JP2001153299A - Module block for accumulation type gas supply unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a module block for an accumulation type gas supply unit of a perfect surface mount with no sealing surface on a channel part of the module block itself. SOLUTION: A gas inflow port 12 and a gas outflow port 13 of an upper surface are communicated to each other by a V shaped through hole 14 on a module block 11 to connect a functional part such as an opening and closing valve having a sealing structure to be specified in a semi-standard of 2787.1. Thereafter, the perfect surface mount is made and stable sealing performance is provided by positioning an input port on the gas outflow port 13 and an output port on the gas inflow port 12 and fixing them by mounting bolts through holes 16, 16 by straddling over the two module blocks 11, 11 in installing the functional part.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor equipment and materia which is a standard of the semiconductor and flat panel display (FPD) industry.
ls Institute) Standards (SEMI Standards)
The present invention relates to a module block of functional components in an integrated gas supply unit in which functional components such as an on-off valve having a seal structure specified in 2787.1 are combined in series.

[0002]

2. Description of the Related Art In a semiconductor manufacturing process, a process gas such as an etching gas for photoresist processing is used. Photoresist processing (photoresist coating, exposure, development, etching) is repeated a plurality of times by changing the type of process gas. For this reason, in an actual semiconductor manufacturing process, a gas supply device that supplies a plurality of types of process gases as needed is used.

[0003] A gas supply device for supplying these process gases includes a mass flow controller for accurately measuring the flow rate, an inlet opening / closing valve provided before and after the mass flow controller for preventing process gas and the like from remaining in the mass flow controller, and an outlet. Open / close valve, purge valve, manual valve for manually supplying or shutting off process gas, regulator for adjusting gas pressure of process gas, pressure gauge for monitoring process gas pressure, mixing of process gas A filter for removing impurities is required as a component.

[0004] Conventional process gas supply includes functional components such as an inlet manual valve, a regulator, a filter, an inlet on-off valve, a mass flow controller for measuring the flow rate of process gas, an outlet on-off valve, and an outlet manual valve fixed to the gantry. Are connected to each other by pipes, and supplied to a semiconductor manufacturing process from a high-pressure cylinder filled with process gas. However, in this method, since each module block on which each functional component is mounted is connected by piping, there is a problem that particles are generated due to welding of the piping connection and gas leakage due to corrosion of the connection. is there.

[0005] For this reason, a recent process gas supply device is an integrated gas supply system in which each module block having functional components mounted thereon can be connected to each other in a flow sheet manner without using a gas pipe. A unit is used.

An integrated gas supply unit is disclosed in, for example,
No. 227836, as described in JP-A-10-214117, input ports and output ports of each module block of each of the functional components, a direction conversion block, an input conversion block, an output conversion block, a flow path block, etc. And connected according to the flow sheet. Each of these blocks plays the role of a flow path connecting each functional component of the integrated gas supply unit (corresponding to the conventional piping part) and the role of fixing and connecting them (corresponding to the pedestal portion of each conventional functional component) It is a block that has.

Japanese Patent Application Laid-Open No. 11-51226 discloses a module in which at least one of the functional components is mounted and a base plate for connecting between the module blocks is mounted on a mounting panel and connected according to a flow sheet. Have been.

[0008] In a module block in an integrated gas supply unit in which a functional component such as an on-off valve having a seal structure specified in the conventional SEMI standard 2787.1 is combined, an input port and an output port of the functional component are close to each other. For this reason, the module blocks are combined at a rate of one for each functional component, and each module block is connected to the flow sheet via a direction conversion block, an input conversion block, an output conversion block, a flow path block, a base plate, etc. In this case, a joint exists in the cross-sectional direction of the flow path between the blocks.

