JP2001152301A - Soft magnetic glassy alloy - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a soft magnetic glassy alloy having soft magnetism at room temperature and excellent in workability. SOLUTION: A soft magnetic glassy alloy, where the temperature interval ΔTx of supercooled liquid represented by equation ΔTx=Tx-Tg (where Tx and Tg are initial crystallization temperature and glass transition temperature, respectively) is >=20 K and which is represented by compositional formula (Fe1-aQa)100-x-y-z-v-wMxGayPzCvBw (wherein, element Q is either o both of Co and Ni; element M is one or more elements among Nb, Zr, Mo, Cr, V, W, Ta, Hf and Ti; x, y, z, v and w showing composition ratio satisfy, in atomic percentage, 0.5<=x<=15, 0.5<=y<=8, z<=15, v<=7 and 2<=w<=10, respectively; and (a) stands for 0 to 0.15) is adopted.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a soft magnetic metallic glass alloy, and more particularly to a soft magnetic metallic glass alloy having excellent magnetic properties and excellent workability.

[0002]

2. Description of the Related Art Certain types of multi-element alloys have conventionally been
It has a wide temperature range in the state of the supercooled liquid before crystallization, these are glassy alloys
Is known to constitute. It is also known that this kind of metallic glass alloy becomes a bulk alloy much thicker than a thin ribbon of an amorphous alloy manufactured by a conventionally known liquid quenching method. For example, conventionally, as such metallic glass alloys, Ln-Al-TM, Mg-Ln-
TM, Zr-Al-TM, Hf-Al-TM, Ti-Zr-B
Compositions such as e-TM (where Ln represents a rare earth element and TM represents a transition metal) are known.

[0003]

However, none of these conventionally known metallic glass alloys has magnetism at room temperature, and in this respect, when viewed as a magnetic material, it is industrially large. There were restrictions. Therefore, research and development of metallic glass alloys having magnetism at room temperature have been conventionally carried out.

[0004] Here, even if the alloys of various compositions show a supercooled liquid state, the temperature interval ΔTx between these supercooled liquids, ie, the crystallization start temperature (Tx) and the glass transition temperature (Tg), Considering that the difference, that is, the value of (Tx-Tg) is generally small and practically poor in metallic glass forming ability and impractical, the wide temperature range of the supercooled liquid as described above is considered. The existence of an alloy that can form a metallic glass by cooling has attracted much attention in metallurgy since it can overcome the thickness limitation of a conventionally known amorphous alloy as a ribbon. is there.
However, from a practical point of view, conventional metallic glass alloys having no magnetism at room temperature have not been of high industrial value.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a soft magnetic metallic glass alloy which has soft magnetism at room temperature and has excellent workability.

[0006]

In order to achieve the above object, the present invention employs the following constitution. In the soft magnetic metallic glass alloy of the present invention, when the temperature interval ΔTx of the supercooled liquid represented by the formula ΔTx = Tx−Tg (where Tx represents the crystallization start temperature and Tg represents the glass transition temperature) is 20K or more, There is a feature.

This soft magnetic metallic glass alloy is characterized by containing a metal element other than Fe and a metalloid element. It is preferable that the metalloid element is at least one of P, C, B and Ge. The metalloid element is at least one of P, C, B and Ge.
More than species and Si may be used. Further, the other metal elements include Nb, Zr, Mo, Cr, Co, V, W, T
Preferably, it is one or more of a, Hf, and Ti.

According to such a soft magnetic metallic glass alloy, F
e, the above-mentioned metalloid element and the above-mentioned metal element other than Fe.
The supercooled liquid has a temperature interval ΔTx of K or more, has excellent soft magnetic properties, and can exhibit high workability.

