JP2001242935A - Positioning equipment and method for manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve the problem of difficulty in disposing a fixed stage having a switch terminal mounted thereon so as to position a mount surface of the fixed stage in parallel to a movement direction of a moving element. SOLUTION: Positioning equipment 30 is fabricated by disposing a first plane 36a and a second plane 36b in parallel on a base material of a fixed stage 36 being structured by independent members 36-1, 36-2 to be mutually connected. A guide member 33 attachable to a movable stage 33 is then attached to at least one plane of the first plane 36a and the second plane 36b.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a positioning device and a method of manufacturing the same. More specifically, the present invention relates to a positioning device using a vibration actuator such as an ultrasonic actuator and a method for manufacturing the positioning device, which is suitable for application to a device for switching an information transmission path such as an optical fiber.

[0002]

2. Description of the Related Art For example, an information transmission line switching device is used to switch various information transmission lines such as an optical fiber, an electric signal line, and a magnetic signal line. In general, this information transmission line switching device is configured such that switching terminals provided at ends of an input side information transmission line and an output side information transmission line are opposed to each other at a predetermined distance from each other (hereinafter, referred to as “terminals”). In this specification, the information is transmitted from the information transmission path on the input side to the information transmission path on the output side. Conventionally, a switching terminal driving mechanism for driving a switching terminal in this information transmission path switching device includes an electric step motor, a combination of a servo motor and a linear stage, and a combination of an electromagnet and a linear stage. , Has been used.

However, there is a feeling that the development of electric step motors and the like used for these switching terminal driving mechanisms has been exhausted, and it is not possible to further reduce the size and weight in terms of size and weight. was difficult. For this reason, the reduction in size and weight of the information transmission line switching device has almost reached its limit.

Therefore, Japanese Patent Application Laid-Open No. Hei 6-34897 proposes to use an ultrasonic actuator for a switching terminal driving mechanism. FIG. 11 is an explanatory diagram showing the configuration of the information transmission line switching device 1 disclosed in this publication. FIG. 11 (A) is a perspective view showing the entire configuration.
11B is a perspective view showing the output side holder 5 extracted from FIG. 11A, and FIG. 11C is an explanatory view showing the terminal component 8 traveling inside the output side holder 5.

As shown in FIG. 11A, an information transmission line switching device 1 comprises an input side holder 3 for supporting an input side information transmission line 2 and an output side for supporting an output side information transmission line 4. It has a holder 5 and a positioning device 6 for aligning axes of switching terminals (not shown) provided at the ends of the input-side information transmission path 2 and the output-side information transmission path 4. As shown in FIGS. 11 (A) and 11 (B), the inside of each of the input side holder 3 and the output side holder 5 includes:
A plurality of moving spaces 7 are provided that open toward the direction in which the information transmission paths 2 and 4 extend. As shown in FIG. 11 (C), inside each moving space 7, rectangular parallelepiped terminal components 8 in which piezoelectric ceramics 9a to 9d generating ultrasonic vibrations are arranged at four corners are added to the inner surface of the moving space 7. They are placed in pressure contact. Then, the information transmission paths 2, 4, which are supported by the terminal components 8 in the intermediate part away from the end, penetrate each moving space 7.

Each of the piezoelectric ceramics 9a to 9d generates an ultrasonic vibration when an appropriate drive signal is inputted. As a result, the terminal component 8 moves in the double arrow direction in FIG. 11A while supporting the intermediate point between the information transmission paths 2 and 4. As the terminal component 8 moves, the switching terminals provided at the tips of the information transmission paths 2 and 4 also move. Then, axis alignment of the switching terminals provided at the tips of the information transmission paths 2 and 4 is performed inside the positioning device 6.
Due to this axial alignment, the switching terminal of the information transmission path 2 and the switching terminal of the information transmission path 4 are opposed to each other within a range of an alignment error of about several μm.

[0007]

In the information transmission line switching device 1, the intermediate parts of the input side information transmission line 2 and the output side information transmission line 4 are supported by terminal components 8. However, since each of the information transmission lines 2 and 4 is generally flexible, the distance between the intermediate point of the information transmission lines 2 and 4 and the end of the information transmission lines 2 and 4 to which each switching terminal is attached is set. The information transmission paths 2 and 4 are bent and deformed. Therefore, in the information transmission line switching device 1, the positioning device 6 is indispensable for arranging the switching terminals to face each other within the range of the positioning error of about several μm.

[0008] Further, when the terminal component 8 itself stops at a predetermined position at the time of stopping, each of the switching terminals is separated from the intermediate point supported by the terminal component 8, so that the positioning device 6 is stopped. It is also necessary to provide a brake mechanism on a member (not shown) that supports the switching terminal inside the device, and to accurately stop at a predetermined position.

As described above, the conventional information transmission line switching device 1 shown in FIG. 11 uses an ultrasonic actuator having a self-holding property and a high-precision positioning property that is held at the position when stopped. Instead, the switching terminal positioning device 6 is indispensable, or a member supporting the switching terminal needs to be provided with a brake mechanism. For this reason, the information transmission path switching device 1 using this ultrasonic actuator has room for further reduction in size and weight.

Accordingly, the present applicant has previously filed Japanese Patent Application No.
No. 03369 has proposed an information transmission path switching device using an ultrasonic actuator. FIG. 12 is a perspective view showing a configuration example of the information transmission line switching device 10 according to the proposal in a partially broken state.

