JP2001178671A - Dust removing tacky adhesive mat - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a dust removing tacky adhesive mat which eliminates the trouble based on static electricity by preventing the electrification of the static electricity generated when a person steps on the tacky adhesive mat or the mat is peeled. SOLUTION: This dust removing tacky adhesive mat has the uppermost surface consisting of tacky adhesive layers, has conductive layers below these tacky adhesive layers and removes dust by sticking the dust to this tacky adhesive layers. The tacky adhesive mat described above has (1) a structure in which part (projecting parts 21) of the conductive layers 2 are exposed on the uppermost layer and (2) a structure which is provided with plural sets laminated with the tacky adhesive layers and the conductive layers and in which the laminated sets are made strippable and the conductive layers of the respective sets are conducted to each other and are grounded in any of the conductive layers.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dust-removable adhesive mat. This kind of thing is a hospital,
Particles that dislike dust such as fine dust called particles, such as cleanrooms where electronic components such as semiconductor devices are manufactured or handled, and where footwear for people entering and leaving where extremely clean environments are required. It can be used to remove dust such as dust and dirt attached.

[0002]

2. Description of the Related Art A conventional dust removing adhesive mat of this type will be described with reference to FIG. The illustrated conventional example is generally used for entering and leaving a clean room in a semiconductor device manufacturing factory.

Conventionally used adhesive mats are shown in FIG.
As shown in FIG. 2, the adhesive layers 1a, 1b, 1c, 1d and the conductive layers 2a, 2b, 2c, 2d are alternately laminated. When the user steps on the adhesive mat, the dust adhering to the footwear such as the shoes of the person adheres to the adhesive layer 1a on the surface by adhesion, thereby preventing the dust from being brought into the inside. In the illustrated conventional example, the lowermost conductive layer 2d
Plays the role of a pedestal sheet.

When the adhesive strength of the adhesive layer 1a on the surface is reduced and the dust removing ability becomes insufficient, the uppermost adhesive layer 1a and the conductive layer 2a are peeled off as shown in FIG. Layer 2
By exposing the surface of a, the dust removing action of this adhesive mat is continued.

[0005] The prior art has the following problems.
That is, as shown in FIG. 5, when the uppermost adhesive layer 1a is peeled off together with the conductive layer 2a to expose the surface of the next adhesive layer 2a, static electricity is inevitably generated at the time of peeling. FIG.
The generated static electricity is schematically indicated by the symbol S. Also, when the user steps on the adhesive mat, a small amount of static electricity is generated.

[0006] Even a small amount of such static electricity is charged,
When brought in through a human body or the like, inconvenience may occur due to the static electricity. For example, there is a concern that the dust collection effect may be reduced due to the dust collecting ability due to static electricity. In particular, in a clean room in a factory for manufacturing electronic components such as semiconductor devices, there is no danger of static electricity passing through a human body or the like destroying electronic components and products.

[0007] In the prior art, a method of individually suppressing the generation of static electricity in the adhesive portion of the adhesive mat and the sheet portion of the base (the lowermost conductive layer 2d forming the pedestal sheet in Fig. 4) is proposed. In some cases, however, no countermeasures have been taken against the slight electrostatic charge generated. The base sheet portion (pedestal sheet) has a structure in which a grounding terminal is provided here, but other portions cannot be grounded, and there is no place for static electricity to escape. Therefore, at the time of the above-mentioned peeling or other factors, a small amount of generated static electricity is charged,
Concerns about inconvenience such as destruction of electronic components and products via the human body are not eliminated.

Japanese Patent Application Laid-Open No. 7-183093 proposes a structure in which a large number of sets of an adhesive layer and a conductive layer are laminated to allow static electricity at the time of peeling to flow from the conductive layer to the outside. No consideration has been given to the occurrence of this.

Japanese Unexamined Patent Publication (Kokai) No. 7-178035 proposes to suppress the generation of static electricity at the time of peeling by using an acrylic polymer compound of a specific material as a component of an adhesive layer. This requires the use of special materials, and no measures are taken to prevent the above-mentioned slight generation of static electricity.

As described above, in the prior art, there is a fear of electrification due to the generation of a small amount of static electricity, and no consistent measures against static electricity are taken for the entire adhesive mat. Has not been fully resolved.

