JP2001255125A - Optical shape measuring instrument - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical shape measuring instrument, capable of accurately measuring not only the bite-in shape form but also the slippage shape of a rolled material and is hard to generate measuring errors not only when an object to be measured is moved at a high speed but also when the object to be measured is twisted and vibrated, to permit an accurate shape measurment. SOLUTION: In the optical shape measuring instrument, where a plurality of slit light projectors are arranged around a object to be measured and image pickup apparatus for picking up the images of the slit lights reflected from the object to be measured are arranged around the object to be measured, the light projection positions of the adjacent slit light projectors are changed, so that the slit lights from the adjacent slit light projectors among a plurality of the slit light projectors do not overlap on the surface of the object to be measured, and a function providing a difference between the light projection times of the adjacent slit light projectors to project slit lights is provided and an optical band-pass filter or polarizing filter transmitting only one of the two slit lights from the adjacent slit light projectors from among a plurality of the slit light projectors is provided to each of the image pickup apparatuses.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention belongs to the technical field related to an optical shape measuring device, and is an optical shape measuring device used for determining the dimensions and cross-sectional shape of a rolled material in a hot rolling line such as a bar or a wire. Belongs to the technical field.

[0002]

2. Description of the Related Art As a shape measuring device of an optical shape measuring method, there is a shape measuring device based on the principle as shown in FIG.
This principle is based on the principle that, as shown in FIG. 1, when a shape measuring object (hereinafter also referred to as an object to be measured) is arranged in a parallel light beam incident on a light receiving and measuring device having a large number of light receiving elements, it is blocked by the object to be measured. The shape of the object to be measured can be measured by the width of the light beam.

As shown in FIG. 2, in the above-mentioned optical shape measuring device, a parallel light emitting device and a light receiving measuring device are arranged at positions separated by a shape measuring object such as a rolled material. The emission device and the light receiving measurement device measure the shape of the object to be measured while rotating (revolving) around the object to be measured (hereinafter, the shape measuring device is referred to as a conventional device 1).

On the other hand, there is a shape measuring apparatus of the type shown in FIG. As shown in FIG. 3, the shape measuring apparatus includes a plurality of beam-scanning laser displacement meters of a type that scans a laser spot light with a mirror around a workpiece such as a rolled material. Is scanned to measure the shape of the object to be measured, and the shape of the object to be measured is measured (hereinafter, this shape measuring device is referred to as a conventional device 2).

[0005]

The conventional apparatus 1 has the following problems (A) to (C).

(A) The width of the light beam cut off by the object to be measured, that is, the shadow of the object to be measured is detected by the light receiving element, and the shape of the object to be measured is measured. It is not possible to accurately measure the inset shape (both ears or one ear), the offset shape of the rolled material, and the like.

(B) Since the parallel beam emitting device and the light receiving and measuring device measure the shape of the measured object while rotating (revolving) around the measured object, the entire circumference of the measured object is measured. It takes time. For this reason, when the object to be measured is moving at a high speed, the object to be measured moves by several tens of meters until the measurement of the entire circumference shape is completed, and therefore, accurate instantaneous cross-sectional shape measurement is performed. If the torsion vibration of the object to be measured occurs, accurate shape measurement cannot be performed.

(C) It is necessary that the optical axes of the parallel light emitting device and the light receiving and measuring device coincide with each other, but it takes time to adjust the optical axes of both devices to coincide. Further, even if the alignment of the optical axes of both the parallel light emitting device and the light receiving and measuring device is stationary while the parallel light emitting device and the light receiving and measuring device are stationary, the deviation of the optical axes of the two is caused by the centrifugal force during the rotation (revolution) of the two. This is likely to cause the optical axes of the two to become inconsistent, and measurement errors due to the deviation of the optical axes are likely to occur.

On the other hand, in the conventional device 2,
There is a problem as shown in (D).

(D) Since the shape of the object to be measured is measured by scanning the laser beam, when the object to be measured is moving at a high speed, the oblique cross-sectional shape of the object to be measured is measured. The cross-sectional shape of an object cannot be measured. In particular, when the object to be measured is vibrating torsionally or vibrating vertically and horizontally, the vibration component is reflected in the measurement result as a shape measurement error, and accurate shape measurement cannot be performed.

The present invention has been made in view of such circumstances, and its object is to solve the problems (A), (B), (C), and (C) of the conventional apparatus 1 and the conventional apparatus 2. D)
It can accurately measure both the biting shape and the skewed shape of the rolled material. Also, measurement errors occur when the object to be measured (shape measurement object) is moving at high speed or when torsion vibration of the object to be measured occurs. An object of the present invention is to provide an optical shape measuring device which is difficult and can perform accurate shape measurement.

[0012]

In order to achieve the above object, an optical shape measuring apparatus according to the present invention comprises:
9 is an optical shape measuring apparatus having the following configuration.

That is, in the optical shape measuring apparatus according to the first aspect, a plurality of light projectors for projecting the slit light to the shape measuring object are arranged around the shape measuring object, and the light is reflected from the shape measuring object. An optical shape measurement device provided with an imaging device that captures slit light, so that slit light from adjacent light emitters in the plurality of light emitters does not overlap on the surface of the shape measurement target. An optical shape measuring apparatus, wherein the plurality of light projectors are arranged by changing the light projecting positions of adjacent light projectors (first invention).

According to a second aspect of the present invention, in the optical shape measuring device, a plurality of light projectors for projecting slit light to the shape measuring object are arranged around the shape measuring object, and the light is reflected from the shape measuring object. An optical shape measurement device provided with an imaging device that captures slit light, wherein the plurality of light projectors are adjacent to each other so that slit light from adjacent light projectors does not overlap on the surface of the shape measurement object. An optical shape measuring apparatus characterized by having a time difference light projecting function of projecting light with a difference in light projecting time of the light projector (second invention).

