JP2001277470A - Method and device for screen process printing - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for screen process printing which enables execution of printing of high precision, necessitates no enlargement of a screen plate even when a printed board is large, and also enables printing of a thick film having a uniform thickness. SOLUTION: In the method for screen process printing, ink (12) is applied on a base (1) by a squeegee (5) by using a screen mesh (3) having a magnetic material in a part or the whole thereof, and the screen mesh (3) used for the application of the ink is separated from the base (1) by using a magnet (8). By using the screen mesh (3) having the magnetic material in a part or the whole thereof and the squeegee (7) provided with a magnetic part, besides, the screen process printing of the base (1) is executed, with the squeegee (7) and the screen mesh (3) brought into close contact with each other by the magnetic force of the magnet provided for the squeegee (7).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a resist printing used for wiring and etching of electronic parts, and a screen printing method used for printing a resist used for a powder etching method. The present invention relates to a screen printing method using a screen mesh having a magnetic material on a part or the whole of the screen mesh.

[0002]

2. Description of the Related Art As is well known, in conventional screen printing, as shown in FIG.
A squeegee 25 is usually provided with a gap of 2 to 6 mm between the mesh screen mesh 23 and the substrate 21 to be printed.
After printing on the substrate 21 by using the screen mesh 23, the tension of the screen mesh 23 is used.
And the substrate 21 were separated.

[0003] However, such a conventional method in which a gap is provided between the screen mesh 23 and the substrate 21 for printing and the screen mesh 23 is separated from the substrate 21 by using the tension of the screen mesh 23 is used. In addition, since printing is performed while the screen mesh 23 is extended, it is difficult to perform high-precision printing.

Further, according to the conventional method, as described above, since the screen mesh 23 is separated from the substrate 21 by using the tension of the screen mesh 23, it is necessary to maintain a constant tension on the screen mesh 23. In addition, it is necessary to increase the area of the screen plate more than twice as large as the printing area. As a result, there is a problem that a very large screen plate is required when the size of the printed board itself becomes large.

Further, in the conventional method, since the printing is performed while the screen mesh 23 is extended, the life of the screen plate is short, and the screen plate has to be frequently replaced.

For example, in resist printing such as etching, thick film printing is sometimes performed in order to improve the durability. In the conventional thick film printing, the emulsion thickness of the screen plate is increased, or the sensitivity of the thick film is increased. Plate making using a resin plate was performed by providing a space between the screen mesh and the substrate, but in such a method, for example, when printing a large portion of the printing area, generally, Since the squeegee itself is made of urethane rubber, the ink is thicker beside the pattern, but the center of the pattern tends to be thinner.

That is, in FIG. 7, reference numeral 25 denotes a normal urethane squeegee, reference numeral 21 denotes a substrate, reference numeral 20 denotes a photosensitive resin plate (emulsion), and reference numeral 22 denotes ink. If the emulsion thickness is increased or plate making is performed using a thick photosensitive resin plate, and this screen plate is used to print a thick film with a large printing area using a normal urethane squeegee, As shown in FIG. 7, the screen mesh 23 is pushed by the squeegee 25, and as a result, there is a problem that the edge portion is thick, the center portion is printed thinly, and it is impossible to uniformly print with a thick film.

On the other hand, if a squeegee (26 in FIG. 8) itself is made of a hard material to solve this problem, as shown in FIG.
2, the ink 22 adheres to the screen plate when the screen plate and the substrate to be printed are separated from each other, making it impossible to print thickly. As a result, it is difficult to perform thick film printing uniformly over the entire screen plate. Met.

Therefore, the present invention can perform high-precision printing, and does not need to make a screen plate large even when a printing substrate is large, and can print a thick film with a uniform thickness. It is an object to provide a possible screen printing method.

[0010]

According to a screen printing method of the present invention, ink is applied to a base material by a squeegee using a screen mesh having a magnetic material on a part or the entire surface of the screen mesh, and the ink is applied to the substrate. The method is characterized in that the screen mesh used for the application is separated from the substrate by using a magnet.

As described above, in the present invention, the screen mesh is forcibly pulled up by using the magnet, so that the gap between the screen plate and the base material can be reduced. Can be reduced, and high-precision printing and thick-film printing with a uniform thickness can be realized.

Further, the screen printing method of the present invention uses a squeegee provided with a screen mesh having a magnetic material on a part or the entire surface of the screen mesh and a squeegee provided with a magnetic part. It is characterized in that screen printing is performed on a substrate while the squeegee and the screen mesh are brought into close contact with each other by magnetic force.

