JP2001228924A - Method for high speed change of setting of temperature controlled fluid temperature in heat exchanger and circulator provided with method and device therefor - Google Patents

Method for high speed change of setting of temperature controlled fluid temperature in heat exchanger and circulator provided with method and device therefor

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Publication number
JP2001228924A
JP2001228924A JP2000036600A JP2000036600A JP2001228924A JP 2001228924 A JP2001228924 A JP 2001228924A JP 2000036600 A JP2000036600 A JP 2000036600A JP 2000036600 A JP2000036600 A JP 2000036600A JP 2001228924 A JP2001228924 A JP 2001228924A
Authority
JP
Japan
Prior art keywords
temperature
heat medium
heat exchanger
circulation system
temperature control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000036600A
Other languages
Japanese (ja)
Inventor
Hiroyasu Goto
藤 洋 康 後
Hiroyuki Sakama
間 博 之 坂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Priority to JP2000036600A priority Critical patent/JP2001228924A/en
Publication of JP2001228924A publication Critical patent/JP2001228924A/en
Pending legal-status Critical Current

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  • Control Of Temperature (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a method and device for speedily changing the set temperature of a temperature controlled fluid in a heat exchanger. SOLUTION: The heat exchanger 14 is provided with the first circulation system 1 for feeding a heating medium for temperature control for making the thermostatic fluid at a necessary temperature, a second circulation system 2 where the heating medium for changing a temperature adjusted to be at a temperature to which the temperature controlled fluid is tried to be changed is circulated, a communicated duct 5 for communicating the system 2 with the exchanger 14, and a cross valve 6 for feeding the heating medium for changing the temperature flowing through the system 2 to the exchanger 14 by switching. Since the heating medium for changing the temperature of the second circulation system adjusted to the temperature to which it is desired to be changed is fed to the exchanger 14 of the system 1 when the valve 6 is switched, the set temperature of the temperature controlled fluid is speedily changed.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、温調流体を所要の
温度に精度よく調節するための熱交換器に温調用熱媒体
を流すサーキュレータにおいて、その温調流体の温度を
変更する必要が生じた場合に、高速でそれを設定変更で
きるようにするための温調流体温度の高速設定変更方
法、及びその設定変更を行うための装置を備えたサーキ
ュレータに関するものである。
BACKGROUND OF THE INVENTION The present invention relates to a circulator for flowing a temperature control heat medium to a heat exchanger for precisely adjusting a temperature control fluid to a required temperature, and it is necessary to change the temperature of the temperature control fluid. The present invention relates to a method for changing the setting of the temperature of a temperature-controlled fluid at a high speed so that the setting can be changed at a high speed, and a circulator provided with a device for changing the setting.

【0002】[0002]

【従来の技術】温調流体を所要の温度に精度よく調節す
るための熱交換器を含む熱媒体の循環系を、熱媒体タン
クから導出した管路に、該熱媒体を圧送するポンプ、及
びこの熱媒体を所要の温度に調節する温調手段を設ける
と共に、それらの下流側に熱交換器を配し、該熱交換器
を経た熱媒体を上記熱媒体タンクに還流させるように構
成したサーキュレータは、従来から知られている。
2. Description of the Related Art A pump for pumping a heat medium to a pipe extending from a heat medium tank through a heat medium circulating system including a heat exchanger for precisely adjusting a temperature control fluid to a required temperature, and A circulator configured to provide temperature control means for adjusting the heat medium to a required temperature, and to dispose a heat exchanger downstream of the heat medium, and to recirculate the heat medium passing through the heat exchanger to the heat medium tank. Is conventionally known.

【0003】上記公知の熱交換器を含むサーキュレータ
においては、熱交換器により温調流体を所要の温度に調
節することができるという点では問題がないが、条件の
変更等により熱交換器における温調流体の温度を変更し
ようとする場合には、その変更に長時間を要するという
問題がある。即ち、熱媒体を所要の温度に調節する前記
温調手段は、定常的な稼動状態においては、該熱媒体が
ほぼ所要の温度にあるためにそれを僅かに温度調節でき
る能力を有していればよく、したがって、高い温調能力
を持たせる必要がないものである。しかしながら、上記
熱交換器における温調流体の温度を変更しようとする場
合には、待機時間を短くするため、できるだけ短時間に
その熱媒体の温度を変更することが要求される。これを
実現するためには、上記温調手段の温度調節能力を十分
に高めておく必要があるが、設定温度の変更のみのため
に温度調節能力を高めておくことは、極めて不経済であ
る。
[0003] In the circulator including the above-mentioned known heat exchanger, there is no problem in that the temperature of the temperature control fluid can be adjusted to a required temperature by the heat exchanger. When changing the temperature of the conditioning fluid, there is a problem that the change takes a long time. That is, the temperature control means for adjusting the temperature of the heat medium to a required temperature should be capable of slightly adjusting the temperature of the heat medium because the heat medium is almost at the required temperature in a steady operating state. Therefore, it is not necessary to provide a high temperature control ability. However, when trying to change the temperature of the temperature control fluid in the heat exchanger, it is necessary to change the temperature of the heat medium in as short a time as possible in order to shorten the standby time. In order to realize this, it is necessary to sufficiently increase the temperature adjusting ability of the temperature adjusting means, but it is extremely uneconomical to increase the temperature adjusting ability only for changing the set temperature. .

【0004】[0004]

【発明が解決しようとする課題】本発明が解決しようと
する課題は、温調流体を所要の温度に精度よく調節する
ための熱交換器に温調用熱媒体を流すサーキュレータに
おいて、その温調流体の温度を変更する必要が生じた場
合に、高速でそれを設定変更できるようにするための温
調流体温度の高速設定変更方法及びその装置を備えたサ
ーキュレータを提供することにある。本発明の他の課題
は、設定温度の変更のみのために温調手段の温度調節能
力を十分に高めておく必要をなくし、したがって、小電
力の温調手段によって設備を簡単なものにできるように
したサーキュレータを提供することにある。本発明の更
に他の課題は、上記小電力の温調手段を用いながらも温
調精度の向上を図れるようにした高速設定変更方法及び
その装置を備えたサーキュレータを提供することにあ
る。
SUMMARY OF THE INVENTION An object of the present invention is to provide a circulator for flowing a temperature control heat medium through a heat exchanger for precisely adjusting a temperature control fluid to a required temperature. It is an object of the present invention to provide a high-speed setting change method of a temperature-regulated fluid temperature and a circulator provided with the device so that the setting can be changed at a high speed when it becomes necessary to change the temperature. Another object of the present invention is to eliminate the necessity of sufficiently increasing the temperature control capability of the temperature control means only for changing the set temperature, so that the equipment can be simplified by the low-power temperature control means. Circulator is provided. Still another object of the present invention is to provide a high-speed setting change method and a circulator provided with the apparatus, which can improve the temperature control accuracy while using the low-power temperature control means.

