JP2001248587A5 - - Google Patents

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Publication number
JP2001248587A5
JP2001248587A5 JP2000382790A JP2000382790A JP2001248587A5 JP 2001248587 A5 JP2001248587 A5 JP 2001248587A5 JP 2000382790 A JP2000382790 A JP 2000382790A JP 2000382790 A JP2000382790 A JP 2000382790A JP 2001248587 A5 JP2001248587 A5 JP 2001248587A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000382790A
Other languages
Japanese (ja)
Other versions
JP2001248587A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000382790A priority Critical patent/JP2001248587A/ja
Priority claimed from JP2000382790A external-priority patent/JP2001248587A/ja
Publication of JP2001248587A publication Critical patent/JP2001248587A/ja
Publication of JP2001248587A5 publication Critical patent/JP2001248587A5/ja
Pending legal-status Critical Current

Links

JP2000382790A 1999-12-28 2000-12-15 複合型真空ポンプ Pending JP2001248587A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000382790A JP2001248587A (ja) 1999-12-28 2000-12-15 複合型真空ポンプ

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP37541799 1999-12-28
JP11-375417 1999-12-28
JP2000382790A JP2001248587A (ja) 1999-12-28 2000-12-15 複合型真空ポンプ

Publications (2)

Publication Number Publication Date
JP2001248587A JP2001248587A (ja) 2001-09-14
JP2001248587A5 true JP2001248587A5 (cg-RX-API-DMAC7.html) 2008-01-31

Family

ID=26582691

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000382790A Pending JP2001248587A (ja) 1999-12-28 2000-12-15 複合型真空ポンプ

Country Status (1)

Country Link
JP (1) JP2001248587A (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003172291A (ja) * 2001-12-04 2003-06-20 Boc Edwards Technologies Ltd 真空ポンプ
JP7342574B2 (ja) * 2019-09-27 2023-09-12 株式会社島津製作所 真空ポンプ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6351195U (cg-RX-API-DMAC7.html) * 1986-09-20 1988-04-06
FI893826A0 (fi) * 1987-12-25 1989-08-14 Sholokhov Valery B Molekylvakuumpump.
JPH01195992A (ja) * 1988-01-30 1989-08-07 Naoto Ibarada ターボ分子ポンプの動翼
JPH0692799B2 (ja) * 1989-11-24 1994-11-16 ダイキン工業株式会社 真空ポンプ
DE19632874A1 (de) * 1996-08-16 1998-02-19 Leybold Vakuum Gmbh Reibungsvakuumpumpe

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