[0011]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and is intended to be used even when little static electricity is generated when stepping on or peeling off an adhesive mat. Prevent the charging and solve the problems caused by static electricity, for example, prevent the electrical breakdown of electronic parts and products, and take consistent measures against static electricity for the entire adhesive mat (adhesive mat and base mat). It is an object of the present invention to provide a dust-removable adhesive mat that can be made into a dust-free adhesive.

[0012]

SUMMARY OF THE INVENTION An adhesive mat for dust removal according to the present invention has, firstly, an adhesive layer on the uppermost surface and a conductive layer below the adhesive layer. A dust-removing adhesive mat for removing dust by adhering dust, wherein a part of the conductive layer is exposed to an uppermost surface.

According to the present invention, since a part of the conductive layer is exposed on the uppermost surface, footwear or the like stepping on the uppermost surface can contact the conductive layer and discharge static electricity through the conductive layer. Therefore, charging due to static electricity can be prevented, and problems caused by static electricity can be eliminated. In the prior art, as shown in FIG. 4, the conductive layer is completely covered by the uppermost adhesive layer, so that a small amount of static electricity generated when stepping on the adhesive mat is charged. As a result, the role of the conductive layer cannot be sufficiently exhibited, and the problem of inconvenience due to static electricity remains. On the other hand, according to the present invention, the static electricity can be released through the conductive layer as described above, and the role of the conductive layer can be sufficiently exhibited, so that inconvenience caused by the static electricity can be solved. In addition, the static electricity generated at the time of peeling is also described in FIG.
As shown in the figure, the static electricity S at the time of the peeling cannot escape from the adhesive layer 1b which is a new uppermost surface, so that there is a risk of inconvenience due to the charging. However, according to the present invention, the uppermost surface has Since a part of the conductive layer is exposed, the static electricity S can be released through the conductive layer, and the role of the conductive layer can be sufficiently exerted, thereby solving the problem caused by the static electricity.

Second, the dust-removing adhesive mat according to the present invention has a top surface made of an adhesive layer and a conductive layer below the adhesive layer, and adheres dust to the adhesive layer. A dust-removing adhesive mat for removing dust by providing a plurality of sets each including a stack of an adhesive layer and a conductive layer, and allowing the stacked set to be peelable; Are electrically connected to each other and are grounded in any of the conductive layers.

According to the present invention, there is also provided a case where a set of a laminated adhesive layer and a conductive layer can be peeled off so that a new adhesive layer rich in adhesive strength can always be exposed on the uppermost surface. Since any one of the conductive layers is grounded and the conductive layers of each set are electrically connected to each other, all of the conductive layers are grounded, and the effect of releasing static electricity by the conductive layer is ensured. . In the prior art, as shown in FIGS. 4 and 5, each conductive layer is not grounded, so that the conductive layer does not always fully exhibit the ability to remove static electricity. The role of the layer can be sufficiently exerted to eliminate the inconvenience caused by static electricity.

[0016]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The embodiments of the present invention will be further described below, and preferred specific examples will be described with reference to the drawings. Needless to say, the present invention is not limited to the illustrated embodiment.

The dust-removing adhesive mat of the present invention comprises, firstly, an adhesive layer on the uppermost surface and a conductive layer below the adhesive layer, and the dust is adhered to the adhesive layer. Adhesive mat for removing dust, which has a structure in which a part of the conductive layer is exposed on the top surface,
In this case, a structure in which the convex portion is exposed on the uppermost surface can be provided by providing a convex portion on the conductive layer and forming a portion other than the convex portion as an adhesive layer. With this structure, a simple and easy structure can be obtained, and a structure in which a part (convex portion) of the conductive layer is reliably exposed on the uppermost surface can be sufficiently exerted.

Further, in the present invention, the adhesive layer adheres and removes dust from footwear, and a part of the conductive layer exposed on the uppermost surface (eg, a convex portion of the conductive layer).
Can be configured to be distributed at positions where footwear can be stepped on the mat. Even if any footwear steps on the mat, the footwear must step on a part of the exposed conductive layer and be in contact with it, even if static electricity is generated, this static electricity will always escape through the conductive layer and become charged. Can be prevented. For example, if the smallest area of footwear that steps on the mat can be assumed, it is preferable to distribute the exposed portions so that a part of the conductive layer is always exposed within this minimum area. In this way, no matter how the footwear steps on the mat, the footwear will always step on the exposed portion, and charging can be prevented.

