JP2001309496A - Ultrasonic wave irradiation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To sweep an ultrasonic wave in an object at various irradiation intensities and angles. SOLUTION: When an input electrical signal is applied to a first input interdigital electrode 2, a first acoustic wave is excited on a piezoelectric substrate 1. The non-leaking component of the first acoustic wave is detected by an output interdigital electrode 4 as a delayed electrical signal. The delayed electrical signal is amplified by an amplifier 5 and a part of the amplified signal is applied again to the first input interdigital electrode 2, the remaining part is inputted to a second input interdigital electrode 3, a second acoustic wave is excited on the piezoelectric substrate 1, and the object is irradiated with the leaking component as the vertical wave of intensity, corresponding to a voltage changed by a voltage controller 6 via the other end face of the piezoelectric substrate 1.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic irradiation apparatus for efficiently irradiating an object with ultrasonic waves at a high frequency.

[0002]

2. Description of the Related Art Transducers for irradiating or detecting elastic waves play an important role in constructing an acoustic system. Generally, a thickness vibration mode piezoelectric transducer whose driving frequency depends on the thickness of the piezoelectric substrate is widely used. Such a conventional transducer has a problem that the operating frequency is single and high-frequency driving is difficult. When a piezoelectric substrate whose thickness is sufficiently large compared to the wavelength comes into contact with a liquid, the surface acoustic wave propagates in the form of a leaky wave. At this time, the leaky wave is mode-converted into a longitudinal wave into the liquid. This means that the interdigital transducer provided on the piezoelectric substrate functions as a leaky wave transducer at the interface between the liquid and the solid, but the leaky surface acoustic wave propagating through the piezoelectric substrate has a velocity There is only one mode without dispersion. These transducers for irradiating ultrasonic waves into a liquid are limited to operation in a single frequency band, and the ultrasonic irradiation direction is limited to a direction perpendicular to the piezoelectric substrate or at a certain angle. Have.

[0003]

SUMMARY OF THE INVENTION It is an object of the present invention to be able to sweep an ultrasonic wave into an object with a small and light-weight and simple device configuration, adjust the irradiation angle and irradiation intensity, and operate in a plurality of frequency bands. Another object of the present invention is to provide an ultrasonic irradiation apparatus which can be driven with low power consumption and has excellent environmental resistance.

[0004]

According to a first aspect of the present invention, there is provided an ultrasonic irradiation apparatus comprising: a piezoelectric substrate; a first input interdigital transducer;
An ultrasonic irradiation device comprising an input IDT, an output IDT, an amplifier and a voltage controller, wherein the first input IDT, the second input IDT, and the output IDT. An electrode is provided on one end surface of the piezoelectric substrate. The first input interdigital transducer excites a first elastic wave on the piezoelectric substrate by applying an input electric signal, and The IDT electrode is
Detecting the non-leakage component of the first elastic wave as a delayed electric signal, the amplifier amplifies the delayed electric signal, and applies a part of the amplified signal to the first input interdigital transducer again; The voltage controller receives the remaining portion of the amplified signal and changes the voltage, and the second input interdigital transducer applies a second portion to the piezoelectric substrate by applying the remaining portion of the amplified signal. Exciting an elastic wave and irradiating a leak component of the second elastic wave as a longitudinal wave having a strength corresponding to the voltage changed by the voltage controller into the object through the other end face of the piezoelectric substrate. I do.

According to another aspect of the present invention, the piezoelectric substrate is made of a piezoelectric ceramic thin plate, and the direction of the polarization axis of the piezoelectric ceramic thin plate is parallel to the thickness direction.

According to a third aspect of the present invention, the piezoelectric substrate is made of a piezoelectric polymer thin plate.

According to a fourth aspect of the present invention, there is provided an ultrasonic irradiation apparatus including a filter for selecting a frequency of the remaining portion of the amplified signal.

According to a fifth aspect of the present invention, in the ultrasonic irradiation apparatus, a polymer film is provided on at least a part of the other end surface of the piezoelectric substrate, and the part is provided on the one end surface of the piezoelectric substrate. This corresponds to the surface portion including the second input interdigital transducer.

