JP2001277115A - Reuse system for abrasive grain slurry of wire saw and centrifugal separator thereof - Google Patents

Reuse system for abrasive grain slurry of wire saw and centrifugal separator thereof

Info

Publication number
JP2001277115A
JP2001277115A JP2000098464A JP2000098464A JP2001277115A JP 2001277115 A JP2001277115 A JP 2001277115A JP 2000098464 A JP2000098464 A JP 2000098464A JP 2000098464 A JP2000098464 A JP 2000098464A JP 2001277115 A JP2001277115 A JP 2001277115A
Authority
JP
Japan
Prior art keywords
abrasive
liquid
tank
abrasive grain
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000098464A
Other languages
Japanese (ja)
Other versions
JP3371116B2 (en
Inventor
Genichi Horio
元一 堀尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
E & E Kk
Original Assignee
E & E Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by E & E Kk filed Critical E & E Kk
Priority to JP2000098464A priority Critical patent/JP3371116B2/en
Priority to US09/818,536 priority patent/US6615817B2/en
Priority to KR1020010016758A priority patent/KR100639851B1/en
Priority to EP01303080A priority patent/EP1138439A3/en
Publication of JP2001277115A publication Critical patent/JP2001277115A/en
Application granted granted Critical
Publication of JP3371116B2 publication Critical patent/JP3371116B2/en
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Abstract

PROBLEM TO BE SOLVED: To solve such problems that a conventional constitution is one of supplying a particulate mixed liquid of a first separating means directly to a second separating means, makes separation difficult between an abrasive grain and cutting fluid by generating viscosity in the particulate mixed liquid, and consequently has problems of making efficient separation incapable in the second separating means and easily generating abrasion, damage, etc., and so on. SOLUTION: In this constitution, abrasive grain waste liquid is separation treated into a recycled abrasive grain and fine abrasive grain mixed liquid in a first centrifugal separator 1, the recycled abrasive grain is guided to a recovery abrasive grain tank 25, the fine abrasive grain mixed liquid is guided to a separation liquid tank 27 a new cutting fluid is added to the fine abrasive grain mixed liquid in the separation liquid tank, to be guided to a second centrifugal separator, to be separation treated therein to a waste abrasive grain and recovered cutting fluid, the recovered cutting fluid is guided to a recovery cutting fluid tank, the recovered cutting fluid in the recovery cutting fluid tank is guided to the recovery abrasive grain tank, a new abrasive grain for dilution and the cutting fluid are respectively added to the recovered cutting fluid and the recycled abrasive grain in the recovery abrasive grain tank, recycled abrasive grain mixed cutting fluid is generated and supplied to an abrasive grain supply tank.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、ワイヤソー砥粒スラリーの再利
用システムと、その遠心分離機に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a system for recycling a wire saw abrasive slurry and a centrifugal separator therefor.

【0002】[0002]

【従来の技術】従来、ワイヤソーでは、切削材としての砥粒
と切削液体とを混合した砥粒スラリーを使用する。そして、
昨今、資源の有効利用(切削コストの削減)、又は環境保
全等の面から使用済み砥粒、切削液体を回収、分離して
再利用する状況となっている。これに関連してワイヤソー砥
粒スラリーの再利用を目的とする文献が見当たるので、その
一例を、文献(1)、(2)として説明する。
2. Description of the Related Art Conventionally, in a wire saw, an abrasive slurry obtained by mixing an abrasive as a cutting material and a cutting liquid is used. And
Recently, used abrasives and cutting fluids are collected, separated and reused from the viewpoint of effective use of resources (reduction of cutting cost) or environmental protection. In connection with this, literatures aiming to reuse the wire saw abrasive slurry can be found, and examples thereof will be described as literatures (1) and (2).

【0003】文献(1)は、特開平11-172237号のワイヤソー砥
粒スラリーの再生方法及び装置であり、内容を模式的に説明
すると、下記のようになる。
Document (1) is a method and an apparatus for regenerating a wire saw abrasive slurry disclosed in Japanese Patent Application Laid-Open No. H11-172237, and the contents are schematically described as follows.

【0004】 [0004]

【0005】文献(2)は、特開平11-33913号のワイヤソーの砥
粒循環装置であり、内容を模式的に説明すると、下記の
ようになる。
Reference (2) is a wire saw abrasive circulating apparatus disclosed in Japanese Patent Application Laid-Open No. 11-33913, and its contents are schematically described as follows.

