JP2001260351A - Ink jet recording head and ink jet recorder - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ink jet recording head and an ink jet recorder in which reliability of the head is enhanced by protecting a diaphragm and a piezoelectric element against fracture. SOLUTION: A sealing member 20 having a piezoelectric element holding part 22 for hermetically sealing a space ensured in a region facing a piezoelectric element 300 is bonded to the side face of a channel forming substrate 10 where the piezoelectric element 300 is formed and the piezoelectric element holding part 22 is filled with at least any one of a moisture curing liquid 31 or an oxygen curing liquid 32 to cover at least a diaphragm thus protecting the entirety of head against fracture.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a part of a pressure generating chamber which communicates with a nozzle opening for discharging ink droplets, which is constituted by a vibrating plate. The present invention relates to an ink jet recording head and an ink jet recording apparatus that eject ink droplets by displacement.

[0002]

2. Description of the Related Art A part of a pressure generating chamber communicating with a nozzle opening for discharging ink droplets is constituted by a vibrating plate, and the vibrating plate is deformed by a piezoelectric element to pressurize the ink in the pressure generating chamber to pass the nozzle opening. Two types of ink jet recording heads that eject ink droplets have been commercialized, one using a longitudinal vibration mode piezoelectric actuator that expands and contracts in the axial direction of the piezoelectric element, and the other using a flexural vibration mode piezoelectric actuator. ing.

In the former method, the volume of the pressure generating chamber can be changed by bringing the end face of the piezoelectric element into contact with the diaphragm, so that a head suitable for high-density printing can be manufactured. There is a problem in that a difficult process of cutting into a comb shape in accordance with the arrangement pitch of the openings and an operation of positioning and fixing the cut piezoelectric element in the pressure generating chamber are required, and the manufacturing process is complicated.

On the other hand, in the latter, a piezoelectric element can be formed on a diaphragm by a relatively simple process of sticking a green sheet of a piezoelectric material according to the shape of a pressure generating chamber and firing the green sheet. In addition, there is a problem that a certain area is required due to the use of flexural vibration, and that high-density arrangement is difficult.

On the other hand, in order to solve the latter disadvantage of the recording head, a uniform piezoelectric material layer is formed by a film forming technique over the entire surface of the diaphragm as disclosed in Japanese Patent Application Laid-Open No. 5-286131. A proposal has been made in which the piezoelectric material layer is cut into a shape corresponding to the pressure generating chambers by a lithography method, and a piezoelectric element is formed so as to be independent for each pressure generating chamber.

[0006] According to this, the operation of attaching the piezoelectric element to the diaphragm becomes unnecessary, and not only can the piezoelectric element be manufactured by a precise and simple method called lithography, but also the thickness of the piezoelectric actuator can be reduced. There is an advantage that it can be made thin and can be driven at high speed. In this case,
By providing at least only the upper electrode for each pressure generating chamber while keeping the piezoelectric material layer on the entire surface of the diaphragm, the piezoelectric actuator corresponding to each pressure generating chamber can be driven.

[0007]

However, in such an ink jet recording head, there is a problem that the piezoelectric element and the vibration plate are broken due to repeated driving of the piezoelectric element. In addition, if such destruction occurs in one segment, the substrate on which the piezoelectric element is formed may be cracked, or ink may flow from the destructed portion to another piezoelectric element, causing the other piezoelectric elements to be destroyed. As a result, there is a problem that the entire head is destroyed and becomes unusable.

In view of such circumstances, an object of the present invention is to provide an ink jet recording head and an ink jet recording apparatus in which the destruction of a diaphragm and a piezoelectric element is suppressed and the reliability of the head is improved.

