JP2001162503A - Polishing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a novel polishing device that needs no adjustments to its mounting portion between an upper rocker shaft and a rocker arm, and thus facilitates device adjustments and requires no skill in such adjustments. SOLUTION: A lower rotary shaft 11 is mounted on a turnable frame 15 turnable on an axis S of turning movement, and the turnable frame 15 is mounted on a horizontally movable base 16. The horizontally movable base is longitudinally slidably mounted on a horizontal movement guide 18 via a horizontally movable frame 17, and the horizontal movement guide 18 is fixed to a vertically movable base 19. The vertically movable base 19 is vertically movably mounted on a vertical movement guide 22.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing apparatus, and more particularly to a polishing apparatus suitable for polishing a lens.

[0002]

2. Description of the Related Art In general, conventional lens polishing apparatuses include an upper shaft swing type polishing apparatus called an Oscar type and a lower shaft swing type polishing apparatus. In any of the polishing methods, in many cases, the lens is fixed to one of a pair of polishing members that are in sliding contact with the lens by wax, chucking, or the like, and the free abrasive particles are removed while the polishing member to which the lens is fixed is rotated. Polishing is performed by swinging the polishing surface of the other polishing member relative to the surface of the lens while supplying the polishing liquid containing the polishing liquid.

In a polishing apparatus called an Oscar type, a rocking shaft member called a hairpin is attached to a rocking arm configured to enable various rocking operations such as reciprocating rocking and turning rocking. The swing shaft member is attached to a lens holder, which is one of the polishing members, at an angle. On the other hand, the polishing plate as the other polishing member is attached to a lower rotating shaft that is rotatable.

[0004] In the above-mentioned conventional polishing apparatus, a swinging mechanism for swinging the swinging arm reciprocally right and left or in a circular or elliptical shape is connected to the base of the swinging arm as the upper shaft structure. Have been. A pressure mechanism including an air cylinder or the like for applying a predetermined polishing pressure to the lens holder is connected to a tip portion of the swing arm via a swing shaft member. The swing shaft member is attached to the swing arm so that its mounting position can be adjusted only in the vertical direction, or in the vertical and vertical directions.

[0005] Some conventional polishing apparatuses can move the lower rotating shaft in the front-rear direction, such as the one devised by the present inventor, or have the lower rotating shaft move vertically relative to the vertical position. Some have been proposed that can be tilted. Further, instead of attaching the swinging shaft member and the polishing member at an angle as described above, the swinging shaft member is fixed to the polishing member, and the swinging shaft performs spherical movement along the lens polishing surface. In some cases, a mechanism for swinging is used.

[0006]

By the way, in the above-mentioned conventional polishing apparatus, the height of the lens surface changes due to the fluctuation of the lens thickness or the wax thickness for fixing to the polishing plate. If the rotating shaft is configured to be movable in the front-rear direction, or if the angle of the lower rotating shaft is configured to be adjustable, the height and front-back position of the polishing dish will change depending on the degree of adjustment. In addition, it is necessary to adjust a mounting portion between the swing arm and the swing shaft member. This mounting portion usually has a structure in which a through hole is formed in one of the swing shaft member and the swing arm, and the other is fixed with a set screw or the like while being inserted through the through hole. There is a problem that it is necessary to rely on intuition, and trial and error and skill are required. In particular, since the above-mentioned mounting portion is generally located at a position where the polishing liquid easily adheres, the above-mentioned adjustment work is made more difficult.

Further, the structure of the mounting portion between the swing shaft member and the swing arm as described above lowers the rigidity of the entire upper shaft structure, so that the rigidity required to maintain the polishing accuracy is secured. For this reason, there is a problem that the weight around the mounting portion is increased. The increase in the weight of the upper shaft structure makes it difficult to control the polishing pressure. For example, the polishing pressure cannot be sufficiently reduced, so that the lens deforms when a thin lens is processed, and the optical surface accuracy of the lens cannot be obtained. There is a defect such as.

Further, in recent years, the shortage of skilled workers has become serious due to the shortage of young workers and the increase of overseas workers in the workplace where the working environment is poor. Is extremely important, the demand for a lens polishing apparatus that enables adjustment work without skill is rapidly expanding.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problem, and an object of the present invention is to make adjustment work of the apparatus easier by eliminating the need for adjustment work of the mounting portion between the upper swing shaft and the swing arm. An object of the present invention is to provide a novel polishing apparatus which can be performed and does not require skill for the adjustment work.

