JP2001264146A - Level switch - Google Patents
Level switchInfo
- Publication number
- JP2001264146A JP2001264146A JP2000071519A JP2000071519A JP2001264146A JP 2001264146 A JP2001264146 A JP 2001264146A JP 2000071519 A JP2000071519 A JP 2000071519A JP 2000071519 A JP2000071519 A JP 2000071519A JP 2001264146 A JP2001264146 A JP 2001264146A
- Authority
- JP
- Japan
- Prior art keywords
- protection tube
- level switch
- liquid level
- welded
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、液相と気相とにお
いて熱放散定数が異なることを利用した測温抵抗体を用
いる液面レベルスイッチに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid level switch using a resistance temperature detector utilizing a difference in heat dissipation constant between a liquid phase and a gas phase.
【０００２】[0002]
【従来の技術】従来の液面レベルスイッチは、図４に示
す特開平７−６３５９２号公報等で知られたものであ
る。すなわち液体を収容する容器１１のフランジ部１１
ａには、先端が閉じた２個の保護管１２，１３を備えた
ステンレス製蓋１４が、金属製パッキン１５を介して気
密に取付けられる。保護管１２，１３の先端には測温セ
ンサ１６，１７が挿入あるいは封入され、液面の検出し
たい高さとなる基準位置Ｌに設定されている。センサと
して、例えば、薄膜白金測温抵抗体１４，１５を用い
る。センサから外部回路に接続するリード線１６が連接
されている。2. Description of the Related Art A conventional liquid level switch is known from Japanese Patent Application Laid-Open No. 7-63592 shown in FIG. That is, the flange portion 11 of the container 11 containing the liquid
A stainless steel lid 14 provided with two protection tubes 12 and 13 having closed ends is hermetically attached to a through a metal packing 15. Temperature measuring sensors 16 and 17 are inserted or sealed at the distal ends of the protective tubes 12 and 13, and are set at a reference position L at which the liquid level is to be detected. As the sensor, for example, thin-film platinum resistance temperature detectors 14 and 15 are used. Lead wires 16 connecting the sensor to an external circuit are connected.
【０００３】前記液面レベルスイッチは、液相と気相と
では熱放散定数が異なることを利用して液面を検出する
もので、液面の検出手段として測温抵抗体を用いてい
る。この測温抵抗体を通電加熱させると、測温抵抗体が
周囲の温度よりも高温になり、放熱が加熱を相殺するよ
うな温度になって平衡する。平衡する温度は、測温抵抗
体がおかれている周囲環境により支配され、液相中では
熱放散定数が大きいから測温抵抗体の温度が低くなり、
気相中では熱放散定数が小さいから測温抵抗体の温度が
高くなる。他方の測温抵抗体を、同じ位置に周囲温度を
測定するために設け、この測温抵抗体の抵抗値と通電加
熱させた測温抵抗体の抵抗値を比較すれば液面が測温抵
抗体の上方にあるか、下方にあるかを判別することがで
きる。The liquid level switch detects the liquid level by utilizing the difference in heat dissipation constant between the liquid phase and the gas phase, and uses a temperature measuring resistor as a liquid level detecting means. When the resistance temperature detector is energized and heated, the resistance temperature body becomes higher than the surrounding temperature, and the temperature becomes equilibrium because the heat radiation cancels the heating. The equilibrium temperature is governed by the surrounding environment in which the RTD is placed. In the liquid phase, the heat dissipation constant is large, so the temperature of the RTD decreases,
Since the heat dissipation constant is small in the gas phase, the temperature of the resistance bulb increases. The other resistance thermometer is provided at the same position to measure the ambient temperature. If the resistance of this resistance thermometer is compared with the resistance of the resistance thermometer heated by heating, the liquid level is measured. It can be determined whether it is above or below the body.
