JP2001219177A - Method and apparatus for treating fluorine-containing water - Google Patents
Method and apparatus for treating fluorine-containing waterInfo
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- JP2001219177A JP2001219177A JP2000033675A JP2000033675A JP2001219177A JP 2001219177 A JP2001219177 A JP 2001219177A JP 2000033675 A JP2000033675 A JP 2000033675A JP 2000033675 A JP2000033675 A JP 2000033675A JP 2001219177 A JP2001219177 A JP 2001219177A
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- fluorine
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Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明はフッ素含有水にカル
シウム(Ca)塩として水酸化カルシウム(Ca(O
H)2)と塩化カルシウム(CaCl2)を添加してフ
ッ素をフッ化カルシウム(CaF2)として固液分離す
る方法及び装置に係り、特に、Ca(OH) 2とCaC
l2の併用処理で高水質な処理水を安定に得ると共に発
生汚泥容量を低減するフッ素含有水の処理方法及び装置
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention
Calcium hydroxide (Ca (O)
H)2) And calcium chloride (CaCl2) And add
Calcium fluoride (CaF)2)
In particular, the invention relates to Ca (OH) 2And CaC
l2High-quality treated water can be obtained and
Method and apparatus for treating fluorine-containing water to reduce raw sludge capacity
About.
【0002】[0002]
【従来の技術】半導体部品製造におけるシリコンウェハ
製造工程から排出されるフッ素含有廃水、ステンレス鋼
板製造工程から排出される酸洗廃水、フッ酸製造廃水、
肥料製造廃水、ゴミ焼却廃水等のフッ素含有水の処理方
法としては、フッ素含有水にCa塩を添加してCaF2
を生成させ、これを沈殿分離する方法が、薬剤コストが
安価であることから広く普及している。この方法におい
て、これらのフッ素含有廃水は一般に酸性であることか
ら、Ca塩としてはアルカリ性のCa(OH)2を用
い、Ca(OH)2で中和することによりCaF2を生
成させている。2. Description of the Related Art Fluorine-containing wastewater discharged from a silicon wafer manufacturing process in semiconductor component manufacturing, pickling wastewater discharged from a stainless steel plate manufacturing process, hydrofluoric acid manufacturing wastewater,
As a method for treating fluorine-containing water such as fertilizer production wastewater and garbage incineration wastewater, CaF 2 is added to a fluorine-containing water by adding a Ca salt.
Is widely used because of the low drug cost. In this method, since these fluorine-containing wastewaters are generally acidic, alkaline Ca (OH) 2 is used as a Ca salt, and CaF 2 is generated by neutralization with Ca (OH) 2 .
【0003】このような処理方法において、廃水中のフ
ッ素を十分に反応させてCaF2を生成させるために必
要なCa塩量は、廃水中のフッ素イオンの当量以上とさ
れるが、実際には、廃水中には、フッ素イオン以外に
も、Caとの反応で難溶性の沈殿を生成する陰イオン、
例えばSO4 2−イオンやPO4 3−イオンが含まれて
おり、従って、これらの陰イオンとの反応で消費される
Ca塩量も加算する必要がある。In such a processing method, Ca Shioryou necessary for the fluorine in the waste water by sufficiently react to produce CaF 2 is are more equivalents of fluorine ions in the waste water, in fact, , In wastewater, other than fluorine ions, anions that form a sparingly soluble precipitate by reaction with Ca,
For example, SO 4 2− ions and PO 4 3− ions are contained. Therefore, it is necessary to add the amount of Ca salt consumed in the reaction with these anions.
【0004】しかし、フッ素イオンがNH4Fとして廃
水中に含まれている場合、或いはSO4 2−イオンがN
a2SO4として廃水中に含まれている場合には、必要
なCa塩量を全てCa(OH)2で供給するとpHが高
くなり過ぎ、処理水を酸で中和する必要が生じる。この
ため、このような場合には、Ca塩としてCa(OH)
2と中性のCaCl2とを併用し、中性の処理水を得る
ようにすることが行われている。However, if the fluorine ions contained in the waste water as NH 4 F, or SO 4 2-ions N
When a 2 SO 4 is contained in the wastewater, if the necessary amount of Ca salt is entirely supplied by Ca (OH) 2 , the pH becomes too high, and it becomes necessary to neutralize the treated water with an acid. Therefore, in such a case, Ca (OH) is used as a Ca salt.
