JP2001184324A - Device and method for supporting communication and recording medium with stored program for supporting communication - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device and a method for supporting communication and a recording medium with stored program for supporting communication, with which online communication is easily enabled between an existent host computer and each of communication object devices without altering the existent communication interface of each of communication object devices. SOLUTION: Concerning a communication supporting device 1 positioned between a host computer 11 and each of communication object devices 12, this device has respective communication parameter setting files 104, format conversion definition files 105 and message conversion definition files 106 on the sides of the host computer 11 and the device 12 and a message is converted to the communication form of the opposite side by a format converting part 102 and a message converting part 103 and transmitted by a communication control means 101.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a communication support apparatus for performing online communication between a host computer and a semiconductor or liquid crystal manufacturing apparatus / inspection apparatus in a semiconductor or liquid crystal manufacturing factory.

[0002]

2. Description of the Related Art In the semiconductor industry, Semiconductor
to Equipment and Material
"SE published by International
MISTANDARDS (Semiconductor
Equipment and Materials
International Standard) is a standard of the control method, and all devices such as a semiconductor manufacturing device and a semiconductor inspection device, a host computer operated in each factory, and the like have specifications based on this standard. However, this "SEMI STANDAR"
DS) standard, but since this standard can be freely extended and its own specifications can be constructed, each manufacturer usually has its own communication specifications for each device. It is. As a result, the specifications of each device,
The specifications of the host computer will be different. Within each factory, it is essential to bring the semiconductor manufacturing equipment and semiconductor inspection equipment online with the host computer that operates the entire factory and monitor the status of each equipment and monitor the progress of each process in an integrated manner. As described above, the device and the host computer have communication protocol, data size / type mismatch, message mismatch, etc., so at present, every time there is a request for online, the device manufacturer,
The communication interface of each device had to be modified to deal with it.

That is, as shown in FIG. 12, each device usually has a communication interface (121) of the standard specification of the device manufacturer, but a separate host is provided for each factory (Factory A, Factory B). Since the computers 122 and 123 are present and need to be adapted to the specifications of the respective host computers, the device maker uses the host computer (122) of the factory A and the host computer (123) of the factory B to go online. In addition, modified units (124, 125) are provided by modifying the communication interface (121) provided as a standard in the device itself.

[0004] Modification of the existing communication interface requires a lot of labor and time, and it is difficult to keep the most required quality of each device constant, and the reliability of the device itself is lowered. If the reliability of semiconductor manufacturing equipment and semiconductor inspection equipment deteriorates due to the on-line communication within the factory, the quality of the semiconductors handled will be adversely affected. You lose your original meaning.

[0005]

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems, and does not modify the existing communication interface of each device, and allows the existing host computer and each device to remain unchanged. It is an object of the present invention to provide a communication support device, a communication support method, and a recording medium storing a program for supporting communication, which can easily perform online communication between the devices.

[0006]

In order to achieve the above object, a communication support apparatus according to the present invention provides an online communication between a host computer and a communication target apparatus having a communication interface having a different communication specification from the host computer. A communication support device connected between the host computer and the communication target device, wherein the communication control unit performs communication between the host computer and the communication target device; and A communication parameter definition file defining communication parameters to be referred to when communicating with the communication target device; a unit for converting a format of a signal received by the communication control unit; and a unit for converting the format by the format conversion unit. Format that defines the format conversion rules to be referenced A conversion definition file, a message conversion unit for converting a message in the signal whose format has been converted by the format conversion unit, and a message conversion rule defining a message conversion rule to be referred to when the message conversion unit converts the message. Having a definition file, and converting a signal received from the host computer or the communication target device via the communication control unit into a format and a message of the other party by the format conversion unit and the message conversion unit. A signal is transmitted to the other party by the control means.

Further, the communication parameter definition file,
The format conversion definition file and the message conversion definition file include a definition file for the host computer and a definition file for the communication target device.

[0008] Further, when the format conversion means and the message conversion means refer to the format conversion definition file and the message conversion definition file, they have a shared memory which is referred to and used.

