JP2001196020A - Ｒｈｅｅｄ装置およびその駆動方法 - Google Patents

Ｒｈｅｅｄ装置およびその駆動方法

Info

Publication number
JP2001196020A
JP2001196020A JP2000038844A JP2000038844A JP2001196020A JP 2001196020 A JP2001196020 A JP 2001196020A JP 2000038844 A JP2000038844 A JP 2000038844A JP 2000038844 A JP2000038844 A JP 2000038844A JP 2001196020 A JP2001196020 A JP 2001196020A
Authority
JP
Japan
Prior art keywords
electron
phosphor
rheed
electrons
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000038844A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001196020A5 (enExample
Inventor
Kazuo Miyamoto
和夫 宮本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Musashino Engineering Co Ltd
Original Assignee
Musashino Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Musashino Engineering Co Ltd filed Critical Musashino Engineering Co Ltd
Priority to JP2000038844A priority Critical patent/JP2001196020A/ja
Publication of JP2001196020A publication Critical patent/JP2001196020A/ja
Publication of JP2001196020A5 publication Critical patent/JP2001196020A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
JP2000038844A 2000-01-12 2000-01-12 Ｒｈｅｅｄ装置およびその駆動方法 Pending JP2001196020A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000038844A JP2001196020A (ja) 2000-01-12 2000-01-12 Ｒｈｅｅｄ装置およびその駆動方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000038844A JP2001196020A (ja) 2000-01-12 2000-01-12 Ｒｈｅｅｄ装置およびその駆動方法

Publications (2)

Publication Number Publication Date
JP2001196020A true JP2001196020A (ja) 2001-07-19
JP2001196020A5 JP2001196020A5 (enExample) 2007-03-01

Family

ID=18562507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000038844A Pending JP2001196020A (ja) 2000-01-12 2000-01-12 Ｒｈｅｅｄ装置およびその駆動方法

Country Status (1)

Country Link
JP (1) JP2001196020A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011249273A (ja) * 2010-05-31 2011-12-08 Jeol Ltd 走査電子顕微鏡
WO2012144544A1 (ja) * 2011-04-20 2012-10-26 株式会社エイブイシー 反射高速電子回析装置
WO2012144543A1 (ja) * 2011-04-20 2012-10-26 株式会社エイブイシー 反射高速電子回析方法
JP2012211770A (ja) * 2011-03-30 2012-11-01 Shimadzu Corp 電子線分析装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011249273A (ja) * 2010-05-31 2011-12-08 Jeol Ltd 走査電子顕微鏡
JP2012211770A (ja) * 2011-03-30 2012-11-01 Shimadzu Corp 電子線分析装置
WO2012144544A1 (ja) * 2011-04-20 2012-10-26 株式会社エイブイシー 反射高速電子回析装置
WO2012144543A1 (ja) * 2011-04-20 2012-10-26 株式会社エイブイシー 反射高速電子回析方法
JP2012227009A (ja) * 2011-04-20 2012-11-15 Avc Co Ltd 反射高速電子回析方法
JP2012227010A (ja) * 2011-04-20 2012-11-15 Avc Co Ltd 反射高速電子回析装置

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