JP2001183512A - Manufacturing device of color filter for liquid crystal display - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing device of a color filter for a liquid crystal display reducing the loss of a photoresist and the cost of materials, preventing generation of foreign matters and uneven streaks so as to improve the manufacturing yield and drying the photoresist without generating unevenness. SOLUTION: The manufacturing device is constructed of a color filter pattern transfer and peeling-off device comprising a first unwinding part, a first coating part, a pre-drying part, an exposure part, a developing and washing part and a first winding part and a color filter pattern transferring and releasing device comprising a second unwinding part, a second coating part, a transferring and releasing part and a second winding part.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an apparatus for manufacturing a color filter, and more particularly to an apparatus for manufacturing a color filter for a liquid crystal display in which a color filter pattern is provided on a glass plate surface by transfer.

[0002]

2. Description of the Related Art At present, a method of manufacturing a color filter for a liquid crystal display is such that a photoresist for a color filter is dropped on a sheet-like glass plate at a central portion on the glass plate and then rotated at high speed to obtain a uniform coating. A photolithography method of forming a film and performing exposure and development to form a color filter pattern is widely used. By repeating the photolithography process, for example, a total of four color filters of three colors of red, green, and blue and a black matrix are manufactured.

In this photolithography method, a method of applying a color filter photoresist on a sheet-like glass plate is performed by dropping the color filter photo onto the central portion of the sheet-like glass plate as described above. There is also a method in which a coating die is first used to apply a thick coating on the entire surface of a glass plate in a planar manner, and then the coating is rotated at a high speed to form a uniform coating film.

Although the latter method consumes less color filter photoresist than the former method, any of the above methods removes the excessively applied color filter photoresist by centrifugal force and forms a thin and uniform coating film. , A considerable proportion of the photoresist for color filters is discarded. Further, since the above steps are repeated on the glass plate until the color filter is formed, the glass plate corresponding to the accumulated loss in each step is defective and discarded.

When a photoresist for a color filter is applied on a sheet-like glass plate by the latter method using the above-mentioned coating die, the application of the color filter is intermittent, so that the color filter at the tip of the coating die is applied. For example, there is a problem in that the foreign matter and uneven streaks are easily generated by drying the photoresist, and it is necessary to clean the tip of the coating die once every several to several tens of times.

On the other hand, as a method for efficiently producing a color filter for a liquid crystal display, a photoresist for a color filter is previously coated on the surface of a roll-shaped film, and the pattern is exposed and developed to form a continuous color filter pattern. Then, a manufacturing method using a transfer method of transferring a color filter pattern onto a sheet-like glass plate has been proposed.

When a photoresist for a color filter is applied on the surface of such a roll-shaped resin film or metal film (carrier) and dried, a drying oven after application has a nozzle for blowing hot air. Is common. However, if hot air is directly blown onto the surface of the color filter photoresist, unevenness due to the influence of the wind may occur.

In addition, when applying and drying on the sheet-like glass plate, the product can be dried intermittently in a reduced-pressure drying oven without being affected by the flow of air, so that there is no unevenness. However, it can be said that it is difficult to apply a drying method using a reduced-pressure drying furnace to such a roll-shaped resin film or metal film (carrier).

[0009]

SUMMARY OF THE INVENTION The present invention relates to an apparatus for manufacturing a color filter for a liquid crystal display in which a color filter pattern is formed on a sheet-like glass plate by a transfer method. To reduce material costs, prevent foreign matter and streaks on the color filter, improve yield, and cause unevenness in the color filter photoresist applied on a roll-shaped resin film or metal film (carrier). An object of the present invention is to provide an apparatus for manufacturing a color filter for a liquid crystal display, which can be dried without being dried, that is, can manufacture a high-quality color filter for a liquid crystal display at low cost.

