JP2001212086A - Tomography and tomograph - Google Patents

Tomography and tomograph

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Publication number
JP2001212086A
JP2001212086A JP2000028511A JP2000028511A JP2001212086A JP 2001212086 A JP2001212086 A JP 2001212086A JP 2000028511 A JP2000028511 A JP 2000028511A JP 2000028511 A JP2000028511 A JP 2000028511A JP 2001212086 A JP2001212086 A JP 2001212086A
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JP
Japan
Prior art keywords
thickness
tomographic image
refractive index
confocal
tomography
Prior art date
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JP2000028511A
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JP3660185B2 (en
Inventor
Masamitsu Haruna
正光 春名
Masahito Omi
雅人 近江
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Japan Science and Technology Agency
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Japan Science and Technology Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a tomography and tomograph that can measure the thickness of affected parts easily and accurately by using short wave infrared light, or an invisible ray as a laser source of a confocal microscope. SOLUTION: To measure refractivity and thickness of transparent objects using interference method of low coherence light and confocal method is fundamental. The new tomography is made not only by confocal method but by OCT method. The tomograms are made after calculating the actual thickness by using formulas of a relation among a distance of interfaces, refractivity, and thickness obtained by two tomography. The distance of interfaces by OCT method is obtained by multiplying refractivity by thickness, and the one by confocal method is obtained by thickness divided by refractivity. As a result, the actual thickness is found.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】本発明は、低コヒーレンス光
干渉と共焦点光学系を用いる測定物体の断層像形成方法
とそのための装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming a tomographic image of a measurement object using low coherence optical interference and a confocal optical system, and an apparatus therefor.

【０００２】[0002]

【従来の技術】生体診断において病巣の厚さを正しく診
断することは重要なことである。生体組織の断層像を光
学的に得る有力な方法は、オプティカル・コヒーレンス
・トモグラフィ（ＯＣＴ）と呼ばれ、網膜下組織の診断
に使用されている。ＭＩＴのＤ．Ｈｕａｎｇ ｅｔ ａ
ｌ，Ｓｃｉｅｎｃｅ Ｖｏｌ．２５４，ｐ．１１７８
（１９９１）が最初の論文で、上記論文は以降の論文・
特許に多く引用されている。最近ではＧ．Ｊ．Ｔｅａｒ
ｎｅｙ ｅｔ ａｌ，Ｓｃｉｅｎｃｅ Ｖｏｌ．２７
６，ｐ．２０３７（１９９７）がある。2. Description of the Related Art It is important to correctly diagnose the thickness of a lesion in a biological diagnosis. A powerful method for optically obtaining a tomographic image of a living tissue is called optical coherence tomography (OCT) and is used for diagnosis of subretinal tissue. D. of MIT Huang et a
1, Science Vol. 254, p. 1178
(1991) is the first paper, and the above paper is
It is often cited in patents. Recently, G. J. Tear
ney et al, Science Vol. 27
6, p. 2037 (1997).

【０００３】ＯＣＴは干渉長の短い低コヒーレンス光を
光源とし、干渉を利用して断層像を得るものである。こ
の方法の問題点は、厚さが厚さ×屈折率として表現さ
れ、真の厚さが得られない。[0003] In OCT, a low-coherence light having a short interference length is used as a light source, and a tomographic image is obtained using interference. The problem with this method is that the thickness is expressed as thickness × refractive index, and a true thickness cannot be obtained.

【０００４】共焦点方式でトモグラフィを得る方法は今
まで発表されていない。[0004] A method for obtaining tomography by the confocal method has not been published yet.

【０００５】本願発明者は、測定物体の屈折率と厚さの
同時測定の研究開発を行ってきた。その内容は、（１）
特開平９−２１８０１６号公報、（２）Ｍ．Ｏｈｍｉ
ｅｔａｌ，Ｏｐｔ．Ｒｅｖ．ｖｏｌ．４，ｐ．５０７
（１９９７）、（３）Ｍ．Ｈａｒｕｎａ ｅｔ ａｌ，
Ｏｐｔ．Ｌｅｔｔ．ｖｏｌ．２３，ｐ．９６６（１９９
８）等に述べられている。The present inventor has been conducting research and development on simultaneous measurement of the refractive index and the thickness of a measurement object. The contents are (1)
JP-A-9-218016, (2) M.P. Ohmi
et al, Opt. Rev .. vol. 4, p. 507
(1997), (3) M.P. Haruna et al,
Opt. Lett. vol. 23, p. 966 (199
8) etc.