【０００４】液面レベルスイッチは機械的な可動部がな
く、取付部の密閉構造が完全で、レベルスイッチを取り
付ける容器への不純物の侵入がない、液面検出感度が高
いなどの特徴がある。例えば半導体製造装置において、
化学蒸着装置に反応ガスを供給する液体原料供給装置の
容器や、冷却用冷媒供給装置の容器内の液面レベルを検
出するのに用いられている。The liquid level switch does not have any mechanically movable parts, has a completely hermetically sealed structure, has no intrusion of impurities into a container to which the level switch is attached, and has a high liquid level detection sensitivity. For example, in a semiconductor manufacturing apparatus,
It is used to detect a liquid level in a container of a liquid source supply device for supplying a reaction gas to a chemical vapor deposition device and a container of a cooling refrigerant supply device.
【０００５】[0005]
【発明が解決しようとする課題】最近は液面レベルスイ
ッチを取り付ける容器には液を多く貯蔵するため、容器
が大型化し、特に高さが高くなってきている。そのため
に、液面レベルスイッチの測温抵抗体を挿入した保護管
が長くならざるを得なくなった。Recently, a large amount of liquid is stored in a container to which a liquid level switch is attached, so that the container has become large and particularly high. For this reason, the protective tube into which the resistance bulb of the liquid level switch was inserted had to be long.
【０００６】その結果、容器の移動等で振動が加わる
と、前記保護管が折れたり、ひび割れ等の損傷を起こす
恐れがある。これを防止するために、複数の保護管を連
結する補強板を溶接することがなされている。[0006] As a result, when vibration is applied due to the movement of the container or the like, there is a possibility that the protection tube is broken or damaged such as cracks. In order to prevent this, a reinforcing plate connecting a plurality of protection tubes is welded.
【０００７】しかしながら、保護管に補強板を取り付け
るに際して、保護管の肉厚が薄いので、溶接時に孔があ
き、取り付けが困難である。また前記保護管の肉厚を増
したり、前記保護管の径を大きくすると、レベル検出感
度の低下を招くという問題点がある。However, when the reinforcing plate is attached to the protective tube, the protective tube has a small thickness, so that a hole is formed at the time of welding, and it is difficult to attach the reinforcing plate. Further, increasing the thickness of the protection tube or increasing the diameter of the protection tube causes a problem of lowering the level detection sensitivity.
【０００８】本発明は、液面レベルスイッチの感度を低
下させずに液面レベルスイッチの保護管を長くしても、
振動による前記保護管の損傷を防止することを目的とす
るものである。According to the present invention, even if the protection tube of the liquid level switch is lengthened without lowering the sensitivity of the liquid level switch,
It is an object of the invention to prevent the protection tube from being damaged by vibration.
【０００９】[0009]
【課題を解決するための手段】本発明は、測温抵抗体を
挿入した複数の保護管からなる液面レベルスイッチにお
いて、保護管を測温抵抗体の存する先端レベル検出部と
容器の蓋に取付ける基幹部に分割し、前記保護管の先端
レベル検出部と基幹部を溶接することにより、上記課題
を解決する手段とする。According to the present invention, there is provided a liquid level switch comprising a plurality of protective tubes in which a resistance temperature detector is inserted, wherein the protection tube is provided between a tip level detecting portion having the resistance temperature detector and a lid of a container. It is a means for solving the above-mentioned problem by dividing into a main part to be attached, and welding the front end level detecting part of the protective tube and the main part.
【００１０】保護管の前記基幹部の先端レベル検出部と
の溶接部の内径は先端レベル検出の外径に挿入できる大
きさにすると好適である。[0010] It is preferable that the inner diameter of the welded portion of the base portion of the protective tube and the tip level detecting section is large enough to be inserted into the outer diameter of the tip level detection.
【００１１】ここで、保護管の前記基幹部と先端レベル
検出部との溶接部は、ＹＡＧレーザ溶接にしてもよい。Here, the welding portion between the base portion and the tip level detecting portion of the protection tube may be YAG laser welded.