2 and neutral CaCl 2 are used in combination to obtain neutral treated water.
【0005】[0005]
【発明が解決しようとする課題】このようなフッ素含有
水の処理において、多くの場合、処理水のフッ素イオン
濃度が安定せず、10〜30mg/Lの間で変動する。
この処理水水質の不安定性は原水水質、即ち、被処理廃
水中の共存物による影響とも考えられているが、特にC
a塩としてCa(OH)2とCaCl2とを併用した場
合には、安定して良質の処理水が得られていないのが現
状である。In such treatment of fluorine-containing water, in many cases, the concentration of fluorine ions in the treated water is not stable and varies between 10 and 30 mg / L.
This instability of the treated water quality is considered to be affected by the raw water quality, that is, the coexistence in the wastewater to be treated.
In the case where Ca (OH) 2 and CaCl 2 are used in combination as the salt a, the present situation is that stable high-quality treated water has not been obtained.
【0006】本発明は上記従来の問題点を解決し、フッ
素含有水にCa塩としてCa(OH)2とCaCl2と
を併用添加してCaF2を生成させ、これを固液分離す
るに当たり、フッ素イオン濃度の低い高水質な処理水を
安定に得ると共に、発生汚泥容量を低減することができ
るフッ素含有水の処理方法及び処理装置を提供すること
を目的とする。The present invention solves the above-mentioned conventional problems, and adds Ca (OH) 2 and CaCl 2 as a Ca salt to fluorine-containing water to produce CaF 2 , which is subjected to solid-liquid separation. It is an object of the present invention to provide a method and an apparatus for treating fluorine-containing water capable of stably obtaining high-quality treated water having a low fluorine ion concentration and reducing the amount of generated sludge.
【0007】[0007]
【課題を解決するための手段】本発明のフッ素含有水の
処理方法は、フッ素含有水に水酸化カルシウムと塩化カ
ルシウムとを添加してフッ素をフッ化カルシウムとして
固液分離する方法において、該フッ素含有水に水酸化カ
ルシウムを添加して反応させた後、塩化カルシウムを添
加することを特徴とする。According to the present invention, there is provided a method for treating fluorine-containing water, comprising adding calcium hydroxide and calcium chloride to fluorine-containing water to separate fluorine into calcium fluoride by solid-liquid separation. The method is characterized in that calcium hydroxide is added to the contained water and reacted after adding calcium hydroxide.
【0008】本発明のフッ素含有水の処理装置は、フッ
素含有水に水酸化カルシウムを添加して反応させる第1
の反応手段と、該第1の反応手段の処理水に塩化カルシ
ウムを添加して反応させる第2の反応手段と、該第2の
反応手段の処理水を固液分離する固液分離手段とを備え
てなることを特徴とする。The apparatus for treating fluorine-containing water according to the present invention is characterized in that calcium hydroxide is added to fluorine-containing water for reaction.
A second reaction means for adding calcium chloride to the treated water of the first reaction means to cause a reaction, and a solid-liquid separation means for solid-liquid separation of the treated water of the second reaction means. It is characterized by comprising.
【0009】本発明者らは、Ca(OH)2とCaCl
2とを併用したときの処理水水質の不安定性の原因につ
いて鋭意検討した結果、Ca(OH)2とCaCl2と
では、反応初期の生成CaF2の構造に差異があり、こ
の生成CaF2の構造上の差異が処理水水質、更には発
生汚泥量に影響を及ぼしていることを知見した。The present inventors have proposed Ca (OH) 2 and CaCl
2 and a result of intensive studies on the cause of the instability of the treated water quality when used together, Ca in the (OH) 2 and the CaCl 2, there is a difference in structure of the product CaF 2 in the initial reaction, the product CaF 2 It was found that the difference in structure affected the quality of treated water and the amount of generated sludge.