[0010]

In order to solve the above-mentioned problems, a polishing apparatus of the present invention comprises a first polishing member, a swing member connected to the first polishing member, and a first polishing member. A second polishing member opposed to the first polishing member via the workpiece, a swing drive means for swinging the swing member, and a rotary drive means for rotating the second polishing member about the axis thereof. A polishing apparatus for polishing an abrasive, comprising: a tilt adjusting means for changing a tilt angle of a rotation axis of the second polishing member with respect to the rocking member; First moving means for moving the position of the second polishing jig in a direction, and moving the position of the second polishing member in a second direction intersecting with the first direction and along the change surface. A second moving means is provided.

According to the present invention, when the rotation axis of the second polishing member is adjusted to a predetermined inclination angle by the inclination adjusting means, the first moving means and the second moving means adjust the inclination axis along the change surface of the inclination angle. , The second polishing member can be moved in two directions intersecting with each other, so that the position of the first polishing member and the second polishing member can be adjusted when the second polishing member is aligned. It is sufficient to correct only the position, and it is not necessary to adjust the position of the first polishing member. Therefore, the swing-side mechanism can be simply configured and the rigidity can be increased without increasing the weight, so that the polishing pressure can be easily controlled and the position accuracy of the polishing member can be increased. Can be improved.

In particular, when the first polishing member is disposed on the upper side and the second polishing member is disposed on the lower side, an increase in the weight of the first polishing member can be avoided, so that the polishing pressure can be reduced. In addition, the accuracy of the swing operation can be improved.

The above-mentioned polishing apparatus can be applied to both an upper shaft oscillating type and a lower shaft oscillating type. In addition, a oscillating mechanism using a hairpin or the like (ie, a oscillating shaft member and The first polishing member is connected at an angle.
In addition, the present invention can be applied to a ball-and-center swing type mechanism.

Further, the tilt angle changing surface is defined as that when a virtual reference axis and a radial axis which intersect at the tilt angle are set to measure the tilt angle, the tilt angle changes. A virtual surface that always includes both the reference axis and the rotating radial axis.

In the present invention, detection for detecting the tilt angle set by the tilt adjusting means, the first moving means and the second moving means, and the positions of the second polishing member in the first and second directions. Preferably, means are provided. According to the present invention, by providing this detecting means, the position of the second polishing member and the inclination angle of the rotation axis thereof can be objectively known, and the position and the inclination value can be set in advance. Regardless of the skill level of the operator, the polishing can always be performed under the same conditions.

In the present invention, it is preferable that the detecting means is a digital counter directly or indirectly attached to a drive shaft of the tilt adjusting means, the first moving means and the second moving means. The position and the inclination angle of the second polishing member can be easily grasped by the digital counter, and the ambiguity of the setting at the time of adjusting the position and the inclination angle can be reduced.

In the present invention, the second polishing member is pivotally supported by a rotating frame configured to be rotatable by the tilt adjusting means, and the rotating frame is provided by a first moving means or a second moving means. The first movable base is rotatably attached to a primary movable base movable by one of the first movable means or the second movable base movable by the other of the second movable means; Preferably, the inclination adjusting means is configured to set an inclination angle of the rotating frame with reference to the primary movement base.

Further, in the present invention, there is provided an upper cover and a lower cover for accommodating the first polishing member and the second polishing member, and the upper cover includes the first polishing member and the second polishing member. It is formed in a frame shape surrounding the plane,
The lower cover is formed in a bottomed shape having a predetermined depth so as to cover the first polishing member and the second polishing member from below, and covers a gap between the upper cover and the lower cover. A flexible member is disposed, and one of the upper cover and the lower cover is configured to be tiltable together with the second polishing member or its support structure, and to be movable in the first direction and the second direction. Is preferred.

Further, in the present invention, the first direction is a vertical direction, the second direction is a horizontal direction, and one of the upper cover and the lower cover is the second polishing member or a supporting structure thereof. It is preferable to be configured to be movable in the second direction together with the above.