The information transmission line switching device 10 includes a switching terminal 11 provided at an end of an input side information transmission line 11a,
While supporting the switching terminal 12 provided at the end of the information transmission path 12a on the output side and the switching terminal 11, these are relatively moved substantially parallel to each other, and at the time of information transmission, the switching terminal 11 and the switching terminal 12 are opposed to each other. A switching terminal drive mechanism 14 using an acoustic actuator 13.

The ultrasonic actuator 13 includes a base member 15 having a housing frame 15a and a base substrate 15b.
And a pressure support mechanism 18 having a coil spring 16 and a vibrator support member 17 and supported by the housing frame 15a.
And a vibrator 19 having a rectangular flat elastic body 19a and a piezoelectric element 19b to excite primary longitudinal vibration and quaternary bending vibration, and a moving element 20 having a rail member 21a and a guide member 21b. And a linear guide 21 that supports the movable member 20 linearly and movably, and generates a relative motion between the vibrator 19 and the movable member 20. The switching terminal 11 is fixed to the mover 20, and the switching terminal 12 is fixed to the base substrate 15b. The vibrator 19 is described in, for example, 39th of “5th Electromagnetic Force-Related Dynamics Symposium Proceedings”.
This is a so-called deformed mode degenerate type vibrator disclosed on page 3 and the like.

The information transmission line switching device 10 is configured to directly fix the moving element 20 to the base substrate 15b, which is a component of the ultrasonic actuator 13, and to directly fix the switching terminal 11 to the moving element 20, so that the switching terminal 11, There is no need to provide twelve dedicated alignment mechanisms and brake mechanisms.
Therefore, as compared with the information transmission line switching device 1 shown in FIG.
The size and weight can be sufficiently reduced. Further, the information transmission path switching device 10 includes an ultrasonic actuator 13
Has excellent start-stop characteristics, so that it is expected that the settling time will be shorter than that of an information transmission line switching device using an electromagnetic motor.

However, as a result of further study by the present inventor to further improve the performance of the information transmission line switching device, this information transmission line switching device 10 has the following problems. all right.

That is, in the information transmission line switching device 10, the switching terminal 12 mounted on a fixed stage (not shown) fixed to the base substrate 15b and the switching terminal 11 fixed to the moving element 20 are optically connected. Therefore, the switching terminal 12 must be moved while keeping the switching terminal 11 and the switching terminal 12 at a narrow distance from each other.

However, if the mounting surface of the fixed stage on which the switching terminal 12 is fixed and the moving direction of the moving element 20 do not have a parallel relationship, the optical axis of the switching terminal 12 and the switching terminal 11
Are not coincident with each other. In particular, FIG.
2, the moving direction of the moving element 20;
If the mounting surface of the fixed stage for fixing the switching terminal 12 is not parallel, no matter how much the positioning accuracy of the moving element 20 is improved, the optical axis of each of the switching terminal 12 and the switching terminal 11 will be at least in the Z-axis direction. Will no longer match.

Here, since the required parallelism between the mounting surface of the fixed stage on which the switching terminal 12 is fixed and the moving direction of the moving element 20 is extremely high, an adjustment operation for fixing the fixed stage to the base substrate 15b is extremely difficult. was difficult. For this reason,
In order to obtain a desired required parallelism, an adjustment operation for a long time was inevitable, resulting in a remarkable increase in the number of assembling steps of the information transmission line switching device 10.

An object of the present invention is to provide a positioning device and a positioning device which can easily and reliably arrange a fixed stage on which a switching terminal is mounted so that a mounting surface thereof is parallel to a moving direction of a moving element. It is to provide a manufacturing method thereof.

[0019]

According to the present invention, a first stage provided on a fixed stage and a second plane parallel to the first plane are provided, and a movable stage is provided on the second plane. It is based on a new and important finding that the above-mentioned problem can be solved by mounting a guide member for guiding the information.

According to the first aspect of the present invention, the fixed stage includes a movable stage that moves linearly while maintaining a parallel positional relationship with a first plane provided on the fixed stage. A positioning device is provided, which supports a guide member for guiding the movable stage and has a second plane provided in parallel with the first plane, and the guide member is provided on the second plane. .

According to a second aspect of the present invention, in the positioning device according to the first aspect, the fixed stage is integrally formed of a single material or a plurality of members that are separate parts are joined to each other. After that, the first plane and the second plane are provided in parallel with each other, thereby being formed.

Further, according to the invention of claim 3, the base material of the fixed stage integrally formed of a single material or the base material of the fixed stage formed by joining a plurality of members which are separate parts from each other After the first plane and the second plane are provided in parallel with each other, a guide member for supporting the movable stage is attached to at least one of the first plane and the second plane. A method of manufacturing a positioning device is provided.

[0023]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) Hereinafter, an embodiment of a positioning device using a vibration actuator according to the present invention will be described in detail with reference to the accompanying drawings. In the following embodiments, an example will be described in which the vibration actuator is an ultrasonic actuator using an ultrasonic vibration region.

FIG. 1 shows a positioning device 30 according to this embodiment.
FIG. 1 is a perspective view showing a part of the structure, which is simplified and transparent, and is omitted. FIG. 2 is a view taken in the direction of arrow A in FIG. FIG. 3 is a view taken in the direction of the arrow B in FIG.

As shown in FIGS. 1 to 3, the positioning device 30 of this embodiment comprises a base substrate 31 and a guide member 32.
, Movable stage 33, ultrasonic actuator 34
And a position detection device 35 and a fixed stage 36. Hereinafter, these components of the positioning device 30 will be sequentially described.

