JP2001239488A - Suction pad - Google Patents
Suction padInfo
- Publication number
- JP2001239488A JP2001239488A JP2000051739A JP2000051739A JP2001239488A JP 2001239488 A JP2001239488 A JP 2001239488A JP 2000051739 A JP2000051739 A JP 2000051739A JP 2000051739 A JP2000051739 A JP 2000051739A JP 2001239488 A JP2001239488 A JP 2001239488A
- Authority
- JP
- Japan
- Prior art keywords
- suction
- suction pad
- resin cover
- pad
- resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、ガラス板、ウェハ
ー、金属板等のワークに吸着跡や吸着汚れを発生させな
い吸着パッドに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a suction pad that does not generate suction marks or suction stains on a work such as a glass plate, a wafer, and a metal plate.
【０００２】[0002]
【従来の技術】従来より、ガラス基板等のワークをある
場所から別の場所に移載する場合、弾性ゴムからなる吸
着パッド等を使用して該ワークを吸着保持し、所望の位
置に移載させる吸着手段が広く一般的に用いられてい
る。2. Description of the Related Art Conventionally, when a work such as a glass substrate is transferred from one place to another place, the work is sucked and held using a suction pad or the like made of elastic rubber and transferred to a desired position. Adsorbing means for causing this is widely and generally used.
【０００３】しかしながら、弾性ゴム等からなる吸着パ
ッドでガラス基板等を吸着させ、保持した場合、ゴム製
の吸着パッドに付着した汚れや、吸着パッドのゴムの材
質に含まれる可塑剤等が染みだし、ガラス板等のワーク
に吸着パッド跡が転写され残ってしまうという不具合が
あった。However, when a glass substrate or the like is sucked and held by a suction pad made of an elastic rubber or the like, dirt attached to the rubber suction pad or a plasticizer contained in the rubber material of the suction pad seeps out. However, there has been a problem that the trace of the suction pad is transferred to a work such as a glass plate and remains.
【０００４】このため、これらの吸着汚れや吸着跡を減
少させるための工夫を施した種々の吸着パッドがなされ
ている。For this reason, various suction pads have been devised to reduce such suction dirt and suction marks.
【０００５】例えば実開平２−１１２６８６号の公報に
は、被搬送物である板状部材にその平滑面を介して吸着
させるための吸盤部と、この吸盤部を支持して吸気可能
に形成された有孔支持部とを有して吸着盤を形成し、こ
の吸着盤の吸着面である開口面の全面には、１平方イン
チあたり５〜５０万本の超極細繊維を３次元構造に絡み
合せてなる布材を通気可能に覆設した吸着盤構造、すな
わち、ゴム製の吸着パッドに通気性の布材を覆設したも
のが開示されている。For example, Japanese Utility Model Laid-Open Publication No. Hei 2-112686 discloses a suction cup portion for adsorbing a plate-like member to be conveyed via a smooth surface thereof, and a suction port formed to support the suction cup section so as to be capable of sucking air. A suction disc is formed having a perforated support portion, and 50,000 to 500,000 ultra-fine fibers per square inch are entangled in a three-dimensional structure over the entire opening surface, which is the suction face of the suction disc. There is disclosed a suction cup structure in which a combined cloth material is permeablely covered, that is, a rubber suction pad covered with a permeable cloth material.
【０００６】また、特開平５−７０６３０号の公報に
は、液状あるいはコロイド状の可塑剤と、無硫黄加硫反
応、付加加硫反応を律速させる有機過酸化物あるいは金
属酸化物からなる加硫剤と、チアゾール類あるいはチウ
ラム類からなる加硫促進剤と、アミン類あるいはフェノ
ール類からなる老化防止剤と、を含有する配合剤から合
成されたクロロプレンゴム（ＣＲ）、ニトリルゴム（Ｎ
ＢＲ）、エチレン−プロピレンゴム（ＥＰＭ）、フッ素
ゴム（ＦＫＭ）、シリコンゴム（Ｑ）、ウレタンゴム
（Ｕ）のいずれかの合成ゴムからなる真空吸着パッドが
開示されている。JP-A-5-70630 discloses a vulcanization comprising a liquid or colloidal plasticizer and an organic peroxide or metal oxide which controls the sulfur-free vulcanization reaction and the addition vulcanization reaction. Chloroprene rubber (CR), nitrile rubber (N) synthesized from a compounding agent containing an agent, a vulcanization accelerator composed of thiazoles or thiurams, and an antioxidant composed of amines or phenols.
