JP2001196320A5 - - Google Patents

Download PDF

Info

Publication number
JP2001196320A5
JP2001196320A5 JP2000310154A JP2000310154A JP2001196320A5 JP 2001196320 A5 JP2001196320 A5 JP 2001196320A5 JP 2000310154 A JP2000310154 A JP 2000310154A JP 2000310154 A JP2000310154 A JP 2000310154A JP 2001196320 A5 JP2001196320 A5 JP 2001196320A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000310154A
Other languages
Japanese (ja)
Other versions
JP2001196320A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000310154A priority Critical patent/JP2001196320A/ja
Priority claimed from JP2000310154A external-priority patent/JP2001196320A/ja
Publication of JP2001196320A publication Critical patent/JP2001196320A/ja
Publication of JP2001196320A5 publication Critical patent/JP2001196320A5/ja
Pending legal-status Critical Current

Links

JP2000310154A 1999-10-26 2000-10-11 ドーピング方法、半導体装置の製造方法、半導体素子の製造方法及びその製造装置、ドーピング装置 Pending JP2001196320A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000310154A JP2001196320A (ja) 1999-10-26 2000-10-11 ドーピング方法、半導体装置の製造方法、半導体素子の製造方法及びその製造装置、ドーピング装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11-303614 1999-10-26
JP30361499 1999-10-26
JP2000310154A JP2001196320A (ja) 1999-10-26 2000-10-11 ドーピング方法、半導体装置の製造方法、半導体素子の製造方法及びその製造装置、ドーピング装置

Publications (2)

Publication Number Publication Date
JP2001196320A JP2001196320A (ja) 2001-07-19
JP2001196320A5 true JP2001196320A5 (cg-RX-API-DMAC7.html) 2007-11-15

Family

ID=26563571

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000310154A Pending JP2001196320A (ja) 1999-10-26 2000-10-11 ドーピング方法、半導体装置の製造方法、半導体素子の製造方法及びその製造装置、ドーピング装置

Country Status (1)

Country Link
JP (1) JP2001196320A (cg-RX-API-DMAC7.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4882214B2 (ja) * 2004-09-17 2012-02-22 富士電機株式会社 逆阻止型絶縁ゲート形半導体装置およびその製造方法
JP2008004867A (ja) * 2006-06-26 2008-01-10 Denso Corp 半導体装置の製造方法
JP2015213193A (ja) * 2015-07-21 2015-11-26 ルネサスエレクトロニクス株式会社 Ｉｇｂｔ
JP6844130B2 (ja) * 2015-08-18 2021-03-17 富士電機株式会社 半導体装置及びその製造方法
US10026831B2 (en) 2015-08-18 2018-07-17 Fuji Electric Co., Ltd. Semiconductor device and method of manufacturing semiconductor device
JP6412617B2 (ja) * 2017-08-09 2018-10-24 ルネサスエレクトロニクス株式会社 半導体装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5630721A (en) * 1979-08-21 1981-03-27 Nec Corp Diffusing device of selected impurity
JPS58194386A (ja) * 1982-05-07 1983-11-12 Nec Corp 半導体素子の製造方法
JPS62144373A (ja) * 1985-12-18 1987-06-27 Masamitsu Mizuno 発光ダイオ−ドの製造装置

Similar Documents

Publication Publication Date Title
LUC00014I1 (cg-RX-API-DMAC7.html)
BE2016C018I2 (cg-RX-API-DMAC7.html)
BE2014C035I2 (cg-RX-API-DMAC7.html)
BE2014C019I2 (cg-RX-API-DMAC7.html)
BE2014C009I2 (cg-RX-API-DMAC7.html)
BE2012C016I2 (cg-RX-API-DMAC7.html)
JP2003505865A5 (cg-RX-API-DMAC7.html)
BE2010C019I2 (cg-RX-API-DMAC7.html)
BRPI0113085B8 (cg-RX-API-DMAC7.html)
BRPI0112928B8 (cg-RX-API-DMAC7.html)
BRPI0110940B8 (cg-RX-API-DMAC7.html)
JP2002544450A5 (cg-RX-API-DMAC7.html)
BE2010C040I2 (cg-RX-API-DMAC7.html)
BE2014C025I2 (cg-RX-API-DMAC7.html)
JP2003514408A5 (cg-RX-API-DMAC7.html)
JP2000202762A5 (cg-RX-API-DMAC7.html)
JP2003513395A5 (cg-RX-API-DMAC7.html)
JP2002184715A5 (cg-RX-API-DMAC7.html)
JP2002196113A5 (cg-RX-API-DMAC7.html)
JP2001248525A5 (cg-RX-API-DMAC7.html)
JP2001202637A5 (cg-RX-API-DMAC7.html)
BR0112866A2 (cg-RX-API-DMAC7.html)
JP2002170665A5 (cg-RX-API-DMAC7.html)
JP2001236492A5 (cg-RX-API-DMAC7.html)
FR2790839A3 (cg-RX-API-DMAC7.html)