According to a third aspect of the present invention, in the optical shape measuring device, a plurality of light projectors for projecting slit light to the shape measuring object are arranged around the shape measuring object, and the light is reflected from the shape measuring object. An optical shape measuring apparatus in which an image pickup device for picking up slit light is arranged, wherein wavelengths of slit lights from adjacent light projectors in the plurality of light projectors are different, and one of the slit lights is one of the slit lights. An optical shape measurement device, wherein an optical bandpass filter that transmits only light is provided in each of the imaging devices (third invention).

According to a fourth aspect of the present invention, in the optical shape measuring device, a plurality of light projectors for projecting the slit light to the shape measuring object are arranged around the shape measuring object, and the light is reflected from the shape measuring object. An optical shape measurement device provided with an imaging device that captures slit light, wherein the plurality of light projectors are arranged such that a linear polarization plane of slit light from adjacent ones of the plurality of light projectors has orthogonal polarization characteristics. An optical shape measuring apparatus characterized in that each of the imaging devices is provided with a light emitting device, and a polarizing filter that transmits only the linear polarization direction of one of the slit lights in the linearly polarized light of the slit light. (4th invention).

The optical shape measuring device according to the fifth aspect is the optical shape measuring device according to the first, second, third or fourth aspect, wherein each of the light projectors simultaneously emits a plurality of parallel slit lights. Fifth invention). The optical shape measuring device according to claim 6 is the optical shape measuring device according to claim 1, 3, 4, or 5, wherein all of the imaging devices synchronously perform shutter photographing (sixth invention). The optical shape measuring device according to claim 7 is the optical shape measuring device according to claim 1, 3, 4, 5, or 6, wherein the plurality of light emitters synchronously pulse-light the slit light. invention). The optical shape measuring apparatus according to claim 8, wherein the slit light image by the slit light projected from any one of the plurality of light projectors according to the appearance order of the slit light image in the captured image of the imaging device. An optical shape measuring apparatus according to claim 1, 2, 3, 4, 5, 6, or 7 for identifying whether there is any optical element (an eighth invention). The optical shape measuring device according to claim 9, wherein a plurality of shape measurement results of the shape measuring object detected from a plurality of slit light images detected in a captured image of the imaging device are averaged. An optical shape measuring apparatus according to any one of claims 2, 3, 4, 5, 6, 7, and 8 (a ninth invention).

[0018]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention is implemented, for example, as follows. A plurality of light projectors for projecting slit light onto the shape measurement object are arranged around the shape measurement object, and an imaging device for imaging slit light reflected from the shape measurement object is arranged. At this time, the light projecting positions of the adjacent light projectors are changed (shifted) so that the slit lights from the adjacent light projectors of the plurality of light projectors do not overlap on the surface of the shape measurement object. Are placed. Then, the optical shape measuring device according to the first aspect of the present invention is obtained.

A plurality of light projectors for projecting slit light to the shape measurement object are arranged around the shape measurement object, and an image pickup device for imaging slit light reflected from the shape measurement object is arranged. At this time, a time difference projection is performed by providing a difference in the projection time of the adjacent projectors so that the slit lights from the adjacent projectors in the plurality of projectors do not overlap on the surface of the shape measurement object. It has an optical function.
Then, the optical shape measuring device according to the second invention is obtained.

A plurality of light projectors for projecting slit light to the shape measurement object are arranged around the shape measurement object, and an image pickup device for imaging slit light reflected from the shape measurement object is arranged. At this time, the wavelengths of the slit lights from the adjacent projectors in the plurality of projectors are set to be different from each other, and the optical bandpass filter that transmits only one of the slit lights in the slit light is used. Provided in each of the imaging devices. Then, the optical shape measuring device according to the third invention is obtained.

A plurality of light projectors for projecting slit light to the shape measurement object are arranged around the shape measurement object, and an image pickup device for imaging slit light reflected from the shape measurement object is arranged. At this time, the plurality of light projectors are arranged such that the linear polarization planes of the slit light beams from the adjacent light projectors in the plurality of light projectors have orthogonal polarization characteristics. A polarization filter that transmits only the linear polarization direction of the slit light is provided in each of the imaging devices. Then, the optical shape measuring device according to the fourth invention is obtained.

In the case where the optical shape measuring apparatus according to the first to fourth aspects of the present invention is used, slit light is projected from each of the plurality of light projectors onto a shape measuring object. Then,
Each of these slit lights is applied to the shape measuring object and is reflected on the surface of the shape measuring object, and the reflected slit lights are respectively incident on the image pickup device, and are picked up as a slit light image by the image pickup device. Then, the shape of the shape measurement object is measured based on the results of these imagings.

Hereinafter, the function and effect of the present invention will be mainly described.

(1) In the optical shape measuring apparatus according to the present invention, a plurality of light projectors for projecting the slit light to the shape measuring object are arranged around the shape measuring object, and the light is projected from the shape measuring object. An imaging device for imaging the reflected slit light is arranged.

Therefore, according to the optical shape measuring device of the present invention, when the slit light is projected from each of the plurality of light projectors onto the shape measuring object, the plurality of slit lights are emitted from the periphery of the shape measuring object. Light is projected on the shape measurement object,
Each of these slit lights is applied to the shape measuring object and reflected on the surface of the shape measuring object, and the reflected light (reflected slit light) is incident on the imaging device, and is reflected by the imaging device as a reflected slit light image. Images are captured, and the shape of the shape measurement target can be measured based on the results of these images. For this reason, the following effects can be obtained.

(2) In the conventional apparatus 1, since the shape of the shape measurement object is measured by detecting the shadow of the shape measurement object with the light receiving element, the bite shape as shown in FIG. The shape and the like cannot be measured accurately.