Further, in the present invention, a plurality of sets in which the adhesive layer and the conductive layer are laminated are provided, and the laminated set is configured to be peelable, so that the dust removing effect can be always maintained. Is a preferred embodiment. That is, by making it possible to peel off a plurality of sets formed by laminating the adhesive layer and the conductive layer, when the adhesive force of the uppermost adhesive layer is reduced, the adhesive layer and the conductive layer immediately below it By peeling off the set, the adhesive mat structure having the next adhesive layer thereunder as the uppermost surface can be obtained. As a result, the dust removal effect can be maintained with the new adhesive layer having the always higher adhesive strength as the uppermost surface.

The dust-removing adhesive mat of the present invention has, secondly, an uppermost surface comprising an adhesive layer, a conductive layer below the adhesive layer, and a dust attached to the adhesive layer. An adhesive mat for removing dust, provided with a plurality of sets in which an adhesive layer and a conductive layer are laminated, the laminated set being peelable, and the conductive layers of each set being electrically connected to each other. In addition, a structure in which ground is taken in any of the conductive layers is adopted, but in this case, similarly to the structure of the first adhesive mat, a structure in which a part of the conductive layer is exposed to the uppermost surface can be employed. . At this time, it is preferable that the exposed portion be grounded.

In this case, it is possible to adopt a structure in which the ground connection portion always contacts a part of the conductive layer exposed on the uppermost surface by the pressing force of the spring. For example, even if the top of the set of the adhesive layer and the conductive layer is peeled off by grounding by the pressing force of the coil spring, the ground is always removed from a part of the conductive layer exposed on the new top surface. Can be taken. Thus, by adopting this aspect,
If the ground connection part, which is a terminal that is pressed by the spring and takes the ground, always comes into contact with the exposed part that is a part of the conductive layer, even if it is peeled off, it will be exposed on the top surface in the next set of laminates as well. The ground connection comes into contact with the part of the conductive layer thus formed.

In the case of the second adhesive mat, the ground of the conductive layer and the ground of the base mat are
A configuration using a common ground structure can be adopted. According to this aspect, it is possible to take consistent measures against static electricity for the entire adhesive mat (the adhesive mat and the base mat).

Next, preferred specific embodiments of the present invention will be described with reference to the drawings.

Embodiment 1 Referring to FIG. FIG. 1A is a top perspective view showing the configuration of the adhesive mat according to the present example, FIG.
(C) is an explanatory view schematically showing the operation of the adhesive mat according to the present example.

As shown in FIG. 1, the adhesive mat of this embodiment has an adhesive layer 1 on the uppermost surface, and a conductive layer 2 below the adhesive layer 1. This is a mat used for removing dust by attaching dust to the adhesive layer 1. This adhesive mat can be used as a dust-proof mat for various uses, but can be preferably used as a dust-proof mat for entering and leaving a clean room used in a semiconductor device manufacturing process.

This embodiment is shown in FIG.
(B), as can be understood particularly from FIG. 1 (b), the adhesive layer 1 is made into a block shape, and this block-shaped adhesive layer 1 is
The structure is such that it is embedded in the recess 22 of the conductive layer 2. That is, the conductive layer 2 is provided by raising the protrusion 21 from the layered portion,
A portion outside the convex portion 21 is defined as a concave portion 22. In the illustrated example, the protrusions 21 are formed vertically and horizontally in the shape of a shoji screen, and the block-shaped adhesive layer 1 is fitted to the rectangular (or may be square) recesses 22 surrounded by the protrusions 21. I do.

With the above-described structure, the adhesive layer 1 is exposed on most of the upper surface of the mat, thereby removing and attaching the dust, and the projection 21 of the conductive layer 2 is also exposed on the uppermost surface (see FIG. 1). (B)).