As described above, the squeegee is printed by using the screen mesh having the magnetic material on a part or the entire surface of the screen mesh and the squeegee having the magnetic part while the screen mesh is in contact with the squeegee. The screen mesh is not buried in the ink by the magnetic force of the magnet, and as a result, it is possible to perform thick film printing in which the ink is uniformly printed on the base material.

[0014]

[Embodiment 1] A first embodiment of a screen printing method according to the present invention will be described. In the screen printing method according to the present embodiment, a screen mesh having a magnetic material on a part or the entire surface of a screen mesh is described. After the ink is applied to the base material using a squeegee, the screen mesh is separated from the base material by a magnet.

That is, in FIG. 1, reference numeral 1 denotes a substrate for performing screen printing according to the present embodiment, and in FIG. 1, reference numeral 3 denotes a screen mesh. And, as a material of the screen mesh 3, a screen mesh using a magnetic material such as cobalt, nickel, stainless steel having magnetism, nickel or cobalt plating having magnetism on stainless steel having no magnetism,
Alternatively, a screen mesh made of Tetron (registered trademark), nylon, stainless steel or the like having no magnetism and a powder mixed with magnetism mixed with a screen mesh may be used, and a screen mesh having an emulsion portion having magnetism may be used. good.

In FIG. 1, reference numeral 5 denotes a squeegee. In the screen printing method according to the present embodiment, a magnet 8 is arranged on the rear side of the squeegee 5, specifically, on the opposite side of the squeegee 5 in the direction in which it travels. At this time, the magnet 8 is moved together with the squeegee 5.

As described above, in the present embodiment, the screen mesh 3 having a magnetic material on a part or the entire surface of the screen mesh is used, and the magnet 8 is disposed behind the squeegee 5. And squeegee 5
Is applied to the substrate 1 while moving the ink, and the magnetic force of the magnet 8 causes the ink 1
It is possible to lift up the screen mesh 3 which has completed the application of 2.

This method will be described in more detail with reference to FIG. 3. FIG. 3 shows a screen printing apparatus for performing the screen printing method of the present embodiment.

In FIG. 1, reference numeral 2 denotes a substrate suction table 2 for fixing the substrate 1. Above the substrate suction table 2, a magnetic space is provided at an arbitrary distance from the substrate suction table 2. Is provided with a screen plate 3 having a screen mesh 3 having a material having the following on a part or the entire surface of the screen mesh.

Further, in the figure, reference numeral 5 denotes a squeegee movably provided above the screen mesh 3. On the rear side of the squeegee 5 with respect to the traveling direction, a magnet 8 is attached by a magnet mounting portion 9. Are located.

When the screen printing of this embodiment is performed using this screen printing apparatus, first, the substrate 1 to be printed is set on the substrate suction table 2 and the substrate 1 is placed in a vacuum. Fixed to the suction table 2, and
The gap between the screen mesh 3 and the substrate 1 is set arbitrarily.

Next, in this state, the ink 12 is applied to the substrate 1 while moving the squeegee 5 forward, and the magnet 8 is moved together with the squeegee 5 in the same direction as the squeegee 5.

Then, the ink 12 is applied to the substrate 1 by the squeegee 5 to perform printing on the substrate, and the screen mesh 3 of the portion used for printing is removed by the magnetic force of the magnet arranged on the rear side of the squeegee 5. It is possible to raise them sequentially.

As described above, according to this embodiment, since the screen mesh 3 is forcibly lifted not by the pulling force of the screen but by the magnetic force of the magnet 8, the gap between the screen mesh 3 and the substrate is increased. The number can be reduced as compared with the method, and specifically, can be 1 mm or less.

Therefore, by reducing the elongation of the screen mesh 3 during printing, high-precision printing can be performed, and the life of the screen mesh 3 can be extended.

Further, in this embodiment, unlike the conventional method, in order not to use the tensile force of the screen, in order to maintain a constant tension on the screen mesh, the area of the screen mesh is twice or more than the printing area. There is no need to increase the size, and there is no need to increase the size of the screen plate even when the printed board is large.

The magnet 8 may be attached separately from the squeegee at a position rearward with respect to the traveling direction of the squeegee 5, as shown in FIG. 1, or may be integrated with the squeegee 5, as shown in FIG. The screen mesh 3 may be separated from the substrate 1 while printing with the squeegee 5 by incorporating the magnet 8 at a position behind the printing portion of the squeegee 5.

In order to improve the wear resistance of the magnet, a material such as ceramic, metal, rubber, plastic or the like is attached to the surface of the magnet to the extent that it can retain the magnetic force, or the magnet itself is made of these materials. May be coated.

