JP2001294907A - Manufacturing method of metal ball like glass one, metal glass ball manufactured in this method, and manufacturing apparatus therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide metal ball like glass one manufacturing method capable of widely and intentionally controlling the grain size of an individual particle and consistently manufacturing industrially metal ball like glass one closer to true balls with uniform grain size industrially and a manufacturing apparatus therefor. SOLUTION: In this metal ball like glass one manufacturing method and the manufacturing apparatus therefor, the metal melted in a vessel having a heater is jetted as a droplets through an orifice on a plate toward a collect unit having the inert atmosphere. The droplet is pelletized to form ball by a diaphragm connected to a piezoelectric actuator generating the prescribed pulse pressure, and cooled at a rate over the critical cooling rate in the inert atmosphere and collected the metal ball like glass one manufactured by this method.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a metallic glass (amorphous alloy) sphere, particularly to a uniform particle size (so-called,
The present invention relates to a method for producing metal glass spheres for producing metal glass spheres of monodisperse particles), metal glass spheres produced by this method, and an apparatus for producing the same.

[0002]

2. Description of the Related Art Fine particles of uniform size, that is, fine monodisperse particles, are in increasing demand today in various fields of science and technology. For example, latex particles produced by the sol-gel method, which are well known as fine monodisperse particles, have a standard deviation of the particle size (particle size) distribution of about 10% of the average particle size.
And used as standard size particles in electron microscopic observation. In the semiconductor industry, spherical solder powder having a uniform particle size (particle size) of 30 μm to 40 μm is required for miniaturization and bonding of IC chips. Also, the HI of the alloy powder
Also in P molding, it is said that spherical powder having a uniform particle size (particle size) is necessary in order to prevent the formation of non-uniform voids that are fatal defects for the material.

[0003] As a method for producing fine monodispersed particles, the above-mentioned sol-
There is a gel method, while a plasma rotating electrode method (PREP method) is used if particles of 100 μm or more are desired. If a certain degree of particle size (particle size) is allowed,
A method of mechanically classifying general atomized powder with a sieve or the like is also practical.

However, in the conventional method, a classification operation is indispensable, and it is generally difficult to widely control the particle size, that is, to obtain monodisperse particles having a desired particle size. As described above, the sol-gel method is limited to the preparation of fine particles of 0.1 μm to 1.2 μm. In the PREP method, the production limit is about 100 μm due to the rotational stability of the electrode. In order to expand the field of application of monodisperse particles in the current situation, it is desired to develop a high-precision direct production process of monodisperse particles that does not require classification work and that can control particle size (particle size) more freely. I was

[0005] For this reason, the present applicant has filed Japanese Patent Application No. 3-31.
No. 7096, "Method and apparatus for producing spherical monodisperse particles"
(See Japanese Patent Application Laid-Open No. 6-184607), the particle size (particle size) of each particle can be artificially controlled in a wider range, and a spherical particle having a uniform particle size (particle size) closer to a true sphere can be obtained. A method and an apparatus for producing spherical monodisperse particles capable of stably producing dispersed particles have been proposed.

According to this technique, a pulse pressure is generated in a piezoelectric actuator, the pulse pressure is transmitted to a diaphragm via a transmission rod, and further transmitted to a molten metal in close contact with the diaphragm. Due to the displacement not less than the critical displacement to the molten metal, the molten metal is ejected from the orifice provided in the container for storing the molten metal into the inert gas flow one by one as monodisperse particles to be spherical, and the molten metal is made spherical in the cooling water. It is intended to provide a method for producing spherical monodisperse particles, wherein spherical monodisperse particles are collected after cooling, and an apparatus for producing spherical monodisperse particles embodying this method.

[0007]

The method for producing spherical monodisperse particles according to the above-mentioned prior application and the apparatus for producing spherical monodisperse particles embodying this method are capable of producing spherical monodisperse particles with high precision. However, since the number of orifices for ejecting spherical monodisperse particles is one, there is room for improvement in terms of suitability for mass production. The present invention further improves the above-described method and apparatus for producing spherical monodisperse particles, is easy to handle and set, and has a shape suitable for mass production of spherical monodisperse particles. It also enables manufacturing.