On the other hand, in the optical shape measuring apparatus according to the present invention, a plurality of slit lights are projected onto the shape measuring object from around the shape measuring object, and these slit lights are projected from the surface of the shape measuring object. Since the shape of the object to be measured can be measured by imaging the reflected light of the object, the conventional apparatus 1 can accurately measure both the biting shape and the rolled material leaning shape, which cannot be accurately measured due to a large measurement error. it can.

(3) In the conventional device 1, the shape of the object to be measured is sequentially measured while rotating (revolving) the optical system constituted by the parallel light emitting device and the light receiving and measuring device around the object to be measured. At this time, it takes a long time to measure the entire circumference because the measurement results measured in a series are collected and used as the entire circumference measurement result. Therefore, particularly when the shape measuring object is moving at high speed, the shape measuring object passes between the optical systems while the optical system makes one round around the shape measuring object. For this reason, the measurement position at the start and end of the measurement is significantly different, and when there is a shape change in the longitudinal direction of the shape measurement target, the measurement error is large and accurate shape measurement cannot be performed. In addition, when torsional vibration of the shape measurement object occurs, accurate shape measurement cannot be performed.

On the other hand, in the optical shape measuring apparatus according to the present invention, a plurality of slit lights are simultaneously projected on the shape measuring object over the entire circumference of the shape measuring object, and the sectional shape of the shape measuring object is reduced. Because measurement can be performed, accurate shape measurement can be performed even when the shape measurement object is moving at high speed, and measurement errors occur even when the shape measurement object that moves at high speed changes shape in the longitudinal direction. Difficult and accurate shape measurement. In addition, even when torsional vibration of the shape measurement object occurs, a measurement error hardly occurs, and accurate shape measurement can be performed.

(4) In the conventional apparatus 1, the optical axis of the optical system is displaced due to the centrifugal force at the time of rotation of the optical system, and a measurement error is likely to occur. On the other hand, in the optical shape measuring apparatus according to the present invention, the optical system is stationary, and therefore, a measurement error due to a shift of the optical axis hardly occurs.

(5) In the conventional device 2, since the shape of the object to be measured is measured while scanning the laser beam, when the object to be measured is moving at a high speed, the oblique cross-sectional shape of the object to be measured is measured. , And the cross-sectional shape of the shape measurement object cannot be measured. In particular, when the shape measurement object is twisting or vibrating vertically and horizontally, this vibration component is reflected in the measurement result as a shape measurement error, and accurate shape measurement cannot be performed.

On the other hand, in the optical shape measuring apparatus according to the present invention, a plurality of slit lights are simultaneously projected on the shape measuring object over the entire circumference of the shape measuring object, and the sectional shape of the shape measuring object is changed. Because it can be measured, even when the shape measuring object moving at high speed changes its shape in the longitudinal direction, a measurement error hardly occurs, accurate cross-sectional shape measurement can be performed, and the shape measuring object is subject to torsional vibration In both cases and when oscillating vertically and horizontally, a measurement error hardly occurs, and accurate shape measurement can be performed.

(6) Unlike the conventional apparatus 1 and the conventional apparatus 2, the optical shape measuring apparatus according to the present invention does not have a movable portion, so that the optical system can be easily adjusted and the reliability in terms of maintenance can be improved. Improve the performance.

(7) In the optical shape measuring device according to the present invention, as described above, a plurality of slit lights are simultaneously projected on the shape measurement object over the entire circumference of the shape measurement object by the plurality of light projectors. The cross-sectional shape of the shape measurement object can be measured.

However, when the object to be measured is a cylindrical or cylindrical object such as a steel bar or a wire,
Simply projecting a plurality of slit lights simultaneously onto the shape measurement object over the entire circumference of the shape measurement object using the plurality of light projectors will capture a plurality of reflection slit light images in the captured image of each imaging device. In this case, if it is not correctly identified which of the plurality of reflected slit light images in the captured image is a reflected slit light image due to the slit light projected from which projector, a measurement error due to erroneous detection (erroneous identification) is required. Occurs, and accurate shape measurement cannot be performed.

Therefore, in the optical shape measuring apparatus according to the present invention, a plurality of light projectors for projecting slit light to the shape measuring object are arranged around the shape measuring object as described above, and In addition to arranging an imaging device that captures the slit light reflected from the object, the slit lights from adjacent light emitters in the plurality of light emitters do not overlap on the surface of the shape measurement object. (First invention). That is, among the optical shape measuring devices according to the present invention, in the optical shape measuring device according to the first invention, the slit light from adjacent ones of the plurality of light projectors is a surface of the shape measurement object. The plurality of light projectors are arranged by changing the light projecting positions of the adjacent light projectors so as not to overlap each other.

According to the optical shape measuring apparatus of the first aspect, the slit light from adjacent ones of the plurality of light projectors is shifted so as not to overlap on the surface of the shape measuring object. Can light. For this reason, at least the reflected slit light images by the slit light from the adjacent projectors are not simultaneously captured in the captured images of the individual imaging devices, and the plurality of reflected slit light images are included in the captured images of the individual imaging devices. Can be prevented from being imaged. Therefore, even when the shape measurement target has a cylindrical shape or a cylindrical shape, a measurement error (erroneous detection) due to simultaneous projection of a plurality of slit lights can be reduced, and accurate shape measurement can be performed.

(8) In the optical shape measuring apparatus according to the second invention, a plurality of light projectors for projecting slit light to the shape measuring object are arranged around the shape measuring object as described above, and In addition to arranging an imaging device that captures the slit light reflected from the measurement object, the slit light from adjacent ones of the plurality of light emitters may be disposed on the surface of the shape measurement object. In order to avoid overlapping, a difference in the light emission time of the adjacent light emitters is provided to provide a time difference light emission function of emitting light.

