and the desired strength is hardly obtained.
On the other hand, if it exceeds 3% by weight, it is likely to be a defective product such as a non-uniform thickness and a coarse / dense shape, and it is difficult to obtain a fiber having an increased inter-fiber void. Next, the slurry is made into a fiber base paper (nonwoven fabric) by a known papermaking method using a papermaking machine such as a round mesh papermaking machine. In order to make the inter-fiber porosity of the fiber base paper 80 to 95%, in particular, it can be easily obtained by setting the blending amount of the organic binder to the fibers within the above range.
【００１９】次いで、繊維間空隙率８０〜９５％の繊維
基紙に活性炭又はゼオライトを該繊維基紙の単位面積当
たりの担持量が４０〜１５０g/m2、好ましくは６０〜１
２０g/m2、特に好ましくは８０〜１２０g/m2の範囲とな
るように担持する。また、この活性炭又はゼオライト担
持による活性炭又はゼオライトの吸水量は１００〜１６
０g/m2、好ましくは１２０〜１５０g/m2である。活性炭
又はゼオライトを上記範囲内に担持するには繊維間空隙
に、５０〜３５０kg/m3 の割合で粉末状活性炭又はゼオ
ライトを塗工担持すればよい。活性炭又はゼオライト担
持量及び吸水量が上記範囲にあれば、ガス反応材の添着
量も高められ、優れたガス状汚染物質除去性能が得られ
る。担持方法は粉末活性炭又はゼオライト及びバインダ
ーの懸濁液を塗工する方法が、繊維間の隙間を塞ぐよう
に活性炭を充填して、高割合の活性炭を担持できる点で
好ましい。バインダーとしては、塩化ビニリデン系バイ
ンダー、塩化ビニルアクリル共重合系バインダー、アク
リル系バインダー、ポリエステル系バインダー、スチレ
ン系バインダー、ラテックス系バインダーなどが挙げら
れ、このうち、塩化ビニリデン系バインダーが難燃性が
発揮できる点で好ましい。活性炭の塗工はヘラ塗り、刷
毛塗り又はロール塗りが使用でき、塗布、乾燥後、加熱
処理して活性炭塗工繊維基紙を作製する。加熱処理は７
０〜１２０℃の温度範囲で行えばよい。Next, activated carbon or zeolite is loaded on a fiber base paper having a porosity between fibers of 80 to 95%, and the supported amount per unit area of the fiber base paper is 40 to 150 g / m 2 , preferably 60 to 1 g / m 2 .
20 g / m 2, particularly preferably carries to be in the range of 80 to 120 / m 2. The activated carbon or zeolite carrying the activated carbon or zeolite has a water absorption of 100 to 16
0 g / m 2, preferably 120-150 g / m 2. In order to support activated carbon or zeolite within the above range, powdery activated carbon or zeolite may be applied and supported at a rate of 50 to 350 kg / m 3 in the interfiber space. When the amount of activated carbon or zeolite supported and the amount of water absorption are in the above ranges, the amount of gaseous reactant adhering is also increased, and excellent gaseous pollutant removal performance is obtained. The supporting method is preferably a method of applying a powdered activated carbon or a suspension of zeolite and a binder in that activated carbon is filled so as to close the gaps between the fibers and a high proportion of activated carbon can be supported. Examples of the binder include vinylidene chloride binders, vinyl acrylic copolymer copolymer binders, acrylic binders, polyester binders, styrene binders, and latex binders, among which vinylidene chloride binders exhibit flame retardancy. It is preferable because it can be performed. Activated carbon can be applied by spatula coating, brush coating or roll coating. After application, drying, and heat treatment, an activated carbon coated fiber base paper is produced. 7 heat treatments
What is necessary is just to perform in the temperature range of 0-120 degreeC.
【００２０】次いで、該活性炭又はゼオライト担持繊維
基紙をコルゲート状ハニカム構造体に成形する。先ず、
該活性炭又はゼオライト担持無機繊維基紙をコルゲート
加工するものと、コルゲート加工しないものとに分け
る。コルゲート加工するものは、上下一対の波形段ロー
ルの間を通してコルゲート状物とする。このコルゲート
状物の山部に接着剤を付け、コルゲート加工していない
平坦状物を重ね合わせ、コルゲート状物の山部と平坦状
物との接触する部分で接着を図る。この接着を複数のコ
ルゲート状物と平坦状物との間で交互に行い積層するこ
とで、通気方向に対して所定の開口率のハニカム構造体
を形成することができる。接着に使用する接着剤として
は、適度な施工性と接着性を有するものであれば、特に
制限されないが、フェノール系樹脂、エポキシ系樹脂、
アクリル系樹脂、酢酸ビニル系樹脂及びこれらの共重合
体などの有機接着剤、シリカゾル、アルミナゾル等の無
機接着剤が使用できる。後述するガス反応材として塩基
性ガス又は酸性ガスを吸収する反応材を使用する場合、
接着剤は、当該塩基性ガス又は酸性ガスを吸収するガス
反応材と反応しない有機系接着剤又は無機系接着剤から
選ばれる１種以上が好ましく、具体的には、フェノール
系樹脂、エポキシ系樹脂、アクリル系樹脂及びこれら共
重合体から選ばれる１種以上の有機系接着剤又はシリカ
ゾル及びアルミナゾルから選ばれる１種以上の無機系接
着剤を使用することがガス反応材と加水分解反応が起き
にくい点で好ましい。また、特に好ましい接着剤はアク
リル系共重合樹脂である。更に、アクリル系共重合樹脂
と無機接着剤を併用すれば、耐酸性がより向上する。ハ
ニカム構造体の断面形状としては、特に制限されず、円
形状、四角状などが挙げられる。Next, the activated carbon or zeolite supporting fiber base paper is formed into a corrugated honeycomb structure. First,