[0010]

The present invention relates to an apparatus for manufacturing a color filter for a liquid crystal display, comprising: 1) a first winding for supplying a roll-shaped resin film or a metal film (carrier) provided with a release layer on the surface thereof; 2) a first coating section for applying a photoresist for a color filter on the surface of the roll-shaped resin film or metal film (carrier); 3) a coating portion on the surface of the roll-shaped resin film or metal film (carrier) A pre-drying section for drying the color filter photoresist; 4) an exposure section for exposing the dried color filter photoresist to a color filter pattern; 5) developing and washing the color filter photoresist having the color filter pattern exposed. Developing / washing section, 6) Color filter formed by developing / washing 7) a first winding section for winding a carrier provided with a dried color filter pattern on the surface of the roll-shaped resin film or metal film (carrier); 8) a second unwinding section for supplying a roll-shaped carrier provided with a dried color filter pattern; 9) a second application section for applying an adhesive on the surface of the roll-shaped carrier; 10) glass Transfer / peeling in which the adhesive surface of the roll-shaped carrier is brought into close contact with the plate surface, the whole surface is exposed, the roll-shaped carrier is separated, and the color filter pattern formed on the carrier is transferred onto the glass plate surface. 11) a second winding section for winding the roll-shaped carrier after transferring the color filter pattern onto the surface of the glass plate; An apparatus for manufacturing a color filter for liquid crystal display, characterized in that it is composed of a that the color filter pattern transfer-peeling device.

The present invention also relates to an apparatus for manufacturing a color filter for a liquid crystal display according to the present invention, wherein the first coating unit is a die coater.

Further, the present invention provides the apparatus for manufacturing a color filter for a liquid crystal display according to the present invention, wherein the predrying section uses air at a temperature of 60 ° C. to 80 ° C. and a flow rate of 0.1 m / sec or less. , Flow rate 0.1m / s
breeze zone of ec ~ 0.7m / sec, flow velocity 1.0m /
An apparatus for manufacturing a color filter for a liquid crystal display, comprising three zones of a warm air zone of sec to 2.0 m / sec.

The present invention also relates to an apparatus for manufacturing a color filter for a liquid crystal display according to the present invention, wherein the transfer / peeling section positions a color filter pattern formed on a roll-shaped carrier on a surface of a glass plate. An apparatus for manufacturing a color filter for a liquid crystal display, comprising a mechanism.

[0014]

Embodiments of the present invention will be described below. FIG. 1 is an explanatory view showing a concept of a color filter pattern forming apparatus constituting one embodiment of a manufacturing apparatus of a color filter for a liquid crystal display according to the present invention in a cross section. FIG. 2 is an explanatory view showing the concept of a color filter pattern transfer / peeling apparatus which constitutes one embodiment of the apparatus for manufacturing a color filter for a liquid crystal display according to the present invention in a cross section.

As shown in FIG. 1, a color filter pattern forming apparatus (1) according to the present invention comprises a first unwinding section for supplying a roll-shaped resin film or a metal film (carrier) having a release layer on the surface thereof. (10) a first coating unit (20) for applying a color filter photoresist on the surface of the roll-shaped resin film or metal film (carrier), and A drying section (30) for drying the photoresist for a color filter, an exposure section (40) for exposing a color filter pattern to the dried photoresist for a color filter, and developing and developing a photoresist for a color filter exposed to the color filter pattern. Developing / washing section (50) for washing with water, color filter formed by developing / washing A drying section (60) for drying the pattern, and a first winding section (70) for winding a carrier provided with a dried color filter pattern on the surface of the roll-shaped resin film or metal film (carrier). Things.

The first unwinding portion (10) includes a mounting portion (11) for a roll-shaped resin film or metal film (carrier) (80) provided with a release layer on the surface thereof, a meandering prevention mechanism (12), It comprises a film thickness detector (13) and a tension detector (14). The first coating unit (20) is a die coater. In addition, the pre-drying section (3
0) is air having a flow rate of 0.degree.
Windless zone (31) of 1 m / sec or less, flow velocity 0.1 m
/ Sec to 0.7 m / sec, a breeze zone (32), a flow velocity of 1.0 m / sec to 2.0 m / sec, a warm air zone (33), and a coating film thickness detecting section (34). ing.