[Base Board 31] The base board 31 is a flat plate on which the components of the positioning device 30 are mounted and fixed. That is, the base substrate 31 is mounted on the position detecting device 3.
5, the fixed stage 36, and the fixed block 47 are all mounted and fixed on the upper surface thereof.

The base substrate 31 may be made of a material having sufficient rigidity to mount these components, and is not limited to a specific material.

The base substrate 31 of the present embodiment is configured as described above.

[Guide Member 32] The guide member 32 is provided on the base substrate 31 via a second flat surface 36b of a fixed stage 36 described later.
The guide member 32 is supported. In the present embodiment, a so-called linear guide having both a rail member 32a and a guide member 32b as a moving member is used as the guide member 32.

That is, the rail member 32a has a convex cross section as shown in FIG. 3 and is formed in a straight line. Further, the rail member 32a is laid on a second plane 36b which is a horizontal plane of the fixed stage 36 installed vertically on the upper surface of the base substrate 31. In this embodiment, the fitting direction of the rail member 32a and the guide member 32b is shown in FIGS.
The direction is the Y-axis direction in FIG. 3, and is set to a direction that coincides with the direction in which the vibrator 39 presses the movable stage 33 as described later.

The guide member 32b is connected to the movable stage 3
3 is fixed to the back surface by an appropriate means such as screwing. Since the guide member 32b is arranged so as to be able to reciprocate linearly in the direction in which the rail member 32a is laid, the movable stage 33 fixed to the guide member 32b is also supported so as to be able to reciprocate in the direction in which the rail member 32a is laid. .

In this embodiment, the rail member 32a
Has a convex cross section and a guide member 32.
The case where b has a concave cross-sectional shape that can be fitted to the rail member 32a is taken as an example. However, the present invention is not limited to this embodiment. Contrary to this embodiment, the rail member 32a has a concave cross section and a guide member 32b.
May have a convex cross-sectional shape that can be fitted to the rail member 32a.

In this embodiment, since a linear guide is used as the guide member 32, the positional accuracy of the movable stage 33 can be improved.

The guide member 32 of this embodiment is configured as described above.

[Movable stage 33] Movable stage 33
Is made lightweight by a light metal material such as an aluminum alloy. In the present embodiment, the movable stage 33 includes a vibrator contact surface 33a, which is a first plane with which the vibrator 39 contacts, and a second surface substantially orthogonal to the vibrator contact surface 33a.
And a bent surface in a substantially L-shape as shown in FIG. Therefore, the second moment of area when the vertical plane in the direction of the relative motion is viewed as a cross section is large, and the rigidity is high. Therefore, the vibrator contact surface 33a is unlikely to be deformed even when it is vertically subjected to the pressing force by the bending vibration B4 that is the second vibration generated by the vibrator 39. Thus, the mounting surface 33b has a structure in which vibrations due to the vibration generated by the vibrator 39 are unlikely to occur. Thereby, the stop position accuracy of the movable stage 33 can be improved.

A flat surface of the outer surface of the vibrator contact surface 33a which is in contact with the vibrator 39 is provided to efficiently receive the driving force generated by the vibrator 39 by keeping the contact state with the vibrator 39 stable. The mirror finish is performed by lapping.

On the other hand, the mounting surface 33b extends in a direction in which the vibrator 39 is pressed, that is, in a direction parallel to the vibration direction of the bending vibration B4. For this reason, the dimension of the vibrator 39 and the movable stage 33 in the direction orthogonal to the pressing direction can be suppressed.

At a substantially central portion of the back surface of the mounting surface 33b,
As described above, the guide member 32b is fixed by appropriate means. For this reason, the movable stage 33 is supported so as to be able to reciprocate in the laying direction of the rail member 32a.

In this embodiment, the switching terminal 38 of the optical fiber 38a is mounted on the mounting surface 33b. The switching terminal 38 is formed in a rectangular parallelepiped shape by, for example, a resin material.
The optical fiber 38a on the input side is fixed and mounted with the end thereof penetrating therethrough.

In the present embodiment, as the optical fiber 38a, a core provided at the center and having a refractive index of n ₁ and a clad provided at the outer periphery of the core and having a refractive index of n ₂ (n ₂ <n ₁ ). A step-type optical fiber having a cladding and a jacket provided on the outer periphery of the cladding and made of a material having much more light absorption than the cladding is used.

The movable stage 33 of this embodiment is configured as described above.

[Ultrasonic actuator 34] The ultrasonic actuator 34 includes a vibrator 39 and a vibrator fixing member 40.
Having. Hereinafter, these will be sequentially described.

(I) Vibrator 39 FIG. 4 is a perspective view showing the configuration of the vibrator 39 in the present embodiment. 5A and 5B are explanatory views of the vibrator 39. FIG. 5A is a top view, FIG. 5B is a side view, and FIG.
(C) is an explanatory view showing waveform examples of two different vibrations L1 and B4 generated in the vibrator 39.

As shown in FIGS. 1 to 5, the vibrator 39 used in this embodiment includes an elastic body 41 and an elastic body 41.
And a piezoelectric body 42 mounted on one of the flat surfaces.

The elastic body 41 is preferably made of a metal material having a large resonance sharpness, such as steel, stainless steel, phosphor bronze, or Elinvar material, and is formed in a rectangular flat plate shape. The dimensions of each part of the elastic body 41 are determined by the primary longitudinal vibration L1 and the quaternary bending vibration B4.
In order that the natural frequencies f _L1 and f _B4 substantially coincide with each other,
Is set.