【0010】即ち、廃水にCa(OH)2を先に添加し
た場合には、Ca(OH)2とF−との反応で次のよう
な2種類のコロイド状化合物(1),(2)が生成す
る。また、この化合物(1),(2)の発生と同時に、
廃水中に共存するSO4 2−と化合物(1)とが反応し
て下記化合物(3)が生成する。[0010] That is, the addition of Ca (OH) 2 prior to the waste water, Ca (OH) 2 and F - and two colloidal compounds such as the following in the reaction of (1), (2) Is generated. Simultaneously with the generation of the compounds (1) and (2),
The compound (1) reacts with SO 4 2- coexisting in the wastewater to produce the following compound (3).
【0011】[0011]
【化1】 Embedded image
【0012】[0012]
【化2】 Embedded image
【0013】化合物(1)は末端にOH基を有し、化合
物(2)はFで飽和されている。これらはいずれもコロ
イド状であり、このままでは凝集沈殿し難い。The compound (1) has an OH group at the terminal, and the compound (2) is saturated with F. These are all colloidal, and are hard to aggregate and precipitate as they are.
【0014】一方、同時に生成する高重合物の化合物
(3)は、コロイド状の化合物(1),(2)を連鎖的
に吸着ないし荷電中和で取り込み、沈殿を生成する。On the other hand, the compound (3) which is a high polymer produced at the same time incorporates the colloidal compounds (1) and (2) by chain adsorption or charge neutralization to form a precipitate.
【0015】このように、凝集沈殿の核となる上記高重
合化合物(3)を生成させることが処理水フッ素濃度の
低減、発生汚泥量の低減に重要であるが、Ca(OH)
2を先に添加した場合には、この化合物(3)が円滑に
生成する。As described above, it is important to generate the above-mentioned highly polymerized compound (3) which is the core of coagulation and precipitation in order to reduce the fluorine concentration in the treated water and the amount of generated sludge.
When compound 2 is added first, compound (3) is produced smoothly.
【0016】これに対して、CaCl2を先に添加した
場合には、上記化合物(2)のみが生成し、化合物
(3)は初期段階では存在しない。このため、処理水フ
ッ素濃度の低減、発生汚泥量の低減を図ることはできな
い。On the other hand, when CaCl 2 is added first, only the compound (2) is formed, and the compound (3) does not exist in the initial stage. Therefore, it is impossible to reduce the fluorine concentration of the treated water and the amount of generated sludge.
【0017】また、Ca(OH)2とCaCl2とを同
時に添加した場合には、溶解性の高いCaCl2がCa
(OH)2よりも先に溶解して化合物(2)を優先して
生成させ、化合物(1)は遅れて生成するため、化合物
(3)も遅れて生成することとなり、やはり処理水フッ
素濃度の低減、発生汚泥量の低減を図ることはできな
い。When Ca (OH) 2 and CaCl 2 are added simultaneously, CaCl 2 having high solubility becomes CaCl 2.
The compound (2) is dissolved prior to (OH) 2 to produce the compound (2) preferentially, and the compound (1) is produced with a delay, so that the compound (3) is also produced with a delay. It is not possible to reduce the amount of generated sludge.
【0018】このようなことから、Ca(OH)2とC
aCl2との併用処理において、本発明に従ってCa
(OH)2を先に添加して反応させた後、CaCl2を
添加することにより、安定してフッ素濃度の低い良質な
処理水を得ると共に、発生汚泥量の減容化を図ることが
できる。From the above, Ca (OH) 2 and C
In the combined treatment with aCl 2 , Ca according to the present invention
By adding (OH) 2 first and reacting, and then adding CaCl 2 , it is possible to stably obtain high-quality treated water having a low fluorine concentration and reduce the volume of generated sludge. .
【0019】なお、本発明においては、CaCl2添加
の工程で酸及び/又はアルカリでpH中性にpH調整を
行うのが好ましい。In the present invention, it is preferable to adjust the pH to neutral with an acid and / or alkali in the step of adding CaCl 2 .
【0020】[0020]
【発明の実施の形態】以下に図面を参照して本発明のフ
ッ素含有水の処理方法及び処理装置の実施の形態を詳細
に説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the method and apparatus for treating fluorine-containing water of the present invention will be described below in detail with reference to the drawings.
【0021】図1は、本発明のフッ素含有水の処理方法
及び処理装置の実施の形態を示す系統図である。FIG. 1 is a system diagram showing an embodiment of the method and apparatus for treating fluorine-containing water of the present invention.