【００１２】更に、複数の保護管の基幹部を連結する補
強板を設けてもよい。また、複数の保護管の基幹部の外
径より補強板の保護管溶接部を小さくして、ＹＡＧレー
ザ溶接をしてもよい。Further, a reinforcing plate may be provided for connecting the trunk portions of the plurality of protective tubes. Further, the protection tube welding portion of the reinforcing plate may be made smaller than the outer diameter of the base portion of the plurality of protection tubes, and YAG laser welding may be performed.
【００１３】[0013]
【発明の実施の態様】本発明の一実施例を図１に示し、
これに従って説明する。保護管Ｐは、先端レベル検出部
１と保護管基幹部２とからなる。先端レベル検出部１
は、例えば長さ５０ｍｍ、外径２．５φｍｍ、肉厚０．
２５ｍｍのステンレスパイプからなり、その先端部は、
スエージング加工とプラズマ溶接等の方法で予め閉じら
れる。One embodiment of the present invention is shown in FIG.
The description will be made according to this. The protection tube P includes a tip level detection unit 1 and a protection tube main unit 2. Tip level detector 1
Has, for example, a length of 50 mm, an outer diameter of 2.5 mm, and a thickness of 0.1 mm.
It consists of a 25mm stainless steel pipe,
It is closed in advance by a method such as swaging and plasma welding.
【００１４】一方、保護管基幹部２は、例えば、長さ１
５０ｍｍ、外径３．１ｍｍφ、肉厚０．５ｍｍのステン
レスパイプからなる。On the other hand, the protection tube main body 2 has a length of 1, for example.
It is made of a stainless steel pipe having a diameter of 50 mm, an outer diameter of 3.1 mm and a wall thickness of 0.5 mm.
【００１５】まず、保護管先端レベル検出部１と保護管
基幹部２との溶接部３の外周を、図示しない固体レーザ
発振媒体のＹＡＧ レーザ溶接により密閉する。溶接部
は内径部を２．５ｍｍφに加工する。保護管基幹部２の
肉厚を増すことにより、振動の共振点を高し、振動によ
る保護管の損傷を防止することができる。この溶接は一
般にＹＡＧレーザ溶接と称しており、固体レーザ発振媒
体の代表例である。First, the outer periphery of the welded portion 3 between the protection tube tip level detection section 1 and the protection tube main body 2 is sealed by YAG laser welding of a solid laser oscillation medium (not shown). The inner diameter of the welded portion is processed to 2.5 mmφ. By increasing the thickness of the protection tube main body 2, the resonance point of vibration can be increased, and damage to the protection tube due to vibration can be prevented. This welding is generally called YAG laser welding and is a typical example of a solid laser oscillation medium.
【００１６】次いで、保護管基幹部２にステンレス製蓋
１４を電子ビーム溶接により溶接する。その後、保護管
基幹部２に、図４に示すリード線１６を溶接した測温セ
ンサ１６，１７を挿入する。Next, the stainless steel lid 14 is welded to the protection tube main body 2 by electron beam welding. Thereafter, the temperature measuring sensors 16 and 17 to which the lead wires 16 shown in FIG. 4 are welded are inserted into the protection tube main body 2.
【００１７】図２、図３は保護管Ｐを補強板５により支
持する他の実施例を示す。保護管Ｐは、４本の先端レベ
ル検出部１，……，１と４本の保護管基幹部２，……，
２とからなる。保護管基幹部２と先端レベル検出部１と
を溶接するのは先の実施例と同様である。FIGS. 2 and 3 show another embodiment in which the protective tube P is supported by the reinforcing plate 5. FIG. The protection tube P has four tip level detectors 1,..., 1 and four protection tube trunks 2,.
Consists of two. The welding of the protection tube main body 2 and the tip level detection unit 1 is the same as in the previous embodiment.
