JP2001249620A - Multistage infrared cooling furnace for flat panel display - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cooling furnace which obviates the generation of static electricity during cooling and the contamination of substrate surfaces with dust. SOLUTION: Multiple hollow IR cooling plates are disposed in multiple stages apart prescribed spacings within a furnace casing and the connecting pipes interposed at both ends of the respective hollow IR cooling plates are connected to the refrigerant passage spaces of the spacing within the furnace casing. In addition, the glass substrates are arranged between the respective hollow IR cooling plates.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat panel display substrate cooling furnace.

[0002]

2. Description of the Related Art Conventionally, a liquid crystal substrate and a PDP substrate are cooled by blowing air into a furnace. However, dust is scattered and contaminated on the upper surface of the substrate. There have been problems such as the occurrence of a temperature gradient, the generation of static electricity on the substrate surface, and the damage of component parts on the substrate.

[0003]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a cooling furnace which uniformly and rapidly cools an in-plane temperature of a substrate and which is free from generation of static electricity during cooling and dust contamination on the substrate surface. is there.

[0004]

The means of the present invention are as follows.

[0005] A number of hollow infrared cooling plates are provided in a furnace at a required interval in multiple stages, and connecting pipes interposed at both ends of each hollow infrared cooling plate are connected to a refrigerant passage space between the furnaces. A flat panel display substrate cooling furnace having a glass substrate interposed between hollow infrared cooling plates.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to the drawings, reference numeral 1 denotes a cooling furnace body, on which a refrigerant passage plate 2 is provided on the peripheral surface, and a large number of hollow infrared cooling plates 3 are mounted in the furnace body 1 at small intervals. . Reference numeral 4 denotes a fixing hook for the infrared cooling plate 3, which is fixed to the inner surface of the refrigerant passage plate 2 and fixes the infrared cooling plate 3. Reference numerals 5 and 6 denote connecting pipes for inserting a refrigerant into the cooling plates 3 protruding from both ends of each infrared cooling plate, 5 is an insertion side, and 6 is a sending side. Further, a coolant inlet pipe 7 and an outlet pipe 8 are connected to the furnace body 1. Note that FIG.
In the embodiment shown in FIG. 5, a bent hollow tube 3 which is bent in series instead of the hollow infrared cooling plate 3 between the refrigerant inlet tube 7 and the outlet tube 8 is used.
'Is shown.

[0007]

According to the present invention, for the infrared cooling by the infrared cooling plate, the inside of the furnace can be uniformly and rapidly cooled in a clean atmosphere without dust scattering such as cold air cooling. Further, since the substrate does not rub against the air in the furnace, no static electricity is generated, there is no contamination due to scattering and adhesion of dust, and the quality and productivity can be greatly improved as compared with the conventional furnace.

[Brief description of the drawings]

FIG. 1 is a front view.

FIG. 2 is a cross-sectional plan view.

FIG. 3 is a partially enlarged sectional view of FIG. 1;

FIG. 4 is a cross-sectional plan view showing another embodiment.

FIG. 5 is a partially longitudinal front view of the same.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Cooling furnace body 2 Refrigerant passage plate 3 Infrared cooling plate 4 Fixed hook 5 Insertion side connection tube 6 Delivery side connection tube 7 Refrigerant inlet tube 8 Refrigerant outlet tube 9 Glass substrate

Claims (1)

[Claims] 1. A number of hollow infrared cooling plates are arranged in a furnace at required intervals in multiple stages, and connecting pipes interposed at both ends of each hollow infrared cooling plate are connected to a refrigerant passage space between the furnace bodies. And a flat panel display substrate cooling furnace in which a glass substrate is interposed between the hollow infrared cooling plates.