The activated carbon or zeolite-carrying inorganic fiber base paper is divided into those subjected to corrugation and those not subjected to corrugation. What is to be corrugated is a corrugated material passing between a pair of upper and lower corrugated rolls. An adhesive is applied to the ridges of the corrugated material, and a flat material that has not been corrugated is overlapped, and bonding is performed at a portion where the ridges of the corrugated material come into contact with the flat material. This bonding is performed alternately between a plurality of corrugated objects and a plurality of flat objects to be laminated, whereby a honeycomb structure having a predetermined aperture ratio in the ventilation direction can be formed. The adhesive used for bonding is not particularly limited as long as it has appropriate workability and adhesiveness, but it is not limited to phenolic resin, epoxy resin,
Organic adhesives such as acrylic resins, vinyl acetate resins and copolymers thereof, and inorganic adhesives such as silica sol and alumina sol can be used. When using a reactant that absorbs a basic gas or an acidic gas as a gas reactant described below,
The adhesive is preferably at least one selected from organic adhesives and inorganic adhesives that do not react with the gas reactant that absorbs the basic gas or the acidic gas. Specifically, a phenolic resin, an epoxy resin The use of one or more organic adhesives selected from acrylic resins and their copolymers or one or more inorganic adhesives selected from silica sol and alumina sol makes it difficult for hydrolysis reaction to occur with the gas reactant. It is preferred in that respect. A particularly preferred adhesive is an acrylic copolymer resin. Further, when the acrylic copolymer resin and the inorganic adhesive are used in combination, the acid resistance is further improved. The cross-sectional shape of the honeycomb structure is not particularly limited, and examples thereof include a circular shape and a square shape.
【００２１】次いで、必要に応じて該コルゲート状ハニ
カム構造体にガス反応材を担持させる。ガス反応材は前
述のガス反応材が使用できる。該コルゲート状ハニカム
構造体にガス反応材を担持させる吸着濾材は用途に応じ
て、酸やアルカリなどの物質を添着したものが使用され
る。すなわち、ガス状汚染物質が塩基性ガスであれば、
ガス反応材は例えば、酸性化合物を添着したもの、ま
た、ガス状汚染物質が酸性であれば、ガス反応材は例え
ば、塩基性化合物を添着したものが使用される。これら
ガス反応材又はガス吸着材の種類及び添着、担持方法と
しては、公知の方法が適用され、例えばガス反応材とし
て酸を含む吸着濾材は、例えば該ハニカム構造体を硫酸
濃度数％〜十数％の水溶液に数分間〜数時間浸漬した
り、又はウオッシュコートなどで吸水担持させた後、乾
燥して得られる。また、例えばガス反応材としてアルカ
リを含む吸着濾材は、例えば該ハニカム構造体を炭酸カ
リウム濃度数％〜十数％の水溶液に数分間〜数時間浸漬
したり、又はウオッシュコートなどで吸水担持させた
後、乾燥して得られる。ガス反応材を溶解させる液とし
ては、水、アルコールなどを適宜選択して使用される。
吸着濾材である繊維基紙に対するガス反応材の担持量の
具体例としては、アルカリ性汚染物質の除去を目的とし
て硫酸を使用した場合、５〜３０kg/m3 とすることが好
ましく、酸性汚染物質の除去を目的として炭酸カリウム
を使用した場合、３０〜６０kg/m3 とすることが好まし
い。本第１の方法においては、ハニカム構造体を形成し
た後にガス反応材の添着を行うから、ガス反応材が脱離
することがない。Next, a gas-reactive material is supported on the corrugated honeycomb structure as required. As the gas reactant, the aforementioned gas reactants can be used. Depending on the application, a material to which a substance such as an acid or an alkali is impregnated is used as the adsorptive filter medium for supporting the gas reactant on the corrugated honeycomb structure. That is, if the gaseous pollutant is a basic gas,
For example, a gas reactant to which an acidic compound is attached, or a gas reactant to which a basic compound is attached if the gaseous pollutant is acidic, is used. Known methods are applied as the type of gas reactant or gas adsorbent, and the method of attachment and support. For example, an adsorption filter medium containing an acid as a gas reactant, for example, is obtained by adding a sulfuric acid concentration of several percent % Of an aqueous solution for several minutes to several hours, or after being supported by water absorption with a wash coat or the like, and then dried. In addition, for example, the adsorption filter medium containing an alkali as a gas reactant is, for example, immersed in the aqueous solution having a potassium carbonate concentration of several percent to several tens of percent for several minutes to several hours, or made to absorb water by a wash coat or the like. Later, it is obtained by drying. As the liquid for dissolving the gas reactant, water, alcohol, or the like is appropriately selected and used.
As a specific example of the amount of the gas-reactive material carried on the fiber base paper as the adsorption filter material, when sulfuric acid is used for the purpose of removing alkaline contaminants, it is preferably 5 to 30 kg / m3, and When potassium carbonate is used for the purpose of removal, it is preferably 30 to 60 kg / m 3 . In the first method, the gas reactive material is attached after the formation of the honeycomb structure, so that the gas reactive material does not desorb.