【０００６】上記したように、低コヒーレンス光を用
い、共焦点測定と低コヒーレンス光干渉測定とを用い、
測定物体の屈折率と厚さを同時に測定している。As described above, using low coherence light, using confocal measurement and low coherence light interference measurement,
The refractive index and thickness of the measurement object are measured simultaneously.

【０００７】網膜組織のみならず、胃潰瘍、動脈硬化等
において、患部の厚さを簡便かつ正確に測定する方法が
要望されている。[0007] There is a need for a method for simply and accurately measuring the thickness of an affected area not only in retinal tissue but also in gastric ulcer, arteriosclerosis and the like.

【０００８】[0008]

【発明が解決しようとする課題】上記したように、これ
までは、低コヒーレンス光干渉を用いた光コヒーレンス
トモグラフィ（ＯＣＴ）を既存の眼底カメラに組み込ん
だ形の装置が考案・実用化されている。As described above, an apparatus in which optical coherence tomography (OCT) using low coherence optical interference is incorporated in an existing fundus camera has been devised and put into practical use. I have.

【０００９】しかしながら、この場合には、光学的厚さ
（屈折率×厚さ）で網膜の断層像が表示されるので、黄
斑部を中心とする網膜の歪みや剥離を正確に測定するこ
とができない。However, in this case, since a tomographic image of the retina is displayed by an optical thickness (refractive index × thickness), it is possible to accurately measure distortion and detachment of the retina centering on the macula. Can not.

【００１０】本発明は、上記問題点を除去し、共焦点光
学系と低コヒーレンス光干渉計を組み合わせ、光源に近
赤外光を用いて、患部の厚さを簡便かつ正確に測定する
ことができる断層像形成方法及びそのための装置を提供
することを目的とする。The present invention eliminates the above-mentioned problems, combines a confocal optical system and a low-coherence optical interferometer, and can easily and accurately measure the thickness of an affected area using near-infrared light as a light source. It is an object of the present invention to provide a tomographic image forming method and a device therefor.

【００１１】[0011]

【課題を解決するための手段】本発明は、上記目的を達
成するために、 〔１〕測定対象物の屈折率と厚さの同時測定が可能な断
層像形成方法において、被測定物体を断層像を入手した
いｚ方向に走査し、共焦点光学系を用いてｚ方向の断層
像を撮り、低コヒーレンス光干渉を用いてｚ方向の断層
像を撮り、前記二つの断層像に基づいて、演算処理を施
して、幾何学的サイズ（ｔ）で屈折率分布〔ｎ（ｘ，
ｚ）〕を表示することを特徴とする。According to the present invention, there is provided a tomographic image forming method capable of simultaneously measuring a refractive index and a thickness of an object to be measured. Scan in the z-direction to obtain an image, take a tomographic image in the z-direction using a confocal optical system, take a tomographic image in the z-direction using low coherence optical interference, and calculate based on the two tomographic images. After processing, the refractive index distribution [n (x,
z)] is displayed.

【００１２】〔２〕測定対象物の屈折率と厚さの同時測
定が可能な断層像形成装置において、被測定物体を断層
像を入手したいｚ方向に走査し、共焦点光学系を用いて
ｚ方向の断層像を得る手段と、低コヒーレンス光干渉を
用いた光コヒーレンストモグラフィによりｚ方向の断層
像を得る手段と、前記二つの断層像に基づいて、演算処
理を施し、幾何学的サイズ（ｔ）で屈折率分布〔ｎ
（ｘ，ｚ）〕を表示する手段とを具備する。[2] In a tomographic image forming apparatus capable of simultaneously measuring the refractive index and the thickness of a measurement object, the object to be measured is scanned in the z direction in which a tomographic image is desired to be obtained, and z is scanned using a confocal optical system. Means for obtaining a tomographic image in the direction, means for obtaining a tomographic image in the z direction by optical coherence tomography using low coherence optical interference, and arithmetic processing based on the two tomographic images to obtain a geometric size ( t), the refractive index distribution [n
(X, z)].