A piezoelectric body 42 is provided on one plane of the elastic body 41.
Is mounted, for example, by bonding. In the other plane of the elastic body 41, two grooves are provided in the width direction of the elastic body 41 at a predetermined distance in the relative movement direction (the left and right directions in FIGS. 2, 4 and 5). In each of these grooves, a rod-shaped sliding member having a rectangular cross-sectional shape, which is mainly composed of a polymer material, is fitted and mounted, and is mounted so as to protrude. As the polymer material, PTF
Polymer materials such as E, polyimide resin, polyacetal, PPS, and PEEK are exemplified.

The sliding member is used as a driving force output portion 43.
a, 43b. Therefore, the elastic body 41 comes into pressure contact with the vibrator contact surface 33a of the movable stage 33 via the driving force extracting portions 43a and 43b formed of these sliding members.

As shown in FIG. 3, each of the driving force extracting portions 43a and 43b is divided into two in the width direction of the vibrator 39, and each of the divided driving force extracting portions 43a and 43b is divided into two.
a, 43 a ′, 43 b, 43 b ′ are arranged on the end side in the width direction of the vibrator 39. Thus, in the present embodiment,
Each of the driving force extracting portions 43a and 43b is formed of two sliding members.

These driving force take-out portions 43a, 43b
Figure 5 (B) and FIG. 5 as shown in (C), 4 single loop position l ₁ to l ₄ of the fourth order bending vibration B4 generated in the elastic member 41
Are respectively provided at positions corresponding to the two antinode positions l ₁ and l ₄ located outside. In addition, the driving force extraction unit 4
3a and 43b are two antinode positions l ₁ and l of the bending vibration B4.
_It is not necessary to be provided at a position exactly corresponding to ₄ , and it may be provided near these antinode positions l ₁ and l ₄ .

In the present embodiment, the piezoelectric body 42 is formed of a single thin plate-like piezoelectric element made of PZT (lead titanium zirconate). As shown in FIGS. 4 and 5, the input regions 42 a and 42 c to which the A-phase drive signal _VA is input and the A-phase drive signal have a phase of about (π /
2) input drive signal V _B of the shifted phase B are input area 4
2b and 42d are formed. Each input area 42a to 42
As shown in FIGS. 5 (A) to 5 (C), d is continuous to four regions defined by _five nodal positions n _{1 to} n ₅ of bending vibration B4 generated in elastic body 41. Formed. That is, each input region 42a~42d be deformed by input of the driving signal are both, it does not cross the nodal position n ₁ ~n ₅ is fixed point. Therefore, the input areas 42a to 42a
Never deformation 42d is suppressed by nodal positions n ₁ ~n _5. Thus, the electric energy input to each of the input areas 42a to 42d can be transformed into the elastic body 41, that is, converted into mechanical energy with maximum efficiency.

At the node positions n ₂ and n ₄ of the bending vibration B4, detection areas 42p and 42p 'for outputting electric energy by the longitudinal vibration L1 generated by the vibrator 39 are provided.
Thereby, the vibration state of the longitudinal vibration L1 generated by the vibrator 39 is monitored.

FIG. 4, FIG. 5 (A) and FIG. 5 (B)
As shown in the figure, each of the input areas 42a to 42d and each of the detection areas 42p and 42p '
a to 44d, 44p and 44p '. As a result, a drive signal can be input to each of the input regions 42a to 42d independently, and a detection signal can be output independently from each of the detection regions 42p and 42p '. In addition, in order to simplify a drawing and to make it easy to understand, in FIGS. 1-3, all the silver electrodes 44a-44d, 44p, and 44p 'are abbreviate | omitted.

Lead wires 45a to 45d for transmitting and receiving electric energy are connected to the silver electrodes 44a to 44d by soldering, and lead wires (not shown) are connected to the silver electrodes 44p and 44p '. .) Are connected by soldering.

In this embodiment, supporting projections 46a and 46b having through holes are provided at the longitudinal center portions of both sides of the vibrator 39, respectively. The supporting protrusions 46a and 46b are formed at positions shown in FIGS.
As shown in (C), the longitudinal vibration L1 generated by the vibrator 39
And the bending vibration B4 are at the respective node positions, so that the attenuation of the vibration accompanying the support is minimized.

In this embodiment, as shown in FIG. 5A, the vibrator 39 is formed so as to be point-symmetric about the center of the plane. Accordingly, the elliptical motions generated in the respective driving force extracting portions 43a, 43a ', 43b, 43b' can be made to have substantially the same shape, and the driving difference due to the reversal of the relative motion direction is almost eliminated.

As will be described later with reference to FIG. 7, the drive control device 61 of the positioning device 30 applies the longitudinal vibration L1 and the bending vibration B to the input areas 42a and 42c of the piezoelectric body 42.
4 drive signal V _A of the A phase with a frequency that matches the natural frequency of each is input. Also, the input area 42b,
The 42d, the drive signal of the A-phase driving signal V _B of the B phase having a phase difference of (π / 2) is input. Then, FIG.
As shown in (C), the elastic body 41 has a primary longitudinal vibration L1, which is a first vibration vibrating in the relative movement direction (the left-right direction in FIG. 5), and a vertical direction perpendicular to the relative movement direction. That is, the fourth-order bending vibration B4, which is the second vibration that vibrates in a direction parallel to the pressing direction of the vibrator 39 and the movable stage 33, is simultaneously generated. The generated longitudinal vibration L1 and bending vibration B4 are combined, and the driving force extracting portions 43a,
3a 'and the driving force extracting portions 43b and 43b'
As illustrated in (B), elliptic motions with phases shifted from each other by π occur. Thus, the vibrator 39 generates a relative linear motion in the vibration direction of the longitudinal vibration L1 between the vibrator 39 and the movable stage 33 that comes into pressure contact. In order to reverse the direction of the relative movement, the B-phase drive signal may be set to have a phase difference of (−π / 2) with respect to the A-phase drive signal.