【0006】 [0006]

【0007】[0007]

【発明が解決しようとする課題】前記文献(1)、(2)は、
第1の分離手段の微粒混合液体を直接第2の分離手段に供
給する構成である。この微粒混合液体は、粘性があり、
砥粒と切削液体との分離がしがたい。従って、この微粒
混合液体を直接第2の分離手段に供給すること、この第2
の分離手段での効率的な分離が図れないこと、又は第2
の分離手段のスクリューに対する負荷がかかりやすく、かつス
クリューの摩耗、損傷等が発生し易いこと、等の問題があ
る。
The above-mentioned documents (1) and (2)
This is a configuration in which the fine particle mixed liquid of the first separation means is directly supplied to the second separation means. This fine particle mixed liquid is viscous,
Difficult to separate abrasive grains and cutting liquid. Therefore, this fine particle mixed liquid is directly supplied to the second separation means.
Efficient separation by the separation means cannot be achieved, or
However, there is a problem that a load is easily applied to the screw of the separating means, and the screw is liable to be worn or damaged.

【0008】また文献(1)、(2)は、分離手段のスクリューの
刃先及び回転制御に関して特定の構成を採用しないの
で、刃先の摩耗損傷等の問題、又は負荷に対する処理等
の問題が考えられる。
The documents (1) and (2) do not employ a specific configuration with respect to the cutting edge and rotation control of the screw of the separating means, so that problems such as wear and damage of the cutting edge, and problems such as treatment for load can be considered. .

【0009】[0009]

【課題を解決するための手段】請求項1の発明は、第2の
遠心分離機で効率的な分離を図ること、当該第2の遠心
分離機のスクリューの刃先の摩耗、損傷等を少くすること等
を目的とする。
According to the first aspect of the present invention, efficient separation is achieved by a second centrifuge, and wear, damage, etc. of the cutting edge of the screw of the second centrifuge are reduced. The purpose is to do so.

【0010】請求項1は、砥粒廃液を配管を介して第1の
遠心分離機に導き、当該第1の遠心分離機で再生砥粒と
微砥粒混合液体に分離処理し、この再生砥粒を配管を介
して回収砥粒タンクに導き、前記微砥粒混合液体を配管を
介して分離液タンクに導き、この分離液タンクの微砥粒混合液
体に新規の切削液体を添加しつつ配管を介して第2の遠
心分離機に導き、この第2の遠心分離機で廃棄砥粒と回
収切削液体に分離処理し、この回収切削液体を配管を介
して回収切削液体タンクに導き、この回収切削液体タンクの回
収切削液体を配管を介して前記回収砥粒タンクに導き、こ
の回収砥粒タンクの回収切削液体及び前記再生砥粒に各配
管を介して希釈用の新規の砥粒及び切削液体をそれぞれ
添加して再生砥粒混合切削液体を生成し、この再生砥粒
混合切削液体を配管を介して砥粒供給タンクに供給する構
成としたワイヤソー砥粒スラリーの再利用システムである。
[0010] The first aspect of the present invention is to guide the abrasive waste liquid to a first centrifugal separator via a pipe, and to separate the regenerated abrasive particles and the fine abrasive mixed liquid by the first centrifugal separator. The grains are guided to a collection abrasive tank via a pipe, the fine abrasive mixed liquid is guided to a separated liquid tank via a pipe, and a new cutting liquid is added to the fine abrasive mixed liquid in the separated liquid tank while the piping is added. Through the second centrifugal separator, the second centrifugal separator separates the waste abrasive and the recovered cutting liquid, and then guides the recovered cutting liquid to a recovered cutting liquid tank via a pipe. The collected cutting liquid in the cutting liquid tank is guided to the collected abrasive tank via a pipe, and the collected cutting liquid in the collected abrasive tank and the regenerated abrasive are diluted with new abrasive grains and cutting liquid for dilution via the respective pipes. Are added to each other to produce a regenerated abrasive mixed cutting fluid, and the regenerated abrasive mixed The cutting liquid via a pipe which is reusable system wire saw abrasive grain slurry was configured to be supplied to the abrasive supply tank.

【0011】請求項2の発明は、第1、第2の遠心分離機
の負荷を軽減し、かつスクリューの刃先の摩耗、損傷等を少
くすることを目的とする。
An object of the present invention is to reduce the load on the first and second centrifugal separators and to reduce wear, damage and the like of the cutting edge of the screw.