【００１３】〔３〕測定対象物の屈折率と厚さの同時測
定が可能な断層像形成装置において、基板の上に厚さ、
屈折率が異なるスライドガラス、ニオブ酸リチウム板、
溶融石英板を重ねたサンプルを用いることを特徴とす
る。[3] In a tomographic image forming apparatus capable of simultaneously measuring the refractive index and the thickness of an object to be measured, a thickness,
Slide glass with different refractive index, lithium niobate plate,
It is characterized by using a sample in which fused quartz plates are stacked.

【００１４】[0014]

【発明の実施の形態】以下、本発明の実施の形態につい
て図面を参照しながら詳細に説明する。Embodiments of the present invention will be described below in detail with reference to the drawings.

【００１５】図１は本発明の実施例を示す測定光学系の
模式図、図６は本発明の実施例を示す光コヒーレンスト
モグラフィ（ＯＣＴ）における照射光のコヒーレンス長
測定結果（光ビーム径１ｍｍ×２０対物レンズを使用し
た場合：レンズ開口数０．０５）を示す図、図７は本発
明の実施例を示す共焦点イメージングにおける光反射特
性（光ビーム径６ｍｍで×２０対物レンズを使用した場
合：レンズ開口数０．３）を示す図である。FIG. 1 is a schematic view of a measuring optical system showing an embodiment of the present invention, and FIG. 6 is a result of measuring a coherence length of irradiation light (optical beam diameter 1 mm) in optical coherence tomography (OCT) showing an embodiment of the present invention. FIG. 7 shows a light reflection characteristic (a light beam diameter of 6 mm and a × 20 objective lens) in confocal imaging showing an embodiment of the present invention. (Case: lens numerical aperture 0.3).

【００１６】図１において、１はＳＬＤ（スーパールミ
ネッセントダイオード）、２はＬＤ（レーザーダイオー
ド）、３はリレーレンズ（×２０）、４はアパーチャ、
５はリレーレンズ、６は反射ミラー、７はハーフミラ
ー、８はビームスプリッタ、９は参照光ミラー、１０は
集光レンズ（対物レンズ）（×２０）、１１は測定サン
プル、１２はハーフミラー、１３はレンズ（×１０）、
１４は第１の光検出器、１５は増幅器、１６は第１の帯
域通過フィルタ（ｆd ＝２ｖ／λ）、１７はＡ／Ｄコン
バータ、１８は光チョッパー、１９はリレーレンズ（×
２０）、２０は単一モード光ファイバ、２１はレンズ
（×１０）、２２は第２の光検出器、２３は増幅器、２
４は第２の帯域通過フィルタ（ｆC ）、２５はＡ／Ｄコ
ンバータ、２６はステージコントローラ、２７はＰＣ
（パーソナル・コンピュータ）である。In FIG. 1, 1 is an SLD (super luminescent diode), 2 is an LD (laser diode), 3 is a relay lens (× 20), 4 is an aperture,
5 is a relay lens, 6 is a reflection mirror, 7 is a half mirror, 8 is a beam splitter, 9 is a reference light mirror, 10 is a condenser lens (objective lens) (× 20), 11 is a measurement sample, 12 is a half mirror, 13 is a lens (× 10),
14 is a first photodetector, 15 is an amplifier, 16 is a first band-pass filter (f d = 2 v / λ), 17 is an A / D converter, 18 is an optical chopper, 19 is a relay lens (×
20) and 20 are single mode optical fibers, 21 is a lens (× 10), 22 is a second photodetector, 23 is an amplifier,
4 is a second band pass filter (f C ), 25 is an A / D converter, 26 is a stage controller, and 27 is a PC
(Personal computer).

