JP2001231238A5 - - Google Patents

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Publication number
JP2001231238A5
JP2001231238A5 JP2000039990A JP2000039990A JP2001231238A5 JP 2001231238 A5 JP2001231238 A5 JP 2001231238A5 JP 2000039990 A JP2000039990 A JP 2000039990A JP 2000039990 A JP2000039990 A JP 2000039990A JP 2001231238 A5 JP2001231238 A5 JP 2001231238A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000039990A
Other languages
Japanese (ja)
Other versions
JP2001231238A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000039990A priority Critical patent/JP2001231238A/ja
Priority claimed from JP2000039990A external-priority patent/JP2001231238A/ja
Publication of JP2001231238A publication Critical patent/JP2001231238A/ja
Publication of JP2001231238A5 publication Critical patent/JP2001231238A5/ja
Pending legal-status Critical Current

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JP2000039990A 2000-02-17 2000-02-17 Ｄｃブラシレスモータおよびそのモータを備えるターボ分子ポンプ Pending JP2001231238A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000039990A JP2001231238A (ja) 2000-02-17 2000-02-17 Ｄｃブラシレスモータおよびそのモータを備えるターボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000039990A JP2001231238A (ja) 2000-02-17 2000-02-17 Ｄｃブラシレスモータおよびそのモータを備えるターボ分子ポンプ

Publications (2)

Publication Number Publication Date
JP2001231238A JP2001231238A (ja) 2001-08-24
JP2001231238A5 true JP2001231238A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2007-03-08

Family

ID=18563464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000039990A Pending JP2001231238A (ja) 2000-02-17 2000-02-17 Ｄｃブラシレスモータおよびそのモータを備えるターボ分子ポンプ

Country Status (1)

Country Link
JP (1) JP2001231238A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006325311A (ja) * 2005-05-18 2006-11-30 Shimadzu Corp Ｄｃブラシレスモータ装置および回転真空ポンプ
DE102005030826A1 (de) * 2005-07-01 2007-01-04 Siemens Ag Synchronmaschine
JP4674514B2 (ja) * 2005-09-16 2011-04-20 株式会社島津製作所 Ｄｃブラシレスモータ装置および回転真空ポンプ
JP4883343B2 (ja) * 2005-11-10 2012-02-22 株式会社島津製作所 真空ポンプ
JP2007143213A (ja) * 2005-11-15 2007-06-07 Shimadzu Corp Ｄｃブラシレスモータ装置および回転真空ポンプ
JP5045894B2 (ja) * 2006-05-09 2012-10-10 株式会社島津製作所 磁気軸受装置
JP4908987B2 (ja) * 2006-09-22 2012-04-04 カヤバ工業株式会社 ピストンリングの製法及び流体圧シリンダ
JP5764283B2 (ja) * 2007-12-27 2015-08-19 エドワーズ株式会社 真空ポンプ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06253523A (ja) * 1993-03-01 1994-09-09 Seiko Seiki Co Ltd Ｄｃブラシレスモータおよびこれを用いたターボ分子ポンプ

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