The exposure section (40) comprises a first pre-accumulator (41), an exposure device (42), and a first post-accumulator (43). The developing / washing unit (50)
It comprises a developing section (51) and a washing section (52). The post-drying section (60) is a drying oven, and the first winding section (70) is a mounting section (71) of a carrier (80 ') having a surface provided with a color filter pattern.

A roll-shaped resin film or metal film (carrier) having a release layer provided on its surface (80)
Is a carrier (80 ') in which each processing is performed in each of the above-mentioned portions, and a color filter pattern is provided on the surface thereof.

As shown in FIG. 2, the color filter pattern transfer / peeling device (2) according to the present invention comprises a second unwinder for supplying a roll-shaped carrier provided with a color filter pattern by the color filter pattern forming device. Part (110), a second application part (120) for applying an adhesive on the surface of the roll-shaped carrier, the adhesive surface of the roll-shaped carrier is brought into close contact with the surface of the glass plate, and the whole surface is exposed, Transfer / peeling section (130) for peeling off the carrier and transferring the color filter pattern formed on the carrier onto the surface of the glass plate, and a roll-shaped carrier after transferring the color filter pattern onto the surface of the glass plate And a second take-up section (140) for taking up.

The second unwinding section (110) includes a mounting section (111) for a roll-shaped carrier (80 ') having a color filter pattern provided on its surface, a meandering prevention mechanism section (112), and a film thickness detecting section. (113) and a tension detector (114). The second coating section (120) includes a die coater (121) and a coating film thickness detection section (122).

The transfer / separation section (130) includes a second pre-accumulator (131), a transfer section (132), and a separation section (13).
3) The second rear accumulator (134). The second winding unit (140) is a mounting unit (141) for the roll-shaped carrier (80 '') after transferring the color filter pattern onto the surface of the glass plate.

The roll-shaped carrier (80 ') provided with a color filter pattern on its surface is subjected to each processing in each of the above-mentioned parts, and the color filter pattern formed on the carrier (80') is removed from the glass (80 '). The image is transferred onto the surface of the plate to form a color filter for a liquid crystal display, and the rolled carrier (80 ″) after the transfer is wound up.

FIG. 3 shows a transfer / separation unit (13) of the color filter pattern transfer / separation apparatus shown in FIG.
0) and a peeling section (13).
It is explanatory drawing which shows 3) in the plane. As shown in FIG. 3, the transfer section (132) has a glass plate carry-in section (135).
However, a glass plate carrying-out section (136) is attached to the peeling section (133). As shown in FIGS. 2 and 3, the peeling section (133) is provided with a peeling roller (138).

In the second unwinding section (110), the second coating section (120), and the second winding section (140) of the color filter pattern transfer / peeling apparatus, a roll-shaped roll provided with a color filter pattern is provided. Carrier (80 ')
Is continuously conveyed, but in the transfer section (132) of the transfer / separation section (130) and the separation section (133), the operation of the second front accumulator (131) and the second rear accumulator (134) Rolled carrier (8
0 ′) is intermittently conveyed.

As shown in FIGS. 2 and 3, the roll-shaped carrier (80 ') conveyed from the second front accumulator (131) is once stopped in the transfer section (132), and The adhesive surface is brought into close contact with the surface of the glass plate, and the color filter pattern formed on the carrier is positioned on the surface of the glass plate by a positioning mechanism (not shown). Next, UV light is exposed to the entire surface from the back surface of the glass plate, and the adhesive is cured.

Subsequently, the roll-shaped carrier is conveyed to the peeling section (133) while the adhesive surface of the roll-shaped carrier is kept in close contact with the glass plate surface, once again stopped, and the roll-shaped carrier is peeled off by the peeling roller (138). It is supposed to be. As shown in FIG. 2, the peeling roller (138) peels the roll-shaped carrier while moving to the left of the arrow from the peeling start position (A) shown by the dotted line to the peeling end position (B) shown by the dotted line, and again. It returns to the right peeling start position (A).