【0022】原水である半導体部品製造におけるシリコ
ンウェハ製造工程から排出されるフッ素含有廃水、ステ
ンレス鋼板製造工程から排出される酸洗廃水、フッ酸製
造廃水、肥料製造廃水、ゴミ焼却廃水等のフッ素含有水
を、まず、Ca(OH)2反応槽1に導入してCa(O
H)2を添加して反応させる。このCa(OH)2添加
量は、原水中のフッ酸(HF)及び硫酸(H2SO4)
やリン酸(H3PO4)に対応する添加量、即ち、原水
中のHFと等当量或いは、それよりも若干過剰量で良
い。実際の処理では中性になるまでCa(OH)2を添
加すればよい。Fluorine-containing wastewater discharged from a silicon wafer manufacturing process in the production of semiconductor parts, which is raw water, pickling wastewater discharged from a stainless steel plate manufacturing process, hydrofluoric acid manufacturing wastewater, fertilizer manufacturing wastewater, waste incineration wastewater, etc. Water is first introduced into the Ca (OH) 2 reaction tank 1 so that Ca (O)
H) Add 2 and react. The amount of Ca (OH) 2 added depends on the amount of hydrofluoric acid (HF) and sulfuric acid (H 2 SO 4 ) in the raw water.
Or an amount corresponding to phosphoric acid (H 3 PO 4 ), that is, an equivalent amount to HF in raw water or a slightly excessive amount. In the actual treatment, Ca (OH) 2 may be added until neutrality.
【0023】このCa(OH)2との反応時間は、前述
の重合性化合物(3)が生成するに十分な時間であれば
良く、一般的には、5〜30分で十分である。The reaction time with Ca (OH) 2 may be a time sufficient to produce the above-mentioned polymerizable compound (3), and generally 5 to 30 minutes is sufficient.
【0024】Ca(OH)2反応槽1の反応液は、次い
でCaCl2反応・pH調整槽2に導入し、CaCl2
を添加すると共に、酸及び/又はアルカリを添加してp
H中性(pH5〜8、望ましくは6〜7)にpH調整す
る。このCaCl2添加量は、原水中のHF以外のフッ
素イオン、例えばNH4Fや、フッ素イオン以外の、C
a塩と難溶性の沈殿を生成するSO4 2−やPO4 3−
イオンから難溶性Ca塩を析出させるに十分な量で良
い。また、このCaCl2反応・pH調整槽2の反応時
間は、CaCl2とこれらのイオンが反応し、更に重合
性化合物(3)に取り込まれて凝集性に優れた沈殿が生
成するに十分な時間とされ、一般的には5〜30分程度
とされる。[0024] Ca (OH) 2 the reaction solution in the reaction vessel 1 is then introduced into CaCl 2 reaction · pH adjustment tank 2, CaCl 2
And an acid and / or alkali to add p
The pH is adjusted to H neutral (pH 5 to 8, preferably 6 to 7). The amount of CaCl 2 added depends on the amount of fluorine ions other than HF in the raw water, such as NH 4 F and C
SO 4 2- and PO 4 3- which form a salt and a sparingly soluble precipitate
An amount sufficient to precipitate a sparingly soluble Ca salt from ions may be sufficient. The reaction time of the CaCl 2 reaction / pH adjustment tank 2 is a time sufficient for CaCl 2 to react with these ions and to be further incorporated into the polymerizable compound (3) to form a precipitate having excellent cohesiveness. And generally for about 5 to 30 minutes.
【0025】なお、pH調整に用いる酸、アルカリとし
ては特に制限はなく、HCl等の酸、NaOH,KOH
等のアルカリを用いることができるが、酸としてH2S
O4を添加した場合は、このH2SO4との反応で消費
されるCaCl2量も考慮する必要がある。The acid and alkali used for pH adjustment are not particularly limited, and acids such as HCl, NaOH, KOH
Or the like, but H 2 S may be used as the acid.
When O 4 is added, it is necessary to consider the amount of CaCl 2 consumed in the reaction with H 2 SO 4 .