【００２２】次に、本発明のケミカルフィルタの第２の
製造例について説明する。第２の製造例において、第１
の製造例と同一の構成についてはその説明を省略し、異
なる点について主に説明する。第１の製造例と異なる点
は、第１の製造例が特定の繊維間空隙率を有する繊維基
紙にガス吸着材を担持した後にコルゲート状ハニカム構
造体を成形する方法であるのに対して、第２の製造例で
は特定の繊維間空隙率を有する繊維基紙をコルゲート状
ハニカム構造体に成形した後にガス吸着材を担持する方
法である。コルゲート状ハニカム構造体に活性炭又はゼ
オライトを該コルゲート状ハニカム構造体を構成する繊
維基紙の単位面積当たりの活性炭又はゼオライト担持量
が４０〜１５０g/m2の範囲となるように担持させる方法
としては、活性炭又はゼオライトなどの吸着材が１０〜
６０重量％で含まれるスラリーを調整し、該スラリーに
該コルゲート状ハニカム構造体を含浸させる方法が適用
できる。この方法においても第１の製造例と同様に、繊
維間の隙間を塞ぐように活性炭などを充填でき、高割合
の活性炭又はゼオライトを担持することができる。ま
た、繊維間空隙率８０〜９５％の繊維基紙をガス反応材
と反応しない有機系接着剤又は無機系接着剤から選ばれ
る１種以上の接着剤でコルゲート状ハニカム構造体に成
形した後、該コルゲート状ハニカム構造体に活性炭又は
ゼオライトを吸水量が１００〜１６０g/m2となるように
担持させれば、同様に、ガス反応材の添着量も高めら
れ、優れたガス状汚染物質除去性能のフィルタを得るこ
とができる。Next, a second manufacturing example of the chemical filter of the present invention will be described. In the second manufacturing example, the first
The description of the same configuration as that of the above-described manufacturing example will be omitted, and different points will be mainly described. The difference from the first production example is that the first production example is a method of forming a corrugated honeycomb structure after supporting a gas adsorbent on a fiber base paper having a specific inter-fiber porosity. In the second production example, a method of supporting a gas adsorbent after forming a fiber base paper having a specific inter-fiber porosity into a corrugated honeycomb structure. Activated carbon or zeolite corrugated honeycomb structure as a method of supporting such active carbon or zeolite supported amount per unit area of the fiber base paper constituting the corrugated honeycomb structure is in the range of 40~150g / m 2 is Adsorbent such as activated carbon or zeolite
A method in which a slurry contained at 60% by weight is adjusted and the slurry is impregnated with the corrugated honeycomb structure can be applied. In this method, similarly to the first production example, activated carbon or the like can be filled so as to close the gap between the fibers, and a high ratio of activated carbon or zeolite can be supported. Further, after forming the fiber base paper having the inter-fiber porosity of 80 to 95% into a corrugated honeycomb structure with one or more kinds of adhesives selected from an organic adhesive or an inorganic adhesive which does not react with the gas reactive material, If activated carbon or zeolite is supported on the corrugated honeycomb structure so as to have a water absorption of 100 to 160 g / m 2 , the amount of the gaseous reactant attached is similarly increased, and the gaseous pollutant removal performance is excellent. Can be obtained.
【００２３】本発明のケミカルフィルタは、吸着濾材で
あるコルゲート状ハニカム構造体と、該吸着濾材を支持
する支持部材（ケーシング）とで構成される。該支持部
材はコルゲート状ハニカム構造体を支持すると共に、既
存設備（設置場所）との接合を司る機能を有する。支持
部材の処理空気流通部分は、脱ガスのないステンレス、
アルミニウム、プラスチックなどの素材からなる。The chemical filter of the present invention comprises a corrugated honeycomb structure as an adsorbing filter, and a support member (casing) for supporting the adsorbing filter. The support member has a function of supporting the corrugated honeycomb structure and a function of joining with existing equipment (installation place). The processing air circulation part of the support member is stainless steel without degassing,
It is made of materials such as aluminum and plastic.
【００２４】本発明のケミカルフィルタは、更に、前記
吸着濾材の下流側に、少なくとも前記吸着濾材から発生
する微粒子を捕捉する除塵フィルタを設置することがで
きる。これにより、後段の除塵フィルタで前段の吸着濾
材から発生する粒子状不純物を除去することができる。
本発明のケミカルフィルタを、例えば半導体製造工場の
クリーンルーム内に設置した場合、半導体や精密電子部
品製造における歩留りの一層の向上が図れる[0024] In the chemical filter of the present invention, a dust filter that captures at least fine particles generated from the adsorption filter medium may be provided downstream of the adsorption filter medium. Thus, particulate impurities generated from the adsorption filter material at the preceding stage can be removed by the dust filter at the latter stage.
When the chemical filter of the present invention is installed, for example, in a clean room of a semiconductor manufacturing plant, the yield in manufacturing semiconductors and precision electronic components can be further improved.