According to a sixth aspect of the present invention, in the ultrasonic irradiation apparatus, an enclosure is provided on a part of the other end face of the piezoelectric substrate, and the part is provided on the first end face of the piezoelectric substrate on the one end face. Corresponding to the surface portion including the input IDT and the output IDT, the enclosure contacts the portion with air.

[0010] In the ultrasonic irradiation apparatus according to claim 7, a polymer film is provided on at least a part of the other end face of the piezoelectric substrate, and the part is provided on the one end face of the piezoelectric substrate. An enclosure is provided on the remaining portion of the other end surface of the piezoelectric substrate corresponding to the surface portion including the second input interdigital transducer, and the enclosure makes the remaining portion come into contact with air.

An ultrasonic irradiation apparatus according to claim 8, wherein the second input interdigital transducer is divided into at least two partial electrodes, and each of the partial electrodes is connected to the amplification electrode. The second elastic wave is sequentially excited in the corresponding portion of the partial electrode on the piezoelectric substrate by sequentially applying the remaining portion of the signal, and the leak component of the second elastic wave is applied to the object in the object. Swept as a longitudinal wave.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An ultrasonic irradiation apparatus according to the present invention comprises a simple structure comprising a piezoelectric substrate, a first input IDT, a second input IDT, an output IDT, an amplifier, and a voltage controller. Having a structure. The piezoelectric substrate, the first input IDT, the second input IDT, and the output IDT are provided on one end surface of the piezoelectric substrate. If an input electric signal is applied to the first input interdigital transducer, a first elastic wave is excited on the piezoelectric substrate. This first
The non-leakage component of the elastic wave is detected by the output IDT as a delayed electric signal, and the delayed electric signal is amplified by the amplifier. A part of the amplified signal is again applied to the first input IDT. Thus, the first input interdigital transducer, the output interdigital transducer and the amplifier constitute a delay line oscillator. Therefore, reduction in size and weight of the device is promoted, and low power consumption driving is possible. On the other hand, the remaining portion of the amplified signal is sent to the voltage controller, where the voltage is changed, and then input to the second input IDT. At this time, the second elastic wave is excited on the piezoelectric substrate. This second
Is applied to the object through the other end face of the piezoelectric substrate as a longitudinal wave having a strength corresponding to the voltage changed by the voltage controller. In this way, it is possible to adjust the irradiation intensity of the ultrasonic wave into the object.

In the ultrasonic irradiation apparatus of the present invention, a structure in which the piezoelectric substrate is formed of a piezoelectric ceramic thin plate and the direction of the polarization axis thereof is parallel to the thickness direction, or a structure in which the piezoelectric substrate is formed of a piezoelectric polymer thin plate is possible. It is. By employing such a structure, the first and second elastic waves are efficiently excited on the piezoelectric substrate. In addition, the non-leakage component of the first elastic wave is efficiently propagated through the piezoelectric substrate and reaches the output IDT, and the leaky component of the second elastic wave is efficiently irradiated as a longitudinal wave into the object. . Further, the size and weight of the device can be reduced.

In the ultrasonic irradiation apparatus of the present invention, a structure provided with a filter for selecting the remaining frequency of the amplified signal is possible. By adopting such a structure, the frequency of the electric signal input to the second input IDT is selected. Since the irradiation angle θ of the longitudinal wave into the object depends on the driving frequency, the irradiation angle θ of the ultrasonic wave into the object can be adjusted.

In the ultrasonic irradiation apparatus of the present invention, a structure in which a polymer film is provided on at least a part of the other end face of the piezoelectric substrate is possible. The portion where the polymer film is provided corresponds to the surface portion including the second input interdigital transducer on one end face of the piezoelectric substrate. By employing such a structure, it is possible to increase the mechanical strength.
Further, as the polymer film, for example, a silicon rubber thin film, which is excellent in matching for acoustic coupling with an object irradiated with ultrasonic waves, is convenient.