【0012】請求項2は、ワイヤソー砥粒スラリーの再利用システムに
採用する遠心分離機であって、この遠心分離機は、固形
物排出口と分離液排出口を備えたケーシンク゛と、このケーシンク゛
に介在したスクリューと、このスクリュー内に介在された切削液体
供給管と、このスクリューに開設する前記切削液体供給管と
連通する供給口と、前記スクリューの全刃先に設けた超硬チッフ
゜と、前記スクリューに負荷がかかったときに当該スクリューの回
転速度をコントロールするサーホ゛モーターと、このサーホ゛モーターをコントロール
する制御部とで構成されているワイヤソー砥粒スラリーの再利用シ
ステムに使用する遠心分離機である。
A second aspect of the present invention relates to a centrifugal separator used in a wire saw abrasive slurry recycling system. The centrifugal separator includes a casing having a solid substance discharge port and a separated liquid discharge port, and a casing having a casing discharge port. An interposed screw, a cutting liquid supply pipe interposed in the screw, a supply port opened to the screw and communicating with the cutting liquid supply pipe, a carbide chip provided at all cutting edges of the screw, and the screw This is a centrifugal separator used for a wire saw abrasive slurry recycling system, comprising a servomotor that controls the rotation speed of the screw when a load is applied to the screw, and a control unit that controls the servomotor.

【0013】[0013]

【発明の実施の形態】以下、本発明の実施の形態を説明
する。
Embodiments of the present invention will be described below.

【0014】ワイヤソーより使用済の砥粒廃液が、原液タンクに
導かれる。この原液タンクの砥粒廃液を、第1の配管を介し
て第1の遠心分離機に導き、当該第1の遠心分離機で再生
砥粒と微砥粒混合液体に分離処理する。この第1の遠心
分離機は、スクリューの全刃先に超硬チッフ゜を設けた構成であ
るので、スクリューの刃先の磨耗が少なく、かつ詰りもな
く、確実かつスムースに分離処理が図れる。またこのスクリュー
に負荷がかかったときは、制御部(フィート゛ハ゛ック、コントローラ
ー、検知機などを備える)サーホ゛モーターを介して当該スクリューの
回転速度をコントロールし、この第1の遠心分離機及びスクリューの
故障を防止する。
The used abrasive waste liquid is led from the wire saw to a stock solution tank. The abrasive waste liquid in the stock solution tank is guided to a first centrifugal separator via a first pipe, and the first centrifugal separator separates the regenerated abrasive and fine abrasive mixed liquid. Since the first centrifugal separator has a structure in which the carbide tips are provided on all the cutting edges of the screw, the cutting edge of the screw is less worn, clogged, and separation processing can be performed reliably and smoothly. When a load is applied to this screw, the rotation speed of the screw is controlled via a control unit (equipped with a foot pack, a controller, a detector, etc.) and a surfer motor to prevent the failure of the first centrifuge and the screw. To prevent.

【0015】この分離処理された再生砥粒は、第2の配
管を介して回収砥粒タンクに導かれる。また微砥粒混合液
体は、第3の配管を介して分離液タンクに導かれる。この分
離液タンクは、再生砥粒の回収砥粒タンクに送る量を少なくし
て、後述する回収砥粒タンクへの切屑の混入を少なくして
再生砥粒混合切削液体の品質の確保に有る。
[0015] The separated regenerated abrasive grains are led to a recovered abrasive tank via a second pipe. The fine abrasive mixed liquid is guided to the separation liquid tank via the third pipe. This separation liquid tank is used to reduce the amount of recycled abrasive grains sent to the collected abrasive grain tank, reduce the amount of chips mixed into the collected abrasive grain tank described below, and ensure the quality of the recycled abrasive mixed cutting liquid.

【0016】この分離液タンクの微砥粒混合液体は、第4の
配管を介して第2の遠心分離機に導かれるが、この過程
で微砥粒混合液体に第5の配管を介して新規の切削液体
が供給されて希釈化される。この希釈の目的は、微砥粒
混合液体の粘性を希釈化し、第2の遠心分離機への微砥
粒混合液体の供給量確保と、この第2の遠心分離機での
再生砥粒と回収切削液体との分離促進、及び効率的な分
離を図ることにある。また第2の遠心分離機のスクリューに対
する負荷を軽減し、かつスクリューの摩耗、損傷等の発生を
回避する。さらに前記回収砥粒タンクに送った再生砥粒量
の補充にある。
The fine abrasive mixed liquid in the separated liquid tank is guided to a second centrifugal separator via a fourth pipe. In this process, the fine abrasive mixed liquid is newly added to the fine abrasive mixed liquid via a fifth pipe. Is supplied and diluted. The purpose of this dilution is to dilute the viscosity of the fine abrasive mixed liquid, secure the supply amount of the fine abrasive mixed liquid to the second centrifuge, and regenerate and collect the recycled abrasive in the second centrifuge. An object of the present invention is to promote separation from a cutting liquid and achieve efficient separation. In addition, the load on the screw of the second centrifugal separator is reduced, and the occurrence of wear, damage and the like of the screw is avoided. Further, the present invention is to replenish the amount of the recycled abrasive grains sent to the collected abrasive grain tank.

