JP2001301610A - Automatic carrying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an automatic carrying device easily capable of achieving stable branched or straight travel of a carrier without conducting complicated steering angle control by pressing guide rollers disposed on the right and the left of the carrier to side walls on the steering side. SOLUTION: A steering device 2 to steer a front wheel 1, and guide rollers 4a, 4b, 5a, 5b disposed on the right and the left of the front wheel 1 and rear wheels 2 are provided on a carrier C, side walls 6a, 6b, 7a, 7b to guide the carrier C are formed on a traveling way 8, the front wheel 1 is steered at a branch part 9 of the traveling way 8, and the guide rollers 4a, 4b, 5a, 5b are pressed to the side walls 6a, 6b, 7a, 7b on the steering side, thereby the carrier C is branched or advanced straight.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an unmanned transfer device which can be suitably used for a transfer vehicle traveling in a clean room for manufacturing semiconductors. The present invention relates to an unmanned transfer device that can be operated.

[0002]

2. Description of the Related Art An unmanned transfer device installed in a manufacturing factory for semiconductors or the like has a configuration in which a plurality of transfer vehicles travel on a loop-shaped travel path. Here, since a large increase in the transport amount cannot be expected in a single loop, a branch path is appropriately provided in the main traveling path so that the transport vehicle can pass.

[0003] In the conventional unmanned conveyance device, a shifter, a turntable, or the like is provided at a branch portion of the traveling path, and the traveling vehicle is branched or goes straight by switching the traveling path side. Then, there was a problem that the structure and control of the carrier became complicated.

[0004]

On the other hand, as disclosed in, for example, Japanese Patent Application Laid-Open No. H10-111719, there is an unmanned transport apparatus in which a front wheel is steered to select a traveling direction on a transport vehicle side. In order to branch or straighten the transport vehicle, it is necessary to control the steering angle according to the situation.

The present invention has been made in view of the above-described problems of the conventional unmanned transfer device, and has a structure in which guide rollers disposed on the left and right sides of the transfer vehicle are pressed against the side wall on the steering side to control a complicated steering angle. It is another object of the present invention to provide an unmanned transfer device capable of easily performing stable branching and straight traveling of a transfer vehicle.

[0006]

In order to achieve the above object, an unmanned transport device according to a first aspect of the present invention comprises a steering device for steering a front wheel, and guide rollers provided on the left and right sides of the front and rear wheels. Along with providing the carrier, a side wall for guiding the carrier is formed on the traveling path, the front wheel is steered at a branch portion of the traveling path, and the guide roller is pressed against the side wall on the steering side to branch or convey the carrier. It is characterized by going straight ahead.

In this unmanned transfer device, the front wheels are steered at a branch portion of the traveling path, the guide roller is pressed against the side wall on the steering side, and the transfer vehicle is branched or moved straight along the side wall. It is possible to easily perform stable branching and straight traveling of the transport vehicle without controlling the steering angle.

In this case, the transport vehicle is divided into a front wheel portion supported by the front wheels and a rear wheel portion supported by the rear wheels, and the front wheel portion and the rear wheel portion are changed according to the direction change of the front wheel portion. The parts can be connected by a spring member that changes the direction.

Thus, the steering force of the front wheel is transmitted to the rear wheel via the spring member, and the guide roller on the rear wheel side is also pressed against the side wall on the steering side, so that the transport vehicle performs more stable branching and straight traveling. Can be.

The unmanned transfer device according to the second aspect of the present invention is provided with a steering device for steering a front wheel and a rear wheel, and guide rollers disposed on the left and right of the front wheel and the rear wheel, respectively. A side wall for guiding the vehicle is formed on the traveling path, and the front wheel and the rear wheel are steered in the same direction at a diverging portion of the traveling path, and the guide roller is pressed against the steering side wall to branch or straight forward the carrier vehicle. It is characterized by doing so.

In this unmanned transfer device, the front wheel and the rear wheel are steered in the same direction at a branch portion of the traveling path, the front and rear guide rollers are pressed against the side wall on the steering side, and the transfer vehicle is branched along the side wall. Alternatively, since the vehicle is made to travel straight, it is possible to easily and more stably branch and straight travel the transport vehicle without controlling the complicated steering angle.

[0012]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of an automatic transfer apparatus according to an embodiment of the present invention.

FIG. 1 shows a first embodiment of the unmanned transfer device according to the present invention. The unmanned transport device includes a steering device 2 that steers a front wheel 1 and guide rollers 4a, 4b, 5a, and 5b provided on the left and right sides of a front wheel 1 and a rear wheel 3, respectively.
And a side wall 6a for guiding the carrier C,
6b, 7a and 7b are formed on the traveling path 8. The steering device 2 applies a steering torque T1 to the front wheels 1 by a steering motor.