As shown in FIG. 3, as shown in FIG.
The glass plate (137A) waiting at 5) is conveyed to the transfer section (132) (137B), closely adhered to the adhesive surface of the roll-shaped carrier, positioned, and kept in close contact with the peeling section (133) after the entire surface exposure. (137C), and after the roll-shaped carrier is peeled off by the peeling roller (138), it is carried out to the glass plate carry-out section (136) (137).
D). This unloaded glass plate
A color filter for a liquid crystal display having a color filter pattern formed on its surface.

In the apparatus for manufacturing a color filter for a liquid crystal display according to the present invention, a pattern of a desired number of colors is repeatedly formed on a roll-shaped carrier by using a color filter pattern forming apparatus.
A color filter for a liquid crystal display having a desired number of colors is manufactured.

As described above, in the apparatus for manufacturing a color filter for a liquid crystal display according to the present invention, the coating of the photoresist for the color filter is performed by a conventional method using a sheet-like glass plate because the coating is performed continuously by a die coater. Thus, the use efficiency of the photoresist for a color filter can be greatly improved.

In addition, although the coating is performed using a coating die, the tip of the coating die rarely comes into contact with the air due to continuous coating, and foreign matter and streaks are hardly generated by drying the photoresist for a color filter. Furthermore, in terms of productivity, the size of the glass plate is about 550 mm × 650 mm and about 2 glass plates / minute in the conventional method, whereas the apparatus for manufacturing a color filter for a liquid crystal display according to the present invention is used. In the case of, when the coating speed is set to 6 m / min, the glass plate is about 11 glass plates / min, which is about 5 times the processing capacity.

As for drying, the pre-drying section uses air at a temperature of 60 ° C. to 80 ° C. and a flow rate of 0.1 m / sec.
The following windless zone, flow velocity 0.1m / sec-0.7m /
sec wind zone, flow velocity 1.0m / sec-2.0m
/ Sec, so that it is possible to dry the color filter photoresist applied on the carrier without causing unevenness.

[0032]

According to the present invention, there is provided an apparatus for manufacturing a color filter for a liquid crystal display, comprising: 1) a first unwinding section for supplying a roll-shaped resin film or a metal film (carrier) having a release layer on the surface thereof; A) a first coating unit for applying a photoresist for a color filter on the surface of the roll-shaped resin film or metal film (carrier); 3) a photo for a color filter on the surface of the roll-shaped resin film or metal film (carrier). A pre-drying section for drying the resist; 4) an exposure section for exposing the dried color filter photoresist to a color filter pattern; 5) a development / washing section for developing and washing the color filter photoresist having the color filter pattern exposed. 6) Dry the color filter pattern formed by development and washing with water A color filter pattern forming apparatus, comprising: a first winding section for winding a carrier provided with a dried color filter pattern on the surface of the roll-shaped resin film or metal film (carrier); 8) a second unwinding unit for supplying a roll-shaped carrier provided with a dried color filter pattern; 9) a second coating unit for applying an adhesive on the roll-shaped carrier surface; 10) on a glass plate surface A transfer / peeling part for bringing the roll-shaped carrier into close contact with the adhesive surface, exposing the entire surface, peeling the roll-shaped carrier, and transferring the color filter pattern formed on the carrier onto the glass plate surface; A) a second winding section for winding the roll-shaped carrier after transferring the color filter pattern onto the surface of the glass plate. It is a manufacturing device for color filters for liquid crystal displays characterized by comprising a pattern transfer / peeling device. To improve the yield by preventing the generation of foreign matter and uneven streaks, and to enable drying without causing unevenness in the color filter photoresist applied on the roll-shaped resin film or metal film (carrier). In other words, the present invention provides an apparatus for manufacturing a color filter for a liquid crystal display capable of manufacturing a high-quality color filter for a liquid crystal display at low cost.

