JP2001287104A - COVERED cBN-CONTAINING SINTERED BODY CUTTING TOOL - Google Patents

COVERED cBN-CONTAINING SINTERED BODY CUTTING TOOL

Info

Publication number
JP2001287104A
JP2001287104A JP2000102327A JP2000102327A JP2001287104A JP 2001287104 A JP2001287104 A JP 2001287104A JP 2000102327 A JP2000102327 A JP 2000102327A JP 2000102327 A JP2000102327 A JP 2000102327A JP 2001287104 A JP2001287104 A JP 2001287104A
Authority
JP
Japan
Prior art keywords
cbn
sintered body
containing sintered
aluminum oxynitride
cutting tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000102327A
Other languages
Japanese (ja)
Inventor
Masaki Kobayashi
正樹 小林
Masaichi Onizuka
政一 鬼塚
Naohiro Kagawa
直弘 香川
Haruhiko Sei
晴彦 清
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tungaloy Corp
Original Assignee
Toshiba Tungaloy Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Tungaloy Co Ltd filed Critical Toshiba Tungaloy Co Ltd
Priority to JP2000102327A priority Critical patent/JP2001287104A/en
Publication of JP2001287104A publication Critical patent/JP2001287104A/en
Pending legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/52Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Powder Metallurgy (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a cutting tool excellent in abrasive resistance as compared with a conventional cBN-containing sintered body tool in cutting quenched steel of a high-hardness material. SOLUTION: A surface relating to the cutting of the cBN-containing sintered body containing 25-99 vol.% of cBN is covered with one or more layers containing aluminum oxynitride. Each of the aluminum oxynitride layers is formed of an Al-O-N solid solution, an Al-O-N compound or a mixture of both of them, and AIN may additionally be mixed to it. The thickness of one of the aluminum oxynitride layers is 0.5-10 μm, and is used as the first layer for tightly fitting the aluminum oxynitride layer to the cBN-containing sintered body even for a multi-layer film. The cBN-containing sintered body hardly causes plastic deformation under high temperature, and is suitable for the covering base material of the high-hardness material cutting tool. The tool having excellent abrasive resistance in machining the high-hardness material can be provided by covering it with the aluminum oxynitride layer having excellent adhesion to the cBN-containing sintered body and excellent abrasive resistance.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明はcBN含有焼結体上に
酸窒化アルミニウム層を被覆した切削工具に関し、特に
cBN含有焼結体と被覆層との密着強度が向上し、被覆層
が高い耐摩耗性を持つ酸窒化アルミニウム層被覆cBN含
有焼結体切削工具に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cutting tool in which a cBN-containing sintered body is coated with an aluminum oxynitride layer,
The present invention relates to a cutting tool for a cBN-containing sintered body coated with an aluminum oxynitride layer, in which the adhesion strength between the cBN-containing sintered body and the coating layer is improved and the coating layer has high wear resistance.

【0002】[0002]

【従来の技術】高硬度鋼加工用工具として、cBN含有焼
結体切削工具の使用が増加してきている。近年加工速度
の高速化に伴い、cBN含有焼結体工具の耐摩耗性向上の
必要が出てきた。この解決手段として、cBN含有焼結体
上への硬質膜被覆がある。cBN含有焼結体上への硬質膜
被覆として、Al2O3,TiN,(TiAl)N等が知られている
が、Al2O3はcBN含有焼結体との結合力が弱い問題点があ
る。また、TiN,(TiAl)Nは高硬度鋼加工における耐
摩耗性が不十分である。酸窒化アルミニウム膜を超硬合
金、セラミックス上に被覆した工具も知られているが、
高硬度鋼加工では、母材の耐塑性変形性が不十分であ
る。
2. Description of the Related Art The use of cBN-containing sintered compact cutting tools has increased as a tool for machining high-hardness steel. In recent years, with the increase in processing speed, it has become necessary to improve the wear resistance of sintered tools containing cBN. As a solution to this, there is a hard film coating on the cBN-containing sintered body. Al 2 O 3 , TiN, (TiAl) N, etc. are known as hard film coatings on cBN-containing sintered bodies, but Al 2 O 3 has a weak bonding force with cBN-containing sintered bodies. There is. Further, TiN and (TiAl) N have insufficient wear resistance in machining hardened steel. Tools with aluminum oxynitride film coated on cemented carbide and ceramics are also known,
In hardened steel processing, the plastic deformation resistance of the base material is insufficient.