【0017】この希釈化された微砥粒混合液体を、第2
の遠心分離機で廃棄砥粒と回収切削液体に分離処理し、
この回収切削液体を第7の配管を介して回収切削液体タンク
に導く。
This diluted fine abrasive mixed liquid is
Centrifugal separator to separate waste abrasive and recovered cutting fluid,
The recovered cutting liquid is guided to the recovered cutting liquid tank via the seventh pipe.

【0018】この回収切削液体タンクの回収切削液体を、
第8の配管を介して回収砥粒タンクに導き、この回収砥粒タン
クの再生砥粒と回収切削液体を混合するとともに、第9、
10の配管を介して希釈用の新規の砥粒及び切削液体をそ
れぞれ添加して再生砥粒混合切削液体(再生砥粒切削液
体)を生成する。
The recovered cutting liquid in the recovered cutting liquid tank is
Guided to the collected abrasive tank via the eighth pipe, and mixed with the recycled abrasive and the collected cutting liquid in the collected abrasive tank, the ninth,
A new abrasive grain and a cutting fluid for dilution are respectively added via the 10 pipes to generate a regenerated abrasive mixed cutting fluid (regenerated abrasive cutting fluid).

【0019】この再生砥粒混合切削液体は、第11の配管
を介して砥粒供給タンクに供給し、この砥粒供給タンクから第
12の配管を介してワイヤソーに供給する構成である。
The regenerated abrasive mixed cutting fluid is supplied to an abrasive supply tank via an eleventh pipe, and the abrasive liquid is supplied from the abrasive supply tank to the abrasive supply tank.
It is configured to supply to the wire saw through 12 pipes.

【0020】[0020]

【実施例】本発明のワイヤソー砥粒スラリーの再利用システムに使用
する第1・第2の遠心分離機1、10は、原則として同じ構
成であり、第1の遠心分離機1を主体として説明する。第
1の遠心分離機1は、固形物排出口2aと分離液排出口2bを
備えたケーシンク゛2と、このケーシンク゛2の内筒200に設けた竹の
子形のスクリュー3と、このスクリュー3の刃先3aに設けた超硬チッフ゜
4とこのスクリュー3を駆動するサーホ゛モーター5と、このサーホ゛モーター5
をコントロールする制御部6と、前記スクリュー3内に介在する砥粒
廃液、又は微砥粒混合液体用の供給管7と、この供給管7
の開口7aは、スクリュー3の本体300との隙間を介して当該スクリ
ュー3に開設した開口8と連通する。また供給管7はモーター9を
介して回転されるが、スクリュー3との間に回転差が設けられ
ている。尚、第2の遠心分離機10は、第1の遠心分離機1
に順ずる。
DESCRIPTION OF THE PREFERRED EMBODIMENTS First and second centrifuges 1 and 10 used in the wire saw abrasive slurry recycling system of the present invention have the same configuration in principle, and the first centrifuge 1 will be mainly described. I do. No.
The centrifugal separator 1 includes a casing sink ゛ 2 having a solid matter outlet 2a and a separated liquid outlet 2b, a bamboo shoot screw 3 provided in an inner cylinder 200 of the casing ゛ 2, and a cutting edge 3a of the screw 3. Carbide chip provided
4 and a surf motor 5 for driving the screw 3 and a surf motor 5
And a supply pipe 7 for the abrasive waste liquid or fine abrasive mixed liquid interposed in the screw 3, and the supply pipe 7
The opening 7a communicates with the opening 8 formed in the screw 3 via a gap between the screw 3 and the main body 300. The supply pipe 7 is rotated via a motor 9, but has a rotation difference between the supply pipe 7 and the screw 3. Note that the second centrifuge 10 is the first centrifuge 1
Follow.

