JP2001257501A - Coaxial high frequency airtight window structure - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a coaxial high frequency airtight window structure whose productivity is high and the number of parts of which is small. SOLUTION: In the coaxial high frequency airtight window structure provided with an outer axis sleeve 15 constituting a part of the outer conductor of a coaxial line, an inner axis sleeve 18 positioned inside of this sleeve 15 and constituting a part of the inner conductor of the coaxial line, an airtight window member 13 provided between the sleeve 15 and the sleeve 18 and a cooling circuit part 19 arranged inside of the sleeve 18, a ring part 23 for canceling a gap is brazed to the rear side part of the member 13 of the sleeve 18 and the outer peripheral surface of a cooling circuit part 19 to be used as an assembling jig is arranged closely or adjacently to the inside of this part 23.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a coaxial high frequency airtight window structure.

[0002]

2. Description of the Related Art A coaxial high-frequency hermetic window structure is used, for example, when a part of a coaxial line is separated into an atmosphere side and a vacuum side, and is used for a klystron output line or a coupler of a linear accelerator.

Here, a conventional coaxial high-frequency hermetic window structure will be described with reference to FIG. Reference numeral 31 denotes an outer shaft that forms a part of the outer conductor of the coaxial line. Inside the outer shaft 31,
An inner shaft 32 constituting a part of the inner conductor of the coaxial line is provided. Between the outer shaft 31 and the inner shaft 32, a perforated disk-shaped ceramic airtight window member 33 for dividing the coaxial line into an atmosphere side and a vacuum side is joined in a vacuum-tight manner by brazing.

The outer shaft 31 is provided with a cylindrical body 34 for a cooling jacket.
And an outer sleeve 35 formed on the inner surface thereof, and a cooling water passage 36 formed annularly on the back side of the outer sleeve 35.
It is composed of

[0005] The inner shaft 32 is a cylindrical cooling circuit component constituting a water passage for cooling the inner conductor connector 37 connected to the other inner conductor portion, the inner shaft sleeve 38 made of copper, the inner sleeve 38 and the like. 39, a coupling member 40 joined to the end of the cooling circuit component 39, an introduction passage 41 for introducing cooling water to the cooling circuit component 39, an outlet passage 42 for extracting cooling water, and the like. A through hole 39a is provided in a part of the cooling circuit component 39, and as shown by arrows Y1, Y2, Y3, the introduction path 4
The cooling water introduced from 1 passes through the through-hole 39a and leads to the outlet 4
2 is derived. A molybdenum (Mo) ring component 44 for clearance clearance is soldered to a position corresponding to the ceramic airtight window member 33 on the inner peripheral wall of the inner sleeve 38.

Next, a method of manufacturing the above-described coaxial high-frequency hermetic window structure will be described with reference to FIG. In FIG. 4, the method of assembling the inner shaft side will be mainly described, but parts corresponding to those in FIG. 3 are denoted by the same reference numerals, and redundant description is partially omitted.

At the center inside the outer shaft 31, an inner conductor connecting body 37 and an inner shaft sleeve 38 constituting the inner shaft 32 are arranged.
A cylindrical holding jig 43 made of stainless steel is arranged inside the inner shaft sleeve 38. The holding jig 43 has an annular projection 38 a having a trapezoidal cross section. The inner space of the inner sleeve 38 is provided between the holding jig 43 and the airtight window member 33. In order to improve the adhesion, a thin ring component 44 made of molybdenum (Mo) for eliminating a gap is arranged, and at the same time, a brazing material 45 is arranged between the ring component 44 and the inner shaft sleeve 38. A brazing material 46 is also arranged between the inner sleeve 38 and the airtight window member 33.

FIG. 5 shows a cross-sectional structure of the inner shaft 32 having the above-described structure. FIG. 5 shows the airtight window member 33 of FIG.
4 is a cross-sectional view of the inside from the inner shaft sleeve 38 at a position corresponding to the inside. The same reference numerals are given to portions corresponding to FIG. 4 and overlapping description will be partially omitted. As shown in the drawing, a notch 43b is provided in a part of the holding jig 43, and the notch 44a of the ring component 44 is arranged so as to coincide with the notch 43a.

In the above state, the whole is heated and the brazing material 4 is heated.
5 and 46 are melted, and the outer shaft sleeve 35, the inner shaft sleeve 38, and the airtight window member 33 are soldered in a vacuum airtight manner. At this time, a molybdenum ring component 44 for clearance clearance is brazed together inside the inner shaft sleeve 38.