[0009]

For this reason, in an integrated gas supply unit combining functional parts such as an on-off valve having a sealing structure specified in SEMI Standard 2787.1, each module block is not a complete surface mount. There was a risk that stable sealing performance could not be obtained between the module blocks. In addition, the integrated gas supply unit for the process gas requiring heating has a structure in which a plate-type heater is attached to a side surface of each module block where no gas line is provided. For this reason, it is necessary to provide a larger space between the adjacent integrated gas supply unit than the integrated gas supply unit for the process gas that does not perform normal heating. It was not enough.

An object of the present invention is to provide a module block for an integrated gas supply unit of a complete surface mount, which solves the above-mentioned drawbacks of the prior art and does not have a sealing surface in a channel portion of the module block itself. is there.

[0011]

The module block for mounting a functional component such as an on-off valve having a seal structure specified in SEMI Standard 2787.1 of the series-arranged integrated gas supply unit of the present invention is provided with an input port of the functional component. It is divided between the output ports, and the gas inlet and gas outlet on the top
The output port of the upstream functional component is located at the gas outlet, and the input port of the downstream functional component is located at the gas inlet, and fixed across the two module blocks.
Therefore, each of the functional components is connected via the module block and has no sealing surface between the individual module blocks, so that stable sealing performance can be obtained.

Further, the module block for an integrated gas supply unit according to the present invention has a module for each of an inlet for the most upstream functional component, a purge valve, an outlet for the most downstream functional component, and an outlet for another functional component. By using the blocks, the input port and the output port of each functional component are fixedly connected to another module block, and since there is no sealing surface between the module blocks, stable sealing performance can be obtained.

[0013] Further, in the module block for an integrated gas supply unit of the present invention, through holes for disposing a cartridge heater parallel to the process gas transfer direction are provided on both sides of the gas flow path of each module block. Accordingly, in the case of a process gas that requires heating, a cartridge heater can be provided in the through hole of each module block, and there is no need to provide a space between adjacent gas supply units, and the size can be further reduced.

In the module block for an integrated gas supply unit of the present invention, a positioning ridge parallel to the process gas transport direction is provided on the back surface of each module block, so that each module block is positioned on the base plate with pins. It can be performed easily compared to the method.

[0015]

BEST MODE FOR CARRYING OUT THE INVENTION A module block for an integrated gas supply unit according to the present invention has a rectangular parallelepiped shape in which a gas inlet and a gas outlet for a process gas are provided on the upper surface and communicated with a V-shaped through hole. is there. For this reason, if a functional component is attached to one module block, the gas flow path cannot be formed, so the output port of the upstream functional component is connected to the gas inlet of the module block, and the input port of the downstream functional component is connected to the gas outlet. It is a structure to do. Therefore, each functional component is attached across two module blocks.

The most upstream module block has a rectangular parallelepiped shape in which the gas inlet of the process gas is provided on the front and the gas outlet is provided on the upper surface and communicates with the L-shaped through hole. Connect the piping. In the case of a single integrated gas supply unit,
A process gas outlet pipe is connected to the gas outlet with a rectangular parallelepiped shape in which the gas outlet of the process gas is provided on the back surface and the gas inlet is provided on the upper surface and communicated with an L-shaped through hole. In the case of a multi-line integrated gas supply unit, the module block at the most downstream is extended in the direction perpendicular to the direction of transport of the process gas, and one gas outlet for the process gas is provided on the back side, and each gas supply unit is A process gas outlet pipe is connected to a gas outlet having a rectangular shape in which a gas inlet is provided on the upper surface and communicated with a through hole.

In the case of a series of integrated gas supply units, the module block for the purge valve has a rectangular parallelepiped shape in which a purge gas introduction port is provided on a side surface and a purge gas outlet is provided on an upper surface and communicated with an L-shaped through hole. Then, a purge gas supply pipe is connected to the purge gas introduction port. In the case of a multi-line integrated gas supply unit, the rectangular module block is extended in a direction perpendicular to the process gas transport direction, one purge gas inlet is provided on the side, and the purge gas flow to each purge valve is provided. A purge gas supply pipe is connected to the purge gas introduction port in a rectangular shape having an inlet provided on the upper surface and communicating with a through hole.

