JP2001184744A - Recording medium and method for manufacturing the same - Google Patents

Recording medium and method for manufacturing the same

Info

Publication number
JP2001184744A
JP2001184744A JP37093099A JP37093099A JP2001184744A JP 2001184744 A JP2001184744 A JP 2001184744A JP 37093099 A JP37093099 A JP 37093099A JP 37093099 A JP37093099 A JP 37093099A JP 2001184744 A JP2001184744 A JP 2001184744A
Authority
JP
Japan
Prior art keywords
particles
recording medium
recording
substrate
aromatic compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP37093099A
Other languages
Japanese (ja)
Inventor
Katsuyuki Naito
勝之 内藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP37093099A priority Critical patent/JP2001184744A/en
Publication of JP2001184744A publication Critical patent/JP2001184744A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a recording medium capable of heightening recording density and at the same time suppressing medium noise by isolating particles having information recording ability and at the same time reducing the defects in a film consisting of the particles and to provide a method for manufacturing the recording medium. SOLUTION: The recording medium is provided with a substrate 11 and a single particle layer 12 which is formed on the substrate 11 and in which plural particles 13 having information recording ability are isolated one another. The surfaces of the particles 13 are coated with an aromatic compound 14 having a branched chemical structure.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、記録媒体及び記録
媒体の製造方法に関わる。
[0001] The present invention relates to a recording medium and a method for manufacturing the recording medium.

【0002】[0002]

【従来の技術】近年の情報化社会において、増大の一途
を辿る情報量に対応した、従来から飛躍的に記録録密度
の高い記録・再生方法や、それに基づく記録・再生装置
及び記録媒体の出現が待望されている。それに伴い、そ
れらの記録・再生装置及び記録媒体において情報を書き
込む単位である記録セルの微小化への対応が要求されて
いる。
2. Description of the Related Art In an information-oriented society in recent years, a recording / reproducing method having a remarkably high recording / recording density, and a recording / reproducing apparatus and a recording medium based on the recording / reproducing method, corresponding to an ever-increasing amount of information. Is long-awaited. Along with this, it is required to cope with miniaturization of a recording cell which is a unit for writing information in such a recording / reproducing apparatus and a recording medium.

【0003】しかしながら、上記記録・再生装置及び記
録媒体において、記録セルの微小化への対応は現在のと
ころ様々の困難を伴っている。
[0003] However, in the recording / reproducing apparatus and the recording medium described above, there are various difficulties to cope with miniaturization of recording cells at present.

【0004】例えば、磁気記録媒体を用いた磁気記録の
場合、記録層には粒度分布の広い多結晶体を用いてい
る。しかし結晶の熱揺らぎや磁性粒子間の相互作用のた
め記録が不安定となったりノイズが生じたりする。記録
セルが大きい場合は問題ないが、記録セルが小さいと記
録の不安定性やノイズの増大が顕著となる。
For example, in the case of magnetic recording using a magnetic recording medium, a polycrystalline material having a wide particle size distribution is used for a recording layer. However, recording becomes unstable or noise occurs due to thermal fluctuation of crystals or interaction between magnetic particles. There is no problem when the recording cell is large, but when the recording cell is small, recording instability and noise increase become remarkable.

【0005】また、相変化媒体を用いた光記録において
も状況は同様であり、ビットサイズが相変化媒体の結晶
サイズと同程度となる1インチ平方当たり数百ギガビツ
ト以上の記録密度では媒体ノイズが大きくなる。
The situation is the same in optical recording using a phase change medium. At a recording density of several hundred gigabits per square inch or more where the bit size is almost the same as the crystal size of the phase change medium, medium noise is reduced. growing.

【0006】この問題を回避するため、基板上の磁性粒
子を微小化すると同時に孤立化することにより媒体ノイ
ズを低減した磁気記録媒体が提案されている(S.Y.
Chou,et.al.J.Appl.Phys.76
(1994),pp6673−6675)。
In order to avoid this problem, there has been proposed a magnetic recording medium in which the magnetic noise on the substrate is reduced by miniaturizing and isolating the magnetic particles on the substrate at the same time (SY).
Chou, et. al. J. Appl. Phys. 76
(1994), pp6673-6675).

【0007】このような磁性粒子が孤立化した構造の磁
気記録媒体の製造方法として、半導体素子作成技術の応
用が考えられるが加工サイズ、加工コストの点で実現性
は乏しい。
As a method of manufacturing a magnetic recording medium having such a structure in which magnetic particles are isolated, application of a semiconductor element manufacturing technique can be considered, but its feasibility is poor in terms of processing size and processing cost.

【0008】これに対して例えば特開平10−2077
2号公報には、基板上に二次元に配列した直径数ナノメ
ートルから数マイクロメートルの微粒子をマスクとして
用い、リソグラフィ技術を用いて基板上に磁性微粒子が
孤立化した磁気記録媒体を作成する方法が開示されてい
る。また、微粒子を基板上に二次元的に配列させる方法
としては、長鎖アルキル基で被覆した微粒子を基板上に
塗布して、乾燥時の微粒子間の自己凝集を利用して大面
積で比較的均一な単粒子層を得る方法が報告されている
(S.Hung,et al.,Jpn.J.App
l.Phys.,38(1999)pp.L473−L
476)。
On the other hand, for example, Japanese Patent Laid-Open No. 10-2077
No. 2 discloses a method for producing a magnetic recording medium in which magnetic fine particles are isolated on a substrate by using lithography technology, using fine particles having a diameter of several nanometers to several micrometers arranged two-dimensionally on a substrate as a mask. Is disclosed. In addition, as a method of two-dimensionally arranging the fine particles on the substrate, a fine particle coated with a long-chain alkyl group is applied on the substrate, and the self-aggregation between the fine particles during drying is applied to a relatively large area. A method for obtaining a uniform single particle layer has been reported (S. Hung, et al., Jpn. J. App.
l. Phys. , 38 (1999) pp. L473-L
476).