In each of the above inventions, the first moving means may be configured to move the second polishing member in the vertical direction, and the second moving means may be configured to move the second polishing member in the horizontal direction. The tilt adjusting means includes: a tilt drive shaft rotatably configured (supported by the primary movement base); a screw shaft connected to the tilt drive shaft so as to be bent; There may be a nut portion that is screwed to a shaft and fixed to the second polishing member (or the rotating frame).

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an embodiment of a polishing apparatus according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a vertical cross-sectional view of the apparatus of the present embodiment as viewed from the right side, and FIG. 2 is a vertical cross-sectional view of the apparatus of the present embodiment as viewed from the front. In each of the drawings, a part of the structure on the near side that does not appear in the vertical section is indicated by a dashed line.

A lower rotating shaft 11 is rotatably supported by a lower bearing 21 inside a frame 10 formed in a box frame shape, and the lower rotating shaft 11 is rotationally driven by a driving motor 13 via a driving belt 12. It is configured to be. A polishing plate 51 is fixed to the lower rotating shaft 11,
The upper surface of the polishing plate 51 is a polishing surface on which the lens 53 is polished.

The lens 53 is attached and fixed on the lower surface of the lens holder 52 using a pitch or the like. The upper portion of the lens holder 52 is rotatably fitted to a spherical portion formed at the tip of the swing shaft member 54. The upper part of the swing shaft member 54 is attached and fixed to the swing arm 55. The swing arm 55 is rotatably connected to a drive unit 57 about a rotation shaft 56, and is configured so that a predetermined polishing pressure can be applied downward by an air cylinder 58. In the above-described upper shaft structure, the swing shaft member 54 swings back and forth or swings by the swing operation of the driving unit 57, and the lens holder 52 also swings on the polishing plate 51 in response to the swing shaft member 54. Has become.

The shaft support of the lower rotating shaft 11 and the drive system of the lower rotating shaft 11 are fixed to a rotating frame 15. The rotating frame 15 is rotatably attached to the pair of horizontal moving bases 16 at both left and right ends. Each of the pair of horizontal moving bases 16 is mounted on a horizontal moving frame 17, and the horizontal moving frame 17 is slidably mounted on a horizontal moving guide 18 having a pair of upper and lower guide shafts extending in the front-rear direction. The horizontal movement guide 18 is fixed to a vertical movement base 19. Vertical movement base 19
Is slidably attached to the up and down movement guide 22 up and down.

A pair of left and right horizontal movement guides 18 are male screws 23 formed on the outer peripheral surfaces of the distal ends of the pair of horizontal movement shafts 23.
a and the left horizontal moving shaft 23 shown in FIG.
Is rotated by the handle 24. A sprocket 27 is fixed to the left horizontal moving shaft 23, and the right horizontal moving shaft 23 is also configured to rotate via a transmission chain 29 provided between the sprocket 27 and a similar sprocket 28. I have. Left horizontal movement axis 2
The rotation amount of No. 3 can be measured by the digital counter 25.

A male screw 31a formed on the upper part of a pair of upper and lower driven shafts 31 provided on the left and right sides is screwed to the pair of left and right vertical movement bases 19, respectively. A driven bevel gear 32 is fixed at an intermediate height position of the right vertical driven shaft 31 shown in FIG. 2, as shown in FIG. 1, and the driven bevel gear 32 is a driving bevel gear 34 fixed to the vertical driving shaft 33. Is engaged. The right vertical drive shaft 33 can be rotated by a handle 35, and the rotation is controlled by the digital counter 3
6 allows measurement. When the right vertical drive shaft 33 rotates, the right vertical driven shaft 3 shown in FIG.
1 rotates, and a left and right vertical shaft is connected via a transmission chain 39 erected between a sprocket 37 fixed to the lower end of the upper and lower driven shaft 31 and a sprocket 38 fixed to the lower end of the upper and lower driven shaft 31 on the left side. The driven shaft 31 is driven to rotate.

An extension frame portion 41 is fixed to a lower portion of the rotating frame 15, and a nut member 42 is rotatably attached to a lower end of the extension frame portion 41. The tilt drive shaft 43 is connected to a tilt adjustment shaft 45 via a universal joint 44 configured to be freely bent. A male screw 45 a is formed on the outer periphery of the tilt adjustment shaft 45, and the male screw 45 a is screwed to the nut member 42. The tilt drive shaft 43 is configured to be rotationally driven by a handle 46,
The rotation amount is measured by the digital counter 47. The inclined drive shaft 43 is supported by a support frame 48 fixed to the horizontal moving base 16 or the horizontal moving frame 17 via a fixture or the like.