【0026】このCaCl2反応・pH調整槽2の反応
液は次いで凝集槽3に導入され、有機高分子凝集剤(ポ
リマー)が添加されて凝集処理された後、沈殿槽4で固
液分離される。なお、固液分離手段としては、沈殿分離
の他、膜分離、遠心分離なども使用できる。The reaction solution in the CaCl 2 reaction / pH adjustment tank 2 is then introduced into a coagulation tank 3, where an organic polymer coagulant (polymer) is added and coagulation treatment is performed. You. As the solid-liquid separation means, besides precipitation separation, membrane separation, centrifugation and the like can also be used.
【0027】[0027]
【実施例】以下に実施例及び比較例を挙げて本発明をよ
り具体的に説明する。The present invention will be described more specifically below with reference to examples and comparative examples.
【0028】実施例1 HF:4000mg/L、NH4−F:1000mg/
L(asHF)、NaNO3:3150mg/L、Na
2SO4:1000mg/L(asH2SO4)を含む
合成廃水を原水として、まず、HFをCaF2にするた
めにCa(OH)2を7400mg/L添加して5分間
反応させた後、NH4FとNa2SO4をCa塩とする
ためにCaCl21500mg/L(asCa,NH4
F及びNa2SO4の反応に必要なCaCl2量よりも
約100mg/L過剰)を添加すると共に、pH微調整
用のNaOHを添加してpH6.5に調整して20分間
反応させた。反応後、反応液をNo.5A濾紙で濾過
し、濾液(処理水)のフッ素濃度を測定して結果を表1
に示した。Example 1 HF: 4000 mg / L, NH 4 -F: 1000 mg / L
L (asHF), NaNO 3 : 3150 mg / L, Na
2 SO 4 : Using synthetic wastewater containing 1000 mg / L (asH 2 SO 4 ) as raw water, first, 7400 mg / L of Ca (OH) 2 was added to convert HF to CaF 2 and reacted for 5 minutes. In order to convert NH 4 F and Na 2 SO 4 into Ca salts, 1500 mg / L of CaCl 2 (asCa, NH 4
F and Na 2 SO 4 , a CaCl 2 amount required for the reaction of about 100 mg / L was added), and NaOH for fine pH adjustment was added to adjust the pH to 6.5, followed by a reaction for 20 minutes. After the reaction, the reaction mixture was The solution was filtered with a 5A filter paper, and the fluorine concentration of the filtrate (treated water) was measured.
It was shown to.
【0029】また、別に反応液を24時間静置した後の
汚泥容積を測定し、結果を表1に併記した。Separately, the reaction solution was allowed to stand for 24 hours, and the sludge volume was measured. The results are shown in Table 1.
【0030】比較例1 実施例1において、原水組成、薬注量は同様とし、Ca
(OH)2とCaCl 2との添加順序を変え、CaCl
2を添加して5分間反応させた後、Ca(OH)2を添
加すると共にpH微調整用NaOHでpH6.5に調整
して20分間反応させたこと以外は同様に処理を行い、
処理水のフッ素濃度と汚泥容積を調べ、結果を表1に記
載した。COMPARATIVE EXAMPLE 1 In Example 1, the raw water composition and the chemical injection amount were the same, and Ca
(OH)2And CaCl 2And the order of addition
2And reacted for 5 minutes, then Ca (OH)2With
And adjusted to pH 6.5 with NaOH for fine pH adjustment
And treated for 20 minutes in the same manner,
The fluorine concentration and sludge volume of the treated water were examined, and the results are shown in Table 1.
Posted.
【0031】比較例2 実施例1において、原水組成、薬注量は同様とし、Ca
(OH)2とCaCl 2との同時添加とし、Ca(O
H)2及びCaCl2を添加して5分間反応させた後、
NaOHでpH6.5に調整して20分間反応させたこ
と以外は同様に処理を行い、処理水のフッ素濃度と汚泥
容積を調べ、結果を表1に記載した。Comparative Example 2 In Example 1, the raw water composition and the chemical injection amount were the same, and Ca
(OH)2And CaCl 2And Ca (O)
H)2And CaCl2After adding and reacting for 5 minutes,
The pH was adjusted to 6.5 with NaOH and reacted for 20 minutes.
Except for the above, the same treatment is performed.
The volume was determined and the results are shown in Table 1.