In the module block for an integrated gas supply unit of the present invention, a through hole for disposing a cartridge heater for a process gas requiring heating is provided on both sides of a gas flow path of each module block in a process gas transport direction. It is provided in parallel with. The through holes for disposing the cartridge heater are provided at the same position in each module block, so that the through holes of the module block row fixed to the base plate are linear.

Furthermore, in the module block for an integrated gas supply unit of the present invention, positioning ridges are provided parallel to the process gas transport direction over the entire back surface. Therefore, the base plate is provided with a counterbore long groove into which the positioning ridge is fitted. It is sufficient that the positioning ridge has a width of about 3 mm and a height of about 2 mm. It is sufficient that the width of the counterbore long groove is about 3.5 mm and the depth is about 3 mm.

When mounting the module block to the base plate, holes with counterbore are provided at both ends of the module block and the mounting bolts are used. Therefore, the head of the mounting bolt enters the counterbore hole, and it is difficult to mount the functional parts. No.

In the module block for an integrated gas supply unit of the present invention, holes are provided at both ends of the module block,
The mounting bolt of each functional component is screwed into the screw hole of the base plate or the backing plate behind the base plate through the holes at both ends of the module block, and the module block is fixed between the functional component and the base plate. Thereby, the sealing performance between each module block and each functional component can be maintained.

[0022]

Embodiment 1 A module block for an integrated gas supply unit according to the present invention will be described with reference to the drawings. FIG. 1 shows a block corresponding to the entrance of the most upstream functional component for an integrated gas supply unit, wherein FIG. 1 (a) is a plan view, FIG. 1 (b) is a front view, FIG. 1 (c) is a left side view, and FIG. Shows the structure of the block for the exit and entrance of the functional parts, (a) is a plan view, (b) is a front view, (c) is a left side view, and FIG. 3 is for introducing a series of purge gas. FIG. 4 (a) is a plan view, FIG. 4 (b) is a front view, FIG. 4 (c) is a left side view, and FIG. 4 shows a purge line block for introducing three types of purge gas. (A) is a plan view,
FIG. 5 (b) is a front view, FIG. 5 (c) is a left side view, FIG. 5 is a block showing an exit block of one series of the most downstream functional components, FIG. 5 (a) is a plan view, and FIG. Fig. 6 (c) is a left side view, Fig. 6 shows a block for the exit of the three most downstream functional components, Fig. 6 (a) is a plan view, Fig. 6 (b) is a front view, and Fig. 6 (c). Is a left side view.

As shown in FIGS. 1 (a) to 1 (c), an inlet block 1 for an uppermost functional component for an integrated gas supply unit is provided with a gas inlet 2 for connecting a process gas supply pipe to the front. A gas outlet 3 for the most upstream functional component is provided on the upper surface, and the gas inlet 2 and the gas outlet 3 are connected by an L-shaped through hole 4. At both ends of the inlet block 1, there are provided a counterbore hole 5 for positioning the inlet block 1 on the base plate and a hole 6 for mounting the most upstream functional component. At a diagonally lower portion of the L-shaped through hole 4 of the entrance block 1, a through hole 7 for disposing a cartridge heater is provided in parallel with the process gas transport direction. At the center of the back surface of the entrance block 1, a ridge 8 for block positioning is provided over the entire length in parallel with the horizontal portion of the L-shaped through hole 4.

As shown in FIG. 2, an outlet / inlet block 11 for a functional component for an integrated gas supply unit is provided with a gas inlet 12 from the functional component and a gas outlet 13 to the functional component on the upper surface. The inflow port 12 and the gas outflow port 13 communicate with each other through a V-shaped through-hole. At both ends of the outlet inlet block 11, there are provided a counterbore hole 15 for positioning the outlet inlet block 11 on the base plate and a hole 16 for mounting a functional component. On both sides of the V-shaped through hole 14 of the outlet / inlet block 11, through holes 17 for disposing a cartridge heater are provided in parallel with the process gas transport direction. At the center of the back surface of the outlet / inlet block 11, a ridge 18 for positioning the block is provided over the entire length in parallel with the process gas transport direction.