[0009]

According to a first aspect of the present invention, there is provided a flow path forming substrate in which a pressure generating chamber communicating with a nozzle opening for discharging ink is defined; An ink jet recording head comprising: a lower electrode provided on one surface of a substrate via a diaphragm; a piezoelectric layer provided on the lower electrode; and a piezoelectric element including an upper electrode provided on the piezoelectric layer. A sealing member having a piezoelectric element holding portion that seals the space in a state where a space is secured in a region facing the piezoelectric element, on a surface of the flow path forming substrate on which the piezoelectric element is formed. An ink jet recording head is characterized in that at least one of a moisture-curable liquid and an oxygen-curable liquid is filled in the piezoelectric element holding portion so as to cover at least the vibration plate.

In the first aspect, since at least the diaphragm is covered with the moisture-curable liquid or the oxygen-curable liquid, even if a crack or the like occurs in the diaphragm and ink leaks from the crack, A moisture-curable liquid or the like reacts with the ink to be cured, so that the ink does not spread over the entire head, thereby preventing the entire head from being destroyed.

According to a second aspect of the present invention, in the first aspect, at least one of the moisture-curable liquid and the oxygen-curable liquid is applied to at least a surface of the diaphragm. And an ink jet recording head.

In the second aspect, the viscosity of the moisture-curable liquid and the oxygen-curable liquid does not reduce the amount of displacement of the diaphragm caused by driving of the piezoelectric element, thereby maintaining good ink discharge characteristics.

According to a third aspect of the present invention, in the first or second aspect, the flow path forming substrate is disposed so that the piezoelectric element side is located on the upper side in the direction of gravity. In the holding portion, the moisture-curable liquid or the oxygen-curable liquid is injected so as to cover at least the surface of the diaphragm, and the other regions are more than the moisture-curable liquid and the oxygen-curable liquid. An ink jet recording head is filled with an inert fluid having a low specific gravity.

[0014] In the third aspect, the viscosity of the moisture-curable liquid and the oxygen-curable liquid does not reduce the displacement of the diaphragm due to the driving of the piezoelectric element, so that the ink ejection characteristics can be maintained well.

According to a fourth aspect of the present invention, in any one of the first to third aspects, the piezoelectric element holding section is partitioned by partition walls for each piezoelectric element, and the partition walls are formed by the flow path forming substrate. And an ink jet recording head.

In the fourth aspect, the rigidity of the partition wall between the pressure generating chambers is increased by the partition wall, and crosstalk is suppressed.

According to a fifth aspect of the present invention, there is provided an ink jet recording head according to any one of the first to fourth aspects, wherein the piezoelectric layer has crystals preferentially oriented.

In the fifth aspect, as a result of the piezoelectric layer being formed in the thin film process, the crystals are preferentially oriented.

According to a sixth aspect of the present invention, there is provided an ink jet recording head according to the fifth aspect, wherein the piezoelectric layer has a columnar crystal.

In the sixth aspect, as a result of the piezoelectric layer being formed in the thin film process, the crystals are columnar.

According to a seventh aspect of the present invention, in any one of the first to sixth aspects, the pressure generation chamber is formed on a silicon single crystal substrate by anisotropic etching, and each layer of the piezoelectric element is formed of a thin film and a lithography. An ink jet recording head characterized by being formed by a method.

In the seventh aspect, an ink jet recording head having high-density nozzle openings can be manufactured relatively easily in a large amount.

According to an eighth aspect of the present invention, there is provided an ink jet recording apparatus comprising the ink jet recording head according to any one of the first to seventh aspects.

According to the eighth aspect, it is possible to realize an ink jet recording apparatus in which the head is prevented from being broken and the durability and reliability are improved.

[0025]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail based on embodiments.

(Embodiment 1) FIG. 1 is an exploded perspective view showing an ink jet recording head according to Embodiment 1 of the present invention, and FIG. 2 is a sectional view of FIG.

As shown in the figure, the flow path forming substrate 10 is a silicon single crystal substrate having a plane orientation (110) in this embodiment. As the flow path forming substrate 10, usually 150 to 3
A thickness of about 00 μm is used.
Those having a thickness of about 0 to 280 μm, more preferably about 220 μm are suitable. This is because the arrangement density can be increased while maintaining the rigidity of the partition wall between the adjacent pressure generating chambers.