【0003】[0003]

【発明の解決しようとする課題】cBN含有焼結体上へのA
l2O3膜被覆の発明として特開昭59−8679号公報に
提案されているが、cBN含有焼結体に直接Al2O3を被覆す
ると、十分な密着強度が得られない。そこで特開平10
−227610号公報では、cBN含有焼結体のバインダ
ーとしてAl2O3を配合する提案がされているが、バイン
ダーとしてAl2O3を添加することにより、cBN含有焼結体
の物性、特に強度が低下してしまう問題がある。
SUMMARY OF THE INVENTION A on cBN-containing sintered body
Japanese Patent Application Laid-Open No. S59-8679 proposes an invention of l 2 O 3 film coating. However, if Al 2 O 3 is directly coated on a cBN-containing sintered body, sufficient adhesion strength cannot be obtained. Therefore, Japanese Patent Application Laid-Open
JP-A-227610 proposes to mix Al 2 O 3 as a binder for the cBN-containing sintered body, but by adding Al 2 O 3 as a binder, the physical properties of the cBN-containing sintered body, particularly the strength, Is reduced.

【0004】また、特開平10−086002号公報,
特開平05−043323号公報では、超硬合金及びセ
ラミックス上への酸窒化アルミニウム膜被覆が提案され
ているが、母材との結合力が弱いため被覆層が剥離して
しまうことや、高硬度鋼の高速加工では母材が塑性変形
してしまう問題がある。本発明は上記問題を解決し、高
硬度鋼切削で耐摩耗性に優れる工具を提供する。
[0004] Also, Japanese Patent Application Laid-Open No. 10-086002,
Japanese Patent Application Laid-Open No. 05-043323 proposes coating of an aluminum oxynitride film on a cemented carbide and ceramics. In high-speed processing of steel, there is a problem that the base material is plastically deformed. The present invention solves the above problems and provides a tool having excellent wear resistance in cutting hardened steel.

【0005】[0005]

【課題を解決する手段】本発明はcBNを体積で25〜9
9%含有するcBN含有焼結体上に、1層以上の酸窒化ア
ルミニウム層を含む硬質被膜を被覆することにより、優
れた密着性と耐摩耗性を兼ね備えた切削工具が得られた
ものである。cBN含有焼結体上へ隣接する被覆層として
の酸窒化アルミニウムは、Al2O3と比較してcBN含有焼結
体との密着性に優れ、Al2O3に匹敵する耐酸化性と耐摩
耗性を持ち、Al2O3より高い熱伝導性と耐熱衝撃性を持
つことが明らかとなり、特に高硬度鋼の切削に対して優
れた切削性能を有する。
According to the present invention, cBN is contained in an amount of 25 to 9 by volume.
By coating a hard coating containing at least one aluminum oxynitride layer on a cBN-containing sintered body containing 9%, a cutting tool having both excellent adhesion and wear resistance was obtained. . aluminum nitride as a coating layer adjacent to the cBN content sintered body on the excellent adhesion to the cBN content sintered body as compared with Al 2 O 3, oxidation resistance and comparable to Al 2 O 3 It is clear that it has abrasion, has higher thermal conductivity and thermal shock resistance than Al 2 O 3 , and has excellent cutting performance especially for cutting hardened steel.