【００１７】図１に示すように、光源として低コヒーレ
ンス光のスーパールミネッセントダイオード（ＳＬＤ）
１の他に、波長０．８μｍのレーザーダイオード２を用
いた。第１の光検出器１４と第２の光検出器２２の２つ
を設置することと合わせて、干渉光測定と共焦点測定と
を分離した。また、測定サンプル１１が縦方向（ｚ方
向、断層像方向）に走査できるようにしている。As shown in FIG. 1, a super-luminescent diode (SLD) of low coherence light is used as a light source.
In addition to 1, a laser diode 2 having a wavelength of 0.8 μm was used. The interference light measurement and the confocal measurement were separated together with the installation of the two, the first light detector 14 and the second light detector 22. The measurement sample 11 can be scanned in the vertical direction (z direction, tomographic image direction).

【００１８】また、測定サンプル１１は、図２に示すよ
うに、基板３１上にスライドガラス（厚さｔ3 ＝５００
μｍ、屈折率ｎ3 ＝１．５１）３２、ニオブ酸リチウム
板（厚さｔ2 ＝１２５μｍ、屈折率ｎ2 ＝２．２４）３
３、溶融石英板（厚さｔ1 ＝５００μｍ、屈折率ｎ1 ＝
１．４６）３４を順次ずらして重ね合わせた。すなわ
ち、基板３１上にスライドガラス３２／ニオブ酸リチウ
ム（Ｚ板ＬｉＮｂＯ3 ）板３３／溶融石英板３４を段差
をつけて重ね合わせたもので、領域Ｉ〜IVの４つの領域
に分けられる。まず、波長８５０ｎｍのＳＬＤ１を光源
とする干渉計で、図３に示すように、ｎ×ｔイメージを
得た。ここで、図中の丸付き数字は反射面を示す。As shown in FIG. 2, a measurement sample 11 is placed on a glass slide (thickness t 3 = 500) on a substrate 31.
μm, refractive index n 3 = 1.51) 32, lithium niobate plate (thickness t 2 = 125 μm, refractive index n 2 = 2.24) 3
3. Fused quartz plate (thickness t 1 = 500 μm, refractive index n 1 =
1.46) 34 were superimposed one after another with a shift. That is, the slide glass 32 / lithium niobate (Z-plate LiNbO 3 ) plate 33 / fused quartz plate 34 are superposed on the substrate 31 with a step, and are divided into four regions I to IV. First, as shown in FIG. 3, an nxt image was obtained with an interferometer using an SLD1 having a wavelength of 850 nm as a light source. Here, the circled numbers in the figure indicate the reflecting surfaces.

【００１９】光コヒーレンストモグラフィ（ＯＣＴ）は
従来の方法と同一であり、図３に示すように、その境界
面間距離はｎ×ｔで表示される。ここで、本願発明者の
先行技術である特開平９−２１８０１６号でのｚ1 ＝ｚ
2 は＝Δｚで、ｓｉｎθは＝ＮＡ＝ζである。Optical coherence tomography (OCT) is the same as the conventional method. As shown in FIG. 3, the distance between the boundary surfaces is represented by n × t. Here, z 1 = z in JP 9-218016 is prior art of the present inventor
2 is = Δz, and sinθ is = NA = ζ.

【００２０】ここで、ζは０．１〜０．２と小さく、ζ
2 ≪１として良い。Here, ζ is as small as 0.1 to 0.2,
2 ≪1 is good.

【００２１】従って、Δｚ＝ｔ／ｎとなる。Therefore, Δz = t / n.

【００２２】次に、波長８１１ｎｍのＬＤ２からのＬＤ
光を測定サンプル１１にレンズ（×２０）１０で集光
し、反射光を共焦点光学系で検出した。ここで、測定サ
ンプル１１をｘ方向に一定間隔づつシフトしながら、ｚ
方向に走査して、図４に示すように、Δｚイメージが得
られる。Next, the LD from the LD 2 having a wavelength of 811 nm
The light was condensed on the measurement sample 11 by the lens (× 20) 10 and the reflected light was detected by the confocal optical system. Here, while shifting the measurement sample 11 in the x-direction at regular intervals, z
Scanning in the direction yields a Δz image, as shown in FIG.

【００２３】つまり、境界面からの反射光で共焦点トモ
グラフィを得ている。ここでサンプル移動距離Δｚは、
集光レンズの開口数ＮＡ＝ζとすると、 Δｚ＝ｔ×｛（１−ζ2 ）／（ｎ2 −ζ2 ）｝1/2 である。That is, the confocal tomography is obtained by the reflected light from the boundary surface. Here, the sample movement distance Δz is
If the numerical aperture NA of the condenser lens is ζ, then Δz = t × {(1−ζ 2 ) / (n 2 −ζ 2 )} 1/2 .