The digital counters 25, 36,
47 is configured so that the measured value of the counter increases or decreases according to the amount of forward / reverse rotation of the horizontal drive shaft 23, the vertical drive shaft 33, and the inclined drive shaft 43, and the measured value is , The vertical position and the inclination angle are shown as absolute values. As this digital counter, various types of detection methods and counting methods can be used, of which the detection method and the counting method are mechanical, from the viewpoint of reliability and cost. It is preferred that

Next, the operation of the above-described polishing apparatus will be described. In this polishing apparatus, as shown in FIG. 1, when the tilt drive shaft 43 is rotated by rotating the handle 46, the tilt adjustment shaft 4 is rotated via the universal joint 44.
5 also rotates, so that the nut member 42 is
5 moves in the axial direction as shown by a two-dot chain line in FIG. 1, and as a result, rotates around an inclined center axis S which is a rotation axis between the rotation frame 15 and the horizontal movement base 16. The moving frame 15 rotates. Due to the rotation of the rotation frame 15, the lower rotation shaft 11 has an inclination angle corresponding to the rotation amount.

When the pair of horizontal drive shafts 23 is rotated by rotating the handle 24, the horizontal moving frame 1 is rotated.
7 moves in the front-rear direction along the two guide shafts of the horizontal movement guide 18 with the horizontal movement base 16 and the rotating frame 15, so that the lower rotation shaft 11 moves in the front-rear direction by a movement amount corresponding to the rotation amount. Will be moved to.

Further, when the vertical drive shaft 33 is rotated by rotating the handle 35, the pair of upper and lower driven shafts 31 is rotated, and the vertical moving base 19 is moved to the horizontal moving frame 17,
Since the lower rotating shaft 11 moves up and down with the horizontal movement base 16 and the rotating frame 15, the lower rotating shaft 11 moves up and down by a moving amount corresponding to the amount of rotation.

In the present embodiment configured as described above,
As shown in FIG. 3A, when the lower rotation shaft 11 is inclined by a predetermined inclination angle θ about the inclination center axis S,
As shown in FIG. 3B, a horizontal movement amount x in the front-rear direction X,
By moving the lower rotation shaft 11 and moving the lower rotation shaft 11 in the vertical direction Z by the vertical movement amount z as shown in FIG. 3C, the position of the swing shaft member 54 is not changed at all. The position of the lens holder 52 can be adjusted with respect to the lens (material to be polished) 53 on the polishing plate 51.

In this case, the tilting operation of the lower rotating shaft 11 is X
This is performed in a -Z plane (a vertical plane in this embodiment, that is, a plane parallel to the plane of FIG. 1 and FIG. 3; this plane corresponds to the above-mentioned changed plane). The position of the swing shaft member 54 and the lens holder 52 attached to the upper shaft structure (such as the swing arm 55) and the positions of the polishing plate 51 and the lens 53 attached to the lower shaft (the lower rotation shaft 11 and the like) are different. , In the XZ plane. On the other hand, as described above, the lower rotation shaft 11 is configured to be independently movable in both the X direction (horizontal front-rear direction) and the Z direction (vertical vertical direction). It can be moved to any position in the XZ plane. Therefore, the lower shaft structure of the present embodiment can always be aligned with the upper shaft structure even when the tilt angle θ is set to an arbitrary value by the above-described mechanism. This means that the distance between the polishing position and the tilt center axis S is changed by changing the length of the swing shaft member, the thickness of the lens holder, the lens, the polishing plate, or the length of the lower rotating shaft. The same is true for the case where the upper and lower axes are changed in accordance with these changes.

In the present embodiment, the inclination angle θ, the horizontal movement amount x and the vertical movement amount z can be grasped accurately and immediately by the digital counters 25, 36 and 47, respectively. Therefore, the predetermined adjustment state can be obtained reliably and easily with good reproducibility. Even if each set value is previously obtained, the adjustment operation does not require skill, and even a beginner can easily perform the adjustment. be able to. In particular, since it is only necessary to set the value to a value set in advance by a digital counter, ambiguity of the setting can be reduced as compared with the case of performing the analog setting, so that a more accurate adjustment operation can be performed. Since the digital counter of the present embodiment has a mechanical detection structure and a mechanical counter, there is an advantage that backup of the setting is not required and a reliable operation can be obtained.