[0009] Further, there is provided a registration / change means for registering necessary items in the communication parameter definition file, the format conversion definition file, and the message conversion definition file, and for changing and deleting the registered items.

[0010] Further, there is provided a means for storing a history of transmission and reception between the host computer and the communication target device by the communication control means.

[0011] Further, there is provided a means for storing a conversion history by the format conversion means and the message conversion means.

According to a communication support method of the present invention, in a method for online communication between a host computer and a communication target device having a communication interface having a different communication specification from the host computer, a signal transmitted from the host computer or the communication target device is transmitted. Receiving, converting the format of the received signal using a format conversion definition on the receiving side, and converting a message in the received signal into a signal for conversion using the message conversion definition on the receiving side. Converting the conversion signal into a format using a format conversion definition on the transmission side, and converting the message in the conversion signal into a signal for transmission using the message conversion definition on the transmission side. And transmitting the signal converted for transmission to the transmission destination. Characterized by a step of Shin.

A storage medium storing a program for supporting communication according to the present invention includes a step of receiving a signal transmitted from a host computer or a communication target device, and a step of converting the received signal using a format conversion definition of a receiving side. Converting the format of the received signal, converting the message in the received signal into a signal for conversion using the message conversion definition of the receiving side, the signal for conversion, using the format conversion definition of the transmitting side Format conversion; converting the message in the conversion signal into a signal for transmission by using a message conversion definition of a transmission side; and transmitting the signal converted for transmission to the destination. It is characterized by the following.

[0014]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram of the present invention.
Reference numeral 11 denotes a host computer in a semiconductor / liquid crystal manufacturing factory, and reference numeral 12 denotes a semiconductor manufacturing device having a communication interface. The communication support device 1 of the present invention is disposed between the host computer 11 and the semiconductor manufacturing device 12.
Each of the host computer 11 and the semiconductor manufacturing apparatus 12 has a communication interface based on “SEMI STANDARDS”, but each has a unique specification extended by each manufacturer.

The communication support apparatus 1 according to the present invention controls a communication between the host computer 11 and the semiconductor manufacturing apparatus 12 by using a communication control section 101. When the communication control section 101 communicates with the host computer 11 and the semiconductor manufacturing apparatus 12, A communication parameter definition file 104 to be referred to, and a format conversion unit 10 that performs format conversion of a signal received from the host computer 11 or the semiconductor manufacturing apparatus 12 by the communication control unit 101 according to the reception side or the transmission side.
2. Format conversion definition file 105 to be referred to at the time of format conversion by the format conversion unit 102
And a message conversion unit 103 for converting a message in the format-converted signal.
03 includes a message definition conversion file 106 that is referred to at the time of message conversion, and a shared memory file 107 that is commonly referred to and used by the format conversion unit 102 and the message conversion unit 103. A communication log file 108 for storing a communication history by the communication control unit 101;
And a log file 109 for storing each conversion processing history by the message conversion unit 103. Also, each communication parameter definition file 104, format conversion definition file 105, message conversion definition file 106
And a registration / change unit 110 for registering the definition contents and the like, and changing / deleting as necessary.

The communication control unit 101 performs communication using the communication parameters in the communication parameter definition file 104. The communication parameters include, for example, protocols and the like, and these definitions are defined in the communication parameter definition file 104 by the registration / change unit 110 in advance. This communication parameter definition file 104 is a file 1041 for defining communication parameters on the host computer 11 side.
And 1042 for defining communication parameters on the semiconductor manufacturing apparatus 12 side.

The format converter 102 converts a message structure and a data type between each other in order to perform communication between devices having different message systems. Format conversion includes, for example, List format and S
There are mutual conversion of a truct format, conversion of a data type (binary number, binary, truth value, ASCII, JIS-8, etc.), conversion of a length byte, and the like. It is defined in the conversion definition file 105. The format conversion definition file 105 is composed of a file 1051 having definitions on the host computer 11 side and a file 1052 having definitions on the semiconductor manufacturing apparatus 12 side.