【0032】[0032]
【表1】 [Table 1]
【0033】表1より、本発明によれば、処理水フッ素
濃度を低くすると共に、発生汚泥容量を低減することが
できることがわかる。From Table 1, it can be seen that according to the present invention, it is possible to reduce the fluorine concentration of the treated water and to reduce the generated sludge capacity.
【0034】[0034]
【発明の効果】以上詳述した通り、本発明のフッ素含有
水の処理方法及び処理装置によれば、フッ素含有水にC
a塩としてCa(OH)2とCaCl2とを併用添加し
てCaF2を生成させ、これを固液分離するに当たり、
フッ素イオン濃度の低い高水質な処理水を安定に得ると
共に、発生汚泥容量を低減することができる。As described in detail above, according to the method and apparatus for treating fluorine-containing water of the present invention, the fluorine-containing water is treated with C.
In addition, Ca (OH) 2 and CaCl 2 are added in combination as a salt to produce CaF 2 , which is subjected to solid-liquid separation.
It is possible to stably obtain high-quality treated water having a low fluorine ion concentration and reduce the generated sludge capacity.
【図1】本発明のフッ素含有水の処理方法及び処理装置
の実施の形態を示す系統図である。FIG. 1 is a system diagram showing an embodiment of a method and an apparatus for treating fluorine-containing water of the present invention.
1 Ca(OH)2反応槽 2 CaCl2反応・pH調整槽 3 凝集槽 4 沈殿槽Reference Signs List 1 Ca (OH) 2 reaction tank 2 CaCl 2 reaction / pH adjustment tank 3 flocculation tank 4 sedimentation tank
Claims (4)
カルシウムとを添加してフッ素をフッ化カルシウムとし
て固液分離する方法において、該フッ素含有水に水酸化
カルシウムを添加して反応させた後、塩化カルシウムを
添加することを特徴とするフッ素含有水の処理方法。1. A method of adding calcium hydroxide and calcium chloride to fluorine-containing water to solid-liquid separate fluorine as calcium fluoride, wherein calcium fluoride is added to the fluorine-containing water and reacted. A method for treating fluorine-containing water, comprising adding calcium chloride.
加すると共に、酸及び/又はアルカリを添加してpH調
整を行うことを特徴とするフッ素含有水の処理方法。2. The method for treating fluorine-containing water according to claim 1, wherein the pH is adjusted by adding an acid and / or an alkali while adding calcium chloride.
して反応させる第1の反応手段と、該第1の反応手段の
処理水に塩化カルシウムを添加して反応させる第2の反
応手段と、該第2の反応手段の処理水を固液分離する固
液分離手段とを備えてなることを特徴とするフッ素含有
水の処理装置。3. A first reaction means for adding and reacting calcium hydroxide to fluorine-containing water, and a second reaction means for adding and reacting calcium chloride to treated water of the first reaction means; An apparatus for treating fluorine-containing water, comprising: solid-liquid separating means for solid-liquid separating the treated water of the second reaction means.
及び/又はアルカリを添加してpH調整するpH調整手
段が設けられていることを特徴とするフッ素含有水の処
理装置。4. The apparatus for treating fluorine-containing water according to claim 3, wherein the second reaction means is provided with a pH adjusting means for adjusting the pH by adding an acid and / or an alkali.
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JP2008073646A (en) * | 2006-09-22 | 2008-04-03 | Kurita Water Ind Ltd | Treatment method of fluorine-containing waste water |
JP2008221064A (en) * | 2007-03-09 | 2008-09-25 | Sanyo Electric Co Ltd | Fluorine-containing water treatment method and apparatus |
JP2009165990A (en) * | 2008-01-18 | 2009-07-30 | Kurita Water Ind Ltd | Method for treating wastewater containing fluorine |
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2000
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JP2005342574A (en) * | 2004-06-01 | 2005-12-15 | Sanyo Electric Co Ltd | Treatment apparatus and method for treating water to be treated using the apparatus |
US7452463B2 (en) | 2004-06-01 | 2008-11-18 | Sanyo Electric Co., Ltd. | Apparatus for treating water |
JP2006263500A (en) * | 2005-03-22 | 2006-10-05 | Sanyo Electric Co Ltd | Wastewater treatment apparatus |
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JP2008073646A (en) * | 2006-09-22 | 2008-04-03 | Kurita Water Ind Ltd | Treatment method of fluorine-containing waste water |
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