【0009】しかしながら、基板上に微粒子を二次元的
に配列させる際に微粒子の自己集合力を利用しただけの
成膜方法では、ミクロには微粒子の熱揺らぎが大きく、
微粒子間隔を厳密に制御することができず、このため特
に1インチ平方当たり1テラビットを超えるような超高
密度メモリでは、媒体ノイズの原因になっていた。
However, in a film forming method using only the self-assembling force of the fine particles when two-dimensionally arranging the fine particles on the substrate, the thermal fluctuation of the fine particles is large in the micro,
The fine particle spacing cannot be strictly controlled, and this has caused medium noise especially in ultra-high density memories exceeding 1 terabit per square inch.

【0010】[0010]

【発明が解決しようとする課題】本発明の目的とすると
ころは、情報記録能を有する粒子を孤立化して存在させ
ると同時に、前記粒子からなる膜中の粒子の間隔を厳密
に制御することによって、記録密度を高くし、かつ媒体
ノイズを抑えることが可能となる記録媒体および記録媒
体の製造方法を提供することである。
SUMMARY OF THE INVENTION An object of the present invention is to make the particles having information recording capability exist in isolation, and at the same time, to strictly control the distance between the particles in the film composed of the particles. Another object of the present invention is to provide a recording medium and a method of manufacturing the recording medium, which can increase the recording density and suppress medium noise.

【0011】[0011]

【課題を解決するための手段】本発明者らは、粒子間の
間隔を効果的に制御する方法について鋭意検討したとこ
ろ、枝分かれ構造を有する嵩高い芳香族化合物により被
覆した粒子を基板表面に形成することにより、粒子の熱
揺らぎを抑え粒子間隔が制御された安定な粒子層が形成
されることを見出した。
Means for Solving the Problems The present inventors diligently studied a method for effectively controlling the spacing between particles, and found that particles coated with a bulky aromatic compound having a branched structure were formed on the substrate surface. By doing so, it has been found that a stable particle layer in which the thermal fluctuation of the particles is suppressed and the particle interval is controlled is formed.

【0012】すなわち、本発明は、基板と、前記基板上
に形成された情報記録能を有する複数の粒子を備える記
録層とを少なくとも備える記録媒体において、前記粒子
表面は枝分かれ構造を有する芳香族化合物で被覆されて
なることを特徴とする記録媒体である。
That is, the present invention provides a recording medium comprising at least a substrate and a recording layer formed on the substrate and having a plurality of particles having information recording ability, wherein the surface of the particle is an aromatic compound having a branched structure. A recording medium characterized by being coated with:

【0013】また、本発明は、基板上に枝分かれ構造を
有する芳香族化合物で被覆されてなる粒子を備える粒子
層を形成する工程と、前記粒子層を熱処理する工程とを
備えることを特徴とする記録媒体の製造方法である。
Further, the present invention is characterized by comprising a step of forming a particle layer comprising particles coated on a substrate with an aromatic compound having a branched structure, and a step of heat-treating the particle layer. This is a method for manufacturing a recording medium.

【0014】本発明の記録媒体においては、情報記録能
を有する複数の粒子が枝分かれ構造を有する芳香族化合
物で被覆されてなる。そのため粒子間が孤立化する。さ
らに芳香族化合物は長鎖アルキル基と比べて熱揺らぎが
小さく、かつそれが枝分かれしている場合には芳香放化
合物での込み合いのためさらに熱揺らぎを押さえること
ができる。したがって、被覆された化合物の種類によっ
て決定する粒子間の熱揺らぎを小さくすることができ、
粒子間が孤立化するのみならず粒子の間隔を厳密に制御
できる。結果として媒体ノイズの小さい超高密度記録媒
体を得ることができる。
In the recording medium of the present invention, a plurality of particles having information recording ability are coated with an aromatic compound having a branched structure. Therefore, the particles are isolated. Further, the thermal fluctuation of the aromatic compound is smaller than that of the long-chain alkyl group, and when the aromatic compound is branched, the thermal fluctuation can be further suppressed due to crowding with the aromatic release compound. Therefore, it is possible to reduce the thermal fluctuation between particles determined by the type of the compound coated,
Not only can the particles be isolated, but also the spacing between the particles can be strictly controlled. As a result, an ultra-high-density recording medium with low medium noise can be obtained.

【0015】また、本発明の記録媒体の製造方法の如
く、基板上に枝分かれ構造を有する芳香族化合物で被覆
されてなる粒子を備える粒子層を形成したのち、前記粒
子層を熱処理して記録媒体を得ることにより、粒子間隔
を制御がより精度高くなされる。結果として媒体ノイズ
の小さい超高密度記録媒体を得ることができる。
Further, as in the method for producing a recording medium of the present invention, a particle layer comprising particles coated with an aromatic compound having a branched structure is formed on a substrate, and the particle layer is heat-treated to form a recording medium. By obtaining the above, the control of the particle interval is performed with higher accuracy. As a result, an ultra-high-density recording medium with low medium noise can be obtained.

【0016】[0016]

【発明の実施の形態】本発明の記録媒体の概略を示す断
面図を図1に示す。
FIG. 1 is a sectional view schematically showing a recording medium according to the present invention.

【0017】基板11には、記録層12が積層されてお
り、記録層12に情報が書き込まれる。記録層12は情
報記録能を有する複数の粒子13からなる単粒子層であ
る。すなわち粒子13が1層で2次元的に配置されてい
る。また粒子13は枝分かれ構造を有する芳香族化合物
14により被覆されている。そのため互いに離間して存
在する。それにより基板11上の粒子13を微小化して
記録ビットを微小化せしめても媒体ノイズが低減された
記録媒体とすることができる。
A recording layer 12 is laminated on the substrate 11, and information is written on the recording layer 12. The recording layer 12 is a single particle layer including a plurality of particles 13 having information recording ability. That is, the particles 13 are two-dimensionally arranged in one layer. Further, the particles 13 are covered with an aromatic compound 14 having a branched structure. Therefore, they exist apart from each other. Thus, even if the recording bits are miniaturized by miniaturizing the particles 13 on the substrate 11, a recording medium with reduced medium noise can be obtained.

【0018】なお、本発明において基板11とは芳香族
化合物14により被覆されている粒子13が存在する層
の下地となる層を示すものである。
In the present invention, the substrate 11 refers to a layer serving as a base of a layer in which the particles 13 coated with the aromatic compound 14 are present.