A vacuum suction pad made of any of synthetic rubbers of BR), ethylene-propylene rubber (EPM), fluorine rubber (FKM), silicon rubber (Q), and urethane rubber (U) is disclosed.
【０００７】さらに、特開平９−３１４４８９号の公報
には、ガラス板状部材をロボットハンドにより吸着搬送
するガラス吸着搬送装置において、前記ガラス板状部材
を吸着する樹脂製吸着パッドと、前記樹脂製吸着パッド
の上部に取り付けられ、前記樹脂製吸着パッドが前記ガ
ラス板状部材に接触した際の衝撃を吸収する緩衝部材と
を備え、前記樹脂製吸着パッドと前記緩衝部材とを前記
ロボットハンドに装着するガラス吸着搬送装置であり、
前記樹脂製吸着パッドがポリテトラフルオロエチレン製
吸着パッドであるものが開示されている。Further, Japanese Patent Application Laid-Open No. 9-314489 discloses a glass sucking and conveying apparatus for sucking and conveying a glass plate member by a robot hand, and a resin suction pad for sucking the glass plate member, A buffer member attached to an upper portion of the suction pad for absorbing a shock when the resin suction pad comes into contact with the glass plate-like member; and attaching the resin suction pad and the buffer member to the robot hand. Glass suction and transfer equipment
It is disclosed that the resin suction pad is a polytetrafluoroethylene suction pad.
【０００８】[0008]
【発明が解決しようとする課題】前記実開平２−１１２
６８６号の公報に記載のものは、パッドに通気性のある
布地を使用した例であり、この通気性のある布地を覆設
した吸着パッドを用いてガラス板等のワークを吸着した
場合には確かにパッド跡は付かないが、通気性の布地が
吸着パッドを覆設しているためにワークの吸着保持能力
（吸着パッド面に対し平衡方向の保持能力）が弱く、ガ
ラス板等の寸法サイズや重量が増してくるとガラス板等
を吸着保持中に吸着パッドのリップ部分に被覆した通気
性の布地部分からリークが発生し、吸着外れを起こす恐
れが高く、ガラス板等を落下させてしまう危険性が高
い。SUMMARY OF THE INVENTION
No. 686 discloses an example in which a permeable fabric is used as a pad. When a work such as a glass plate is sucked using a suction pad which covers the permeable fabric, Certainly there is no pad mark, but the suction holding capacity of the work (holding capacity in the equilibrium direction with respect to the suction pad surface) is weak because the breathable fabric covers the suction pad, and the size of the glass plate etc. When the weight increases, a leak occurs from the air-permeable cloth portion covering the lip portion of the suction pad while holding the glass plate by suction, and there is a high possibility that the suction will come off, and the glass plate etc. will drop. High risk.
【０００９】また、特開平５−７０６３０号公報や、特
開平９−３１４４８９号の公報に記載のものは、フッ素
系のゴムを使用しているので、吸着跡は通常のゴムを用
いたものに比べて減少してはいるものの、該フッ素系の
ゴム内にもその物性を保持するために、加硫剤、充填
剤、補強剤、可塑剤等を混入させており、使用するに従
ってゴムの劣化が進み硫黄、リン、カーボン等の溶出が
生じることになり、またゴムが水分も含んでいるので完
全に吸着跡をなくすことは非常に困難であるという問題
があった。[0009] Further, in the articles described in JP-A-5-70630 and JP-A-9-314489, fluorine-based rubber is used, so that the trace of adsorption is reduced to that using ordinary rubber. Although it has been reduced, vulcanizing agents, fillers, reinforcing agents, plasticizers, etc. are mixed in the fluorine-based rubber to maintain its physical properties. As a result, sulfur, phosphorus, carbon and the like are eluted, and since the rubber also contains water, it is very difficult to completely eliminate the trace of adsorption.