As described above, the vibrator 39 of the present embodiment is
Longitudinal vibration L1, which is the first vibration oscillating in the direction of relative motion
And a bending vibration B4, which is a second vibration vibrating in the same direction as the pressing direction of the vibrator 39 and the movable stage 33, generates a linear relative motion between the movable stage 33 and the vibrating vibration B4. This is a so-called deformed mode degenerate type vibrator. (Ii) Vibrator fixing member 40 As shown in FIGS. 1 to 3, the vibrator fixing member 40 includes a fixing block 47, a pressing member 48, and a support member 49.

The fixed block 47 is provided on the base substrate 31.
For example, the block body is fixed by appropriate means such as screwing. A mounting portion that penetrates the vibrator 39 in the pressing direction (vertical direction in FIG. 2) is provided inside the fixed block 47. The mounting portion includes a screw portion 48b and a coil spring 48a serving as a pressing member. Is provided at the tip of the coil spring 48a.
Is provided. The tip of the pressure terminal 48c contacts the center of the vibrator 39. Therefore, the vibrator 39 is pressed by the pressing terminal 48c by the spring force generated by the coil spring 48a. For this reason, the driving force output portions 43a to 43b 'of the vibrator 39 and the vibrator contact surface 33a of the movable stage 33 are brought into pressurized contact with an appropriate pressing force.

By changing the screwing position of the screw portion 48b, the spring force generated by the coil spring 48a is changed. Thus, the pressing force between the driving force output portions 43a to 43b 'of the vibrator 39 and the vibrator contact surface 33a of the movable stage 33 can be appropriately changed.

A support member 49 is provided on a plane of the fixed block 47 on the vibrator 39 side. In the present embodiment, the support member 49 includes two support pins 49 extending in a direction parallel to the pressing direction of the vibrator 39 and the movable stage 33.
a and 49b. The support pins 49a and 49b are fixed to the fixing block 47 by appropriate means at a distance equal to the distance between two through holes provided in the supporting projections 46a and 46b formed on the vibrator 39, respectively. You. Further, the support pins 49a and 49b are
The two through holes provided in 6a and 46b are fitted with a gap therebetween.

As described above, the vibrator 39 is connected to the pressing member 48.
Is pressed to the movable stage 33, and is displaceable in the pressing direction of the pressing member 48 by the support member 49, and is restrained in the direction of the relative movement, and is supported by the fixed block 47. That is, the direction in which the vibrator 39 presses the movable stage 33 is the Y direction in FIGS. 1 to 3 and is the same as the direction in which the rail member 32a and the guide member 32b are fitted.

The ultrasonic actuator 34 of the present embodiment
Is configured as described above.

[Position Detecting Device 35] The position detecting device 35 of the movable stage 33 is mounted on the base substrate 31 via the connecting member 37. In the present embodiment, a reflection type optical linear encoder having a main body 35a for emitting and receiving light and a reflection plate 35b having a scale and constituting a detection unit is used as the position detection device.

The main body 35a is fixed to the base substrate 31 via a connecting member 37 by appropriate means. On the other hand, in the present embodiment, the reflection plate 35b is provided on the side surface of the movable stage 33 on the main body 35a side so as to be orthogonal to the mounting surface 33b.

The current position of the movable stage 33 is detected by the encoder 35. The detected value is determined by the positioning device 3
The drive state of the ultrasonic actuator 34 is output to the drive control device 61 of 0.

The position detecting device 35 of the present embodiment is configured as described above.

[Fixed Stage 36] FIGS. 6A and 6B are explanatory diagrams showing the fixed stage 36 extracted. FIG. 6A is a top view, and FIG. 6B is a front view.

As shown in FIG. 1 to FIG. 3 and FIG. 6, a fixed stage 36 is fixed to the base substrate 31 by appropriate means.

In the present embodiment, the fixed stage 36 includes a first member 36-1 and a second member 3 which are separate components.
6-2 is formed in a stepped shape as shown in FIGS. 1 to 3 and 6 by joining them by an appropriate means such as adhesion or welding, but is different from this, and is integrated by a single material. May be configured.

After joining the first member 36-1 and the second member 36-2, a first flat surface 36a is provided on the mounting surface of the first member 36-1 on which the switching terminal 50 is mounted. On the surface of the second member 36-2 on which the rail member 32a is fixed, second planes 36b are provided in parallel with each other.

In order to form the first plane 36a and the second plane 36b in parallel with each other, the first member 36-1 and the second member 3 joined to a holding portion of a well-known and ordinary processing machine are connected.
6-2 may be fixed. For example, the first joined
The first member 36-1 and the second member 36-2 are fixed to the holding part of a commonly used grinding machine by fixing the member 36-1 and the second member 36-2. The first wheel 36-1 and the second member 36-2 are held by the holding unit after pressing the rotating grinding wheel against the first member 36-1 while forming in the feed direction to form the first plane 36a. While moving the grinding wheel, the amount of shift of the grinding wheel is changed, and the rotating wheel is pressed against the second member 36-2 while the first member 36-1 and the second member 36-2 are being moved in the feed direction. Plane 3 of
6b may be formed.