【0019】また、粒子13は、記録媒体のノイズを低
減するためにすべての粒子13が離間して存在すること
が理想ではあるが、不可避的に一部接触したものが存在
していても良い。
It is ideal that all the particles 13 are separated from each other in order to reduce the noise of the recording medium, but some particles 13 may inevitably be in contact with each other. .

【0020】情報記録能を有する粒子13は、一般に記
録媒体の記録層に用いられる情報記録能を有する材料か
らなるものであれば何であっても良い。例えば当該記録
媒体が磁気記録媒体であるなら磁性体、相変化光記録媒
体であるなら相変化材料からなるもの、電荷記録媒体で
あるなら電荷記録材料からなるもの、電荷記録媒体であ
るなら電荷記録材料からなるもの、あるいは光学的な変
化を利用して記録・再生が行われる半導体材料等が挙げ
られる。
The particles 13 having the information recording ability may be of any kind as long as they are made of a material having the information recording ability generally used for the recording layer of the recording medium. For example, if the recording medium is a magnetic recording medium, it is a magnetic substance; if it is a phase change optical recording medium, it is made of a phase change material; if it is a charge recording medium, it is made of a charge recording material; if it is a charge recording medium, it is charge recording. Examples of the material include a material made of a material, and a semiconductor material on which recording / reproduction is performed using an optical change.

【0021】粒子13の大きさは、小さければ小さいほ
ど記録密度が増大できるため望ましく、具体的には1〜
20nmの範囲であることが望ましい。特に本発明にお
いては、粒子13間が孤立化しノイズが低減されている
ため、粒子径を小さくして記録密度を増大させることが
できる。
The size of the particles 13 is desirably smaller as the recording density can be increased.
It is desirable to be in the range of 20 nm. In particular, in the present invention, since the space between the particles 13 is isolated and noise is reduced, the recording density can be increased by reducing the particle diameter.

【0022】本発明に係る芳香族化合物で被覆されてな
る粒子の一例を示す概略図を図2に示す。
FIG. 2 is a schematic view showing an example of particles coated with the aromatic compound according to the present invention.

【0023】粒子21表面は芳香族化合物22で被覆さ
れてなる。芳香族化合物22は、枝分かれ構造を有する
芳香族化合物である。粒子に結合する芳香族化合物の分
子23が単分子層をなしていることが粒子間の距離を一
定にすることができるため望ましい。
The surface of the particles 21 is coated with an aromatic compound 22. The aromatic compound 22 is an aromatic compound having a branched structure. It is desirable that the molecules 23 of the aromatic compound bonded to the particles form a monolayer because the distance between the particles can be kept constant.

【0024】芳香族化合物22は複数の有機基が樹枝状
に結合してなる構造を有する樹枝状分子であることが望
ましい。
The aromatic compound 22 is preferably a dendritic molecule having a structure in which a plurality of organic groups are bonded in a dendritic manner.

【0025】前記樹枝状分子とは、例えば核となる粒子
21に結合される基本単位である枝分かれ構造(例えば
Y字型)を有する有機基の手に、枝分かれ構造(例えば
Y字型)の有機基が結合し、さらにその枝分かれ構造
(例えばY字型)の有機基の手に次の枝分かれ構造(例
えばY字型)の有機基が結合する、というように枝分か
れ構造を有する複数の有機基が樹枝状に順次規則的に結
合している構造(樹枝状構造)を有する分子である。
The dendritic molecule is, for example, an organic group having a branched structure (for example, Y-shape), which is a basic unit bonded to the core particle 21, and a branched structure (for example, Y-shape). A plurality of organic groups having a branched structure such that a group is bonded, and an organic group having the next branched structure (for example, a Y-shape) is bonded to an organic group having a branched structure (for example, a Y-shape). It is a molecule having a structure (dendritic structure) that is sequentially and regularly connected in a dendritic manner.

【0026】前記樹枝状分子は、具体的にはHawke
r,C.J.et al;J.Chem.Soc.,C
ommun.,1990年,1010頁、Tomali
a,D.A.et al;Angew.Chem.In
t.Ed.Engl.,29巻,138頁(199
0)、Hawker,C.J.et al;J.Am.
Chem.Soc.,112巻,7638頁(199
0)、Frechet,J.M.J.;Scienc
e,263巻1710頁(1994)、あるいは柿本正
明;化学,50巻,608頁(1995)等の文献に詳
述されているデンドリマーに代表される概念である。よ
り厳密に定義すればフォーカルポイント(分岐の開始
点)が特定でき、該フォーカルポイントから分子末端に
向かって分子鎖をたどった場合にフォーカルポイント以
外の分岐点を最低一つ通過する分子末端が最低1つ存在
する分子構造である。
The dendritic molecule is specifically Hawke
r, C.I. J. et al; Chem. Soc. , C
ommun. , 1990, p. 1010, Tomali
a, D. A. et al; Angew. Chem. In
t. Ed. Engl. 29, 138 (199
0), Hawker, C .; J. et al; Am.
Chem. Soc. 112, 7638 (199
0), Frechet, J. et al. M. J. ; Sciencec
e, 263, 1710 (1994), or Kakimoto Masaaki; Chemistry, 50, 608 (1995). If defined more strictly, the focal point (the starting point of branching) can be specified. When the molecular chain is traced from the focal point toward the molecular end, the molecular end that passes at least one branch point other than the focal point is the minimum. It is one existing molecular structure.

【0027】粒子21は前記樹枝状分子のフォーカルポ
イント(焦点的位置)に結合していることが、粒子21
間の間隔を一定にする上で望ましい。
The fact that the particles 21 are bound to the focal point (focal position) of the dendritic molecule is as follows.
It is desirable to make the interval between them constant.

【0028】また前記芳香族化合物22は粒子1表面に
共有結合、配位結合、イオン結合などにより結合してい
ることが望ましい。
Preferably, the aromatic compound 22 is bonded to the surface of the particle 1 by a covalent bond, a coordinate bond, an ionic bond, or the like.