According to the optical shape measuring apparatus according to the second aspect of the present invention, the adjacent light projectors such that the slit lights from the adjacent light projectors in the plurality of light projectors do not overlap on the surface of the shape measurement object. The light can be emitted with a difference in the light emission time. For this reason, at least the reflected slit light images by the slit light from the adjacent projectors are not simultaneously captured in the captured images of the individual imaging devices, and the plurality of reflected slit light images are included in the captured images of the individual imaging devices. Can be prevented from being imaged. Therefore, even when the shape measurement object has a cylindrical shape or a cylindrical shape, measurement errors (erroneous detection) due to the projection of the plurality of slit lights can be reduced, and accurate shape measurement can be performed.

(9) In the optical shape measuring apparatus according to the third invention, a plurality of light projectors for projecting slit light to the shape measuring object are arranged around the shape measuring object as described above, and In addition to disposing an imaging device that captures the slit light reflected from the measurement target, the wavelength of the slit light from adjacent ones of the plurality of light projectors is different, and this slit light Each of the imaging devices is provided with an optical bandpass filter that transmits only one of the slit lights.

According to the optical shape measuring apparatus according to the third aspect of the present invention, even if slit light from adjacent ones of the plurality of light projectors overlaps on the surface of the shape measuring object, these shape measuring devices can be used. Only one reflected light of the reflected light from the object surface passes through the optical bandpass filter and is incident on the imaging device provided with the bandpass filter, and is captured by the imaging device as a reflected slit light image. The other reflected light does not enter the imaging device and is not imaged by the imaging device. For this reason, at least the reflected slit light images by the slit light from the adjacent projectors are not simultaneously captured in the captured images of the individual imaging devices, and the plurality of reflected slit light images are included in the captured images of the individual imaging devices. Can be prevented from being imaged. Therefore, even when the shape measurement target has a cylindrical shape or a cylindrical shape, a measurement error (erroneous detection) due to simultaneous projection of a plurality of slit lights can be reduced, and accurate shape measurement can be performed.

(10) In the optical shape measuring apparatus according to the fourth invention, a plurality of light projectors for projecting slit light to the shape measuring object are arranged around the shape measuring object as described above, and In addition to arranging an imaging device for imaging the slit light reflected from the measurement object, furthermore, a polarization characteristic in which the linear polarization plane of the slit light from the adjacent light emitters in the plurality of light emitters is orthogonal. The plurality of light projectors are arranged so as to provide a polarizing filter that transmits only the linear polarization direction of one slit light of the linearly polarized light of the slit light in each of the imaging devices.

According to the optical shape measuring apparatus according to the fourth aspect of the present invention, even if slit light from adjacent ones of the plurality of light projectors overlaps on the surface of the shape measuring object, the shape of the plurality of light projectors can be measured. Only one reflected light of the reflected light from the object surface is transmitted through the polarizing filter and is incident on the imaging device provided with the bandpass filter, and is captured by the imaging device as a reflected slit light image. Is not incident on the imaging device and is not imaged by the imaging device. For this reason, at least the reflected slit light images by the slit light from the adjacent projectors are not simultaneously captured in the captured images of the individual imaging devices, and the plurality of reflected slit light images are included in the captured images of the individual imaging devices. Can be prevented from being imaged. Therefore, even when the shape measurement target has a columnar shape or a cylindrical shape, a measurement error (erroneous detection) due to simultaneous projection of a plurality of slit lights can be reduced,
Accurate shape measurement can be performed.

(11) As described above, the first invention and the second invention
ADVANTAGE OF THE INVENTION According to the optical shape measuring apparatus which concerns on invention, a 3rd invention, and a 4th invention, the measurement error (erroneous detection) by projection of several slit light can be reduced, and a measurement error is small and accurate shape measurement is performed. be able to. In addition, it is possible to accurately measure the biting shape and the skewed shape of the rolled material. In addition, even when the object to be measured (shape measurement object) is moving at high speed or when torsional vibration of the object to be measured occurs, the measurement error can be obtained. Is less likely to occur, accurate shape measurement can be performed, and a measurement error due to an optical axis shift is less likely to occur.

(12) In the optical shape measuring apparatus according to the first to fourth inventions, when each of the light projectors simultaneously emits a plurality of parallel slit lights, one slit from each of the light projectors is provided. More information (imaging result, shape measurement data) can be obtained by one measurement than in the case of projecting light, and the shape measurement accuracy can be further improved. Further, even when the reflection slit light image is missing, it becomes possible to complement the light image and improve the reliability (fifth invention).

(13) In the optical shape measuring apparatus according to the first, third to fifth aspects of the present invention, if all of the image pickup devices take shutter images in synchronization, the shape measuring object moves at high speed. Even if vibration occurs, a measurement error due to this hardly occurs, and high-precision shape measurement can be performed (sixth invention).

(14) In the optical shape measuring apparatus according to the first, third to sixth aspects of the present invention, when the plurality of light emitters are turned on in synchronization with the pulse light of the slit light, the shape measuring object can be operated at a high speed. Even if it vibrates while it is moving, a measurement error due to this hardly occurs, and high-precision shape measurement can be performed (a seventh invention).

(15) In the optical shape measuring apparatus according to any one of the first to seventh aspects, any one of the plurality of projectors emits light depending on the appearance order of the slit light image in the image captured by the imaging device. It is possible to identify whether the image is a slit light image based on the illuminated slit light (eighth invention).
That is, when the shape measurement object is a steel bar, a wire, or the like, since the shape in the longitudinal direction does not change with a step, the appearance order of the slit light image in the captured image of the imaging device does not change. Therefore, the appearance of the slit light image in the photographed image of the imaging device is determined by which of the plurality of light projectors the slit light image in the photographed image of the imaging device is the slit light image due to the slit light emitted from the plurality of light projectors. Can be identified by order.