【００１０】[0010]
【課題を解決するための手段】本発明は、上記問題点の
解決を図る、すなわちガラス板、ウェハー、金属板等の
ワークに吸着跡や吸着汚れを発生させず、吸着保持力も
低下させない安定した吸着保持力を確保した吸着パッド
に関するものである。SUMMARY OF THE INVENTION The present invention is intended to solve the above-mentioned problems, that is, it does not generate suction marks or suction stains on a work such as a glass plate, a wafer, a metal plate and the like, and does not reduce the suction holding force. The present invention relates to a suction pad that secures a suction holding force.
【００１１】すなわち、本発明は、開口側が拡径で弾性
ゴムからなるラッパ状の吸着パッドにおいて、該吸着パ
ッドの吸着面を低通気性または非通気性の樹脂カバーで
被覆し、該樹脂カバーの略中心に少なくとも１つの切り
込み部、及び／又は穿孔部を設けた吸着パッドである。That is, according to the present invention, in a horn-shaped suction pad having an opening having an enlarged diameter and made of elastic rubber, the suction surface of the suction pad is covered with a low-air-permeable or non-air-permeable resin cover. A suction pad provided with at least one notch and / or perforation substantially at the center.
【００１２】あるいは、本発明は、前記樹脂カバーに設
けた切り込み部の形状が、十字形状等のクロス形状やＹ
字形状である上述の吸着パッドである。Alternatively, according to the present invention, the shape of the cut portion provided in the resin cover may be a cross shape such as a cross shape or a Y-shape.
It is the above-mentioned suction pad having a character shape.
【００１３】あるいはまた、本発明は、前記樹脂カバー
の材質として、ナイロンを主成分とした繊維織物または
樹脂シートからなる上述の吸着パッドである。[0013] Alternatively, the present invention is the above-mentioned suction pad, wherein the material of the resin cover is a fiber fabric or a resin sheet containing nylon as a main component.
【００１４】あるいはまた、本発明は、前記樹脂カバー
にポリエステル、アクリル、ビニロン等の合成繊維を含
んだ繊維織物とした上述の吸着パッドである。Alternatively, the present invention is the above-mentioned suction pad, wherein the resin cover is a fiber woven fabric containing synthetic fibers such as polyester, acrylic, and vinylon.
【００１５】あるいはまた、本発明は、前記樹脂カバー
を４０００メッシュ以上の高密度とした上述の吸着パッ
ドである。Alternatively, the present invention is the above-mentioned suction pad, wherein the resin cover has a high density of 4000 mesh or more.
【００１６】上述の本発明の吸着パッドによれば、弾性
ゴム等の吸着パッドの吸着面側に低通気性の樹脂製カバ
ーを被覆しているので、吸着パッドの弾性ゴムの材質が
可塑剤等の染み出しの可能性があるものであっても、該
樹脂製カバーによって吸着汚れや吸着跡の発生を防ぐこ
とができる。According to the suction pad of the present invention described above, the suction pad side of the suction pad such as an elastic rubber is covered with a low-permeability resin cover, so that the material of the elastic rubber of the suction pad is a plasticizer or the like. Even if there is a possibility of bleeding, the resin cover can prevent the generation of adsorption dirt and adsorption marks.
【００１７】また、吸着パッドの吸着面に被覆した低通
気性の樹脂製カバーの吸着面の略中心付近に十字形状や
Ｙ字形状等の切り込みを設けているので、吸着パッドの
吸引力によって樹脂製カバーが吸着パッド内に潜り込む
ことはない。Also, since a notch such as a cross or a Y-shape is provided near the center of the suction surface of the resin cover having low air permeability covering the suction surface of the suction pad, the resin is formed by the suction force of the suction pad. The cover made of the product does not fall into the suction pad.