One surface of the flow path forming substrate 10 is an opening surface, and the other surface is formed with a 1-2 μm-thick elastic film 50 made of silicon dioxide previously formed by thermal oxidation.

On the other hand, a silicon single crystal substrate is anisotropically etched on the opening surface of the flow path forming substrate
The pressure generating chambers 12 divided by the plurality of partition walls 11 are provided in parallel in the width direction, and on the outside in the longitudinal direction, a common ink chamber of each pressure generating chamber 12 communicates with a reservoir portion of a reservoir forming substrate described later. A communication portion 13 forming a part of the reservoir 100 is formed, and is communicated with one end of each pressure generating chamber 12 in the longitudinal direction via an ink supply path 14.

Here, in the anisotropic etching, when the silicon single crystal substrate is immersed in an alkaline solution such as KOH, the substrate is gradually eroded, and the first (111) plane perpendicular to the (110) plane and the first (111) plane A second (1) which forms an angle of about 70 degrees with the (111) plane and forms an angle of about 35 degrees with the (110) plane.
11) plane, and the etching rate of the (111) plane is about 1/1 compared to the etching rate of the (110) plane.
This is performed using the property of being 80.
By such anisotropic etching, two first (11
Precision processing can be performed based on depth processing of a parallelogram formed by the 1) plane and two oblique second (111) planes, and the pressure generating chambers 12 can be arranged at high density. it can.

In this embodiment, the long side of each pressure generating chamber 12 is formed by the first (111) plane, and the short side is formed by the second (111) plane. The pressure generating chamber 12 is provided on the flow path forming substrate 1.
It is formed by etching until it reaches the elastic film 50 almost through 0. Here, the elastic film 50 is
The amount attacked by the alkaline solution for etching the silicon single crystal substrate is extremely small. Each of the ink supply passages 14 communicating with one end of each of the pressure generating chambers 12 is formed shallower than the pressure generating chambers 12 and maintains a constant flow resistance of the ink flowing into the pressure generating chambers 12. That is, the ink supply path 14 is formed by partially etching (half-etching) the silicon single crystal substrate in the thickness direction. Note that the half etching is performed by adjusting the etching time.

On the opening side of the flow path forming substrate 10,
A nozzle plate 16 provided with a nozzle opening 15 communicating with the pressure supply chamber 12 on the side opposite to the ink supply path 14 is fixed via an adhesive, a heat welding film, or the like. The thickness of the nozzle plate 16 is, for example, 0.1 to 1
mm, the coefficient of linear expansion is 300 ° C. or less, for example, 2.5 to
It is made of 4.5 [× 10 ⁻⁶ / ° C.] glass-ceramic or non-rusting steel. The nozzle plate 16 entirely covers one surface of the flow path forming substrate 10 on one surface, and also serves as a reinforcing plate for protecting the silicon single crystal substrate from impact and external force. Further, the nozzle plate 16 is provided with the flow path forming substrate 10.
May be formed of a material having substantially the same thermal expansion coefficient as that of the material. In this case, since the deformation of the flow path forming substrate 10 and the nozzle plate 16 due to heat become substantially the same, it is possible to easily join them using a thermosetting adhesive or the like.

Here, the size of the pressure generating chamber 12 for applying the ink droplet ejection pressure to the ink and the size of the nozzle opening 15 for ejecting the ink droplet depend on the amount of the ejected ink droplet, the ejection speed, and the ejection frequency. Optimized. For example,
When recording 360 ink droplets per inch, the nozzle openings 15 need to be formed with a diameter of several tens of μm with high accuracy.

