JP2001157999A - Noncontact micromanipulation device and method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a noncontact micromanipulation device and method of a simple constitution capable of moving a fine-object in a parallel direction to a vibration surface of an ultrasonic vibrator in a short time. SOLUTION: A horn 2 and a reflection plate 1 for enlarging vibration of an ultrasonic vibrator 3 are disposed to face each other, and ultrasonic waves are generated from the ultrasonic vibrator 3 to form a standing wave sound field. Fine-grains 9 existing in medium between the horn 2 and the reflection plate 1 are caught by a node of sound pressure of the standing wave sound field. As a sound pressure controller 4 is disposed in the standing wave sound field, a range of a lower pressure than the node of the sound pressure of the standing wave sound field. The fine-grains 9 caught by the node of the sound pressure are moved to the range of the lower pressure to be stabilized. By moving the sound pressure controller 4 then, the fine-grains 9 follow it to move.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-contact micromanipulation apparatus and method for handling a small object in a non-contact manner using ultrasonic waves, and more particularly, to an ultrasonic vibrator having a simple structure and capable of moving a small object in a short time. The present invention relates to a non-contact micromanipulation apparatus and a method that can move in a direction parallel to a vibration plane of a non-contact type.

[0002]

2. Description of the Related Art In the field of medicine, an operation of injecting sperm into an egg cell having a diameter of 100 μm is routinely performed. Further, by using a scanning tunneling microscope, it is even possible to arrange atoms one by one artificially. The ability to handle things as small as an atom seems to have already acquired the technology to handle everything in the world.

[0003] However, a handling technique has not been established in a wide range from 100 µm to 10 nm. This means
It has become a major obstacle to the development of various scientific fields, such as higher densities of electronic devices and development of micromachines. 100μ
In the region from m to 10 nm, unlike the phenomenon on the macro scale that we often see, the intermolecular force such as van der Waals force and the electrostatic force are extremely large compared to the gravity of an object. This is because the gravity rapidly decreases in proportion to the cube of the size of the object. Therefore, in this technical field, the adhesive force cannot be ignored.
For example, a minute object having a size of 100 μm or less can be attached to the needle and lifted up simply by touching it with the tip of a fine needle.
However, even if a minute object is conveyed in a contact state, the minute object cannot be easily separated from a carrier such as a needle, so that handling as expected becomes difficult. As can be seen from this, in the micromanipulation technique, it is necessary to handle the target object in a non-contact state.

And a method using an electrostatic force so far,
Active research has been conducted on a method using laser beam radiation power (laser manipulation) as a technology candidate.

The method using the electrostatic force has a short operating distance, and discharge may occur depending on the distance between the electrodes and the surrounding environment such as humidity. In addition, there is a need for a small object to be handled, which needs to have a charging property, and also has a number of problems, such as a need to have a stable property.

[0006] In the laser manipulation technique, it is necessary that the minute object has optical characteristics such as being limited to those which optically transmit and refract light. For example, a minute object absorbs light energy that should be the driving force, causing a temperature rise of the minute object and further causing a melting phenomenon. The minute object absorbs light in the wavelength region of the irradiated laser light. This is because the. In addition, one of the problems is that the laser manipulation requires expensive equipment.

As is well known, when an object in the air or water is irradiated with ultrasonic waves, a force is applied to the object in one direction. This power is called the radiation forc
e). This force is analytically obtained using a fluid dynamics method when the shape of the object is relatively simple. When the shape of the object is a sphere and the sound wave is a plane traveling wave, the radiation force is given by the following equation (1).

(Equation 1) Here, r is the radius of the sphere, I is the intensity of the incident sound wave, and C ₀ is the sound velocity of the liquid. Y _P is called an acoustic radiation force function,
This is a very complicated function that depends on the elastic properties (density / compressibility) of the sphere and the propagation constant k = 2π / λ (where λ is the wavelength) of the sound wave in the liquid and r, which depends on kr.

