JP2001274215A - Automated treating system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the number of transfer robots installed in an automated treatment system which transfer works and make the works perform prescribed treatment operations by improving the efficiency of their service by collecting them. SOLUTION: A transfer robot 7 is placed, in such a way that it can move along treating modules 3 and 5 and the transfer of works is performed with one transfer robot 7, between a load lock section 2 for supplying works 1 and treating modules and between the treating module and an unload lock section 6 for retrieving the treated works.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic processing apparatus for processing a workpiece according to a predetermined process while transporting the workpiece.

[0002]

2. Description of the Related Art Conventionally, in a leaf-type automatic processing apparatus that separately performs processing of different processes on one work, a processing module for processing the work in accordance with a predetermined process is provided for each work module. A robot that transports the workpiece between the load lock unit that supplies the workpiece and the processing module, and a robot that transports the workpiece between the processing module and the unload lock unit that collects the processed workpiece. Therefore, the number of transfer robots increases with the number of processing modules installed.

For example, as shown in FIG. 4, laser processing is performed on one work (for example, a semiconductor chip) 1 in a first processing module 14 and mechanical scribing is performed in a second processing module 17. In such a case, the work 1 is transported by the robot 19 between the load lock unit 13 and the processing module 14 in the first processing system, and the transfer between the processing module 14 and the unload lock unit 15 is performed. The work 1 is transported by the robot 20. Then, in the second processing system, the transfer of the work 1 is performed by the robot 21 between the load lock unit 16 and the processing module 17, and the work 1 is performed by the robot 22 between the processing module 17 and the unload lock unit 18. Is carried out.

Further, in such a conventional automatic processing apparatus, there is no connection of the work transfer between the respective processing systems, and the work 1 collected in the unload lock unit 15 of the first processing system is transferred to the second processing system. System load lock unit 1
6 and the process has been interrupted.

[0005]

The problem to be solved is that, for each processing module that processes a work in accordance with a predetermined process, a load transfer section and an unload lock section are provided with a work transfer robot, respectively. The number of transfer robots increases with the number of processing modules installed, and the equipment becomes complicated.

Another problem is that the connection of the work transfer between the processing systems is lost, and the processing is interrupted.

[0007]

SUMMARY OF THE INVENTION The present invention is directed to an automatic processing apparatus for processing a workpiece in accordance with a predetermined process while transporting the workpiece. The transfer robot is installed so as to be movable along the processing module, and the work transfer is performed by one transfer robot between the load lock section and the processing module and between the processing module and the unload lock section. I can do it.

Further, the automatic processing device according to the present invention
In order to increase the efficiency of use of transfer robots and reduce the number of installations, there is also a need to link work transfer between processing systems so that continuous processing can be performed. A load lock unit for supplying a workpiece while moving in an area between the first processing module and the second processing module provided, a processing module in the first system, a processing module in the second system, and both systems The robot is installed so that the workpieces can be sequentially transferred between the unload lock units that collect the processed workpieces.

Further, the automatic processing device according to the present invention
In order to increase the efficiency of use of the transfer robot and reduce the number of installations in the two processing systems, it is also necessary to link the work transfer between the processing systems and perform continuous processing. A first robot that transfers a workpiece between the load lock unit and the processing module in the first processing system and between the processing module and the unload lock unit in the second processing system;
A second robot for transferring a workpiece between the processing module in the first processing system and the unload lock unit and between the unload lock unit in the first processing system and the processing module in the second processing system; Is provided.

[0010]

FIG. 1 shows an embodiment of an automatic processing apparatus according to the present invention.

Here, the case of two processing systems is shown.

As a first processing system, two side-by-side cassettes BOX1 and cassettes BO on which a plurality of works (for example, semiconductor chips) 1 are respectively set are set.
X2, a processing module 3 for processing the work 1 supplied from the cassette BOX1 or the cassette BOX2 according to a predetermined process, and a cassette B for collecting the processed work 1 and temporarily waiting.
It comprises an unload / load lock section 4 made of OX3.

The second processing system includes a processing module 5 for processing the work 1 supplied from the cassette BOX 3 of the first processing system at a predetermined timing in accordance with a predetermined process, and collecting the processed work 1. And an unload lock section 6 made up of a cassette box 4 to be used.

According to the present invention, the processing modules 3 and 5 in such two processing systems are juxtaposed, and the area A between the juxtaposed processing modules 3 and processing modules 5 is set in the XY directions. A robot 7 for carrying a workpiece is installed so that the robot 7 can be moved to a position.