With the above configuration, as shown in FIG. 1C, when stepping on a mat with shoes or other footwear 3, the static electricity charged on the adhesive layer 1 is transferred to the protrusions 21 of the conductive layer 2 by Contact. As a result, the static electricity escapes through the conductive layer 2, and the adverse effect due to the charging is suppressed.
If the conductive layer 2 is grounded as illustrated in FIG. 1C, discharge can be ensured.

As described above, the adhesive mat of this embodiment has a structure in which the block-shaped adhesive layer 1 is embedded in the concave portion 22 of the conductive layer 2 so that the convex portion 21 of the conductive layer 2 is exposed to the uppermost surface. In this structure, the uppermost surface is made of an adhesive layer, and a part of the conductive layer below the adhesive layer is exposed on the uppermost surface.

In this embodiment, as shown in FIG. 1C, the projections 2 which are part of the conductive layer 2 exposed on the uppermost surface are formed.
1 is configured to be distributed at a position where the footwear 3 can be stepped on the mat. In particular, a structure is provided in which any footwear always steps on the exposed protruding portion 21 of the conductive layer even when stepping on the mat. For example, assuming the smallest footwear area to step on the mat, the protrusion 21 of the conductive layer must be within this minimum area.
The convex portions 21 (exposed portions) are distributed so that is exposed. Thus, no matter how the footwear steps on the mat, the footwear always steps on the convex portion 21 (exposed portion). Therefore, even if a small amount of static electricity is generated, the static electricity always escapes through the conductive layer 2 and unnecessary charging can be prevented.

In this embodiment, FIG. 1 shows a structure having one set in which the adhesive layer 1 and the conductive layer 2 are laminated. However, similar to the prior art described with reference to FIG. 1
And a plurality of sets in which the conductive layer 2 and the conductive layer 2 are stacked. In addition, the stacked set can be peelable. In this case, when the adhesive force of the uppermost adhesive layer is reduced, the pair of the adhesive layer and the conductive layer immediately below the adhesive layer is peeled off, so that the next adhesive layer below the uppermost adhesive layer becomes the uppermost adhesive layer. Can be matt structure,
As a result, the dust removal effect can be maintained with the new adhesive layer having the always higher adhesive strength as the uppermost surface.

In this embodiment, as described above, it is possible to prevent static electricity generated when the user steps on the mat. Also,
Also in the case where the mat is peeled off, it is possible to prevent static electricity generated at the time of the peeling. When used in a clean room where electronic components are manufactured or handled, such as in a semiconductor device manufacturing factory, electronic components and products can be prevented from malfunctions such as electrostatic breakdown.

Embodiment 2 Referring to FIG. 2 and FIG. In this example, the structure shown in FIG. 2 is such that the conductive layer is always grounded during use, when the adhesive mat is peeled off, and at all times. In addition, in the present example, the grounding mat is formed integrally with the base mat to prevent charging.

That is, in this example, the uppermost surface is formed of the adhesive layer 1a so that it can be used for the same purpose as in the first embodiment.
And a conductive layer 2a below the adhesive layer 1a. The dust is removed by attaching the dust to the uppermost adhesive layer 1a. Here, furthermore, a plurality of sets formed by laminating an adhesive layer and a conductive layer are provided (in the drawing, a set of 1a and 2a, a set of 1b and 2b, 1c and 2
c, and 1d and 2d are provided), and the laminated set is peelable, and the conductive layers 2a, 2b, 2c, 2d of each set are electrically connected to each other, and The conductive layer is grounded. In this example, as shown in the drawing and described later in detail, a structure is adopted in which a part of the conductive layer is exposed on the uppermost surface, and the exposed portion on the uppermost surface is grounded.

In this embodiment, the ground of the conductive layer and the base mat 4
And a common ground structure.

The details of the ground structure can be, for example, as shown in FIG. The spring 5 pushes down the mat upper surface contact surface 6 so as to be brought into close contact with the uppermost exposed conductive layer, thereby establishing conduction. In this way, even if the adhesive mat 1a is peeled off, ground conduction can be maintained in the next adhesive mat 1b. The base mat contact surface 7 is placed under the base mat to conduct electricity. In the figure, reference numeral 8 is a resistor,
For example, the resistance is 1 MΩ. e indicates ground.