【００１８】補強板５には、保護管基幹部２，……，２
を保持する円形凹部５１，……，５１を形成する。補強
板５の円形凹部５１，……，５１の内径を保護管基幹部
２，……，２の外径より大きくして円形凹部５１，…
…，５１の外縁６を溶接する。溶接部６では補強板５と
４本の保護管基幹部２，……，２に線接触させるように
する。The reinforcing plate 5 includes protective tube main portions 2,..., 2
, 51 are formed. , 51 of the reinforcing plate 5 are made larger in inner diameter than the outer diameters of the protection tube main parts 2,.
..., the outer edge 6 of 51 is welded. In the welded portion 6, the reinforcing plate 5 and the four protection tube main portions 2,...
【００１９】次いで、保護管基幹部２に、図４に示すス
テンレス製蓋１４を電子ビーム溶接により溶接する。そ
の後、保護管基幹部２に、リード線１６を溶接した測温
センサ１４，１５を挿入するのは、先の実施例と同様で
ある。Next, the stainless steel lid 14 shown in FIG. 4 is welded to the protection tube main body 2 by electron beam welding. Thereafter, the temperature measurement sensors 14 and 15 to which the lead wires 16 are welded are inserted into the protection tube main body 2 in the same manner as in the previous embodiment.
【００２０】複数の保護管の間に補強板５を設けること
により保護管同士の接触を防止し、補強板５の円形凹部
５１，……，５１の内径を保護管基幹部２，……，２の
外径より大きくすることにより、溶接できないデットス
ペースがなくなり、その後、液面レベルスイッチの全表
面を電解研磨等の方法により、例えば表面粗度をＲｍａ
ｘ０．５以下に容易に仕上げることができる。それによ
り、使用中のレベルスイッチの表面に熱絶縁物質の付着
を防止することができ、熱絶縁物による測温抵抗体の熱
放散定数が変動して液面検出の判定に誤差が生ずること
を防止することができる。By providing a reinforcing plate 5 between a plurality of protective tubes, contact between the protective tubes is prevented, and the inner diameters of the circular recesses 51,... 2, the dead space that cannot be welded is eliminated, and then the entire surface of the liquid level switch is subjected to, for example, surface roughness Rma by a method such as electrolytic polishing.
It can be easily finished to x0.5 or less. As a result, it is possible to prevent the heat insulating substance from adhering to the surface of the level switch being used, and to prevent the heat dissipation constant of the resistance temperature detector from fluctuating due to the heat insulating material, thereby causing an error in liquid level detection determination. Can be prevented.
【００２１】上記２つの実施例は液面検出を２位置で行
う構成を説明したが、測温対抗体とその保護管の数を増
加すれば、３位置以上の液面検出も可能である。In the above two embodiments, the structure in which the liquid level detection is performed at two positions has been described. However, if the number of temperature measuring antibodies and their protective tubes is increased, liquid level detection at three or more positions is possible.
【００２２】[0022]
【発明の効果】液面レベルスイッチの保護管を液面検出
をする測温抵抗体の収めた先端部と、容器の蓋に溶接し
た基幹部に分割し、レーザ溶接したので、液面レベルス
イッチの液面検出感度を低下させずにレベルスイッチの
強度を増大することが出来る。ＹＡＧレーザ溶接をする
ので、極細い保護管を気密を保持し、十分な強度が得ら
れる。The protective tube of the liquid level switch is divided into a tip portion containing a resistance temperature detector for detecting the liquid level and a main portion welded to the lid of the container, and laser welding is performed. The strength of the level switch can be increased without lowering the liquid level detection sensitivity. Since the YAG laser welding is performed, airtightness of the very thin protective tube is maintained, and sufficient strength is obtained.