In particular, the soft magnetic metallic glass alloy of the present invention has a ΔΔ
The temperature interval ΔTx of the supercooled liquid represented by the formula of Tx = Tx−Tg (where Tx represents the crystallization start temperature and Tg represents the glass transition temperature) is 20K or more, and is represented by the following composition formula. Are preferred. (Fe _1-a Q a) except _{100-xyzvw M x Ga y P} z C v B w, the element Q is Co, and one or both of Ni, the element M is Nb, Zr, Mo, Cr, V , W, T
a, Hf, and at least one element of Ti, wherein x, y, z, v, and w indicating the composition ratio are atomic%, and 0.5 atomic% ≦
x ≦ 15 atomic%, 0.5 atomic% ≦ y ≦ 8 atomic%, z ≦ 1
5 atomic%, v ≦ 7 atomic%, 2 atomic% ≦ w ≦ 10 atomic%, and a is 0 ≦ a ≦ 0.15.

The composition ratios x, y, z, v and w are atomic%, and 2 atomic% ≦ x ≦ 12 atomic% and 0.5 atomic% ≦
y ≦ 4 at%, 5 at% ≦ z ≦ 12 at%, 2 at% ≦
v ≦ 7 at%, 2 at% ≦ w ≦ 10 at%. Further, x, y, z, v, w indicating the above composition ratios are atomic%, and 2 atomic% ≦ x ≦ 12 atomic%, 0.5 atomic% ≦ y ≦
4 atomic%, 7 atomic% ≦ z ≦ 12 atomic%, 5 atomic% ≦ v ≦
7 at%, 2 at% ≦ w ≦ 10 at%.

Further, the soft magnetic metallic glass alloy of the present invention has a Δ Δ
The temperature interval ΔTx of the supercooled liquid represented by the formula of Tx = Tx−Tg (where Tx represents the crystallization start temperature and Tg represents the glass transition temperature) is 20K or more, and is represented by the following composition formula. May be used. _{(Fe 1-a Q a)} 100-xyzvwt M x Ga y P z C v B w Si
_t However, the element Q is one or both of Co and Ni, and the element M is Nb, Zr, Mo, Cr, V, W, T
x, y, z, v, w, and t, which are one or more of a, Hf, and Ti, and indicate the composition ratio, are atomic%, and 0.5 atomic% ≦ x ≦ 15 atomic%; 5 atomic% ≦ y ≦ 8 atomic%, z
≦ 15 atomic%, v ≦ 7 atomic%, 2 atomic% ≦ w ≦ 10 atomic%, t ≦ 15 atomic%, and a is 0 ≦ a ≦ 0.15.

The composition ratios x, y, z, v, and w are atomic%, and 2 atomic% ≦ x ≦ 12 atomic% and 0.5 atomic% ≦
y ≦ 4 at%, 5 at% ≦ z ≦ 12 at%, 2 at% ≦
v ≦ 7 at%, 2 at% ≦ w ≦ 10 at%, 0.5 at% ≦ t ≦ 15 at%. The composition ratios x, y, z, v, and w are atomic%, and 2 atomic% ≦ x ≦ 12 atomic%, 0.5 atomic% ≦ y ≦ 4 atomic%, 7 atomic% ≦ z ≦ 1
2 atomic%, 5 atomic% ≦ v ≦ 7 atomic%, 2 atomic% ≦ w ≦ 1
0 atomic%, 0.5 atomic% ≦ t ≦ 4 atomic%.

The element M is Nb, Zr, Mo,
One or more of Cr, V, W, Ta, Hf, and Ti;
More preferably, it is a subspecies element.

Furthermore, the soft magnetic metallic glass alloy of the present invention preferably has an elongation of 20% or more.

According to the soft magnetic metallic glass alloy of the present invention having the above composition, the soft magnetic metallic glass alloy has a temperature of 20 K or more, and in some compositions, 40 K
Having the above-mentioned temperature interval ΔTx of the supercooled liquid, excellent soft magnetic properties and high workability can be exhibited. In particular, the soft magnetic metallic glass alloy of the present invention can
Since it exhibits a larger elongation than an e-Si-B amorphous soft magnetic alloy, excellent workability can be exhibited.