【0021】次に全体の構成と、作用を説明すると、ワイ
ヤソー20より使用済の砥粒廃液が、図示しない配管を介し
て原液タンク21に導かれる。この原液タンク21の砥粒廃液を、
第1の配管22及びホ゜ンフ゜23を介して第1の遠心分離機1に導
き、当該第1の遠心分離機1で再生砥粒と微砥粒混合液体
に分離処理し、この再生砥粒は固形物排出口2aより、第
2の配管24を介して回収砥粒タンク25に導かれる。また微砥
粒混合液体は分離液排出口2bより、第3の配管26を介し
て分離液タンク26に導かれる。
Next, the overall structure and operation will be described. The used abrasive waste liquid is led from the wire saw 20 to the stock solution tank 21 via a pipe (not shown). The abrasive waste liquid in the stock solution tank 21 is
The mixture is led to the first centrifugal separator 1 through the first pipe 22 and the phon 23, and is separated into a mixed liquid of regenerated abrasive particles and fine abrasive particles by the first centrifugal separator 1. From the material discharge port 2a
It is led to the collected abrasive tank 25 through the second pipe 24. Further, the fine abrasive mixed liquid is guided to the separated liquid tank 26 from the separated liquid outlet 2b via the third pipe 26.

【0022】この分離液タンク27の微砥粒混合液体は、第4
の配管28及びホ゜ンフ゜29を介して第2の遠心分離機10に導か
れるが、この過程で微砥粒混合液体に第5の配管30を介
して新規の切削液体が供給されて希釈化される。この希
釈の目的は、微砥粒混合液体の粘性を希釈化し、再生砥
粒と回収切削液体との分離を促進し、かつ第2の遠心分
離機10での効率的な分離を図ることにある。また第2の
遠心分離機10のスクリュー3に対する負荷を軽減し、しかもスク
リュー3の摩耗、損傷等の発生を回避する。
The fine abrasive mixed liquid in the separation liquid tank 27 is
Is guided to the second centrifugal separator 10 via the pipe 28 and the horn 29, and in this process, a new cutting liquid is supplied to the fine abrasive mixed liquid via the fifth pipe 30 and diluted. . The purpose of this dilution is to dilute the viscosity of the fine abrasive mixed liquid, promote separation of the regenerated abrasive and the recovered cutting liquid, and achieve efficient separation in the second centrifuge 10. . In addition, the load on the screw 3 of the second centrifugal separator 10 is reduced, and the occurrence of wear, damage and the like of the screw 3 is avoided.

【0023】この希釈化された微砥粒混合液体を、この
第2の遠心分離機10で廃棄砥粒と回収切削液体に分離処
理し、この廃棄砥粒は固形物排出口2aより、第6の配管3
0を介して廃液砥粒タンク32に導かれる。また回収切削液体
は分離液排出口2bより、第7の配管33を介して回収切削
液体タンク34に導く。
The diluted fine abrasive mixed liquid is separated into waste abrasive and recovered cutting liquid by the second centrifugal separator 10, and the waste abrasive is discharged from the solid discharge port 2a through the sixth discharge port. Plumbing 3
The liquid is guided to the waste liquid abrasive grain tank 32 through 0. The recovered cutting liquid is guided from the separated liquid discharge port 2b to the recovered cutting liquid tank 34 via the seventh pipe 33.

【0024】この回収切削液体タンク34の回収切削液体
を、第8の配管35及びホ゜ンフ゜36を介して回収砥粒タンク25に
導き、この回収砥粒タンク25の再生砥粒に回収切削液体を
混合するとともに、第9、10の配管37、38及びホ゜ンフ゜39、
40を介して希釈用の新規の砥粒及び切削液体をそれぞれ
添加して再生砥粒混合切削液体(再生砥粒切削液体)を
生成する。
The collected cutting liquid in the collected cutting liquid tank 34 is guided to the collected abrasive tank 25 through the eighth pipe 35 and the horn 36, and the collected cutting liquid is mixed with the regenerated abrasive in the collected abrasive tank 25. And the ninth and tenth pipes 37 and 38 and the phone 39,
A new abrasive and a cutting fluid for dilution are respectively added via 40 to produce a regenerated abrasive mixed cutting fluid (regenerated abrasive cutting fluid).

【0025】この再生砥粒混合切削液体は、第11の配管
41及びホ゜ンフ゜42を介して砥粒供給タンク43に供給し、この砥
粒供給タンク43から第12の配管44及びホ゜ンフ゜45を介してワイヤソ
ー20に供給する構成である。
The regenerated abrasive mixed cutting liquid is supplied to an eleventh pipe
In this configuration, the abrasive is supplied to the abrasive supply tank 43 via the 41 and the horn 42, and is supplied from the abrasive supply tank 43 to the wire saw 20 via the twelfth pipe 44 and the horn 45.