That is, an object of the present invention is to eliminate the need for a classification operation, to control the particle size (particle size) of each particle more widely and artificially, and to make the particle size (particle size) uniform. Provided are a method for producing a metallic glass sphere capable of stably producing spherical monodisperse particles composed of metallic glass closer to a true sphere, a metallic glass sphere produced by the method, and an apparatus for producing the metallic glass sphere. It is in.

[0009]

In order to achieve the above object, a method for manufacturing a metallic glass sphere according to the present invention comprises the steps of: melting molten metal (molten metal) in a vessel provided with a heating device; From the orifice of the orifice plate provided with the orifice, as a droplet by a diaphragm connected to a piezoelectric actuator that generates a predetermined pulse pressure, the droplet is directed to a collection unit having an inert atmosphere for spheroidizing the droplet. And cooling at a cooling rate equal to or higher than the critical cooling rate in the inert gas atmosphere of the collecting section to collect.

Further, the metallic glass sphere according to the present invention is a metallic glass sphere produced by the above-mentioned production method, wherein the variation in diameter between the metallic glass spheres is within ± 10% and substantially monodispersed. It is a particle. Still further, the metallic glass sphere according to the present invention is characterized in that the variation of the diameter of each metallic glass sphere is within ± 2%.

Further, the apparatus for manufacturing a metallic glass sphere according to the present invention comprises a molten metal container for storing molten metal, a heating device provided on the outer periphery of the molten metal container, and a diaphragm which is in close contact with the molten metal container. An orifice plate having one or more orifices provided at the bottom of the molten metal container, a piezoelectric actuator for generating a predetermined pulse pressure, a transmission rod for transmitting the pulse pressure of the piezoelectric actuator to the diaphragm, And a recovery unit which is located below the orifice plate and has an inert gas atmosphere for cooling and spheroidizing the liquid droplets. The pulse pressure of the piezoelectric actuator causes the transfer rod and the diaphragm to pass through the diaphragm. It is characterized in that the molten metal is ejected from the orifice as droplets into the inert gas in the recovery section. To.

Here, it is preferable that the heating device comprises a carbon susceptor and a work coil.

As will be described later, the diameter of the orifice, the wettability between the molten metal and the molten metal container (material and finished state of the surface), and the gas pressure of the inert gas in the molten metal container. By adjusting the operating frequency and frequency waveform of the piezoelectric actuator, the amount of displacement, the temperature and surface tension of the molten metal, it is possible to control the particle size of the metal glass sphere to be manufactured.

According to the apparatus for manufacturing a metallic glass ball of the present invention configured as described above, a classification operation is not required, and
The particle size (particle size) of each particle can be controlled more widely and artificially, and the spherical monodisperse particles made of metallic glass that is closer to a true sphere with a uniform particle size (particle size) can be stably formed. Mass production becomes possible.

[0015]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, an apparatus for producing spherical monodisperse particles according to the present invention will be described in detail based on a preferred embodiment shown in the accompanying drawings. Needless to say, the present invention is not limited to the illustrated example.

FIG. 1 is a schematic side view showing the entire configuration of a metal glass ball manufacturing apparatus (hereinafter, also simply referred to as the present apparatus) 10 according to one embodiment of the present invention. In FIG. 1, A denotes a heating device 20 and a later-described internal portion of a part of a metal glass sphere forming portion B (from a piezoelectric actuator to a diaphragm, hereinafter referred to as a B1 block) for inspection and material input, and the like. Melt chamber etc. (hereinafter referred to as B2
This block is a lifter that moves upward and separates it from the block, and is composed of a motor-driven screw jack.

B is a metal glass sphere forming unit which is a main part of the present apparatus, which will be described in detail later, C is a collecting unit for the completed metal glass sphere, and D is a collecting unit C and the above-mentioned metal glass sphere forming unit B. E is a vacuum suction mechanism used when replacing the surroundings with an inert gas, E is a cooling water circulating device for supplying cooling water to a cooling mechanism for preventing an excessive rise in temperature of the piezoelectric actuator of the metallic glass ball forming part B, F Denotes a high-frequency induction heating device for supplying power to the high-frequency heating device of the metallic glass sphere forming section B, G denotes a power box of the entire apparatus, and H denotes an operation panel for operating the entire apparatus.