【００２４】図３および図４のイメージで各々の反射面
の位置が特定できているので、前述の簡単な演算処理を
行って、図５に示すような、反射型光トモグラフィが得
られる。Since the positions of the respective reflecting surfaces can be specified by the images shown in FIGS. 3 and 4, the above-described simple arithmetic processing is performed to obtain a reflection type optical tomography as shown in FIG.

【００２５】これは幾何学的サイズのイメージングであ
り、このイメージ内に分布する各屈折率の大きさはグレ
ーコード４１，４２で表示されている。なお、スライド
ガラス３２やＬｉＮｂＯ3 板３３の上端が荒れて傾斜し
ているため、この部分で反射光が欠落する。このため
に、図５のイメージの当該箇所に黒い帯４３が現れてい
る。This is a geometric size imaging, and the magnitude of each refractive index distributed in this image is indicated by gray codes 41 and 42. Since the upper ends of the slide glass 32 and the LiNbO 3 plate 33 are rough and inclined, reflected light is lost at this portion. For this reason, a black band 43 appears at the corresponding location in the image of FIG.

【００２６】色調の濃淡は屈折率を同時に表示したもの
である。“領域”は重ね合わせた測定サンプル１１の組
み合わせを選んだ時を示しており、全ての測定サンプル
１１の断層像は領域ＩＶである。The shade of the color tone indicates the refractive index at the same time. “Region” indicates a time when a combination of superimposed measurement samples 11 is selected, and tomographic images of all the measurement samples 11 are regions IV.

【００２７】上記したように、低コヒーレンス光干渉法
と共焦点法とを用いて、透明物体の屈折率、厚さの測定
をベースにしている。特に、新たに共焦点法でトモグラ
フィを作成するが、従来のＯＣＴ法でもトモグラフィを
作る。二つのトモグラフィから得られる境界面間距離と
屈折率、厚さの関係式より、真の厚さを算出し、断層像
とする。即ち、ＯＣＴ法からの境界面間距離は（屈折
率）×（厚さ）であり、一方、共焦点法のそれは（厚
さ）／（屈折率）で示される。これより、真の厚さが求
められる。As described above, the measurement of the refractive index and the thickness of a transparent object is based on the low coherence optical interferometry and the confocal method. In particular, tomography is newly created by the confocal method, but tomography is also created by the conventional OCT method. The true thickness is calculated from the relational expression between the boundary surface, the refractive index, and the thickness obtained from the two tomographs, and is set as a tomographic image. That is, the distance between the boundary surfaces from the OCT method is (refractive index) × (thickness), while that of the confocal method is represented by (thickness) / (refractive index). From this, the true thickness is required.

【００２８】例えば、基板３１の上に厚さ、屈折率が異
なるスライド（カバー）ガラス３２、ニオブ酸リチウム
板３３、溶融石英板３４を重ねた測定サンプル１１で実
証している。生体診断での患部や石灰化した部位の診断
に有効な方法である。For example, this is demonstrated by a measurement sample 11 in which a slide (cover) glass 32 having a different thickness and a different refractive index, a lithium niobate plate 33, and a fused silica plate 34 are stacked on a substrate 31. This is an effective method for diagnosing affected parts and calcified parts in biological diagnosis.

【００２９】光学分野においても、インプロセスで加工
品の検査に適用できる。In the optical field, the present invention can be applied to the inspection of a processed product in an in-process.

【００３０】なお、本発明は上記実施例に限定されるも
のではなく、本発明の趣旨に基づいて種々の変形が可能
であり、それらを本発明の範囲から排除するものではな
い。It should be noted that the present invention is not limited to the above-described embodiment, and various modifications are possible based on the spirit of the present invention, and they are not excluded from the scope of the present invention.

【００３１】[0031]

【発明の効果】以上、詳細に説明したように、本発明に
よれば、以下のような効果を奏することができる。As described above, according to the present invention, the following effects can be obtained.

