JP2001237356A - Cooling device of electronic part and semiconductor device - Google Patents

Cooling device of electronic part and semiconductor device

Info

Publication number
JP2001237356A
JP2001237356A JP2000045611A JP2000045611A JP2001237356A JP 2001237356 A JP2001237356 A JP 2001237356A JP 2000045611 A JP2000045611 A JP 2000045611A JP 2000045611 A JP2000045611 A JP 2000045611A JP 2001237356 A JP2001237356 A JP 2001237356A
Authority
JP
Japan
Prior art keywords
cooling
cooling device
downstream
semiconductor device
cooling air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000045611A
Other languages
Japanese (ja)
Inventor
Norihiro Takesako
憲浩 竹迫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2000045611A priority Critical patent/JP2001237356A/en
Publication of JP2001237356A publication Critical patent/JP2001237356A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To eliminate temperature difference between an IC on the upstream side of cooling wind and an IC on the downstream side and improve the stability of circuit. SOLUTION: Triangular heat radiating fins 7 are installed on plural ICs 3a, 3b and 3c placed on the same substrate 1. The heat radiating fins 7 are installed so that apexes are positioned on the upstream side of cooling air and bases are positioned on the downstream side.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、テスタなどの半
導体装置の多量の熱を発し、且つ、同一基板内の複数部
品を同一の温度に冷却する必要がある場合の冷却に用い
られる放熱フィンに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a radiation fin used for cooling a semiconductor device such as a tester when a large amount of heat is generated and a plurality of components on the same substrate need to be cooled to the same temperature. Things.

【0002】[0002]

【従来の技術】近年、装置の小型化が進み、装置の単位
体積あたりに占める発熱量が大きくなってきている。ま
た、半導体装置などの非常に精度を要求される装置で、
且つ、図6に示す基板11のように、一基板内に同一の
回路が12a,12b,12cのように複数組み込まれ
ている場合などでは、任意の部品(特にLSI)13a
の温度は、他回路の同一機能(役割)の部品13bや1
3cとの温度差が、装置の精度に大きく影響を与える。
2. Description of the Related Art In recent years, the size of an apparatus has been reduced, and the amount of heat generated per unit volume of the apparatus has increased. In addition, devices that require extremely high precision, such as semiconductor devices,
Further, in the case where a plurality of identical circuits are incorporated in one substrate like 12a, 12b and 12c as in a substrate 11 shown in FIG. 6, an arbitrary component (especially LSI) 13a
Is the temperature of the component 13b or 1 having the same function (role) of another circuit.
3c greatly affects the accuracy of the device.

【0003】しかし、マザーボード14と冷却ファン1
5との位置関係や基板の回路設計上、同一機能(役割)
の部品は、冷却風の流れ方向16に配置されることが多
く、従来のように部品個別に放熱フィンを取りつけた
り、長形の放熱フィンを同一機能部品に取り付ける方法
では、複数の部品温度を同一にすることが困難であり、
装置精度を落とす原因となっていた。
However, the motherboard 14 and the cooling fan 1
The same function (role) in the positional relationship with 5 and the circuit design of the board
Are often arranged in the flow direction 16 of the cooling air. In the conventional method of attaching a radiation fin individually to a component or attaching a long radiation fin to the same functional component, a plurality of component temperatures are set. It is difficult to be the same,
This caused a drop in the accuracy of the device.

【0004】図7は部品単体毎に放熱フィンを取りつけ
た例を示す斜視図であり、図において、17は従来の放
熱フィンを示す。この方法では、冷却風が下流にいくに
従って温度が上昇するために、同一機能部品13a,1
3b及び13cには大きな温度差を生じる。
FIG. 7 is a perspective view showing an example in which a radiation fin is attached to each component alone. In the drawing, reference numeral 17 denotes a conventional radiation fin. In this method, since the temperature rises as the cooling air goes downstream, the same functional parts 13a, 1
A large temperature difference occurs between 3b and 13c.

【0005】図8は別の方式を示すもので、同一機能部
品どうしを、長方形の放熱フィン18、または熱伝導の
よい平板19でつないだ冷却方式を示す斜視図である。
この方法では、同一機能部品が放熱フィン18または平
板19で繋がれているために、温度の均一性は向上する
が、冷却風の下流方向への温度上昇の影響は避けられな
い。
FIG. 8 is a perspective view showing another cooling system in which the same functional parts are connected to each other by a rectangular radiating fin 18 or a flat plate 19 having good heat conductivity.
In this method, since the same functional components are connected by the radiation fins 18 or the flat plates 19, the temperature uniformity is improved, but the effect of the temperature rise in the downstream direction of the cooling air is inevitable.