In this embodiment, since there is no need to adjust the mounting portion between the swing arm and the swing shaft member on the upper shaft, there is no need to tamper with the mounting portion to which the polishing liquid is liable to adhere. Because there is no work to do,
Adjustment accuracy and reproducibility are improved. Further, the adjustment work can be performed very easily. Further, since it is not necessary to provide a structure for adjustment in the mounting portion, it is possible to realize a high rigidity of the swing mechanism without increasing the weight, so that the polishing pressure can be reduced and the polishing accuracy can be reduced. Can also be increased.

FIG. 4 shows the mounting structure of the polishing cover used in this embodiment. Usually, the polishing cover is for covering the periphery of the polishing processing portion, that is, the portion where the polishing plate 51, the lens holder 52 and the lens 53 are arranged, so that the slurry liquid containing abrasive grains does not scatter around. .
In the present embodiment, an upper cover 62 made of a stainless steel plate or the like engaged with the frame 10, a lower cover 67 made of a stainless steel plate or the like fixed to the support structure of the lower rotating shaft 11 and the rotating frame 15, And a cover 68 made of a transparent material such as an acrylic plate, which is detachably attached so as to close the upper opening of the frame. The closing cover 68 is formed with an opening 68a configured to allow a swinging shaft (not shown) to pass through the swinging range without any trouble.

The upper cover 62 is formed in a flat frame shape so as to surround the polishing portion, and is engaged between an opening edge of the frame 10 and a guide rail 61 attached to a lower surface of the opening edge. It has a pair of left and right side edges 62a, and is configured to be slidable in the direction of the paper of the drawing. A connection tool 64 is attached to the upper cover 62.
Is attached to the linear slider 65. The linear slider 65 is fitted on a linear rail 66 attached to the horizontal movement base 16 and is attached to the linear rail 66 so as to be slidable in the vertical direction. Therefore, the upper cover 62 keeps its vertical position,
The horizontal movement base 16 is configured to move integrally back and forth as it moves back and forth. A flexible sheet 63 made of synthetic rubber or the like is attached to a lower end of the upper cover 62 so as to surround the lower rotation shaft 11.

The lower cover 67 is formed in a box shape without a lid so as to cover the polished portion from below. The lower cover 67 has a through hole 67 through which a shaft supporting structure for supporting the lower rotating shaft 11 passes.
a is formed, and the lower cover 67 is fixed to the rotating frame 15 arranged below the lower cover 67. Therefore, the lower cover 67 is configured to move up and down integrally as the rotating frame 15 moves up and down, and to be integrally inclined as the rotating frame 15 is inclined.

As described above, the upper cover 62 moves with the horizontal moving base 16 in the front-rear direction, but the positional relationship between the upper cover 62 and the lower cover 67 changes depending on the raising / lowering operation and the tilting operation of the lower cover 67. In some cases, a gap may be formed between the lower cover 67 and the lower cover 67.
In such a case, the flexible sheet 63 extends between the upper cover 62 and the lower cover 67 so as to ensure the hermeticity (coverability) of the polished portion. In this embodiment, the flexible sheet 63 is attached to the upper cover 62 and hangs downward. However, the lower end of the flexible sheet 63 is attached to the lower cover 67 (preferably the upper end). , The space between the upper cover 62 and the lower cover 67 may be completely sealed by the flexible sheet 63. At this time, the flexible sheet 63 is attached to both the upper cover 62 and the lower cover 67 with some allowance.

It should be noted that the polishing apparatus of the present invention is not limited to the illustrated example described above, and it goes without saying that various modifications can be made without departing from the spirit of the present invention. For example, in the above embodiment, the lower shaft is moved in the horizontal direction (front-back direction) and the vertical direction (up-down direction), but the lower shaft can be arbitrarily positioned in a plane where the inclination angle changes. In addition, it is only necessary that the two moving directions cross each other in the plane. In the above embodiment, the upper shaft structure has an angled connection structure between a swing shaft member called a pin and a lens holder, but has, for example, an upper shaft structure that performs a spherical center motion adapted to the lens surface. It may be something.