【００２３】複数の保護管の間に補強板５を設けること
により、容器内に液を再充填する際に、容器を横積みし
て運搬中、振動により保護管同士の接触を防止すること
ができる。また、補強板５と保護管の溶接部において、
円形凹部５の内径を保護管の外径より大きくすることに
より、溶接できないデットスペースがなくなり、基幹部
にはＹＡＧレーザ溶接したので、極細の保護管を気密に
保持するとともに強度を高めることができる。By providing the reinforcing plate 5 between a plurality of protective tubes, when the container is refilled with liquid, it is possible to prevent the protective tubes from coming into contact with each other due to vibration during the horizontal loading of the containers. it can. In addition, at the welding portion between the reinforcing plate 5 and the protective tube,
By making the inner diameter of the circular recess 5 larger than the outer diameter of the protection tube, there is no dead space that cannot be welded, and the core portion is welded by YAG laser. .
【図１】本発明の液面レベルスイッチの保護管接合部の
構造を示す断面図である。FIG. 1 is a cross-sectional view showing a structure of a protection tube joint of a liquid level switch of the present invention.
【図２】本発明の液面レベルスイッチの補強板接合部の
構造を示す側面図である。FIG. 2 is a side view showing a structure of a reinforcing plate joint of the liquid level switch of the present invention.
【図３】本発明の液面レベルスイッチの補強板接合部の
構造を示す断面図である。FIG. 3 is a cross-sectional view illustrating a structure of a reinforcing plate joint of the liquid level switch of the present invention.
【図４】従来の液面レベルスイッチの構造を示す断面図
である。FIG. 4 is a sectional view showing the structure of a conventional liquid level switch.
１ 保護管先端レベル検出部 ２ 保護管基幹部 ３ 保護管溶接部 ５ 補強板 ６ 円形凹部の外縁 ５１ 円形凹部 REFERENCE SIGNS LIST 1 protection tube tip level detection unit 2 protection tube backbone 3 protection tube welding portion 5 reinforcing plate 6 outer edge of circular recess 51 circular recess
───────────────────────────────────────────────────── フロントページの続き (72)発明者 渡延 明子 東京都中野区若宮２−55−５ 株式会社鷺 宮製作所中央技術研究所内 (72)発明者 松島 幹郎 東京都中野区若宮２−55−５ 株式会社鷺 宮製作所中央技術研究所内 Ｆターム(参考） 2F014 AA07 AA13 AB01 CA10 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Akiko Watanabe 2-55-5 Wakamiya, Nakano-ku, Tokyo Inside Sagimiya Manufacturing Co., Ltd. Central Research Laboratory (72) Inventor Mikio Matsushima 2-55- Wakamiya, Nakano-ku, Tokyo 5 F Term in Sagimiya Manufacturing Co., Ltd. Central Research Laboratory (Reference) 2F014 AA07 AA13 AB01 CA10
Claims (5)
なる液面レベルスイッチにおいて、前記保護管を測温抵
抗体の存する先端レベル検出部と容器の蓋に取付ける基
幹部に分割し、前記保護管の先端レベル検出部と基幹部
とを溶接することを特徴とする液面レベルスイッチ。1. A liquid level switch comprising a plurality of protection tubes into which a resistance temperature detector is inserted, wherein said protection tube is divided into a tip level detection part having a resistance temperature detector and a main part attached to a lid of a container. A liquid level switch, wherein a tip level detector of the protection tube and a base are welded.
出部との溶接部の内径は先端レベル検出の外径に挿入で
きる大きさである請求項１に記載の液面レベルスイッ
チ。2. The liquid level switch according to claim 1, wherein an inner diameter of a welded portion between the base portion and the tip level detector of the protection tube is a size that can be inserted into an outer diameter of tip level detection.
出部との溶接部はＹＡＧレザー溶接してなる請求項１に
記載の液面レベルスイッチ。3. The liquid level switch according to claim 1, wherein a welding portion between the base portion and the tip level detecting portion of the protection tube is formed by YAG laser welding.
板を設けてなる請求項１ないし請求項３のいずれかに記
載の液面レベルスイッチ。4. The liquid level switch according to claim 1, further comprising a reinforcing plate for connecting a plurality of trunk portions of the protection tube.
