JP2001248964A5 - - Google Patents

Download PDF

Info

Publication number
JP2001248964A5
JP2001248964A5 JP2000062999A JP2000062999A JP2001248964A5 JP 2001248964 A5 JP2001248964 A5 JP 2001248964A5 JP 2000062999 A JP2000062999 A JP 2000062999A JP 2000062999 A JP2000062999 A JP 2000062999A JP 2001248964 A5 JP2001248964 A5 JP 2001248964A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000062999A
Other languages
Japanese (ja)
Other versions
JP2001248964A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000062999A priority Critical patent/JP2001248964A/ja
Priority claimed from JP2000062999A external-priority patent/JP2001248964A/ja
Publication of JP2001248964A publication Critical patent/JP2001248964A/ja
Publication of JP2001248964A5 publication Critical patent/JP2001248964A5/ja
Pending legal-status Critical Current

Links

JP2000062999A 2000-03-08 2000-03-08 ガス精製装置およびガス精製方法 Pending JP2001248964A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000062999A JP2001248964A (ja) 2000-03-08 2000-03-08 ガス精製装置およびガス精製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000062999A JP2001248964A (ja) 2000-03-08 2000-03-08 ガス精製装置およびガス精製方法

Publications (2)

Publication Number Publication Date
JP2001248964A JP2001248964A (ja) 2001-09-14
JP2001248964A5 true JP2001248964A5 (hu) 2007-03-01

Family

ID=18582932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000062999A Pending JP2001248964A (ja) 2000-03-08 2000-03-08 ガス精製装置およびガス精製方法

Country Status (1)

Country Link
JP (1) JP2001248964A (hu)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4145673B2 (ja) * 2003-02-03 2008-09-03 独立行政法人科学技術振興機構 汚染物質排出機能を備えた循環式液体ヘリウム再液化装置、その装置からの汚染物質排出方法、その装置に使用する精製器およびトランスファーチューブ
US10113793B2 (en) * 2012-02-08 2018-10-30 Quantum Design International, Inc. Cryocooler-based gas scrubber
CN102564066B (zh) * 2012-02-10 2013-10-16 南京柯德超低温技术有限公司 基于小型低温制冷机的用于气体分离和纯化的低温装置
US10352617B2 (en) * 2014-09-25 2019-07-16 University Of Zaragoza Apparatus and method for purifying gases and method of regenerating the same
CN104771968B (zh) * 2015-03-19 2016-08-24 中国科学院等离子体物理研究所 氦低温系统透平膨胀机用可拆卸高精度深低温过滤器
CN104944393B (zh) * 2015-06-16 2018-03-27 上海正帆科技有限公司 一种提浓纯化高纯氦气的装置和方法
CN110608581B (zh) * 2019-08-22 2021-05-14 北京中科富海低温科技有限公司 一种内纯化器和氦液化器
CN115362341A (zh) * 2020-04-07 2022-11-18 林德低温技术股份公司 用于从氦流中分离不需要的组分的方法和装置
JP7330225B2 (ja) * 2021-04-21 2023-08-21 大陽日酸株式会社 ガス精製装置

Similar Documents

Publication Publication Date Title
BE2017C009I2 (hu)
BE2016C018I2 (hu)
BE2012C016I2 (hu)
JP2003502120A5 (hu)
AU2000236815A8 (hu)
JP2002540703A5 (hu)
BRPI0110940B8 (hu)
BE2014C025I2 (hu)
JP2002014054A5 (hu)
JP2001330869A5 (hu)
JP2001189367A5 (hu)
JP2002000598A5 (hu)
JP2001299707A5 (hu)
JP2001248964A5 (hu)
JP2001215727A5 (hu)
JP2002091898A5 (hu)
JP2001299061A5 (hu)
JP2000326648A5 (hu)
JP2001318313A5 (hu)
JP2002187692A5 (hu)
JP2001213718A5 (hu)
JP2001286211A5 (hu)
BRPI0000763B8 (hu)
JP2002024713A5 (hu)
JP2001281881A5 (hu)