【００１８】さらに、低通気性の樹脂製カバーで吸着パ
ッドの吸着面全体を覆設しているので、吸着パッドのリ
ップ部とワーク間には通気製の布地のようなリークは発
生せず、吸着パッドに覆設した樹脂カバーは吸着パッド
と共にガラス板等のワーク面に強固に密着する。Further, since the entire suction surface of the suction pad is covered with a resin cover having low air permeability, there is no leak between the lip portion of the suction pad and the work as in the case of a ventilated cloth. The resin cover overlying the suction pad firmly adheres to the work surface such as a glass plate together with the suction pad.
【００１９】[0019]
【発明の実施の形態】図１に示すように、本発明は、フ
ラット面部を有するワーク１を吸着によって吸着する開
口側が拡径で、開口側先端にリップ部４を有するラッパ
状の弾性ゴム材３からなる従来公知の吸着パッド２を使
用し、該吸着パッド２の吸着面側を低通気性または非通
気性の樹脂カバー５で被覆し、該樹脂カバー５の略中心
に少なくとも１つの切り込み部６、及び／又は穿孔部を
設けたものである。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS As shown in FIG. 1, the present invention is directed to a trumpet-shaped elastic rubber material having an enlarged diameter at the opening side for sucking a work 1 having a flat surface by suction, and having a lip portion 4 at the opening end. 3, a suction surface side of the suction pad 2 is covered with a low-permeability or non-permeability resin cover 5, and at least one cutout is formed substantially at the center of the resin cover 5. 6, and / or a perforated portion.
【００２０】また、図２に示すように、前記樹脂カバー
５の略中心に設けた切り込み部６の形状を、十字形状等
のクロス形状やＹ字形状とし、該切り込み部６の位置は
吸着パッド２の吸着面の略中心近傍位置となるように設
けた。As shown in FIG. 2, the notch 6 provided substantially at the center of the resin cover 5 has a cross shape such as a cross shape or a Y-shape, and the position of the notch 6 is determined by a suction pad. It was provided so as to be located substantially near the center of the suction surface of No. 2.
【００２１】尚、前記樹脂カバー５の材質は、ナイロン
を主成分とした低通気性の繊維織物または非通気性の樹
脂シートが好ましい。The material of the resin cover 5 is preferably a low-permeability fiber fabric mainly composed of nylon or a non-permeable resin sheet.
【００２２】さらに、前記樹脂カバー５が前記ナイロン
を主成分とした繊維と、ポリエステル、アクリル、ビニ
ロン等の合成繊維とを織り交ぜた繊維織物としたもので
あり、ナイロンを９０％以上としたものが好ましい。Further, the resin cover 5 is a fiber woven fabric obtained by interweaving the fibers containing nylon as a main component and synthetic fibers such as polyester, acrylic, vinylon, etc., and the nylon is 90% or more. Is preferred.
【００２３】前記樹脂カバー５の繊維織物が４０００メ
ッシュ以上の高密度として通気性を低くすると、リップ
部でのリーク量を少なくすることができ、安全率を考慮
してもガラス板等の重量物のワークを確実に吸着保持で
きるので好ましい。 [0023] fiber fabric of the resin cover 5 is lower breathability as dense than 4000 mesh, lip
The leak rate in the part can be reduced, and the safety factor is taken into account
Even if a heavy workpiece such as a glass plate is sucked and held securely
It is preferable because it can be done.