On the other hand, the thickness of the elastic film 50 on the opposite side of the opening surface of the flow path forming substrate 10 is, for example, about 0.2 μm.
A lower electrode film 60, a piezoelectric layer 70 having a thickness of, for example, about 1 μm, and an upper electrode film 80 having a thickness of, for example, about 0.1 μm are laminated and formed by a process described later, and the piezoelectric element 30 is formed.
0. Here, the piezoelectric element 300 refers to a portion including the lower electrode film 60, the piezoelectric layer 70, and the upper electrode film 80. In general, one of the electrodes of the piezoelectric element 300 is used as a common electrode, and the other electrode and the piezoelectric layer 70 are patterned for each of the pressure generating chambers 12. Here, a portion which is constituted by one of the patterned electrodes and the piezoelectric layer 70 and in which a piezoelectric strain is generated by applying a voltage to both electrodes is referred to as a piezoelectric active portion. In the present embodiment, the lower electrode film 60 is a common electrode of the piezoelectric element 300, and the upper electrode film 80 is an individual electrode of the piezoelectric element 300.
Even if this is reversed for convenience of the drive circuit and wiring, there is no problem.
In any case, the piezoelectric active portion is formed for each pressure generating chamber. Further, here, the piezoelectric element 300 and a diaphragm whose displacement is generated by driving the piezoelectric element 300 are collectively referred to as a piezoelectric actuator. In the example described above, the elastic film 50 and the lower electrode film 60 function as a diaphragm, but the lower electrode film may also serve as the elastic film.

The piezoelectric element 300 of the flow path forming substrate 10
On the side, a reservoir forming substrate 20 having a reservoir portion 21 constituting at least a part of the reservoir 100 is joined. In this embodiment, the reservoir portion 21 penetrates the reservoir forming substrate 20 in the thickness direction, and
Each of the pressure generating chambers 12 is communicated with the communicating portion 13 of the flow path forming substrate 10 as described above.
Constitute a reservoir 100 serving as a common ink chamber.

As such a reservoir forming substrate 20, it is preferable to use a material having substantially the same thermal expansion coefficient as that of the flow path forming substrate 10, for example, glass, ceramic material or the like. It was formed using a silicon single crystal substrate of the same material as that of No. 10. As a result, as in the case of the nozzle plate 16 described above, the two can be reliably bonded even when they are bonded at a high temperature using a thermosetting adhesive. Therefore, the manufacturing process can be simplified.

The piezoelectric element 3 of the reservoir forming substrate 20
In a region opposed to the piezoelectric element 300, a piezoelectric element holding portion 22 capable of sealing the space is provided with a space that does not hinder the movement of the piezoelectric element 300. Sealed inside. In the present embodiment, the piezoelectric element holding section 22 is formed to have a size that covers the plurality of piezoelectric elements 300 arranged in parallel.

As described above, the reservoir forming substrate 20 has the piezoelectric element holding portion 22 that seals the piezoelectric element 300 together with the reservoir portion 21 that constitutes a part of the reservoir 100, and is used to shut off the piezoelectric element 300 from the external environment. The piezoelectric element 30 which also serves as a sealing member and is formed by an external environment such as atmospheric moisture.
0 is prevented from being destroyed.

The piezoelectric element holding portion 22 has at least one of a moisture-curable liquid that cures when exposed to moisture and an oxygen-curable liquid that cures when exposed to oxygen. A mixed liquid 30 of a moisture-curable liquid 31 and an oxygen-curable liquid 32 is filled. The method of filling the mixed liquid 30 of the moisture-curable liquid 31 and the oxygen-curable liquid 32 is not particularly limited. For example, in the present embodiment, the communication hole 23 that connects the piezoelectric element holding unit 22 to the outside is formed. And sealed by the sealing member 24.

Here, the moisture-curable liquid 31 and the oxygen-curable liquid 32 are not particularly limited as long as they are liquids that cure by reacting with moisture or oxygen. The moisture-curable liquid 31 is, for example, cyanoacrylate. And the like. Examples of the oxygen-curable liquid 32 include modified polysulfide-based curing liquids and the like.