On the upper surface of the first member 36-1 of the fixed stage 36, the four switching terminals 50 of the four optical fibers 50a are set at the same height as the switching terminal 38 of the optical fiber 38a. Will be installed. Each switching terminal 50
Are formed in a rectangular parallelepiped shape by, for example, a resin material, and are fixed and mounted in a state where the ends of the four optical fibers 50a are respectively penetrated. On one end face of each switching terminal 50, the end face of each optical fiber 50a is arranged so as to be on the same plane. This optical fiber 50a
Like the optical fiber 38a, it is a step-type optical fiber.

FIGS. 1 to 3 show a case where four switching terminals 50 are arranged side by side for the sake of simplicity and easy understanding. However, the present invention is not limited to this. The same applies to a case where two, three, five or more switching terminals are arranged in parallel.

On the other hand, the second plane 36 of the fixed stage 36
In b, the rail member 32a of the guide member 32 described above is fixed and held by appropriate means. This rail member 3
2a, as described above, the guide member 32b to be fitted.
The movable stage 33 is supported via. For this reason, the movable stage 33 is provided on the first stage provided on the fixed stage 36.
Are driven linearly while maintaining a parallel positional relationship with the plane 36a and the second plane 36b.

For this reason, according to the present embodiment, the first plane 36 a of the fixed stage 36 on which the switching terminal 50 is mounted and the trajectory of the switching terminal 38 of the movable stage 33 in the moving direction are exactly parallel.

As shown in FIGS. 1 to 3, the fixed stage 36 has a first plane 36a and a second plane 36b.
Are mounted together with the encoder 35 on the connecting members 37 which are screwed and fixed to the base substrate 31 so as to be parallel to the plane (light emitting and receiving surfaces) of the encoder 35 on the movable stage 33 side. Is done.

The fixed stage 36 of this embodiment is configured as described above.

FIG. 7 is a block diagram showing an example of the drive control device 61 of the positioning device 30 of the present embodiment.

In response to a command from the control unit 67, a high-frequency drive signal corresponding to each of the longitudinal vibration L1 and the bending vibration B4 of the vibrator 39 is output from the oscillator 62 of the drive control unit 61.
Is output. The output from the oscillator 62 is split by the phase shifter 63 into two types of signals having different phases (π / 2), and is input to the drive signal switch 64. Drive signal switch 64
Depends on the driving state (coarse movement, fine movement) of the vibrator 39.
Outputs one or two types of signals. That is, the drive signal switching unit 64 determines the method of transmitting the drive signal during the coarse movement drive and the drive signal during the fine movement drive. Two drive signals from the phase shifter 63 are input to each of the input areas 42a to 42d during the coarse movement drive. Thus, the switching is performed such that one of the two drive signals from the phase shifter 63 is input to the input areas 42a and 42c or the input areas 42b and 42d during the fine movement driving.

One output from the drive signal switch 64 is amplified by the amplifier 65, and then the A-phase drive signal V _A
Silver electrodes 44a, 44c in the input areas 42a, 42c
Is applied. Also, the other output after being amplified by amplifier 66, the input region 4 as a drive signal V _B of the B-phase
The voltage is applied to the silver electrodes 44b and 44d of 2b and 42d. Thereby, the vibrator 39 is excited, and the driving force extracting portions 43a to 43a
The movable stage 33 that comes into pressure contact with the movable stage 43b ′ is linearly driven in the direction in which the rail member 32a is laid.

In this embodiment, the position of the movable stage 33 driven linearly by the encoder 35 is detected.
The detected value from the encoder 35 is input to the control unit 67. The control unit 67 outputs the control signal S ₁ to the drive signal switch 64 in accordance with the value of the detected value to switch the drive state of the vibrator 39 to two stages of coarse movement and fine movement, and controls the oscillator 62. and outputs a signal S _2. Thereby, the vibration amplitude of the vibrator 39 is controlled to a predetermined magnitude.

The control section 67 includes a detection area 42p,
The output voltage from 42p 'may also be input.
In this case, the control unit 67 compares the preset reference voltage with the output voltage from each of the detection areas 42p and 42p ', and lowers the frequency when the output voltage from the detection areas 42p and 42p' is smaller. The oscillator 62
Control. On the other hand, the control unit 67 sets the detection areas 42p,
When the output voltage from 2p 'is larger, the oscillator 62 is controlled so as to increase the frequency.

Next, the driving of the movable stage 33 will be described together with various commands from the drive control device 61.

In the positioning device 30 of the present embodiment,
When moving the position of the movable stage 33 from a certain position to a desired position, the control unit 67 of the drive control device 61 sends a signal S to the oscillator 62 and the switch to enter the coarse movement drive state.
Outputs ₁ . That is, the oscillator 62 is instructed to sweep from a frequency away from the resonance point of the ultrasonic actuator 34 to a frequency close to the resonance point. As a result, the movable stage 33 is driven at a high speed from the zero speed state. At the same time, the drive signal switch 64 is caused to select the switching so that the drive signal is applied to both the input areas 42a and 42c and the input areas 42b and 42d.