FIG. 2 is a schematic cross-sectional view showing a detailed configuration of the above-mentioned metallic glass ball forming portion B. As described above, the metallic glass sphere forming portion B is roughly divided into a B1 block and a B2 block. As shown in FIG. 2, the B1 block includes a piezoelectric actuator 12, a holder block 39 for connecting the piezoelectric actuator 12, and the transmission rod 14, a diaphragm 15 attached to the distal end of the transmission rod 14, and the diaphragm 15.
And a base flange 13 for holding the holding portion 15a.

The B2 block includes a heating device 20 for melting an alloy or the like which is a raw material of the metallic glass sphere, and two molten metal (molten) storage portions 21 provided therein.
a, 21b, a nozzle portion 22 disposed below the molten metal storage portion 21a, and an orifice plate 2 having a plurality of orifices disposed at the tip of the nozzle portion 22.
3, and an inert gas supply pipe for supplying an inert gas to the molten metal storage section 21b. A relatively narrow communication passage is provided between the two molten metal storage portions 21a and 21b.

A seal member 16 is attached to the lower side of the diaphragm holding portion 15a of the B1 block so as to be airtightly connected to the B2 block. It is preferable to use a material having heat resistance as the seal member 16.

A heating device 20 is arranged outside the two molten metal storage portions 21a and 21b. The heating device 20 surrounds the carbon susceptor 20a made of carbon as a heating element. And a protection tube 20c outside the heat insulating material 20b, and a work coil 20d for high-frequency heating disposed outside the heat insulating material 20b.

The above-mentioned heating device 20 excites the work coil 20d by the excitation current supplied from the high-frequency induction heating device F shown in FIG. 1, and heats the carbon constituting the carbon susceptor 20a by the high frequency generated from the work coil 20d. The heat is used to heat and melt the raw material alloy charged in the molten metal reservoirs 21a and 21b inside the carbon susceptor 20a. The material alloy has excellent uniform heating characteristics, and has a high temperature up to about 1000 ° C. Can be obtained relatively easily. The heating device 20 is also effective when using a raw material that does not generate heat even when a high frequency is applied directly.

An orifice plate 2 having a plurality of metal glass injection orifices is provided below the molten metal storage 21a.
3 is attached by a pressing member 23a. As the material constituting the orifice plate 23, an optimum material may be selected according to the type of metallic glass to be manufactured. For example, the wettability with the molten metal can be changed by selecting the material. is there. Also, the diameter of the orifice is not particularly limited, and may be appropriately selected depending on the particle diameter of the sphere to be produced, for example, 30 μm to 500 μm.
m, more preferably about 50 μm to 150 μm.

Although not shown, the molten metal reservoir 21a or 21b is provided with a thermocouple for temperature measurement. As described above, the B2 block as a whole forms a raw material melting part and a molten metal storage part for melting the raw material supplied as described later and storing the molten raw material. An inverted conical portion in the nozzle portion 22 is provided below the raw material melting portion and molten metal storage portion, and supplies the molten metal stored in the nozzle portion 22 to the orifice plate 23 further below.

The piezoelectric actuator 12, the holder block 39, the transmission rod 14, the diaphragm 15, and the holding portion 15a of the diaphragm 15 are locked to the base flange 13 as described above.
These are integrally pulled out from the heating device 20 of the B2 block by the lifter A so as to be pulled out.

Below the orifice plate 23 of the metallic glass sphere forming section B, there is provided a collecting section (C in FIG. 1) for capturing the metallic glass sphere to be injected. The recovery section C has a sample tray 40 for capturing an initial injection sample at the uppermost stage, a recovery cylinder 41 to which an inert gas flow is supplied below, a gate valve 42, and a recovery cylinder 41 after being injected. A product (metallic glass ball) collection box 43 and the like cooled inside are connected.

A vacuum suction mechanism D used for replacing the surroundings of the collecting section C and the metallic glass sphere forming section B with an inert gas is connected to the collecting section C composed of these parts. In a preparatory stage before driving the present apparatus, with the above-described gate valve 42 opened, the inside of the collection section C and the periphery of the metallic glass sphere forming section B are evacuated by the vacuum suction mechanism section D, and after the evacuation, helium An inert gas such as a gas is supplied at a predetermined pressure from a supply source (not shown), and all the paths of the metal glass spheres are made to have an inert gas atmosphere.