【0026】尚、前記の各タンクには、必要により、図示
の如く、攪拌翼、液面センサー等を設ける。各配管には、必
要により、図示の如く、流量計、ハ゛イハ゜ス管、各種機能の
弁等を設ける。
Each of the above-mentioned tanks is provided with a stirring blade, a liquid level sensor and the like as necessary, as shown in the figure. Each pipe is provided with a flow meter, a high-pressure pipe, valves having various functions, and the like, as necessary, as shown in the figure.

【0027】[0027]

【発明の効果】請求項1の発明は、砥粒廃液を第1の遠心
分離機に導き、第1の遠心分離機で再生砥粒と微砥粒混
合液体に分離処理し、再生砥粒を回収砥粒タンクに導き、
微砥粒混合液体を分離液タンクに導き、分離液タンクの微砥粒
混合液体に新規の切削液体を添加して第2の遠心分離機
に導き、第2の遠心分離機で廃棄砥粒と回収切削液体に
分離処理し、回収切削液体を回収切削液体タンクに導き、
回収切削液タンクの回収切削液体を回収砥粒タンクに導き、回
収砥粒タンクの回収切削液体及び再生砥粒に希釈用の新規
の砥粒及び切削液体をそれぞれ添加し、再生砥粒混合切
削液体を生成し、再生砥粒混合切削液体を砥粒供給体タン
クに供給する構成としたワイヤソー砥粒スラリーの再利用システムであ
る。従って、砥粒廃液を分離処理し、かつ新規の砥粒及
び切削液体をそれぞれ添加して、再生砥粒と、回収切削
液体として有効利用できる。また第2の遠心分離機で効
率的な分離が図れること、又は第2の遠心分離機のスクリュー
の刃先の摩耗、損傷等を少くできること、等の実益が有
る。
According to the first aspect of the present invention, the abrasive waste liquid is guided to a first centrifugal separator, and the first centrifugal separator separates the regenerated abrasive particles and the fine abrasive mixed liquid, thereby forming the regenerated abrasive particles. Guided to the collection abrasive tank,
The fine abrasive mixed liquid is led to the separation liquid tank, a new cutting liquid is added to the fine abrasive mixed liquid in the separated liquid tank, and the mixture is guided to the second centrifugal separator. Separate the collected cutting liquid and guide the collected cutting liquid to the collected cutting liquid tank.
The collected cutting fluid in the collected cutting fluid tank is led to the collected abrasive tank, and a new abrasive and a cutting fluid for dilution are added to the collected cutting fluid and the regenerated abrasive in the collected abrasive tank, respectively, and the regenerated abrasive mixed cutting liquid is added. And a wire saw abrasive slurry recycling system configured to supply a regenerated abrasive mixed cutting liquid to an abrasive supply tank. Therefore, it is possible to separate the abrasive waste liquid and add a new abrasive and a cutting liquid, respectively, to effectively use the recycled abrasive and the recovered cutting liquid. In addition, there are practical benefits such as efficient separation by the second centrifuge, and reduction of wear and damage of the cutting edge of the screw of the second centrifuge.

【0028】請求項2の発明は、ワイヤソー砥粒スラリーの再利用
システムに採用する遠心分離機であって、遠心分離機は、固
形物排出口と分離液排出口を備えたケーシンク゛と、ケーシンク゛に
介在したスクリューと、スクリュー内に介在された切削液体供給管
と、スクリューに開設する切削液体供給管と連通する供給口
と、スクリューの全刃先に設けた超硬チッフ゜と、スクリューに負荷が
かかったときにスクリューの回転速度をコントロールするサーホ゛モーター
と、サーホ゛モーターをコントロールする制御部とで構成されているワイ
ヤソー砥粒スラリーの再利用システムに使用する遠心分離機であ
る。従って、第1、第2の遠心分離機の負荷を軽減し、か
つスクリューの刃先の摩耗、損傷等を少くできること、等の
実益が有る。
A second aspect of the present invention is a centrifugal separator employed in a wire saw abrasive slurry recycling system, wherein the centrifugal separator includes a casing having a solids discharge port and a separated liquid discharge port, and a casing having a casing discharge port. An interposed screw, a cutting liquid supply pipe interposed in the screw, a supply port communicating with the cutting liquid supply pipe opened in the screw, a carbide chip provided at all cutting edges of the screw, and a load was applied to the screw. It is a centrifugal separator used for a wire saw abrasive slurry recycling system, which is sometimes composed of a servomotor for controlling the rotation speed of the screw and a control unit for controlling the servomotor. Therefore, there are practical benefits such as a reduction in the load on the first and second centrifuges and a reduction in wear, damage, and the like of the cutting edge of the screw.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の前工程を示すフローチャート図である。FIG. 1 is a flowchart showing a pre-process of the present invention.