Further, fixing of the substrate 1 to the substrate suction table 2 is as follows.
It is not always necessary to perform the vacuum operation, and the substrate 1 may be fixed to the substrate suction table 2 by another method.

In the above-described embodiment, the screen mesh 3 is made of stainless steel SUS304.
Nickel plating was performed on a 25 mesh screen, and a screen mesh having magnetism was used.

Then, plate making was performed using the electrode pattern on the back plate of the 42-inch plasma display. That is, plate making size 7
Screen stencil making 50mm x 1130mm, printing on glass substrate of 650mm x 1030mm and 3mm thickness using a silver paste made by Namics, simultaneously moving a squeegee and magnet as shown in Fig. 2 Then, the substrate was baked at 520 ° C. to form a wiring pattern on the back plate of the plasma display.

The material of the magnet is neodymium, iron,
A boron magnet was used.

As the printing conditions, the gap between the screen plate and the glass substrate was set to 500 μm, the height of the magnet was set so that there was a gap of 200 μm between the glass substrate and the screen plate, and the moving speed of the squeegee and the magnet was 80 m.
m / sec, the squeegee printing pressure is 0.5 kg / cm2,
After setting the squeegee angle to 70 degrees, a highly accurate electrode wiring pattern was formed on the back plate of the plasma display by the above-described method.

[Embodiment 2] Next, a second embodiment of the screen printing method according to the present invention will be described. In this embodiment, when a thick film printing is performed by screen printing, a material having magnetism is screen meshed. Using a screen mesh having a part or the entire surface of a squeegee and a squeegee having a part having a magnetic force, performing screen printing on a substrate while bringing the squeegee and the screen mesh into close contact with each other by the magnetic force of a magnet provided in the squeegee. It is characterized by.

That is, in FIG. 4, reference numeral 3 denotes a screen mesh. The screen mesh 3 includes cobalt, nickel, stainless steel having magnetism,
Use a screen mesh that uses a magnetic material such as nickel- or cobalt-plated stainless steel that does not have magnetism, or use a screen mesh made of Tetron, nylon, or stainless steel that does not have magnetism. Plate making may be performed using an emulsion obtained by mixing powders, and a screen mesh having an emulsion portion having magnetic properties may be used.

In the figure, reference numeral 7 denotes a squeegee. In this embodiment, the squeegee 7 has a portion having a magnetic force. Specifically, the magnet 8 may be attached to the tip of the squeegee 7, or the squeegee itself may be made of a magnet.

Further, in the figure, reference numeral 10 denotes a photosensitive resin plate (emulsion), and reference numeral 12 denotes ink. Then, in this state, the screen mesh 3 is moved while being in contact with the squeegee 7 and printing is performed.
As a result, the ink is uniformly printed on the substrate 1 without being buried inside the substrate 1.

FIG. 5 is a view for explaining a specific shape of the squeegee 7, and the squeegee 7 used in this embodiment is, as shown in FIG.
A magnet 8 whose front and rear sides with respect to the traveling direction are machined into an acute angle may be attached to the lower end of the magnet, specifically, the portion in contact with the screen mesh 3. While printing 12 on the substrate 1, the magnet 8 at the acute angle portion on the rear side is printed.
Then, the screen mesh 3 can be lifted, and printing can be performed while the screen mesh 3 and the substrate 1 are peeled off by the magnetic force of the magnet 8.

However, the squeegee 7 does not necessarily have to have such a structure, and the squeegee is provided with a portion having a magnetic force. Any structure may be used as long as it allows the above.

In order to improve the wear resistance of the squeegee, a material such as ceramic, metal, rubber, plastic or the like may be stuck to the surface of the magnet to the extent that it can retain the magnetic force, or the magnet itself may be made of these materials. May be coated.

As described above, in the present embodiment, the screen mesh is printed while contacting the screen mesh with the squeegee by using the screen mesh having the magnetic material on a part or the entire surface of the screen mesh and the squeegee having the magnetic force. The screen mesh is not buried in the ink by the magnetic force of the magnet of the squeegee, and as a result, the ink can be uniformly printed on the substrate in a thick film.

Next, a specific example of this embodiment will be described. In this embodiment, a resist pattern is formed by a powder etching method in which a ceramic powder is sprayed onto a substrate at a high speed to physically etch the substrate. Was performed by screen printing.

First, a screen plate was made using a stainless steel SUS430 230 mesh screen mesh. In place of the screen emulsion, plate making was performed using a photosensitive resin plate for screen plate making having a film thickness of 100 μm manufactured by Murakami Co., Ltd.

The squeegee is equipped with a neodymium / iron / boron magnet which is machined so that the front side and the rear side with respect to the traveling direction of the squeegee are formed into acute angles as shown in FIG. Used.