Then, the front wheel 1 is steered at the branch portion 9 of the traveling path 8 and the guide roller 4a is pressed against the side wall 7a on the steering side so that the transport vehicle C is branched to the branch path 81. When the transport vehicle C travels straight without branching, the front wheel 1 is steered in the opposite direction to the branch road 81, and the guide roller 4b is pressed against the side wall 6a of the main line 80, so that the transport vehicle C is moved to the main line 80. Let go straight.

The transport vehicle C includes a front wheel 10 supported by the front wheels 1.
And a rear wheel portion 11 supported by the rear wheel 3. The front wheel portion 10 and the rear wheel portion 11 are connected via a pivot 13 to the connecting rod 1.
4 and are connected by left and right spring members 12. Since the front wheel portion 10 changes direction while pressing the guide roller 4a against the side wall 7a by the action of the steering torque T1, the front wheel portion 10 shown in FIGS.
In the state (C), the left spring member 12 is stretched to apply a pulling force to the rear wheel portion 11, and as a result, a rear wheel steering torque T2 is automatically generated. Thus, the guide roller 5a on the rear wheel 3 side can also be pressed against the side wall 7a on the steering side, so that the transport vehicle C can perform more stable branching and straight traveling.

Next, the operation of the unmanned transfer device according to the present embodiment will be described. As shown in FIG. 1A, when a steering torque T1 is applied to the front wheels 1 by the steering device 2, the transport vehicle C
The guide roller 4a advances in the traveling direction while being pressed against the side wall 7a.

Next, as shown in FIG. 1 (B), the front wheel section 10 causes the guide roller 4 to move by the action of the steering torque T1.
The direction is changed while a is pressed against the side wall 7a. As a result, the left spring member 12 is stretched to apply a pulling force to the rear wheel portion 9, so that a rear wheel steering torque T2 is generated.

Then, as shown in FIG. 1C, the rear wheel portion 11 advances while pressing the guide roller 5a against the side wall 7a in the same manner as the guide roller 4a by the action of the rear wheel steering torque T2. Note that, as shown in FIG. 1D, after the transport vehicle C enters the branch road 81, the front wheel steering torque T1
Is set to zero.

As described above, in the automatic guided vehicle according to the present embodiment, when branching to the branch path 81, the branching section 9 of the traveling path 8 is used.
Then, the front wheels 1 and the rear wheels 3 are steered to the branch road 81 side, and the guide rollers 4a and 5a are pressed against the steering side wall 7a from the inside, and the transport vehicle C is branched along the side wall 7a. In addition, it is possible to easily perform stable branch traveling of the transport vehicle C without performing complicated steering angle control.

When the vehicle travels on the main line 80 without branching, the front wheel 1 and the rear wheel 3 are connected at the branch portion 9 of the traveling road 8 to the branch road 8.
1, the guide rollers 4b and 5b are pressed against the side wall 6a on the steering side from the inside, and the transport vehicle C is moved to the side wall 6a.
Since the vehicle can be made to travel straight along a, the stable straight traveling of the transport vehicle C can be easily performed without controlling the complicated steering angle.

FIG. 2 shows a second embodiment of the automatic transfer apparatus according to the present invention. The unmanned transport device includes two steering devices 2 for steering a front wheel 1 and a rear wheel 3, and guide rollers 4a, 4b, 5a, and 5b disposed on the left and right of the front wheel 1 and the rear wheel 3, respectively. And side walls 6a, 6b, 7a, 7b for guiding the transport vehicle C are formed on the traveling path. Each steering device 2 controls the steering torque T1, T2 by a steering motor.
On the front wheel 1 and the rear wheel 3 respectively.

Then, the front wheel 1 and the rear wheel 3 are steered in the same direction at the branch portion 9 of the traveling path 8 to push the guide rollers 4a and 5a against the side wall 7a on the steering side. It branches to 81. In addition, carrier C
When the vehicle is driven straight without branching, the front wheel 1 and the rear wheel 3 are steered in the opposite direction to the branch road 81, and the guide rollers 4b, 5b are pressed against the side wall 6a of the main line 80, thereby the transport vehicle C
To the main line 80.

The carrier C is divided into a front wheel section 10 supported by the front wheels 1 and a rear wheel section 11 supported by the rear wheels 3. The front wheel section 10 and the rear wheel section 11 are connected via a pivot 13. It is rotatably connected by a connecting rod 14.

Next, the operation of the unmanned transfer device according to this embodiment will be described. As shown in FIG. 2A, when the steering torques T1 and T2 are applied to the front wheels 1 and the rear wheels 3 by the respective steering devices 2, the transport vehicle C advances while pressing the guide rollers 4a and 5a against the side walls 7a. Proceed in the direction.