In the ultrasonic irradiation apparatus of the present invention, a structure in which an enclosure is provided on a part of the other end surface of the piezoelectric substrate is possible. The portion provided with the enclosure corresponds to a surface portion including the first input IDT and the output IDT on one end face of the piezoelectric substrate, and is shielded from the outside and in contact with air. By employing such a structure, the first elastic wave excited on the piezoelectric substrate is less likely to leak to the outside, and efficiently reaches the IDT electrode for output.

In the ultrasonic irradiation apparatus of the present invention, a structure in which a polymer film is provided on at least a part of the other end face of the piezoelectric substrate and an enclosure is provided on the remaining part is possible. The portion where the polymer film is provided corresponds to the surface portion including the second input interdigital transducer on one end face of the piezoelectric substrate. The portion provided with the enclosure is shielded from the outside and is in contact with air. By adopting such a structure, not only can the mechanical strength be increased, but also a material having excellent matching for acoustic coupling with an object irradiated with ultrasonic waves as a polymer film. If used, the leakage component of the second elastic wave excited on the piezoelectric substrate is efficiently radiated as a longitudinal wave into the object. Further, the first elastic wave excited by the piezoelectric substrate is less likely to leak to the outside, and efficiently reaches the IDT electrode for output.

In the ultrasonic irradiation apparatus of the present invention, a structure in which the second input IDT is divided into at least two partial electrodes is possible. Each of the partial electrodes sequentially excites the second elastic wave to the corresponding portion of the partial electrode on the piezoelectric substrate by sequentially applying the remaining portion of the amplified signal by using a switch or the like. In this way, the leakage component of the second elastic wave can be swept into the object as a longitudinal wave.

[0019]

FIG. 1 is a block diagram showing a first embodiment of an ultrasonic irradiation apparatus according to the present invention. This embodiment comprises a piezoelectric substrate 1, a first input interdigital electrode 2, a second input interdigital electrode 3, an output interdigital electrode 4, an amplifier 5, and a voltage controller 6. The piezoelectric substrate 1 is formed of a piezoelectric ceramic thin plate having a thickness of 218 μm. In this embodiment, a piezoelectric ceramic thin plate is used as the piezoelectric substrate 1, but a piezoelectric polymer thin plate can also be used. The first input interdigital transducer 2, the second input interdigital transducer 3, and the output interdigital transducer 4 are made of an aluminum thin film and provided on one end face of the piezoelectric substrate 1. When irradiating an ultrasonic wave to an object using the ultrasonic irradiation apparatus of FIG. 1, it is necessary to bring the object into contact with the other end face of the piezoelectric substrate 1.

FIG. 2 is a plan view of a device including the piezoelectric substrate 1, the first input IDT 2, the second input IDT 3, and the output IDT 4, as viewed from above. The first input IDT 2 and the output IDT 4 each have five pairs of electrode fingers, and the electrode period length is 340 μm.
m. The second input interdigital transducer 3 has 60 pairs of electrode fingers, and the electrode cycle length is 340 μm.

In the ultrasonic irradiation apparatus shown in FIG. 1, an input electric signal having a frequency substantially equal to the center frequency corresponding to the electrode cycle length of the first input IDT 2 is applied to the first input IDT 2. Then, the first elastic wave is excited in the piezoelectric substrate 1. The first elastic wave has a wavelength substantially corresponding to the electrode cycle length of the first input IDT 2.
The non-leakage component of the elastic wave propagates through the piezoelectric substrate 1 and is detected by the output IDT 4 as a delayed electric signal. This delayed electric signal is amplified by the amplifier 5. A part of the amplified signal is again applied to the first input IDT 2 as an input electric signal. Thus, the first input IDT 2, the output IDT 4 and the amplifier 5 constitute a feedback-type delay line oscillator. On the other hand, the remainder of the amplified signal is sent to the voltage controller 6, where the voltage is changed, and then applied to the second input IDT 3. At this time, the second elastic wave is excited in the piezoelectric substrate 1. The leakage component of the second elastic wave is applied to the object through the other end face of the piezoelectric substrate 1 as a longitudinal wave having a strength corresponding to the voltage changed by the voltage controller 6. In this way, an ultrasonic irradiation device that is small and lightweight, can be driven with low power consumption, and can adjust the irradiation intensity of the ultrasonic wave to the object can be obtained.

