JP2001249068A - Environmental test device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve the problems that a space for the opening/closing movements of a rotating-type door and a wide installation area are necessary for a conventional environmental test device provided with the rotating-type door and that a complicated and expensive mechanism for moving sliding-type doors in different directions is necessary for an environmental test device provided with the sliding-type doors. SOLUTION: A shutter-type heat insulating door 10 is provided in such a way as to cover the front surface of the opening 2a of the laboratory 2 of an environmental test device main body 1, and a frame-shaped packing 16 to be pressed against the inner surface of the heat insulating door 10 is retractably provided for the circumferential edge of the opening 2a. In addition, an extendable/contractible seal member 19 formed by connecting a plurality of elastic hollow parts 19a to one another is provided between the packing 16 and the circumferential edge of the opening 2a to maintain airtightness between the laboratory 2 and heat insulating door 10.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an environmental test apparatus used to test the reliability of an electronic component such as a semiconductor or various devices by applying an environmental load such as a predetermined temperature and humidity.

[0002]

2. Description of the Related Art Generally, an environmental test apparatus is provided with an opening for taking a sample in and out of a test chamber, and the opening is opened and closed by a door.

[0003] In the conventional environmental test apparatus, the side of the door is connected to the apparatus main body with a hinge, and the door is opened and closed by turning the door, or the door is slidably mounted on the apparatus main body, and the door is closed. At this position, the door is pressed by a separately provided driving means so as to be in close contact with the seal member on the periphery of the opening, so that the heat insulating and airtightness is maintained.

[0004] Japanese Patent Application Laid-Open No. 6-11 / 1999 discloses a method in which a slidable door is pressed to close an opening of a test chamber.
No. 7992 and JP-A No. 8-232532.

[0005]

Among the above-mentioned conventional environmental test apparatuses, the one in which the door is turned to open and close the opening has a large space for opening and closing the door in front of the main body of the apparatus. Necessary, this space is a dead space that cannot be used except for opening and closing the door.

Further, as disclosed in JP-A-6-117792 and JP-A-8-232532, even those using a sliding door, the door is moved to the side of the apparatus main body, or upward or downward. There is a problem that space is needed for this. Further, in the case of using the sliding door, the door must be pushed in the direction perpendicular to the direction in which the door slides, and must be brought into close contact with the sealing member of the opening, so that the driving mechanism is complicated and expensive. There was a problem of becoming something.

An object of the present invention is to solve the problems of the above-mentioned conventional environmental test apparatus.

[0008]

In order to solve the above-mentioned problems, the invention according to claim 1 of the present invention is directed to a horizontally long plate so as to cover a front surface of an opening of a test chamber of an environmental test apparatus main body. An environmental test characterized by providing a shutter-type heat-insulating door formed by connecting the bodies in a bendable manner, and providing a frame-shaped packing that can be pressed into contact with the inner surface of the heat-insulating door at the periphery of the opening. Device.

According to a second aspect of the present invention, in addition to the configuration of the first aspect of the present invention, rollers are provided at both ends of each plate-like body constituting the heat insulating door, and the side edges of the opening of the test chamber are provided. A configuration in which a guide groove with which the roller is engaged is provided along the upper surface of the test chamber, and the heat insulating door is guided along the guide groove, so that the heat-insulating door is stored above the test chamber. It is characterized by.

According to a third aspect of the present invention, in the configuration of the second aspect of the present invention, a hemispherical concave portion is provided at each end of each plate-like body constituting the heat-insulating door so as to hold the ball so as not to fall off. In addition to the configuration, the ball accommodated in the concave portion comes into contact with a guide member provided with a guide groove, whereby the lateral movement of the heat insulating door is regulated.

According to a fourth aspect of the present invention, the structure of the first aspect of the present invention is characterized in that an expandable seal member is provided between the packing and the periphery of the opening of the test chamber. .

A fifth aspect of the invention is characterized in that, in the constitution of the fourth aspect of the invention, the sealing member is limited to a plurality of elastic hollow portions connected to each other.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail based on illustrated embodiments.

FIG. 1 is a simplified front view showing an embodiment of an environmental test apparatus according to the present invention, and FIG. 2 is a sectional view taken along line AA 'of FIG. FIG. 3 is a sectional view taken along the line BB ′ of FIG. As shown in the figure, the environmental test apparatus of the present invention has a front half (a lower half in FIG. 2) of a main body 1 formed in a box shape.
In addition, a test room 2 (two chambers are arranged side by side in the illustration) is provided,
In the latter half, a machine room 3 for installing devices (not shown) for controlling the environment in the test room 2 and various measuring devices (not shown) is provided.

The test chamber 2 is covered with a heat insulating material 4 except for the front opening 2, and a sirocco fan 5 for circulating the air in the test chamber 2 is provided above the test chamber 2. . The rear wall 2b of the test room 2 has a machine room 3
A cable hole 2c for passing a measurement cable (not shown) is provided so as to communicate with the inside.

The ceiling 3a of the machine room 3 has a ventilation fan 6
And an exhaust hole 7 is provided.