【００２５】本発明のケミカルフィルタの設置場所とし
ては、特に制限されないが、例えば、半導体製造工場や
精密電子製造工場のクリーンルームで使用される空気清
浄用やクリーンルームに設置されたデバイス内の空気清
浄用として使用すれば、ガス状汚染物質の除去性能が優
れると共に、圧力損失が小さく、寿命が向上する。これ
に伴い、半導体や精密電子部品の汚染物質を除去して歩
留りの向上が図れる。The location of the chemical filter of the present invention is not particularly limited. For example, it is used for cleaning air used in a clean room of a semiconductor manufacturing plant or a precision electronic manufacturing plant or for cleaning air in a device installed in a clean room. If used, the gaseous pollutant removal performance is excellent, the pressure loss is small, and the life is improved. As a result, contaminants in semiconductors and precision electronic components are removed, and the yield can be improved.
【００２６】[0026]
【実施例】次に、実施例を挙げて本発明を更に具体的に
説明するが、これは単に例示であって本発明を制限する
ものではない。 実施例１ （ケミカルフィルタの作製）バインダとしてのポリビニ
ルアルコールが繊維１００重量部に対して、１０重量部
で添加された溶液中に、Ｅガラス繊維をスラリー中、１
重量％となるように分散し、丸網抄造機で常法により抄
造し、繊維間空隙率が９０％のＥガラス繊維基紙を得
た。次いで、該Ｅガラス繊維基紙に粉末活性炭及び塩化
ビニリデン系バインダーを含む懸濁液を活性炭担持量が
９０g/m2（吸水率１２０g/m2）となるように塗布し、乾
燥後、１１０℃の温度で処理して活性炭塗工ガラス繊維
基紙を作製した。この活性炭塗工ガラス繊維基紙をコル
ゲート加工するものと、コルゲート加工しないものとに
分け、コルゲート加工するものは、上下一対の波形段ロ
ールの間を通してコルゲート状物とした。このコルゲー
ト状物の山部にアクリル樹脂系接着剤を付け、コルゲー
ト加工していない平坦状物を重ね合わせ積層し、これを
繰り返して行い、波状コルゲートのピッチ（ｐ）３．３
mm、セル高さ（ｈ）１．９mm、壁厚（ｔ）０．３mmの積
層体である平板状ハニカム構造体を得た（図１）。次い
で、平板状ハニカム構造体を、ガスを吸着させる反応材
として５％硫酸水溶液に含浸し、その後、乾燥してアル
カリ性汚染物質としてアンモニア除去を目的としたケミ
カルフィルタを作製した。この時の硫酸の担持量は２０
kg/m3であった。Next, the present invention will be described in more detail with reference to examples, but this is merely an example and does not limit the present invention. Example 1 (Preparation of Chemical Filter) E glass fiber was added to a solution in which polyvinyl alcohol as a binder was added in an amount of 10 parts by weight to 100 parts by weight of a fiber.
% By weight and paper-making by a conventional method using a round-mesh paper-making machine to obtain an E glass fiber base paper having a porosity between fibers of 90%. Next, a suspension containing powdered activated carbon and a vinylidene chloride-based binder was applied to the E glass fiber base paper so that the activated carbon carrying amount became 90 g / m 2 (water absorption rate 120 g / m 2 ), dried, and dried at 110 ° C. Activated carbon coated glass fiber base paper was prepared. The activated carbon-coated glass fiber base paper was divided into a corrugated one and a non-corrugated one, and the corrugated one was corrugated through a pair of upper and lower corrugated rolls. An acrylic resin-based adhesive is applied to the peaks of the corrugated material, and a flat material that has not been corrugated is overlapped and laminated, and this process is repeated, and the pitch (p) of the corrugated corrugate is 3.3.
A flat honeycomb structure as a laminate having a thickness of 0.1 mm, a cell height (h) of 1.9 mm, and a wall thickness (t) of 0.3 mm was obtained (FIG. 1). Next, the flat honeycomb structure was impregnated with a 5% sulfuric acid aqueous solution as a reactant for adsorbing gas, and then dried to produce a chemical filter for removing ammonia as an alkaline contaminant. At this time, the supported amount of sulfuric acid is 20
kg / m 3 .
【００２７】（性能試験Ｉ）実施例１で作製したアンモ
ニア除去用ケミカルフィルタを下記の試験条件下、該ケ
ミカルフィルタ通過気流中のアンモニア量を経時的に測
定し、ケミカルフィルタのアンモニア除去率で評価し
た。なお、実際にクリーンルームで問題となるアンモニ
アの濃度は数十ｐｐｂであるが、本試験では疑似的に２
０ｐｐｍの濃度で測定を行った。結果を図２に示す。そ
の結果、６０分経過後もアンモニア除去率８０％を維持
できた。 ＜試験条件＞ ・通気風速：０．３m/s ・通気アンモニウム濃度：２０ｐｐｍ ・通気方向のハニカム構造体の厚さ：１０mm ・通気時間：０〜６０分(Performance Test I) The amount of ammonia in the air flow passing through the chemical filter for removing ammonia produced in Example 1 was measured over time under the following test conditions, and evaluated by the ammonia removal rate of the chemical filter. did. Although the concentration of ammonia which is actually a problem in a clean room is several tens of ppb, in this test, the concentration of ammonia was 2 ppb.