The robot 7 has a structure in which its arm can rotate with respect to the XY plane and can expand and contract back and forth. The robot 7 can move in the Y direction on the rails 8 along the processing modules 3 and 5 arranged side by side, and can move in the X direction on the rails 8 at both end portions of the processing modules 3 and 5. Attached so that you can.

Each of the cassettes BOX1 to BOX4 has a structure that can be moved up and down in the Z direction when the work 1 is supplied and collected. Similarly, the stages of the processing modules 3 and 5 have a structure that can be moved up and down in the Z direction when the work 1 is supplied and collected.

The control sequence of the operation of each part is preset in a controller (ECU) (not shown).

The control sequence of the operation of each part is as follows.
It is as follows.

First, at the start of the process, the robot 7 moves to a position facing the cassette BOX1 (or cassette BOX2), and the robot 7 moves to a position where the arm of the robot 7 can take the first work 1 from the cassette. BOX1 rises.

Next, after the arm of the robot 7 is extended to a predetermined position and inserted under the first work 1, the cassette BOX 1 is slightly lowered and the work 1 is placed on the tip of the arm. At about the same time, the suction pump of the arm operates to fix the work 1 on the arm.

Next, with the work 1 fixed to the tip of the arm, the robot 7 is moved to a predetermined position so that the robot 7 can supply the work 1 to the work input port of the processing module 3. Rotate the arm appropriately to extend and retract.

Then, after the suction pump is stopped and the work 1 is placed on the tip of the arm, the stage of the processing module 3 is raised to the position of the work 1, the arm is retracted, and the stage is moved to the work. Adsorb 1
The processing in the processing module 3 is started.

Thereafter, by the same operation, the work 1 processed by the processing module 3 is supplied to the next processing module 5, and the processed work 1 is collected in the cassette BOX 4.

At this time, if there is a difference in processing time between the first processing system and the second processing system, the work 1 processed by the processing module 3 is temporarily collected in the cassette BOX 3. The processing module 5 is set in a standby state, and then supplied to the processing module 5 at a predetermined timing. When there is no need to wait, the work 1 processed by the processing module 3 is directly supplied to the processing module 5.

The next work is continuously supplied when the work can be received without waiting for the completion of the processing of the work 1 supplied in each of the processing modules 3 and 5.

As described above, the robot 7 causes the work 1 to be transported between the first processing system and the second processing system, whereby the processing of the work 1 in each of the modules 3 and 5 is continuously performed. Will be

When the number of processing systems is one, as shown in FIG. 2, the cassette BOX as a load lock unit is moved while moving on the rail 8 along the processing module 3.
The robot 7 may be installed so that the work 1 can be transported between the processing module 3 and the cassette box 2 as an unload lock unit.

FIG. 3 shows another embodiment of the automatic processing apparatus according to the present invention.

Here, the automatic processing device includes a load lock unit 2 comprising a cassette BOX 1 for supplying a work 1, a processing module 3 for processing the work 1 supplied from the cassette BOX 1 in accordance with a predetermined process,
An unload / load lock unit 4 composed of a cassette box 2 for collecting the processed work 1 and temporarily waiting the work 1
And a processing module 5 for processing the work 1 supplied from the cassette BOX 2 in accordance with a predetermined process, an unload lock unit 6 including a cassette BOX 3 for collecting the processed work 1, a cassette BOX 1 and a processing module 3 And a robot 9 for transferring the work 1 between the processing module 5 and the cassette BOX 3,
The robot 1 is configured to transfer the work 1 between the processing module 3 and the cassette BOX 2 and between the cassette BOX 2 and the processing module 5.

Also in this embodiment, the basic operation of each part for supplying and collecting the work 1 is the same as that described above, but in this case, in particular, in this case, two robots 9 and 1 are used.
0 in the fixed position, the first processing system and the second processing system
The work 1 is conveyed to and from the processing system of (1), whereby the processing of the work 1 in each of the modules 3 and 5 is continuously performed.

In this embodiment, a processing module 11 for processing a work 1 supplied from a cassette BOX 3 also serving as a load lock according to a predetermined process, and a cassette BOX 4 for collecting the processed work 1 are provided. A load lock unit 12, a mechanism for sliding the robot 9 along the rail 8 to a position where the work 1 is transported between the cassette BOX 3 and the processing module 11, and a mechanism for sliding the work 1 between the processing module 11 and the cassette BOX 4. A mechanism for sliding the robot 10 along the rail 8 is provided at a position where the transfer is performed.