The message converter 103 converts the message into a message that can be understood by the partner device. For example, a signal expressed by one message on the host computer 11 side may be expressed by a plurality of messages on the semiconductor manufacturing apparatus 12 side, and these conversion rules are defined in the message conversion definition file 106 in advance. Like the other definition files, the message conversion definition file 106 includes a file 1061 having definitions on the host computer 11 side and a file 1062 having definitions on the semiconductor manufacturing apparatus 12 side. 10
7 is a format conversion unit 102, a message conversion unit 1
Reference numeral 03 denotes a shared memory definition file that is commonly referred to, and defines, for example, variables of each type.

The communication log file 108 is stored between the communication support device 1 and the host computer 11 and between the communication support device 1 and the host computer 11.
The transmission history between the communication support apparatus 1 and the semiconductor manufacturing apparatus 12 is collected. The log file 109 collects the processing history of the communication support apparatus 1. For example, since the history when the processing of the format conversion unit 102 ends with an error or the like is collected, when an error occurs in the communication, at what point and what caused the error, debugging work, etc. Can be used.

FIG. 2A shows an example of the format conversion definition file 1052 on the semiconductor manufacturing apparatus 12 side.
For example, 2a1 indicates that the communication support apparatus 1 has received the message “S5F
When "1" is received, a response is required, and the transmitted binary 1 byte is stored in the shared memory variable ALCD.
And store an unsigned 1-byte integer in the shared memory variable AL
It is defined to be stored in the ID and to store 40 bytes of ASCII type in the shared memory variable ALTCX.

FIG. 2B shows the host computer 11.
Is an example of the format conversion definition file 1051 on the communication side.
5F1 ", a response is required, the value of the shared memory variable ALCD is taken out, added to 0x80, the result is converted to a binary type, and the shared memory variable ALI is sent.
The value of D is taken out to be an unsigned 1-byte integer type, the value of the shared memory variable ALTX is taken out, and the ASCII type
It is defined to be in the form of bytes.

FIG. 3A shows an example of the message conversion definition file 1062 on the semiconductor manufacturing apparatus 12 side. For example, reference numeral 3a1 denotes a host computer when the semiconductor manufacturing apparatus (12) receives the message "S5F1". 1
It is defined to convert a single message into a plurality of messages, that is, send “S5F1” and “S6F11” to one side.

FIG. 3B shows the host computer 11.
Is an example of the message conversion definition file 1061 on the side, for example, 3b1 defines that no processing is performed when the host computer 11 receives the message “S5F2”.

The communication parameter setting file 1041 on the host computer 11 side and the communication parameter setting file 1042 on the semiconductor manufacturing equipment side have SECS-I
Definition of protocols such as HSMS-SS, Device I
D, communication port, device configuration such as IP address, etc. are defined.

Each of these definition files (104, 10
5, 106), a standard one is initially registered in advance. If necessary, the user can add, modify, and register the definition contents of each file in the registration / update unit 110 via a user interface as shown in FIGS. 6 (a) to 6 (d). .

FIG. 6A shows “S5F” in the format conversion definition file 1052 on the semiconductor manufacturing apparatus 12 side.
It is a screen for editing the definition when "1" is received. Here, “TRANS” refers to the Send side (transmission side) or the Rec side.
This is an item for setting whether to be on the eave side (reception side), and here, the setting is on the reception side. "SECONDARY"
Is an item for setting whether or not a response is required. Here, the setting is that a response is required. "MON
"ITOR" is an item for setting whether or not the user needs to monitor the data of "S5F1". Here, the setting is such that monitor display is not required.
Below “$ LIST — 3 ...” is a part for editing the actual format conversion instruction. Both of them are checked on the screen, and the format conversion definition file 105
Is reflected in In the case of this designation, the definition of 2a1 in FIG. 2A is added to the format conversion definition file 1052 on the semiconductor manufacturing apparatus 12 side.

FIG. 6B shows “S5F1” in the message conversion definition file 1062 on the semiconductor manufacturing apparatus 12 side.
13 is a screen for editing a definition when a message is received. Here, “single SFTO multiple SF conversion definition” means that a single message is converted into a plurality of messages. In addition, there are “message bypass definition”, “fixed secondary reply definition”, “variable secondary reply definition”, “fixed period inquiry definition”, “message holding definition”, and the like. "Sa
"mple" indicates a description example in which a description method of the actual definition content is described.