The measurement was performed at a concentration of 0 ppm. The results are shown in FIG. As a result, it was possible to maintain the ammonia removal rate of 80% even after the lapse of 60 minutes. <Test conditions> Ventilation air velocity: 0.3 m / s Ammonium concentration: 20 ppm Thickness of honeycomb structure in ventilation direction: 10 mm Ventilation time: 0 to 60 minutes
【００２８】（性能試験II）実施例１で作製したアンモ
ニア除去用ケミカルフィルタを下記の試験条件下、該ケ
ミカルフィルタの通過風速（m/s)の増加に伴う圧力損失
(Pa)を測定した。結果を図２に示す。その結果、通過風
速が４m/s になっても、圧力損失は１００Pa未満に保つ
ことができた。 ＜試験条件＞ ・通気面速：０〜４m/s ・通気方向のハニカム構造体の厚さ：４０mm(Performance Test II) The ammonia filter of the chemical filter for removing ammonia prepared in Example 1 was subjected to the following test conditions, and the pressure loss caused by the increase of the wind speed (m / s) passing through the chemical filter was measured.
(Pa) was measured. The results are shown in FIG. As a result, even if the passing wind speed became 4 m / s, the pressure loss could be kept below 100 Pa. <Test conditions> ・ Vent surface speed: 0 to 4 m / s ・ Thickness of honeycomb structure in the ventilation direction: 40 mm
【００２９】比較例１ 繊維間空隙率が９０％のＥガラス繊維基紙の代わりに、
繊維間空隙率が６０％のＥガラス繊維基紙を使用した以
外は、実施例１と同様の方法及び評価を行った。このケ
ミカルフィルタの硫酸の担持量は１０kg/m3 であった。
結果を図２に示す。その結果、通過風速は４m/s であっ
ても圧力損失は１００Pa未満と実施例１と同様の結果を
示すものの、６０分経過後のアンモニア除去率は７０％
であり、実施例１と比較して低下した。Comparative Example 1 Instead of E glass fiber base paper having a porosity between fibers of 90%,
The same method and evaluation as in Example 1 were performed, except that the E glass fiber base paper having a porosity between fibers of 60% was used. The carried amount of sulfuric acid in this chemical filter was 10 kg / m 3 .
The results are shown in FIG. As a result, even if the passing wind speed was 4 m / s, the pressure loss was less than 100 Pa and the same result as in Example 1 was obtained, but the ammonia removal rate after 60 minutes passed was 70%.
Which was lower than that of Example 1.
【００３０】比較例２ 直径約５mmの粒状活性炭を５％硫酸水溶液に含浸し、乾
燥した。この硫酸が担持された粒状活性炭をフィルター
ケースに充填し、塩基性ガス除去用のケミカルフィルタ
を作製した。該ケミカルフィルタの硫酸の担持量は１０
kg/m3 であった。該ケミカルフィルタの評価方法は実施
例１と同様の方法で行った。結果を図２に示す。その結
果、６０分経過後のアンモニア除去率は６０％程度であ
り、実施例１と比較して劣るものであり、また、通過風
速は１．５m/s で、圧力損失は３００Paを超えてしまっ
た。Comparative Example 2 Granular activated carbon having a diameter of about 5 mm was impregnated with a 5% aqueous sulfuric acid solution and dried. The granular activated carbon carrying the sulfuric acid was filled in a filter case to prepare a chemical filter for removing a basic gas. The carrying amount of sulfuric acid of the chemical filter is 10
kg / m 3 . The chemical filter was evaluated in the same manner as in Example 1. The results are shown in FIG. As a result, the ammonia removal rate after 60 minutes was about 60%, which was inferior to that of Example 1. The passing air velocity was 1.5 m / s, and the pressure loss exceeded 300 Pa. Was.
【００３１】参考例１ （ケミカルフィルタの作製及び性能評価）パルプ等から
なる有機繊維と粉末活性炭の混合物を抄造して、粉末活
性炭の担持量４０g/m2（吸水率８０g/m2）の有機繊維基
紙を作製し、次いで、この活性炭含有有機繊維基紙をコ
ルゲート加工するものと、コルゲート加工しないものと
に分け、コルゲート加工するものは、上下一対の波形段
ロールの間を通してコルゲート状物とした。このコルゲ
ート状物の山部にアクリル樹脂系接着剤を付け、コルゲ
ート加工していない平坦状物を重ね合わせ積層し、これ
を繰り返して行い、波状コルゲートのピッチ（ｐ）３．
３mm、セル高さ（ｈ）１．９mm、壁厚（ｔ）０．３mmの
積層体である平板状ハニカム構造体を得た。次いで、平
板状ハニカム構造体を、ガスを吸着させる反応材として
５％硫酸水溶液に含浸し、その後、乾燥してアルカリ性
汚染物質としてアンモニア除去を目的としたケミカルフ
ィルタを作製した。この時の硫酸の担持量は５kg/m3 で
あった。このケミカルフィルタは実施例１と同様の評価
を行った。結果を図２に示す。その結果、通過風速は４
m/s であっても圧力損失は１００Pa未満と実施例１と同
様の結果を示すものの、５０分経過後のアンモニア除去
率は０％であり、実施例１と比較して大きく劣った。REFERENCE EXAMPLE 1 (Preparation of Chemical Filter and Performance Evaluation) A mixture of organic fibers made of pulp or the like and powdered activated carbon was made into a paper, and an organic powder having a carrying amount of powdered activated carbon of 40 g / m 2 (water absorption of 80 g / m 2 ) was prepared. A fiber base paper is produced, and then the activated carbon-containing organic fiber base paper is divided into a corrugated one and a non-corrugated one, and the corrugated one is passed through a pair of upper and lower corrugated rolls to form a corrugated material. did. 2. An acrylic resin-based adhesive is applied to the peaks of the corrugated material, and a flat material that has not been corrugated is overlapped and laminated.