FIG. 3 is a characteristic diagram showing the relationship between the phase velocity of the elastic wave of each mode excited in the piezoelectric substrate 1 and the product fd of the frequency f of the elastic wave and the thickness d of the piezoelectric substrate 1. The speed of the shear wave propagating in the piezoelectric substrate 1 is 2,450 m / s, and the speed of the longitudinal wave is 4,390 m / s. From FIG. 3, it can be seen that driving in multiple modes is possible, and the speed of the elastic wave is higher as driving in the higher order mode. The higher the speed of the elastic wave, the smaller the irradiation angle θ of the ultrasonic wave into the object. As a result, the higher the driving frequency, the smaller the irradiation angle θ. In this way,
An ultrasonic irradiation device capable of adjusting the irradiation angle into an object is made possible.

FIG. 4 is a block diagram showing a second embodiment of the ultrasonic irradiation apparatus according to the present invention. This embodiment is obtained by adding a filter 7 to the first embodiment of FIG. In the present embodiment, a cytoplasm is taken as an example of an object, and a propagation path of a longitudinal wave propagating in the cytoplasm is indicated by an arrow. As described in FIG. 3, the irradiation angle θ depends on the driving frequency. Thus, the irradiation angle θ of the ultrasonic wave into the cytoplasm
Can be adjusted.

FIG. 5 is a characteristic diagram showing the relationship between the insertion loss and the frequency of the elastic wave excited in the piezoelectric substrate 1 alone. However, FIG. 5 is a characteristic diagram at a frequency of 6 to 8 MHz. FIG.
Indicate a state in which nothing is loaded on the other end face of the piezoelectric substrate 1 and a state in which water is loaded, respectively. The difference between the insertion loss in both states is 6.8M
It is maximum near Hz. In addition to Fig. 5, 4.3 MHz, 9.5 MHz, 1
It has been confirmed that the difference between the insertion loss at 4.4 MHz and 19 MHz is large. From this, it is understood that ultrasonic waves can be efficiently emitted into an object by driving at these frequencies.

FIG. 6 is a block diagram showing a third embodiment of the ultrasonic irradiation apparatus according to the present invention. In this embodiment, a polymer film 8 is newly added to the first embodiment of FIG. The polymer film 8 has a thickness of 1 mm, is made of silicon rubber, and is provided on a part of the other end surface of the piezoelectric substrate 1. The part thereof corresponds to a surface portion including the second input interdigital transducer 3 on one end surface of the piezoelectric substrate 1. In this manner, the object is efficiently irradiated with ultrasonic waves through the outer surface of the polymer film 8.

FIG. 7 is a characteristic diagram showing the relationship between the insertion loss of the elastic wave excited in the two-layer structure of the piezoelectric substrate 1 and the polymer film 8 and the frequency. However, FIG. 7 shows the characteristics when water is loaded on the outer surface of the polymer film 8.

FIG. 8 is a characteristic diagram showing the relationship between the insertion loss and the frequency of the elastic wave excited in the two-layer structure of the piezoelectric substrate 1 and the polymer film 8. However, FIG. 8 shows the characteristics when no load is applied to the outer surface of the polymer film 8.

From FIGS. 7 and 8, it can be seen that the difference between the insertion losses in both states is maximum near 4.3 MHz. In other words, it can be seen that ultrasonic waves can be efficiently emitted into the object by driving at around 4.3 MHz.

FIG. 9 is a block diagram showing a fourth embodiment of the ultrasonic irradiation apparatus according to the present invention. In the present embodiment, an enclosure 9 is newly added to the first embodiment of FIG. The portion where the enclosure 9 is provided corresponds to a surface portion including the first input IDT 2 and the output IDT 4 on one end face of the piezoelectric substrate 1. The portion where the enclosure 9 is provided is shut off from the outside and is in contact with air. By adopting such a structure, the first elastic wave excited in the piezoelectric substrate 1 is less likely to leak to the outside, and the output IDT 4
, And is detected by the output IDT 4 as a delayed electric signal. As a result, the use of the enclosure 9 makes it possible to configure an efficient delay line oscillator.