The purge valve block 21 for a series of integrated gas supply units shown in FIG. 3 is provided with a purge gas introduction port 22 for connecting a purge gas introduction pipe on the side surface, and a purge gas outlet 23 for the purge valve on the top surface. The purge gas inlet 22 and the purge gas outlet 23 communicate with each other through an L-shaped through hole 24. On the opposite side of the purge gas introduction port 22 of the purge valve division block 21, a counterbore hole 25 for positioning the purge valve division block 21 on the base plate is provided. At a diagonally lower portion of the purge gas outlet 23 of the purge valve distribution block 21, a through hole 27 for disposing a cartridge heater is provided in parallel with the process gas transport direction. At the center of the back surface of the purge valve dividing block 21, a ridge 28 is provided in parallel with the process gas transport direction to position the purge valve dividing block 21 on the base plate.

In a plurality of series, for example, three series purge valve block 21a shown in FIG. 4, the purge valve block 21a is extended in a direction perpendicular to the process gas conveying direction, and a purge gas introduction pipe for connecting a purge gas supply pipe. One port 22a is provided on the side, and a purge gas outlet 23 to the purge valve is provided for each unit.
a, 23b, and 23c are provided on the upper surface and communicate with each other through a longitudinal through hole 24a. On the opposite side of the purge gas introduction port 23a of the purge valve division block 21a, a counterbore hole 25a for positioning the purge valve division block 21a on the base plate is provided. Further, through holes 27a, 27b, and 27c for disposing a cartridge heater are provided in a diagonally lower portion of the purge gas outlets 23a, 23b, and 23c of each unit of the purge valve distribution block 21a in parallel with the process gas transport direction. Protrusions 28a, 28b, 28c for block positioning are provided on the back surface of the purge valve block 21a over the entire length in parallel with the process gas transport direction.

The block 31 for the outlet of the most downstream functional component for the integrated gas supply unit of one series shown in FIG. 5 is provided with a gas inlet 32 from the most downstream functional component on the upper surface in the case of one series, and the process on the back. A gas outlet 33 for connecting a gas extraction pipe is provided, and the gas inlet 32 and the gas outlet 33 communicate with each other through an L-shaped through hole 34. At both ends of exit minute block 31, exit minute block
A hole 35 with a counterbore for positioning 31 on the base plate and a hole 36 for mounting the most downstream functional component are provided. At a diagonally lower portion of the L-shaped through hole 34 of the outlet block 31, a through hole 37 for disposing a cartridge heater is provided in parallel with the process gas transport direction. In the center of the back surface of the outlet block 31, a ridge 38 for positioning the block is provided over the entire length in parallel with the process gas transport direction.

The outlet block 31a of a plurality of lines, for example, three lines shown in FIG. 6, extends the outlet block 31a in a direction perpendicular to the direction of transporting the process gas. Gas inlets 32a, 32b, and 32c are provided, and one gas outlet 33a for connecting a process gas extraction pipe is provided on the back surface, and communicates with the longitudinal through hole 34a.
At both ends of the outlet minute block 31a, holes 35a with counterbore for positioning the outlet minute block 31a on the base plate.
Is provided. In the outlet block 31a, holes 36a, 36b, 36 for attaching the outlet of the most downstream functional component of each unit are provided.
c is provided. Gas inlets 32a, 32b of the outlet minute block 31a,
At the oblique lower part of 32c, through holes 37a, 37b, 37c for disposing the cartridge heater are provided in parallel with the process gas transport direction. On the back surface of the outlet block 31a, ridges 38a, 38b, 38c for block positioning are provided for each unit over the entire length in parallel with the process gas transport direction.