【0006】酸窒化アルミニウムは、耐摩耗性の点か
ら、酸化アルミニウムに窒素が1原子%以上固溶したAl
-O-N固溶体もしくはAl23O27N5、Al2O2N、Al9O3N7などの
AlxOyNzで表される化合物と限定した。場合によって
は、AlNを50%以下含有させることにより、より熱
伝導性が優れた被膜が得られ、刃先で発生する切削熱を
速やかに放熱し易くなる。酸窒化アルミニウム層1層あ
たりの厚さは0.5μm未満では密着性の点では十分である
が、所望の耐摩耗性が得られず、10μmより厚い場合は
被膜の面粗さの増大や靭性の低下が顕著になるため、1
層あたりの厚さを0.5〜10μmと限定した。また、被覆
層全体としては、0.5μmより薄い場合は所望の耐摩耗性
が得られず、50μmより厚い場合は被膜応力の増大に
より工具全体が脆化するため0.5〜50μmと限定し
た。
[0006] Aluminum oxynitride is an aluminum oxide containing 1 atomic% or more of nitrogen in aluminum oxide from the viewpoint of wear resistance.
-ON solid solution or Al 23 O 27 N 5 , Al 2 O 2 N, Al 9 O 3 N 7 etc.
Limited to compounds represented by AlxOyNz. In some cases, by containing 50% or less of AlN, a coating having better thermal conductivity can be obtained, and the cutting heat generated at the cutting edge can be easily radiated quickly. If the thickness per aluminum oxynitride layer is less than 0.5 μm, the adhesion is sufficient, but the desired wear resistance cannot be obtained. If the thickness is more than 10 μm, the surface roughness and toughness of the coating increase. Since the decrease is remarkable, 1
The thickness per layer was limited to 0.5-10 μm. When the thickness of the coating layer is less than 0.5 μm, the desired wear resistance cannot be obtained. When the thickness is more than 50 μm, the coating stress increases and the entire tool becomes brittle, so that the thickness is limited to 0.5 to 50 μm.

【0007】更に耐摩耗性を向上させるために複数膜構
造とし、cBN含有焼結体表面に隣接して酸窒化アルミニ
ウム層を被覆することにより、外層膜と強固に密着した
下地層としての働きを持つ。酸窒化アルミニウム層とcB
N含有焼結体は、酸窒化アルミニウム層に含まれる窒素
原子が、cBN含有焼結体の含有成分であるcBN砥粒及びバ
インダー中の金属の窒化物が共に共有結合であってかつ
窒化物であるために、成膜時の核発生因子として働き、
酸窒化アルミニウム層とcBN含有焼結体が密着するが、
焼結体中にAlN、Al-O-Nの少なくとも1種を含むことによ
り、さらに強固に密着することが明らかとなった。
In order to further improve abrasion resistance, a multi-layer structure is formed, and an aluminum oxynitride layer is coated adjacent to the surface of the cBN-containing sintered body to function as an underlayer which is firmly adhered to the outer layer film. Have. Aluminum oxynitride layer and cB
In the N-containing sintered body, the nitrogen atoms contained in the aluminum oxynitride layer are covalently bonded to the cBN abrasive grains, which are the components contained in the cBN-containing sintered body, and the nitride of the metal in the binder. Because it acts as a nucleation factor during film formation,
The aluminum oxynitride layer and the cBN-containing sintered body adhere to each other,
It was clarified that the inclusion of at least one of AlN and Al-ON in the sintered body further firmly adhered.

【0008】被膜は複層とすることにより広い切削領域
に適用でき、具体的には、Al2O3,TiCN,TiB2、AlN、Ti
C、TiN、TiCNO、(Ti,Al)N、(Ti,Al)CN、(Ti,Al)
CNOの少なくとも1種もしくは2種以上を被覆する。よ
り高速領域で耐摩耗性が要求される場合はAl2O3が望ま
しく、0.1μmより薄くては所望の耐摩耗性と耐酸化性が
得られず、40μmより厚い場合は被膜全体が脆くなるた
め、0.1〜40μmと定めた。以下に本発明の実施例を示
す。
The coating can be applied to a wide cutting area by forming a multilayer, and specifically, Al 2 O 3 , TiCN, TiB 2 , AlN, Ti
C, TiN, TiCNO, (Ti, Al) N, (Ti, Al) CN, (Ti, Al)
At least one or two or more CNOs are coated. When wear resistance is required in a higher speed region, Al 2 O 3 is desirable.If the thickness is less than 0.1 μm, the desired wear resistance and oxidation resistance cannot be obtained, and if the thickness is greater than 40 μm, the entire coating becomes brittle. Therefore, it was set to 0.1 to 40 μm. Hereinafter, examples of the present invention will be described.