【0029】また芳香族化合物22は、極性基を末端に
有することが望ましく、前記極性基が最も外側に位置す
ることが望ましい。このような極性基があると、基板に
極性吸着しやすく基板上に粒子21の存在しない欠陥を
低減することができる。また、粒子21間の相互作用も
溶媒がなくなった場合には大きいため、欠陥低減、さら
には粒子間隔の制御にも好ましい。
The aromatic compound 22 preferably has a polar group at the terminal, and the polar group is preferably located on the outermost side. The presence of such a polar group makes it easier to polar-adsorb to the substrate, and can reduce defects in which the particles 21 do not exist on the substrate. Further, the interaction between the particles 21 is large when the solvent disappears, so that it is also preferable for reducing defects and controlling the particle interval.

【0030】前記極性基としては−COOH、−OH、
−NH、−SOH、−SH、−CONH、−PO
H等が挙げられ、特に−COOHが粒子間の相互作用
を大きくできる点で望ましい。
The polar groups include -COOH, -OH,
-NH 2, -SO 3 H, -SH , -CONH 2, -PO
3 CO and the like, and particularly preferred is -COOH because it can increase the interaction between particles.

【0031】さらに前記極性基は芳香環に結合したもの
であることが粒子間の距離をさらに一定にできるためよ
り望ましい。
Further, it is more preferable that the polar group is bonded to an aromatic ring since the distance between particles can be further constant.

【0032】芳香族化合物22としては具体的に以下の
化合物(1)〜(6)が であるため望ましい。化合物
(1)〜(6)においてはXの部分において粒子21と
結合していることが望ましい。化合物(1)〜(6)に
おいて、特に望ましくは(2)であり粒子21間の間隔
の制御が良くなされる。
Specific examples of the aromatic compound 22 include:
Compounds (1) to (6) Is desirable. Compound
In (1) to (6), the particles 21 in the X portion
It is desirable that they are combined. Compounds (1) to (6)
It is particularly desirable to set (2) as the distance between the particles 21.
Is better controlled.

【化1】 Embedded image

【化2】 Embedded image

【化3】 Embedded image

【化4】 Embedded image

【化5】 Embedded image

【化6】 (ただし化学式(1)乃至(6)においてXは、−S
H、−NH、−COOH、−OH、−SOH、−C
ONH、−POH、−PR(Rはアルキル基)か
ら選ばれる少なくとも一種、Yは−H、−NH、−C
OOH、−OH、−SOH、アルキル基、アリール基
から選ばれる少なくとも一種。) 本発明の記録媒体は例えば以下3種の方法で製造するこ
とができる。
Embedded image (However, in chemical formulas (1) to (6), X is -S
H, -NH 2, -COOH, -OH , -SO 3 H, -C
At least one selected from ONH 2 , —PO 3 H, and —PR 2 (R is an alkyl group), and Y is —H, —NH 2 , —C
OOH least one, -OH, -SO 3 H, an alkyl group, selected from an aryl group. The recording medium of the present invention can be manufactured, for example, by the following three methods.

【0033】第1の方法は、基板上に枝分かれ構造を有
する芳香族化合物で被覆されてなる情報記録能を有する
粒子からなる単粒子層を形成する成膜工程及び前記粒子
層を熱処理する工程を行うことにより記録媒体を得るも
のである。
The first method comprises a film-forming step of forming a single particle layer composed of particles having information recording ability, which is coated on a substrate with an aromatic compound having a branched structure, and a step of heat-treating the particle layer. By doing so, a recording medium is obtained.

【0034】第2の方法は、まず基板上に枝分かれ構造
を有する芳香族化合物で被覆されてなる粒子からなる単
粒子層を形成する成膜工程を行う。次に前記粒子層を熱
処理する工程を行う。次に基板表面からマスク材を付着
させる工程と、前記基板表面から粒子を除去する工程を
行う。前記基板の除去された粒子に対応する位置をエッ
チングにより穿孔して前記穿孔に情報記録能を有する材
料を充填する工程を行うことにより記録媒体を得るもの
である。
In the second method, first, a film forming step of forming a single particle layer composed of particles coated with an aromatic compound having a branched structure on a substrate is performed. Next, a step of heat-treating the particle layer is performed. Next, a step of attaching a mask material from the substrate surface and a step of removing particles from the substrate surface are performed. A recording medium is obtained by performing a step of perforating a position corresponding to the removed particles on the substrate by etching and filling the perforation with a material having an information recording ability.

【0035】第3の方法は、まず基板上に枝分かれ構造
を有する芳香族化合物で被覆されてなる粒子からなる単
粒子層を形成する成膜工程を行う。次に前記粒子層を熱
処理する工程を行う。次に前記基板表面の粒子の存在し
ない位置をエッチングにより穿孔して前記粒子が配列さ
れた位置と対応して円柱の配列された構造物を形成する
工程と、前記構造物表面から粒子を除去する工程と、前
記粒子が除去された前記構造物を原版として前記円柱に
対応する位置に穿孔を有する基板を形成する工程と、前
記穿孔に情報記録能を有する材料を充填する工程を行う
ことにより記録媒体を得るものである。
In the third method, first, a film forming step of forming a single particle layer composed of particles coated with an aromatic compound having a branched structure on a substrate is performed. Next, a step of heat-treating the particle layer is performed. Next, a step of perforating a position where no particles are present on the substrate surface by etching to form a structure in which columns are arranged corresponding to the positions where the particles are arranged, and removing the particles from the surface of the structure Recording by performing a step, a step of forming a substrate having a perforation at a position corresponding to the cylinder using the structure from which the particles have been removed as an original plate, and a step of filling the perforation with a material having an information recording ability. Get the medium.

【0036】上記第1〜第3の方法の成膜工程において
用いる粒子は、第1の方法においては粒子が情報記録能
を有する材料であるものを用いることが必要であるが、
第2及び第3の方法においては粒子が情報記録能を有す
る材料に限られず、例えばシリカ粒子、金属酸化物粒
子、ポリマー粒子、金属粒子などを用いることができ
る。
In the first method, the particles used in the film forming steps of the first to third methods need to be made of a material having an information recording ability in the first method.
In the second and third methods, the particles are not limited to a material having an information recording ability, and for example, silica particles, metal oxide particles, polymer particles, metal particles, and the like can be used.