The sample tray 40 receives the metal glass spheres that are ejected and emitted at the beginning of the operation of the apparatus, and observes and observes the situation using a metal microscope, for example.
It is for confirmation. In this state, the cooling is not performed sufficiently, so that agglomeration / deformation occurs and a glass bulb having a perfect shape cannot be obtained. However, it is possible to sufficiently confirm the suitability of the manufacturing conditions. The sample tray 40 is configured to retreat from the main passage at the time when the confirmation of the appropriateness of the manufacturing conditions is completed.

As will be described later, an inert atmosphere of an inert gas is formed in the recovery section C to promote the spheroidization of the molten metal (molten metal) sprayed from the orifice in the form of droplets. . That is, here, the inert gas is controlled so as to have an optimum cooling rate for spheroidizing the metallic glass. In the present apparatus, a cooling rate of about 1000 ° C./sec can be realized in a helium gas atmosphere, depending on the particle size. Needless to say, such an inert gas atmosphere also has an effect of preventing oxidation of the metal glass spheres, and brings about an effect on the production of high quality metal glass spheres.

The inert gas atmosphere is not particularly limited as long as the control of the cooling rate of the droplet is optimal for spheroidization, and the type of metal glass, the temperature, the injection speed, the diameter of the orifice ( That is, the diameter of the metal glass sphere)
What is necessary is just to select suitably according to various parameters. Also,
The length of the recovery section C, that is, the length of the metallic glass sphere injected from the orifice in the inert gas, is not particularly limited, and is appropriately determined according to the above parameters, the type and the flow rate of the inert gas, and the like. do it.

As the piezoelectric actuator 12 used in the metallic glass ball forming portion B, a laminated piezoelectric element can be suitably used. The piezoelectric actuator 12 has a predetermined frequency (for example, the operating frequency of the piezoelectric actuator 12 is 1).
It is connected to a function generator that generates a rectangular wave of about 0 Hz to 10 KHz) and a power amplifier (both not shown) that amplifies the rectangular wave. , The displacement of the predetermined frequency.

The displacement of the piezoelectric actuator 12 is as follows.
The light is transmitted to the diaphragm 15 via the transmission rod 14 fixed to the piezoelectric actuator 12. The diaphragm 15 transmits the displacement from the orifice to the molten metal stored in the molten metal storage portion 21a in the B2 block of the metallic glass sphere forming portion B, thereby injecting the molten metal from the orifice at a pulse pressure corresponding to the displacement. Thus, fine metal glass spheres are manufactured.

The above-mentioned piezoelectric actuator 12 is, for example, driven by an actuator retainer which is fixed in the holder block 39 by four setscrews (not shown) which are screwed into four screw holes on the side surface thereof. It is attached. Also, the piezoelectric actuator 12 and the transmission rod 14
Is connected by sandwiching the piezoelectric actuator 12 between the actuator retainer and the transmission rod 14 and fixing the actuator retainer and the transmission rod 14 with bolts and nuts (not shown).

As described above, since the piezoelectric actuator 12 and the transmission rod 14 are integrally formed, the movement of the piezoelectric actuator 12 can be transmitted to the diaphragm 15 accurately. It is possible to accurately vibrate according to the condition. Further, by using such a configuration using the piezoelectric actuator 12, accurate displacement control of the diaphragm 15, high-speed driving (which can follow high-frequency pulses), and control with an arbitrary waveform can be performed.

In general, the piezoelectric element loses its piezoelectric function at a high temperature, and therefore needs to be cooled. For this reason, also in the device 10 according to the present embodiment, the cooling water circulation device E as shown in FIG. 1 is used, and the water cooling pipe is partially connected to the device main body (the piezoelectric actuator 12 and the holder block 3).
9 and the like, so as to maintain the piezoelectric actuator 12 at a temperature lower than its use limit temperature.

In addition, above the heating device 20, an inert gas introduction pipe 24 connected to a supply source (not shown) is provided.
Is arranged, and separately from the atmosphere adjustment of the entire metal glass sphere forming section B described later, the molten metal storage section 2 in the B2 block is provided.
The atmosphere and pressure in 1a and 21b are adjusted. This is because the balance between the pulse pressure wave applied to the molten metal corresponding to the pulse pressure transmitted to the diaphragm 15 and the stable formation of good glass spheres is maintained. By controlling the supply of the active gas, the molten metal storage 2
The control of the gas pressure in 1a and 21b is performed.