A flat honeycomb structure as a laminate having a size of 3 mm, a cell height (h) of 1.9 mm, and a wall thickness (t) of 0.3 mm was obtained. Next, the flat honeycomb structure was impregnated with a 5% sulfuric acid aqueous solution as a reactant for adsorbing gas, and then dried to produce a chemical filter for removing ammonia as an alkaline contaminant. At this time, the supported amount of sulfuric acid was 5 kg / m 3 . This chemical filter was evaluated in the same manner as in Example 1. The results are shown in FIG. As a result, the passing wind speed is 4
Although the pressure loss was less than 100 Pa even at m / s, the same results as in Example 1 were obtained, but the ammonia removal rate after 50 minutes passed was 0%, which was significantly inferior to Example 1.
【００３２】参考例２ 予め、粉末活性炭を５％硫酸水溶液に含浸し、乾燥し、
硫酸担持活性炭を得た。次いで、実施例１で得られたの
と同じＥガラス繊維基紙にこの硫酸担持活性炭及び塩化
ビニリデン系バインダーを含む懸濁液を、実施例１と同
じ塗布量で塗布し、乾燥後、１１０℃の温度で処理して
活性炭塗工ガラス繊維基紙を作製した。この活性炭塗工
ガラス繊維基紙を実施例１と同様の方法で同形状の平板
状ハニカム構造体を得、アルカリ性汚染物質としてアン
モニア除去を目的としたケミカルフィルタを作製した。
この時の硫酸の担持量は８kg/m3 であった。このよう
に、硫酸の担持量が実施例１と比較して少ないのは、比
較例４のように予め硫酸を添着させた活性炭をＥガラス
繊維基紙に塗布する方法では、懸濁液（スラリー）調製
の際、硫酸が該懸濁液中に流出してしまい担持量が減少
するためである。該ケミカルフィルタの評価方法は実施
例１と同様の方法で行った。結果を図２に示す。その結
果、実施例１と比較して、圧力損失は同程度であるもの
の、６０分経過後のアンモニア除去率は６５％程度であ
り、劣るものであった。REFERENCE EXAMPLE 2 Powdered activated carbon was previously impregnated with a 5% sulfuric acid aqueous solution and dried.
Activated carbon supporting sulfuric acid was obtained. Then, a suspension containing this sulfuric acid-supported activated carbon and a vinylidene chloride-based binder was applied to the same E glass fiber base paper obtained in Example 1 at the same application amount as in Example 1, dried, and dried at 110 ° C. Activated carbon coated glass fiber base paper was prepared. A flat honeycomb structure having the same shape was obtained from the activated carbon-coated glass fiber base paper in the same manner as in Example 1, and a chemical filter for removing ammonia as an alkaline contaminant was produced.
At this time, the supported amount of sulfuric acid was 8 kg / m 3 . As described above, the supporting amount of sulfuric acid is smaller than that in Example 1 in the method of applying activated carbon to which sulfuric acid is previously impregnated to the E glass fiber base paper as in Comparative Example 4 by using a suspension (slurry). This is because, during the preparation, sulfuric acid flows out into the suspension and the amount of supported sulfuric acid decreases. The chemical filter was evaluated in the same manner as in Example 1. The results are shown in FIG. As a result, although the pressure loss was almost the same as in Example 1, the ammonia removal rate after 60 minutes had elapsed was about 65%, which was inferior.
【００３３】[0033]
【発明の効果】本発明は、繊維間空隙率８０〜９５％の
繊維基紙に例えば、活性炭を担持させる際、活性炭を該
繊維間の空隙を塞ぐように高割合量を充填させ活性炭高
担持量の繊維基紙を得、その後、コルゲート状ハニカム
構造体に成形した後、該ハニカム構造体にガス反応材を
担持するようにしたため、反応材の担持量を増加でき、
ガス状汚染物質の除去性能を格段に優れたものにでき
る。また、吸着濾材はコルゲート状ハニカム構造体であ
るため、圧力損失が小さく、寿命が一段と向上する。According to the present invention, when, for example, activated carbon is supported on a fiber base paper having a porosity between fibers of 80 to 95%, a high proportion of activated carbon is filled so as to close the voids between the fibers, and the activated carbon is highly loaded. Amount of fiber base paper was obtained, and then formed into a corrugated honeycomb structure, and then the gaseous reactant was carried on the honeycomb structure.
The ability to remove gaseous contaminants can be significantly improved. Further, since the adsorption filter medium is a corrugated honeycomb structure, the pressure loss is small, and the life is further improved.
【図１】実施例１で得られたコルゲート状ハニカム構造
体の一部の側面図である。FIG. 1 is a side view of a part of a corrugated honeycomb structure obtained in Example 1.
【図２】実施例及び比較例のケミカルフィルタのアンモ
ニア除去性能及び圧力損失性能を示す図である。FIG. 2 is a diagram showing ammonia removal performance and pressure loss performance of chemical filters of an example and a comparative example.
フロントページの続き (72)発明者 佐々木 晴子 神奈川県横浜市鶴見区大黒町１−70 ニチ アス株式会社内 (72)発明者 中野 寿朗 神奈川県横浜市鶴見区大黒町１−70 ニチ アス株式会社内Continued on the front page (72) Inventor Haruko Sasaki 1-70 Nichiasu Corporation, Ogurocho, Tsurumi-ku, Yokohama, Kanagawa Prefecture (72) Inventor Toshiro Nakano 1-70 Ogurocho, Tsurumi-ku, Yokohama-shi, Kanagawa Nichiasu, Inc.