【図2】本発明の後工程を示すフローチャート図である。FIG. 2 is a flowchart illustrating a post-process of the present invention.

【図3】第1・第2の遠心分離機の拡大模式図である。FIG. 3 is an enlarged schematic diagram of first and second centrifuges.

【符号の説明】[Explanation of symbols]

1 第1の遠心分離機 2 ケーシンク゛ 2a 固形物排出口 2b 分離液排出口 200 内筒 3 スクリュー 300 本体 4 超硬チッフ゜ 5 サーホ゛モーター 6 制御部 7 供給管 8 開口 9 モーター 10 第2の遠心分離機 20 ワイヤソー 21 原液タンク 22 第1の配管 23 ホ゜ンフ゜ 24 第2の配管 25 回収砥粒タンク 26 第3の配管 27 分離液タンク 28 第4の配管 29 ホ゜ンフ゜ 30 第5の配管 31 第6の配管 32 廃液砥粒タンク 33 第7の配管 34 回収切削液体タンク 35 第8の配管 36 ホ゜ンフ゜ 37 第9の配管 38 第10の配管 39 ホ゜ンフ゜ 40 ホ゜ンフ゜ 41 第11の配管 42 ホ゜ンフ゜ 43 砥粒供給タンク 44 第12の配管 45 ホ゜ンフ゜ 1 First centrifuge 2 Case sink 2a Solid outlet 2b Separated liquid outlet 200 Inner cylinder 3 Screw 300 Main unit 4 Carbide chip 5 Surf motor 6 Control unit 7 Supply pipe 8 Opening 9 Motor 10 Second centrifuge 20 Wire saw 21 Stock solution tank 22 First pipe 23 Phone 24 Second pipe 25 Collected abrasive tank 26 Third pipe 27 Separate liquid tank 28 Fourth pipe 29 Phone 30 Fifth pipe 31 Sixth pipe 32 Waste liquid Abrasive grain tank 33 Seventh pipe 34 Recovered cutting fluid tank 35 Eighth pipe 36 Phone 37 Ninth pipe 38 Tenth pipe 39 Phone 40 Phone 41 Eleventh pipe 42 Phone 43 Abrasive grain supply tank 44 12th Piping 45 phone

─────────────────────────────────────────────────────
────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成12年12月14日(2000.12.
14)
[Submission date] December 14, 2000 (200.12.
14)

【手続補正1】[Procedure amendment 1]

【補正対象書類名】図面[Document name to be amended] Drawing

【補正対象項目名】図1[Correction target item name] Fig. 1

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【図1】 FIG.

【手続補正2】[Procedure amendment 2]

