JP2001221160A5 - - Google Patents
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- Publication number
- JP2001221160A5 JP2001221160A5 JP2000033835A JP2000033835A JP2001221160A5 JP 2001221160 A5 JP2001221160 A5 JP 2001221160A5 JP 2000033835 A JP2000033835 A JP 2000033835A JP 2000033835 A JP2000033835 A JP 2000033835A JP 2001221160 A5 JP2001221160 A5 JP 2001221160A5
- Authority
- JP
- Japan
- Prior art keywords
- getter
- main body
- container
- vacuum exhaust
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000010438 heat treatment Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Description
【請求項２】
上記真空処理室内で、上記ゲッタ膜の形成、および二次排気を複数回繰り返すことを特徴とする請求項１に記載の真空排気方法。
2.
The vacuum exhaust method according to claim 1, wherein the getter film is formed and the secondary exhaust is repeated a plurality of times in the vacuum processing chamber.
【請求項３】
上記二次排気が終了した後、上記開閉容器に電圧を印加して電界を発生させ、上記真空排気槽内のイオンを吸着することを特徴とする請求項２に記載の真空排気方法。
3.
The vacuum exhaust method according to claim 2, wherein after the secondary exhaust is completed, a voltage is applied to the open / close container to generate an electric field to adsorb ions in the vacuum exhaust tank.
図３に示すように、開閉式容器３４は、ほぼ矩形状の本体３６と、一対のヒンジ３７により本体に対して開閉自在に取り付けられた矩形状の蓋体３８と、を有している。本体３６の内面には、ゲッタ４０を保持したゲッタホルダ４２、ゲッタホルダを介してゲッタ４０を加熱する一対の加熱電極４４が取り付けられている。ゲッタ４０は、開閉式容器３４の内面に所要膜厚のゲッタ膜を所要回数形成させるのに必要な量が充填されている。なお、ゲッタ材としては、例えば、バリウム、チタン、マグネシウム等が用いられている。 As shown in FIG. 3, the opening / closing container 34 has a substantially rectangular main body 36 and a rectangular lid 38 that is openably and closably attached to the main body by a pair of hinges 37. A getter holder 42 holding the getter 40 and a pair of heating electrodes 44 for heating the getter 40 via the getter holder are attached to the inner surface of the main body 36. Getter 40, the amount required to a required number of times form a getter film of the required thickness on the inner surface of the openable container 3 4 is filled. As the getter material, for example, barium, titanium, magnesium and the like are used.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000033835A JP2001221160A (en) | 2000-02-10 | 2000-02-10 | Evacuating method and evacuating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000033835A JP2001221160A (en) | 2000-02-10 | 2000-02-10 | Evacuating method and evacuating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001221160A JP2001221160A (en) | 2001-08-17 |
| JP2001221160A5 true JP2001221160A5 (en) | 2007-03-22 |
Family
ID=18558260
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000033835A Abandoned JP2001221160A (en) | 2000-02-10 | 2000-02-10 | Evacuating method and evacuating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001221160A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5023716B2 (en) * | 2007-01-25 | 2012-09-12 | カシオ計算機株式会社 | Evaporable getter material, getter pump, decompression structure, reactor, power generator and electronic equipment |
-
2000
- 2000-02-10 JP JP2000033835A patent/JP2001221160A/en not_active Abandoned
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