FIG. 10 is a block diagram showing a fifth embodiment of the ultrasonic irradiation apparatus according to the present invention. In the present embodiment, a polymer film 8 and an enclosure 9 are newly added to the first embodiment of FIG. The polymer film 8 is provided on the other end face of the piezoelectric substrate 1, and a second film on the one end face of the piezoelectric substrate 1 is provided.
It is provided at a portion corresponding to the surface portion including the input IDT 3. The enclosure 9 is provided on the remaining portion of the other end surface of the piezoelectric substrate 1, and this remaining portion is shielded from the outside and is in contact with air. By using the polymer film 8, it is possible to efficiently irradiate the object with ultrasonic waves through the outer surface of the polymer film 8. In addition, by using the enclosure 9, the first elastic wave excited in the piezoelectric substrate 1 is less likely to leak to the outside and efficiently reaches the IDT 4 for output, so that the insertion loss is improved. Can be
As a result, an efficient delay line oscillator can be configured.

FIG. 11 is a block diagram showing a sixth embodiment of the ultrasonic irradiation apparatus of the present invention. In this embodiment, a first input interdigital transducer 2, an output interdigital transducer 4, an amplifier 5, a voltage controller 6, a filter 7, a polymer film 8, an enclosure 9, a piezoelectric substrate 10, and a second input interdigital transducer. 11 and switch 15
Consists of The piezoelectric substrate 10 is formed of a piezoelectric ceramic thin plate having a thickness of 218 μm. The second input interdigital transducer 11 is composed of partial electrodes 12, 13 and 14, each composed of an aluminum thin film, and provided on one end face of the piezoelectric substrate 10.

In the ultrasonic irradiation apparatus shown in FIG. 11, when an input electric signal is applied to the first input interdigital transducer 2, a first elastic wave is excited on the piezoelectric substrate 10. The non-leakage component of the first elastic wave propagates through the piezoelectric substrate 10 and is detected by the output IDT 4 as a delayed electric signal. This delayed electric signal passes through the filter 7 and is amplified by the amplifier 5. A part of the amplified signal is again
The voltage is applied to the input IDT 2, and the remainder is applied to the voltage controller 6.
, And are sequentially applied to the partial electrodes 12, 13 and 14 via the switch 15. In this way, the second elastic waves are sequentially excited in the portions of the piezoelectric substrate 10 corresponding to the partial electrodes 12, 13 and 14. The leak component of the second elastic wave is irradiated as a longitudinal wave into the object through the other end face of the piezoelectric substrate 10. That is, the leak component of the second elastic wave can be swept as a longitudinal wave in the object.

[0033]

According to the ultrasonic irradiation apparatus of the present invention, a piezoelectric substrate,
It comprises a first input interdigital transducer, a second input interdigital transducer, an output interdigital transducer, an amplifier and a voltage controller.
The piezoelectric substrate, the first input IDT, the second input IDT, and the output IDT are provided on one end surface of the piezoelectric substrate. If an input electric signal is applied to the first input interdigital transducer, a first elastic wave is excited on the piezoelectric substrate. The non-leakage component of the first elastic wave is detected by the output IDT as a delayed electric signal, and the delayed electric signal is amplified by an amplifier. A part of the amplified signal is again applied to the first input interdigital transducer, and thus the first input interdigital transducer, the output interdigital transducer and the amplifier constitute a delay line oscillator. The remainder of the amplified signal is input to the second input interdigital transducer via the voltage controller, and the second elastic wave is excited on the piezoelectric substrate. The leak component of the second elastic wave is irradiated into the object from the other end face of the piezoelectric substrate as a longitudinal wave having a strength corresponding to the voltage changed by the voltage controller.