Here, in the environmental test apparatus of the present invention, from the front side of the test chamber 2 to the upper side (from the left side to the upper side of the test chamber in FIG. 3), the left and right sides (the left and right sides in FIG. A pair of guide members 9 are provided, and a guide groove 9 a formed in the guide member 9 is provided.
In addition, a shutter type heat insulating door 10 is movably mounted. This movement is performed by, for example, a door driving device (not shown) in which the upper and lower ends of the heat insulating door 10 are connected to a chain (not shown) of the door driving device provided along the guide member 9. I have.

The heat-insulating door 10 connects horizontally long plate-like bodies 10a, each of which has a surface of the heat-insulating material 4 covered with a metal, as shown in FIG. It is a plurality of continuous ones. The guide grooves 9 of the guide member 9 are provided on the end faces on both sides of each plate-shaped body 10a.
The roller 12 which engages with a is protruded. A ball holding fitting 13 having a hemispherical concave portion 13a is attached to an end surface between the upper and lower rollers 12, 12, and a ball 14 housed in the concave portion 13a is guided to a guide positioned outside the ball. The member 9 is held so as not to fall off. In addition, between each plate-like body 10a,
In the width (horizontal) direction, a horizontally long packing 15 is provided before and after (in FIG. 4, right and left).

At the outer peripheral edge of the opening 2a of the test chamber 2, a frame 17 for holding a frame-shaped packing 16 slightly larger than the opening 2a is provided. The frame 17 is fixed to a rod 18a of a cylinder device 18 attached to the apparatus main body 1, and is driven in a direction to protrude and retract from the opening 2a.

The frame 17 and the opening 2a of the test chamber 2 are
And a plurality of elastic hollow portions 19a as shown in FIG.
Are provided so as to extend and contract, so that the inside of the frame 17 is kept airtight.

The packing 16 and the sealing member 19
As the material for, a material which is hardly affected by heat among elastic materials such as silicone rubber and an elastomer resin may be appropriately selected and used.

The environmental test apparatus of the present invention has the above-described configuration.

In FIG. 1, reference numeral 20 denotes an emergency stop switch, 21 and 22 denote left and right test chambers 2, respectively.
An operation panel 23 for setting environmental conditions 2 is a breaker panel. In FIG. 2, reference numeral 23 denotes a control plate, in FIG. 3, reference numeral 8 denotes a sirocco fan motor, and reference numeral 24 denotes a heater unit.

Next, the handling will be described.

First, a shutter-type heat-insulating door 10 is opened as shown on the left side of FIG. 1, and a test object such as a semiconductor to be tested (see FIG. (Not shown) is stored in the test room 2. This storage may be automatically performed using a robot or the like. In this case, the test specimen is set in a state in which a predetermined number of test specimens can be tested in advance using a dedicated storage holder (not shown). You should do it.

When the specimen is a semiconductor such as a laser diode, and operation such as operation confirmation under test environment conditions is performed, an operation cable (not shown) is inserted through a cable hole 2c on the back of the test chamber 2. The cable may be pulled out and connected to a measuring instrument (not shown) installed in the machine room 3.

When the setting of a predetermined number of specimens is completed as described above, the switch of the door driving device (not shown) is turned on, and the shutter type heat insulating door 10 is driven in the direction in which the door is closed. Thus, the shutter-type heat-insulating door 10 stored above the test chamber 2 is guided by the guide groove 9a with which the roller 12 is engaged, and descends to the front of the opening 2a. At this time, the heat-insulating door 10 is smoothly guided along the round portion 9a 'of the guide groove 9a because the plate-like bodies 10a constituting the door are connected to bendable. Turns almost right angle. In addition, the balls 14 abutting on the guide member 9 near the guide groove 9a are held in a semi-projecting state at both ends of each plate-like body 10a. There is no danger that the door will be displaced or tilted in the lateral direction.
0 moves smoothly.

In this manner, when the heat insulating door 10 is lowered and the front surface of the opening 2a is closed as shown in FIG. 3, the door stops in this state. Then, when a sensor (not shown) detects the state where the heat insulating door 10 is positioned in front of the opening 2a, the cylinder device 18 is actuated to push out the frame 17 fixed to the rod 18a. Then, the frame-shaped packing 1 attached to the surface of the frame 17 is formed.
6 presses against the inner surface of the heat-insulating door 10 to close the gap between the heat-insulating door 10. At this time, the sealing member 19 provided between the frame 17 and the peripheral edge of the opening 2a has a configuration in which each of the elastic hollow portions 19a having a horizontally long elliptical shape is transformed into a vertically long elliptical shape as shown in FIG. By doing so, it easily extends, and does not hinder the movement operation of the frame 17.

As described above, the inside of the test chamber 2 is sealed so as to perform the environmental test, and the preparation is completed. Therefore,
Thereafter, as in the conventional case, necessary conditions such as the temperature and humidity at which the test is performed may be input from the operation panel 21 (or 22), and the inside of the test chamber 2 is set to the set environmental conditions. The operation test is performed under a predetermined environmental condition of the specimen under control.