【0005】[0005]

【課題を解決するための手段】上記課題を解決するため
の本発明の温調流体温度の高速設定変更方法は、熱交換
器に恒温の温調用熱媒体を循環して流す第1の循環系
と、変更すべき設定温度に温度調節された設定温度変更
用熱媒体を循環して流す第2の循環系とを備え、上記熱
交換器における温調流体温度の設定変更に際し、第1の
循環系に、その熱交換器を流れる温調用熱媒体に代えて
第2の循環系における温度変更用熱媒体を導入すること
を特徴とするものである。
According to a first aspect of the present invention, there is provided a method for changing the temperature of a temperature control fluid at a high speed, comprising: a first circulating system for circulating a constant-temperature heat medium for temperature control through a heat exchanger; And a second circulating system for circulating and flowing a set temperature changing heat medium whose temperature has been adjusted to the set temperature to be changed, wherein the first circulating system is used for changing the setting of the temperature control fluid temperature in the heat exchanger. It is characterized in that a heat medium for temperature change in the second circulation system is introduced into the system in place of the heat medium for temperature control flowing through the heat exchanger.

【0006】上記高速設定変更方法においては、第2の
循環系を循環する温度変更用熱媒体の量を、第1の循環
系を循環する温調用熱媒体の量よりも十分に多くし、熱
交換器における温調流体の設定温度の変更に際して、第
2の循環系からの温度変更用熱媒体の導入により生じた
第1の循環系の余剰の熱媒体を、第2の循環系の温度変
更用熱媒体タンクに流入させるのが適切である。
[0006] In the high-speed setting change method, the amount of the temperature changing heat medium circulating in the second circulating system is sufficiently larger than the amount of the temperature adjusting heat medium circulating in the first circulating system. When the set temperature of the temperature control fluid in the exchanger is changed, the surplus heat medium of the first circulation system generated by the introduction of the temperature change heat medium from the second circulation system is used to change the temperature of the second circulation system. It is appropriate to make it flow into the heating medium tank.

【0007】また、上記方法を実施するための装置を備
えた本発明のサーキュレータは、熱交換器に、温度調節
のための恒温の温調用熱媒体を循環して流す第1の循環
系と、変更しようとする設定温度に温度調節した恒温の
温度変更用熱媒体を循環して流す第2の循環系とを備
え、上記熱交換器における温調流体温度の高速設定変更
装置として、第2の循環系における温度変更用熱媒体を
圧送するポンプの吐出側の管路に、該管路を通して圧送
される上記温度変更用熱媒体を第1の循環系における熱
交換器側に切換えて送給する切換え手段を設けたことを
特徴とするものである。
Further, the circulator of the present invention provided with an apparatus for performing the above method includes a first circulating system for circulating a constant-temperature heat medium for temperature control for temperature control through a heat exchanger; A second circulating system for circulating and flowing a constant-temperature temperature-change heat medium whose temperature has been adjusted to the set temperature to be changed, and a second high-speed setting-temperature changing device for the temperature control fluid temperature in the heat exchanger. The above-mentioned temperature-changing heat medium pumped through the pipe is switched to the heat exchanger side in the first circulation system and fed to a pipe on the discharge side of the pump for pumping the temperature-changing heat medium in the circulation system. A switching means is provided.

【0008】上記サーキュレータにおいては、複数の第
2の循環系を備え、それらの循環系における温度変更用
熱媒体を第1の循環系に切換えて送給する切換え手段
を、第1の循環系の熱交換器側に選択的に切り換え可能
にすることができ、更に、上記切換え手段としては、温
度変更用熱媒体を、第1の循環系における熱交換器側と
第2の循環系における温度変更用熱媒体タンク側とに切
換えて送給する三方弁を備えるのが適切である。
In the circulator, a plurality of second circulation systems are provided, and a switching means for switching the temperature change heat medium in the circulation systems to the first circulation system for feeding is provided by the first circulation system. The switching means can be selectively switched to the heat exchanger side, and the switching means includes a temperature changing heat medium for changing the temperature between the heat exchanger side in the first circulation system and the temperature change in the second circulation system. It is appropriate to provide a three-way valve for switching and feeding to the heating medium tank side.

【0009】また、サーキュレータとしては、第1の循
環系を、温調用熱媒体タンクから導出した管路に、温調
用熱媒体を圧送する温調用ポンプ、及びその温調用熱媒
体を所要の温度に調節する温調手段を設けると共に、そ
れらの下流側に熱交換器を配し、該熱交換器を経た温調
用熱媒体を、上記温調用熱媒体タンクに還流させる管路
を設けることにより構成し、上記温調用熱媒体タンク
に、余剰の熱媒体を第2の循環系における温度変更用熱
媒体タンクに流すオーバーフロー管を設けたものとする
ことができる。
Further, as the circulator, a temperature control pump for pumping the temperature control heat medium to a pipe extending from the temperature control heat medium tank through the first circulation system, and the temperature control heat medium to a required temperature. In addition to providing a temperature control means for adjusting, a heat exchanger is disposed downstream of the heat control means, and a pipe line for returning the heat medium for temperature control passed through the heat exchanger to the heat medium tank for temperature control is provided. The temperature control heat medium tank may be provided with an overflow pipe for flowing an excess heat medium to the temperature change heat medium tank in the second circulation system.