【補正対象書類名】図面[Document name to be amended] Drawing

【補正対象項目名】図3[Correction target item name] Figure 3

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【図3】 FIG. 3

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 砥粒廃液を配管を介して第1の遠心分離
機に導き、当該第1の遠心分離機で再生砥粒と微砥粒混
合液体に分離処理し、この再生砥粒を配管を介して回収
砥粒タンクに導き、前記微砥粒混合液体を配管を介して分
離液タンクに導き、この分離液タンクの微砥粒混合液体に新規
の切削液体を添加しつつ配管を介して第2の遠心分離機
に導き、この第2の遠心分離機で廃棄砥粒と回収切削液
体に分離処理し、この回収切削液体を配管を介して回収
切削液体タンクに導き、この回収切削液体タンクの回収切削液
体を配管を介して前記回収砥粒タンクに導き、この回収砥
粒タンクの回収切削液体及び前記再生砥粒に各配管を介し
て希釈用の新規の砥粒及び切削液体をそれぞれ添加して
再生砥粒混合切削液体を生成し、この再生砥粒混合切削
液体を配管を介して砥粒供給タンクに供給する構成としたワ
イヤソー砥粒スラリーの再利用システム。
An abrasive waste liquid is guided to a first centrifugal separator via a pipe, and the first centrifugal separator separates the regenerated abrasive and fine abrasive mixed liquid. To the recovery abrasive tank via the pipe, the fine abrasive mixed liquid is guided to the separated liquid tank via the pipe, and the new cutting liquid is added to the fine abrasive mixed liquid in the separated liquid tank via the pipe. Guided to a second centrifugal separator, the second centrifugal separator separates waste abrasive and collected cutting liquid, and guides the collected cutting liquid to a collected cutting liquid tank via piping. The collected cutting liquid is guided to the collected abrasive tank through a pipe, and a new abrasive and a cutting liquid for dilution are added to the collected cutting liquid and the regenerated abrasive in the collected abrasive tank via the respective pipes. To generate a regenerated abrasive mixed cutting fluid, and this regenerated abrasive mixed cutting fluid Reuse system of the wire saw abrasive grain slurry was configured to be supplied to the abrasive supply tank through a pipe.
【請求項2】 ワイヤソー砥粒スラリーの再利用システムに採用する
遠心分離機であって、 この遠心分離機は、固形物排出口と分離液排出口を備え
たケーシンク゛と、このケーシンク゛に介在したスクリューと、このスクリュー
内に介在された切削液体供給管と、このスクリューに開設す
る前記切削液体供給管と連通する供給口と、前記スクリュー
の全刃先に設けた超硬チッフ゜と、前記スクリューに負荷がかか
ったときに当該スクリューの回転速度をコントロールするサーホ゛モーター
と、このサーホ゛モーターをコントロールする制御部とで構成されてい
るワイヤソー砥粒スラリーの再利用システムに使用する遠心分離機。
2. A centrifuge for use in a system for reusing a wire saw abrasive slurry, wherein the centrifuge includes a casing having a solid substance discharge port and a separated liquid discharge port, and a screw interposed between the casing and the casing. And a cutting liquid supply pipe interposed in the screw, a supply port communicating with the cutting liquid supply pipe provided in the screw, a carbide chip provided at all cutting edges of the screw, and a load applied to the screw. A centrifugal separator for use in a wire saw abrasive slurry recycling system comprising a servomotor for controlling the rotation speed of the screw when it is engaged and a control unit for controlling the servomotor.
JP2000098464A 2000-03-31 2000-03-31 Wire saw abrasive slurry reuse system Expired - Lifetime JP3371116B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2000098464A JP3371116B2 (en) 2000-03-31 2000-03-31 Wire saw abrasive slurry reuse system
US09/818,536 US6615817B2 (en) 2000-03-31 2001-03-28 Recycling system of wire saw abrasive grain slurry and centrifugal separators therefor
KR1020010016758A KR100639851B1 (en) 2000-03-31 2001-03-30 Recycling system of wire saw abrasive grain slurry and centrifugal separators therefor
EP01303080A EP1138439A3 (en) 2000-03-31 2001-03-30 Method and apparatus for recycling abrasive grain slurry

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000098464A JP3371116B2 (en) 2000-03-31 2000-03-31 Wire saw abrasive slurry reuse system

Publications (2)

Publication Number Publication Date
JP2001277115A true JP2001277115A (en) 2001-10-09
JP3371116B2 JP3371116B2 (en) 2003-01-27

Family

ID=18612941

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP3371116B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6929537B2 (en) 2002-05-24 2005-08-16 Sharp Kabushiki Kaisha Slurry recycling method
JP2009136817A (en) * 2007-12-10 2009-06-25 Itec Co Ltd Gas-generating reaction apparatus having function of separating solid from gas
JP2010530135A (en) * 2007-06-15 2010-09-02 シルフィン カンパニー,リミテッド Method and system for recycling waste slurry generated in semiconductor wafer manufacturing process
CN111805775A (en) * 2020-06-09 2020-10-23 徐州鑫晶半导体科技有限公司 Mortar supply method, mortar supply equipment and crystal bar cutting system

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101959413B1 (en) * 2017-06-15 2019-03-20 주식회사 파나시아 Liquid Cleaning Purifier

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6929537B2 (en) 2002-05-24 2005-08-16 Sharp Kabushiki Kaisha Slurry recycling method
JP2010530135A (en) * 2007-06-15 2010-09-02 シルフィン カンパニー,リミテッド Method and system for recycling waste slurry generated in semiconductor wafer manufacturing process
JP2009136817A (en) * 2007-12-10 2009-06-25 Itec Co Ltd Gas-generating reaction apparatus having function of separating solid from gas
CN111805775A (en) * 2020-06-09 2020-10-23 徐州鑫晶半导体科技有限公司 Mortar supply method, mortar supply equipment and crystal bar cutting system

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