(16) Further, by performing geometric calculations using the schematic shape of the shape measurement object and the arrangement parameters of the optical system (light projector, imaging device, etc.) arranged around the shape measurement object, It is possible to determine where in the captured image of each imaging device the reflected light of the slit light projected from is captured, and it is also possible to limit the slit light image detection range in the captured image It is.

(17) In the optical shape measuring apparatus according to the first to eighth inventions, a plurality of the shape measuring objects detected from a plurality of slit light images detected in a photographed image of the imaging device. When the shape measurement results are added and averaged, the accuracy of the shape measurement results can be improved. Further, even if the reflection slit light image is missing, it becomes possible to complement the light image, and the reliability is improved (ninth invention).

(18) In the present invention, the light projector for projecting the slit light is a slit light source used in a slit light projection method (light cutting method) or the like which is a three-dimensional image measurement method. The slit light is, in other words, a sheet-like light emitted from the slit light source (a light projector that emits the slit light) (irradiates the shape measurement target),
It can also be referred to as sheet-like reference light, sheet light, or light sheet.

The optical shape measuring apparatus according to the present invention is, in other words, a kind of optical system of the light cutting system. The shape measuring method using the optical shape measuring apparatus according to the present invention is, in other words, a kind of light cutting method. The slit light image picked up by the image pickup device is, in other words, a kind of light section line image (also called a light section image).

[0053]

(Embodiment 1) FIG. 5 shows an optical shape measuring apparatus according to Embodiment 1 of the present invention. This optical shape measuring device corresponds to an embodiment of the optical shape measuring device according to the first invention. This optical shape measuring device will be described below.
As shown in FIG. 5, light projectors (hereinafter, referred to as slit light projectors) for projecting four slit lights around a material to be measured (a shape measurement object), that is, slit light projectors 1 to 4
Is provided in the direction in which the slit light is orthogonal to the central axis of the shape measuring object, and each slit light reflected from the shape measuring object from a direction having a certain angle with each slit light (hereinafter, also referred to as a light cutting line). Imaging device 1 for imaging
~ 4 are arranged. At this time, the projecting positions of the adjacent slit light projectors are set so that the slit light from the adjacent slit light projectors in the four slit light projectors 1 to 4 does not overlap on the surface of the shape measurement object. By shifting (changing), the four slit light projectors 1 to 4 are arranged.

That is, the slit light (the slit light from the slit light projector 1 and the slit light from the slit light projector 3) emitted from the vertical direction of the shape measurement object by the slit light projector 1 and the slit light projector 3 are shaped. Slit light that does not overlap on the surface of the measurement object and is projected from the left and right directions of the shape measurement object by the slit light projector 2 and the slit light projector 4 (the slit light from the slit light projector 2 and the slit light projector) The slit light from No. 4 does not overlap on the surface of the shape measuring object, but the slit light emitted from the left and right directions of the shape measuring object and the slit light emitted from the vertical direction of the shape measuring object Light may overlap on the surface of the shape measurement object, and if the slit light overlaps on the surface of the shape measurement object, the overlap generation part Since the erroneous measurement and measurement accuracy decreases in occurs, the slit light projector 1 and the slit light projector 3
Position (light projection position of the shape measurement target from the vertical direction) and the light projection position of slit light projector 2 and slit light projector 4 (the light projection position of the shape measurement target from the left and right directions) The slit light is prevented from overlapping on the surface of the shape measurement object. In other words, the slit light from the slit light projector 1 and the slit light from the adjacent slit light projector 2 do not overlap on the surface of the shape measuring object, and the slit light from the slit light projector 2 and the adjacent The slit light from the slit light projector 3 and the slit light from the slit light projector 4 adjacent to the slit light from the slit light projector 3 and the slit light from the slit light projector 4 are measured so that the slit light from the slit light projector 3 does not overlap on the surface of the object to be measured. In order that the slit light from the slit light projector 4 and the slit light from the adjacent slit light projector 1 do not overlap on the surface of the shape measuring object so that they do not overlap on the surface of the object.
Slit light projectors 1 to 4 are arranged.

The shape of a round bar was measured using the optical shape measuring apparatus according to the first embodiment. As a result, even when a plurality of slit light images are observed in an image captured by the imaging device, each slit light image can be observed independently, and a measurement error due to the projection of the plurality of slit light (erroneous detection). It was confirmed that the entire peripheral shape of the round bar could be measured with high accuracy without causing any problem, and accurate shape measurement could be performed.

In the case where the round steel bar as the object to be measured moves at high speed and torsional vibration occurs, the shape was measured using the optical shape measuring apparatus according to the first embodiment. As a result, it was confirmed that a measurement error hardly occurred and accurate shape measurement could be performed.

Further, the shape of the object to be measured having the biting shape or the skewed shape of the rolled material was measured using the optical shape measuring apparatus according to the first embodiment. As a result, it was confirmed that accurate measurement of the shape of the biting shape and the shifted shape of the rolled material was possible.

In the optical shape measuring device shown in FIG. 5, the light cutting type optical system composed of the slit light projector and the image pickup device may be a normal light cutting type optical system shown in FIG. 6 or FIG. The optical system using a shift lens utilizing a light cutting system shown in FIG.

In the ordinary light-section type optical system shown in FIG.
A slit light is projected on the object to be measured, and the reflected slit light from the object to be measured is observed by the imaging device from a direction inclined at a predetermined angle from the slit light plane (sheet light surface). A slit light image (light section line image) B of the measurement point A is obtained on the imaging surface. The three-dimensional position of the measurement point A is calculated (obtained and confirmed) by obtaining the coordinates of the intersection of the line of sight L connecting the slit light image B and the lens center C with the slit light plane.
can do.