[0016]

Embodiments of the present invention will be described below with reference to the drawings. Conventionally, as an Fe-based alloy, F
Compositions such as e-PC, Fe-P-B, and Fe-Ni-Si-B are known to cause a glass transition. ΔTx is as extremely small as 25 K or less, and cannot be practically formed as a metallic glass alloy.

On the other hand, in the soft magnetic metallic glass alloy according to the present invention, the temperature interval ΔTx of the supercooled liquid is 20
It has a remarkable temperature interval of not less than K and, depending on the composition, not less than 40K to 60K, which is completely unexpected from the Fe-based alloy known from the findings so far. Moreover, the soft magnetic metallic glass alloy according to the present invention, which also has excellent properties at room temperature with respect to soft magnetism, is a completely new one not seen in previous findings, and until now, amorphous alloys can only be realized as ribbons. On the other hand, a bulk material is obtained, which is far more practical. Further, the soft magnetic metallic glass alloy of the present invention shows extremely large plastic deformation as compared with the conventional Fe-Si-B amorphous soft magnetic alloy,
It exhibits excellent workability.

As an example of the above metallic glass alloy, Fe
As a main component and other metals and semimetals. As metalloid elements, P, B, C,
At least one element of Ga is used.
The metalloid element may be at least one of P, B, C, Ga, and Si. Other metals include Nb, Zr, Mo, Cr, V, W, Ta,
One or more of Hf and Ti are preferably used. In particular, as other metals, Nb, Zr, Mo, Cr,
One or more and three or less of V, W, Ta, Hf, and Ti are more preferably used.

More specifically, a soft magnetic metallic glass alloy represented by the following composition formula can be exemplified. That is, the composition formula is
Is represented by _{(Fe 1-a Q a)} 100-xyzvw M x Ga y P z C v B w, the element Q is Co, and one or both of Ni, the element M is Nb, Zr, Mo, Cr, V, W, T
a, Hf, and at least one element of Ti, wherein x, y, z, v, and w indicating the composition ratio are atomic% and 0.5 atomic% ≦
x ≦ 15 atomic%, 0.5 atomic% ≦ y ≦ 8 atomic%, z ≦ 1
An alloy in which 5 at%, v ≦ 7 at%, 2 at% ≦ w ≦ 10 at%, and a is 0 ≦ a ≦ 0.15. In addition to the elements represented by the above composition formulas, unavoidable impurities may be contained.

Further, x, y, z, v, w indicating the composition ratio
Is 2 atomic% ≦ x ≦ 12 atomic%, 0.5 atomic% ≦ y ≦ 4
Atomic%, 5 atomic% ≦ z ≦ 12 atomic%, 2 atomic% ≦ v ≦ 7
Atomic%, 2 atomic% ≦ w ≦ 10 atomic%. Further, x, y, z, v and w indicating the composition ratios are as follows:
2 atom% ≦ x ≦ 12 atom%, 0.5 atom% ≦ y ≦ 4 atom%, 7 atom% ≦ z ≦ 12 atom%, 5 atom% ≦ v ≦ 7 atom%, 2 atom% ≦ w ≦ 10 atom %.

Fe is an element responsible for magnetism and is an essential element in the soft magnetic metallic glass alloy of the present invention. Also, Fe
Is part of one or both of Co and Ni elements Q
May be substituted. The composition ratio a of the element Q is 0 ≦ a ≦ 0.1
In the range of 5, a temperature interval ΔTx of the supercooled liquid of 20K or more can be obtained. The metalloid elements exemplified by Ga, P, C, and B are indispensable elements for the soft magnetic metallic glass alloy like Fe, and by adding these elements within the above composition range, the soft magnetic metal The temperature interval ΔTx of the supercooled liquid of the metallic glass alloy can be set to 20K or more. If the composition ratio of these metalloids is lower than the above composition range, the temperature interval ΔTx of the supercooled liquid cannot be increased to 20K or more, which is not preferable. Is undesirably reduced.

