JP2001209192A5 - - Google Patents

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Publication number
JP2001209192A5
JP2001209192A5 JP2000014896A JP2000014896A JP2001209192A5 JP 2001209192 A5 JP2001209192 A5 JP 2001209192A5 JP 2000014896 A JP2000014896 A JP 2000014896A JP 2000014896 A JP2000014896 A JP 2000014896A JP 2001209192 A5 JP2001209192 A5 JP 2001209192A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2000014896A
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Japanese (ja)
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JP4420507B2 (ja
JP2001209192A (ja
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Priority to JP2000014896A priority Critical patent/JP4420507B2/ja
Priority claimed from JP2000014896A external-priority patent/JP4420507B2/ja
Publication of JP2001209192A publication Critical patent/JP2001209192A/ja
Publication of JP2001209192A5 publication Critical patent/JP2001209192A5/ja
Application granted granted Critical
Publication of JP4420507B2 publication Critical patent/JP4420507B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000014896A 2000-01-24 2000-01-24 基板露光方法および装置 Expired - Fee Related JP4420507B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000014896A JP4420507B2 (ja) 2000-01-24 2000-01-24 基板露光方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000014896A JP4420507B2 (ja) 2000-01-24 2000-01-24 基板露光方法および装置

Publications (3)

Publication Number Publication Date
JP2001209192A JP2001209192A (ja) 2001-08-03
JP2001209192A5 true JP2001209192A5 (enrdf_load_stackoverflow) 2007-03-08
JP4420507B2 JP4420507B2 (ja) 2010-02-24

Family

ID=18542274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000014896A Expired - Fee Related JP4420507B2 (ja) 2000-01-24 2000-01-24 基板露光方法および装置

Country Status (1)

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JP (1) JP4420507B2 (enrdf_load_stackoverflow)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100628455B1 (ko) 2002-12-21 2006-09-28 주식회사 이오테크닉스 칩 스케일 마커 및 마킹방법
JP4589198B2 (ja) * 2005-08-16 2010-12-01 富士フイルム株式会社 ワーク搬送装置とそれを備えた画像形成装置並びにワーク搬送方法
JP4880521B2 (ja) * 2007-05-29 2012-02-22 株式会社オーク製作所 描画装置
JP4651648B2 (ja) * 2007-09-12 2011-03-16 日立ビアメカニクス株式会社 密着露光の方法及びその装置
JP4949195B2 (ja) * 2007-10-26 2012-06-06 株式会社アドテックエンジニアリング 露光装置及び基板の矯正装置
KR101345994B1 (ko) 2012-05-31 2013-12-31 주식회사 선일기연 순차적으로 밀착 가능한 구조를 갖는 시트형 ｆｐｃｂ 자동 진공흡탈착장치
JP6096515B2 (ja) * 2013-01-15 2017-03-15 株式会社アドテックエンジニアリング Ｉｔｏパターン露光装置
KR102342231B1 (ko) * 2014-05-03 2021-12-21 가부시키가이샤 한도오따이 에네루기 켄큐쇼 필름상 부재 지지 장치
CN104076619A (zh) * 2014-07-03 2014-10-01 无锡宏纳科技有限公司 一种接触式光刻机吸盘
KR20230115589A (ko) 2022-01-27 2023-08-03 주식회사 세미다린 무아레가 억제된 진공척

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