【0010】上記構成を有する本発明のサーキュレータ
において、熱交換器における温調流体温度を条件の変更
等によって設定変更しようとする場合には、第1の循環
系を利用して所要の温度に調整した温調用熱媒体を熱交
換器に供給している段階で、予め、第2の循環系を流れ
る温度変更用熱媒体をその変更すべき温度に調整してお
き、設定温度の切換えを行う段階で、切換え手段を構成
する三方弁を切り換えて、第2の循環系を流れる恒温の
温度変更用熱媒体を第1の循環系の熱交換器側に供給す
る。この場合、第2の循環系における温度変更用熱媒体
は、予め変更しようとする温度にされているために、こ
の温度変更用熱媒体を熱交換器に送給して第1の循環系
の温調用熱媒体と入れ換えることによって、熱交換器を
流れる温調流体の設定温度の変更を速やかに行うことが
できる。
In the circulator of the present invention having the above-described structure, when the temperature of the temperature control fluid in the heat exchanger is to be changed by changing conditions, the temperature is adjusted to a required temperature by using the first circulation system. A stage in which the temperature-change heat medium flowing through the second circulation system is previously adjusted to the temperature to be changed at the stage of supplying the heat-regulated heat medium to the heat exchanger, and the set temperature is switched. Then, the three-way valve constituting the switching means is switched to supply the constant-temperature heating medium for temperature change flowing through the second circulation system to the heat exchanger side of the first circulation system. In this case, since the temperature changing heat medium in the second circulation system has been set to the temperature to be changed in advance, this temperature changing heat medium is supplied to the heat exchanger to be used in the first circulation system. By changing the temperature control heat medium, the set temperature of the temperature control fluid flowing through the heat exchanger can be changed quickly.

【0011】そして、第2の循環系を流れる温度変更用
熱媒体の送給によって、第1の循環系に生じた余剰の熱
媒体は、オーバーフロー管により第2の循環系の温度変
更用熱媒体タンクに還流されるので、これらの循環系に
おける熱媒体の循環に支障を生ずることはない。この場
合に、第2の循環系の温度変更用熱媒体の量を、第1の
循環系を循環する温調用熱媒体の量よりも十分に多くす
ることにより、第1の循環系における温調用熱媒体が第
2の循環系の温度変更用熱媒体タンクに還流しても、そ
の温度に殆ど影響を与えることがない。
The surplus heat medium generated in the first circulating system by the supply of the temperature changing heat medium flowing through the second circulating system is transferred to the second circulating system by the overflow tube. Since the heat is returned to the tank, the circulation of the heat medium in these circulation systems is not hindered. In this case, by making the amount of the heat medium for temperature change in the second circulation system sufficiently larger than the amount of the heat medium for temperature adjustment circulating in the first circulation system, the amount of the heat medium for temperature adjustment in the first circulation system is increased. Even if the heat medium returns to the temperature change heat medium tank of the second circulation system, the temperature is hardly affected.

【0012】第1の循環系の熱交換器における熱媒体の
温度が、変更しようとする温度変更用熱媒体の温度に達
したときには、三方弁をもとの状態に切換え、再び第1
の循環系において所要の変更後の温度に調整した温調用
熱媒体を熱交換器に供給することができる。この場合
に、第1の循環系における温調手段の設定温度を、予め
変更しようとする温度に変更しておくことは勿論であ
る。第2の循環系を複数設けて、これらの第2の循環系
を流れる温度変更用熱媒体の温度を、変更しようとする
温度と、その次に変更しようとする温度とに調整してお
くと、熱交換器を流れる温調流体の設定温度の変更を一
層速やかに行うことができる。
When the temperature of the heat medium in the heat exchanger of the first circulation system reaches the temperature of the temperature changing heat medium to be changed, the three-way valve is switched to the original state, and the first state is returned again.
In the circulation system, the heat medium for temperature control adjusted to the temperature after the required change can be supplied to the heat exchanger. In this case, it is a matter of course that the set temperature of the temperature control means in the first circulation system is changed in advance to the temperature to be changed. When a plurality of second circulation systems are provided, the temperature of the temperature changing heat medium flowing through these second circulation systems is adjusted to a temperature to be changed and a temperature to be changed next. In addition, the set temperature of the temperature control fluid flowing through the heat exchanger can be changed more quickly.

【0013】このようにして、第1の循環系と第2の循
環系との切換えによりサーキュレータにおける温調流体
の温度を変更すると、高速でそれを設定変更することが
できるばかりでなく、設定温度の変更のために温調手段
の温度調節能力を十分に高めておく必要がなく、したが
って、小電力の温調手段によって設備を簡単なものと
し、しかも、温調精度の向上を図ることができる。
When the temperature of the temperature control fluid in the circulator is changed by switching between the first circulation system and the second circulation system in this way, not only can the setting be changed at a high speed, but also the setting temperature can be changed. It is not necessary to sufficiently increase the temperature control capability of the temperature control means for changing the temperature, and therefore the equipment can be simplified by the low power temperature control means, and the temperature control accuracy can be improved. .

【0014】[0014]

【発明の実施の形態】図1は、本発明の温調流体温度の
高速設定変更方法を実施するためのサーキュレータの第
1実施例を示し、このサーキュレータは、所要の温度に
調整する必要があるレジスト等の温調流体を所望の温度
に調整するためのもので、恒温の温調用熱媒体を循環さ
せる第1の循環系1と、変更しようとする温調流体の温
度に調整した温度変更用熱媒体を循環させる第2の循環
系2と、その第2の循環系2を流れる温度変更用熱媒体
を、第1の循環系1の熱交換器14に送給するための連
通管路5と、上記温度変更用熱媒体を、第2の循環系2
における循環と、熱交換器14への送給とに切換える切
換え手段としての三方弁6と、その三方弁6の切換えに
よって生ずる第1の循環系1の余剰の熱媒体を第2の循
環系に流出させるオーバーフロー管7とを備えている。
上記第1の循環系1における温調用熱媒体と第2の循環
系2における温度変更用熱媒体としては、いずれも水を
用いることができるが、他の熱媒体であっても差し支え
ない。
FIG. 1 shows a first embodiment of a circulator for carrying out a method for rapidly changing the temperature of a temperature control fluid according to the present invention. This circulator needs to be adjusted to a required temperature. A first circulating system 1 for circulating a temperature-controlling heat medium at a constant temperature for adjusting a temperature-controlling fluid such as a resist to a desired temperature; A second circulation system 2 for circulating the heat medium, and a communication line 5 for feeding the heat medium for temperature change flowing through the second circulation system 2 to the heat exchanger 14 of the first circulation system 1 And the heat medium for changing the temperature,
, And a three-way valve 6 as switching means for switching between the circulation to the heat exchanger 14 and the excess heat medium of the first circulation system 1 generated by the switching of the three-way valve 6 to the second circulation system. And an overflow pipe 7 for flowing out.
As the heat medium for temperature control in the first circulating system 1 and the heat medium for temperature change in the second circulating system 2, water can be used, but any other heat medium may be used.