The slides of the robots 9 and 10 are:
The operation sequence is executed under the control of a controller (ECU) which is programmed in advance.

However, when the processing module 11 is added, it can be easily dealt with by providing the slide mechanism of the existing robots 9 and 10 without newly installing any robot.

[0034]

In the automatic processing apparatus according to the present invention, the transfer robot is installed so as to be movable along the processing module, and is provided between the load lock section and the processing module and between the processing module and the unload lock section. Between one
The work transfer can be performed by one transfer robot, and there is an advantage that the transfer robots can be consolidated to increase the use efficiency and reduce the number of installations.

Further, the automatic processing apparatus according to the present invention comprises a load lock section for supplying a work while moving in an area between the first processing module and the second processing module arranged in parallel, and a first system. Processing module in the second
The robot is installed so that the work can be sequentially transferred between the processing module in the system and the unload lock unit that collects the work processed by both systems. In the system, it is possible to increase the use efficiency of the transfer robots and reduce the number of installations, and also to link the work transfer between the processing systems and perform continuous processing, resulting in loss of processing time. And the productivity is improved.

Further, the automatic processing device according to the present invention
A first method for transferring a workpiece between the load lock unit and the processing module in the first processing system and between the processing module and the unload lock unit in the second processing system.
And a robot that transfers a workpiece between the robot and the processing module and the unload lock unit in the first processing system, and between the unload lock unit in the first processing system and the processing module in the second processing system. Two robots are provided, and in two processing systems, the use efficiency of the transfer robot can be increased and the number of the robots can be reduced, and work can be continuously transferred between the processing systems. Processing can be performed,
This has the advantage that productivity is improved without any loss of processing time.

[Brief description of the drawings]

FIG. 1 is a simplified configuration diagram showing an embodiment of an automatic processing device according to the present invention.

FIG. 2 is a simplified configuration diagram showing another embodiment of the automation processing device according to the present invention.

FIG. 3 is a simplified configuration diagram showing still another embodiment of the automation processing device according to the present invention.

FIG. 4 is a simplified configuration diagram showing a conventional automation processing device.

[Description of Signs] 1 Work 2 Load lock section 3 Processing module 4 Unload / load lock section 5 Processing module 6 Unload lock section 7 Robot 8 Rail 9 Robot 10 Robot 11 Processing module 12 Unload lock section

 ──────────────────────────────────────────────────の Continued on the front page F term (reference) 5F031 CA05 CA13 DA08 FA05 FA07 FA11 FA12 FA15 GA08 GA47 GA48 HA58 MA03 MA06 MA13 PA03

Claims (4)

[Claims] 1. A load lock unit for supplying a work for processing, a processing module for processing the supplied work according to a predetermined process, an unload lock unit for collecting the processed work, and a process for the processing An automated processing apparatus configured by a robot that transfers a work between each of the load lock unit, the processing module, and the unload lock unit while moving along the module. 2. A load lock section for supplying a work for processing, a first processing module for processing the work supplied from the load lock section in accordance with a predetermined process,
A second processing module that further processes the processed work according to a predetermined process; an unload lock unit that collects the processed work; a first processing module and a second processing module arranged side by side An automatic processing apparatus configured by a robot that transports a work between each of the load lock unit, the first processing module, the second processing module, and the unload lock unit while moving an area between the load lock unit, the first processing module, the second processing module, and the unload lock unit. 3. A load lock section for supplying a work for processing, a first processing module for processing the work supplied from the load lock section in accordance with a predetermined process,
A first unload lock unit for holding the processed work, a second processing module for processing the work supplied from the first unload lock unit in accordance with a predetermined process, and a processed work A second unload lock unit that collects the second processing module and the second processing module and the second processing module and the second processing module and the second processing module.
For transferring the work to and from the unload lock section
An automated processing apparatus comprising: a first robot; and a second robot that transfers a workpiece between each of the first processing module, the first unload lock unit, and the second processing module. 4. A third processing module for processing a work supplied from a second unload lock unit in accordance with a predetermined process, a third unload lock unit for collecting the processed work, A mechanism for sliding the first robot to a position at which the workpiece is transferred between the second unload lock unit and the third processing module, and a mechanism between the third processing module and the third unload lock unit. 4. The automatic processing apparatus according to claim 3, further comprising: a mechanism for sliding the second robot to a position at which the workpiece is transferred.