FIG. 6 (c) is a screen for editing the model definition in the communication parameter definition file 1042 of the semiconductor manufacturing apparatus 12, and FIG. 6 (d) is a screen for editing the communication parameter definition file 1042 of the semiconductor manufacturing apparatus 12. This is a screen for editing the device definition of the device. As described above, the editing screen has been described with reference to the editing of each definition file on the semiconductor manufacturing apparatus 12 side. However, the editing of each definition file on the host computer 11 side can also be performed on the same screen.

In the following, referring to FIGS. 1 to 5, "S5F1" is transmitted from the semiconductor manufacturing apparatus (device ID = 0000) to the host computer (device ID = 0001), and the response indicates normal reception. The processing flow when the semiconductor manufacturing apparatus 12 receives “S5F2” will be described. First, the semiconductor manufacturing apparatus 12 shown in FIG.
Communication support device 1 that has received the List format signal shown in FIG.
(Step 1) searches for a definition corresponding to the format conversion definition file 1052 on the semiconductor manufacturing apparatus 12 side. In the case of this embodiment, the corresponding definition (2a1) is included in the format conversion definition file 1052 on the semiconductor manufacturing apparatus 12 side.
According to this definition, a binary 1 byte transmitted from the semiconductor manufacturing apparatus 12 is stored in the shared memory variable ALCD, an unsigned 1-byte integer is stored in the shared memory variable ALID, and an ASCII 40 byte is stored. It is stored in the shared memory variable ALTX. As a result, the signal in the List format is converted into the Struct format regardless of the type of the code or the like.

Next, message conversion is performed. The communication support apparatus 1 searches for a definition corresponding to the message conversion definition file 1062 on the semiconductor manufacturing apparatus 12 side. In the case of the present embodiment, since the corresponding definition (3a1) exists in the message conversion definition file 1062 of the semiconductor manufacturing apparatus 12, the message is converted according to this definition. 3a1
As described above, “S5F
It is defined that when receiving “1”, two messages “S5F1” and “S6F11” are sent to the host computer 11. Based on the definition 3a1, a definition corresponding to the first message “S5F1” is searched in the format conversion definition file 1051 on the host computer 11 side. In the case of this embodiment, the relevant definition (2b
According to this definition, the communication support device 1 received from the semiconductor device 12 fetches the value in the shared memory variable ALCD stored according to the definition 2a1 and 0x8
0 is added, the result is set to a binary type, the value in the shared memory variable ALID is extracted, the value is set to an unsigned 1-byte integer type, and the value in the shared memory variable ALTX is extracted.
ASCII type 40 bytes. As a result, the structure is converted from the Struct format irrespective of the type of code or the like to the List format conscious of the type of code or the like.
1 (step 2). At this time, the data transmitted to the host computer 11 is List List in FIG.
Format.

On the host computer 11 side, "S5F
When "1" is normally received, "S5F2" is returned to the communication support apparatus 1 (step 3). The communication support apparatus 1 transmits the data “S5F” shown in FIG.
When "2" is received, a corresponding definition is searched for in the format conversion definition file 1051 on the host computer 11 side. In the case of the present embodiment, since there is a corresponding definition (2b2), this definition is followed. 2b2 defines that when “S5F2” is received, one binary byte is stored in the shared memory variable ACKC5, and no response is required. Next, a definition corresponding to the message conversion definition file 1061 on the host computer 11 side is searched. In the case of the present embodiment, since there is a corresponding definition (3b1), this definition is followed. 3b1 is transmitted from the host computer 11 to "S
If "5F2" is received, nothing is defined. The communication support device 1 transmits the next message “S6F1
In order to transmit “1”, a corresponding definition is searched for in the format conversion definition file 1051 on the host computer 11 side. In the case of the present embodiment, since the corresponding definition (2b3) exists, according to this definition, the binary type 0, the unsigned 1-byte integer 100, the unsigned 2-byte integer 1, and the value of the shared memory variable ALID are extracted. , 0x100000
List in the form of an unsigned 4-byte integer type
The data is converted into a structural form and transmitted to the host computer 11 (step 4). The data structure at this time is shown in FIG.
The shape is shown below.

