JP2001280848A5 - - Google Patents
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- JP2001280848A5 JP2001280848A5 JP2000097497A JP2000097497A JP2001280848A5 JP 2001280848 A5 JP2001280848 A5 JP 2001280848A5 JP 2000097497 A JP2000097497 A JP 2000097497A JP 2000097497 A JP2000097497 A JP 2000097497A JP 2001280848 A5 JP2001280848 A5 JP 2001280848A5
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- JP
- Japan
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000097497A JP4036598B2 (ja) | 2000-03-31 | 2000-03-31 | 熱処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000097497A JP4036598B2 (ja) | 2000-03-31 | 2000-03-31 | 熱処理装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006302825A Division JP4039491B2 (ja) | 2006-11-08 | 2006-11-08 | 熱処理装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2001280848A JP2001280848A (ja) | 2001-10-10 |
JP2001280848A5 true JP2001280848A5 (hr) | 2006-12-14 |
JP4036598B2 JP4036598B2 (ja) | 2008-01-23 |
Family
ID=18612112
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000097497A Expired - Lifetime JP4036598B2 (ja) | 2000-03-31 | 2000-03-31 | 熱処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4036598B2 (hr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4503397B2 (ja) * | 2004-08-26 | 2010-07-14 | 東京エレクトロン株式会社 | 縦型熱処理装置及びその処理容器急速降温方法 |
CN102466403A (zh) * | 2010-11-05 | 2012-05-23 | 施丽萍 | 推车炉窑 |
CN108704687A (zh) * | 2018-05-03 | 2018-10-26 | 宁波大学 | 一种圆形玻璃纤维滤膜层叠堆放式烘烧皿 |
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2000
- 2000-03-31 JP JP2000097497A patent/JP4036598B2/ja not_active Expired - Lifetime