【0015】上記第1の循環系1は、温調流体を加熱ま
たは冷却して恒温にする温調用熱媒体のための密閉形の
温調用熱媒体タンク11と、この熱媒体を圧送して循環
させるための温調用ポンプ12と、上記熱媒体を加熱ま
たは冷却して所要の温度に調節するための温調用熱交換
器13と、温調流体と熱交換する二重管形の熱交換器1
4とを備え、これらは、管路17a〜17dで順次接続
されて、タンク11からタンク11に戻る循環系を構成
している。そして、上記温調用熱交換器13において設
定温度に温度調節された温調用熱媒体は、熱交換器14
に送給され、該熱交換器14を流れる温調流体を所要の
温度に調節するものである。
The first circulating system 1 includes a closed-type temperature control heating medium tank 11 for heating or cooling a temperature control fluid to make the temperature control a constant temperature, and circulates the heat medium under pressure. Pump 12, a heat exchanger 13 for heating or cooling the heat medium to adjust the temperature to a required temperature, and a double-pipe heat exchanger 1 for exchanging heat with a temperature control fluid.
And these are sequentially connected by conduits 17a to 17d to form a circulation system returning from the tank 11 to the tank 11. Then, the temperature control heat medium whose temperature has been adjusted to the set temperature in the temperature control heat exchanger 13 is supplied to the heat exchanger 14.
The temperature control fluid supplied to the heat exchanger 14 and flowing through the heat exchanger 14 is adjusted to a required temperature.

【0016】上記温調用熱交換器13は、2個の熱交換
部13a,13bとこれらの間の複数個のペルチェ素子
13cとを備えたサーモモジュールとして構成されてお
り、ペルチェ素子13cへの通電方向の切り換えによっ
て一方の熱交換部13aを流れる温調用熱媒体を加熱或
いは冷却するもので、他方の熱交換部13bには、該熱
媒体の加熱または冷却に対応して、冷水または温水が流
される。そして、この温調用熱交換器13を流れる温調
用熱媒体の温度は、該熱交換器13の出口側の熱媒体の
温度を検出して、ペルチェ素子13cへの通電量及び通
電方向を制御する温調用コントローラ15によって調節
される。
The temperature control heat exchanger 13 is configured as a thermo module including two heat exchange sections 13a and 13b and a plurality of Peltier elements 13c therebetween, and energizes the Peltier element 13c. By switching the direction, the temperature control heat medium flowing through one heat exchange section 13a is heated or cooled, and cold water or hot water flows through the other heat exchange section 13b in accordance with the heating or cooling of the heat medium. It is. The temperature of the heat medium for temperature control flowing through the heat exchanger 13 for temperature control detects the temperature of the heat medium on the outlet side of the heat exchanger 13 and controls the amount of current and the direction of current flow to the Peltier element 13c. It is adjusted by the temperature controller 15.

【0017】一方、第1の循環系1の下方に設けられた
第2の循環系2は、温度変更用熱媒体のための開放形の
温度変更用熱媒体タンク21と、該タンク21の上記熱
媒体を圧送して循環させるための温度変更用ポンプ22
と、この熱媒体を加熱または冷却して、上記温調流体の
変更しようとする温度に調節するための温度変更用熱交
換器23と、切換え手段を構成する前記三方弁6とを備
え、これらは、管路27a〜27dにより順次接続され
て、熱媒体タンク21から同タンク21に戻る循環系を
構成している。
On the other hand, a second circulating system 2 provided below the first circulating system 1 includes an open-type temperature changing heat medium tank 21 for a temperature changing heat medium, and the above-described tank 21 of the tank 21. Temperature change pump 22 for pumping and circulating the heat medium
A temperature changing heat exchanger 23 for heating or cooling the heat medium to adjust the temperature of the temperature control fluid to a desired temperature, and the three-way valve 6 constituting switching means. Are sequentially connected by pipes 27a to 27d to form a circulation system returning from the heat medium tank 21 to the tank 21.

【0018】上記三方弁6は、第2の循環系2における
温度変更用熱交換器23の出口側管路27cを、熱媒体
タンク21に至る管路27dと第1の循環系1における
熱交換器14側に連通する連通管路5とに切り換えるも
のである。また、温度変更用熱媒体タンク21の容量
は、温調用熱媒体タンク11の容量よりも十分に大きく
されており、温調用熱媒体タンク11に設けた上記オー
バーフロー管7は、温度変更用熱媒体タンク21内に開
口している。上記温度変更用熱交換器23は、前記温調
用熱交換器13と同一の構成及び同一の作用を奏するも
のであり、温度変更用熱媒体の温度は、該熱交換器23
の出口側の熱媒体の温度を検出して、ペルチェ素子23
cへの通電量と通電方向とを制御する温度変更用コント
ローラ25によって調節される。
The three-way valve 6 connects the outlet pipe 27c of the temperature changing heat exchanger 23 in the second circulation system 2 with the pipe 27d extending to the heat medium tank 21 and heat exchange in the first circulation system 1. It is switched to the communication pipe line 5 communicating with the vessel 14 side. Further, the capacity of the temperature change heat medium tank 21 is sufficiently larger than the capacity of the temperature control heat medium tank 11, and the overflow pipe 7 provided in the temperature control heat medium tank 11 is provided with a temperature change heat medium. It is open in the tank 21. The temperature change heat exchanger 23 has the same configuration and the same operation as the temperature control heat exchanger 13, and the temperature of the temperature change heat medium is determined by the heat exchanger 23.
Of the heat medium at the outlet side of the Peltier device 23
The temperature is adjusted by a temperature changing controller 25 that controls the amount of current supplied to c and the direction of current supply.