【0006】[0006]

【発明が解決しようとする課題】従来の半導体装置は以
上のように構成されていたので、冷却風の上流側と下流
側では、ICの温度に差ができてしまい、回路の安定性
を阻害するという問題点があった。
Since the conventional semiconductor device is configured as described above, there is a difference in IC temperature between the upstream side and the downstream side of the cooling air, which hinders the stability of the circuit. There was a problem of doing.

【0007】この発明は上記のような課題を解決するた
めになされたものであり、上流側のICと下流側のIC
の温度差をなくし、回路の安定性を向上させることを目
的とする。
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has an upstream IC and a downstream IC.
And to improve the stability of the circuit.

【0008】[0008]

【課題を解決するための手段】この発明の請求項1に係
る電子部品の冷却装置は、同一基板上に複数の電子部品
を載置し、冷却ファンにより冷却するものであって、複
数の部品上にわたって三角形状の放熱フィンを接合する
とともに、この三角形状の放熱フィンは、冷却風の上流
側に頂点が、又、下流側に底辺が位置するよう配置され
ているものである。
According to a first aspect of the present invention, there is provided a cooling device for electronic components, wherein a plurality of electronic components are mounted on the same substrate and cooled by a cooling fan. The triangular radiating fins are joined upward, and the triangular radiating fins are arranged such that the apex is located upstream of the cooling air and the bottom is located downstream.

【0009】この発明の請求項2に係る電子部品の冷却
装置は、同一基板上に複数の電子部品を載置し、冷却フ
ァンにより冷却するものであって、複数の部品上にわた
って、冷却風の上流側から下流側にいくに従い表面積が
増加するような形状を呈した放熱フィンを接合したもの
である。
According to a second aspect of the present invention, there is provided a cooling device for electronic components, wherein a plurality of electronic components are mounted on the same substrate and cooled by a cooling fan. The heat radiating fins are formed so that the surface area increases from the upstream side to the downstream side.

【0010】この発明の請求項3に係る電子部品の冷却
装置は、冷却風の上流側に頂点が、又、下流側に底辺が
位置するよう高さ方向に形成された三角形状を有する放
熱フィンを設けたものである。
According to a third aspect of the present invention, there is provided a cooling device for an electronic component having a triangular shape having a triangular shape formed in a height direction such that a vertex is located on an upstream side of a cooling wind and a bottom side is located on a downstream side. Is provided.

【0011】この発明の請求項4に係る半導体装置は、
請求項1〜請求項3のいずれか1項に記載の電子部品の
冷却装置を備えたものである。
According to a fourth aspect of the present invention, there is provided a semiconductor device comprising:
An electronic component cooling device according to any one of claims 1 to 3 is provided.

【0012】[0012]

【発明の実施の形態】実施の形態1.以下、この発明の
実施形態を図に基づいて説明する。図1はこの発明の実
施の形態1による半導体装置を示す斜視図、図2はその
要部の正面図、図3は図2の側面図であり、図におい
て、1は基板、2a,2b,2cは基板1内に複数組み
込まれた同一の回路、3a,3b,3cは任意の部品で
あるIC、4はマザーボード、5は冷却ファン、6は冷
却風の流れ方向、7は上記IC3a,3b,3c間にわ
たって接合された三角形の形状をした放熱フィンであ
る。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 is a perspective view showing a semiconductor device according to a first embodiment of the present invention, FIG. 2 is a front view of a main part thereof, FIG. 3 is a side view of FIG. 2, and 1 is a substrate, 2a, 2b, 2c is the same circuit incorporated in the substrate 1; 3a, 3b and 3c are arbitrary components IC; 4 is a motherboard; 5 is a cooling fan; 6 is a flow direction of cooling air; , 3c are radiating fins having a triangular shape joined together.

【0013】ここで、放熱フィン7は、熱伝導のよい材
質で作られており、IC3a,3b,3cとの熱的接合
も十分にとられている。そして、この放熱フィン7は、
冷却風が下流にいくに従って、その表面積が大きくなる
ように形成されていて、冷却風下流の冷却効率の減少を
補うとともに、同一機能部品をつないでいる為に、温度
均一性がより一層向上し、装置精度を安定させる効果が
得られる。又、図3に示すように、放熱フィン7のIC
3との貼付部分は、熱留まりとならないように、放熱フ
ィン7の厚みtを薄くするように構成する。
Here, the radiation fins 7 are made of a material having good heat conductivity, and are sufficiently thermally connected to the ICs 3a, 3b, 3c. And, the radiation fins 7
The cooling air is formed so that its surface area increases as it goes downstream, compensating for the decrease in cooling efficiency downstream of the cooling air, and connecting the same functional parts, further improving temperature uniformity. The effect of stabilizing the device accuracy can be obtained. In addition, as shown in FIG.
3 is configured so that the thickness t of the radiating fins 7 is reduced so as not to cause heat retention.