基幹部の外径より大きくして、前記円形凹部の外縁に保
護管をＹＡＧレーザ溶接をしてなる請求項１ないし請求
項４のいずれかに記載の液面レベルスイッチ。5. The protection tube according to claim 1, wherein the inner diameter of the circular recess of the reinforcing plate is larger than the outer diameter of the main portion of the protection tube, and the protection tube is welded to the outer edge of the circular recess by YAG laser welding. Liquid level switch according to any one of the above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000071519A JP3985071B2 (en) | 2000-03-15 | 2000-03-15 | Liquid level switch |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000071519A JP3985071B2 (en) | 2000-03-15 | 2000-03-15 | Liquid level switch |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001264146A true JP2001264146A (en) | 2001-09-26 |
| JP3985071B2 JP3985071B2 (en) | 2007-10-03 |
Family
ID=18590096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000071519A Expired - Fee Related JP3985071B2 (en) | 2000-03-15 | 2000-03-15 | Liquid level switch |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3985071B2 (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007114051A (en) * | 2005-10-20 | 2007-05-10 | Ngk Spark Plug Co Ltd | Liquid condition detection sensor |
| US7390014B2 (en) | 2003-11-07 | 2008-06-24 | Takata Corporation | Protecting device for a pedestrian or the like |
| US7933733B2 (en) | 2008-10-23 | 2011-04-26 | Whirlpool Corporation | Attribute sensing processes |
| JP2012159341A (en) * | 2011-01-31 | 2012-08-23 | Tri Chemical Laboratory Inc | Liquid level sensor |
| JP2013040822A (en) * | 2011-08-12 | 2013-02-28 | Toshiba Corp | Water level measuring apparatus |
| US8477029B2 (en) | 2008-10-23 | 2013-07-02 | Whirlpool Corporation | Modular attribute sensing device |
| US9691114B2 (en) | 2008-10-23 | 2017-06-27 | Whirlpool Corporation | Consumables inventory management method |
| US10817834B2 (en) | 2008-10-23 | 2020-10-27 | Whirlpool Corporation | System with refrigerator and self-reporting container |
| CN112041643A (en) * | 2018-07-31 | 2020-12-04 | 惠普发展公司，有限责任合伙企业 | Induction wand with tip for fluid detection |
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2000
- 2000-03-15 JP JP2000071519A patent/JP3985071B2/en not_active Expired - Fee Related
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| US7390014B2 (en) | 2003-11-07 | 2008-06-24 | Takata Corporation | Protecting device for a pedestrian or the like |
| JP2007114051A (en) * | 2005-10-20 | 2007-05-10 | Ngk Spark Plug Co Ltd | Liquid condition detection sensor |
| US7933733B2 (en) | 2008-10-23 | 2011-04-26 | Whirlpool Corporation | Attribute sensing processes |
| US8477029B2 (en) | 2008-10-23 | 2013-07-02 | Whirlpool Corporation | Modular attribute sensing device |
| US9691114B2 (en) | 2008-10-23 | 2017-06-27 | Whirlpool Corporation | Consumables inventory management method |
| US10817834B2 (en) | 2008-10-23 | 2020-10-27 | Whirlpool Corporation | System with refrigerator and self-reporting container |
| US11887047B2 (en) | 2008-10-23 | 2024-01-30 | Whirlpool Corporation | System with refrigerator and self-reporting container |
| JP2012159341A (en) * | 2011-01-31 | 2012-08-23 | Tri Chemical Laboratory Inc | Liquid level sensor |
| JP2013040822A (en) * | 2011-08-12 | 2013-02-28 | Toshiba Corp | Water level measuring apparatus |
| CN112041643A (en) * | 2018-07-31 | 2020-12-04 | 惠普发展公司，有限责任合伙企业 | Induction wand with tip for fluid detection |
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| Publication number | Publication date |
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| JP3985071B2 (en) | 2007-10-03 |
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