【0019】上記第1実施例のサーキュレータにおい
て、温調流体の設定温度の変更がないときは、三方弁6
によって、第2の循環系2を流れる温度変更用熱媒体を
温度変更用熱交換器23の出口側管路27cから熱媒体
タンク21に至る管路27dに流し、それによって第1
の循環系1と第2の循環系2との間の連通が遮断されて
いるので、熱交換器14には、温調用熱交換器13によ
って所要の温度に調節された温調用熱媒体が送給されて
いる。一方、第2の循環系2には、温度変更用熱交換器
23によって、次に変更しようとする温度に調節された
温度変更用熱媒体が循環している。
In the circulator of the first embodiment, when there is no change in the set temperature of the temperature control fluid, the three-way valve 6
As a result, the heat medium for temperature change flowing through the second circulation system 2 flows from the outlet pipe 27c of the heat exchanger for temperature change 23 to the pipe 27d extending to the heat medium tank 21.
Since the communication between the circulation system 1 and the second circulation system 2 is interrupted, the heat medium for temperature control adjusted to a required temperature by the heat exchanger 13 for temperature control is sent to the heat exchanger 14. Have been paid. On the other hand, in the second circulation system 2, a temperature changing heat medium adjusted to a temperature to be changed next is circulated by the temperature changing heat exchanger 23.

【0020】条件の変更等により、熱交換器14を流れ
る温調流体の設定温度を変更するときは、三方弁6を切
り換えて、第2の循環系2を流れる温度変更用熱媒体
を、連通管路5によって第1の循環系1の熱交換器14
に送給するとともに、温調用コントローラ15によっ
て、第1の循環系1を流れる温調用熱媒体の温度を、上
記温度変更用熱媒体の温度になるように制御する。第1
の循環系1の温調用ポンプ12は、熱媒体タンク11内
の熱媒体の温度が変更しようとする温度に近くなるまで
一時的に停止させるのが望ましい。この場合、第2の循
環系2の熱媒体タンク21の容量を第1の循環系1の熱
媒体タンク11よりも十分に大きくし、そのため、第2
の循環系2を流れる温度変更用熱媒体の全体量が多く、
しかもその温度が温調流体の変更しようとする温度に調
整されているので、第1の循環系1を流れる温調用熱媒
体の温度を温調用熱交換器13によって変更する場合に
比べて、熱交換器14に送給される熱媒体の温度を、速
やかに変更することができる。従って、熱交換器14を
流れる温調流体の温度を、速やかに変更しようとする温
度にすることができる。
When the set temperature of the temperature control fluid flowing through the heat exchanger 14 is changed due to a change in conditions or the like, the three-way valve 6 is switched to communicate the temperature changing heat medium flowing through the second circulation system 2. The heat exchanger 14 of the first circulation system 1 is connected by the line 5.
And the temperature of the temperature control heat medium flowing through the first circulating system 1 is controlled by the temperature control controller 15 so as to be equal to the temperature of the temperature change heat medium. First
It is desirable to temporarily stop the temperature control pump 12 of the circulation system 1 until the temperature of the heat medium in the heat medium tank 11 approaches the temperature to be changed. In this case, the capacity of the heat medium tank 21 of the second circulation system 2 is made sufficiently larger than that of the heat medium tank 11 of the first circulation system 1, and
Large amount of the temperature change heat medium flowing through the circulation system 2 of
Moreover, since the temperature is adjusted to the temperature at which the temperature control fluid is to be changed, the temperature of the temperature control heat medium flowing through the first circulation system 1 is changed as compared with the case where the temperature of the temperature control heat medium is changed by the temperature control heat exchanger 13. The temperature of the heat medium supplied to the exchanger 14 can be changed quickly. Therefore, the temperature of the temperature control fluid flowing through the heat exchanger 14 can be quickly changed to a temperature that is to be changed.

【0021】上記三方弁6の切り換えによって、第2の
循環系2を流れる温度変更用熱媒体が熱交換器14に送
給されると、第1の循環系1を流れる熱媒体の量が増加
するが、この余剰熱媒体は、オーバーフロー管7によっ
て第2の循環系2の温度変更用熱媒体タンク21に流出
するので、第2の循環系2を流れる温度変更用熱媒体の
熱交換器14への送給に支障はない。
When the three-way valve 6 is switched so that the temperature changing heat medium flowing through the second circulation system 2 is supplied to the heat exchanger 14, the amount of heat medium flowing through the first circulation system 1 increases. However, the surplus heat medium flows out to the temperature change heat medium tank 21 of the second circulation system 2 by the overflow pipe 7, so that the temperature change heat medium heat exchanger 14 flowing through the second circulation system 2 There is no problem with the delivery to.

【0022】所定の時間の経過により、第1の循環系1
を循環する温調用熱媒体の温度が、温調流体の変更しよ
うとする温度になったときは、三方弁6を切り換えて、
第2の循環系2と熱交換器14との連通を遮断し、第1
の循環系1を稼動させる。これにより、変更しようとす
る温度になった第1の循環系1の温調用熱媒体が熱交換
器14に送給され、この温調用熱媒体によって温調流体
の温度が調節される。この場合に、第1の循環系1にお
ける温調用コントローラ15の設定温度を、変更しよう
とする温度に変更しておくことは勿論である。また、三
方弁6の切り換えによって、第2の循環系2の温度変更
用熱媒体が熱交換器14と関係なく循環するので、温度
変更用コントローラ25と温度変更用熱交換器23とに
よって、温度変更用熱媒体の温度を、次に変更しようと
する設定温度にすることができる。
When a predetermined time elapses, the first circulation system 1
When the temperature of the temperature control heat medium circulating through the air reaches the temperature at which the temperature control fluid is to be changed, the three-way valve 6 is switched,
The communication between the second circulation system 2 and the heat exchanger 14 is cut off,
Circulating system 1 is operated. As a result, the temperature control heat medium of the first circulation system 1 having the temperature to be changed is supplied to the heat exchanger 14, and the temperature of the temperature control fluid is adjusted by the temperature control heat medium. In this case, it is a matter of course that the set temperature of the temperature controller 15 in the first circulation system 1 is changed to the temperature to be changed. Further, the switching of the three-way valve 6 causes the temperature-changing heat medium of the second circulation system 2 to circulate regardless of the heat exchanger 14, so that the temperature-changing controller 25 and the temperature-changing heat exchanger 23 allow the temperature to change. The temperature of the changing heat medium can be set to the set temperature to be changed next.

