JP2001307070A5 - - Google Patents
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- JP2001307070A5 JP2001307070A5 JP2000116394A JP2000116394A JP2001307070A5 JP 2001307070 A5 JP2001307070 A5 JP 2001307070A5 JP 2000116394 A JP2000116394 A JP 2000116394A JP 2000116394 A JP2000116394 A JP 2000116394A JP 2001307070 A5 JP2001307070 A5 JP 2001307070A5
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000116394A JP4546607B2 (en) | 2000-04-18 | 2000-04-18 | Non-defective pattern registration method and pattern inspection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000116394A JP4546607B2 (en) | 2000-04-18 | 2000-04-18 | Non-defective pattern registration method and pattern inspection method |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001307070A JP2001307070A (en) | 2001-11-02 |
| JP2001307070A5 true JP2001307070A5 (en) | 2007-05-10 |
| JP4546607B2 JP4546607B2 (en) | 2010-09-15 |
Family
ID=18627864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000116394A Expired - Fee Related JP4546607B2 (en) | 2000-04-18 | 2000-04-18 | Non-defective pattern registration method and pattern inspection method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4546607B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3447280B2 (en) * | 2001-11-21 | 2003-09-16 | シライ電子工業株式会社 | Inspection method of printed matter and its inspection device |
| JP3944075B2 (en) * | 2002-12-27 | 2007-07-11 | 株式会社東芝 | Sample inspection method and inspection apparatus |
| JP2006234554A (en) * | 2005-02-24 | 2006-09-07 | Dainippon Screen Mfg Co Ltd | Method and device for inspecting pattern |
| JP4577717B2 (en) * | 2005-02-25 | 2010-11-10 | 大日本スクリーン製造株式会社 | Bump inspection apparatus and method |
| JP6800743B2 (en) * | 2016-12-27 | 2020-12-16 | リコーエレメックス株式会社 | Master image data creation device |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59180121A (en) * | 1983-03-30 | 1984-10-13 | Hitachi Ltd | Cylindrical sliding bearing of electric rotary machine |
| JPH07128026A (en) * | 1993-10-29 | 1995-05-19 | Fujitsu Ltd | Pattern inspection apparatus |
| JP3515199B2 (en) * | 1995-01-06 | 2004-04-05 | 大日本スクリーン製造株式会社 | Defect inspection equipment |
| JPH0981747A (en) * | 1995-09-11 | 1997-03-28 | Nikon Corp | Image processing method and position shift detecting method |
| JP3413110B2 (en) * | 1998-09-28 | 2003-06-03 | 株式会社東芝 | Pattern inspection apparatus, pattern inspection method, and recording medium storing pattern inspection program |
| JP4017285B2 (en) * | 1999-06-02 | 2007-12-05 | 松下電器産業株式会社 | Pattern defect detection method |
| JP2001034761A (en) * | 1999-07-26 | 2001-02-09 | Matsushita Electric Ind Co Ltd | Method for detecting and correcting defect of pattern |
| JP2001165633A (en) * | 1999-12-08 | 2001-06-22 | Matsushita Electric Ind Co Ltd | Method for detecting pattern defect |
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2000
- 2000-04-18 JP JP2000116394A patent/JP4546607B2/en not_active Expired - Fee Related