As described above, the piezoelectric element holding portion 22 is filled with the liquid mixture 30 of the moisture-curable liquid 31 and the oxygen-curable liquid 32, so that the piezoelectric element 300 is repeatedly driven to cause cracks or the like in the vibration plate. In this case, the mixed liquid 30 reacts with the ink or oxygen leaked from the crack into the pressure generating chamber 12 and hardens, thereby closing the crack of the diaphragm. Thus, it is possible to prevent the ink from flowing into the entire piezoelectric element 300 side of the flow path forming substrate 10 from the cracks in the vibration plate and making the entire head unusable.

Further, even if a crack or the like occurs in the reservoir forming substrate 20 at the portion where the piezoelectric element holding portion 22 is formed, the mixed liquid 30 reacts with the atmosphere and is hardened, so that the crack in the reservoir forming substrate 20 is reduced. Is blocked.

Note that a compliance substrate 40 including a sealing film 41 and a fixing plate 42 is joined to the reservoir forming substrate 20. Here, the sealing film 41 is made of a material having low rigidity and flexibility (for example, a polyphenylene sulfide (PPS) film having a thickness of 6 μm), and the sealing film 41 seals one surface of the reservoir section 21. Has been stopped. The fixing plate 42 is made of a hard material such as metal (for example, stainless steel (SU) having a thickness of 30 μm.
S) etc.). The reservoir 10 of the fixing plate 42
Since the region opposing to 0 is an opening 43 completely removed in the thickness direction, one surface of the reservoir 100 is sealed only with the sealing film 41 having flexibility, and the internal pressure changes. Thus, the flexible portion 25 can be deformed.

An ink inlet 44 for supplying ink to the reservoir 100 is formed on the compliance substrate 40 substantially outside the central portion in the longitudinal direction of the reservoir 100. Further, the reservoir forming substrate 20 is provided with an ink introduction path 26 that communicates the ink introduction port 44 with a side wall of the reservoir 100. In the present embodiment, the ink is supplied to the reservoir 100 by one ink introduction port 44 and the ink introduction path 26, but is not limited thereto. For example, according to a desired ink supply amount, A plurality of ink introduction ports and ink introduction paths may be provided, or the opening area of the ink introduction ports may be increased to enlarge the ink flow path.

The ink jet type recording head of this embodiment takes in ink from the ink inlet 44 connected to external ink supply means (not shown),
After filling the inside with ink from 00 to the nozzle opening 15, each lower electrode film 60 corresponding to the pressure generating chamber 12 is made according to a recording signal from an external driving circuit (not shown).
A voltage is applied between the upper electrode film 80 and the elastic film 50, the lower electrode film 60, and the piezoelectric layer 70 to bend and deform.
5 ejects ink droplets.

In this embodiment, the piezoelectric element holding section 2
2 is filled with the mixed liquid 30 of the moisture-curable liquid 31 and the oxygen-curable liquid 32, but it is needless to say that only one of them may be filled.

Further, in the present embodiment, the piezoelectric element holding portion 22 of the reservoir forming substrate 20 is formed so as to cover all the piezoelectric elements 300 juxtaposed in the width direction. However, the present invention is not limited to this. For example, as shown in FIG. 3, the piezoelectric element holding section 22 may be a separate piezoelectric element holding section 22A for each piezoelectric element 300 by the partition wall 27, and the piezoelectric element 300 may be sealed in each piezoelectric element holding section 22A. It may be. As a result, the partition walls 27 are respectively joined to the portions of the flow path forming substrate 10 corresponding to the partition walls 11 of the pressure generation chambers 12, so that the rigidity of the peripheral wall of the pressure generation chambers 12 is improved, and the crosstalk is improved. Can be prevented.

(Embodiment 2) FIG. 4 is a sectional view of an ink jet recording head according to Embodiment 2.