Then, when a signal from the encoder 35 informs the control unit 67 that the vehicle has approached the desired position, the control unit 67 instructs the oscillator 62 to move the frequency away from the resonance point, thereby causing the vibration to occur. The driving force of the child 39 is lost, and the speed of the movable stage 33 is instantaneously reduced from a high speed to a stop. This stop is referred to as “coarse stop” in this specification.

After the movable stage 33 stops coarse movement, the control section 67
The deviation between the current position and the desired position of the movable stage 33 is obtained. When the deviation between the current position of the movable stage 33 and the desired position is beyond the allowable range, the oscillator 62 and the drive signal switch 64 are commanded to be in the fine movement drive state, respectively. Fine movement is performed until the deviation between the position and the desired position falls within the allowable range. That is, a certain frequency is intermittently applied to the oscillator 62. The intermittent signal is a burst signal having a period BT in which the high frequency signal is applied for the BH time and not applied for the BL time.

At the same time, the drive signal switch 64
Switching is selected so that a drive signal is applied to one of the input areas 42a and 42c and the input areas 42b and 42d. For example, in FIG. 4, when the movable stage 33 is finely driven leftward, a drive signal is input to the input areas 42a and 42c. On the other hand, when the movable stage 33 is finely driven rightward, a drive signal is input to the input areas 42b and 42d.

As a result, the movable stage 33 is finely driven again after the coarse movement is stopped, and finally stops at a desired stop allowable range with high accuracy.

At this time, in this embodiment, the fixed stage 3
6, the first member 36-1 and the second member 36-
2 are joined together, for example using a grinder,
6a and the second plane 36b were formed and manufactured,
The parallelism of the first plane 36a and the second plane 36b can be very easily and reliably matched with the required parallelism. Therefore, according to the present embodiment, the fixed stage 36
The mounting surface on which the switching terminal 50 of FIG.
Can be made exactly parallel to the direction of movement. Thereby, the parallelism of the switching terminal 38 mounted on the movable stage 33 with respect to the switching terminal 50 mounted on the fixed stage 36 is achieved in the vertical direction (the Z-axis direction shown in FIG. 1). In addition, the incident light emitted from the main body 35a of the encoder 35 is reflected at right angles to the reflecting plate 35b, and
The reflected light from the reflection plate 35b is incident on the main body 35a at right angles to the main body 35a.
Accordingly, the position of the switching terminal 38 mounted on the movable stage 33 can be accurately detected.

Therefore, according to the present embodiment, it is possible to reduce the error included in the encoder 35 after the coarse movement is stopped, and to perform the fine movement drive based on the detection signal from the encoder 35 to obtain the desired stop position. Accuracy can be ensured.

As described above, according to the present embodiment, since the fixed stage 36 can be disposed so as to be parallel to the moving direction of the movable stage 33, the high positional accuracy required for the optical fiber switching device can be easily achieved. And can be reliably achieved.

(Second Embodiment) Next, a second embodiment will be described. In the following description of the present embodiment, portions different from those of the above-described first embodiment will be described, and common portions will be denoted by the same reference numerals in the drawings, and redundant description will be omitted.

FIG. 8 shows a positioning device 30- according to the present embodiment.
FIG. 1 is a perspective view showing a part 1 partially simplified and transparent and omitted. FIG. 9 is a view taken in the direction of the arrow A in FIG. Further, FIG. 10 is a view as seen from the arrow B in FIG.

The positioning device 30-1 of the present embodiment differs from the positioning device 30 of the first embodiment in a guide member 32 '.

That is, in this embodiment, the guide member 3
The guide member constituting 2 'is divided into two guide members 32b-1 and 32b-2 separated in the moving direction of the guide member.

Thus, each guide member 32b-1, 3
2b-2 can be made smaller and lighter than the guide 32b of the first embodiment. Therefore, the inertia of the movable stage 33 can be reduced, and the acceleration / deceleration performance can be improved.

The guide members 32b-1, 32b-2
Is provided, the yawing of the movable stage 33 when the coarse movement is stopped can be reduced. For this reason, the accuracy of the final stop position after the fine movement drive can be improved as compared with the first embodiment, and the guide members 32b-1 and 32b-2 due to yawing of the movable stage 33 and the rail member 32a 'can be used. Guide member 32b due to sliding
1, 32b-2 and the rail member 32a 'can be reduced in wear, and the durability of the positioning device 30-1 can be improved.

Further, the guide member 32b-
1, 32b-2, the guide member 32b
-1, 32b-2, the cross-sectional area of the rail member 32a 'to be fitted can be reduced to reduce the size. For this reason, the cost required for the guide member 32 'can be reduced.

In this embodiment, two guide members 32b-1 and 32b-2 are provided.
More than two groups may be provided.

(Modification) In the description of each embodiment, the case where the vibration actuator is an ultrasonic actuator is taken as an example. However, the present invention is not limited to the ultrasonic actuator, and is equally applicable to a vibration actuator using a vibration region other than the ultrasonic wave.

In the description of each embodiment, the case where the positioning device according to the present invention is applied to an optical fiber switching device is taken as an example. However, the present invention is not limited to the optical fiber switching device, but is equally applicable to various positioning devices.