【0023】なお、第2の循環系2における温度変更用
熱媒体は、必ずしも常時循環させる必要はなく、設定温
度の変更が必要になるまでの時間が、温度変更用熱媒体
が次の変更しようとする温度に調整できるまでの時間よ
りも長いときは、第2の循環系2の稼動を止めておくこ
とが好ましい。また、熱媒体の補給は、第2の循環系2
のみに行えばよく、それによって第1の循環系1に必要
量の熱媒体が補給される。
Note that the temperature changing heat medium in the second circulation system 2 does not always need to be constantly circulated, and the time until the set temperature needs to be changed is changed by the next time. When it is longer than the time until the temperature can be adjusted, it is preferable to stop the operation of the second circulation system 2. The replenishment of the heat medium is performed in the second circulation system 2.
Only the heating medium needs to be supplied to the first circulation system 1.

【0024】図2は本発明に係るサーキュレータの第2
実施例を示し、この実施例は、第1の循環系1と、2個
並設した第2の循環系2A及び2Bを備えている。この
実施例における第1の循環系1は、第1実施例と実質的
に同一であり、また、第2の循環系2A,2Bは、いず
れも第1実施例における第2の循環系2と実質的に同じ
構成を備えているから、図の同一の箇所に同一の符号を
付しそれらの詳細な説明は省略する。
FIG. 2 shows a second embodiment of the circulator according to the present invention.
An embodiment will be described. This embodiment includes a first circulation system 1 and two second circulation systems 2A and 2B arranged side by side. The first circulation system 1 in this embodiment is substantially the same as the first embodiment, and the second circulation systems 2A and 2B are both the same as the second circulation system 2 in the first embodiment. Since they have substantially the same configuration, the same reference numerals are given to the same portions in the drawings, and detailed description thereof will be omitted.

【0025】上記第2の循環系2A,2Bは、これらの
循環系を流れる温度変更用熱媒体の温度を互いに異なる
ものとし、これらの循環系2A,2Bにおける温度変更
用熱媒体を第1の循環系1に切換えて送給する三方弁
(切換え手段)6A,6Bを、それぞれ選択的に切り換
え可能に構成している。そのため、一方の循環系を流れ
る温度変更用熱媒体の温度は変更しようとする温度に設
定し、他方の循環系を流れる温度変更用熱媒体の温度
を、その次に変更しようとする温度に設定することによ
り、高頻度の設定温度の変更に対応させることができ
る。なお、熱媒体タンク11からのオーバーフロー管7
は三方弁8によって分岐された分岐管7A,7Bを有す
るものとし、第1の循環系1からオーバーフローする余
剰の熱媒体を、稼動している第2の循環系2A,2Bの
いずれかの熱媒体タンク21に切り換えて流出させるよ
うにしている。
The second circulating systems 2A and 2B have different temperatures of the temperature changing heat medium flowing through these circulating systems, and the first temperature changing heat medium in the circulating systems 2A and 2B is the first temperature changing heat medium. The three-way valves (switching means) 6A and 6B for switching and feeding the circulating system 1 are configured to be selectively switchable. Therefore, the temperature of the temperature change heat medium flowing through one circulation system is set to the temperature to be changed, and the temperature of the temperature change heat medium flowing through the other circulation system is set to the next temperature to be changed. By doing so, it is possible to cope with a high-frequency change of the set temperature. The overflow pipe 7 from the heat medium tank 11
Has branch pipes 7A, 7B branched by a three-way valve 8, and transfers excess heat medium overflowing from the first circulation system 1 to any of the operating second circulation systems 2A, 2B. The medium is switched to the medium tank 21 and discharged.

【0026】上記構成を有する第2実施例のサーキュレ
ータにおいて、温調流体の温度を変更する場合は、三方
弁6Aまたは6B、及び三方弁8を切り換えて、第2の
循環系2Aまたは2Bを流れるいずれか一方の温度変更
用熱媒体を熱交換器14に送給すると共に、第1の循環
系1における余剰の熱媒体を、これと同じ側の第2の循
環系の熱媒体タンク21に流出させる。さらに温調流体
の温度を変更する場合には、これらの三方弁6A,6B
をそれぞれ切り換えて、他方の循環系2Aまたは2Bを
流れる温度変更用熱媒体を熱交換器14に送給し、余剰
の熱媒体は他方のタンクに流出される。第2実施例のそ
の他の作用は、第1実施例の場合と実質的に同じである
から、その説明は省略する。
In the circulator of the second embodiment having the above-described structure, when the temperature of the temperature control fluid is changed, the three-way valve 6A or 6B and the three-way valve 8 are switched to flow through the second circulation system 2A or 2B. One of the temperature changing heat medium is supplied to the heat exchanger 14, and the surplus heat medium in the first circulation system 1 flows out to the heat medium tank 21 of the second circulation system on the same side as the heat medium. Let it. When the temperature of the temperature control fluid is further changed, these three-way valves 6A and 6B
, And the temperature changing heat medium flowing through the other circulation system 2A or 2B is supplied to the heat exchanger 14, and the surplus heat medium is discharged to the other tank. The other operations of the second embodiment are substantially the same as those of the first embodiment, and thus the description thereof is omitted.