【００２４】また、ワーク１を吸着した状態で、吸着面
を垂直にした場合ワーク１が自重で下方に滑る可能性が
あるため、吸着パッド２に覆設した樹脂カバー５とガラ
ス板等のワーク１との静摩擦係数（μ）はガラス板の吸
着時の安全率によって変動はあるが、１．０以上が望ま
しい。その材質としては、吸着汚れや吸着跡の発生が少
なく、リークも発生しにくい等の諸条件を総合して、前
記したようにナイロンを主成分とした繊維と、ポリエス
テル、アクリル、ビニロン等の合成繊維とを織り交ぜた
繊維織物としたものが望ましい。When the suction surface is vertical while the work 1 is being sucked, the work 1 may slide downward by its own weight. Therefore, the resin cover 5 provided on the suction pad 2 and the work such as a glass plate are used. The coefficient of static friction (μ) with 1 varies depending on the safety factor when the glass plate is attracted, but is preferably 1.0 or more . As the material, synthesis of fibers mainly composed of nylon, polyester, acrylic, vinylon, etc. It is desirable to use a fiber woven fabric in which fibers are interwoven.
【００２５】以下、本発明の作用を説明する。Hereinafter, the operation of the present invention will be described.
【００２６】図１に示すように吸着パッド２の弾性ゴム
からなるラッパ状の吸着面全体を覆うように設けた樹脂
カバー５には、図２に示すように、吸着パッド２の吸着
面の略中心部に十字状の切り込み部６を設けるようにし
たので、該樹脂カバー５を覆設した吸着パッド２を、図
示しない真空発生手段によって吸引し、ガラス板等に吸
着させた場合、吸着パッド２内の圧力が吸引によって減
圧し、吸着パッド２のゴム製のラッパ状部に覆設した樹
脂カバー５を吸引し、該樹脂カバー５が低通気性、また
は非通気性であるので、樹脂カバー５は吸着パッド２内
の吸引力によって吸着パッド内部側に吸引されて潜り込
もうとする。As shown in FIG. 1, a resin cover 5 provided so as to cover the entire horn-shaped suction surface made of elastic rubber of the suction pad 2 has, as shown in FIG. Since the cross-shaped cut portion 6 is provided at the center, the suction pad 2 covered with the resin cover 5 is sucked by a vacuum generating means (not shown) and sucked on a glass plate or the like. The inside pressure is reduced by suction, and the resin cover 5 covered on the rubber flared portion of the suction pad 2 is sucked. Since the resin cover 5 has low air permeability or non-air permeability, the resin cover 5 Is sucked into the inside of the suction pad by the suction force in the suction pad 2 and tries to enter.
【００２７】しかし、樹脂カバー５に十字状の切り込み
部を設けるようにしたので、吸着パッド２による吸引に
よってガラス板面と樹脂カバー５間の空気は該樹脂カバ
ー５に設けた切り込み部６分から吸着パッド２内に吸引
され、樹脂カバー５が吸着パッド２内に潜り込むことは
ない。However, since a cross-shaped cut portion is provided in the resin cover 5, air between the glass plate surface and the resin cover 5 is sucked from the cut portion 6 provided in the resin cover 5 by suction by the suction pad 2. The resin cover 5 is sucked into the pad 2 and does not enter the suction pad 2.
【００２８】吸着パッド２の吸着面に覆設した樹脂カバ
ー５は、低通気性の繊維織物、または非通気性の樹脂シ
ートからなるので、吸着パッド２の弾性ゴム材３からな
るリップ部４は、リップ部４とガラス板等のワーク１間
に前記樹脂カバー５があっても空気の流入する隙間もな
く、リップ部４の弾性変形に合わせて柔軟性のある樹脂
カバー５も変形しガラス板等のワーク面に密着するの
で、リップ部４からのリークは殆どなく、安定した吸着
が得られる。Since the resin cover 5 provided on the suction surface of the suction pad 2 is made of a low-permeability fiber woven fabric or a non-breathable resin sheet, the lip portion 4 made of the elastic rubber material 3 of the suction pad 2 is Even if there is the resin cover 5 between the lip portion 4 and the work 1 such as a glass plate, there is no gap for air to flow in, and the flexible resin cover 5 is deformed in accordance with the elastic deformation of the lip portion 4 so that the glass plate Therefore, there is almost no leakage from the lip portion 4 and stable suction can be obtained.