【００３２】（Ａ）共焦点顕微鏡のレーザ光源は近赤外
光、すなわち不可視光を用い、患部の厚さを簡便かつ正
確に測定することができる。(A) The laser light source of the confocal microscope uses near-infrared light, that is, invisible light, so that the thickness of the affected part can be measured simply and accurately.

【００３３】例えば、早期癌の浸透深さの同定や石灰化
した部位の臨床診断に有効な方法である。For example, it is an effective method for identifying the penetration depth of early cancer and for clinical diagnosis of a calcified site.

【００３４】（Ｂ）本発明の装置によれば、ＯＣＴと共
焦点レーザ走査顕微鏡を組み合わせたものであり、共焦
点顕微鏡のレーザ光源は近赤外光、すなわち不可視光で
あるので、眼科装置に用いる場合には、瞳孔が開いたま
まで（散瞳）、黄斑部を含む網膜面の像を正確に捕らえ
ることができる。この共焦点顕微鏡像に従って、黄斑部
を横切るＯＣＴ像（断層像）を撮影することができる。(B) According to the apparatus of the present invention, the OCT and the confocal laser scanning microscope are combined, and the laser light source of the confocal microscope is near-infrared light, that is, invisible light. When used, the image of the retinal surface including the macula can be accurately captured with the pupil open (mydriasis). According to the confocal microscope image, an OCT image (tomographic image) crossing the macula can be taken.

【図面の簡単な説明】[Brief description of the drawings]

【図１】本発明の実施例を示す測定光学系の構成図であ
る。FIG. 1 is a configuration diagram of a measuring optical system showing an embodiment of the present invention.

【図２】本発明の実施例を示す測定サンプルの構造と照
射光ビームの走査と移動を示す図である。FIG. 2 is a diagram illustrating a structure of a measurement sample and scanning and movement of an irradiation light beam according to an embodiment of the present invention.

【図３】本発明の実施例を示す光コヒーレンストモグラ
フィ（ＯＣＴ）（ｚ方向のサイズはｔ×ｎ）を示す図で
ある。FIG. 3 is a diagram showing optical coherence tomography (OCT) (the size in the z direction is t × n) showing an embodiment of the present invention.

【図４】本発明の実施例を示す共焦点トモグラフィ（ｚ
方向のサイズはｔ／ｎ）を示す図である。FIG. 4 shows confocal tomography (z
It is a figure which shows the size of a direction (t / n).

【図５】本発明の実施例を示す幾何学的サイズでの断面
における屈折率分布の表示を示す図である。FIG. 5 is a diagram showing a display of a refractive index distribution in a cross section at a geometric size showing an embodiment of the present invention.

【図６】本発明の実施例を示す光コヒーレンストモグラ
フィ（ＯＣＴ）における照射光のコヒーレンス長測定結
果（光ビーム径１ｍｍ×２０対物レンズを使用した場
合：レンズ開口数０．０５）を示す図である。FIG. 6 is a diagram showing a measurement result of a coherence length of irradiation light in an optical coherence tomography (OCT) showing an embodiment of the present invention (when a light beam diameter of 1 mm × 20 objective lens is used: a lens numerical aperture of 0.05). It is.

【図７】本発明の実施例を示す共焦点イメージングにお
ける光反射特性（光ビーム径６ｍｍで×２０対物レンズ
を使用した場合：レンズ開口数０．３）を示す図であ
る。FIG. 7 is a diagram showing light reflection characteristics (in the case of using a × 20 objective lens with a light beam diameter of 6 mm: lens numerical aperture: 0.3) in confocal imaging showing an example of the present invention.

【符号の説明】[Explanation of symbols]