In the optical system using a shift lens-type light cutting system shown in FIG. 7, a slit light is projected on an object to be measured, and the reflected slit light from the object to be measured is observed by an image pickup device. A slit light image B at a measurement point A is obtained on an imaging surface of the apparatus. This light-section type optical system is different from the ordinary light-section type optical system shown in FIG. 6 in that the lens optical axis is arranged so as to be orthogonal to the slit light, and the imaging surface of the imaging device is positioned with respect to the slit light surface. Place them in parallel. With such an arrangement, the slit light within the measurement range of the imaging device can be always measured in an in-focus state and at the same resolution. The three-dimensional position of the measurement point A is calculated by calculating the coordinates of the intersection of the line of sight L connecting the slit light image B and the lens center C with the slit light plane, as in the case of the above-mentioned ordinary light-section optical system. Grasp and confirm).

In the optical shape measuring device shown in FIG.
When using any of the above-mentioned optical cutting system optical systems as the optical cutting system optical system composed of the slit light projector and the imaging device, the partial shape data of the shape measurement object obtained by measuring each independent optical system is obtained. By performing coordinate conversion to the same coordinate system, it is possible to measure the entire circumference of the shape measurement target.

(Embodiment 2) FIG. 8 shows an optical shape measuring apparatus according to Embodiment 2 of the present invention. This optical shape measuring device corresponds to an embodiment of the optical shape measuring device according to the fifth invention. This optical shape measuring device will be described below.
As shown in FIG. 8, four slit light projectors (hereinafter, referred to as multiple slit light projectors) for projecting a plurality of parallel slit lights around a shape measurement target (measurement target material), that is, a plurality of slits are provided. The light projectors 1A to 4A are provided in a direction in which the slit light is orthogonal to the central axis of the shape measuring object, and each slit light (light) reflected from the shape measuring object from a direction having a certain angle with each slit light. Cutting line)
Are arranged. At this time, a plurality of adjacent slit light projectors in the four slit light projectors 1A to 4A are arranged such that a plurality of slit light beams from adjacent slit light projectors do not overlap on the surface of the shape measurement object. Shift (change) the light projection position of the slit light projector
The four plural slit light projectors 1A to 4A are arranged.

That is, the plural slit light projectors 1A and the plural slit light projectors 3A emitted from the vertical direction of the shape measuring object do not overlap on the surface of the shape measuring object. The multiple slit light projectors 2A and the multiple slit light projectors 4A project from the left and right directions of the shape measurement target object.The multiple slit light beams do not overlap on the surface of the shape measurement target object. The plurality of slit lights projected from the left and right directions and the plurality of slit lights projected from the top and bottom directions of the shape measurement object may overlap on the surface of the shape measurement object, and the slit light is measured for the shape. If they are overlapped on the surface of the object, erroneous measurement or reduced measurement accuracy will occur at the location where the overlap occurs, so the multiple slit light projector 1A and multiple slit light projector 3A The position (the light projecting position of the shape measuring object from the vertical direction) and the light projecting position by the multiple slit light projectors 2A and 4A (the light projecting position of the shape measuring object from the left and right direction) It is shifted so that the slit light does not overlap on the surface of the shape measurement object. That is, the slit light projectors 1 to 4 in the first embodiment are used.
Instead, a plurality of slit light projectors 1A to 4A were used to arrange the optical system, and the arrangement relationship of the optical system and the like were the same as in the first embodiment.

Using the optical shape measuring apparatus according to the second embodiment, the shape of a round bar was measured. As a result, it was confirmed that each slit light image in the captured image of the imaging device could be observed independently, the entire circumference shape of the round bar could be accurately measured, and accurate shape measurement could be performed. still,
It was also confirmed that more information (imaging result, shape measurement data) can be obtained by one measurement than in the case of Example 1, and that the shape measurement accuracy can be further improved.

In the optical shape measuring device shown in FIG. 8, the light cutting type optical system composed of the slit light projector and the image pickup device is a normal lens arrangement type light cutting type optical system shown in FIG. An optical system using a shift lens and a light cutting system shown in FIG. 10 can be used.

In the optical system of the ordinary lens arrangement type shown in FIG. 9, a slit light is projected onto an object to be measured, and the shape is measured by an image pickup device from a direction inclined at a predetermined angle from the slit light plane. Observe the reflected slit light from the object,
Slit light image of the measurement point A on the imaging surface of the imaging device B, to obtain a slit light image B ₁ of the measurement point A _1. The three-dimensional position of the measurement point A (or A ₁ ) is calculated (understood and confirmed) by obtaining the coordinates of the intersection of the line of sight L connecting the slit light image B (or B ₁ ) and the lens center C with the slit light plane. can do.

In the optical system using a shift lens-type light cutting system shown in FIG. 10, slit light is projected onto the object to be measured, and the imaging device observes the reflected slit light from the object to be measured and picks up the image. slit light image B of the measurement point a on the imaging surface of the device, obtain a slit light image B ₁ of the measurement point a _1. This light-cutting type optical system is different from the light-cutting type optical system of the ordinary lens arrangement type shown in FIG. 9 in that the lens optical axis has an arrangement relationship orthogonal to the slit light, and the imaging surface of the image pickup device is slit light. Place it parallel to the plane. Further, in order to take advantage of the shift lens-based optical cutting system optical system, each of the plural slit lights projected from each of the plural slit light projectors is
The light is projected into the depth of field range of the optical system using the shift lens. With such an arrangement, the slit light within the measurement range of the imaging device can be always measured in an in-focus state and at the same resolution. The three-dimensional position of the measurement point A (or A ₁ ) is calculated (understood and confirmed) by obtaining the coordinates of the intersection of the line of sight L connecting the slit light image B (or B ₁ ) and the lens center C with the slit light plane. can do.