After that, the holding jig 43 is removed, and the cooling circuit component 39, the coupling member 40, the introduction path 41, and the inside of the inner conductor connecting body 37 and the inner shaft sleeve 38 are provided as shown in FIG.
The lead-out path 42 and the like are soldered.

According to the above-described method, the joint between the airtight window member 33 and the inner shaft sleeve 38 comes into close contact with each other due to the thermal expansion of the holding jig 43 at the time of soldering. A coaxial high-frequency hermetic window structure in which no occurrence occurs is constructed.

[0012]

In the conventional coaxial high-frequency airtight window structure, the inner sleeve and the airtight window member are airtightly brazed using a holding jig, and then the cooling circuit components and the like are mounted in the inner shaft sleeve. Assembled in contact. For this reason, two brazing steps are required, and the productivity is reduced. Further, there is a problem that a holding jig is required, and the number of parts required for manufacturing increases.

An object of the present invention is to provide a coaxial high-frequency hermetic window structure which solves the above-mentioned drawbacks, has high productivity, and has a small number of parts.

[0014]

According to the present invention, there is provided an outer shaft sleeve constituting an outer conductor portion of a coaxial line, and an inner shaft sleeve located inside the outer shaft sleeve and constituting an inner conductor portion of the coaxial line. A dielectric hermetic window member brazed in vacuum between the outer shaft sleeve and the inner shaft sleeve,
In a coaxial high-frequency hermetic window structure including a cooling circuit component disposed inside the inner shaft sleeve and constituting a passage of a cooling medium, the airtight window member is used for eliminating a gap at a back side portion of the inner shaft sleeve brazed. A ring component is brazed, and an outer peripheral surface of a cooling circuit component also serving as an assembly jig is closely or closely provided inside the ring component.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIG. Reference numeral 11 denotes a cylindrical outer shaft constituting an outer conductor portion of the coaxial line. An inner shaft 12 constituting an inner conductor portion of the coaxial line is provided inside the outer shaft 11. Between the outer shaft 11 and the inner shaft 12, a perforated disk-shaped hermetic window member 1 made of dielectric ceramic for dividing a coaxial line into an atmosphere side and a vacuum side.
3 are hermetically bonded.

The outer shaft 11 has a cylindrical body 14 for a cooling jacket.
And an outer sleeve 15 made of copper formed on an inner surface portion thereof,
A cooling water passage 16 and the like are formed on the back side of the outer shaft sleeve 15 in an annular shape.

The inner shaft 12 includes an inner conductor connector 17 connected to another inner conductor portion, an inner sleeve 18 made of copper joined to the outer edge of the inner conductor connector 17, and an inner sleeve 18.
Cooling circuit component 19, which is located inside the cooling water passage, and constitutes a water passage for cooling the inner shaft sleeve 18 and the like.
A connecting member 20 to which ends of the pipes are connected, a pipe 21 forming an introduction path 21a for introducing cooling water to the cooling circuit component 19,
It is composed of a pipe 22 and the like constituting a lead-out passage 22a for leading out cooling water. Inner conductor connector 17 and cooling circuit component 19, cooling circuit component 19 and coupling member 20, coupling member 2
0 and the introduction path pipes 21 and 22 are all joined by brazing.

The cooling circuit component 19 is formed of copper or stainless steel into a cylindrical shape, and is composed of a thick portion 19a having a thick and trapezoidal cross section and a thin portion 19b located on both sides thereof. ing. The outer diameter of the thick portion 19 a is formed to be slightly smaller than the inner diameter of the inner sleeve 18. The thick portion 19a is formed with an opening connecting one side to the other side, for example, a concave portion 19c is formed in the outer peripheral portion, and a notch is formed on the opposite side, that is, on the lower side in the drawing. A hole 19d is provided. Therefore, the cooling water introduced from the introduction path 21
As shown by arrows Y1, Y2, Y3, and Y4, through holes 19
It is structured to be led out from the lead-out path 22 through the d and the concave portion 19c.

Next, a method for manufacturing the above-described coaxial high-frequency hermetic window structure will be described. First, as shown in FIG.
Inside the outer shaft 11, components constituting the inner shaft 12, for example, the inner conductor connector 17, the inner shaft sleeve 18, the cooling circuit component 1
9, the coupling member 20, the introduction path pipes 21 and 22, and the like are arranged. At this time, the thick portion 19a of the cooling circuit component 19
However, the airtight window member 13 and the inner shaft sleeve 18 are positioned so as to face the back side of the inner sleeve 18 at the portion where the airtight window member 13 and the inner sleeve 18 are joined.