【００２９】吸着パッド２の吸着面を覆設する樹脂カバ
ー５の材質としては、ポリエチレンフイルム、ポリ塩化
ビニール等が考えられ、これらはいずれも吸着跡を皆無
とすることはできないが、ナイロン繊維を主成分とする
合成繊維で覆えば、ガラス基板等のワーク１に吸着跡が
付着するのを防ぐことができる。The material of the resin cover 5 that covers the suction surface of the suction pad 2 may be polyethylene film, polyvinyl chloride, or the like. None of these materials can eliminate any suction traces. Covering with a synthetic fiber as a main component can prevent adsorption traces from adhering to the work 1 such as a glass substrate.
【００３０】吸着跡がワーク１に残る度合いは、合成繊
維（ナイロン、ポリエステル、アクリル、ビニロン）で
あれば、優位差はないが布地の引張強度、摩擦耐久性、
吸湿性等から判断するとナイロンを主成分とすることが
望ましい。There is no significant difference in the degree of adsorption traces remaining on the work 1 if synthetic fibers (nylon, polyester, acrylic, vinylon) are used, but the tensile strength, friction durability,
Judging from the hygroscopicity and the like, it is desirable to use nylon as a main component.
【００３１】本発明の吸着パッド２に設ける切り込み部
６の形状としては、図３に示すようなＹ字状であっても
良く、図４に示すような１つまたは、複数の穿孔部７を
樹脂カバーに設けるようにしても良く、また切り込み部
と穿孔部を組み合わせるようにしたものでも良い。The shape of the cut portion 6 provided in the suction pad 2 of the present invention may be a Y-shape as shown in FIG. 3, and one or a plurality of perforated portions 7 as shown in FIG. It may be provided on the resin cover, or may be a combination of a cut portion and a perforated portion.
【００３２】[0032]
【実施例】樹脂カバー５を覆設した直径が２００φの吸
着パッド２を複数個用意し、該各吸着パッド２のそれぞ
れを真空ポンプ（オリオン■製ＫＨ４００、０．４ＫＷ
Ｘ４Ｐ）と接続した。 EXAMPLES intake diameter of the resin cover 5 and Kutsugae設is 200φ
A plurality of attachment pads 2 are prepared, and each of the suction pads 2 is
Vacuum pump (Orion KH400, 0.4KW)
X4P).
【００３３】吸着パッド２の吸着面を覆設する樹脂カバ
ー５の材質として、低通気性の点からナイロン系が最も
良く、ポリエステル糸を含んだものは布地的には柔らか
くなるが通気性が増すことから、ナイロン以外の繊維の
混入率は１０％以下とすることが望ましい。As the material of the resin cover 5 that covers the suction surface of the suction pad 2, a nylon material is the best in terms of low air permeability, and a material containing polyester yarn is softer in fabric but has higher air permeability. Therefore, it is desirable that the mixing ratio of fibers other than nylon be 10% or less.
【００３４】また、材質以上に吸着保持能力に関係する
のは、その繊維の構造であり、同じ材質でも通気性は大
きく変化し、リーク量が変化する。It is the structure of the fiber that is more relevant to the adsorption holding ability than the material, and even if the same material is used, the air permeability greatly changes and the leak amount changes.
【００３５】すなわち、リーク量を少なくするために、
ナイロン製で４０００メッシュ以上の高密度な繊維構造
となるように織り上げるのが良い。That is, in order to reduce the amount of leak,
It is preferable to weave it into a high-density fiber structure of 4000 mesh or more made of nylon.
【００３６】各吸着パッド１個あたりの平均リーク量
（ポンプ排気量）は、樹脂カバーを全く設けない場合
と、すべてに設けた場合のそれぞれの真空ポンプの吸着
到達真空圧を測定して、該真空圧より真空ポンプ特性表
（Ｘ座標：真空度、Ｙ座標：ポンプ排気量）によって求
められるポンプ排気量の差を吸着パッドの数量で割るこ
とによって求められる。 Average leak amount per suction pad
(Pump displacement) when no resin cover is provided
And the suction of each vacuum pump when installed in all
Measure the ultimate vacuum pressure and calculate the vacuum pump characteristics table from the vacuum pressure.