In the ultrasonic irradiation apparatus of the present invention, a structure in which the piezoelectric substrate is made of a piezoelectric ceramic thin plate and the direction of the polarization axis thereof is parallel to the thickness direction, or a structure in which the piezoelectric substrate is a piezoelectric polymer thin plate is possible. It is. By employing such a structure, the first and second elastic waves are efficiently excited on the piezoelectric substrate. Further, the size and weight of the device can be reduced.

In the ultrasonic irradiation apparatus of the present invention, a structure provided with a filter for selecting the remaining frequency of the amplified signal is possible. By adopting such a structure, the frequency of the electric signal input to the second input IDT is selected. Since the irradiation angle θ of the longitudinal wave into the object depends on the driving frequency, the irradiation angle θ of the ultrasonic wave into the object can be adjusted.

In the ultrasonic irradiation apparatus of the present invention, a structure in which a polymer film is provided on at least a part of the other end face of the piezoelectric substrate is possible. The polymer film is provided at least on a portion corresponding to a surface portion including the second input interdigital transducer on one end surface of the piezoelectric substrate. If the polymer film is excellent in matching for acoustic coupling with the object irradiated with ultrasonic waves, for example, if a silicon rubber thin film is adopted,
In addition to efficiently irradiating ultrasonic waves into the object, it is possible to promote mechanical strength.

In the ultrasonic irradiation apparatus of the present invention, a structure in which an enclosure is provided on a part of the other end face of the piezoelectric substrate is possible. The enclosure is provided in a portion corresponding to a surface portion including the first input IDT and the output IDT on one end surface of the piezoelectric substrate. Since the portion provided with the enclosure is cut off from the outside and is in contact with air, the first elastic wave excited by the piezoelectric substrate is unlikely to leak to the outside, and efficiently reaches the IDT electrode for output. I do.

In the ultrasonic irradiation apparatus of the present invention, a structure in which a polymer film is provided on at least a part of the other end surface of the piezoelectric substrate and an enclosure is provided on the remaining portion is possible. By providing at least a polymer film on one end surface of the piezoelectric substrate corresponding to the surface portion including the second input interdigital transducer, and as a polymer film, an acoustic wave with an object irradiated with ultrasonic waves is obtained. By using a material having excellent matching for coupling, it is possible not only to efficiently irradiate the leakage component of the second elastic wave excited on the piezoelectric substrate as a longitudinal wave into the object, but also to reduce the mechanical strength. It is possible to increase. Furthermore, since the portion where the enclosure is provided is cut off from the outside and is in contact with air, the first elastic wave excited on the piezoelectric substrate is unlikely to be leaked to the outside, and becomes the output IDT. Reach efficiently.

In the ultrasonic irradiation apparatus of the present invention, a structure in which the second input IDT is divided into at least two partial electrodes is possible. Each of such partial electrodes sequentially excites the second elastic wave to the corresponding portion of the partial electrode on the piezoelectric substrate by sequentially applying the remaining portion of the amplified signal. In this way, the leakage component of the second elastic wave can be swept into the object as a longitudinal wave.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a first embodiment of an ultrasonic irradiation apparatus according to the present invention.

FIG. 2 shows a piezoelectric substrate 1, a first input interdigital transducer 2, and a second
FIG. 2 is a plan view of a device including an input IDT 3 and an output IDT 4 as viewed from above.

FIG. 3 shows the phase velocity of the elastic wave of each mode excited by the piezoelectric substrate 1, the frequency f of the elastic wave, and the thickness d of the piezoelectric substrate 1.
FIG. 4 is a characteristic diagram showing a relationship with a product fd.

FIG. 4 is a configuration diagram showing a second embodiment of the ultrasonic irradiation apparatus of the present invention.

FIG. 5 is a characteristic diagram showing the relationship between the insertion loss of elastic waves excited by the piezoelectric substrate 1 and the frequency.

FIG. 6 is a configuration diagram showing a third embodiment of the ultrasonic irradiation apparatus of the present invention.