[Brief description of the drawings]

FIG. 1 is an explanatory view showing a concept of a color filter pattern forming apparatus constituting an embodiment of a manufacturing apparatus of a color filter for a liquid crystal display according to the present invention in a sectional view.

FIG. 2 is an explanatory view showing a concept of a color filter pattern transfer / peeling apparatus which constitutes an embodiment of a manufacturing apparatus of a color filter for a liquid crystal display according to the present invention in a cross section.

FIG. 3 is an explanatory view showing a transfer portion and a peeling portion constituting a transfer / peeling portion of the color filter pattern transfer / peeling device according to the present invention shown in FIG.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Color filter pattern forming apparatus 2: Color filter pattern transfer / peeling apparatus 10 ... First unwinding part 11, 111 ... Mounting part 12, 112 ... Meandering prevention mechanism part 13, 113 ... Film thickness detection part 14, 114 ... Tension Detecting section 20 First coating section 30 Pre-drying section 31 No-air zone 32 Blow zone 33 Hot-air zone 34, 122 Coating film thickness detecting section 40 Exposure section 41 First pre-accumulator 42 Exposure device 43 ... First post-accumulator 50 ... Developing / washing section 51 ... Developing section 52 ... Washing section 60 ... Post-drying section 70 ... First winding section 71,141 ... Mounting section 80 '... Carrier having a surface provided with a color filter pattern 80 '' Carrier after peeling off the color filter pattern on the surface 110 Second unwinding part 120 Second coating part 121 Echoter 130 Transfer / separation unit 131 Second accumulator 132 Transfer unit 133 Separation unit 134 Second rear accumulator 135 Glass plate carry-in unit 136 Glass plate carry-out unit 137A, 137B, 137C, 137D Glass plate 138 … Peeling roller 140… second winding part

Claims (4)

[Claims] 1. An apparatus for manufacturing a color filter for a liquid crystal display, comprising: 1) a first unwinding section for supplying a roll-shaped resin film or a metal film (carrier) having a release layer on the surface thereof; A first coating unit for applying a color filter photoresist on the surface of the resin film or metal film (carrier), 3) drying the photoresist for color filter on the surface of the roll-shaped resin film or metal film (carrier) A pre-drying section; 4) an exposure section for exposing the dried color filter photoresist to a color filter pattern; 5) a developing / washing section for developing and washing the color filter photoresist having exposed the color filter pattern;・ Post-drying unit for drying the color filter pattern formed by washing with water 7) a color filter pattern forming apparatus, comprising: a first winding section for winding a carrier provided with a dried color filter pattern on the surface of the roll-shaped resin film or metal film (carrier); and 8) a dried color. A second unwinding section for supplying a roll-shaped carrier provided with a filter pattern; 9) a second application section for applying an adhesive on the roll-shaped carrier surface; 10) a roll-shaped carrier on a glass plate surface; A transfer / peeling part for bringing the carrier surface into close contact with the carrier, exposing the entire surface of the carrier, peeling the roll-shaped carrier, and transferring the color filter pattern formed on the carrier onto the surface of the glass plate; A second winding section for winding the roll-shaped carrier after the transfer onto the glass plate surface; An apparatus for manufacturing a color filter for a liquid crystal display, comprising: a copying / peeling apparatus. 2. The apparatus according to claim 1, wherein said first coating unit is a die coater. 3. The non-winding zone, wherein the predrying section uses air at a temperature of 60 ° C. to 80 ° C. and has a flow rate of 0.1 m / sec or less,
3. The air conditioner according to claim 1, wherein the air flow rate is comprised of three zones: a breeze zone having a flow velocity of 0.1 m / sec to 0.7 m / sec and a warm air zone having a flow velocity of 1.0 m / sec to 2.0 m / sec. Item 3. An apparatus for producing a color filter for a liquid crystal display according to item 2. 4. The transfer / peeling unit has a positioning mechanism for positioning a color filter pattern formed on a roll-shaped carrier on a surface of a glass plate. An apparatus for manufacturing a color filter for a liquid crystal display according to claim 3.