The raw material that can be produced by the apparatus for producing metallic glass spheres according to the present invention is not particularly limited, and various materials such as palladium, zirconium, and lanthanum can be produced. Can be used in combination. Therefore, the temperature of the molten metal is not particularly limited as long as it is not lower than the melting point of the raw material metal used and the required fluidity can be obtained.

In the present apparatus 10, the diaphragm 15 is displaced (vibrated) toward the molten metal side from the piezoelectric actuator 12 via the transmission rod 14, so that a plurality (a large number) of metal is moved from the orifice by one displacement (vibration). A glass ball is sprayed to obtain a metal glass ball having a diameter substantially equal to the diameter of the orifice. Here, it is needless to say that the amount of displacement of the diaphragm 15 needs to correspond to the total volume according to the diameter and the number of the metallic glass balls to be injected.

The frequency of the displacement of the piezoelectric actuator 12 is not particularly limited, and may be appropriately selected according to the type of the target metallic glass sphere (material), the required production speed, and the like. As for the above-mentioned target materials, for example, about 10 Hz to 1 KHz can be practically used. It is needless to say that this frequency is preferably as high as possible from the viewpoint of mass productivity of the metallic glass sphere.

Hereinafter, the operation of the apparatus 10 for manufacturing metallic glass spheres according to this embodiment configured as described above will be described with reference to the drawings.

First, the lifter A lifts the B1 block of the metallic glass sphere forming portion B to separate it from the B2 block. In this state, the raw material of the metallic glass sphere to be manufactured is charged into the molten metal storage portion 21b, and the heating device 20
Is turned on to melt the input raw material. The molten raw material (molten metal) flows into the nozzle portion 22 in the molten metal storage portion 21a through a narrow communication passage between the molten metal storage portions 21b and 21a. In addition, after the raw material is melted, the heating device 20 may be kept warm.

On the other hand, the cooling water supplied from the cooling water circulating device E is circulated through the holder block 39 and the like so that the temperature of the piezoelectric actuator 12 does not rise. Further, the air around the metallic glass sphere forming unit B and the collecting unit C is exhausted using the vacuum suction mechanism D, and an inert gas is supplied from a supply source (not shown).
An inert gas atmosphere slightly higher than the atmospheric pressure is set.

Next, a rectangular wave having a predetermined frequency is generated by the above-described function generator, amplified by a power amplifier, and then applied to the piezoelectric actuator 12 to generate a vibration having a predetermined frequency and a predetermined amplitude. The diaphragm 15 is oscillated with a pulse having the same frequency as above through a transmission rod 14 having an integral structure,
A pulse pressure wave is generated in the molten metal in the molten metal storage part 21a in contact with the diaphragm 15.

As a result, when the piezoelectric actuator 12 is displaced downward by a predetermined amount or more, the diaphragm 15 is displaced via the transmission rod 14, and the molten metal in the molten metal storage portion 21a is dropped from the orifice on the orifice plate 23 by the droplet. And spray. This injection is performed once per cycle of the pulse pressure wave. At this time, the molten metal storage 21 a is stored in the molten metal storage 21 a in accordance with the vibration of the diaphragm 15.
Since the molten metal enters and exits through the communication passage between a and 21b, the pressure of the inert gas above the molten metal storage 21b is precisely controlled in accordance with the vibration of the diaphragm 15 to balance the formation of the metallic glass sphere. preferable.

The cooling rate of the droplets thus jetted is optimally controlled by the inert gas atmosphere in the collecting section C.
While descending in the collection section C, the sphere is formed into a nearly spherical shape, and is collected as a metallic glass sphere. Thus, it is possible to obtain a metallic glass sphere having a diameter close to the diameter of the substantially orifice and having a spheroidized shape substantially close to a true sphere. The particle size (particle size) distribution of the metallic glass spheres thus obtained has very little variation.

[0046]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In the apparatus 10 for manufacturing metallic glass spheres according to the present embodiment shown in the above-mentioned figures, for example, a laminated piezoelectric element (AE05 manufactured by Tokin Co., Ltd.) is used as the piezoelectric actuator 12.
05D16), a personal computer and a DA board MDA-761AT (Co., Ltd.) as pulse wave generators
NF circuit design block), NF-
4025 (manufactured by NF Corporation).
The maximum displacement of the laminated piezoelectric element used as the piezoelectric actuator 12 is 14.7 μm, and the frequency characteristic is 1.7 M.
Hz.