【0037】本発明の製造方法の成膜工程において用い
る、枝分かれ構造を有する芳香族化合物を被覆した粒子
は、種々の方法、例えば粒子分散液に芳香族化合物を添
加するなどの方法で、コアとなる粒子に対して前述の枝
分かれ構造を有する芳香族化合物を結合させて得る。
The particles coated with the aromatic compound having a branched structure, which are used in the film forming step of the production method of the present invention, can be mixed with the core by various methods, for example, by adding the aromatic compound to the particle dispersion. The particles are obtained by bonding the above-mentioned aromatic compound having a branched structure to particles.

【0038】前記芳香族化合物は粒子の材質に応じたも
のを使用する。
The aromatic compound used is selected according to the material of the particles.

【0039】例えば貴金属からなる粒子に対しては末端
にイオウ原子を含む基がある枝分かれ芳香族化合物を用
いることが貴金属粒子と芳香族化合物の強い化学結合を
生成するため好ましい。
For example, for a particle made of a noble metal, it is preferable to use a branched aromatic compound having a group containing a sulfur atom at the terminal, since a strong chemical bond between the noble metal particle and the aromatic compound is generated.

【0040】シリカやアルミナ、チタニアなどの酸化物
粒子については、粒子は酸化物の水酸基で覆われている
ため、それに吸着しやすい官能基を有する枝分かれ芳香
族化合物が好ましい。例えばチタニアでは末端にカルボ
キシル基を有する枝分かれ芳香族化合物が好ましい。
As for oxide particles such as silica, alumina and titania, since the particles are covered with the hydroxyl groups of the oxide, a branched aromatic compound having a functional group which is easily adsorbed on the particles is preferable. For example, in the case of titania, a branched aromatic compound having a terminal carboxyl group is preferable.

【0041】ニッケルやコバルトなど磁性媒体粒子など
では遷移金属と配位結合しやすい、末端にリン原子を有
する基を持つ枝分かれ芳香族化合物が好ましい。
In magnetic medium particles such as nickel and cobalt, a branched aromatic compound having a group having a phosphorus atom at a terminal, which is easily coordinated with a transition metal, is preferred.

【0042】ポリスチレン粒子などの有機粒子はビニル
基を有する枝分かれ芳香族化合物をグラフト重合するこ
とが好ましい。
Organic particles such as polystyrene particles are preferably graft-polymerized with a branched aromatic compound having a vinyl group.

【0043】本発明の製造方法の成膜工程において用い
る基板は種々のものを用いることができる。基板には−
OH、−COOH、−NH、−CONH、−SO
H、−POHなどの極性基が形成されていることが望
ましい。前記極性基としては基板の材質自体に基づくも
のを用いてもよいし、基板に別の化合物を化学結合もし
くは物理的に吸着して用いてもよい。特にLangmu
ir−Blodgett(LB)法などの方法を用いて
極性基を形成することも有効である。
Various substrates can be used in the film forming step of the manufacturing method of the present invention. On the substrate-
OH, -COOH, -NH 2, -CONH 2, -SO 3
H, it is desirable that the polar groups such as -PO 3 H is formed. As the polar group, a substance based on the material of the substrate itself may be used, or another compound may be chemically bonded or physically adsorbed on the substrate. Especially Langmu
It is also effective to form a polar group using a method such as the ir-Blodgett (LB) method.

【0044】本発明の製造方法の成膜工程における成膜
は、前記粒子を溶液中で基板上に吸着させる工程、もし
くは前記粒子を分散した溶液を基板に例えばスプレーや
回転塗布等の方法で塗布する工程により行うことができ
る。また粒子間の親和力が小さく、均一な単分子膜が得
られにくい場合は、粒子を水面上に展開し、その面積を
仕切りで減少させて、掬い取るというLB法と同様の方
法も用いることができる。
The film formation in the film formation step of the production method of the present invention may be carried out by a step of adsorbing the particles on a substrate in a solution, or by applying a solution in which the particles are dispersed to the substrate by, for example, spraying or spin coating. Can be performed. When the affinity between particles is small and a uniform monomolecular film is difficult to obtain, it is also possible to use a method similar to the LB method in which the particles are spread on the water surface, the area is reduced by a partition, and the particles are scooped. it can.

【0045】さらに基板上の余分の粒子は溶媒で洗うこ
とにより除去し、単粒子層を形成する。ただし、基板を
溶液に漬けるには多量の溶液が必要であるので、回転塗
布したりスプレーしたりして製膜することもできる。
Further, extra particles on the substrate are removed by washing with a solvent to form a single particle layer. However, since a large amount of solution is required to immerse the substrate in the solution, a film can be formed by spin coating or spraying.

【0046】前記成膜工程の後に行われる熱処理は結合
している芳香族化合物が粒子から離れたり、副反応を生
じないような温度での処理が望ましく、一般的には窒素
下において100℃〜200℃の温度で行うことが望ま
しい。
The heat treatment performed after the film-forming step is preferably performed at a temperature at which the bonded aromatic compound does not separate from the particles or cause a side reaction. It is desirable to carry out at a temperature of 200 ° C.

【0047】熱処理工程の後に反応性イオンエッチング
(RIE)等で粒子を若干削って、粒子間隔を開ける工
程を行うことが望ましい。
After the heat treatment step, it is desirable to perform a step of slightly shaving the particles by reactive ion etching (RIE) or the like to increase the distance between the particles.

【0048】[0048]

【実施例】以下、実施例により本発明をさらに詳細に説
明する。 [実施例1]図3に本実施例で示す電荷記録を行う記録
媒体30の断面図を示した。
The present invention will be described in more detail with reference to the following examples. [Embodiment 1] FIG. 3 is a sectional view of a recording medium 30 for performing charge recording shown in this embodiment.

【0049】光学研磨された直径120mm、厚さ1.
2mmのガラスディスク31上に電極層32としてアル
ミニウム層を500nmの膜厚で蒸着した。次に陽極酸
化により絶縁性無機物層(基板)33として酸化アルミ
ニウム層を5nmの膜厚で作成した。酸化アルミニウム
層の表面には極性基であるAl−OH結合が形成されて
いる。
Optically polished diameter 120 mm, thickness 1.
An aluminum layer having a thickness of 500 nm was deposited as an electrode layer 32 on a 2 mm glass disk 31. Next, an aluminum oxide layer having a thickness of 5 nm was formed as an insulating inorganic layer (substrate) 33 by anodic oxidation. Al-OH bonds, which are polar groups, are formed on the surface of the aluminum oxide layer.