Further, Nb, Zr, Mo, Cr, V, W,
When the element M, which is one or more of Ta, Hf and Ti, is added, the temperature interval ΔTx of the supercooled liquid of the soft magnetic metallic glass alloy becomes larger, and the soft magnetic properties are also improved. The composition ratio x of the element M is preferably 0.5 atomic% or more and 15 atomic% or less, and more preferably 2.0 atomic% or more and 12 atomic% or less. If the composition ratio x of the element M is less than 0.5 at%, it is not preferable because the effect of the addition is not clearly seen, and if the composition ratio x of the element M exceeds 15 at%,
It is not preferable because the temperature interval ΔTx of the supercooled liquid becomes small and the saturation magnetization decreases. Further, in the soft magnetic metallic glass alloy, Nb, Zr, M
It is more preferable to add one or more and three or less elements of o, Cr, V, W, Ta, Hf, and Ti. If the number of types of the element M added to the soft magnetic metallic glass alloy exceeds three, it is not preferable because the soft magnetic metallic glass alloy itself becomes brittle.

As a specific example, a soft magnetic metallic glass alloy represented by the following composition formula can be exemplified. That is, the composition _{formula, (Fe 1-a Q a} ) 100-xyzvwt M x Ga y P z C v B w
Represented by Si _t, element Q is one or both either Co, the Ni, the element M is Nb, Zr, Mo, C
At least one of r, V, W, Ta, Hf, and Ti, and x, y, z, v, w, and t indicating a composition ratio are atomic%.
And 0.5 at% ≦ x ≦ 15 at%, 0.5 at% ≦ y
≦ 8 at%, z ≦ 15 at%, v ≦ 7 at%, 2 at%
≦ w ≦ 10 atomic%, t ≦ 15 atomic%, and a is 0 ≦ a
≤ 0.15. In addition to the elements represented by the above composition formulas, unavoidable impurities may be contained.

Further, x, y, z, v, w indicating the composition ratio
Is 2 atomic% ≦ x ≦ 12 atomic%, 0.5 atomic% ≦ y ≦ 4
Atomic%, 5 atomic% ≦ z ≦ 12 atomic%, 2 atomic% ≦ v ≦ 7
Atomic%, 2 atomic% ≦ w ≦ 10 atomic%, 0.5 atomic% ≦ t
The range may be ≦ 15 atomic%. Further, x, y, z, v and w indicating the above composition ratios are 2 atomic% ≦ x ≦ 12 atomic%, 0.5 atomic% ≦ y ≦ 4 atomic%, 7 atomic% ≦ z ≦ 12
Atomic%, 5 atomic% ≦ v ≦ 7 atomic%, 2 atomic% ≦ w ≦ 10
Atomic%, 0.5 atomic% ≦ t ≦ 4 atomic%.

The metalloid elements exemplified by Ga, P, C, B and Si are indispensable elements in the soft magnetic metallic glass alloy, and when these elements are added within the above composition range, the soft metal elements are softened. The temperature interval ΔTx of the supercooled liquid of the magnetic metallic glass alloy can be set to 20K or more. If the composition ratio of these metalloids is lower than the above composition range, the temperature interval ΔTx of the supercooled liquid cannot be increased to 20K or more, which is not preferable. Is undesirably reduced.

If the Si composition ratio t is too large, the temperature interval ΔT _x of the supercooled liquid disappears, so it is preferably 15% or less.
In particular composition ratio t of Si is 0.5 to 4% in atomic percent is preferred in that temperature interval [Delta] T _x of greater supercooled liquid is obtained.

Further, when the element M is added, the temperature interval ΔTx of the supercooled liquid becomes larger as described above, and the soft magnetic characteristics are also improved. The composition ratio x of the element M is preferably 0.5 atomic% or more and 15 atomic% or less, more preferably 2 atomic% or more and 12 atomic% or less for the same reason as described above. Further, the element M added to the soft magnetic metallic glass alloy
If the number of types exceeds 3, the soft magnetic metallic glass alloy itself becomes brittle, which is not preferable.