In this embodiment, as shown in FIG. 4, a mixed liquid 30 of a moisture-curable liquid 31 and an oxygen-curable liquid 32 is filled to the extent that the vibration plate and the piezoelectric element 300 are covered. It is the same as the first embodiment except that the liquid 33 is filled.

In such a configuration, the flow path forming substrate 10 needs to be disposed such that the surface on the piezoelectric element 300 side is on the upper side in the direction of gravity. Also, the piezoelectric element holding section 2
The inert liquid 33 to be filled in the tube 2 is not particularly limited, and examples thereof include silicone oil, ether, and a fluorine-based inert liquid such as hydrofluoroether.

In such a configuration, similarly to the above-described embodiment, when a crack is generated in the diaphragm, the ink leaked from the crack does not spread all over, and it is possible to prevent the head from being broken. it can. Further, in the present embodiment,
Since only a relatively small amount is filled with the mixed liquid 30 of the moisture-curable liquid 31 and the oxygen-curable liquid 32 so that the vibration plate and the piezoelectric element 300 are covered, the displacement of the vibration plate due to the driving of the piezoelectric element 300 is reduced. The ink ejection characteristics can be favorably maintained without being hindered by the viscosity of the mixed liquid 30.

In this embodiment, the moisture-curable liquid 3
The liquid 30 mixed with the liquid 1 and the oxygen-curable liquid 32 is filled to such an extent that the diaphragm and the piezoelectric element 300 are covered. However, the present invention is not limited to this, and it is sufficient that at least the surface of the diaphragm is covered. For example, when a relatively high-viscosity material is used as the moisture-curable liquid or the oxygen-curable liquid, as shown in FIG. 5, the moisture-curable liquid or the oxygen-curable liquid is applied only to the surface of the diaphragm. You may do so.

In the present embodiment, the piezoelectric element holding section 2
Although the region other than the mixed liquid 30 in 2 is filled with the inert liquid, the present invention is not limited to this. For example, an inert gas such as a nitrogen gas may be used.

(Other Embodiments) The embodiments of the present invention have been described above, but the basic configuration of the ink jet recording head is not limited to the above.

For example, a detecting means for detecting the destruction of the diaphragm is provided, and when the destruction of the diaphragm is detected, the ink discharge in the segment where the crack has occurred is stopped and replaced with another segment. You may make it do. This makes it possible to prevent dot missing or the like and maintain good print quality.

Further, for example, in the above-described embodiment, the reservoir forming substrate 20 having the reservoir portion 21 constituting a part of the reservoir 100 as a reservoir forming member is joined to one surface of the flow path forming substrate 10. However, the present invention is not limited to this. For example, the reservoir forming member may have a structure in which a plurality of substrates form a reservoir.

Similarly, the nozzle plate 16 is joined as the nozzle forming member. However, the present invention is not limited to this. For example, another substrate having a nozzle communication hole or the like for communicating the nozzle opening with the pressure generating chamber may be used. May be used as a multilayer structure.

In each of the above embodiments, a thin-film type ink jet recording head manufactured by applying a film forming and lithography process has been described as an example. However, the present invention is not limited to this. The present invention can also be applied to a thick-film type ink jet recording head formed by a method such as attaching a sheet.

The ink jet recording head of each of the embodiments constitutes a part of a recording head unit having an ink flow path communicating with an ink cartridge or the like, and is mounted on an ink jet recording apparatus. FIG.
FIG. 2 is a schematic diagram illustrating an example of the ink jet recording apparatus.

As shown in FIG. 6, the recording head units 1A and 1B having ink jet recording heads are provided with detachable cartridges 2A and 2B constituting ink supply means.
The carriage 3 on which B is mounted is provided movably in the axial direction on a carriage shaft 5 attached to the apparatus main body 4. The recording head units 1A and 1B are, for example,
Each of them ejects a black ink composition and a color ink composition.