【0050】次に、情報記録能を有する粒子である粒径
10nmの金微粒子の表面を、エタノール中で化学式
(7)で示される化合物で被覆して、金微粒子表面をカ
ルボキシル基で覆い、被覆金微粒子34を得た。
Next, the surface of gold fine particles having a particle diameter of 10 nm, which is a particle having information recording ability, is coated with a compound represented by the chemical formula (7) in ethanol, and the surface of the gold fine particles is covered with a carboxyl group. Gold fine particles 34 were obtained.

【化7】 Alに結合したOH基とカルボキシル基には強い親和性
がある。上記被覆金微粒子34をエタノールに分散して
分散液を得、分散液中に上記ディスクを10分間浸けた
後、取り出し、エタノールで洗浄して余分の被覆金微粒
子を除去した。80℃で1時間乾燥後、150℃で2時
間熱処理し、微粒子層35を得た。
Embedded image OH groups and carboxyl groups bonded to Al have strong affinity. The coated gold fine particles 34 were dispersed in ethanol to obtain a dispersion, and the disk was immersed in the dispersion for 10 minutes, taken out, and washed with ethanol to remove extra coated gold fine particles. After drying at 80 ° C. for 1 hour, heat treatment was performed at 150 ° C. for 2 hours to obtain a fine particle layer 35.

【0051】乾燥後、得られた微粒子層35をAFMで
観測したところ、一面に被覆金微粒子34の単粒子層が
1層成膜されており、微粒子間の間隔は2nmとほぼ一
定であった。また、微粒子がない欠陥はほとんど見られ
なかった。
After drying, the obtained fine particle layer 35 was observed by AFM. As a result, a single particle layer of the coated fine gold particles 34 was formed on one surface, and the distance between the fine particles was almost constant at 2 nm. . Also, almost no defects without fine particles were observed.

【0052】次に絶縁性の保護層36として酸化シリコ
ンを膜厚10nmでスパッタ製膜した。さらにその上に
潤滑剤層を作成し記録媒体30を得た。
Next, a silicon oxide film having a thickness of 10 nm was formed as an insulating protective layer 36 by sputtering. Further, a lubricant layer was formed thereon to obtain a recording medium 30.

【0053】この記録媒体を用いて図4で示す記録再生
装置で記録再生の実験を行った。図4(a)に示すように
記録媒体41はモーター42により回転する様設置され
ている。記録媒体41表面付近には記録および読み出し
のためのヘツド43が設置されている。図4(b)に示
すようにヘッド43はスライダ部44、電圧を印可する
ための直径50nmの微小電極45、および電荷を読み
出すための微小FETセンサー46からなる。
Using this recording medium, a recording / reproducing experiment was performed with the recording / reproducing apparatus shown in FIG. As shown in FIG. 4A, the recording medium 41 is installed so as to be rotated by a motor 42. A head 43 for recording and reading is provided near the surface of the recording medium 41. As shown in FIG. 4B, the head 43 includes a slider portion 44, a minute electrode 45 having a diameter of 50 nm for applying a voltage, and a minute FET sensor 46 for reading out electric charges.

【0054】記録媒体41を4000rpmで回転させ
ながら微小電極45と記録媒体の電極層との間に高電圧
をパルス状に印可して被覆金微粒子の金微粒子に電子を
注入して、電荷による記録をした。
While rotating the recording medium 41 at 4000 rpm, a high voltage is applied in a pulsed manner between the microelectrode 45 and the electrode layer of the recording medium to inject electrons into the coated gold fine particles, thereby recording by electric charge. Did.

【0055】次に記録時と同様に4000rpmで回転
させながら微小FETセンサー46で電荷の存在を電界
強度の変化で読みだした。1インチ平方当たり250ギ
ガビットの信号がCN比30dBで読み出すことができ
十分なコントラストが得られた。
Next, while rotating at 4000 rpm in the same manner as during recording, the presence of electric charge was read by the change in the electric field intensity by the minute FET sensor 46. A signal of 250 gigabits per square inch could be read at a CN ratio of 30 dB, and sufficient contrast was obtained.

【0056】さらに微小電極45と記録媒体の電極層と
の間に逆電圧を印可することにより記録を消去すること
ができた。 [比較例1]化合物(7)を用いる代わりに化合物
(8)を用いることを除いては実施例1と同様にして記
録媒体を作成した。
Further, the recording could be erased by applying a reverse voltage between the microelectrode 45 and the electrode layer of the recording medium. Comparative Example 1 A recording medium was prepared in the same manner as in Example 1 except that the compound (8) was used instead of the compound (7).

【化8】 得られた微粒子層をAFMで観測したところ一面に被覆
金微粒子の単粒子層が1層製膜されているが、微粒子間
の間隔は実施例1に比べると不ぞろいであった。
Embedded image Observation of the resulting fine particle layer by AFM revealed that a single particle layer of coated gold fine particles was formed on one surface, but the spacing between the fine particles was uneven compared to Example 1.

【0057】この記録媒体を用いて実施例1と同様の記
録再生装置で記録再生実験を行った。記録媒体を400
0rpmで回転させながら微小電極45と記録媒体の電
極層との間に高電圧をパルス状に印可して被覆金微粒子
に電子を注入して、電荷による記録をした。
Using this recording medium, a recording / reproducing experiment was performed with the same recording / reproducing apparatus as in the first embodiment. 400 recording media
While rotating at 0 rpm, a high voltage was applied in a pulsed manner between the microelectrode 45 and the electrode layer of the recording medium to inject electrons into the coated gold fine particles, thereby recording by electric charge.