In any of these compositions,
In the present invention, the temperature interval ΔTx of the supercooled liquid is 2
0K or more or 35K or more, 40 to 5 depending on the composition
0K or more is obtained.

The soft magnetic metallic glass alloy according to the present invention is produced by melting and then casting, or by a quenching method using a single roll or twin rolls, furthermore, by a submerged spinning method or a solution extraction method, or by high pressure gas spraying. By law
It is manufactured in various shapes such as bulk, ribbon, linear, powder and the like. According to these manufacturing methods, a soft magnetic metallic glass alloy having a thickness and a diameter 10 times or more that of a conventionally known amorphous alloy can be obtained.

The soft magnetic metallic glass alloy of the above composition obtained by these methods has magnetism at room temperature and shows better magnetism by heat treatment. For this reason,
It is useful for various applications as a material having excellent soft magnetic properties. In addition, as for the manufacturing method, a suitable cooling rate is determined by the composition of the alloy, the means for manufacturing and the size, shape, etc. of the product, but usually a range of about 1 to 10 ⁴ K / s is a standard. It can be. And, in fact, the glass phase (gl
In the assy phase), Fe ₃ B, Fe ₂ B, F
It can be determined by confirming whether a phase such as e ₃ P is precipitated.

[0031]

EXAMPLE A predetermined amount of each of Fe and Ga, Fe-C alloy, Fe-P alloy, Mo, Nb, Cr, Co, B and Si was weighed, and these materials were subjected to high frequency induction under a reduced pressure Ar atmosphere. It was melted by a heating device to produce ingots of various compositions. The ingot is put into a crucible and melted, and the molten metal is blown out from a nozzle of the crucible into a rotating roll under a reduced-pressure Ar atmosphere to rapidly cool the roll by a single roll method. A ribbon of magnetic metallic glass alloy was obtained. As a comparative example, a ribbon of an amorphous soft magnetic alloy of Sample 11 having a composition of Fe ₇₈ Si ₉ B ₁₃ was manufactured.

Tables 1 and 2 show the composition of the ribbon of the obtained soft magnetic metallic glass alloy. The crystal structures of the soft magnetic metallic glass alloys of Samples 4 to 8 were analyzed by X-ray diffraction. The results are shown in FIGS. Sample 1
DSC measurement (Differential scanning caloriemetry: differential scanning calorimetry) was performed on the soft magnetic metallic glass alloys Nos. 10 to 10. The results are shown in FIGS. 3 to 6 and Tables 1 and 2.

As is clear from FIGS. 1 and 2, for example, the X-ray diffraction patterns of the ribbons of the soft magnetic metallic glass alloys of Samples 4 to 8 show a broad pattern, and the soft magnetic metallic glass It can be seen that the alloy has a structure mainly composed of an amorphous phase. Note that similar results were obtained for other samples. Further, as is apparent from FIGS. 3 to 6, DS of the soft magnetic metallic glass alloys of Samples 1 to 10 was used.
In the C curve, a curve shift (glass transition temperature T _g ) due to a glass transition is observed around 720 to 760 K, and 78
Heat generated by crystallization (crystallization onset temperature T _x) is observed around 0～810K. Table 1 shows the glass transition temperature T _g , crystallization start temperature T _x , and temperature interval ΔTx of the supercooled liquid of each sample. As described above, in the ribbons of the soft magnetic metallic glass alloys of Samples 1 to 10, the supercooled liquid region exists in a wide temperature range below the crystallization temperature Tx, and ΔTx = Tx−Tg
Indicate that the alloy having this composition has a high amorphous forming ability.

Next, the saturation magnetization (Ir) and the coercive force (Hc) of the soft magnetic metallic glass alloys of Samples 1 to 10 and the amorphous soft magnetic alloy of Sample 11 were measured using a VSM and a BH loop tracer. It was measured. Table 1 shows the results. From Table 1, M
Although the saturation magnetization (Ir) tends to decrease as the composition ratio of the elements (Mo, Nb, Cr) increases, the soft magnetic metallic glass alloys of Samples 1 to 10 still exhibit excellent soft magnetic properties. I understand.