【0014】上記のように、発熱量が大きく、精度を要
求される装置の冷却に用いる放熱フィン7の形状を三角
形にし、1枚の放熱フィン7を同一基板1内の同一機能
部品複数個に取りつけて冷却することで、同一機能部品
の温度差が小さくなり、装置精度の向上が得られる。
As described above, the shape of the radiating fins 7 used for cooling a device that requires a large amount of heat and requires high accuracy is made triangular, and one radiating fin 7 is mounted on a plurality of the same functional parts on the same substrate 1. By mounting and cooling, the temperature difference between the same functional components is reduced, and the accuracy of the device is improved.

【0015】実施の形態2.なお、基板間隔がとれる場
合は、図4に示すように、さらに高さ方向にも、三角形
状をした放熱フィン8を付設することもできる。このよ
うに、フィンの高さ方向にも三角形状のフィン8を設け
ることにより、放熱フィン表面積を更に大きくし、冷却
風方向下流での冷却効率の減少をより一層補うことがで
き、同一機能部品の温度差が小さくなり、装置精度の向
上を図ることができる。
Embodiment 2 In addition, when a space | interval of a board | substrate is taken, as shown in FIG. 4, the radiation fin 8 of triangular shape can also be attached in the height direction further. Thus, by providing the triangular fins 8 also in the height direction of the fins, the surface area of the radiating fins can be further increased, and the decrease in the cooling efficiency downstream in the cooling air direction can be further compensated for. Temperature difference is reduced, and the accuracy of the apparatus can be improved.

【0016】実施の形態3.放熱フィンの形状は厳格に
三角形でなくともよく、図5に示すような台形形状の放
熱フィン9を設けてもよい。更に、5角形以上の多角形
であっても、冷却風の流れ方向下流へ放熱フィンの表面
積が増加するように作られておれば、同様に、冷却効率
及び装置精度の向上が得られる。
Embodiment 3 The shape of the heat radiation fin does not have to be strictly triangular, and a trapezoidal heat radiation fin 9 as shown in FIG. 5 may be provided. Furthermore, even if it is a pentagon or more polygon, if the surface area of the radiation fin is made to increase downstream in the flow direction of the cooling air, the cooling efficiency and the accuracy of the device can be similarly improved.

【0017】このように半導体装置においては、上記の
ような放熱フィンを用いて基板1の冷却を行なうことに
より、精度の向上を図ることができる。
As described above, in the semiconductor device, the accuracy can be improved by cooling the substrate 1 using the above-described heat radiation fins.

【0018】[0018]

【発明の効果】この発明の請求項1に係る電子部品の冷
却装置によれば、同一基板上に複数の電子部品を載置
し、冷却ファンにより冷却するものであって、複数の部
品上にわたって三角形状の放熱フィンを接合するととも
に、この三角形状の放熱フィンは、冷却風の上流側に頂
点が、又、下流側に底辺が位置するよう配置されている
ので、同一機能部品の温度差が小さくなり、装置精度の
向上が図れる。
According to the cooling device for electronic parts according to the first aspect of the present invention, a plurality of electronic parts are placed on the same substrate and cooled by a cooling fan. Along with joining the triangular radiating fins, the triangular radiating fins are arranged so that the apex is located on the upstream side of the cooling air and the bottom side is located on the downstream side, so that the temperature difference between the same functional components is reduced. As a result, the device accuracy can be improved.

【0019】この発明の請求項2に係る電子部品の冷却
装置によれば、同一基板上に複数の電子部品を載置し、
冷却ファンにより冷却するものであって、複数の部品上
にわたって、冷却風の上流側から下流側にいくに従い表
面積が増加するような形状を呈した放熱フィンを接合し
たので、冷却効率及び装置精度の向上を図ることができ
る。
According to the electronic component cooling device of the second aspect of the present invention, a plurality of electronic components are mounted on the same substrate,
A cooling fan is used for cooling, and a radiating fin having a shape whose surface area increases from upstream to downstream of the cooling air is joined over a plurality of components, so that cooling efficiency and device accuracy are improved. Improvement can be achieved.

【0020】この発明の請求項3に係る電子部品の冷却
装置によれば、冷却風の上流側に頂点が、又、下流側に
底辺が位置するよう高さ方向に形成された三角形状を有
する放熱フィンを設けたので、冷却風方向下流部での冷
却効率の減少をより一層補うことができる。
According to the electronic component cooling device of the third aspect of the present invention, the cooling air has a triangular shape formed in the height direction such that the apex is located on the upstream side and the bottom is located on the downstream side. Since the radiation fins are provided, it is possible to further compensate for a decrease in the cooling efficiency in the downstream portion in the cooling air direction.