The module block for an integrated gas supply unit according to the present invention comprises an inlet block 1 and an outlet inlet block 1.
1. Consists of a purge valve block 21 and an outlet block 31. Among them, the purge valve block 21 and the outlet block 31 may be a plurality of systems. The most upstream functional component is mounted with the inlet block 1 and the outlet inlet block 11 between the base plate and the base plate. The purge valve is attached to the base plate with the outlet inlet block 11, the purge valve block 21 and the outlet inlet block 11 interposed therebetween. The most downstream functional component is attached to the base plate with the outlet inlet block 11 and the outlet block 31 interposed therebetween. The other functional components are attached to the base plate with the outlet inlet block 11 and the outlet inlet block 11 interposed therebetween. The process gas supply pipe is connected to the inlet block 1 and the purge gas introduction pipe is connected to the purge valve block 21.
, And the process gas extraction pipe is connected to the outlet block 31.

Therefore, the process gas is supplied to the inlet block.
1 is supplied by a process gas supply pipe, and the inlet block 1, the outlet inlet block 11 and the outlet block 21
Through each functional component through the outlet block 21. The purge gas is introduced into the purge valve block 21 by a purge gas introduction pipe, and enters the process gas system via the purge valve. For this reason, the entrance block 1 and the exit block 1
1. There is no sealing surface between the purge valve block 21 and the outlet block 31 at all, and the block is a complete surface mount seal block, and stable sealing performance can be obtained.

In the case of a process gas that requires heating, through-holes 7, 17, 17, 17, and 18, for disposing cartridge heaters in the installed inlet block 1, outlet inlet block 11, purge valve block 21, and outlet block 31. If a cartridge heater is inserted into 27 and 37, more uniform heating can be performed. For this reason, the entrance block 1 and the exit block 1
1. There is no need to provide a plate-shaped heater on the side surfaces of the purge valve block 21 and the outlet block 31, and there is no need to leave a large space between the block unit and other gas supply units.

In the module block for an integrated gas supply unit according to the present invention, the ridges 8, 18, 28, and 38 for positioning the block are provided over the entire length in parallel with the process gas transport direction, so that the module block is provided on the base plate. 8, 1
Positioning can be performed by inserting 8, 28, and 38, and positioning can be performed easily compared to the pin method.

Embodiment 2 An example of a series of integrated gas supply units using the integrated gas supply unit module block of the present invention will be described with reference to FIG. FIG. 7 is a side view of a gas supply unit using the module block for an integrated gas supply unit of the present invention. The inlet block 1, the outlet inlet block 11, the purge valve block 21 and the outlet block
See Example 1 for a description of 31.

The gas supply unit includes an inlet block 1, an outlet inlet block 11, a purge valve block 21 and an outlet block 31, a manual valve 41, a regulator 42, a pressure gauge 43, a filter 44, an input valve 45, a purge valve. 46, mass flow controller 47 and output valve 48 in combination, base plate 49
Be fixed to.

First, the inlet block 1 and the outlet inlet block 1
1a to 11d, 11g and the purge valve minute block 21 are positioned in the positioning tap holes provided in the base plate 49 with the positioning counterbore holes 5, 15, 25, 35, and are serially connected to the base plate 49 by mounting bolts. Fixed to. And
The manual valve 41 has an input port at the gas outlet 3 on the upper surface of the inlet block 1 and an output port at the gas inlet 12 on the upper surface of the outlet inlet block 11a. To the base plate 49.

The regulator 42 has an input port located at the gas outlet 13 on the upper surface of the outlet inlet block 11a and an output port located at the gas inlet 12 on the upper surface of the outlet inlet block 11b.
Base plate by mounting bolts through holes 16,16
Fix to 49. The pressure gauge 43 has an input port at the gas outlet 13 on the upper surface of the outlet inlet block 11b and an output port at the gas inlet 12 on the upper surface of the outlet inlet block 11c,
Base plate by mounting bolts through holes 16,16
Fix to 49.