【0027】図3は第2実施例の変形例を示し、この変
形例は、2個並設した第2の循環系2A,2Bにおける
温度設定用熱媒体タンク21A,21Bを、連通管30
で連通させたものとして構成している。また、図2の実
施例のように、第1の循環系1におけるオーバーフロー
管7に分岐管及び三方弁を設けることなく、オーバーフ
ロー管7の先端は一方のタンク21Aに開口させてい
る。上記変形例の他の構成は、図2の第2実施例と同じ
であるから、図の主要な同一の構成に同一の符号を付し
て、詳細な説明は省略する。上記構成を有する変形例で
は、2個の温度設定用熱媒体タンク21Aと21Bを連
通管30で連通させているので、オーバーフロー管7か
らの熱媒体を熱媒体タンク21A,21Bのいずれに還
流させる場合であっても、直接または連通管30を通し
て、稼動している側の第2循環系のタンクに戻すことが
でき、両熱媒体タンク21A,21B内の熱媒体が混合
しても、その温度差が格別大きいものでなければ、その
影響を無視することができる。また、図2の実施例の分
岐管と三方弁を省略することができるので、該実施例に
比べて構成が簡単で安価なものとすることができる。
FIG. 3 shows a modification of the second embodiment. In this modification, the temperature setting heat medium tanks 21A and 21B in the two second circulation systems 2A and 2B are connected to the communication pipe 30.
It is constituted as what was made to communicate. As in the embodiment of FIG. 2, the overflow pipe 7 in the first circulation system 1 does not have a branch pipe and a three-way valve, and the tip of the overflow pipe 7 is opened to one tank 21A. The other configuration of the above modification is the same as that of the second embodiment of FIG. 2, and therefore, the same reference numerals are given to the same main components in the figure, and detailed description will be omitted. In the modified example having the above configuration, since the two temperature setting heat medium tanks 21A and 21B are connected by the communication pipe 30, the heat medium from the overflow pipe 7 is returned to either of the heat medium tanks 21A and 21B. Even in this case, it is possible to return to the tank of the second circulating system on the operating side directly or through the communication pipe 30, and even if the heat medium in both heat medium tanks 21A and 21B are mixed, the temperature of the heat medium tanks 21A and 21B is not changed. If the difference is not particularly large, the effect can be ignored. Further, since the branch pipe and the three-way valve in the embodiment of FIG. 2 can be omitted, the configuration can be simplified and inexpensive as compared with the embodiment.

【0028】[0028]

【発明の効果】以上に詳述したように、本発明によれ
ば、温調用熱媒体が循環する第1の循環系と、変更しよ
うとする温度に設定した変更用熱媒体が循環する1つま
たは複数の第2の循環系を設けると共に、切換え手段に
よって、これらの第2の循環系を流れる変更用熱媒体を
第1の循環系の熱交換器に切り換えて送給するようにし
たので、条件の変更等による温調流体の設定温度の変更
を速やかに行うことができる。
As described above in detail, according to the present invention, the first circulating system in which the temperature control heat medium circulates and the one in which the change heat medium set to the temperature to be changed circulates. Alternatively, a plurality of second circulation systems are provided, and the switching heat medium is switched by the switching means to the heat exchanger of the first circulation system for supply to the first circulation system. It is possible to quickly change the set temperature of the temperature control fluid by changing a condition or the like.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1実施例の構成図である。FIG. 1 is a configuration diagram of a first embodiment of the present invention.

【図2】本発明の第2実施例の構成図である。FIG. 2 is a configuration diagram of a second embodiment of the present invention.

【図3】上記第2実施例の変形例の構成図である。FIG. 3 is a configuration diagram of a modification of the second embodiment.

【符号の説明】[Explanation of symbols]

1 第1の循環系 2,2A,2B 第2の循環系 5 連通管路 6A,6B,8 三方弁 7 オーバーフロー管 11 温調用熱媒体タンク 12 温調用ポンプ 13 温調用熱交換器 14 熱交換器 21,21A,21B 温度変更用熱媒体タンク 22 温度変更用ポンプ 23 温度変更用熱交換器 DESCRIPTION OF SYMBOLS 1 1st circulation system 2, 2A, 2B 2nd circulation system 5 Communication line 6A, 6B, 8 Three-way valve 7 Overflow pipe 11 Temperature control heat medium tank 12 Temperature control pump 13 Temperature control heat exchanger 14 Heat exchanger 21, 21A, 21B Heat medium tank for changing temperature 22 Pump for changing temperature 23 Heat exchanger for changing temperature

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 3L060 AA04 CC05 DD08 EE45 5H323 BB02 BB04 CA04 CB12 CB23 CB35 CB42 CB43 CB44 DA01 EE03 FF04 HH02 KK05  ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3L060 AA04 CC05 DD08 EE45 5H323 BB02 BB04 CA04 CB12 CB23 CB35 CB42 CB43 CB44 DA01 EE03 FF04 HH02 KK05