The host computer 11 determines "S6F1
When "1" is normally received, "S6F12" is transmitted to the communication support apparatus 1 (step 5). When receiving the data in the form of FIG. 4F from the host computer 11, the communication support apparatus 1 searches for a definition corresponding to the format conversion definition file 1051 on the host computer 11 side. In the case of the present embodiment, since there is a corresponding definition (2b4), the binary is 1 byte according to this definition.

Next, a corresponding definition is searched for in the message conversion definition file 1061 on the host computer 11 side. In the case of the present embodiment, since the corresponding definition (3b2) is defined to transmit “S5F2” to the semiconductor manufacturing apparatus 12 when “S6F12” is received from the host computer 11, the communication support apparatus 1 searches for a corresponding definition in the format conversion definition file 1052 of the semiconductor manufacturing apparatus 12. In the case of the present embodiment, since the corresponding definition (2a2) defines that the value stored in the shared memory variable ACKC5 is to be extracted and converted to a binary type, the value is transmitted to the semiconductor manufacturing apparatus 12 in this format. (S
step6). At this time, the data received by the semiconductor manufacturing apparatus 12 has the format shown in FIG. 4D.

By performing the processing as described above, the semiconductor manufacturing apparatus 12 transmits “S5F1” from the semiconductor manufacturing apparatus (0000) as if it were based on the specifications of the communication interface of the semiconductor manufacturing apparatus 12, and As a normal response from the computer 11, "S5
F2 ", the host computer 11
From the side, based on the communication specifications of the host computer 11, "S5F1" and "S6F11" are received, and processing is performed as if "S5F2" and "S6F12" were transmitted to the semiconductor manufacturing apparatus 12 as normal responses. be able to.

The transmission / reception history is collected in the communication log file 108, and as shown in FIG.
Both the t format and the dump file format can be displayed on the monitor screen.

Transmission and reception to and from the host computer 11 and the semiconductor manufacturing apparatus 12 can be sequentially displayed on the monitor screen of the communication support apparatus in the form shown in FIG. In this embodiment, the message conversion definition file 1062 on the semiconductor manufacturing apparatus 12 side and the message conversion definition file 1061 on the host side are described as an example in which they are defined as shown in FIGS. 3 (a) and 3 (b). The present invention can also be implemented in the form defined as shown in FIGS. 9 (a), 9 (b) and 10.

As described above, by using the definition files for the semiconductor manufacturing apparatus and the host computer, for example, while the host computer supports a plurality of messages, the semiconductor manufacturing apparatus uses a single message. If they correspond, the present invention can be applied even when the corresponding message on the host computer side is completely different from the corresponding message on the semiconductor manufacturing apparatus side. Further, even when the messages on the host computer side and the semiconductor manufacturing apparatus side are exactly the same, for example, as shown in FIG. 10, by setting to bypass in each definition file, the message is transmitted to the partner side without conversion. It is also possible.

In this embodiment, the communication support apparatus is described as being connected to the semiconductor manufacturing apparatus in a one-to-one manner.
As shown in FIG. 1, a plurality of semiconductor manufacturing apparatuses can be connected to one communication support apparatus. In that case,
Each device definition file is required for each device.

[0039]

According to the present invention, online communication with a host computer can be performed in an existing state without modifying an existing standard communication interface in a semiconductor manufacturing apparatus or a semiconductor inspection apparatus. Both the host computer and each device can perform online communication without being aware of the difference in communication specifications between the host computer and each device. In addition, it does not belong to either the device side or the host computer side, and operates and functions independently, so that when multiple devices are brought online and when the host computer changes, by modifying each definition file, It is possible to easily go online.

[Brief description of the drawings]

FIG. 1 is a block diagram of the present invention.

FIG. 2 shows an example of a format conversion definition file

FIG. 3 shows an example of a message conversion definition file

FIG. 4 shows an example of transmitted / received data.

FIG. 5 Sequence

FIG. 6 shows an example of a definition file setting screen

FIG. 7 is a screen display example of a communication log.