【0009】[0009]

【実施例1】cBN含有量が体積比で65%,残部がTiNと
Alである原料を6GPa,1773Kで焼結したcBN含有焼
結体を被覆母材として使用し、熱CVD法により、Al2O
3膜、AlxOyNz膜を作製し、切削試験により評価を行っ
た。被削材はHRc60のSKD11を使用し、一部断続を含む
乾式旋削試験を実施した。各膜の成膜条件を表1に示
す。
[Example 1] The cBN content was 65% by volume and the balance was TiN.
Raw material 6GPa is Al, the sintered cBN containing sintered body used as a covering matrix at 1773K, by a thermal CVD method, Al 2 O
Three films and an AlxOyNz film were prepared and evaluated by a cutting test. As the work material, SKD11 of HRc60 was used, and a dry turning test including partly interrupted was performed. Table 1 shows the film forming conditions for each film.

【0010】[0010]

【表1】各種被膜の成膜ガス条件 単位は体積%[Table 1] Deposition gas conditions for various coatings The unit is volume%

【0011】成膜温度は1273Kで、成膜厚さ3μm
となるように成膜時間を調整した。得られた被膜は、オ
ージェ分光分析、X線回折分析により分析を行い、AlxOy
Nz膜(1)はNを2原子%含むAl2O3(N)であり、AlxOy
Nz膜(2)はNを9原子%含むAl23O27N5であり、AlxO
yNz膜(3)はNを28原子%のNを含むAl9O3N7とAl2
O2Nの混合物と確認された。得られた硬質膜被覆工具と
比較として被覆前の工具について切削試験を実施した。
結果を表2に示す。
The film formation temperature is 1273 K, and the film thickness is 3 μm.
The film forming time was adjusted so that The obtained coating was analyzed by Auger spectroscopy and X-ray diffraction analysis, and AlxOy
The Nz film (1) is Al 2 O 3 (N) containing 2 atomic% of N, and AlxOy
The Nz film (2) is Al 23 O 27 N 5 containing 9 atomic% of N, and AlxO
The yNz film (3) is composed of Al 9 O 3 N 7 containing 28 atomic% of N and Al 2
Identified as a mixture of O 2 N. A cutting test was performed on the tool before coating as a comparison with the obtained hard film-coated tool.
Table 2 shows the results.

【0012】[0012]

【表2】 切削条件:V=180m/min,d=0.15mm,f=0.
07mm,切削時間20min
[Table 2] Cutting conditions: V = 180 m / min, d = 0.15 mm, f = 0.
07mm, cutting time 20min

【0013】表2の結果よりAl2O3膜と比較して、酸窒
化アルミニウム層(特にAlxOyNz膜(1),AlxOyNz膜
(2))は母材のcBN含有焼結体との密着性に優れ、
被覆なし品と比較して大幅な耐摩耗性向上が可能となっ
た。
From the results shown in Table 2, the aluminum oxynitride layers (particularly, AlxOyNz films (1) and AlxOyNz films (2)) have better adhesion to the cBN-containing sintered body of the base material than the Al 2 O 3 film. Excellent,
Abrasion resistance can be greatly improved compared to uncoated products.