In the description of each embodiment, the first longitudinal vibration, which is the first vibration vibrating in a direction substantially parallel to the direction of the relative movement generated between the vibrator and the movable stage, and the vibrator An example in which a modified mode degenerate type vibrator that excites a fourth-order bending vibration, which is a second vibration vibrating in a direction substantially parallel to the pressing direction of the movable stage and the movable stage, is used. However, the vibrator used in the present invention is not limited to the order of each of the longitudinal vibration and the bending vibration. For example, a vibrator that excites primary longitudinal vibration and secondary bending vibration, a vibrator that excites primary secondary vibration and sixth-order bending vibration, and a tertiary longitudinal vibration and eighth-order bending vibration Vibration that excites bending vibration can be used in the same manner.

Further, the vibrator used in the present invention is not limited to a combination of longitudinal vibration and bending vibration, but may be a modified mode degenerate type vibrator or a homogenous mode degenerate type vibrator other than this combination. And can be similarly applied.

In the description of each embodiment, the case where the vibrator includes a piezoelectric body is taken as an example. However, the present invention is not limited to a piezoelectric body, and can be equally applied to any interconversion element of electric energy and mechanical energy such as an electrostrictive element.

Further, in the description of each embodiment, the case where the reflecting plate, which is the detecting unit of the position detecting device, is arranged orthogonal to the mounting surface of the movable stage is taken as an example. However, the present invention is not limited to this mode, and the reflector may be arranged to be inclined at an angle other than 90 degrees as long as the height of the positioning device is allowed.

In the description of each embodiment, the case where the guide member is a so-called linear guide is taken as an example. However, the present invention is not limited to a linear guide, and is equally applicable to a guide member having both a linear rail member and a moving member that fits with a gap in the rail member.

In the description of each embodiment, the case where the guide member is a slide guide member is taken as an example. However, the present invention is not limited to the slide guide member, and a rolling guide member in which a ball or a roller is arranged on a guide surface, or a static pressure guide member that supplies hydraulic pressure or pneumatic pressure to a pocket provided in the guide surface through a throttle. Etc. apply equally.

Further, in the description of each embodiment, a case where the fixed stage is formed by joining the first member and the second member is taken as an example. However, the present invention is not limited to this mode, and is equally applicable to a case where a fixed stage is formed by joining three or more members together.

In the description of each embodiment, the case where the guide member is attached to the second plane is taken as an example. However, the present invention is not limited to this mode, and the guide member may be attached to the first plane.

Further, each embodiment is an example in which the present invention is embodied, and various modifications are possible within a range in which the effects of the present invention can be obtained.

[0111]

According to the first to third aspects of the present invention, it is possible to easily and reliably arrange the fixed stage on which the switching terminal is mounted so that the mounting surface thereof is parallel to the moving direction of the moving element. A positioning device that can be used and a method for manufacturing the same can be provided.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a positioning device according to a first embodiment with a part thereof simplified and transparently shown and omitted.

FIG. 2 is a view taken in the direction of arrow A in FIG.

FIG. 3 is a view taken in the direction of arrow B in FIG. 1;

FIG. 4 is a perspective view showing a configuration of a vibrator in the embodiment.

5A and 5B are explanatory views of a vibrator, FIG. 5A is a top view,
FIG. 5B is a side view, and FIG. 5C is an explanatory diagram showing waveform examples of two different vibrations L1 and B4 generated in the vibrator.

FIG. 6 is an explanatory diagram extracting and showing a fixed stage,
FIG. 6A is a top view, and FIG. 6B is a front view.

FIG. 7 is a block diagram illustrating an example of a drive control device of the positioning device according to the embodiment.

FIG. 8 is a perspective view showing a positioning device according to a second embodiment, with a part thereof simplified and transparent, and omitted.

9 is a view as viewed in the direction of the arrow A in FIG.

FIG. 10 is a view taken in the direction of arrow B in FIG. 8;

11 is an explanatory diagram showing a configuration of an information transmission line switching device disclosed in Japanese Patent Application Laid-Open No. 6-34897, where FIG. 11A is a perspective view showing the entire configuration, and FIG. FIG. 11A is a perspective view showing an extracted output side holder, and FIG. 11C is an explanatory view showing a terminal component traveling inside the output side holder.

FIG. 12 is a perspective view showing a configuration example of an information transmission line switching device proposed by the present applicant in Japanese Patent Application No. 11-203369, in a partially broken state.

[Explanation of symbols]

 Reference Signs 30 positioning device 32 guide member 33 movable stage 36 fixed stage 36-1 first member 36-2 second member 36a first plane 36b second plane

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2F078 CA08 CB02 CB05 CB09 CB11 CC01 5H303 AA30 BB01 BB06 BB11 DD04 DD14 DD22 EE03 EE07 FF06 GG13 HH01 KK35 5H680 BB01 BB13 BC10 CC02 DD15 DD23 DD53 DD74 GG08

Claims (3)

[Claims] A fixed stage, and a movable stage that moves linearly while maintaining a parallel positional relationship with a first plane provided on the fixed stage, wherein the fixed stage includes the movable stage. A second plane is provided which supports the guide member for guiding and is provided in parallel with the first plane, and wherein the guide member is provided in the second plane.
A positioning device, wherein the positioning device is provided on a flat surface. 2. The method according to claim 1, wherein the fixed stage is integrally formed of a single material, or is formed by joining a plurality of members which are separate parts from each other. The positioning device according to claim 1, wherein the positioning device is formed by providing the flat surfaces in parallel with each other. 3. A base material of a fixed stage integrally formed of a single material, or a base material of a fixed stage formed by joining a plurality of members which are separate parts from each other,
After the first plane and the second plane are provided in parallel with each other, a guide member that supports a movable stage is attached to at least one of the first plane and the second plane. Manufacturing method of positioning device.