The driving force of the driving motor 6 is transmitted to the carriage 3 via a plurality of gears and a timing belt 7 (not shown), so that the carriage 3 on which the recording head units 1A and 1B are mounted moves along the carriage shaft 5. Moved. On the other hand, a platen 8 is provided on the apparatus main body 4 along the carriage shaft 5, and a recording sheet S, which is a recording medium such as paper fed by a paper feed roller (not shown), is wound around the platen 8. It is designed to be transported.

[0062]

As described above, in the present invention, since the fluid containing the moisture-curable liquid and the oxygen-curable liquid is filled in the piezoelectric element holding portion, when a crack is generated in the diaphragm, The moisture-curable liquid and the oxygen-curable liquid react with moisture or oxygen flowing from the crack to the piezoelectric element side of the flow path forming substrate and are cured to close the crack. Therefore, moisture or oxygen does not flow into the entire piezoelectric element side of the flow path forming substrate from cracks in the vibration plate, and it is possible to prevent the entire head from becoming unusable.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing an ink jet recording head according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view illustrating the ink jet recording head according to the first embodiment of the present invention.

FIG. 3 is a cross-sectional view illustrating a modified example of the ink jet recording head according to the first embodiment of the present invention.

FIG. 4 is a sectional view showing an ink jet recording head according to a second embodiment of the present invention.

FIG. 5 is a cross-sectional view illustrating a modified example of the ink jet recording head according to the second embodiment of the present invention.

FIG. 6 is a schematic diagram of an ink jet recording apparatus according to an embodiment of the present invention.

[Explanation of symbols]

 Reference Signs List 10 flow path forming substrate 12 pressure generating chamber 13 communication part 14 ink supply path 15 nozzle opening 16 nozzle plate 20 reservoir forming substrate 21 reservoir part 22 piezoelectric element holding part 23 communication hole 24 sealing member 30 mixed liquid 40 compliance substrate 60 lower electrode film Reference Signs List 70 piezoelectric layer 80 upper electrode film 100 reservoir 300 piezoelectric element

Claims (8)

[Claims] 1. A flow path forming substrate defining a pressure generating chamber communicating with a nozzle opening for discharging ink, a lower electrode provided on one surface of the flow path forming substrate via a vibration plate, In an ink jet recording head comprising: a piezoelectric layer provided on an electrode; and a piezoelectric element including an upper electrode provided on the piezoelectric layer, a surface of the flow path forming substrate on which the piezoelectric element is formed. In a state where a space is secured in a region facing the piezoelectric element, a sealing member having a piezoelectric element holding portion that seals the space is joined, and at least one of a moisture-curable liquid and an oxygen-curable liquid is bonded. And an ink jet recording head filled in the piezoelectric element holding portion so as to cover at least the vibration plate. 2. The ink jet recording head according to claim 1, wherein at least one of the moisture-curable liquid and the oxygen-curable liquid is applied to at least a surface of the diaphragm. 3. The flow path forming substrate according to claim 1, wherein the flow path forming substrate is disposed such that the piezoelectric element side is located on the upper side in the direction of gravity.
The moisture-curable liquid or the oxygen-curable liquid is injected so as to cover at least the surface of the diaphragm, and the other region is inert having a lower specific gravity than the moisture-curable liquid and the oxygen-curable liquid. An ink jet recording head filled with a fluid. 4. The piezoelectric element holding section according to claim 1, wherein the piezoelectric element holding section is partitioned by partition walls for each piezoelectric element, and the partition walls are joined to the flow path forming substrate. Inkjet recording head. 5. The ink jet recording head according to claim 1, wherein crystals are preferentially oriented in the piezoelectric layer. 6. The ink-jet recording head according to claim 5, wherein the piezoelectric layer has a columnar crystal. 7. The pressure generating chamber according to claim 1, wherein the pressure generating chamber is formed on a silicon single crystal substrate by anisotropic etching, and each layer of the piezoelectric element is formed by a thin film and a lithography method. An ink jet recording head, characterized in that: 8. An ink jet recording apparatus comprising the ink jet recording head according to claim 1.