(X coordinate: degree of vacuum, Y coordinate: pump displacement)
Divide the difference in pump displacement by the number of suction pads.
And is sought.
【００３７】例えば、ナイロン製で１０００メッシュの
低密度の繊維のリーク量が５５．０Ｌ／ｍｉｎ以上であ
り、あるいはポリエステル１００％で４０００メッシュ
品が４０．０Ｌ／ｍｉｎ以上、さらには帝人株式会社製
の商品名ミクロスター（ナイロン５０％、ポリエステル
５０％の混在品）が２０〜２５Ｌ／ｍｉｎであるのに対
して、ナイロン製で４０００メッシュ以上の密度の繊維
構造とすると、リーク量が５．４Ｌ／ｍｉｎとなって、
ワークの吸着保持能力を充分確保することができる。For example, a nylon mesh of 1000 mesh
Leak rate of low density fiber is 55.0 L / min or more
Or 4000% mesh with 100% polyester
40.0L / min or more, and Teijin Limited
Product name Microstar (50% nylon, polyester
(50% mixed product) is 20-25 L / min.
Then, if it is made of nylon and has a fiber structure having a density of 4000 mesh or more , the leak amount becomes 5.4 L / min ,
Sufficient suction holding ability of the work can be ensured.
【００３８】[0038]
【発明の効果】本発明の吸着パッドによれば、ガラス
板、ウェハー、金属板等のワークに吸着跡や吸着汚れを
発生させず、また吸着パッドがワークに密着し、吸着時
のリップ部にリークを発生させず、吸着能力も低下させ
ない安定した保持力を確保できるので、ワークの移載中
に吸着はずれ等により移載中のワークが落下したりする
ことがない。According to the suction pad of the present invention, no suction mark or suction dirt is generated on a work such as a glass plate, a wafer, or a metal plate. Since a stable holding force that does not cause a leak and does not reduce the suction ability can be secured, the transferred work does not drop due to a suction release or the like during the transfer of the work.
【図１】本発明の樹脂カバーを覆設した吸着パッドの側
面図。FIG. 1 is a side view of a suction pad covering a resin cover of the present invention.
【図２】本発明の吸着パッドに切り込み部を設けた樹脂
カバーの平面図。FIG. 2 is a plan view of a resin cover provided with a cut portion in the suction pad of the present invention.
【図３】本発明の吸着パッドに別の切り込み部を設けた
樹脂カバーの平面図。FIG. 3 is a plan view of a resin cover in which another cut portion is provided in the suction pad of the present invention.
【図４】本発明の吸着パッドに穿孔部を設けた樹脂カバ
ーの平面図。FIG. 4 is a plan view of a resin cover provided with a perforated portion in the suction pad of the present invention.
１ ワーク ２ 吸着パッド ３ 弾性ゴム材 ４ リップ部 ５ 樹脂カバー ６ 切り込み部 ７ 穿孔部 DESCRIPTION OF SYMBOLS 1 Work 2 Suction pad 3 Elastic rubber material 4 Lip part 5 Resin cover 6 Notch part 7 Perforation part
───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 3C007 DS01 FS01 FT06 FU00 FU01 NS09 3F004 EA02 FA01 3F061 AA01 CA01 CB02 CC00 CC01 DB04 3J038 AA02 CA09 CA20 5F031 CA02 CA05 FA01 FA07 GA24 GA26 GA32 PA23 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3C007 DS01 FS01 FT06 FU00 FU01 NS09 3F004 EA02 FA01 3F061 AA01 CA01 CB02 CC00 CC01 DB04 3J038 AA02 CA09 CA20 5F031 CA02 CA05 FA01 FA07 GA24 GA26 GA32 PA23
Claims (5)
状の吸着パッドにおいて、該吸着パッドの吸着面を低通
気性または非通気性の樹脂カバーで被覆し、該樹脂カバ
ーの略中心に少なくとも１つの切り込み部、及び／又は
穿孔部を設けたことを特徴とする吸着パッド。1. A horn-shaped suction pad whose opening side has an enlarged diameter and is made of elastic rubber, wherein the suction surface of the suction pad is covered with a low-permeability or non-permeability resin cover, and at least substantially at the center of the resin cover. A suction pad provided with one notch and / or perforation.
