JP2001230420A5 - - Google Patents
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- JP2001230420A5 JP2001230420A5 JP2000370961A JP2000370961A JP2001230420A5 JP 2001230420 A5 JP2001230420 A5 JP 2001230420A5 JP 2000370961 A JP2000370961 A JP 2000370961A JP 2000370961 A JP2000370961 A JP 2000370961A JP 2001230420 A5 JP2001230420 A5 JP 2001230420A5
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000370961A JP4776773B2 (ja) | 1999-12-10 | 2000-12-06 | 半導体装置の作製方法 |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1999351060 | 1999-12-10 | ||
| JP35106099 | 1999-12-10 | ||
| JP11-351060 | 1999-12-10 | ||
| JP2000370961A JP4776773B2 (ja) | 1999-12-10 | 2000-12-06 | 半導体装置の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001230420A JP2001230420A (ja) | 2001-08-24 |
| JP2001230420A5 true JP2001230420A5 (fi) | 2007-12-20 |
| JP4776773B2 JP4776773B2 (ja) | 2011-09-21 |
Family
ID=26579315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000370961A Expired - Fee Related JP4776773B2 (ja) | 1999-12-10 | 2000-12-06 | 半導体装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4776773B2 (fi) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3810725B2 (ja) * | 2001-09-21 | 2006-08-16 | 株式会社半導体エネルギー研究所 | 発光装置及び電子機器 |
| JP4141307B2 (ja) * | 2002-03-15 | 2008-08-27 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP2004087682A (ja) * | 2002-08-26 | 2004-03-18 | Chi Mei Electronics Corp | 薄膜トランジスタ、画像表示素子および画像表示装置 |
| KR100749478B1 (ko) * | 2006-11-21 | 2007-08-14 | 삼성에스디아이 주식회사 | 고상 결정화 장치 및 이를 이용한 박막 트랜지스터의 제조방법 |
| JP2008252068A (ja) | 2007-03-08 | 2008-10-16 | Semiconductor Energy Lab Co Ltd | 半導体装置及びその作製方法 |
| JP5371144B2 (ja) | 2007-06-29 | 2013-12-18 | 株式会社半導体エネルギー研究所 | 半導体装置及び半導体装置の作製方法、並びに電子機器 |
| JP5959296B2 (ja) * | 2011-05-13 | 2016-08-02 | 株式会社半導体エネルギー研究所 | 半導体装置およびその製造方法 |
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2000
- 2000-12-06 JP JP2000370961A patent/JP4776773B2/ja not_active Expired - Fee Related