The ink used was an ultraviolet-curable soft urethane rubber-based ink containing urethane acrylate as a main component.

Further, as the printing conditions, the gap between the screen plate and the glass substrate was 500 μm, the moving speed of the squeegee and the magnet was 50 mm / sec, the squeegee printing pressure was 0.5 kg / cm 2, and the squeegee angle was 30 degrees. And

Then, using a 4-inch silicon wafer, the resist was printed under the above-mentioned conditions and then cured by ultraviolet rays. The film thickness after curing was between 100 μm and 115 μm, and a resist layer having a uniform film thickness was formed.

Further, after the resist was cured, alumina particles having an average particle diameter of 25 μm were sprayed on the silicon wafer at a processing pressure of 2 kg / cm 2, and holes having a hole diameter of 300 μm were formed in the silicon wafer.

[0049]

The screen printing method and apparatus of the present invention are implemented in the above-described embodiment, and have the following effects.

According to the present invention, ink is applied to a substrate by a squeegee using a screen mesh having a magnetic material on a part or the entire surface of the screen mesh, and the screen mesh used for applying the ink is magnetized. Is characterized in that the substrate is separated from the substrate by using.

As described above, in the present invention, since the screen mesh is forcibly pulled up by using the magnet, the gap between the screen plate and the substrate can be reduced. In addition to being small, it is possible to realize high-precision printing and thick-film printing with a uniform thickness.

Further, the screen printing method of the present invention uses a screen mesh having a magnetic material on a part or the entire surface of the screen mesh and a squeegee having a magnetic part to form the magnet on the squeegee. It is characterized in that screen printing is performed on a substrate while the squeegee and the screen mesh are brought into close contact with each other by magnetic force.

As described above, the squeegee is printed by using the screen mesh having a magnetic material on a part or the entire surface of the screen mesh and the squeegee having the magnetic part while the screen mesh is in contact with the squeegee. By the magnetic force of the magnet, the screen mesh is not buried in the ink, and as a result, it is possible to perform thick film printing in which the ink is uniformly printed on the substrate.

[Brief description of the drawings]

FIG. 1 is a diagram for explaining a first embodiment of the present invention.

FIG. 2 is a view for explaining another embodiment of the squeegee used in the first embodiment of the present invention.

FIG. 3 is a view for explaining a screen printing apparatus for carrying out the first embodiment of the present invention.

FIG. 4 is a diagram for explaining a second embodiment of the present invention.

FIG. 5 is a view for explaining a squeegee used in a second embodiment of the present invention.

FIG. 6 is a diagram for explaining conventional screen printing.

FIG. 7 is a diagram for explaining a case where thick film printing is performed by conventional screen printing.

FIG. 8 is a diagram for explaining a case where thick film printing is performed by conventional screen printing.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Substrate 2 Substrate suction base 3 Screen mesh 4 Screen plate 5, 7 Squeegee 8 Magnet 9 Magnet mounting part 10 Photosensitive resin plate (emulsion) 12 Ink

Claims (4)

[Claims] In a screen printing method, a squeegee (5) is formed by using a screen mesh (3) having a magnetic material on a part or the whole of the screen mesh.
The ink (12) is applied to the substrate (1) by using the magnet (8), and the screen mesh (3) used for applying the ink (12) is separated from the substrate (1) by using the magnet (8). Screen printing method characterized by going. 2. A screen printing apparatus for carrying out the screen printing method according to claim 1, wherein the substrate suction table (2) is provided above the substrate suction table (2). A screen plate (4) provided with a screen mesh (3) having a magnetic material on a part or the entire surface of the screen mesh, which is provided at an arbitrary interval between the screen mesh (3) and the screen mesh (3). A screen printing apparatus comprising: a squeegee (5) movably provided above the squeegee; and a magnet (8) disposed rearward with respect to the traveling direction of the squeegee (5). 3. A screen printing method, comprising: using a screen mesh (3) having a material having magnetism on a part or the entire surface of the screen mesh and a squeegee (7) having a portion having magnetic force. ), While the squeegee (7) and the screen mesh (3) are brought into close contact with each other by the magnetic force of the magnet provided in (1).
A screen printing method characterized by performing screen printing on a screen. 4. A screen printing apparatus for carrying out the screen printing method according to claim 3, wherein the substrate suction table is provided above the substrate suction table. A screen plate (4) provided with a screen mesh (3) having a magnetic material on a part or the entire surface of the screen mesh, which is provided at an arbitrary interval between the screen mesh (3) and the screen mesh (3). A squeegee (7) movably provided above the squeegee and having a portion having a magnetic force.