Next, Vickers hardness and elongation of each sample were measured. Vickers hardness is 0.2455N load
(25 gf). The elongation rate is 4
The measurement was performed using a test piece having a length of 6 mm, a width of 0.7 to 0.8 mm, and a thickness of 20 to 30 μm under the conditions of 0 K / min. And a load of 38 MPa. Table 2 shows the results. 7 and 8 show the measurement results of the elongation percentage of Sample 4 and Sample 11, respectively.

As can be seen from Table 2, the Vickers hardness of each sample is 700 or more, indicating that the hardness is considerably high. As for the elongation, especially, the elongation of Sample 4 is 140%, which is 100 times or more the elongation of Sample 11 which is a comparative example.
From FIG. 7, the soft magnetic metallic glass alloy of Sample 11 is:
It shows a sharp increase from around 750K. Therefore, the soft magnetic metallic glass alloys of Samples 1 to 10 are of the conventional F
It has a hardness equal to or higher than that of the amorphous soft magnetic alloy having the composition of e ₇₈ Si ₉ B _13, and also has a high elongation percentage, indicating excellent workability.

[0037]

[Table 1]

[0038]

[Table 2]

[0039]

As described above in detail, the soft magnetic metallic glass alloy of the present invention has a (F) in which the temperature interval ΔTx of the supercooled liquid represented by the equation ΔTx = Tx−Tg is 20K or more.
_{e 1-a Q a) 100} -xyzvw M x Ga y P z C v B w of the composition formula (element Q is Co, and one or both of Ni, the element M is Nb, Zr, Mo, Cr, Co, V, W,
One or more of Ta, Hf, and Ti;
5 atomic% ≦ x ≦ 15 atomic%, 0.5 atomic% ≦ y ≦ 8 atomic%, z ≦ 15 atomic%, v ≦ 7 atomic%, 2 atomic% ≦ w ≦ 1
0 at%, and a is 0 ≦ a ≦ 0.15), which is excellent in soft magnetic properties and can exhibit high workability. In particular, the soft magnetic metallic glass alloy of the present invention has a hardness equal to or higher than that of a conventional Fe-Si-B amorphous soft magnetic alloy, and is far more than a conventional amorphous soft magnetic alloy. It has high elongation and can exhibit excellent workability.

The soft magnetic metallic glass alloy of the present invention has a ΔΔ
The temperature interval Δ of the supercooled liquid represented by the equation of Tx = Tx−Tg
(Fe _1-a Q _a ) _100-xyzvwt M with Tx of 20K or more
_{x Ga y P z C v B} w Si compositional formula (element Q of _t is Co, and one or both of Ni, the element M is Nb, Zr,
Mo, Cr, Co, V, W, Ta, Hf, and at least one element of Ti, 0.5 at% ≦ x ≦ 15 at%, 0.5 at% ≦ y ≦ 8 at%, z ≦ 15 atomic%, v
≦ 7 at%, 2 at% ≦ w ≦ 10 at%, t ≦ 15 at%, and a is 0 ≦ a ≦ 0.15), and is excellent in soft magnetic properties. High workability can be exhibited.

In particular, the soft magnetic metallic glass alloy of the present invention
While exhibiting a hardness equal to or higher than that of a conventional Fe-Si-B amorphous soft magnetic alloy, it has a much higher elongation than conventional amorphous soft magnetic alloys and exhibits excellent workability. be able to. Further, since Si is added, the temperature interval ΔT _x of the supercooled liquid can be further increased.

[Brief description of the drawings]

FIG. 1 is a diagram showing the results of X-ray diffraction measurement of Samples 4 and 5.

FIG. 2 is a diagram showing the results of X-ray diffraction measurement of Samples 6 to 8.