Equation (1) is an equation of radiation power for a plane traveling wave. It is difficult to analytically determine the radiation force acting on a sphere for an arbitrary sound pressure distribution, but it is possible to obtain it for a sphere with a smaller radius than the sound wavelength. Radiation power is given by the following equation (2).

(Equation 2) Further, the case of a standing wave will be described using a one-dimensional model. The radiation force at this time is given by the following formulas (3) and (4), where <E> is the sum of <KE> and <PE>, and L is the distance between sound sources that generate standing waves.
It is represented as

(Equation 3)

(Equation 4) Equations (3) and (4) show that the sign of F is inverted depending on whether (D + 1−λ) is a positive value or a negative value. Many objects are trapped in the nodes of sound pressure in aqueous solution and atmosphere.
As a combination trapped in the antinode of the sound pressure, for example, a bubble in an aqueous solution and the like can be mentioned. A in the equation (4) can usually be arbitrarily changed by controlling the input power to the ultrasonic transducer forming the sound field. That is, what is important here is that it is possible to arbitrarily control the acoustic radiation force to particles existing in the sound field. These are the principles of ultrasonic manipulation.

Some manipulation methods utilizing the acoustic radiation pressure of the ultrasonic standing wave have been studied. In these manipulation methods, as shown in equations (2) to (4), if the acoustic radiation pressure is caused by a spatial change in the energy density of sound waves in a medium. Can be used. The object to be manipulated need only have an acoustic impedance different from that of the medium and reflect or absorb sound waves. That is, there is an advantage that the range of substances to be manipulated is extremely large.

As a conventional manipulation device utilizing the acoustic radiation pressure of such an ultrasonic standing wave, for example, Japanese Patent Application Laid-Open Nos.
An example is disclosed in Japanese Patent Publication No. 109283.

A manipulation apparatus disclosed in Japanese Patent Application Laid-Open No. 9-193055 has a concave ultrasonic transducer and a reflector disposed at a focal point of the concave ultrasonic transducer disposed in a liquid medium, and transmits ultrasonic waves from the ultrasonic transducer. The sound wave is generated to form a standing wave sound field in the liquid medium, and the minute object is injected into the liquid medium to capture the minute object at the node of the sound pressure. After that, by changing the frequency of the ultrasonic vibrator, the minute object captured at the node of the sound pressure is moved one-dimensionally on the sound axis.
Thus, the minute object can be stably captured in a predetermined narrow area, and the captured minute object can be moved in a predetermined direction with high accuracy.

[0012] In the manipulation apparatus disclosed in Japanese Patent Application Laid-Open No. 10-109283, a plurality of strip-shaped vibrating pieces arranged in an array and a reflector are placed in a liquid medium so as to face each other, and a plurality of vibrating pieces are arranged. Ultrasonic waves are generated from some of the vibrating pieces to form a standing wave sound field in the liquid medium, and a minute object is injected into the liquid medium to cause the node of the sound pressure to capture the minute object. Thereafter, by sequentially changing the vibrating reeds for generating ultrasonic waves, a minute object captured in a node of sound pressure is moved one-dimensionally in a direction in which a plurality of vibrating reeds are arranged. Thus, the minute object can be stably captured in a predetermined narrow area, and the captured minute object can be moved in a predetermined direction with high accuracy.

[0013]

SUMMARY OF THE INVENTION However, Japanese Patent Application Laid-Open No. 9-1
According to the conventional manipulation device disclosed in Japanese Patent No. 93055, a minute object can be moved only one-dimensionally on a sound axis, and the frequency must not be finely changed in order to move the minute object. There is a problem that the ultrasonic transducer cannot be moved in a direction parallel to the vibration plane of the ultrasonic transducer in a short time.

According to the conventional manipulation apparatus disclosed in Japanese Patent Application Laid-Open No. 10-109283, a minute object can be moved only one-dimensionally in a direction in which a plurality of vibrating bars are arranged, and the minute object is moved. Therefore, there is a problem that a minute object cannot be moved in a short time because a plurality of vibrating pieces must be sequentially driven. In addition, since a plurality of vibrating pieces are required, cost is increased and a configuration is complicated. There is a problem of doing.