【0058】次に記録時と同様に4000rpmで回転
させながら微小FETセンサー46で電荷の存在を電界
強度の変化で読みだした。1インチ平方当たり250ギ
ガビツトの信号がCN比15dBでしか読み出すことが
できず十分なコントラストが得られなかった。 [実施例2]図5に本実施例で示す記録媒体50の断面
図を示した。
Next, while rotating at 4000 rpm in the same manner as during recording, the presence of electric charge was read by the change in the electric field intensity by the minute FET sensor 46. A signal of 250 gigabits per square inch could be read out only at a CN ratio of 15 dB, and sufficient contrast could not be obtained. [Embodiment 2] FIG. 5 is a sectional view of a recording medium 50 shown in this embodiment.

【0059】シリコンウエハ51の表面に磁性粒子積層
のための基板52として酸化シリコンをスパッタ蒸着法
で100nm積層した。
Silicon oxide was deposited on the surface of a silicon wafer 51 as a substrate 52 for depositing magnetic particles by sputtering to a thickness of 100 nm.

【0060】つぎに、粒径5nmの金微粒子の表面をエ
タノール中で化合物(9)で示される枝分かれ構造を有
する芳香族化合物で被覆して被覆金微粒子を得た。
Next, the surface of the gold fine particles having a particle diameter of 5 nm was coated with an aromatic compound having a branched structure represented by the compound (9) in ethanol to obtain coated gold fine particles.

【化9】 次に基板52を水に浸漬し、上記被覆金微粒子のエタノ
ール分散液を、水面上に静かに滴下して微粒子を水面に
浮かべた後、仕切り板で静かに圧縮した。表面圧計が1
5dyn/cmになった時点で圧縮をやめ、上記基板5
2を静かに水面下から引き上げて基板52表面に被覆金
微粒子の単粒子層を成膜した。80℃で1時間乾燥後、
150℃で2時間熱処理した。
Embedded image Next, the substrate 52 was immersed in water, and the ethanol dispersion of the coated fine gold particles was gently dropped on the water surface to float the fine particles on the water surface, and then gently compressed with a partition plate. Surface pressure gauge is 1
When the pressure reaches 5 dyn / cm, the compression is stopped and the substrate 5
2 was gently pulled up from below the water surface to form a single particle layer of coated fine gold particles on the surface of the substrate 52. After drying at 80 ° C for 1 hour,
Heat treatment was performed at 150 ° C. for 2 hours.

【0061】得られた被覆金微粒子層をAFMで観測し
たところ、一面に被覆金微粒子の単粒子層が1層製膜さ
れており、粒子間隔はほぼ一定であった。
When the obtained coated gold fine particle layer was observed by AFM, a single particle layer of coated gold fine particles was formed on one surface, and the particle interval was almost constant.

【0062】次にRIEで被覆金微粒子をマスクとして
基板52をエッチングして、クロロホルム中で超音波処
理することにより被覆金微粒子を除去した。このときの
基板52の平面図を図6に示す。基板52においては被
覆金微粒子があったところ以外に孔54が形成された。
前記孔54を核にして磁性体53としてCoPtCrを
スパッタ法によって成膜し、300℃で熱処理した。こ
れにより前記孔54を核にして平均6nm間隔で配列し
た平均直径6nmの磁性粒子結晶が分散された記録媒体
を形成した。磁性結晶粒子間には不純物による分離層5
5が形成されている。
Next, the substrate 52 was etched by RIE using the coated gold fine particles as a mask and subjected to ultrasonic treatment in chloroform to remove the coated gold fine particles. FIG. 6 shows a plan view of the substrate 52 at this time. Holes 54 were formed on the substrate 52 except where the coated gold particles were present.
A film of CoPtCr was formed as a magnetic material 53 by the sputtering method using the holes 54 as nuclei, and heat-treated at 300 ° C. As a result, a recording medium in which magnetic particle crystals having an average diameter of 6 nm and arranged at an average interval of 6 nm with the holes 54 as nuclei were dispersed was formed. Separation layer 5 due to impurities between magnetic crystal grains
5 are formed.

【0063】この記録媒体を用いて磁気ヘッドによる書
き込み、GMRヘッドによる読み出しによって記録再生
実験を行ったところ、1インチ平方当たり400ギガビ
ットの信号がCN比25dBで読み出すことができた。 [比較例2]化合物(9)を用いる代わりに化合物(1
0)を用いることを除いては実施例1と同様にして記録
媒体を作成した。
Using this recording medium, a recording / reproducing experiment was performed by writing with a magnetic head and reading with a GMR head. As a result, a signal of 400 gigabits per square inch could be read with a CN ratio of 25 dB. [Comparative Example 2] Instead of using compound (9), compound (1)
A recording medium was prepared in the same manner as in Example 1 except that 0) was used.

【化10】 得られた被覆金微粒子膜をAFMで観測したところ、一
面に微粒子が成膜されているが、被覆金微粒子の間隔は
実施例2に比べて不ぞろいであった。
Embedded image When the obtained coated gold fine particle film was observed by AFM, fine particles were formed on one surface, but the distance between the coated gold fine particles was more irregular than in Example 2.

【0064】次にRIEで被覆金微粒子をマスクとして
基板をエッチングして、クロロホルム中で超音波処理す
ることにより被覆金微粒子を除去した。基板においては
被覆金微粒子があったところ以外に孔が形成された。前
記孔を核として、磁性体であるCoPtCrをスパッタ
法によって成膜した後、300℃で熱処理した。これに
より前記孔を核として平均6nm間隔で配列した平均直
径6nmの磁性粒子結晶が分散された記録媒体を形成し
た。磁性結晶粒子間には不純物による分離層が形成され
ていた。その結晶粒の粒径の分散度は実施例2と比べて
3倍ほど大きかった。 この記録媒体を用いて実施例2
と同様に記録再生実験を行ったところ、1インチ平方当
たり400ギガビットの信号がCN比10dBでしか読
み出すことができず、実施例2よりノイズの多い記録媒
体が得られた。
Next, the substrate was etched by RIE using the coated gold fine particles as a mask and subjected to ultrasonic treatment in chloroform to remove the coated gold fine particles. Holes were formed in the substrate except where the coated gold particles were. Using the holes as nuclei, a film of CoPtCr as a magnetic material was formed by a sputtering method, and then heat-treated at 300 ° C. As a result, a recording medium was formed in which magnetic particle crystals having an average diameter of 6 nm and having the holes as nuclei and arranged at an average interval of 6 nm were dispersed. Separation layers of impurities were formed between the magnetic crystal grains. The degree of dispersion of the crystal grains was about three times as large as that of Example 2. Example 2 using this recording medium
When a recording / reproducing experiment was carried out in the same manner as in Example 1, a 400 gigabit signal per square inch could be read only at a CN ratio of 10 dB, and a recording medium with more noise than in Example 2 was obtained.