Further, the invention described in the present specification includes a first polishing member, a swing member connected to the first polishing member, and a first polishing member via a material to be polished with respect to the first polishing member. A second polishing member opposed to the first polishing member, a rocking drive means for rocking the rocking member, and a rotation driving means for rotating the second polishing member around the axis thereof, for polishing the workpiece. A polishing apparatus, comprising: a tilt adjusting unit configured to change a tilt angle of a rotation axis of the second polishing member with respect to the swing member; and a moving unit configured to move a position of the second polishing jig. And an angle detecting means for detecting a tilt angle by the tilt adjusting means, and a position detecting means for detecting a moving position by the moving means. In this case, it is preferable that the angle detecting means and the position detecting means are digital counters.

[0042]

As described above, according to the present invention,
Since the swing-side mechanism can be configured easily and rigidity can be increased without increasing the weight, the polishing pressure can be easily controlled and the position accuracy of the polishing member can be increased, thus improving the polishing accuracy. Can be done.

[Brief description of the drawings]

FIG. 1 is a vertical sectional view of the structure of an embodiment of a polishing apparatus according to the present invention, as viewed from the right side.

FIG. 2 is a longitudinal sectional view of the structure of the embodiment as viewed from the front.

FIGS. 3A to 3C are diagrams illustrating a procedure of an adjustment operation in the embodiment. FIGS.

FIG. 4 is a partial longitudinal sectional view showing a mounting structure of the polishing cover in the embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Frame 11 Lower rotating shaft 15 Rotating frame 16 Horizontal moving base 17 Horizontal moving frame 18 Horizontal moving guide 19 Vertical moving base 22 Vertical moving guide 23 Horizontal drive shaft 25, 36, 47 Digital counter 33 Vertical drive shaft 43 Inclined drive shaft 62 Upper cover 63 Flexible sheet 67 Lower cover

Claims (6)

[Claims] A first polishing member, an oscillating member connected to the first polishing member, a second polishing member opposed to the first polishing member via a workpiece, and the oscillating member. A polishing apparatus for polishing the workpiece to be polished, comprising: a oscillating drive means for oscillating a member; and a rotary drive means for rotating the second polishing member around an axis thereof, wherein the second polishing member Tilt adjusting means for changing the tilt angle of the rotation axis of the rotary member with respect to the rocking member, and first moving means for moving the position of the second polishing jig in a first direction along the tilt angle changing surface. And a second moving means intersecting the first direction and moving the position of the second polishing member in a second direction along the change surface. 2. The tilt adjusting means according to claim 1, wherein
Polishing means for detecting the tilt angle set by the first moving means and the second moving means and detecting means for detecting the position of the second polishing member in the first and second directions. apparatus. 3. The apparatus according to claim 2, wherein the detecting means is a digital counter attached directly or indirectly to a drive shaft of the tilt adjusting means, the first moving means and the second moving means. Polishing equipment. 4. The rotating frame according to claim 1, wherein the second polishing member is rotatably supported by a rotating frame configured to be rotatable by the tilt adjusting means. Is rotatably mounted on a primary moving base movable by one of the first moving means or the second moving means, and the primary moving base is rotated by the other of the first moving means or the second moving means. The polishing apparatus is mounted on a movable secondary movement base, and the inclination adjusting means is configured to set an inclination angle of the rotating frame with reference to the primary movement base. 5. The method according to claim 1, further comprising an upper cover and a lower cover for covering the first polishing member and the second polishing member, wherein the upper cover is provided with the first polishing member. It is formed in a frame shape surrounding the polishing member and the second polishing member in a plane, and the lower cover has a bottomed shape having a predetermined depth so as to cover the first polishing member and the second polishing member from below. Formed, a flexible member is disposed for covering a gap between the upper cover and the lower cover,
One of the upper cover and the lower cover is the second cover
A polishing apparatus characterized in that it can be inclined together with the polishing member or its supporting structure, and can move in the first direction and the second direction. 6. The device according to claim 5, wherein the first direction is a vertical direction, the second direction is a horizontal direction, and one of the upper cover and the lower cover is the second polishing member or a support thereof. A polishing apparatus, which is configured to be movable in the second direction together with a structure.