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】熱交換器に恒温の温調用熱媒体を循環して
流す第1の循環系と、変更すべき設定温度に温度調節さ
れた設定温度変更用熱媒体を循環して流す第2の循環系
とを備え、 上記熱交換器における温調流体温度の設定変更に際し、
第1の循環系に、その熱交換器を流れる温調用熱媒体に
代えて第2の循環系における温度変更用熱媒体を導入す
る、ことを特徴とする熱交換器における温調流体温度の
高速設定変更方法。
1. A first circulation system for circulating and flowing a constant-temperature heat medium for temperature control to a heat exchanger, and a second circulation system for circulating and flowing a heat medium for setting temperature change adjusted to a set temperature to be changed. When the setting of the temperature control fluid temperature in the heat exchanger is changed,
A high-speed temperature control fluid temperature in the heat exchanger, wherein a temperature change heat medium in the second circulation system is introduced into the first circulation system in place of the temperature control heat medium flowing through the heat exchanger. How to change settings.
【請求項2】第2の循環系を循環する温度変更用熱媒体
の量を、第1の循環系を循環する温調用熱媒体の量より
も十分に多くし、 熱交換器における温調流体の設定温度の変更に際して、
第2の循環系からの温度変更用熱媒体の導入により生じ
た第1の循環系の余剰の熱媒体を、第2の循環系の温度
変更用熱媒体タンクに流入させる、ことを特徴とする請
求項1に記載の熱交換器における温調流体温度の高速設
定変更方法。
2. The temperature control fluid in the heat exchanger, wherein the amount of the temperature changing heat medium circulating in the second circulation system is sufficiently larger than the amount of the temperature control heat medium circulating in the first circulation system. When changing the set temperature of
A surplus heat medium of the first circulation system generated by introduction of the temperature change heat medium from the second circulation system is caused to flow into the temperature change heat medium tank of the second circulation system. A high-speed setting change method of a temperature control fluid temperature in the heat exchanger according to claim 1.
【請求項3】熱交換器に、温度調節のための恒温の温調
用熱媒体を循環して流す第1の循環系と、変更しようと
する設定温度に温度調節した恒温の温度変更用熱媒体を
循環して流す第2の循環系とを備え、 上記熱交換器における温調流体温度の高速設定変更装置
として、第2の循環系における温度変更用熱媒体を圧送
するポンプの吐出側の管路に、該管路を通して圧送され
る上記温度変更用熱媒体を第1の循環系における熱交換
器側に切換えて送給する切換え手段を設けた、ことを特
徴とする熱交換器における温調流体温度の高速設定変更
装置を備えたサーキュレータ。
3. A first circulating system for circulating a constant-temperature heat-regulating heat medium for temperature control through a heat exchanger, and a constant-temperature temperature-changing heat medium temperature-controlled to a set temperature to be changed. And a second circulating system for circulating the fluid. As a high-speed device for changing the temperature of the temperature-regulated fluid in the heat exchanger, a pipe on the discharge side of a pump for pumping a heat medium for temperature change in the second circulating system Switching means for switching the temperature-change heat medium, which is pressure-fed through the pipe, to the heat exchanger side in the first circulation system and feeding the heat-change medium, the temperature control in the heat exchanger. A circulator equipped with a fluid temperature high-speed setting change device.
【請求項4】複数の第2の循環系を備え、それらの循環
系における温度変更用熱媒体を第1の循環系に切換えて
送給する切換え手段を、第1の循環系の熱交換器側に選
択的に切り換え可能にした、ことを特徴とする請求項3
に記載の熱交換器における温調流体温度の高速設定変更
装置を備えたサーキュレータ。
4. A heat exchanger of a first circulating system comprising a plurality of second circulating systems, and a switching means for switching a temperature-changing heat medium in the circulating systems to the first circulating system for feeding. 4. The apparatus according to claim 3, wherein the switchable side is selectively switchable.
A circulator provided with a high-speed setting and changing device for a temperature-regulated fluid temperature in the heat exchanger according to the above item.
【請求項5】切換え手段として、温度変更用熱媒体を、
第1の循環系における熱交換器側と第2の循環系におけ
る温度変更用熱媒体タンク側とに切換えて送給する三方
弁を備えた、ことを特徴とする請求項3または請求項4
に記載の熱交換器における温調流体温度の高速設定変更
装置を備えたサーキュレータ。
5. A switching means comprising a heat medium for temperature change,
5. A three-way valve for switching and feeding between a heat exchanger side in the first circulation system and a temperature change heat medium tank side in the second circulation system.
A circulator provided with a high-speed setting and changing device for a temperature-regulated fluid temperature in the heat exchanger according to the above item.
【請求項6】第1の循環系を、温調用熱媒体タンクから
導出した管路に、温調用熱媒体を圧送する温調用ポン
プ、及びその温調用熱媒体を所要の温度に調節する温調
手段を設けると共に、それらの下流側に熱交換器を配
し、該熱交換器を経た温調用熱媒体を、上記温調用熱媒
体タンクに還流させる管路を設けることにより構成し、 上記温調用熱媒体タンクに、余剰の熱媒体を第2の循環
系における温度変更用熱媒体タンクに流すオーバーフロ
ー管を設けた、ことを特徴とする請求項3ないし請求項
5のいずれかに記載の熱交換器における温調流体温度の
高速設定変更装置を備えたサーキュレータ。
6. A temperature control pump for pumping a temperature control heat medium to a pipe line extending from a temperature control heat medium tank through a first circulation system, and a temperature control for adjusting the temperature control heat medium to a required temperature. Means are provided, and a heat exchanger is disposed downstream of the heat exchanger, and a pipe for returning the heat medium for temperature control passed through the heat exchanger to the heat medium tank for temperature control is provided, and The heat exchange according to any one of claims 3 to 5, wherein the heat medium tank is provided with an overflow pipe for flowing an excess heat medium to the temperature change heat medium tank in the second circulation system. A circulator provided with a high-speed setting change device for temperature control fluid temperature in a vessel.
JP2000036600A 2000-02-15 2000-02-15 Method for high speed change of setting of temperature controlled fluid temperature in heat exchanger and circulator provided with method and device therefor Pending JP2001228924A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000036600A JP2001228924A (en) 2000-02-15 2000-02-15 Method for high speed change of setting of temperature controlled fluid temperature in heat exchanger and circulator provided with method and device therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000036600A JP2001228924A (en) 2000-02-15 2000-02-15 Method for high speed change of setting of temperature controlled fluid temperature in heat exchanger and circulator provided with method and device therefor

Publications (1)

Publication Number Publication Date
JP2001228924A true JP2001228924A (en) 2001-08-24

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Cited By (5)

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Publication number Priority date Publication date Assignee Title
JP2006189214A (en) * 2005-01-07 2006-07-20 Nittetsu Elex Co Ltd Humidifying gas supply system and humidifying gas supply method of high speed response type
JP2006189215A (en) * 2005-01-07 2006-07-20 Nittetsu Elex Co Ltd Dew point controller and dew point control method for humidifying gas
JP2010078183A (en) * 2008-09-24 2010-04-08 Fujitsu Ltd Exhaust heat utilization system and method of operating the same
JP2012220068A (en) * 2011-04-06 2012-11-12 Smc Corp Cyclically liquid feeding device
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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006189214A (en) * 2005-01-07 2006-07-20 Nittetsu Elex Co Ltd Humidifying gas supply system and humidifying gas supply method of high speed response type
JP2006189215A (en) * 2005-01-07 2006-07-20 Nittetsu Elex Co Ltd Dew point controller and dew point control method for humidifying gas
JP4541903B2 (en) * 2005-01-07 2010-09-08 株式会社日鉄エレックス High-speed response type humidified gas supply system and humidified gas supply method
JP4541904B2 (en) * 2005-01-07 2010-09-08 株式会社日鉄エレックス Humidifying gas dew point control device and dew point control method
JP2010078183A (en) * 2008-09-24 2010-04-08 Fujitsu Ltd Exhaust heat utilization system and method of operating the same
JP2012220068A (en) * 2011-04-06 2012-11-12 Smc Corp Cyclically liquid feeding device
KR101739369B1 (en) 2016-03-31 2017-05-24 주식회사 에프에스티 Temperature Control System for Chiller of Semiconductor Device

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