JP2001296442A5 - - Google Patents
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- JP2001296442A5 JP2001296442A5 JP2000108788A JP2000108788A JP2001296442A5 JP 2001296442 A5 JP2001296442 A5 JP 2001296442A5 JP 2000108788 A JP2000108788 A JP 2000108788A JP 2000108788 A JP2000108788 A JP 2000108788A JP 2001296442 A5 JP2001296442 A5 JP 2001296442A5
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000108788A JP4573942B2 (en) | 2000-04-11 | 2000-04-11 | Manufacturing method of refractive index periodic structure having photonic structure, and optical functional device using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000108788A JP4573942B2 (en) | 2000-04-11 | 2000-04-11 | Manufacturing method of refractive index periodic structure having photonic structure, and optical functional device using the same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001296442A JP2001296442A (en) | 2001-10-26 |
| JP2001296442A5 true JP2001296442A5 (en) | 2007-06-07 |
| JP4573942B2 JP4573942B2 (en) | 2010-11-04 |
Family
ID=18621572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000108788A Expired - Fee Related JP4573942B2 (en) | 2000-04-11 | 2000-04-11 | Manufacturing method of refractive index periodic structure having photonic structure, and optical functional device using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4573942B2 (en) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4977938B2 (en) * | 2001-09-27 | 2012-07-18 | ソニー株式会社 | Manufacturing method of three-dimensional structure |
| JP4236092B2 (en) | 2003-01-31 | 2009-03-11 | Ｔｄｋ株式会社 | 2D photonic crystal |
| JP4653393B2 (en) * | 2003-09-18 | 2011-03-16 | 株式会社リコー | Light control element |
| JP4188860B2 (en) * | 2004-03-10 | 2008-12-03 | 日本電信電話株式会社 | Manufacturing method of optical waveguide |
| JP4520429B2 (en) * | 2005-06-01 | 2010-08-04 | エーエスエムエル ネザーランズ ビー．ブイ． | Application of two-dimensional photonic crystals to alignment equipment |
| US7737566B2 (en) | 2005-06-01 | 2010-06-15 | Asml Netherlands B.V. | Alignment devices and methods for providing phase depth control |
| JP5272173B2 (en) * | 2007-03-26 | 2013-08-28 | 国立大学法人京都大学 | 2D photonic crystal |
| JP4692572B2 (en) * | 2008-05-12 | 2011-06-01 | パナソニック電工株式会社 | Manufacturing method of Y-branch waveguide |
| JP4631929B2 (en) * | 2008-05-12 | 2011-02-16 | パナソニック電工株式会社 | Manufacturing method of Y-branch waveguide |
| WO2010020054A1 (en) * | 2008-08-20 | 2010-02-25 | Opalux Incorporated | Photonic crystal device |
| JP2013210678A (en) * | 2013-06-21 | 2013-10-10 | Oji Holdings Corp | Method for manufacturing single particle film on non-flat surface, method for manufacturing fine structure using single particle film etching mask, and fine structure obtained by the same method |
| JP5915696B2 (en) * | 2014-06-09 | 2016-05-11 | 王子ホールディングス株式会社 | Manufacturing method of substrate with single particle film etching mask |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1062615A (en) * | 1996-08-15 | 1998-03-06 | Asahi Glass Co Ltd | Diffraction grating, its manufacture, and light pickup element using thereof |
| JPH1096808A (en) * | 1996-09-24 | 1998-04-14 | Nippon Telegr & Teleph Corp <Ntt> | Formation of fine pattern |
| JPH11326603A (en) * | 1998-05-19 | 1999-11-26 | Seiko Epson Corp | Microlens array and its production thereof, and display |
| EP0964305A1 (en) * | 1998-06-08 | 1999-12-15 | Corning Incorporated | Method of making a photonic crystal |
| US6134043A (en) * | 1998-08-11 | 2000-10-17 | Massachusetts Institute Of Technology | Composite photonic crystals |
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2000
- 2000-04-11 JP JP2000108788A patent/JP4573942B2/en not_active Expired - Fee Related