【0014】[0014]

【実施例2】cBN含有量が体積比で65%,残部がTiNと
Alである原料を6GPa,1773Kで焼結したcBN含有焼
結体を被覆母材として使用し、熱CVD法により、Al2O
3膜、Al 2O3膜とcBN含有焼結体の間にAl-O-N固溶体膜を
中間層として被覆したものとの比較切削試験により評価
を行った。被削材はHRc60のSKD11を使用し、一部断続
を含む乾式旋削試験を実施した。成膜条件は表1に準ず
るが、膜全体の厚さを同じとするため、Al2O3膜は3μ
m、AlxOyNz膜(2)+Al2O3膜は:AlxOyNz膜
(2):0.5μm,Al2O3膜:2.5μmとした。得
られた硬質膜被覆工具と比較として被覆前の工具につい
て切削試験を実施した。結果を表3に示す。
Example 2 The cBN content was 65% by volume and the balance was TiN.
CBN-containing sintering sintered Al material at 6GPa, 1773K
Using the binder as a coating base material, thermal CVDTwoO
ThreeFilm, Al TwoOThreeAl-O-N solid solution film between film and cBN-containing sintered body
Evaluated by comparative cutting test with that coated as an intermediate layer
Was done. Work material uses SKD11 of HRc60, and partly intermittent
A dry turning test was carried out. The film formation conditions are based on Table 1.
However, to make the thickness of the entire film the same,TwoOThreeThe membrane is 3μ
m, AlxOyNz film (2) + AlTwoOThreeFilm: AlxOyNz film
(2): 0.5 μm, AlTwoOThreeFilm: 2.5 μm. Profit
Tool before coating as a comparison with
A cutting test was performed. Table 3 shows the results.

【0015】[0015]

【表3】 切削条件:V=180m/min,d=0.15mm,f=0.
07mm,切削時間20min
[Table 3] Cutting conditions: V = 180 m / min, d = 0.15 mm, f = 0.
07mm, cutting time 20min

【0016】表3の結果より、酸窒化アルミニウム層は
cBN含有焼結体とAl2O3膜との密着中間層としても有効に
働くことが分かる。
From the results shown in Table 3, the aluminum oxynitride layer is
It can be seen that it works effectively also as an adhesion intermediate layer between the cBN-containing sintered body and the Al 2 O 3 film.

【0017】[0017]

【実施例3】cBN含有量が体積比で65%,AlN2%、残
部がTiNとAlである原料と、Al2O2N5%,残部がTiNとAl
である原料を6GPa,1773Kで焼結したcBN含有焼結
体を被覆母材として使用し、熱CVD法により、Al2O3
膜、AlxOyNz膜(2)、AlxOyNzを作製し、切削試験に
より評価を行った。被削材はHRc60のSKD11を使用し、
一部断続を含む乾式旋削試験を実施した。成膜温度は1
273Kで、成膜厚さ3μmとなるように成膜時間を調
整した。得られた硬質膜被覆工具と比較として被覆前の
工具について切削試験を実施した。結果を表4に示す。
Embodiment 3 A raw material having a cBN content of 65% by volume, AlN 2%, and the balance TiN and Al, and Al 2 O 2 N 5%, the balance being TiN and Al
A cBN-containing sintered body obtained by sintering the raw material at 6 GPa and 1773 K is used as a coating base material, and Al 2 O 3
A film, an AlxOyNz film (2) and an AlxOyNz were prepared and evaluated by a cutting test. The work material uses SKD11 of HRc60,
Dry turning tests including some intermittent operations were performed. The deposition temperature is 1
At 273K, the film formation time was adjusted so that the film thickness was 3 μm. A cutting test was performed on the tool before coating as a comparison with the obtained hard film-coated tool. Table 4 shows the results.

【0018】[0018]

【表4】 加工条件:V=180m/min,d=0.15mm,f=0.
07mm,加工時間20min
[Table 4] Processing conditions: V = 180 m / min, d = 0.15 mm, f = 0.
07mm, processing time 20min

【0019】cBN含有焼結体のバインダーにAlN 、或い
はAl2O2Nが含まれることにより、cBN含有焼結体自体の
耐摩耗性は多少損なわれるようであるが、被覆膜との密
着性は良好であり、AlxOyNz膜(2)を被覆した場合は
更に耐摩耗性が向上する。副次的効果として、Al2O3
とcBN含有焼結体との密着性も向上している。
Although the binder of the cBN-containing sintered body contains AlN or Al 2 O 2 N, the abrasion resistance of the cBN-containing sintered body itself seems to be somewhat impaired. The abrasion resistance is further improved when the AlxOyNz film (2) is coated. As a secondary effect, the adhesion between the Al 2 O 3 film and the cBN-containing sintered body is also improved.