Claims (9)
質を除去する吸着濾材を有するコルゲート状ハニカム構
造体のケミカルフィルタであって、前記吸着濾材は繊維
間空隙率８０〜９５％の繊維基紙にガス吸着材又はガス
吸着材及びガス反応材を担持したものであることを特徴
とするケミカルフィルタ。1. A chemical filter having a corrugated honeycomb structure having an adsorbing filter medium for removing gaseous impurities and coagulable organic substances in air, wherein the adsorbing filter medium has a fiber base having a porosity between fibers of 80 to 95%. A chemical filter comprising a paper carrying a gas adsorbent or a gas adsorbent and a gas reactant.
であって、且つ前記繊維基紙の単位面積当たりの活性炭
又はゼオライト担持量が４０〜１５０g/m2の範囲である
ことを特徴とする請求項１記載のケミカルフィルタ。2. The gas adsorbent is activated carbon or zeolite, and the amount of activated carbon or zeolite carried per unit area of the fiber base paper is in the range of 40 to 150 g / m 2. 2. The chemical filter according to 1.
あるいは無機酸塩であることを特徴とする請求項１又は
２記載のケミカルフィルタ。3. The chemical filter according to claim 1, wherein the gas reactive material is an inorganic base, an inorganic acid, or an inorganic acid salt.
ク繊維、アルミナ繊維、ムライト繊維、シリカ繊維及び
有機繊維から選ばれる１種又は２種以上の素材からなる
ものであることを特徴とする請求項１〜３のいずれか１
項に記載のケミカルフィルタ。4. The fiber base paper is made of one or more materials selected from glass fiber, ceramic fiber, alumina fiber, mullite fiber, silica fiber and organic fiber. Any one of Items 1-3
Chemical filter according to the item.
活性炭又はゼオライトを該繊維基紙の単位面積当たりの
活性炭又はゼオライト担持量が４０〜１５０g/m2の範囲
となるように担持させ、次いで、該活性炭又はゼオライ
ト担持繊維基紙をコルゲート状ハニカム構造体に成形し
た後、該コルゲート状ハニカム構造体にガス反応材を担
持させることを特徴とするケミカルフィルタの製造方
法。5. An activated carbon or zeolite supported on a fiber base paper having a porosity between fibers of 80 to 95% so that the amount of activated carbon or zeolite supported per unit area of the fiber base paper is in the range of 40 to 150 g / m 2. And forming the activated carbon or zeolite-supported fiber base paper into a corrugated honeycomb structure, and then supporting a gas-reactive material on the corrugated honeycomb structure.
コルゲート状ハニカム構造体に成形した後、該コルゲー
ト状ハニカム構造体に活性炭又はゼオライトを該コルゲ
ート状ハニカム構造体を構成する繊維基紙の単位面積当
たりの活性炭又はゼオライト担持量が４０〜１５０g/m2
の範囲となるように担持させ、次いで、該コルゲート状
ハニカム構造体にガス反応材を担持させることを特徴と
するケミカルフィルタの製造方法。6. A corrugated honeycomb structure formed from a fiber base paper having a porosity between fibers of 80 to 95%, and activated carbon or zeolite is added to the corrugated honeycomb structure to constitute the corrugated honeycomb structure. Activated carbon or zeolite loading per unit area of paper is 40 to 150 g / m 2
And then supporting a gas-reactive material on the corrugated honeycomb structure.
活性炭又はゼオライトを吸水量が１００〜１６０g/m2と
なるように担持させ、次いで、該活性炭担持繊維基紙を
ガス反応材と反応しない有機系接着剤又は無機系接着剤
から選ばれる１種以上の接着剤でコルゲート状ハニカム
構造体に成形した後、該コルゲート状ハニカム構造体に
塩基性ガス又は酸性ガスを吸収するガス反応材を担持さ
せることを特徴とするケミカルフィルタの製造方法。7. Activated carbon or zeolite is supported on a fiber base paper having a porosity between fibers of 80 to 95% so as to have a water absorption of 100 to 160 g / m 2. After forming into a corrugated honeycomb structure with one or more kinds of adhesives selected from an organic adhesive or an inorganic adhesive which does not react with the gas, a gas reaction for absorbing a basic gas or an acidic gas into the corrugated honeycomb structure A method for producing a chemical filter, comprising supporting a material.
ガス反応材と反応しない有機系接着剤又は無機系接着剤
から選ばれる１種以上の接着剤でコルゲート状ハニカム
構造体に成形した後、該コルゲート状ハニカム構造体に
活性炭又はゼオライトを吸水量が１００〜１６０g/m2と
なるように担持させ、次いで、該コルゲート状ハニカム
構造体に塩基性ガス又は酸性ガスを吸収するガス反応材
を担持させることを特徴とするケミカルフィルタの製造
方法。8. A corrugated honeycomb structure formed of a fiber base paper having a porosity between fibers of 80 to 95% with one or more kinds of adhesives selected from an organic adhesive or an inorganic adhesive which does not react with a gas reactive material. After that, activated carbon or zeolite is supported on the corrugated honeycomb structure so as to have a water absorption of 100 to 160 g / m 2, and then a gas reaction for absorbing a basic gas or an acidic gas in the corrugated honeycomb structure is performed. A method for producing a chemical filter, comprising supporting a material.