Next, as shown in FIG. 2 (B), the front wheel section 10 causes the guide roller 4 to move by the action of the steering torque T1.
The direction is changed while a is pressed against the side wall 7a.

Then, as shown in FIG. 2 (C), the rear wheel portion 11 advances while pressing the guide roller 5a against the side wall 7a similarly to the guide roller 4a by the action of the rear wheel steering torque T2. Note that, as shown in FIG. 2D, after the transport vehicle C enters the branch road 81, the front wheel steering torque T1
Is set to zero.

As described above, in the automatic guided vehicle according to the present embodiment, when branching to the branch path 81, the branching section 9 of the traveling path 8 is used.
Then, the front wheels 1 and the rear wheels 3 are steered to the branch road 81 side, and the guide rollers 4a and 5a are pressed against the steering side wall 7a from the inside, and the transport vehicle C is branched along the side wall 7a. In addition, it is possible to easily perform stable branch traveling of the transport vehicle C without performing complicated steering angle control.

When the vehicle travels on the main line 80 without branching, the front wheel 1 and the rear wheel 3 are connected at the branching portion 9 of the traveling road 8 to the branch road 8.
1, the guide rollers 4b and 5b are pressed against the side wall 6a on the steering side from the inside, and the transport vehicle C is moved to the side wall 6a.
Since the vehicle can be made to travel straight along a, the stable straight traveling of the transport vehicle C can be easily performed without controlling the complicated steering angle.

[0029]

According to the first aspect of the present invention, the front wheel is steered at the branch portion of the traveling path, the guide roller is pressed against the side wall on the steering side, and the transfer vehicle branches or moves along the side wall. Because it goes straight, even if the curvature of the branch road changes,
A stable branching / straight running of the carrier can be performed easily without complicated control of the steering angle.

Further, the carrier is divided into a front wheel portion supported by the front wheels and a rear wheel portion supported by the rear wheels, and the front wheel portion and the rear wheel portion are directed in the direction of the rear wheel portion as the front wheel portion changes direction. By connecting with a spring member to be converted, the steering force of the front wheel is transmitted to the rear wheel via the spring member, and the guide roller on the rear wheel is also pressed against the side wall on the steering side, so that the more stable branching of the transport vehicle
The vehicle can go straight ahead.

Further, according to the unmanned transport device of the second aspect of the present invention, the front wheels and the rear wheels are steered in the same direction at the branch of the traveling path,
The front and rear guide rollers are pressed against the side wall on the steering side, and the transport vehicle branches or goes straight along the side wall.Even if the curvature of the branch road changes, it is easy to control complicated steering angles. In addition, a more stable branching / straight running of the carrier can be performed.

[Brief description of the drawings]

FIG. 1 shows a first embodiment of an unmanned transfer device of the present invention,
(A) is a plan view showing a first stage of travel, (B) is a plan view showing a second stage of travel, (C) is a plan view showing a third stage of travel, and (D) is a fourth view of travel. It is a top view which shows a stage.

FIG. 2 shows a second embodiment of the unmanned transfer device of the present invention,
(A) is a plan view showing a first stage of travel, (B) is a plan view showing a second stage of travel, (C) is a plan view showing a third stage of travel, and (D) is a fourth view of travel. It is a top view which shows a stage.

[Explanation of symbols]

 C carrier 1 front wheel 2 steering device 3 rear wheel 4a, 4b guide roller 5a, 5b guide roller 6a, 6b side wall 7a, 7b side wall 8 running path 80 main line 81 branch path 9 branch section 10 front wheel section 11 rear wheel section 12 spring member 13 Pivot 14 Connecting rod

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H01L 21/68 H01L 21/68 A

Claims (3)

[Claims] 1. A vehicle comprising: a steering device for steering a front wheel; and guide rollers disposed on the left and right sides of a front wheel and a rear wheel, respectively, and a side wall for guiding the transport vehicle is formed on a traveling path. An unmanned transport device in which a front wheel is steered at a branch portion of a road and a guide roller is pressed against a side wall on a steering side to branch or straight forward the transport vehicle. 2. A vehicle is divided into a front wheel portion supported by front wheels and a rear wheel portion supported by rear wheels, and the front wheel portion and the rear wheel portion are separated from each other by a change in direction of the front wheel portion. The unmanned conveyance device according to claim 1, wherein the unmanned conveyance device is connected by a spring member that changes the direction. 3. A carrier device for steering a front wheel and a rear wheel, and guide rollers disposed on the left and right of the front wheel and the rear wheel, respectively, and a side wall for guiding the carrier is formed on a traveling path. And an unmanned transport system in which the front wheel and the rear wheel are steered in the same direction at a branch portion of the traveling path, and the guide roller is pressed against the side wall on the steering side, so that the transport vehicle branches or goes straight. apparatus.