FIG. 8 is a screen display example of the transaction monitor.

FIG. 9 shows an example of another message conversion definition file.

FIG. 10 shows an example of another message conversion definition file.

FIG. 11 shows another configuration example.

FIG. 12 is a conventional configuration diagram.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Communication support apparatus 11 Host computer 12 Semiconductor manufacturing apparatus 101 Communication control section 102 Format conversion section 103 Message conversion section 104 Communication parameter definition file 1041 Host computer side communication parameter definition file 1042 Semiconductor manufacturing apparatus side communication parameter definition file 105 Format conversion definition file 1051 Format conversion definition file for host computer side 1052 Format conversion definition file for semiconductor manufacturing equipment 106 Message conversion definition file 1061 Message conversion definition file for host computer side 1062 Message conversion definition file for semiconductor manufacturing equipment 107 Shared memory 108 Communication log file 109 Log file 110 Registration / update unit 121 Standard communication interface 122 Factory A host 123 Factory B host 124, 125 Remodeling department

Continued on the front page (72) Inventor Yoshiro Sasaki 66-2 Horikawa-cho, Saiwai-ku, Kawasaki-shi, Kanagawa F-term (reference) in Toshiba Engineering Corporation 5B045 BB17 BB23 5B089 GA04 GB01 HB19 KA06 KB09 KF05 5K034 AA20 FF01 FF02 FF11 FF13 GG02 GG05 HH02 HH14 HH16 HH17 HH26 HH63 JJ24 KK12

Claims (8)

[Claims] 1. A communication support device connected between a host computer and the communication target device in online communication between a host computer and a communication target device having a communication interface having a different communication specification from the host computer. A communication control means for performing communication between the host computer and the communication target device; and a communication parameter definition file defining communication parameters to be referred to when the communication control means performs communication between the host computer and the communication target device. Means for converting the format of the signal received by the communication control means, a format conversion definition file defining format conversion rules to be referred to when the format conversion means converts the format, A message conversion unit that converts a message in the converted signal; and a message conversion definition file that defines a message conversion rule to be referred to when the message conversion unit converts the message. After converting the signal received from the communication target device via the communication control unit to the format and message of the other party by the format conversion unit and the message conversion unit,
A communication support device, wherein a signal is transmitted to the other party by the communication control means. 2. The communication parameter definition file, the format conversion definition file, and the message conversion definition file include a definition file for the host computer and a definition file for the communication target device. 2. The communication support device according to 1. 3. The system according to claim 1, wherein said format conversion means and said message conversion means have a shared memory which is referred to and used when referring to said format conversion definition file and said message conversion definition file. 3. The communication support device according to 1. 4. A registration / change means for registering necessary items in said communication parameter definition file, format conversion definition file and message conversion definition file and for changing and deleting registered items. 3. The communication support device according to 3. 5. The communication support apparatus according to claim 1, further comprising means for storing a history of transmission and reception by said communication control means with said host computer and said communication target device. 6. The communication support apparatus according to claim 1, further comprising means for storing conversion histories of said format conversion means and said message conversion means. 7. An on-line communication method between a host computer and a communication target device having a communication interface having a different communication specification from the host computer, the method comprising: receiving a signal transmitted from the host computer or the communication target device; Converting the format of the received signal using the format conversion definition of the receiving side; converting the message in the received signal into a signal for conversion using the message conversion definition of the receiving side; Converting the signal into a format using a format conversion definition on the transmission side, and converting the message in the conversion signal into a signal for transmission using the message conversion definition on the transmission side; Transmitting the converted signal to the destination. Communication support how to. 8. A step of receiving a signal transmitted from a host computer or a communication target device; a step of converting a format of the received signal using a format conversion definition of a receiving side; Converting the message into a signal for conversion using a message conversion definition on the receiving side, and converting the signal for conversion, using a format conversion definition on the transmitting side, and converting the message in the signal for conversion, A step of transmitting a signal converted for transmission using the message conversion definition of the transmitting side to the destination, and a step of transmitting the signal converted for transmission to the destination, wherein communication between a host computer having a different communication specification and a communication target apparatus is performed. A storage medium storing a program for supporting.