Therefore, an object of the present invention is to provide a simple configuration,
An object of the present invention is to provide a non-contact manipulation device and a method capable of moving a minute object in a direction parallel to a vibration surface of an ultrasonic transducer in a short time.

[0016]

According to the present invention, in order to achieve the above object, an ultrasonic vibrator and a reflecting plate are arranged opposite to each other at a predetermined distance in a medium in which a minute object exists, and the ultrasonic vibration A standing wave sound field is generated in the medium by generating ultrasonic waves from the transducer to capture the minute object at a node of the sound pressure of the standing wave sound field, and the captured minute object moves in a non-contact manner In the non-contact micromanipulation device, the ultrasonic wave has a higher reflectivity than the medium, and is arranged in the standing wave sound field, so that the pressure of the sound pressure is lower than that of the node of the sound pressure in the standing wave sound field. A non-contact micromanipulation device comprising a sound pressure controller for forming a region. According to the above configuration, when the sound pressure controller is arranged in the standing wave sound field, the minute object captured in the node of the sound pressure of the standing wave sound field moves to the low pressure area of the sound pressure controller, Try to stabilize. Therefore, when the sound pressure controller is moved in a direction parallel to the vibration plane of the ultrasonic transducer, the minute object moves following the movement.

According to the present invention, in order to achieve the above object, an ultrasonic oscillator and a reflecting plate are arranged facing each other at a predetermined distance in a medium in which a minute object exists, and an ultrasonic wave is generated from the ultrasonic oscillator. A non-contact micromanipulation method for forming a standing wave sound field in the medium to capture the minute object at a node of the sound pressure of the standing wave sound field, and moving the captured minute object without contact. In the standing wave sound field, a sound pressure controller having a reflectivity of the ultrasonic wave larger than the medium is arranged in the standing wave sound field to form a region in the standing wave sound field having a pressure lower than a node of the sound pressure. Moving the minute object from the node of the sound pressure to the low pressure area to capture the minute object, and moving the sound pressure controller to move the minute object in a non-contact manner to move the sound pressure controller. Non-contact My, characterized by following To provide Russia Manipulation method.

[0018]

FIG. 1 shows a non-contact micromanipulation apparatus according to a first embodiment of the present invention. The apparatus includes a reflector 1 made of a ceramic flat plate, an exponential horn 2 opposed to the reflector 1, for example, and a reflector 1 disposed between the reflector 1 and the horn 2. A particle controller 4 that captures and moves the fine particles 9 with a radiator and emits ultrasonic waves to form a standing wave sound field between the horn 2 and the reflector 1. For example, a bolted Langevin type vibrator (BLT) Vibrator 3 composed of an oscillator and a function generator 6 for oscillating a sinusoidal AC voltage
And a power amplifier 5 that amplifies the sine wave AC voltage oscillated by the function generator 6 and inputs the amplified voltage to the ultrasonic transducer 3.

The horn 2 mechanically amplifies the vibration generated by the ultrasonic vibrator 3, in other words, increases the sound pressure of the generated ultrasonic wave. The tip of the horn 2 has, for example, a diameter of 50 mm and is made to oscillate in phase (piston oscillation) in the direction of the arrow in FIG.

The particle controller 4 can be moved by an XY axis micrometer so as to draw an arbitrary trajectory. Thereby, the position of the fine particles 9 can be controlled with high accuracy. Note that the particle controller 4 may be moved manually without using the XY axis micrometer. Thereby, a simple configuration can be obtained.

Next, the operation of the present apparatus will be described with reference to the drawings.