【0020】[0020]

【実施例4】cBN含有量が体積比で65%,残部がTiNと
Alである原料を6GPa,1773Kで焼結したcBN含有焼
結体を被覆母材として使用し、熱CVD法により、0.
5μmのAlxOyNz膜(2)を作製し、その上に2.5μ
mのAl2O3膜を被覆した基板に対して、熱CVD法にてT
iNを1μm被覆したものと、Al2O3膜とTiNの間に0.5
μmのAlxOyNz膜(2)を被覆した試料について切削試
験により評価を行った。被削材はHRc60のSKD11を使用
し、一部断続を含む乾式旋削試験を実施した。結果を表
5に示す。
Example 4 The cBN content was 65% by volume and the balance was TiN.
A cBN-containing sintered body obtained by sintering a raw material of Al at 6 GPa and 1773 K is used as a coating base material, and is subjected to a thermal CVD method to obtain a 0.1 g / m 2.
A 5 μm AlxOyNz film (2) is formed, and a 2.5 μm
The substrate coated with the Al2O3
iN coated at 1 μm and 0.5 μm between Al 2 O 3 film and TiN
A sample coated with a μm AlxOyNz film (2) was evaluated by a cutting test. As the work material, SKD11 of HRc60 was used, and a dry turning test including partly interrupted was performed. Table 5 shows the results.

【0021】[0021]

【表5】 加工条件:V=180m/min,d=0.15mm,f=0.
07mm,加工時間20min
[Table 5] Processing conditions: V = 180 m / min, d = 0.15 mm, f = 0.
07mm, processing time 20min

【0022】表5の結果のようにAl2O3膜とTiN膜間の密
着性向上にも酸窒化アルミニウム層は有効である。
As shown in Table 5, the aluminum oxynitride layer is also effective for improving the adhesion between the Al 2 O 3 film and the TiN film.

【0023】[0023]

【実施例5】実施例4まではCVD装置を用いたテスト
であるが、実施例5ではPVD装置によりcBN含有焼結
体上へのAl-O-N膜被覆を行った。装置はアンバランスト
マグネトロン スパッタリンク型のPVDを用い、Al2O3
ターゲット、0.1Torrのアルゴン/窒素の混合雰囲気下
で3時間成膜を行ったところ、cBN含有焼結体上に4
μmのAl-O-N膜が被覆した。被覆できたAl-O-N膜はAl23
O27Nの化学式を持つγALONを5原子%含むAl2O3であ
る。
Embodiment 5 The tests up to Example 4 are tests using a CVD apparatus, but in Example 5, an Al-ON film was coated on a cBN-containing sintered body by a PVD apparatus. The equipment uses unbalanced magnetron sputter-link type PVD, and Al 2 O 3
When a film was formed for 3 hours in a target atmosphere of 0.1 Torr of argon / nitrogen, 4 g of a film were formed on the cBN-containing sintered body.
A μm Al-ON film was coated. The coated Al-ON film is Al 23
Al 2 O 3 containing 5 atomic% of γALON having a chemical formula of O 27 N.