In the optical shape measuring device shown in FIG.
When using any of the above-described light-cutting type optical systems as the light-cutting type optical system composed of a plurality of slit light projectors and an imaging device, the partial shape of the shape measurement object obtained by measuring each independent optical system By transforming the data into the same coordinate system, it is possible to measure the entire circumference of the shape measurement target.

(Embodiment 3) An embodiment of the sixth invention will be described below. In the optical shape measuring apparatus according to the first or second embodiment, a plurality (four) of slit light projectors are continuously lit (continuously emitted) from a plurality (four) of slit light projectors.
An electronic shutter drive signal at a common timing is sent to the image pickup device, so that all of the image pickup devices can perform shutter photographing in synchronization.

The shape was measured using the optical shape measuring device. As a result, even when the shape measuring object vibrates when moving at a high speed, a measurement error caused by the vibration hardly occurs, and high-precision shape measurement can be performed. In this respect, in the case of the first embodiment (and 2). It was confirmed that it was superior.

(Embodiment 4) An embodiment of the seventh invention will be described below. In the optical shape measuring apparatus according to the first or second embodiment, a laser light pulse lighting signal at a common timing is sent to a plurality (four) of slit light projectors, and the plurality (four) of slit light projectors are synchronized. Pulsed lighting of slit light.

The shape was measured using the optical shape measuring apparatus described above. As a result, even when the shape measuring object vibrates when moving at high speed, a measurement error due to this hardly occurs, and high-precision shape measurement can be performed. In this regard, compared to the first and second embodiments. It was confirmed that it was excellent.

(Embodiment 5) An embodiment of the eighth invention will be described below. The shape of a round bar was measured using the optical shape measuring apparatus according to the first or second embodiment. On this occasion,
It has been confirmed that it is possible to identify which of the plurality of slit light projectors is a slit light image by the slit light projected from any of the plurality of slit light projectors based on the appearance order of the slit light images in the image captured by the imaging device. Was done.

(Embodiment 6) An embodiment of the ninth invention will be described below. The shape of a round bar was measured using the optical shape measuring apparatus according to the first or second embodiment. On this occasion,
The plurality of shape measurement results of the shape measurement object detected from the plurality of slit light images detected in the image captured by the imaging device are averaged. As a result, it was confirmed that the accuracy of the shape measurement results could be improved.

(Embodiment 7) An embodiment of the second invention will be described below. With respect to the optical shape measuring apparatus according to the first or second embodiment, adjacent slit light projectors in a plurality of slit light projectors are arranged so that slit lights from adjacent slit light projectors do not overlap on the surface of the shape measurement object. A time difference light projection function is provided in which light is emitted with a difference in the light emission time of the slit light projector.

The shape of a round bar was measured using the optical shape measuring device. As a result, according to the optical shape measuring device, the adjacent slit light projectors such that the slit light from the adjacent slit light projectors in the plurality of slit light projectors do not overlap on the surface of the shape measurement object. Can be projected with a difference in the light projection time of each slit light, so that each slit light image in the captured image of the imaging device can be observed independently, and the measurement error due to the projection of the plurality of slit light It was confirmed that the entire circumferential shape of the round bar could be accurately measured without causing (erroneous detection) and accurate shape measurement could be performed.

In the case where the round bar as the object to be measured moves at a high speed and torsional vibration is generated, the shape is measured using the optical shape measuring apparatus according to the seventh embodiment. As a result, it was confirmed that a measurement error hardly occurred and accurate shape measurement could be performed.

Further, the shape of an object to be measured having a biting shape or a skewed shape of a rolled material was measured using the optical shape measuring apparatus according to the seventh embodiment. As a result, it was confirmed that accurate measurement of the shape of the biting shape and the shifted shape of the rolled material was possible.

(Embodiment 8) An embodiment of the third invention will be described below. In the optical shape measuring apparatus according to the first or second embodiment, the wavelengths of the slit lights from the adjacent slit light projectors in the plurality of slit light projectors are made different, and one of the slit lights in the slit light is used. An optical bandpass filter that transmits only light was provided in each of the imaging devices.

Using the above-mentioned optical shape measuring device, the shape of a round bar was measured. As a result, according to the optical shape measuring device, even if the slit lights from the adjacent slit light projectors in the plurality of slit light projectors overlap on the surface of the shape measuring object, these shape measuring objects Only one reflected light of the reflected light from the surface passes through the optical bandpass filter, enters the imaging device provided with the bandpass filter, and is imaged by the imaging device as a reflected slit light image, The other reflected light does not enter the imaging device and is not imaged by the imaging device. Therefore, a measurement error (erroneous detection) due to simultaneous projection of a plurality of slit lights can be reduced, and accurate shape measurement can be performed. It was confirmed that it could be done.

Also, in the case where the round bar as the object to be measured moves at a high speed and torsional vibration is generated, the shape is measured using the optical shape measuring apparatus according to the eighth embodiment. As a result, it was confirmed that a measurement error hardly occurred and accurate shape measurement could be performed.

Further, the shape of an object to be measured having a biting shape or a skewed shape of a rolled material was measured using the optical shape measuring apparatus according to the eighth embodiment. As a result, it was confirmed that accurate measurement of the shape of the biting shape and the shifted shape of the rolled material was possible.

(Embodiment 9) An embodiment of the fourth invention will be described below. In the optical shape measuring apparatus according to the first or second embodiment, the plurality of slits are arranged such that the linear polarization planes of the slit lights from adjacent slit light projectors in the plurality of slit light projectors have orthogonal polarization characteristics. A light projector was arranged, and a polarizing filter that transmits only the linear polarization direction of one of the slit lights of the slit light was provided in each of the imaging devices.