The quality of the operation of each specimen at this time is as follows.
The measurement is individually performed by a measurement device (not shown) provided in the machine room 3.

When the test is completed, the cylinder device 18 operates first to move the packing 16 in a direction away from the heat insulating door 10 and then the door driving device (not shown) operates. The shutter type heat insulating door 10 is opened. Therefore, the specimen after the completion of the test may be taken out from the opening 2a having an open front surface.

As described above, in the environmental test apparatus of the present invention,
Using a shutter-type heat-insulating door 10, the space required for opening and closing and storing the door is reduced, and the packing 16 is made to protrude and retract to close a gap between the opening 2a and the heat-insulating door 10, thereby providing a simple structure. The necessary airtightness is obtained.

In the illustrated embodiment, the packing 16 and the sealing member 19 are illustrated as separate bodies.
The present invention uses a retractable packing 16 and a test chamber opening 2.
The seal member 19 may be provided integrally with the packing 16 as long as the gap between the peripheral edge a and the door 10 is closed.

Also, an example has been shown in which the shutter-type heat-insulating door 10 can be smoothly guided by the rollers 12 and the balls 14. However, the present invention relates to a shutter-type door that bends in a shutter-type manner in an environmental test apparatus requiring heat insulation. The movement guide mechanism is not necessarily limited to the illustrated embodiment. Further, the opening and closing drive may be performed manually without using the door drive device as illustrated.

Further, the seal member 19 is exemplified by one having a plurality of continuous elastic hollow portions 19a. However, the seal member 19 can be expanded and contracted so as not to prevent the packing 16 from moving in and out, and has an airtightness. The shape is not limited to the illustrated one, and may be, for example, a bellows shape.

[0036]

As described above, according to the first aspect of the present invention, the door of the environmental test apparatus is of a shutter type which can be bent, and the periphery of the opening of the test chamber is provided with the heat insulating material. Since the frame-shaped packing that presses against the inner surface of the door is provided so as to be able to protrude and retract, the space required for opening and closing the door is not required, and the door can be installed in a small place. Also, there is an effect that airtightness between the door and the door can be measured without requiring a complicated door movement guide mechanism.

According to the second aspect of the present invention, the guide groove is provided along the upper surface of the test chamber from the side edge of the opening of the test chamber, and the heat insulating door of the shutter type can be stored above the test chamber. In addition to the effects of the first aspect of the present invention, there is an effect that there is no waste in the storage space of the door and the size of the environmental test apparatus main body is reduced.

According to the third aspect of the present invention, balls for restricting the lateral movement of the heat-insulating door are provided on both side ends of the heat-insulating door. There is an effect that the opening and closing operation is performed more smoothly.

According to the fourth aspect of the present invention, an extendable seal member is provided between the packing and the periphery of the opening of the test chamber. There is an effect that a high airtightness between them can be obtained.

According to the fifth aspect of the present invention, since the seal member is formed by connecting a plurality of elastic hollow portions, the seal member can be easily expanded and contracted regardless of the simple structure. There is little breakage and there is an effect of extending the life.

[Brief description of the drawings]

FIG. 1 is a simplified front view showing an embodiment of an environmental test apparatus according to the present invention.

FIG. 2 is a cross-sectional view taken along line A-A 'of FIG.

FIG. 3 is a sectional view taken along line B-B 'of FIG.

FIG. 4 is an enlarged view of a main part of FIG. 3;

FIG. 5 is an enlarged view of a main part of FIG. 2;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Environmental test apparatus main body 2 Test room 2a Opening 2c Cable hole 3 Machine room 4 Heat insulating material 9 Guide member 9a Guide hole 9a 'Round part 10 Heat insulating door 10a Plate-shaped body 11 Hinge 12 Roller 13 Ball holding fixture 13a Depressed part 14 Ball 16 Packing 17 Frame 18 Cylinder device 18a Rod 19 Seal member 19a Elastic hollow part

Claims (5)

[Claims] A shutter-type heat-insulating door, which is formed by connecting horizontally long plate-like members so as to bendable, is provided so as to cover the front surface of an opening of a test chamber of an environmental test apparatus main body. An environmental test apparatus, wherein a frame-shaped packing that presses against the inner surface of the heat-insulating door is provided so as to be able to protrude and retract. 2. A roller is protruded from both ends of each plate-like body constituting the heat insulating door, and a guide groove with which the roller is engaged is formed along a top edge of the test chamber from a side edge of an opening of the test chamber. 2. The environmental test apparatus according to claim 1, wherein the heat-insulating door is provided to be stored above the test chamber by being guided along the guide groove. 3. A hemispherical concave portion for holding the ball undetachably is provided at both ends of each plate-like body constituting the heat insulating door, and the ball housed in the concave portion is provided with a guide groove. The environmental test apparatus according to claim 2, wherein the lateral movement of the heat-insulating door is restricted by contacting the guide member. 4. Between the packing and the periphery of the opening of the test chamber,
The environmental test apparatus according to claim 1, further comprising an extendable seal member. 5. The environmental test apparatus according to claim 4, wherein said seal member is formed by connecting a plurality of elastic hollow portions.