脂、エポキシ系樹脂、アクリル系樹脂及びこれら共重合
体から選ばれる１種以上であり、前記無機系接着剤が、
シリカゾル及びアルミナゾルから選ばれる１種以上であ
ることを特徴とする請求項７又は８記載のケミカルフィ
ルタの製造方法。9. The organic adhesive is at least one selected from a phenolic resin, an epoxy resin, an acrylic resin and a copolymer thereof, and the inorganic adhesive is
The method for producing a chemical filter according to claim 7 or 8, wherein the method is at least one selected from silica sol and alumina sol.
Priority Applications (1)
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|---|---|---|---|
| JP2001044945A JP4233768B2 (en) | 2000-02-21 | 2001-02-21 | Chemical filter and manufacturing method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| JP2000-42709 | 2000-02-21 | ||
| JP2000042709 | 2000-02-21 | ||
| JP2001044945A JP4233768B2 (en) | 2000-02-21 | 2001-02-21 | Chemical filter and manufacturing method thereof |
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| JP2001310109A true JP2001310109A (en) | 2001-11-06 |
| JP4233768B2 JP4233768B2 (en) | 2009-03-04 |
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| JP2001044945A Expired - Lifetime JP4233768B2 (en) | 2000-02-21 | 2001-02-21 | Chemical filter and manufacturing method thereof |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007330657A (en) * | 2006-06-19 | 2007-12-27 | Toyobo Co Ltd | Deodorization honeycomb |
| JP2010013773A (en) * | 2008-07-04 | 2010-01-21 | Nichias Corp | Inorganic fiber paper, and honeycomb structure and filter using the same |
| JP2019058909A (en) * | 2012-05-07 | 2019-04-18 | ドナルドソン カンパニー，インコーポレイティド | Materials, methods and devices for siloxane contaminant removal |
| US11642652B2 (en) | 2016-10-24 | 2023-05-09 | Oji Holdings Corporation | Inorganic fiber sheet, honeycomb molded body and honeycomb filter |
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| JPS5915028B2 (en) * | 1980-03-26 | 1984-04-07 | ニチアス株式会社 | Manufacturing method of catalyst carrier |
| JPH0248015A (en) * | 1988-08-08 | 1990-02-16 | Tokyo Roki Kk | Honeycomb structure supporting activated carbon and production thereof |
| JPH03138411A (en) * | 1989-10-24 | 1991-06-12 | Nichias Corp | Exhaust purifier of methanol engine |
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| JPH0671128A (en) * | 1992-08-27 | 1994-03-15 | Oji Kenzai Kogyo Kk | Filter with honeycomb structure |
| JPH06165934A (en) * | 1990-12-25 | 1994-06-14 | Seibu Giken:Kk | Gas adsorption element, production and use therefor |
| JPH0739753A (en) * | 1993-07-28 | 1995-02-10 | Hitachi Plant Eng & Constr Co Ltd | Preparation of air cleaning agent |
| JPH0871352A (en) * | 1994-09-06 | 1996-03-19 | Daikin Ind Ltd | Filter, production thereof and filter apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5915028B2 (en) * | 1980-03-26 | 1984-04-07 | ニチアス株式会社 | Manufacturing method of catalyst carrier |
| JPH0248015A (en) * | 1988-08-08 | 1990-02-16 | Tokyo Roki Kk | Honeycomb structure supporting activated carbon and production thereof |
| JPH03138411A (en) * | 1989-10-24 | 1991-06-12 | Nichias Corp | Exhaust purifier of methanol engine |
| JPH06165934A (en) * | 1990-12-25 | 1994-06-14 | Seibu Giken:Kk | Gas adsorption element, production and use therefor |
| JPH06410A (en) * | 1992-02-12 | 1994-01-11 | Takeda Chem Ind Ltd | Gas treatment apparatus |
| JPH0671128A (en) * | 1992-08-27 | 1994-03-15 | Oji Kenzai Kogyo Kk | Filter with honeycomb structure |
| JPH0739753A (en) * | 1993-07-28 | 1995-02-10 | Hitachi Plant Eng & Constr Co Ltd | Preparation of air cleaning agent |
| JPH0871352A (en) * | 1994-09-06 | 1996-03-19 | Daikin Ind Ltd | Filter, production thereof and filter apparatus |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007330657A (en) * | 2006-06-19 | 2007-12-27 | Toyobo Co Ltd | Deodorization honeycomb |
| JP2010013773A (en) * | 2008-07-04 | 2010-01-21 | Nichias Corp | Inorganic fiber paper, and honeycomb structure and filter using the same |
| JP2019058909A (en) * | 2012-05-07 | 2019-04-18 | ドナルドソン カンパニー，インコーポレイティド | Materials, methods and devices for siloxane contaminant removal |
| US10688433B2 (en) | 2012-05-07 | 2020-06-23 | Donaldson Company, Inc. | Materials, methods, and devices for siloxane contaminant removal |
| US11648501B2 (en) | 2012-05-07 | 2023-05-16 | Donaldson Company, Inc. | Materials, methods, and devices for siloxane contaminant removal |
| US11642652B2 (en) | 2016-10-24 | 2023-05-09 | Oji Holdings Corporation | Inorganic fiber sheet, honeycomb molded body and honeycomb filter |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4233768B2 (en) | 2009-03-04 |
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