【0024】[0024]

【発明の効果】cBN含有焼結体上に酸窒化アルミニウム
層を被覆することにより、基材と被覆層が強固に密着し
た硬質膜被覆cBN含有焼結体工具が得られ、高硬度鋼な
どの加工で優れた工具寿命を得ることができた。酸窒化
アルミニウム層をcBN含有焼結体と上部被覆層との間に
中間層として被覆することにより、上部被覆層と、cBN
含有焼結体間の耐剥離性を大幅に向上することが出来、
高硬度鋼などの加工で優れた工具寿命を得ることができ
た。
By coating an aluminum oxynitride layer on a cBN-containing sintered body, a hard-film-coated cBN-containing sintered body tool in which the base material and the coating layer are firmly adhered to each other can be obtained. Excellent tool life was obtained by machining. By coating the aluminum oxynitride layer as an intermediate layer between the cBN-containing sintered body and the upper coating layer, the upper coating layer, cBN
The peeling resistance between the contained sintered bodies can be greatly improved,
Excellent tool life was obtained by machining hardened steel.

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) C22C 29/04 C22C 29/04 29/10 29/10 29/12 29/12 29/14 29/14 Z 29/16 29/16 G H C23C 8/24 C23C 8/24 (72)発明者 清 晴彦 神奈川県川崎市幸区堀川町580番地 ソリ ッドスクエア 東芝タンガロイ株式会社内 Fターム(参考) 3C046 FF02 FF10 FF13 FF16 FF25 FF35 HH06 4K018 AD15 BA08 BA11 DA11 FA24 KA15 4K028 AA02 AB04 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI theme coat ゛ (Reference) C22C 29/04 C22C 29/04 29/10 29/10 29/12 29/12 29/14 29/14 Z 29/16 29/16 GH C23C 8/24 C23C 8/24 (72) Inventor Haruhiko Kiyo 580 Horikawa-cho, Saiwai-ku, Kawasaki-shi, Kanagawa Solid Square Toshiba Tungaloy Co., Ltd. F-term (reference) 3C046 FF02 FF10 FF13 FF16 FF25 FF35 HH06 4K018 AD15 BA08 BA11 DA11 FA24 KA15 4K028 AA02 AB04

Claims (8)