Using the above-mentioned optical shape measuring device, the shape of a round bar was measured. As a result, according to the optical shape measuring device, even if the slit lights from the adjacent slit light projectors in the plurality of slit light projectors overlap on the surface of the shape measuring object, these shape measuring objects Only one reflected light of the reflected light from the surface passes through the polarizing filter and is incident on the imaging device provided with the bandpass filter, and is imaged by the imaging device as a reflected slit light image, and the other reflected light is reflected. Light does not enter the imaging device and is not imaged by the imaging device. Therefore, measurement errors (erroneous detection) due to simultaneous projection of a plurality of slit lights can be reduced, and accurate shape measurement can be performed. It was confirmed that it was possible.

Also, in the case where the round bar as the object to be measured moves at high speed and torsional vibration occurs, the shape was measured using the optical shape measuring apparatus according to the ninth embodiment. As a result, it was confirmed that a measurement error hardly occurred and accurate shape measurement could be performed.

Further, with respect to the shape measuring object having a biting shape or a skewed shape of the rolled material, the shape was measured using the optical shape measuring apparatus according to the ninth embodiment. As a result, it was confirmed that accurate measurement of the shape of the biting shape and the shifted shape of the rolled material was possible.

[0087]

According to the optical shape measuring apparatus of the present invention, it is possible to accurately measure a shape with a small measurement error, and to accurately measure a biting shape and a rolling shape of a rolled material. In addition, even when the shape measuring object is moving at high speed or when the to-be-measured object generates torsional vibration, a measurement error hardly occurs and accurate shape measurement can be performed.
Further, a measurement error due to a shift of the optical axis hardly occurs.

[Brief description of the drawings]

FIG. 1 is a diagram showing an outline of the principle of a conventional optical shape measuring method.

FIG. 2 is a schematic diagram showing an outline of an example of a conventional optical shape measuring device (conventional device 1).

FIG. 3 is a schematic view showing an outline of an example of a conventional laser beam scanning type shape measuring device (conventional device 2).

FIG. 4 is a schematic diagram showing an example of a biting shape that cannot be accurately measured by a conventional optical shape measuring device.

FIG. 5 is a schematic diagram illustrating an outline of an optical shape measuring apparatus according to the first embodiment of the present invention.

FIG. 6 is a schematic view showing an outline of an example of a normal light-section optical system.

FIG. 7 is a schematic diagram showing an outline of a light-cutting type optical system using a shift lens.

FIG. 8 is a schematic diagram illustrating an outline of an optical shape measuring apparatus according to a second embodiment of the present invention.

FIG. 9 is a schematic diagram showing an outline of an example of a light-cutting type optical system of a normal lens arrangement type.

FIG. 10 is a schematic diagram showing an outline of an example of a light-cutting type optical system using a shift lens.

Continued on the front page F term (reference) 2F065 AA49 AA52 AA53 BB12 BB15 DD06 DD14 FF01 FF02 FF09 FF49 GG08 GG23 HH05 JJ03 JJ05 JJ19 JJ26 LL10 LL22 LL30 LL34 MM14 NN08 QQ42

Claims (9)

[Claims] 1. A plurality of light projectors for projecting slit light onto the shape measurement object are arranged around the shape measurement object, and an imaging device for imaging slit light reflected from the shape measurement object is arranged. An optical shape measuring device, wherein changing the light projecting position of adjacent light projectors so that slit light from adjacent light projectors in the plurality of light projectors does not overlap on the surface of the shape measurement object. An optical shape measuring device comprising a plurality of light projectors. 2. A plurality of light projectors for projecting slit light onto the shape measurement object are arranged around the shape measurement object, and an imaging device for imaging slit light reflected from the shape measurement object is arranged. An optical shape measurement device, wherein a difference is provided in the light emission time of adjacent light emitters so that slit light from adjacent light emitters in the plurality of light emitters does not overlap on the surface of the shape measurement object. An optical shape measuring device having a time difference light projecting function of projecting light. 3. A plurality of light projectors for projecting slit light onto the shape measurement object are arranged around the shape measurement object, and an imaging device for imaging slit light reflected from the shape measurement object is arranged. An optical shape measuring device, wherein the wavelengths of slit lights from adjacent light projectors in the plurality of light projectors are different, and an optical bandpass filter that transmits only one of the slit lights in the slit light. Is provided in each of the imaging devices. 4. A plurality of light projectors for projecting slit light onto the shape measurement object are arranged around the shape measurement object, and an imaging device for imaging slit light reflected from the shape measurement object is arranged. An optical shape measuring apparatus, wherein the plurality of light projectors are arranged such that linear polarization planes of slit light from adjacent light projectors in the plurality of light projectors have orthogonal polarization characteristics. An optical shape measuring device, wherein a polarizing filter that transmits only the linear polarization direction of one slit light in the linearly polarized light is provided in each of the imaging devices. 5. The optical shape measuring apparatus according to claim 1, wherein each of the light projectors simultaneously emits a plurality of parallel slit lights. 6. The optical shape measuring device according to claim 1, wherein all of the image pickup devices synchronously perform shutter photographing. 7. The optical shape measuring apparatus according to claim 1, wherein the plurality of light emitters synchronously pulse light slit light. 8. A method according to claim 1, wherein said plurality of light emitters are used to determine which one of the plurality of light projectors is a slit light image based on the appearance order of the slit light images in the image captured by the imaging device. The optical shape measuring device according to 1, 2, 3, 4, 5, 6, or 7. 9. The method according to claim 1, wherein a plurality of shape measurement results of the shape measurement object detected from a plurality of slit light images detected in an image captured by the imaging device are averaged.
The optical shape measuring apparatus according to 3, 4, 5, 6, 7, or 8.