１ ＳＬＤ（スーパールミネッセントダイオード） ２ ＬＤ（レーザーダイオード） ３，１９ リレーレンズ（×２０） ４ アパーチャ ５ リレーレンズ ６ 反射ミラー ７，１２ ハーフミラー ８ ビームスプリッタ ９ 参照光ミラー １０ 集光レンズ（対物レンズ） １１ 測定サンプル １３，２１ レンズ（×１０） １４ 第１の光検出器 １５，２３ 増幅器 １６ 第１の帯域通過フィルタ（ｆd ＝２ｖ／λ） １７，２５ Ａ／Ｄコンバータ １８ 光チョッパー ２０ 単一モード光ファイバ ２２ 第２の光検出器 ２４ 第２の帯域通過フィルタ（ｆC ） ２６ ステージコントローラ ２７ ＰＣ（パーソナル・コンピュータ） ３１ 基板 ３２ スライドガラス ３３ ニオブ酸リチウム板 ３４ 溶融石英板 ４１，４２ グレーコード ４３ 黒い帯Reference Signs List 1 SLD (super luminescent diode) 2 LD (laser diode) 3,19 relay lens (× 20) 4 aperture 5 relay lens 6 reflection mirror 7,12 half mirror 8 beam splitter 9 reference light mirror 10 condensing lens (object Lens) 11 Measurement sample 13, 21 Lens (× 10) 14 First photodetector 15, 23 Amplifier 16 First band-pass filter (f d = 2 v / λ) 17, 25 A / D converter 18 Optical chopper 20 Single mode optical fiber 22 Second photodetector 24 Second bandpass filter (f C ) 26 Stage controller 27 PC (personal computer) 31 Substrate 32 Slide glass 33 Lithium niobate plate 34 Fused quartz plate 41, 42 Gray code 43 black belt

Claims (3)

【特許請求の範囲】[Claims] 【請求項１】 測定対象物の屈折率と厚さの同時測定が
可能な断層像形成方法において、（ａ）被測定物体を断
層像を入手したいｚ方向に走査し、共焦点光学系を用い
てｚ方向の断層像を撮り、（ｂ）低コヒーレンス光干渉
を用いてｚ方向の断層像を撮り、（ｃ）前記二つの断層
像に基づいて、演算処理を施して、幾何学的サイズ
（ｔ）で屈折率分布〔ｎ（ｘ，ｚ）〕を表示することを
特徴とする断層像形成方法。1. A tomographic image forming method capable of simultaneously measuring a refractive index and a thickness of an object to be measured. (A) An object to be measured is scanned in a z-direction in which a tomographic image is to be obtained, and a confocal optical system is used. (B) take a tomographic image in the z direction using low coherence light interference, and (c) perform arithmetic processing based on the two tomographic images to obtain a geometric size ( A method for forming a tomographic image, characterized by displaying a refractive index distribution [n (x, z)] at t). 【請求項２】 測定対象物の屈折率と厚さの同時測定が
可能な断層像形成装置において、（ａ）被測定物体を断
層像を入手したいｚ方向に走査し、共焦点光学系を用い
てｚ方向の断層像を得る手段と、（ｂ）低コヒーレンス
光干渉を用いた光コヒーレンストモグラフィにより、ｚ
方向の断層像を得る手段と、（ｃ）前記二つの断層像に
基づいて、演算処理を施し、幾何学的サイズ（ｔ）で屈
折率分布〔ｎ（ｘ，ｚ）〕を表示する手段とを具備する
ことを特徴とする断層像形成装置。2. A tomographic image forming apparatus capable of simultaneously measuring a refractive index and a thickness of an object to be measured. (A) Scanning an object to be measured in a z-direction in which a tomographic image is desired to be obtained, and using a confocal optical system. (B) optical coherence tomography using low coherence optical interference
Means for obtaining a tomographic image in the direction; and (c) means for performing arithmetic processing based on the two tomographic images and displaying a refractive index distribution [n (x, z)] in a geometric size (t). A tomographic image forming apparatus comprising: 【請求項３】 測定対象物の屈折率と厚さの同時測定が
可能な断層像形成装置において、基板の上に厚さ、屈折
率が異なるスライドガラス、ニオブ酸リチウム板、溶融
石英板を重ねたサンプルを用いることを特徴とする断層
像形成装置。3. A tomographic image forming apparatus capable of simultaneously measuring a refractive index and a thickness of an object to be measured, wherein a slide glass, a lithium niobate plate, and a fused quartz plate having different thicknesses and refractive indexes are stacked on a substrate. Tomographic image forming apparatus, characterized in that a tomographic sample is used.
JP2000028511A 2000-02-07 2000-02-07 Tomographic image forming method and apparatus therefor Expired - Fee Related JP3660185B2 (en)

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