The thick portion 19 of the cooling circuit component 19
A thin ring part 23 made of molybdenum for eliminating a gap is disposed between the ring part 23 and the inner shaft sleeve 18, and at the same time, a brazing material 24 is disposed between the ring part 23 and the inner shaft sleeve 18. A brazing material 25 is also arranged between the inner sleeve 18 and the airtight window member 13. Further, the brazing material (not shown) is also provided at the respective joints of the inner conductor connector 17 and the cooling circuit component 19, the cooling circuit component 19 and the coupling member 20, the coupling member 20 and the pipe 21, and the coupling member 20 and the pipe 22. Place.

The cut 23a of the ring component 23 is located at the position of the through hole 19d formed by the cutout of the cooling circuit component 19.

The whole is heated in the above-mentioned state,
4 and 25, the inner sleeve 18 and the hermetic window member 1
Vacuum brazing is performed between the three spaces. At this time, a thin ring part 23 made of molybdenum is brazed together inside the inner sleeve 18. The outer periphery of the thick portion 19a of the cooling circuit component 19 also serving as an assembling jig is in close contact with or close to the inner peripheral surface of the gap component ring component 23, or is partially brazed. .

FIG. 2 shows a sectional structure of the inner shaft 12 described above. FIG. 2 is a cross-sectional view of FIG. 1 taken along line a-a from the inner shaft sleeve 18 at the position of the line segment aa. The same reference numerals are given to portions corresponding to FIG. However, the brazing material 24 or the molten brazing material is not shown.

According to the above-described method, the joining of the inner shaft sleeve and the airtight window member and the joining of the cooling circuit components are performed in one step, and the productivity is improved. Also, the cooling circuit parts
It is used as a holding jig when the inner sleeve and the airtight window member are soldered. Therefore, a dedicated holding jig for joining the inner shaft sleeve and the airtight window member is not required, and the number of parts can be reduced.

The cooling circuit component 19 may be assembled without forming the cut-out through hole 19d. In this case, a through hole through which the refrigerant can flow in and out may be formed in a part of the thin portion 19b.

[0026]

According to the present invention, a coaxial high-frequency hermetic window structure having high productivity and a small number of parts can be realized.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view illustrating an embodiment of the present invention.

FIG. 2 is a sectional view showing a structure of an inner shaft portion of the present invention.

FIG. 3 is a cross-sectional view for explaining a conventional example.

FIG. 4 is a cross-sectional view for explaining a conventional manufacturing method.

FIG. 5 is a sectional view showing a structure of an inner shaft portion of a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 ... Outer shaft 12 ... Inner shaft 13 ... Hermetic window member 14 ... Cylindrical body for cooling jackets 15 ... Outer shaft sleeve 16 ... Cooling water channel 17 ... Inner conductor connector 18 ... Inner shaft sleeve 19 ... Cooling circuit parts 19a ... Cooling circuit parts Thick part 19b ... thin part of the cooling circuit part 19c ... concave part of the cooling circuit part 19d ... through hole of the cooling circuit part 20 ... coupling member 21 ... pipe for the lead-in path 22 ... pipe for the lead-out path 23 ... ring parts 24, 25 … Brazing material

Claims (3)

[Claims] An outer sleeve that forms an outer conductor of the coaxial line; an inner sleeve that is located inside the outer sleeve and that forms an inner conductor of the coaxial line; A coaxial high-frequency hermetic window structure comprising: a dielectric hermetic window member brazed in a vacuum hermetic manner with a shaft sleeve; and a cooling circuit component disposed inside the inner shaft sleeve and constituting a passage of a cooling medium. A gap eliminating ring component is brazed to the back side of the inner shaft sleeve to which the airtight window member is brazed, and the outer peripheral surface of a cooling circuit component also serving as an assembly jig is closely or closely provided inside the ring component. A coaxial high-frequency hermetic window structure characterized in that: 2. The cooling circuit component according to claim 1, wherein the airtight window member and the inner shaft sleeve are joined to each other with a thicker portion facing a back side of the inner sleeve and a thicker portion facing the back side of the inner sleeve. 2. The coaxial high-frequency hermetic window structure according to claim 1, comprising a thin portion having a small thickness. 3. A coaxial high-frequency hermetic window structure according to claim 2, wherein a through-hole through which a cooling medium can flow in and out of the cooling circuit component is provided.