【0065】[0065]

【発明の効果】以上説明したように、本発明に係る記録
媒体および記録媒体の製造方法において、情報記録能を
有する粒子を孤立化して存在させると同時に前記粒子の
間隔をほぼ一定にして、記録密度を高くすることができ
かつ媒体ノイズを抑えることが可能となる。
As described above, in the recording medium and the method of manufacturing the recording medium according to the present invention, the particles having the information recording ability are made to exist in isolation, and at the same time, the distance between the particles is made substantially constant. The density can be increased and the medium noise can be suppressed.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明の記録媒体の概略を示す断面図。FIG. 1 is a sectional view schematically showing a recording medium of the present invention.

【図2】 本発明に係る芳香族化合物で被覆されてなる
粒子の一例を示す概略図。
FIG. 2 is a schematic view showing an example of particles coated with the aromatic compound according to the present invention.

【図3】 実施例1で示す記録媒体の断面図。FIG. 3 is a cross-sectional view of the recording medium according to the first embodiment.

【図4】 実施例1で示す記録再生装置の概略図。FIG. 4 is a schematic diagram of the recording / reproducing apparatus shown in the first embodiment.

【図5】 実施例2で示す記録媒体の断面図。FIG. 5 is a cross-sectional view of a recording medium according to a second embodiment.

【図6】 実施例2で示す記録媒体の一工程を示す平面
図。
FIG. 6 is a plan view showing one process of a recording medium shown in a second embodiment.

【符号の説明】[Explanation of symbols]

11…基板 12…記録層 13…粒子 14…枝分かれ構造を有する芳香族化合物 21…粒子 22…芳香族化合物 23…芳香族化合物の分子 30…記録媒体 31…ガラスディスク 32…電極層 33…絶縁性無機物層(基板) 34…被覆金微粒子 35…微粒子層 36…保護層 41…記録媒体 42…モーター 43…ヘツド 44…スライダ部 45…微小電極 46…微小FETセンサー 50…記録媒体 51…シリコンウエハ 52…基板 53…磁性体 54…孔 55…分離層 DESCRIPTION OF SYMBOLS 11 ... Substrate 12 ... Recording layer 13 ... Particle 14 ... Aromatic compound having a branched structure 21 ... Particle 22 ... Aromatic compound 23 ... Aromatic compound molecule 30 ... Recording medium 31 ... Glass disk 32 ... Electrode layer 33 ... Insulating property Inorganic layer (substrate) 34 ... Coated fine gold particles 35 ... Fine particle layer 36 ... Protective layer 41 ... Recording medium 42 ... Motor 43 ... Head 44 ... Slider part 45 ... Microelectrode 46 ... Micro FET sensor 50 ... Recording medium 51 ... Silicon wafer 52 ... substrate 53 ... magnetic material 54 ... hole 55 ... separation layer

フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) G11B 7/24 516 G11B 7/24 516 7/26 531 7/26 531 // G11B 5/65 5/65 5/851 5/851 Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat II (reference) G11B 7/24 516 G11B 7/24 516 7/26 531 7/26 531 // G11B 5/65 5/65 5/851 5/851

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 基板と、前記基板上に形成された情報記
録能を有する複数の粒子を備える記録層とを少なくとも
備える記録媒体において、前記粒子表面は枝分かれ構造
を有する芳香族化合物で被覆されてなることを特徴とす
る記録媒体。
1. A recording medium comprising at least a substrate and a recording layer formed on the substrate and having a plurality of particles having information recording ability, wherein the particle surface is coated with an aromatic compound having a branched structure. A recording medium characterized in that:
【請求項2】 前記芳香族化合物は、芳香環に結合した
極性基を有することを特徴とする請求項1記載の記録媒
体。
2. The recording medium according to claim 1, wherein the aromatic compound has a polar group bonded to an aromatic ring.
【請求項3】 基板上に枝分かれ構造を有する芳香族化
合物で被覆されてなる粒子を備える粒子層を形成する成
膜工程と、前記粒子層を熱処理する工程とを備えること
を特徴とする記録媒体の製造方法。
3. A recording medium comprising: a film forming step of forming a particle layer including particles coated on a substrate with an aromatic compound having a branched structure; and a heat treatment of the particle layer. Manufacturing method.
JP37093099A 1999-12-27 1999-12-27 Recording medium and method for manufacturing the same Pending JP2001184744A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP37093099A JP2001184744A (en) 1999-12-27 1999-12-27 Recording medium and method for manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP37093099A JP2001184744A (en) 1999-12-27 1999-12-27 Recording medium and method for manufacturing the same

Publications (1)

Publication Number Publication Date
JP2001184744A true JP2001184744A (en) 2001-07-06

Family

ID=18497843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP37093099A Pending JP2001184744A (en) 1999-12-27 1999-12-27 Recording medium and method for manufacturing the same

Country Status (1)

Country Link
JP (1) JP2001184744A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004107040A1 (en) * 2003-05-28 2004-12-09 Matsushita Electric Industrial Co., Ltd. Information recording medium and its manufacturing method, recording/reproducing method, and optical information recording/reproducing device
US6936403B2 (en) 2001-12-12 2005-08-30 Fuji Photo Film Co., Ltd. Recording medium

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6936403B2 (en) 2001-12-12 2005-08-30 Fuji Photo Film Co., Ltd. Recording medium
WO2004107040A1 (en) * 2003-05-28 2004-12-09 Matsushita Electric Industrial Co., Ltd. Information recording medium and its manufacturing method, recording/reproducing method, and optical information recording/reproducing device
JPWO2004107040A1 (en) * 2003-05-28 2006-07-20 松下電器産業株式会社 Information recording medium, manufacturing method thereof, recording / reproducing method, and optical information recording / reproducing apparatus

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