Here, cooling water was passed through a water cooling pipe to cool the piezoelectric element so that the temperature did not exceed 40 ° C. High temperature members (actuator retainer 40, transmission rod 1
4) was made of ceramic. Also, the orifice plate 23 is made of ceramic,
60 orifices were provided in a predetermined area (about 40 mm ² ). The diameter of the orifice was about 400 μm.

As a raw material of the metallic glass sphere, a palladium-based material (Pd-Cu-Ni-P: melting temperature of about 900 ° C.)
To 1000 ° C.) and 1000 ° C.
Helium gas was introduced into the recovery section C at a pressure of 0.1 atm from an introduction pipe (not shown).
The droplet ejected from the orifice has a diameter of about 50
cm below the product collection box 43 of the collection section C.

The operating frequency of the piezoelectric actuator 12 is set to 1
The apparatus was operated at 00 Hz for 2 minutes to produce metal glass balls. At the initial stage, the droplets ejected from the orifice are set so as to be received by the above-described sample tray 40, and the formation state of the particles is determined by observation with a metallographic microscope, and when it is determined that the droplets are normal, Removed the sample tray 40 and collected the droplets directly below the orifice into the product collection box of the collection section D.

With respect to the metallic glass spheres collected in the product collection box 43, the particle shape was observed with a scanning electron microscope (SEM) and the particle size (particle size) distribution was measured with an image analyzer. In addition, a CCD camera (44 in FIG. 1) was installed in the collecting section C, and the shape of the metallic glass sphere being manufactured was observed in real time, and the manufacturing conditions were adjusted based on the observation result.

Although illustration is omitted, the metal glass spheres obtained in the above example were observed by SEM. As a result, when the injection temperature was 1000 ° C., the particles were solidified during the fall due to the shortage of cooling time. Some particles were deformed by the impact of the drop without being deformed. However, when the injection temperature was 900 ° C., there was no such deformation, and particles close to a true sphere were obtained.

FIG. 3 shows the particle size distribution of the particles obtained at the above-mentioned injection temperature of 900 ° C. The monodispersed particles obtained in the above example were spherical particles having an average particle diameter of 383.9 μm (standard deviation 4.17) substantially equal to the orifice diameter. In addition, as a result of measuring based on the SEM photograph of the above-mentioned metallic glass sphere, it was confirmed that the sphericity (variation in the diameter of each metallic glass sphere) was within ± 2%.

The variation in the size (diameter) between a large number of manufactured metallic glass spheres is within 10% at the maximum, preferably within 5%, more preferably within 2%. Monodisperse particles can be obtained. Further, the metallic glass sphere manufactured by the present apparatus has a feature that its surface cleanliness is good (that is, the thickness of the oxide film layer is extremely thin).

From these results, the metallic glass spheres obtained by the apparatus for producing metallic glass spheres according to the present embodiment not only can be called so-called monodisperse particles, but also have excellent sphericity. It can be said that it has a wide application range. FIG. 4 shows an XRD analysis result of the particles obtained when the above-mentioned injection temperature is 900 ° C. In FIG. 4, no remarkable peak is observed, and it can be seen that vitrification progresses due to amorphization.

Even when the same metallic glass spheres were produced using different raw materials, spherical particles having an average particle diameter substantially equal to the orifice diameter were obtained. The raw materials used here were zirconium-based Zr-Al-Cu-Ni (melting temperature about 950 ° C. to 1
100 ° C.), and lanthanum-based La-Al-Ni-Cu-Co (melting temperature about 400 ° C. to 600 ° C.). The properties of the obtained particles, such as the shape, particle size (particle size) distribution, and vitrification ratio, were the same as those in the previous examples.

According to each of the above embodiments, an effect was obtained that metal glass spheres having an arbitrary particle diameter could be produced at a desired speed from a molten metal glass having a high melting temperature. Note that the above embodiment is an example of the present invention, and it is needless to say that the present invention is not limited to this.

For example, the diameter of the metallic glass sphere to be produced is
As described above, it is possible to adjust the diameter and the number of the orifices provided on the orifice plate 23, the effective diameter of the diaphragm 15, the operating frequency and the frequency waveform of the piezoelectric actuator 12, and the displacement amount. The operating frequency of the piezoelectric actuator 12 is 10 Hz to 10 Hz.
A frequency of about KHz is feasible, which allows control of the production speed.