【特許請求の範囲】[Claims] 【請求項1】cBNを25〜99体積%含有するcBN含有焼
結体上に全膜厚1〜50μmの単層もしくは2層以上の
多層膜を被覆し、少なくとも1層が0.5〜10μmの
酸窒化アルミニウム層であることを特徴とする被覆cBN
含有焼結体切削工具
A cBN-containing sintered body containing 25 to 99% by volume of cBN is coated with a single layer or a multilayer film having two or more layers having a total thickness of 1 to 50 μm, and at least one layer has a thickness of 0.5 to 10 μm CBN characterized by being an aluminum oxynitride layer
Containing sintered body cutting tool
【請求項2】上記の酸窒化アルミニウム層はNの固溶量
が1原子%以上であるAl-O-N固溶体若しくはAlxOyNz
の組成を持つAl-N-O化合物もしくは両者の混合物である
ことを特徴とする特許請求の範囲1項記載の被覆cBN含有
焼結体切削工具
2. The aluminum oxynitride layer according to claim 1, wherein the solid solution of N is 1 atomic% or more in an Al-ON solid solution or AlxOyNz.
The coated cBN-containing sintered body cutting tool according to claim 1, wherein the cutting tool is an Al-NO compound or a mixture of both.
【請求項3】上記固溶体、化合物、混合物に50体積%
以下のAlNを含有することを特徴とする請求項1、2項
記載の被覆cBN含有焼結体切削工具
3. 50% by volume of the solid solution, compound and mixture.
The coated cBN-containing sintered compact cutting tool according to claim 1, comprising the following AlN.
【請求項4】上記酸窒化アルミニウム層がcBN含有焼結
体上に隣接して被覆されたことを特徴とする請求項1,
2、3項記載の被覆cBN含有焼結体切削工具
4. The method according to claim 1, wherein the aluminum oxynitride layer is coated adjacently on the cBN-containing sintered body.
Cutting tool for coated sintered body containing coated cBN according to item 2 or 3.
【請求項5】上記cBN含有焼結体中はAlN、Al-O-Nの少な
くとも1種を0.1〜30体積%含むことを特徴とする
請求項1、2、3、4項記載の被覆cBN含有焼結体切削
工具
5. The coated cBN according to claim 1, wherein said cBN-containing sintered body contains at least one of AlN and Al-ON in an amount of 0.1 to 30% by volume. Containing sintered body cutting tool
【請求項6】最外層が0.1〜40μmのAl2O3膜から
なり、cBN含有焼結体とAl2O3膜の間に酸窒化アルミニウ
ム層を被覆したことを特徴とする請求項1、2、3、
4、5項のいずれかに記載した被覆cBN含有焼結体切削
工具
6. An aluminum oxynitride layer between the cBN-containing sintered body and the Al 2 O 3 film, wherein the outermost layer comprises an Al 2 O 3 film having a thickness of 0.1 to 40 μm. 1, 2, 3,
4. A cutting tool for a sintered body containing coated cBN according to any one of items 4 and 5.
【請求項7】上記多層膜において、酸窒化アルミニウム
層以外の膜がAl2O3、TiCN、TiB2,AlN,TiC,TiN,TiCNO,(T
i,Al)N、(Ti,Al)CN、(Ti,Al)CNOからなる請求
項1、2、3、4、5、6項のいずれかに記載した被覆
cBN含有焼結体切削工具
7. In the multilayer film, the film other than the aluminum oxynitride layer is made of Al 2 O 3 , TiCN, TiB 2 , AlN, TiC, TiN, TiCNO, (T
The coating according to any one of claims 1, 2, 3, 4, 5, and 6, comprising (i, Al) N, (Ti, Al) CN, and (Ti, Al) CNO.
cBN-containing sintered cutting tool
【請求項8】上記多層膜において酸窒化アルミニウム層
とAl2O3,TiCN,TiB2、AlN、TiC、TiN、TiCNO、(Ti,A
l)N、(Ti,Al)CN、(Ti,Al)CNOの少なくとも1種
が交互に積層された特許請求の範囲1、2、3、4、
5、6、7項記載の被覆cBN含有焼結体切削工具
8. An aluminum oxynitride layer and Al 2 O 3 , TiCN, TiB 2 , AlN, TiC, TiN, TiCNO, (Ti, A
1) Claims 1, 2, 3, 4, wherein at least one of N, (Ti, Al) CN, and (Ti, Al) CNO are alternately laminated.
The coated cBN-containing sintered body cutting tool according to any one of claims 5, 6, and 7.
JP2000102327A 2000-04-04 2000-04-04 COVERED cBN-CONTAINING SINTERED BODY CUTTING TOOL Pending JP2001287104A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000102327A JP2001287104A (en) 2000-04-04 2000-04-04 COVERED cBN-CONTAINING SINTERED BODY CUTTING TOOL

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000102327A JP2001287104A (en) 2000-04-04 2000-04-04 COVERED cBN-CONTAINING SINTERED BODY CUTTING TOOL

Publications (1)

Publication Number Publication Date
JP2001287104A true JP2001287104A (en) 2001-10-16

Family

ID=18616227

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP2001287104A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015182208A (en) * 2014-03-26 2015-10-22 三菱マテリアル株式会社 surface-coated cutting tool
CN110100046A (en) * 2017-01-26 2019-08-06 瓦尔特公开股份有限公司 Coated cutting tool
WO2022195054A1 (en) 2021-03-18 2022-09-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Aln-based hard material layer on bodies of metal, hard metal, cermet or ceramics, and method for the production thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015182208A (en) * 2014-03-26 2015-10-22 三菱マテリアル株式会社 surface-coated cutting tool
CN110100046A (en) * 2017-01-26 2019-08-06 瓦尔特公开股份有限公司 Coated cutting tool
WO2022195054A1 (en) 2021-03-18 2022-09-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Aln-based hard material layer on bodies of metal, hard metal, cermet or ceramics, and method for the production thereof
DE102021106674A1 (en) 2021-03-18 2022-09-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein AlN-based hard material layer on bodies made of metal, hard metal, cermet or ceramic and method for their production

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