JP2001248964A5 - - Google Patents

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Publication number
JP2001248964A5
JP2001248964A5 JP2000062999A JP2000062999A JP2001248964A5 JP 2001248964 A5 JP2001248964 A5 JP 2001248964A5 JP 2000062999 A JP2000062999 A JP 2000062999A JP 2000062999 A JP2000062999 A JP 2000062999A JP 2001248964 A5 JP2001248964 A5 JP 2001248964A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000062999A
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Japanese (ja)
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JP2001248964A (ja
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Publication date
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Priority to JP2000062999A priority Critical patent/JP2001248964A/ja
Priority claimed from JP2000062999A external-priority patent/JP2001248964A/ja
Publication of JP2001248964A publication Critical patent/JP2001248964A/ja
Publication of JP2001248964A5 publication Critical patent/JP2001248964A5/ja
Pending legal-status Critical Current

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JP2000062999A 2000-03-08 2000-03-08 ガス精製装置およびガス精製方法 Pending JP2001248964A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000062999A JP2001248964A (ja) 2000-03-08 2000-03-08 ガス精製装置およびガス精製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000062999A JP2001248964A (ja) 2000-03-08 2000-03-08 ガス精製装置およびガス精製方法

Publications (2)

Publication Number Publication Date
JP2001248964A JP2001248964A (ja) 2001-09-14
JP2001248964A5 true JP2001248964A5 (hu) 2007-03-01

Family

ID=18582932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000062999A Pending JP2001248964A (ja) 2000-03-08 2000-03-08 ガス精製装置およびガス精製方法

Country Status (1)

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JP (1) JP2001248964A (hu)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4145673B2 (ja) * 2003-02-03 2008-09-03 独立行政法人科学技術振興機構 汚染物質排出機能を備えた循環式液体ヘリウム再液化装置、その装置からの汚染物質排出方法、その装置に使用する精製器およびトランスファーチューブ
US10113793B2 (en) 2012-02-08 2018-10-30 Quantum Design International, Inc. Cryocooler-based gas scrubber
CN102564066B (zh) * 2012-02-10 2013-10-16 南京柯德超低温技术有限公司 基于小型低温制冷机的用于气体分离和纯化的低温装置
US10352617B2 (en) * 2014-09-25 2019-07-16 University Of Zaragoza Apparatus and method for purifying gases and method of regenerating the same
CN104771968B (zh) * 2015-03-19 2016-08-24 中国科学院等离子体物理研究所 氦低温系统透平膨胀机用可拆卸高精度深低温过滤器
CN104944393B (zh) * 2015-06-16 2018-03-27 上海正帆科技有限公司 一种提浓纯化高纯氦气的装置和方法
CN110608581B (zh) * 2019-08-22 2021-05-14 北京中科富海低温科技有限公司 一种内纯化器和氦液化器
WO2021204422A1 (de) * 2020-04-07 2021-10-14 Linde Kryotechnik Ag Verfahren und vorrichtung zum abtrennen unerwünschter komponenten aus einem helium-strom
CN111298596A (zh) * 2020-04-14 2020-06-19 中船重工鹏力(南京)超低温技术有限公司 一种基于低温冷源的稀有气体纯化装置
JP7330225B2 (ja) * 2021-04-21 2023-08-21 大陽日酸株式会社 ガス精製装置

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