In the above description, the object to be manufactured using the manufacturing apparatus according to the present invention is limited to metallic glass spheres. However, the manufacturing apparatus according to the present invention has a wider melting temperature range. It can also be suitably used for the production of monodisperse particles composed of various alloys. Here, examples of the high melting point alloy material include alloys containing copper, silver, and gold. Examples of the low melting point alloy material include alloys of lead, tin, and the like.

[0059]

As described in detail above, according to the present invention,
Classification work is unnecessary, and the particle size (particle size) of each particle can be controlled more widely and artificially, and metal glass spheres with uniform particle size (particle size) closer to a true sphere are stabilized. This provides an effect that a method and an apparatus for manufacturing a metallic glass sphere that can be manufactured in a specific manner can be realized. Further, according to the above manufacturing method, it is possible to obtain metal glass spheres having high uniform characteristics by using a metal glass having a high melting point as a raw material.

[Brief description of the drawings]

FIG. 1 is a schematic side view showing an overall configuration of a metal glass ball manufacturing apparatus according to one embodiment of the present invention.

FIG. 2 is a schematic cross-sectional view showing a detailed configuration of a metallic glass ball forming section B in FIG.

FIG. 3 is a graph of a particle size distribution of monodisperse particles obtained by a metal glass ball manufacturing apparatus according to an example.

FIG. 4 is a graph showing an XRD analysis result of the monodisperse particles.

[Explanation of symbols]

 Reference Signs List A Lifter B Metal glass sphere forming unit C Recovery unit D Vacuum suction mechanism E Cooling water circulation device F High frequency induction heating device G Power supply box H Operation panel 10 Metal glass sphere manufacturing device 12 Piezoelectric actuator 13 Base flange 14 Transmission rod 14a Piston 20 Heating Apparatus 20a Carbon susceptor 20b Insulating material 20d Work coil 25 Nozzle part 25b Nozzle 25c Cavity 26 Crucible 27 Orifice plate 27a Holding member 33 Dial gauge 39 Holder block 40 Sample tray 41 Collection cylinder 42 Gate valve 43 Collection box 44 CCD camera

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Ryo Kawasaki, Inventor 5-51-701, Showa-cho, Aoba-ku, Sendai, Miyagi Prefecture (72) Eiichi Makabe 3-1-25 Kutake, Miyagino-ku, Sendai, Miyagi Co., Ltd. Makabe Giken (72) Inventor Shoji Omura 3-1-25-1 Kutake, Miyagino-ku, Sendai City, Miyagi Prefecture F-term (reference) 4K017 AA04 BA01 BB05 BB06 BB14 CA01 DA05 EB07 EB21 FA03 FA21

Claims (5)

[Claims] An orifice of an orifice plate having one or more orifices is connected to a piezoelectric actuator for generating a predetermined pulse pressure from a molten metal (molten metal) melted in a vessel having a heating device. The droplets are sprayed as droplets toward a recovery section having an inert atmosphere for spheroidizing the droplets, and are cooled at a cooling rate higher than the critical cooling rate in the inert gas atmosphere of the recovery section. And producing the metallic glass spheres. 2. A metal glass sphere manufactured by the manufacturing method according to claim 1, wherein a variation in diameter between the metal glass spheres is within ± 10%. 3. The metallic glass sphere according to claim 2, wherein the variation in the diameter of each metallic glass sphere is within ± 2%. 4. A molten metal container for storing molten metal, a heating device provided on an outer periphery of the molten metal container,
A diaphragm in close contact with the molten metal container, an orifice plate having one or more orifices provided at the bottom of the molten metal container, a piezoelectric actuator for generating a predetermined pulse pressure, and a pulse pressure of the piezoelectric actuator. A transmission rod for transmitting to the diaphragm;
A recovery unit which is located below the orifice plate and has an inert gas atmosphere for cooling and spheroidizing the liquid droplets. The pulse pressure of the piezoelectric actuator causes the liquid to pass through the transmission rod and the diaphragm. An apparatus for manufacturing a metallic glass sphere, wherein the molten metal is ejected from an orifice into the inert gas of the recovery section as droplets. 5. The apparatus according to claim 4, wherein the heating device comprises a carbon susceptor and a work coil.