FIG. 2A shows a state in which a standing wave sound field is formed. Resonance frequency 19.84k as ultrasonic transducer 3
When a power of 3 W is applied to the ultrasonic vibrator 3 at a frequency of about 3 Hz, the sound pressure of the ultrasonic sound field radiated at this time becomes 1
00 [N / m ² ] (134 dB in dB notation). At this time, the distance between the tip surface (vibration surface) 2a of the horn 2 and the reflection surface 1a of the reflection plate 1 is arranged so as to be an integral multiple of a half wavelength (λ / 2, where λ is a wavelength). FIG. 2
A standing wave sound field 10 having a sound pressure distribution as shown in FIG. When the medium is in the air at, for example, 24 ° C., the distance between the tip surface 2a of the horn 2 and the reflection surface 1a of the reflection plate 1 is an integral multiple of 8.7 mm. The node 10a of the sound pressure exists every half wavelength in a direction connecting the tip surface 2a of the horn 2 and the reflection surface 1a of the reflection plate 1.

FIG. 2B shows the capturing position of the fine particles 9. When, for example, foamed styrene particles having an average particle diameter of 100 μm are injected into the standing wave sound field 10 using a spatula as the fine particles 9, the action of the acoustic radiation force 11 in which the action direction (arrow in the figure) changes every quarter wavelength is applied. As a result, most of the fine particles 9 are captured by the node 10a of the sound pressure as shown in FIG.

FIGS. 3A and 3B show a state where two stainless steel rods 40 A are inserted into the standing wave sound field 10 as the particle controller 4. The left diagram is a diagram viewed from directly above, and the right diagram is a diagram viewed from the side. As shown in FIG. 1A, two stainless steel rods 40A are arranged opposite to each other so as to sandwich the fine particles 9 as the particle controller 4. In the initial position, 2
The two stainless rods 40A are arranged such that the fine particles 9 come to the position of the midpoint on the straight line connecting the two stainless rods 40A.
Place. In this case, the fine particles 9 receive the force of approaching each of them from the left and right stainless steel rods 40A equally,
As a result, the behavior is stabilized at the position of the midpoint on the straight line connecting the two stainless rods 40A. 2 in this state
When the stainless steel rod 40A is simultaneously moved to the left, the fine particles 9 follow this movement as shown in FIG. Moreover, even if the movement of the two stainless steel rods 40A is stopped, the phenomenon that the fine particles 9 directly contact the stainless steel rod 40A due to inertia does not eventually occur, and the linear movement between the two stainless steel rods 40A is always stable. Can be located at the midpoint.

FIGS. 4A and 4B show a particle controller 4 of a comparative example. The left diagram is a diagram viewed from directly above, and the right diagram is a diagram viewed from the side. In this comparative example, a single stainless steel rod 4 having a length of 15 mm and a diameter of 1 mm was used as the particle controller 4.
Use 0A. As shown in FIG. 2B, a node 10 of the sound pressure of the standing wave sound field 10 formed between the reflector 1 and the horn 2.
When a single stainless rod 40A is inserted in the state where the microparticles 9 are captured in a, as shown in FIG. 4A, the stainless steel rod 40A is captured by the node 10a of the sound pressure and stably performs ultrasonic levitation. The horizontal position is changed so that the fine particles 9 approach the stainless steel rod 40A simultaneously with the insertion of the stainless steel rod 40A.

When the position of the inserted stainless steel rod 40A is close to the fine particles 9, the horizontal position is changed so that the fine particles 9 approach, and finally, as shown in FIG. Contact rod 40A. Moreover, the behavior is stable in the contact state without leaving after the contact. That is, this means that when the stainless steel rod 40A is inserted into the standing wave sound field 10, the stainless steel rod 40A
A also indicates that it is a trapping point for particles.

The position of the stainless rod 40A is
Is set in an area where the stainless steel rod 40
When A moves away from the fine particles 9, the fine particles 9 follow the movement and move in the same direction so as not to separate. This phenomenon was observed regardless of the material and electrical conductivity of the stainless steel rod 40A, and it was found that this phenomenon was not caused by electrostatic force.