The filter 44 has an input port at the gas outlet 13 on the upper surface of the outlet inlet block 11c, and an outlet inlet block.
An output port is located at the gas inlet 12 on the upper surface of 11d, and the base plate 49
Fixed to. The input valve 45 locates the outlet inlet block 11e between the outlet inlet block 11d and the purge valve block 21 and the gas outlet 13 on the upper surface of the outlet inlet block 11d.
The input port is located at the gas inlet 12 on the upper surface of the outlet inlet block 11e, and the output port is fixed to the base plate 49 through the holes 16 and 16 by mounting bolts.

[0038] The purge valve 46 has an outlet inlet block 11f located downstream of the purge valve block 21 and has an input port at the gas outlet 13 on the upper surface of the outlet inlet block 11e, and an input port on the upper surface of the outlet inlet block 11f. Output port to gas inlet 12,
The purge gas input port is located at the purge gas outlet 23 on the upper surface of the purge valve distribution block 21, and is fixed to the base plate 49 by mounting bolts through the holes 16, 16.

In the mass flow controller 47, an input conversion block 52 is fixed to an input port, and an output conversion block 53 is fixed to an output port. The input port of the input conversion block 52 fixed to the mass flow controller 47 is located at the gas outlet 13 on the upper surface of the outlet inlet block 11f, and the output port of the output conversion block 53 is located at the gas inlet 12 of the outlet inlet block 11g. The input conversion block 52 and the output conversion block 53 are separated by the mounting bolts into the exit and entrance blocks 11f,
Attach to the exit / entrance block 11g and
6 through the exit entrance minute block 11f, exit entrance minute block
11 g is fixed to the base plate 49 with mounting bolts.

The output valve 48 has an input port at the gas outlet 13 on the upper surface of the outlet inlet block 11g and an output port at the gas inlet 32 on the upper surface of the outlet block 31. To the base plate 49 with mounting bolts.

Therefore, the manual valve 41, the regulator 42, the pressure gauge 43, the filter 44, the input valve 45, the purge valve 46, the mass flow controller 47, and the output valve 48
1, outlet inlet block 11a-11g, purge valve block 2
It is fixed to the base plate 49 with the block 31 for 1 and the outlet. Further, a process gas supply pipe 50 is connected to the gas inlet 2 of the inlet block 1. A purge gas introduction pipe is connected to the purge gas introduction port 22 of the purge valve distribution block 21. A process gas outlet pipe 51 is connected to the gas outlet 33 of the outlet block 31.

Accordingly, the manual valve 41, the regulator 42, the pressure gauge 43, the filter 44, the input valve 45, the purge valve 46, the mass flow controller 47, and the output valve 48 are formed as an inlet block.
1.Exit entrance block 11a-11g and exit block 3
A flow path for the process gas is formed via the input conversion block 52, the input conversion block 52, and the output conversion block 53. For this reason, since there is no sealing surface between the inlet block 1, the outlet inlet blocks 11a to 11g, the purge valve block 21 and the outlet block 31, the reliability of the sealing performance is increased accordingly.

If the process gas requires heating, the inlet block 1 and the outlet inlet blocks 11a to 11g,
If a cartridge heater is attached to the through holes 7, 17, 27, 37 provided in the purge valve block 21 and the outlet block 31, it is necessary to provide more uniform heating and to provide an interval between adjacent gas lines. Therefore, it is possible to cope with the same interval as the gas line which does not perform heating.

[0044]

The module block for an integrated gas supply unit according to the present invention has a structure in which only the sealing surface of a connection part with a functional component such as an on-off valve having a sealing structure specified in SEMI Standard 2787.1 is used. Since there is no sealing surface between the module blocks, high sealing performance can be obtained. Since the basic structure of the module block is one block for the entrance and exit of the functional component, the flow can be easily changed by adding or deleting the module block. Further, since the module block is provided with a through hole for mounting a cartridge heater, there is no need to provide an interval for mounting a heat insulating material between the module block and an adjacent gas line.