【0021】この発明の請求項4に係る半導体装置によ
れば、装置精度の向上を図ることができる。
According to the semiconductor device of the present invention, the accuracy of the device can be improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 この発明の実施の形態1による半導体装置を
示す斜視図である。
FIG. 1 is a perspective view showing a semiconductor device according to a first embodiment of the present invention.

【図2】 この発明の実施の形態1による半導体装置を
示す要部の正面図である。
FIG. 2 is a front view of a main part showing the semiconductor device according to the first embodiment of the present invention;

【図3】 この発明の実施の形態1による半導体装置を
示す要部の側面図である。
FIG. 3 is a side view of a main part showing the semiconductor device according to the first embodiment of the present invention;

【図4】 この発明の実施の形態2による放熱フィンの
接合状態を示す斜視図である。
FIG. 4 is a perspective view showing a bonding state of a radiation fin according to Embodiment 2 of the present invention.

【図5】 この発明の実施の形態3による放熱フィン単
体を示す斜視図である。
FIG. 5 is a perspective view showing a radiation fin alone according to Embodiment 3 of the present invention.

【図6】 従来の半導体装置を示す斜視図である。FIG. 6 is a perspective view showing a conventional semiconductor device.

【図7】 従来の半導体装置を示す斜視図である。FIG. 7 is a perspective view showing a conventional semiconductor device.

【図8】 従来の半導体装置を示す斜視図である。FIG. 8 is a perspective view showing a conventional semiconductor device.

【符号の説明】[Explanation of symbols]

1 基板、5 冷却ファン、7,8,9 放熱フィン。 1 Substrate, 5 cooling fan, 7, 8, 9 radiation fins.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 同一基板上に複数の電子部品を載置し、
冷却ファンにより冷却する電子部品の冷却装置におい
て、上記複数の部品上にわたって三角形状の放熱フィン
を接合するとともに、この三角形状の放熱フィンは、冷
却風の上流側に頂点が、又、下流側に底辺が位置するよ
う配置されていることを特徴とする電子部品の冷却装
置。
1. A plurality of electronic components are mounted on the same substrate,
In a cooling device for electronic components cooled by a cooling fan, a triangular radiating fin is joined over the plurality of components, and the triangular radiating fin has an apex on an upstream side of the cooling air and a downstream side on a downstream side. A cooling device for an electronic component, wherein the cooling device is arranged so that a bottom side is located.
【請求項2】 同一基板上に複数の電子部品を載置し、
冷却ファンにより冷却する電子部品の冷却装置におい
て、上記複数の部品上にわたって、冷却風の上流側から
下流側にいくに従い表面積が増加するような形状を呈し
た放熱フィンを接合したことを特徴とする電子部品の冷
却装置。
2. Placing a plurality of electronic components on the same substrate,
In a cooling device for an electronic component cooled by a cooling fan, a radiating fin having a shape whose surface area increases from upstream to downstream of the cooling air is joined to the plurality of components. Cooling device for electronic components.
【請求項3】 冷却風の上流側に頂点が、又、下流側に
底辺が位置するよう高さ方向に形成された三角形状を有
する放熱フィンを設けたことを特徴とする請求項1また
は請求項2記載の電子部品の冷却装置。
3. A heat radiation fin having a triangular shape formed in a height direction such that a vertex is located on an upstream side of a cooling wind and a bottom side is located on a downstream side of the cooling air. Item 3. A cooling device for an electronic component according to Item 2.
【請求項4】 請求項1〜請求項3のいずれか1項に記
載の電子部品の冷却装置を備えたことを特徴とする半導
体装置。
4. A semiconductor device comprising the cooling device for an electronic component according to claim 1.
JP2000045611A 2000-02-23 2000-02-23 Cooling device of electronic part and semiconductor device Pending JP2001237356A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000045611A JP2001237356A (en) 2000-02-23 2000-02-23 Cooling device of electronic part and semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000045611A JP2001237356A (en) 2000-02-23 2000-02-23 Cooling device of electronic part and semiconductor device

Publications (1)

Publication Number Publication Date
JP2001237356A true JP2001237356A (en) 2001-08-31

Family

ID=18568164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000045611A Pending JP2001237356A (en) 2000-02-23 2000-02-23 Cooling device of electronic part and semiconductor device

Country Status (1)

Country Link
JP (1) JP2001237356A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6094687B2 (en) * 2013-12-19 2017-03-15 富士電機株式会社 Semiconductor module and electrically driven vehicle

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6094687B2 (en) * 2013-12-19 2017-03-15 富士電機株式会社 Semiconductor module and electrically driven vehicle
JPWO2015093169A1 (en) * 2013-12-19 2017-03-16 富士電機株式会社 Semiconductor module and electrically driven vehicle

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