Next, possible causes will be described below.
First, by inserting the stainless rod 40A, a portion having a low sound pressure is formed around the stainless rod 40A in addition to the periodic sound pressure node 10a formed by the standing wave.
At this time, a large spatial change in the energy density of the sound wave in the medium occurs, and the sound pressure in the vicinity of the rod 40A becomes a minimum value, so that an acoustic radiation force in the direction of the stainless steel rod 40A is generated. The stainless steel rod 40
The above phenomenon is observed even with a stainless steel plate instead of A, and there is no great dependence on the shape. It is necessary to pay attention to the relative positions of the stainless rod 40A, the fine particles 9, the horn 2, and these. Stainless rod 4
It is necessary to set the distance between 0A and the horn 2 which is the vibration surface to be equal to or smaller than the distance between the fine particles 9 and the horn 2. Under other conditions, the fine particles 9 do not follow the movement of the stainless rod 40A. But,
Fine particles 9 to be manipulated without contact as described above
It is a big problem that the stainless steel rod 40A comes in contact with the stainless steel. Even if the initial position of the stainless steel rod 40A is set to a region where the fine particles 9 do not directly adhere, if the fine particles 9 move following the movement of the stainless steel rod 40A, the movement of the stainless steel rod 40A is finally stopped. In some cases, the fine particles 9 continue to move due to the inertial force and directly contact the stainless rod 40A.

According to the first embodiment, the fine particles 9 can be stably captured in a predetermined narrow area, and
Even when the captured microparticles 9 are moved over a long distance in a direction parallel to the vibration plane of the ultrasonic transducer 3, the configuration is simple, and it is possible to move the microparticles 9 with high accuracy in a short time.

FIG. 5 shows a particle controller according to a second embodiment of the present invention. FIG. 5A shows a case where three stainless rods 40 </ b> A are used as the particle controller 4.
(B), when four tenless rods 40A are used,
FIG. 4C shows four triangular stainless steel plates 4.
0B is shown. It is necessary to arrange three or more stainless steel rods 40A or stainless steel plates 40B as the particle controller 4 so as to be linearly symmetric, and to arrange the fine particles 9 at the center of the symmetry. If these are not satisfied, the behavior of the fine particles 9 becomes extremely unstable, and micromanipulation becomes difficult.

FIGS. 6A to 6D show a particle controller according to a third embodiment of the present invention. The upper part is a plan view, and the lower part is a side view. The particle controller 4 according to the third embodiment has an opening 41 and uses a linearly symmetric stainless steel ring 40C. In this case, the fine particles 9 are arranged on an axis passing through the center of the opening 41 of the stainless steel ring 40C. According to the third embodiment, it is not necessary to simultaneously control the plurality of stainless steel rods 40A or the stainless steel plates 40B as compared with the configuration in which the plurality of stainless steel rods 40A or the stainless steel plates 40B are combined. Only the position control of the particle controller 4 is facilitated because only the control of the particle controller 4 is required.

FIGS. 7A to 7D show a particle controller according to a fourth embodiment of the present invention. The upper part is a plan view, and the lower part is a side view. The particle controller 4 according to the fourth embodiment has a concave portion 42 and uses a linearly symmetric stainless steel curved body 40D. In this case, the fine particles 9 are arranged inside the concave portion 42 of the stainless curved body 40D. According to the fourth embodiment, the same effects as in the third embodiment can be obtained.

FIGS. 8A to 8F show a particle controller according to a fifth embodiment of the present invention. The particle controller 4 according to the fifth embodiment is a shutter controller 40E that can freely change the size of the opening 41, and includes a fixed ring 43.
And a plurality of movable wings 4 protruding inward from the fixed ring 43.
4 is provided. When a plurality of fine particles 9 are captured at the center position of the opening 41 by the particle controller 4, if the size of the fine particles 9 is extremely small compared to the size of the opening 41 of the particle controller 4, the distance between the fine particles 9 will be large. May remain larger than desired. Therefore, when it is desired to reduce the distance between these fine particles 9, the shutter type controller 40E
The purpose can be achieved by changing the size of the opening portion 41 of the above.