[Brief description of the drawings]

FIG. 1 shows a block corresponding to an entrance of a most upstream functional component for an integrated gas supply unit according to the present invention, wherein (a) is a plan view, (b) is a front view, and (c) is a left side view. FIG.

FIGS. 2A and 2B show the structure of an outlet / entrance block of a functional component according to the present invention, wherein FIG. 2A is a plan view, FIG. 2B is a front view, and FIG.

3A and 3B show a purge valve block for introducing a purge gas in a series, wherein FIG. 3A is a plan view, FIG. 3B is a front view, and FIG. 3C is a left side view.

4A and 4B show three series of purge valve blocks for introducing purge gas. FIG. 4A is a plan view, FIG. 4B is a front view, and FIG. 4C is a left side view.

5A and 5B show a block for an exit of one series of the most downstream functional components, wherein FIG. 5A is a plan view, FIG. 5B is a front view, and FIG. 5C is a left side view.

6A and 6B show exit-side blocks of three series of most downstream functional components, wherein FIG. 6A is a plan view, FIG. 6B is a front view, and FIG. 6C is a left side view.

FIG. 7 is a schematic side view of a gas supply unit using the integrated gas supply unit block of the present invention.

[Explanation of symbols]

1 Inlet block 2, 12, 32, 32a, 32b, 32c Gas inlet 3, 13, 33, 33a Gas outlet 4, 24, 34 L-shaped through hole 5, 15, 25, 25a, 35, 35a Seat Bored holes 6, 16, 26, 36, 36a, 36b, 36c Holes 7, 17, 24a, 27, 27a, 27b, 27c, 34a, 37, 37a, 37b,
37c Through hole 8, 18, 28, 28a, 28b, 28c, 38, 38a, 38b, 38c Ridge 11, 11a, 11b, 11c, 11d, 11e, 11f, 11g Exit inlet block 14 V-shaped through hole 21 , 21a Purge valve block 22, 22a Purge gas inlet 23, 23a, 23b, 23c Purge gas outlet 31, 31a Outlet block 41 Manual valve 42 Regulator 43 Pressure gauge 44 Filter 45 Input valve 46 Purge valve 47 Mass flow controller 48 Output valve 49 Base plate 50 Process gas supply piping 51 Process gas lead-out piping 52 Input conversion block 53 Output conversion block

 ──────────────────────────────────────────────────の Continuing on the front page (72) Inventor Masato Shibasaki 1850 Minato, Wakayama City, Kyodo Oxygen Co., Ltd. (Reference) 3H051 BB02 BB03 BB10 CC01 FF01 FF15 3J071 AA02 BB14 BB15 CC11 DD36 EE01 EE24 FF11 5F004 AA16 BC01 BC03 5F045 EB05 EC07 EC09 EE02 EE04 EE10

Claims (4)

[Claims] 1. A module block for connecting functional parts such as an on-off valve of an integrated gas supply unit arranged in series, wherein a gas inlet and a gas outlet on an upper surface communicate with each other through a V-shaped through hole, and a SEMI standard. Each of the functional components having a seal structure defined in 2787.1 is fixed across two module blocks with an input port located at a gas outlet and an output port located at a gas inlet. Module block for mold gas supply unit. 2. An inlet for the most upstream functional component, a purge valve,
2. The module block for an integrated gas supply unit according to claim 1, wherein an outlet portion of the most downstream functional component and an outlet portion of the other functional components are each configured as one module block. 3. The method according to claim 1, wherein a through hole for disposing a cartridge heater is provided obliquely below the flow path of each module block along the entire length thereof in parallel with a process gas transport direction. A module block for an integrated gas supply unit according to any one of the above. 4. The integrated die according to claim 1, wherein a positioning ridge is provided on the back surface of each module block over the entire length in parallel with a direction in which the process gas is transported. Module block for gas supply unit.