JP2001208708A5 - - Google Patents

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Publication number
JP2001208708A5
JP2001208708A5 JP2000022205A JP2000022205A JP2001208708A5 JP 2001208708 A5 JP2001208708 A5 JP 2001208708A5 JP 2000022205 A JP2000022205 A JP 2000022205A JP 2000022205 A JP2000022205 A JP 2000022205A JP 2001208708 A5 JP2001208708 A5 JP 2001208708A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000022205A
Other languages
Japanese (ja)
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JP2001208708A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000022205A priority Critical patent/JP2001208708A/ja
Priority claimed from JP2000022205A external-priority patent/JP2001208708A/ja
Publication of JP2001208708A publication Critical patent/JP2001208708A/ja
Publication of JP2001208708A5 publication Critical patent/JP2001208708A5/ja
Pending legal-status Critical Current

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JP2000022205A 2000-01-31 2000-01-31 斜出射電子線プローブマイクロｘ線分析による異物の分析方法およびその装置 Pending JP2001208708A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000022205A JP2001208708A (ja) 2000-01-31 2000-01-31 斜出射電子線プローブマイクロｘ線分析による異物の分析方法およびその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000022205A JP2001208708A (ja) 2000-01-31 2000-01-31 斜出射電子線プローブマイクロｘ線分析による異物の分析方法およびその装置

Publications (2)

Publication Number Publication Date
JP2001208708A JP2001208708A (ja) 2001-08-03
JP2001208708A5 true JP2001208708A5 (cg-RX-API-DMAC7.html) 2005-10-20

Family

ID=18548533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000022205A Pending JP2001208708A (ja) 2000-01-31 2000-01-31 斜出射電子線プローブマイクロｘ線分析による異物の分析方法およびその装置

Country Status (1)

Country Link
JP (1) JP2001208708A (cg-RX-API-DMAC7.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001235436A (ja) * 2000-02-23 2001-08-31 Japan Science & Technology Corp 斜出射プロトンビーム誘起特性ｘ線分析による試料表面の観察・分析方法およびそのための装置
JP2003098132A (ja) * 2001-09-25 2003-04-03 Sony Corp 試料ホルダ及び試料分析装置
JP2006118940A (ja) * 2004-10-20 2006-05-11 Jeol Ltd 斜出射ｘ線の検出方法及び装置
JP4887237B2 (ja) * 2007-08-10 2012-02-29 シャープ株式会社 斜出射電子線プローブマイクロｘ線分析方法およびそれに用いられるプログラム、並びに、斜出射電子線プローブマイクロｘ線分析装置
JP7457607B2 (ja) 2020-02-26 2024-03-28 日本電子株式会社 軟ｘ線分光装置および分析方法
WO2023145101A1 (ja) * 2022-01-31 2023-08-03 キヤノンアネルバ株式会社 検査装置および検査方法

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