FIGS. 9 and 10 show a procedure for capturing the fine particles 9. First, the opening 41 is formed as shown in FIGS.
As shown in (c) and (d), the movable blade 44 is moved to make the opening 41 smaller, and the floating fine particles 9 are aggregated at the center. Next, FIGS. 10 (a), (b), (c)
As shown in FIG.
Is moved to cause the fine particles 9 to follow this.

According to the fifth embodiment, the positions of the plurality of fine particles 9 can be controlled by one particle controller 4.

FIG. 11 shows a non-contact micromanipulation apparatus according to a sixth embodiment of the present invention. This device is different from the first embodiment in that, for example, the inside diameter 98
mm is filled with water as a liquid medium 8 for propagating ultrasonic waves in an acrylic water tank 7 mm.
A horn 2 and a particle controller 4 are arranged, and the other components are configured in the same manner as in the first embodiment. This sixth
According to the embodiment, the liquid has a larger acoustic impedance than the gas, so that it is possible to generate a sufficient sound pressure with a low input power.

FIG. 12 shows a non-contact micromanipulation apparatus according to a seventh embodiment of the present invention. In the seventh embodiment, the horn 2 is omitted from the sixth embodiment. According to the seventh embodiment, the resonance frequency of the ultrasonic transducer 3 is 19.84 k.
In the case of using one having two near Hz and near 201 kHz, the distance between the vibrating surface of the horn 2 and the reflector 1 is
For example, in water at 24 ° C., 37.8 mm and 3.73 mm
mm. 36 μm average particle size as fine particles 9
Are suspended in water and then injected into a standing wave sound field using a pipette, and the fine particles 9 can be freely moved using the particle controller 4 as in the atmosphere.

Although stainless steel is used as the material of the particle controller 4 in the above embodiment, the material is not limited to stainless steel. If the transmittance and reflectivity of the ultrasonic wave are significantly different from those of the ultrasonic wave propagation medium (atmosphere or water), application is possible, and most solid materials satisfy this. Examples of such a material include bakelite, polystyrene, glass, lead, copper, nickel, and aluminum. Further, in the above embodiment, the AC voltage applied to the ultrasonic transducer 3 has a sinusoidal waveform, but is not limited to this. For example, a rectangular AC voltage may be used.

[0039]

As described above, according to the non-contact micromanipulation apparatus and method of the present invention, a sound pressure controller is disposed in a standing wave sound field to capture a minute object,
A small object can be handled simply by moving the sound pressure controller in a direction parallel to the vibration plane of the ultrasonic vibrator, so the configuration is simple and the micro object can be moved in parallel with the vibration plane of the ultrasonic vibrator in a short time. It is possible to move in the direction.

[Brief description of the drawings]

FIG. 1 shows a non-contact micromanipulation device according to an embodiment of the present invention.

FIG. 2A shows a standing wave formed between a reflecting surface and a vibrating surface, and FIG. 2B shows a particle capturing position.

FIGS. 3A and 3B schematically show the behavior of fine particles when two stainless steel rods are inserted into a standing wave sound field as a particle controller according to the first embodiment of the present invention. The figure shown

FIGS. 4A and 4B are diagrams schematically showing behavior of fine particles when one stainless rod is inserted into a standing wave sound field as a particle controller as a comparative example.

FIG. 5 is a diagram schematically showing the positions of fine particles when the particle controller according to the second embodiment of the present invention is inserted into a standing wave sound field, and FIG. (B) shows a case where four stainless steel rods are used as a particle controller, and (c) shows a case where four stainless steel plates are used as a particle controller.

FIGS. 6A to 6D are views showing the shape of a particle controller according to a third embodiment of the present invention.

FIGS. 7A to 7D are diagrams showing a shape of a particle controller according to a fourth embodiment of the present invention.