FIG. 3 is a diagram showing the results of DSC measurement of Samples 1 to 3.

FIG. 4 is a diagram showing the results of DSC measurement of Samples 4 and 5.

FIG. 5 is a diagram showing the results of DSC measurements of Samples 6 to 8.

FIG. 6 is a diagram showing the results of DSC measurement of Samples 9 to 10.

FIG. 7 is a diagram showing the relationship between the elongation percentage of sample 4 and temperature.

FIG. 8 is a diagram showing the relationship between the elongation percentage of sample 11 and temperature.

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Hisato Koshiba Alps Electric Co., Ltd., 1-7, Yutani Otsuka-cho, Ota-ku, Tokyo (72) Inventor Akihisa Inoue 35 Kawachi Moto Hasekura, Aoba-ku, Aoba-ku, Sendai City, Miyagi Prefecture. House 11-806

Claims (5)

[Claims] 1. A temperature interval ΔTx of a supercooled liquid represented by a formula of ΔTx = Tx−Tg (where Tx indicates a crystallization start temperature and Tg indicates a glass transition temperature) is 20K or more, and A soft magnetic metallic glass alloy characterized by being represented by a composition formula. (Fe _1-a Q a) except _{100-xyzvw M x Ga y P} z C v B w, the element Q is Co, and one or both of Ni, the element M is Nb, Zr, Mo, Cr, V , W, T
a, Hf, and at least one element of Ti, wherein x, y, z, v, and w indicating the composition ratio are atomic%, and 0.5 atomic% ≦
x ≦ 15 atomic%, 0.5 atomic% ≦ y ≦ 8 atomic%, z ≦ 1
5 atomic%, v ≦ 7 atomic%, 2 atomic% ≦ w ≦ 10 atomic%, and a is 0 ≦ a ≦ 0.15. 2. The composition ratio x, y, z, v,
w is atomic%, 2 atomic% ≦ x ≦ 12 atomic%, 0.5 atomic% ≦ y ≦ 4 atomic%, 5 atomic% ≦ z ≦ 12 atomic%, 2 atomic% ≦ v ≦ 7 atomic%, 2 atomic 2. The soft magnetic metallic glass alloy according to claim 1, wherein% ≦ w ≦ 10 atomic%. 3. The temperature interval ΔTx of the supercooled liquid represented by the formula ΔTx = Tx−Tg (where Tx represents the crystallization start temperature and Tg represents the glass transition temperature) is 20K or more, and A soft magnetic metallic glass alloy characterized by being represented by a composition formula. _{(Fe 1-a Q a)} 100-xyzvwt M x Ga y P z C v B w Si
_t However, the element Q is one or both of Co and Ni, and the element M is Nb, Zr, Mo, Cr, V, W, T
x, y, z, v, w, and t, which are one or more of a, Hf, and Ti, and indicate the composition ratio, are atomic%, and 0.5 atomic% ≦ x ≦ 15 atomic%; 5 atomic% ≦ y ≦ 8 atomic%, z
≦ 15 atomic%, v ≦ 7 atomic%, 2 atomic% ≦ w ≦ 10 atomic%, t ≦ 15 atomic%, and a is 0 ≦ a ≦ 0.15. 4. The composition ratios x, y, z, v,
w is atomic%, 2 atomic% ≦ x ≦ 12 atomic%, 0.5 atomic% ≦ y ≦ 4 atomic%, 5 atomic% ≦ z ≦ 12 atomic%, 2 atomic% ≦ v ≦ 7 atomic%, 2 atomic % ≦ w ≦ 10 atomic%, 0.5
The soft magnetic metallic glass alloy according to claim 3, wherein atomic% ≦ t ≦ 15 atomic%. 5. The element M includes Nb, Zr, Mo, C
The soft magnetic metallic glass alloy according to claim 1, wherein the soft magnetic metallic glass alloy is at least one element of at least one of r, V, W, Ta, Hf, and Ti.