FIG. 7 is a characteristic diagram showing the relationship between insertion loss and frequency of an elastic wave excited in a two-layer structure of a piezoelectric substrate 1 and a polymer film 8;

FIG. 8 is a characteristic diagram showing a relationship between an insertion loss of an elastic wave excited in a two-layer structure of the piezoelectric substrate 1 and the polymer film 8 and a frequency.

FIG. 9 is a configuration diagram showing a fourth embodiment of the ultrasonic irradiation apparatus of the present invention.

FIG. 10 is a configuration diagram showing a fifth embodiment of the ultrasonic irradiation apparatus of the present invention.

FIG. 11 is a configuration diagram showing a sixth embodiment of the ultrasonic irradiation apparatus of the present invention.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 piezoelectric substrate 2 first input interdigital electrode 3 second input interdigital electrode 4 output interdigital electrode 5 amplifier 6 voltage controller 7 filter 8 polymer film 9 enclosure 10 piezoelectric substrate 11 second interdigital electrode 12 Electrode 13 Partial electrode 14 Partial electrode 15 Switch

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H01L 41/08 U

Claims (8)

[Claims] 1. An ultrasonic irradiation device comprising a piezoelectric substrate, a first input interdigital transducer, a second input interdigital transducer, an output interdigital transducer, an amplifier, and a voltage controller, wherein The interdigital transducer, the second input interdigital transducer and the output interdigital transducer are provided on one end face of the piezoelectric substrate, and the first input interdigital transducer receives an input electric signal. By exciting the first elastic wave to the piezoelectric substrate by the above, the output interdigital transducer,
Detecting the non-leakage component of the first elastic wave as a delayed electric signal, the amplifier amplifies the delayed electric signal, and applies a part of the amplified signal to the first input interdigital transducer again; The voltage controller receives the remaining portion of the amplified signal and changes the voltage, and the second input interdigital transducer applies a second portion to the piezoelectric substrate by applying the remaining portion of the amplified signal. Exciting an elastic wave and irradiating a leak component of the second elastic wave as a longitudinal wave having a strength corresponding to the voltage changed by the voltage controller into the object through the other end face of the piezoelectric substrate. Ultrasonic irradiation equipment. 2. The ultrasonic irradiation apparatus according to claim 1, wherein said piezoelectric substrate is made of a piezoelectric ceramic thin plate, and a direction of a polarization axis of said piezoelectric ceramic thin plate is parallel to a thickness direction thereof. 3. The ultrasonic irradiation apparatus according to claim 1, wherein said piezoelectric substrate is made of a piezoelectric polymer thin plate. 4. The ultrasonic irradiation device according to claim 1, further comprising a filter for selecting a frequency of the remaining portion of the amplified signal. 5. A piezoelectric film is provided on at least a part of the other end face of the piezoelectric substrate, and the part includes the second input interdigital transducer on the one end face of the piezoelectric substrate. The ultrasonic irradiation device according to claim 1, 2, 3, or 4 corresponding to the surface portion. 6. A part of the other end face of the piezoelectric substrate is provided with an enclosure, and the part is provided with the first input interdigital transducer and the output interdigital transducer on the one end face of the piezoelectric substrate. 5. The ultrasonic irradiation device according to claim 1, 2, 3, or 4, wherein the part is in contact with air by the enclosure corresponding to a surface portion including the electrode. 7. A piezoelectric film is provided on at least a part of the other end face of the piezoelectric substrate, and the part includes the second input interdigital transducer on the one end face of the piezoelectric substrate. 5. An enclosure is provided on a remaining portion of said other end surface of said piezoelectric substrate corresponding to a surface portion, and said enclosure causes said remaining portion to contact air.
The ultrasonic irradiation device according to claim 1. 8. An ultrasonic irradiation apparatus in which the second input interdigital transducer is divided into at least two partial electrodes, wherein each of the partial electrodes is sequentially applied with the rest of the amplified signal. This sequentially excites the second elastic wave in a portion of the piezoelectric substrate corresponding to the partial electrode,
8. The leaky component of the second elastic wave is swept into the object as the longitudinal wave.
The ultrasonic irradiation device according to claim 1.