FIGS. 8A to 8F are diagrams showing a shape of a particle controller according to a fifth embodiment of the present invention.

FIGS. 9A to 9D are diagrams schematically showing the behavior of fine particles when the particle controller according to the fifth embodiment is inserted into a standing wave sound field.

FIGS. 10A to 10C are diagrams schematically showing the behavior of fine particles when the particle controller according to the fifth embodiment is moved in a standing wave sound field.

FIG. 11 shows a non-contact micromanipulation device according to a sixth embodiment of the present invention.

FIG. 12 is a diagram showing a non-contact micromanipulation device according to a seventh embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Reflector 1a Reflection surface 2 Horn 2a Vibration surface 3 Ultrasonic vibrator 4 Particle controller 5 Power amplifier 6 Function generator 7 Water tank 8 Liquid medium 9 Fine particles 10 Standing wave sound field 10a Sound pressure node 11 Acoustic radiation force 40A Stainless rod 40B Stainless Plate 40C Stainless Ring 40D Stainless Curved Body 40E Shutter Controller 41 Opening 42 Recess 43 Fixed Ring 44 Movable Wing

Continuing on the front page (72) Inventor Shinichi Kuramoto 430 Nakai-cho Sakai-Kamigami-gun, Kanagawa Prefecture Inside Green Tech Nakafuji Fuji Xerox Co., Ltd. F term (reference) 3F060 AA01 BA10 HA00

Claims (7)

[Claims] An ultrasonic transducer and a reflecting plate are disposed facing each other at a predetermined distance in a medium in which a minute object exists, and an ultrasonic wave is generated from the ultrasonic transducer to generate a standing wave sound in the medium. A non-contact micromanipulation apparatus for forming a field to capture the minute object at a node of the sound pressure of the standing wave sound field and to move the captured minute object in a non-contact manner; Having a sound pressure controller that is arranged in the standing wave sound field to form a region of a lower pressure than the node of the sound pressure in the standing wave sound field. Contactless micromanipulation device. 2. The non-contact micromanipulation apparatus according to claim 1, wherein said sound pressure controller has a line or point symmetric shape. 3. The non-contact micromanipulation device according to claim 1, wherein said sound pressure controller has a line or point symmetric shape, and said shape is variable. 4. The non-contact micromanipulation apparatus according to claim 1, wherein said medium is a liquid or a gas. 5. An ultrasonic vibrator and a reflection plate are disposed facing each other at a predetermined distance in a medium in which a minute object is present, and ultrasonic waves are generated from the ultrasonic vibrator to generate a standing wave sound in the medium. A non-contact micromanipulation apparatus for forming a field to capture the minute object at a node of the sound pressure of the standing wave sound field and to move the captured minute object in a non-contact manner; And a sound pressure controller that is arranged in the standing wave sound field to form a lower pressure region than the node of the sound pressure in the standing wave sound field, and the sound pressure controller A non-contact micromanipulation device comprising: 6. The sound pressure control device such that the distance between the ultrasonic transducer and the sound pressure controller is less than or equal to the distance between the ultrasonic transducer and the minute object. The non-contact micromanipulation device according to claim 5, wherein the device is configured to move the vessel. 7. An ultrasonic vibrator and a reflection plate are disposed facing each other at a predetermined distance in a medium in which a minute object exists, and an ultrasonic wave is generated from the ultrasonic vibrator to generate a standing wave sound in the medium. A non-contact micromanipulation method of forming a field and capturing the minute object at a node of the sound pressure of the standing wave sound field, and moving the captured minute object in a non-contact manner; By arranging a sound pressure controller having a reflectivity of the ultrasonic wave larger than the medium and forming a region having a pressure lower than the node of the sound pressure in the standing wave sound field, the minute object is adjusted to the sound pressure. Moving the sound pressure controller from a node to the low-pressure area to capture the minute object, and moving the sound pressure controller to follow the movement of the sound pressure controller in a non-contact manner. Micromanipulation method.