状が、十字形状等のクロス形状やＹ字形状であることを
特徴とする請求項１記載の吸着パッド。2. The suction pad according to claim 1, wherein the cut portion provided in the resin cover has a cross shape such as a cross shape or a Y-shape.
を主成分とした繊維織物または樹脂シートからなること
を特徴とする請求項１または請求項２記載の吸着パッ
ド。3. The suction pad according to claim 1, wherein the resin cover is made of a fiber woven fabric or a resin sheet containing nylon as a main component.
ル、ビニロン等の合成繊維を含んだ繊維織物としたこと
を特徴とする請求項１乃至３記載のいずれかである吸着
パッド。4. The suction pad according to claim 1, wherein the resin cover is a fiber woven fabric containing synthetic fibers such as polyester, acrylic, and vinylon.
の高密度としたことを特徴とする請求項１乃至４記載の
いずれかである吸着パッド。5. The suction pad according to claim 1, wherein the resin cover has a high density of 4000 mesh or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000051739A JP2001239488A (en) | 2000-02-28 | 2000-02-28 | Suction pad |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000051739A JP2001239488A (en) | 2000-02-28 | 2000-02-28 | Suction pad |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2001239488A true JP2001239488A (en) | 2001-09-04 |
Family
ID=18573354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000051739A Pending JP2001239488A (en) | 2000-02-28 | 2000-02-28 | Suction pad |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001239488A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100639401B1 (en) * | 2005-11-22 | 2006-10-27 | 한미반도체 주식회사 | Pad having reference mark and pad alignment method using thereof |
| JP2013078810A (en) * | 2011-10-03 | 2013-05-02 | Smc Corp | Vacuum suction apparatus |
| KR101358105B1 (en) | 2012-11-28 | 2014-02-05 | 주식회사 우진 | A crane device of a sphere for a prover |
| JP2017197363A (en) * | 2016-04-28 | 2017-11-02 | 株式会社メイコー | Metal foil lamination apparatus and metal foil lamination method |
| JP2018034227A (en) * | 2016-08-30 | 2018-03-08 | 株式会社コガネイ | Suction pad |
| CN112917705A (en) * | 2021-01-26 | 2021-06-08 | 一中建设集团有限公司 | Double glazing trompil drill bit for building engineering |
-
2000
- 2000-02-28 JP JP2000051739A patent/JP2001239488A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100639401B1 (en) * | 2005-11-22 | 2006-10-27 | 한미반도체 주식회사 | Pad having reference mark and pad alignment method using thereof |
| WO2007061221A1 (en) * | 2005-11-22 | 2007-05-31 | Hanmi Semiconductor Co., Ltd. | Pad having reference mark and pad alignment method using thereof |
| JP2013078810A (en) * | 2011-10-03 | 2013-05-02 | Smc Corp | Vacuum suction apparatus |
| US8960749B2 (en) | 2011-10-03 | 2015-02-24 | Smc Kabushiki Kaisha | Vacuum suction apparatus |
| KR101358105B1 (en) | 2012-11-28 | 2014-02-05 | 주식회사 우진 | A crane device of a sphere for a prover |
| JP2017197363A (en) * | 2016-04-28 | 2017-11-02 | 株式会社メイコー | Metal foil lamination apparatus and metal foil lamination method |
| JP2018034227A (en) * | 2016-08-30 | 2018-03-08 | 株式会社コガネイ | Suction pad |
| CN112917705A (en) * | 2021-01-26 | 2021-06-08 | 一中建设集团有限公司 | Double glazing trompil drill bit for building engineering |
| CN112917705B (en) * | 2021-01-26 | 2023-01-24 | 一中建设集团有限公司 | Double glazing trompil drill bit for building engineering |
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