In this embodiment, as described above, as shown in the drawing, the structure is such that the earth connection portion always contacts a part of the conductive layer exposed on the uppermost surface by the pressing force of the spring 5 such as a coil spring. In this way, if the ground connection portion, which is a terminal that takes the ground, is always in contact with the exposed portion, which is a part of the conductive layer, by being pressed by the spring, the same applies to the next stacked set even when peeled off. The ground connection comes into contact with the part of the conductive layer exposed on the uppermost surface.

In this embodiment, the structure in which a part of the conductive layer is exposed on the uppermost surface is similar to that of the embodiment shown in FIG.
Is embedded in the concave portion of the conductive layer 2 so that the convex portion 21 of the conductive layer 2 is exposed on the uppermost surface. The part of the convex portion 21 exposed on the uppermost surface is grounded.

Each set of conductive layers 2a, 2b, 2c, 2
The conduction of d with each other is such that the projections 21 of the conductive layers of each set come into contact with the conductive layer immediately above them so that the conduction is achieved.

According to this embodiment, as in the first embodiment,
It is possible to prevent static electricity generated when stepping on the mat. Further, it is possible to prevent static electricity generated when the mat is peeled off. When used in a clean room where electronic components are manufactured or handled, such as in a semiconductor device manufacturing factory, electronic components and products can be prevented from malfunctions such as electrostatic breakdown. In addition, a consistent ground between the adhesive mat and the base mat can be obtained.

[0041]

As described above, according to the dust-removing adhesive mat of the present invention, even if the static electricity generated when the adhesive mat is stepped on or peeled off is small, the static electricity can be charged. To prevent inconveniences caused by static electricity, for example, to prevent electrical breakdown of electronic components and products, and to take consistent electrostatic measures for the entire adhesive mat (adhesive mat and base mat). The effect that it can also be obtained.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration of a first embodiment of the present invention.

FIG. 2 is a diagram showing a configuration of a second embodiment of the present invention.

FIG. 3 is a diagram showing a configuration (details of a grounding structure) according to a second embodiment of the present invention;

FIG. 4 is a diagram showing a conventional technique.

FIG. 5 is a diagram showing a problem of the related art.

[Explanation of symbols]

1, 1a-1d: adhesive layer, 2, 2a-2d: conductive layer, 3: footwear (shoes), 4: base mat.

Claims (8)

[Claims] 1. A dust-removing adhesive mat comprising an adhesive layer on the uppermost surface, a conductive layer below the adhesive layer, and removing dust by adhering dust to the adhesive layer, A dust-removing adhesive mat, wherein a part of the conductive layer is exposed on an uppermost surface. 2. The structure according to claim 1, wherein a protrusion is provided on the conductive layer, and a portion other than the protrusion is used as an adhesive layer so that the protrusion is exposed to the uppermost surface. Adhesive mat for dust removal. 3. The method according to claim 1, wherein the adhesive layer adheres and removes dust from footwear, and a part of the conductive layer exposed on the uppermost surface is distributed at a position where the footwear can be stepped on the mat. The dust-removing adhesive mat according to claim 1, wherein: 4. The adhesive mat for dust removal according to claim 1, wherein a plurality of sets each including a stack of an adhesive layer and a conductive layer are provided, and the set including the stacks can be peeled off. 5. A dust-removing adhesive mat comprising an adhesive layer on the uppermost surface and a conductive layer below the adhesive layer, wherein the dust is removed by adhering dust to the adhesive layer, A structure in which a plurality of sets in which an adhesive layer and a conductive layer are stacked are provided, the stacked set is peelable, the conductive layers of each set are electrically connected to each other, and a ground is taken in any of the conductive layers. Adhesive mat for dust removal, characterized in that: 6. The dust-removing adhesive mat according to claim 5, wherein a part of the conductive layer is exposed to an uppermost surface, and the exposed part is grounded. 7. The dust-removing adhesive mat according to claim 6, wherein a ground connection portion is always in contact with a part of the conductive layer exposed on the uppermost surface by a pressing force of a spring. 8. The dust-removable adhesive mat according to claim 5, wherein the ground of the conductive layer and the ground of the base mat are formed with a common ground structure.